FBAR Oscillator and MEMS Tunable VCSEL to Generate the Probe Lasers for Microfabricated Atomic Clock

Motoaki Hara, Satoshi Shinada, Yuichiro Yano, Tetsuya Ido, Zhijian Zhao, Masaya Toda, Takahito Ono, Horoyuki Ito

IEEE International Ultrasonics Symposium, IUS   2022-October   2022

Study of 3-GHz-band thin-film bulk acoustic resonator oscillators for microfabricated atomic clocks Reviewed

Motoaki Hara, Yuichiro Yano, Shinsuke Hara, Akifumi Kasamatsu, Hiroyuki Ito, Tetsuya Ido

2021 IEEE International Ultrasonics Symposium (IUS)   2021.9

Distributed time synchronization network under the cluster time system Reviewed

Yuichiro Yano, Motoaki Hara, Tetsuya Ido

2021.7

Micro-Device Technologies for Mass Production of Miniaturized Atomic Clock System Reviewed

Motoaki Hara, Yuichiro Yano, Shinsuke Hara, Akifumi Kasamatsu, Masaya Toda, Hiroyuki Ito, Takahito Ono, Tetsuya Ido

2021.7

Evaluation of New Solid Rubidium Source Using Atomic Clock Stabilization Loop Reviewed

Motoaki Hara, Yuichiro Yano, Masaya Toda, Takahito Ono, Tetsuya Ido

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)   2021.6

Reflection-type vapor cell for micro atomic clocks using local anodic bonding of 45° mirrors Reviewed

Hitoshi Nishino, Yuichiro Yano, Motoaki Hara, Masaya Toda, Masatoshi Kajita, Tetsuya Ido, Takahito Ono

Optics Letters   46 ( 10 )   2272 - 2272   2021.5

Super‐high‐frequency‐band injection‐locked two‐divider oscillator using thin‐film bulk acoustic resonator Reviewed

Motoaki Hara, Yuichiro Yano, Yuki Takahashi, Toshio Nishizawa, Shinsuke Hara, Akifumi Kasamatsu, Masanori Ueda, Hiroyuki Ito, Tetsuya Ido

Electronics Letters   57 ( 3 )   132 - 134   2021.1

FBAR-based Frequency Divider Oscillator for Lock-in Amplifier Free Atomic Stabilization Loop Reviewed

M. Hara, Y. Yano, S. Hara, A. Kasamatsu, H. Ito, T. Ido

IEEE International Ultrasonic Symposium 2020 (IUS2020)   2020.9

Micro-Device-Technologies toward Chip Level Integration of Microwave Atomic Clock System Reviewed

Y. Yano, M. Hara, M. Kajita, S. Hara, A. Kasamatsu, M. Toda, T. Ono, H. Ito, T. Ido

2020.7

Injection Locking Type 1/2 Frequency Divider Employing Piezoelectric MEMS Resonator for Simplifying the Micro Atomic Clock System Reviewed

Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Hiroyuki Ito, Tetsuya Ido

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)   2020.1

Drift-free FBAR oscillator using an atomic-resonance-stabilization technique Reviewed

Motoaki Hara, Yuichiro Yano, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Masaya Toda, Hiroyuki Ito, Takahito Ono, Tetsuya Ido

The 2019 IEEE International Ultrasonics Symposium   2019.10

Fast numerical analysis of the time response in coherent population trapping resonance based on Galerkin spectral method Reviewed

Yano Yuichiro, Kajita Masatoshi, Ido Tetsuya, Hara Motoaki

JAPANESE JOURNAL OF APPLIED PHYSICS   58   2019.7

A Reflection Type Vapor Cell Based on Local Anodic Bonding of 45° Mirrors for Micro Atomic Clocks Reviewed

Hitoshi Nishino, Masaya Toda, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara, Takahito Ono

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII   1530 - 1532   2019.6

A Reflection-Type Vapor Cell for Micro Atomic Clock Reviewed

Hitoshi Nishino, Masaya Toda, Yoshiaki Kanamori, Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara, Takahito Ono

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   2019-January   915 - 918   2019.1

A reflection-type vapor cell using anisotropic etching of silicon for micro atomic clocks Reviewed

Hitoshi Nishino, Motoaki Hara, Yuichiro Yano, Masaya Toda, Yoshiaki Kanamori, Masatoshi Kajita, Tetsuya Ido, Takahito Ono

Applied Physics Express   12 ( 7 )   2019

Microwave oscillator using piezoelectric thin-film resonator aiming for ultraminiaturization of atomic clock Reviewed

M. Hara, Y. Yano, M. Kajita, H. Nishino, Y. Ibata, M. Toda, S. Hara, A. Kasamatsu, H. Ito, T. Ono, T. Ido

Review of Scientific Instruments   89 ( 10 )   105002   2018.10

FBAR oscillator stabilized by Rb atomic resonator for SHF/EHF band wireless devices Reviewed

M. Hara, Y. Yano, M. Kajita, S. Hara, A. Kasamatsu, M. Toda, H. Ito, T. Ono, T. Ido

the 2018 IEEE International Ultrasonics Symposium   2018.10

Coherent Population Trapping Atomic Clock by Phase Modulation to Utilize a 3.5 GHz-band-FBAR VCO Reviewed

Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara

2018 IEEE International Frequency Control Symposium   2018.5

Micro atomic frequency standards employing an integrated FBAR-VCO oscillating on the ⁸⁷RB clock frequency without a phase locked loop Reviewed

M. Hara, Y. Yano, M. Kajita, H. Nishino, Y. Ibata, M. Toda, S. Hara, A. Kasamatsu, H. Ito, T. Ono, T. Ido

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   2018-January   715 - 718   2018.4

FBAR-based 3.4 GHz Oscillator without Frequency Multiplications Aiming for an Integrated Atomic Clock Chip Reviewed

M. Hara, Y. Yano, M. Kajita, S. Hara, A. Kasamatsu, M. Toda, H. Ito, T. Ono, T. Ido

the 2018 European Frequency and Time Seminar   2018.4

MICRO ATOMIC FREQUENCY STANDARDS EMPLOYING AN INTEGRATED FBAR-VCO OSCILLATING ON THE 87RB CLOCK FREQUENCY WI Reviewed

M. Hara, Y. Yano, M. Kajita, H. Nishino, Y. Ibata, M. Toda, S. Hara, A. Kasamatsu, H. Ito, T. Ono, T. Ido

The 31st IEEE International Conference on Micro Electro Mechanical Systems   2018.1

FBAR Oscillator Stabilized by Rb Atomic Resonator for SHF/EHF-Band Wireless Devices Reviewed

Motoaki Hara, Yuichiro Yano, Hiroyuki Ito, Masaya Toda, Takahito Ono, Masatoshi Kajita, Shinsuke Hara, Akifumi Kasamatsu, Tetsuya Ido

IEEE International Ultrasonics Symposium, IUS   2018-January   2018

Coherent population trapping atomic clock by phase modulation for wide locking range Reviewed

Yuichiro Yano, Masatoshi Kajita, Tetsuya Ido, Motoaki Hara

APPLIED PHYSICS LETTERS   111 ( 20 )   2017.11

Theoretical and experimental study of Rb coherent population trapping atomic clock with phase modulation detection Reviewed

Yuichiro Yano, Motoaki Hara, Masatoshi Kajita, Tetsuya Ido

2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings   277   2017.10

Highly Sensitive Wireless Sensor Node Using Surface Acoustic Wave Devices for Structural Health Monitoring Reviewed

Zhongqiao Bao, Motoaki Hara, Hiroki Kuwano

ELECTRONICS AND COMMUNICATIONS IN JAPAN   99 ( 10 )   81 - 87   2016.10

Nonlinear restoring force of spring with stopper for ferroelectric dipole electret-based electrostatic vibration energy harvesters Reviewed

H. Asanuma, M. Hara, H. Oguchi, H. Kuwano

AIP ADVANCES   6 ( 7 )   075286   2016.7

Micromachined multiple focused-ion-beam devices Reviewed

Ryo Yoshida, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics   34 ( 2 )   2016.3

Micromachined multiple focused-ion-beam devices Reviewed

Ryo Yoshida, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   34 ( 2 )   2016.3

Investigation of Interface between Ge Electrodes and Ionic Liquid Electrolyte for Development of Electric Double Layer Capacitors Reviewed

R. M. Abeysinghe, H. Oguchi, M. Hara, H. Kuwano

2016 IEEE 11TH ANNUAL INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)   2016

Oscillator based surface acoustic wave gyroscopes Reviewed

Yusuke Musha, Motoaki Hara, Hiroki Asano, Hiroki Kuwano

2016 IEEE 11TH ANNUAL INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)   2016

Lead-Free (K,Na)NbO3 Impact-Induced-Oscillation Microenergy Harvester Reviewed

Le Van Minh, Motoaki Hara, Hiroki Kuwano

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   24 ( 6 )   1887 - 1895   2015.12

Highly Piezoelectric MgZr Co-Doped Aluminum Nitride-Based Vibrational Energy Harvesters Reviewed

Le Van Minh, Motoaki Hara, Tsuyoshi Yokoyama, Tokihiro Nishihara, Masanori Ueda, Hiroki Kuwano

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL   62 ( 11 )   2005 - 2008   2015.11

Air gap optimization for output power and band width in out-of-plane vibration energy harvesters employing electrets Reviewed

H. Asanuma, M. Hara, H. Oguchi, H. Kuwano

JOURNAL OF MICROMECHANICS AND MICROENGINEERING   25 ( 10 )   104013 - 104013   2015.10

Highly sensitive strain sensors using surface acoustic wave on aluminum nitride thin film for wireless sensor networks Reviewed

Z. Bao, M. Hara, H. Kuwano

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015   1239 - 1242   2015.8

Surface-Acoustic-Wave-Driven Directional Atomizers Integrated With Pico-Liter Micropumps Reviewed

Shun Sugimoto, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   24 ( 3 )   696 - 702   2015.6

Current sensors using Fe-B-Nd-Nb magnetic metallic glass micro-cantilevers Reviewed

Tuan Anh Phan, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

MICROELECTRONIC ENGINEERING   135   28 - 31   2015.3

MICROFABRICATED ELECTROSTATIC PLANAR LENS ARRAY AND EXTRACTORS FOR MULTI-FOCUSED ION BEAM SYSTEM USING IONIC LIQUID ION SOURCE EMITTER ARRAY Reviewed

Ryo Yoshida, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015)   93 - 96   2015

Investigation of surface-acoustic-wave atomization using phase Doppler anemometry Reviewed

Taiki Hirotomto, Motoaki Hara, Hiroki Kuwano, Taku Kudo, Hideaki Kobayashi

2015 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)   2015

C-axis tilted AlN films for vibration energy harvesters Reviewed

H. H. Nguyen, M. Hara, H. Oguchi, H. Kuwano

15TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2015)   660   2015

PIEZOELECTRIC MICRO ENERGY HARVESTERS EMPLOYING ADVANCED (MG,ZR)-CODOPED ALN THIN FILM Reviewed

L. V. Minh, M. Hara, H. Kuwano, T. Yokoyama, T. Nishihara, M. Ueda

2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015)   1094 - 1097   2015

A self-converging atomized mist spray device using surface acoustic wave Reviewed

Atsushi Yabe, Yuichiro Hamate, Motoaki Hara, Hiroyuki Oguchi, Sumito Nagasawa, Hiroki Kuwano

MICROFLUIDICS AND NANOFLUIDICS   17 ( 4 )   701 - 710   2014.10

Arrayed micro ion source with ionic liquid for flexible and concurrent MEMS fabrication Reviewed

Tatsuya Suzuki, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

SENSORS AND ACTUATORS A-PHYSICAL   215   161 - 166   2014.8

New output power estimation method for cantilever-based piezoelectric energy harvesters Reviewed

Motoaki Hara, Le Van Minh, Hiroyuki Oguchi, Hiroki Kuwano

JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 7 )   2014.7

INVESTIGATION OF DOMINANT FACTORS TO CONTROL C-AXIS TILT ANGLE OF ALN THIN FILMS FOR EFFICIENT ENERGY HARVESTING Reviewed

Qi Wang, Hiroyuki Oguchi, Motoaki Hara, Hiroki Kuwano

2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   636 - 639   2014

SURFACE-ACOUSTIC-WAVE DRIVEN POINT SOURCE ATOMIZER INTEGRATED WITH PICOLITER MICRO PUMPS FOR POLYMERIC NANOPARTICLES SYNTHESIS Reviewed

Shun Sugimoto, Motoaki Hara, Hiroyuki Oguchi, Atsushi Yabe, Hiroki Kuwano

2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   1043 - 1046   2014

CONCURRENT REACTIVE ION ETCHING EMPLOYING MICROMACHINED IONIC LIQUID ION SOURCE ARRAY Reviewed

Ryo Yoshida, Motoaki Hara, Hiroyuki Oguchi, Tatsuya Suzuki, Hiroki Kuwano

2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   463 - 466   2014

Q-enhancement with electrode materials in the FBAR for timing devices Reviewed

Motoaki Hara, Hiroki Kuwano

2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)   2023 - 2026   2014

A MICRO-STRUCTURED SI-BASED ELECTRODES FOR HIGH CAPACITY ELECTRICAL DOUBLE LAYER CAPACITORS Reviewed

Valdas Krikscikas, Hiroyuki Oguchi, Hiroshi Yanazawa, Motoaki Hara, Hiroki Kuwano

14TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2014)   557   2014

Electrostatic Force-induced Broadband Effect in Electret-based Vertical Vibration Energy Harvesters using Fine-grained Stainless Steel Oscillator Reviewed

H. Asanuma, M. Hara, H. Oguchi, H. Kuwano

14TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2014)   557   2014

Porous Ge based Electric Double Layer Capacitors with High Compatibility for Low Threshold Voltage Diode Rectifiers Reviewed

A. Sekiguchi, M. Hara, H. Oguchi, H. Kuwano

14TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2014)   557   2014

HIGH PERFORMANCE NONLINEAR MICRO ENERGY HARVESTER INTEGRATED WITH (K,Na)NbO3/Si COMPOSITE QUAD-CANTILEVER Reviewed

Le Van Minh, Motoaki Hara, Hiroki Kuwano

2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   397 - 400   2014

Concurrent life-course trajectories of employment and marijuana-use: Exploring interdependence of longitudinal outcomes Reviewed

Motoaki Hara, David Y. C. Huang, Robert E. Weiss, Yih-Ing Hser

JOURNAL OF SUBSTANCE ABUSE TREATMENT   45 ( 5 )   426 - 432   2013.11

Fe-B-Nd-Nb metallic glass thin films for microelectromechanical systems Reviewed

T. A. Phan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, H. Kuwano

Applied Physics Letters   103 ( 18 )   181901   2013.10

Ferroelectric dipole electrets for output power enhancement in electrostatic vibration energy harvesters Reviewed

Haruhiko Asanuma, Hiroyuki Oguchi, Motoaki Hara, Ryo Yoshida, Hiroki Kuwano

APPLIED PHYSICS LETTERS   103 ( 16 )   2013.10

Surface acoustic wave based sensors employing ionic liquid for hydrogen sulfide gas detection Reviewed

Yoshinobu Murakawa, Motoaki Hara, Hiroyuki Oguchi, Yuichiro Hamate, Hiroki Kuwano

Microsystem Technologies   19 ( 8 )   1255 - 1259   2013.8

Micro-Energy Harvesters Integrated with a Quatrefoil-Shaped Proof Mass Suspended by Multiple (K,Na)NbO3 Beams Reviewed

Le Van Minh, Motoaki Hara, Hiroki Kuwano

JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 7 )   2013.7

Bulk micromachined energy harvesters employing (K, Na)NbO3 thin film Reviewed

Le Van Minh, Motoaki Hara, Fumimasa Horikiri, Kenji Shibata, Tomoyoshi Mishima, Hiroki Kuwano

Journal of Micromechanics and Microengineering   23 ( 3 )   2013.3

A thin-film bulk acoustic resonator and filter with optimal edge shapes for mass production Reviewed

Motoaki Hara, Masanori Ueda, Yoshio Satoh

ULTRASONICS   53 ( 1 )   90 - 96   2013.1

Micromachined Pyroelectric Probe for Non-Contact Thermal Diagnostic Systems Reviewed

Kenji Suita, Motoaki Hara, Shinya Ishikawa, Katsuhiro Tanaka, Sumito Nagasawa, Hiroki Kuwano

JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING   7 ( 2 )   95 - 102   2013

IONIC-LIQUID MICRO ION SOURCE ARRAY FOR FLEXYBLE CONCURRENT MEMS PROCESS Reviewed

Tatsuya Suzuki, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013)   315 - 318   2013

LEAD-FREE (K,Na)NbO3 BASED IMPACT TYPE ENERGY HARVESTERS INTEGRATED WITH A CYLINDRICAL CAVITY FOR METAL BALL Reviewed

Le Van Minh, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013)   833 - 836   2013

Oscillator-based strain gauges employing surface acoustic wave resonators for wireless sensor network Reviewed

Tomokatsu Konno, Motoaki Hara, Hiroki Kuwano

2013 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)   1930 - 1933   2013

High output power AlN vibration-driven energy harvesters Reviewed

Z. Cao, J. He, Q. Wang, M. Hara, H. Oguchi, H. Kuwano

13TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2013)   476   2013

Ferroelectric Dipole Electrets Prepared from Soft and Hard PZT Ceramics in Electrostatic Vibration Energy Harvesters Reviewed

H. Asanuma, H. Oguchi, M. Hara, H. Kuwano

13TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2013)   476   2013

A spontaneous polarization electret for electrostatic vibration energy harvesting Reviewed

H. Asanuma, H. Oguchi, M. Hara, H. Kuwano

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013   1332 - 1335   2013

A new metallic glass Fe-B-Nd-Nb thin film material for micro sensors and actuators: Fabrication and characterization Reviewed

P. A. Tuan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, H. Kuwano

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013   1040 - 1043   2013

Power Estimation for Piezoelectric Energy Harvesters in Flexure Mode with Large Displacement Amplitude Reviewed

M. Hara, L. V. Minh, H. Oguchi, H. Kuwano

13TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2013)   476   2013

Miniaturised multi-beam (K, Na) NbO3-based energy harvester Reviewed

LV Minh, M Hara, H Kuwano

Proceedings of PowerMEMS 2012   2012.12

Stacking Electrets for Electrostatic Vibration Energy Harvesters Reviewed

Y Wada, H Oguchi, M Hara, H Asanuma, H. Kuwano

Proceedings of PowerMEMS 2012   2012.12

Experimental Study of Highly Sensitive Sensor Using a Surface Acoustic Wave Resonator for Wireless Strain Detection Reviewed

Bao Zhongqing, Motoaki Hara, Misato Mitsui, Koji Sano, Sumito Nagasawa, Hiroki Kuwano

JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 7 )   2012.7

Spurious Suppression without Energy Dissipation in Aluminum-Nitride-Based Thin-Film Bulk Acoustic Resonator Using Thin Ring on Electrode Edge Reviewed

Motoaki Hara, Hiroki Kuwano

JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 7 )   2012.7

Use of Fluorine-Doped Silicon Oxide for Temperature Compensation of Radio Frequency Surface Acoustic Wave Devices Reviewed

Satoru Matsuda, Motoaki Hara, Michio Miura, Takashi Matsuda, Masanori Ueda, Yoshio Satoh, Ken-ya Hashimoto

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL   59 ( 1 )   135 - 138   2012.1

Micro fabrication development of a vibration-based sputtered PZT thin film micro energy harvester Reviewed

K. Shibata, S. Ishikawa, K. Tanaka, S. Nagasawa, Z. Cao, H. Oguchi, M. Hara, H. Kuwano

Proceedings of IEEE Sensors   2012

Correlation Between Temperature Coefficient of Elasticity and Fourier Transform Infrared Spectra of Silicon Dioxide Films for Surface Acoustic Wave Devices Reviewed

Satoru Matsuda, Motoaki Hara, Michio Miura, Takashi Matsuda, Masanori Ueda, Yoshio Satoh, Ken-ya Hashimoto

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL   58 ( 8 )   1684 - 1687   2011.8

A Precise Nonlinear Simulation for SAW Duplexers Considering Nonlinear Elasticity Reviewed

S. Inoue, S. Mitobe, M. Hara, M. Iwaki, J. Tsutsumi, H. Nakamura, M. Ueda, Y. Satoh

2011 41ST EUROPEAN MICROWAVE CONFERENCE   599 - 602   2011

Application of Fluorine Doped SiO2 Films for Temperature Compensated SAW Devices Reviewed

S. Matsuda, M. Hara, M. Miura, T. Matsuda, M. Ueda, Y. Satoh, K. Hashimoto

2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)   76 - 78   2011

A Design Technique to Enhance Isolation of Duplexer in Single-ended and Differential modes Reviewed

J. Tsutsumi, S. Inoue, M. Iwaki, M. Hara, H. Nakamura, K. Matsumoto, M. Ueda, Y. Satoh

2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)   1833 - 1836   2011

A Nonlinear Elastic Model for Predicting Triple Beat in SAW Duplexers Reviewed

S. Inoue, M. Hara, M. Iwaki, J. Tsutsumi, H. Nakamura, M. Ueda, Y. Satoh, S. Mitobe

2011 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS)   1837 - 1841   2011

Super-High-Frequency Band Filters Configured with Air-Gap-Type Thin-Film Bulk Acoustic Resonators Reviewed

Motoaki Hara, Tsuyoshi Yokoyama, Takeshi Sakashita, Shinji Taniguchi, Masafumi Iwaki, Tokihiro Nishihara, Masanori Ueda, Yoshio Satoh

JAPANESE JOURNAL OF APPLIED PHYSICS   49 ( 7 )   2010

A study of the thin film bulk acoustic resonator filters in several ten GHz band Reviewed

Motoaki Hara, Tsuyoshi Yokoyama, Takeshi Sakashita, Masanori Ueda, Yoshio Satoh

Proceedings - IEEE Ultrasonics Symposium   2009

Development of an X-Band Filter Using Air-Gap-Type Film Bulk Acoustic Resonators Reviewed

Masanori Ueda, Motoaki Hara, Shinji Taniguchi, Tsuyoshi Yokoyama, Tokihiro Nishihara, Ken-ya Hashimoto, Yoshio Satoh

JAPANESE JOURNAL OF APPLIED PHYSICS   47 ( 5 )   4007 - 4010   2008.5

K-band Ladder Filters Employing Air-Gap type Thin Film Bulk Acoustic Resonators Reviewed

Tsuyoshi Yokoyama, Motoaki Hara, Masanori Ueda, Yoshio Satoh

2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX   598 - 601   2008

X-band filters utilizing A1N thin film bulk acoustic resonators Reviewed

Motoaki Hara, Tsuyoshi Yokoyama, Masanori Ueda, Yoshio Satoh

2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6   1152 - 1155   2007

MEMS-based thin film bulk acoustic resonator for wireless medical sensing system Reviewed

Motoaki Hara, Masayoshi Esashi

FUTURE MEDICAL ENGINEERING BASED ON BIONANOTECHNOLOGY, PROCEEDINGS   331 - +   2006

Surface micromachined AlN thin film 2 GHz resonator for CMOS integration Reviewed

M Hara, J Kuypers, T Abe, M Esashi

SENSORS AND ACTUATORS A-PHYSICAL   117 ( 2 )   211 - 216   2005.1

Rotational infrared polarization modulator using a MEMS-based air turbine with different types of journal bearing Reviewed

Motoaki Hara, Shuji Tanaka, Masayoshi Esashi

Journal of Micromechanics and Microengineering   13 ( 2 )   223 - 228   2003.3

Alminium nitride based thin film bulk acoustic resonator using germanium sacrificial layer etching Reviewed

M Hara, J Kuypers, T Abe, M Esashi

BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2   1780 - 1783   2003

MEMS based thin film 2 GHz resonator for CMOS integration Reviewed

M Hara, J Kuypers, T Abe, M Esashi

2003 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3   1797 - 1800   2003

Mechanical polarization modulator using micro-turbo machinery for Fourier transform infrared spectroscopy Reviewed

S Tanaka, M Hara, M Esashi

SENSORS AND ACTUATORS A-PHYSICAL   96 ( 2-3 )   215 - 222   2002.2

Micro-turbomachine driving an infrared polarization modulator for Fourier transform infrared spectroscopy Reviewed

M Hara, S Tanaka, M Esashi

14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST   282 - 285   2001

Manufacturing and evaluation technology for mass production of MEMS gas cells of atomic clocks

原基揚, 清瀬俊, 島田弥力, 小田切雄介, 平井義和, 波多野智, 福岡政大, 矢野雄一郎, 五箇繁善, 井戸哲也

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)   41st   2024

Elemental Technologies for Beyond 5G: Space-Time Synchronization Technologies for Beyond 5G

原基揚, 矢野雄一郎, 安田哲, 福岡政大, 志賀信泰, 市川隆一, 井戸哲也

情報通信研究機構研究報告   70 ( 1 )   2024

時刻同期ネットワークにおける複数の小型原子時計を用いた周波数安定化の検討—Investigation of frequency stabilization using multiple small atomic clocks in a time synchronization network—電子回路研究会・次世代周波数精密計測の基礎と応用

矢野 雄一郎, 原 基揚, 花土 ゆう子, 井戸 哲也, 柿沼 優人, 川口 貴弘, 織田 健太郎, 石崎 孝幸, 川野 真裕, 百武 健二, 橋本 直也, 大塚 信吾, 倉田 陽介, 岩本 哲也

電気学会研究会資料. ECT = The papers of technical meeting on electronic circuits, IEE Japan / 電子回路研究会 [編]   2023 ( 48-53 )   1 - 4   2023.9

Investigation of frequency stabilization using multiple small atomic clocks in a time synchronization network

矢野雄一郎, 原基揚, 花土ゆう子, 井戸哲也, 柿沼優人, 川口貴弘, 織田健太郎, 石崎孝幸, 川野真裕, 百武健二, 橋本直也, 大塚信吾, 倉田陽介, 岩本哲也

電気学会研究会資料(Web)   ( ECT-23-048-053 )   2023

原子時計チップを利用した分散型時刻同期ネットワークの検討

Yuichiro Yano, Tetsuya Ido, Motoaki Hara

2022.9

CLIFS: Chip Level Integrated Frequency Standard, How do we approach the cliff of CLIFS? Invited

Motoaki Hara

2022.9

原子時計チップの開発進捗と近年の時刻同期システムの動向

原 基揚

弾性波素子技術コンソーシアム第7回研究会   2022.6

B5G/6G に向けた超精密周波数標準チップの開発 Reviewed

原 基揚, 矢野 雄一郎, 戸田 雅也, 品田 聡, 伊藤 浩之, 小野 崇人, 井戸 哲也

圧電材料デバイスシンポジウム2022   2022.1

原子時計チップと量子デバイスへの展開 Reviewed

原 基揚

電気学会全国大会シンポジウム   2022.1

超小型原子時計の量産化に向けた3.5GHz帯圧電薄膜発振器の研究開発 Reviewed

原 基揚, 矢野 雄一郎, 原 紳介, 笠松 章史, 戸田 雅也, 伊藤 浩之, 小野 崇人, 井戸 哲也

第38回「センサマイクロマシンと応用システム」シンポジウム   2021.11

800nm波長帯域面発光レーザー素子のための可動式誘電体多層膜ミラーチップ Reviewed

趙 智健, 戸田 雅也, 原 基揚, 品田 聡, 小野 崇人

第38回「センサマイクロマシンと応用システム」シンポジウム   2021.11

量子エレクトロニクスと弾性波素子技術－原子時計チップの開発から－

原 基揚

弾性波素子技術コンソーシアム第４回研究会   2021.9

マイクロ波原子時計チップの開発進捗

原基揚, 矢野雄一郎, 戸田雅也, 原紳介, 笠松章史, 伊藤浩之, 小野崇人, 井戸哲也

圧電材料デバイスシンポジウム2021   2021.1

Incorporation tests of micromachined gas cell using new solid Rb source into atomic clock system Reviewed

Motoaki Hara, Yuichiro Yano, Masaya Toda, Takahito Ono, Tetsuya Ido

2020.11

アジ化ルビジウムを用いた原子時計用マイクロガスセルの作製 Reviewed

原 基揚, 矢野 雄一郎, 戸田 雅也, 小野 崇人, 井戸 哲也

第37回「センサマイクロマシンと応用システム」シンポジウム   2020.10

スマホに載る原子時計実現へのシナリオ

原 基揚

日経エレクトロニクス   2020.9

原子時計のチップ化が導く超高精度デジタルツイン

原 基揚

日経エレクトロニクス   2020.7

原子時計チップ─新たなマイクロデバイスとしての可能性─ Reviewed

原 基揚

電子情報通信学会機関紙   2020.4

小型原子時計のためのガスセルの開発 Reviewed

西野 仁, 戸田雅也, 矢野雄一郎, 梶田雅稔, 井戸哲也, 原 基揚, 小野崇人

圧電材料デバイスシンポジウム2020   2020.1

マイクロ波原子時計チップの検討

原 基揚, 矢野 雄一郎, 梶田 雅稔, 井戸 哲也

圧電材料デバイスシンポジウム2020   2020.1

Injection locking MEMS oscillator for self-oscillating atomic clock system

2019.11

Injection-Lock-Type BAW Oscillator Aiming for Self-Oscillating Atomic Clock

M. Hara, Y. Yano, M. Kajita, S. Hara, A. Kasamatsu, H. Ito, T. Ido

2019.11

Ultra‐compact atomic clock system employing a GHz‐band piezoelectric film resonator

原基揚

応用物理   88 ( 7 )   456‐459   2019.7

原子時計チップの開発とその展望

原基揚

クリーンテクノロジー   29 ( 5 )   52‐56   2019.5

Time evolution analysis of Coherent Population Trapping resonance for atomic clock chip

YANO Yuichiro, KAJITA Masatoshi, IDO Tetsuya, HARA Motoaki

超音波エレクトロニクスの基礎と応用に関するシンポジウム(CD-ROM)   39th   ROMBUNNO.2P2‐14   2018.10

Evaluation of FBAR-VCOs and MEMS gas cells using a desktop scale atomic clock testbench

原 基揚, 矢野 雄一郎, 梶田 雅稔, 西野 仁, 井端 泰大, 朱 敏杰, Latif Imran, 戸田 雅也, 小野 崇人, 井戸 哲也

「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   34   4p   2017.10

Integrated VCOs employing FBARs for direct oscillation of Rb clock frequency

HARA Motoaki, YANO Yuichiro, KAJITA Masatoshi, HARA Shinsuke, KASAMATSU Akifumi, ITO Hiroyuki, IDO Tetsuya

超音波エレクトロニクスの基礎と応用に関するシンポジウム(CD-ROM)   38th   ROMBUNNO.1J3‐3   2017.10

時間応答を考慮したCoherent Poulation Trapping共鳴の検出方法の検討

矢野雄一郎, 原基揚, 梶田雅稔, 井戸哲也

応用物理学会春季学術講演会講演予稿集(CD-ROM)   64th   ROMBUNNO.17p‐418‐1   2017.3

Design of PLL-less 3.4 GHz band VCOs for ultra-small atomic clock chip

原 基揚, 矢野 雄一郎, 梶田 雅稔, 井戸 哲也

「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   33   1 - 4   2016.10

Study of detection method of CPT reosonance for enhancing frequency stability of chip-scale atomic clocks

矢野雄一郎, 原基揚, 梶田雅稔, 井戸哲也

電気学会電子回路研究会資料   ECT-16 ( 59-67 )   13‐15   2016.9

Design of PLL-free 3.4 GHz band VCOs for atomic clock chips

原基揚, 矢野雄一郎, 梶田雅稔, 井戸哲也

電気学会電子回路研究会資料   ECT-16 ( 59-67 )   17‐20   2016.9

表面弾性波共振子を利用したマルチセンサモジュールのための超小型角速度センサの開発

原基揚

村田学術振興財団年報   ( 30 )   242‐251   2016.6

弾性表面波共振子を利用した超小型角速度センサ

武舎祐輔, 原基揚, 桑野博喜

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)   32nd   ROMBUNNO.28PM1-A-3   2015.10

28pm3-F-2 Development of high performance AlN-based piezoelectric films

Nguyen Hoang Hung

2015 ( 7 )   "28pm3 - F-2-1"-"28pm3-F-2-2"   2015.10

マイクロマシニングによるマルチ集束イオンビームデバイス作製法の研究

吉田凌, 清水康司, 原基揚, 大口裕之, 桑野博喜

精密工学会大会学術講演会講演論文集   2015 ( 0 )   ROMBUNNO.I70 - 560   2015.8

圧電薄膜を用いた高出力振動発電機の開発

今野理洋, 原基揚, VAN MINH Le, 桑野博喜

材料とプロセス(CD-ROM)   28 ( 1 )   ROMBUNNO.D12   2015.3

29pm3-PN-37 Cantilever based energy harvesters using Mg-Zr-codoped aluminum nitride with high piezoelectricity

Le Van Minh, Hara Motoaki, Yokoyama Tsuyoshi, Nishihara Tokihiro, Ueda Masanori, Kuwano Hiroki

The Proceedings of the Symposium on Micro-Nano Science and Technology   2015 ( 0 )   _29pm3 - PN--_29pm3-PN-   2015

Highly sensitive wireless sensor node using surface acoustic wave devices for structural health monitoring

Zhongqing Bao, Motoaki Hara, Hiroki Kuwano

IEEJ Transactions on Sensors and Micromachines   135 ( 9 )   367 - 371   2015

表面弾性波を用いた超小型ジャイロセンサの検討

武舎祐輔, 原基揚, 桑野博喜

日本機械学会東北支部総会・講演会講演論文集(CD-ROM)   50th   ROMBUNNO.228   2015

Directional Spraying Systems Employing Surface Acoustic Wave Resonators

SUGIMOTO Shun, HARA Motoaki, OGUCHI Hiroyuki, KUWANO Hiroki

超音波エレクトロニクスの基礎と応用に関するシンポジウム講演予稿集   35th   205 - 206   2014.12

タイミングデバイス用圧電薄膜共振子における電極材料によるQ値改善の検討

原基揚, 桑野博喜

日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM)   6th   ROMBUNNO.21PM1-A4   2014.10

ZnO/ステンレス構造を有する振動型エナジーハーベスタの試作

細川翔多, 原基揚, 大口裕之, 桑野博喜

日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM)   6th   ROMBUNNO.21PM3-PM013   2014.10

ステンレス箔振動子を用いた静電誘導型の振動発電素子の発電量向上の検討

浅沼春彦, 大口裕之, 原基揚, 桑野博喜

日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM)   6th   ROMBUNNO.22AM2-E2   2014.10

ステンレス板ばね構造を有するAlN圧電薄膜発電機

HE Jianjun, 原基揚, 桑野博喜

日本機械学会マイクロ・ナノ工学シンポジウム講演論文集(CD-ROM)   6th   ROMBUNNO.22AM2-E4   2014.10

300MHz帯表面弾性波共振器を利用した発振器型ひずみセンサ

今野智一, BAO Zhongqing, 原基揚, 桑野博喜

日本機械学会年次大会講演論文集(CD-ROM)   2014   ROMBUNNO.J2230204   2014.9

磁気駆動型マイクロ電流センサの研究

千葉由孝, 大口裕之, 原基揚, 桑野博喜

日本機械学会年次大会講演論文集(CD-ROM)   2014   ROMBUNNO.J2230205   2014.9

イオン液体を用いた並列型マイクロイオン源による反応性イオンエッチングの検討

吉田凌, 原基揚, 大口裕之, 鈴木達也, 桑野博喜

日本機械学会東北支部総会・講演会講演論文集(CD-ROM)   49th   ROMBUNNO.105   2014.3

窒化アルミニウム圧電薄膜を用いた表面弾性波ひずみセンサの開発

BAO Zhongqing, 原基揚, 桑野博喜

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)   31st   ROMBUNNO.20PM3-PS061   2014

3J4-2 Micro Energy Harvester with (K,Na)NbO_3/Silicon Composite Cantilevers(High Power Ultrasound, Sonochemistry, Ocean Acoustics)

Minh Le Van, Hara Motoaki, Kuwano Hiroki

Proceedings of Symposium on Ultrasonic Electronics   34   585 - 586   2013.11

2P4-18 Output Estimation and Demonstration of Cantilever based Energy Harvesters(Poster Session)

Hara Motoaki, Minh Le Van, Oguchi Hiroyuki, Kuwano Hiroki

Proceedings of Symposium on Ultrasonic Electronics   34   297 - 298   2013.11

Effect of magneto anisotropy of soft magnets on sensitivity of compact current sensors

千葉 由孝, 大口 裕之, 原 基揚

「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   30   1 - 4   2013.11

Fe-B-Nd-Nb magnetic metallic glass based non-contact current sensors

ファン アン チュアン, 原 基揚, 大口 裕之

「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   30   1 - 4   2013.11

Integrated point source atomization system using surface acoustic wave

杉本 駿, 矢部 敦士, 原 基揚

「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   30   1 - 4   2013.11

MEMS accelerometers with two-wired network for monitoring of bridge vibration

北吉 均, 賀 建軍, 原 基揚

「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   30   1 - 4   2013.11

転がり機構を用いた両面エレクトレット型静電発電素子

吉田凌, 原基揚, 大口裕之, 桑野博喜

日本機械学会マイクロ・ナノ工学シンポジウム講演論文集   5th   9‐10   2013.11

強誘電双極子エレクトレットの開発と静電誘導型振動発電デバイスへの応用

浅沼春彦, 大口裕之, 原基揚, 桑野博喜

日本機械学会マイクロ・ナノ工学シンポジウム講演論文集   5th   1‐2   2013.11

6PM3-PMN-008 Investigation of vibration direction and output power of the AIN-based vibration-driven energy harvester

2013 ( 5 )   183 - 184   2013.11

Fe‐B‐Nd‐Nb金属ガラス薄膜の破壊靭性評価

TUAN P.A, 大口裕之, 原基揚, 式田光宏, 肥田博隆, 安藤妙子, 佐藤一雄, 桑野博喜

日本機械学会年次大会講演論文集(CD-ROM)   2013   ROMBUNNO.J211023   2013.9

Vibration based energy harvester employing ZnO film on the stainless steel substrate

Shota Hosokawa, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

IEEJ Transactions on Sensors and Micromachines   133 ( 4 )   126 - 127   2013

表面弾性波ひずみセンサを用いた構造物ヘルスモニタリングシステム

ZHONGQING Bao, 原基揚, 桑野博喜

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)   30th   ROMBUNNO.5PM3-PSS-53   2013

300MHz帯SAW発振器を用いた高感度ひずみセンサの開発

今野智一, 原基揚, 桑野博喜

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)   30th   ROMBUNNO.5PM3-PSS-47   2013

超音波デバイス ワイヤレスセンサノードのための表面弾性波を用いた高感度ひずみセンサ

原基揚, 包忠青, 桑野博喜

超音波Techno   24 ( 6 )   76 - 80   2012.12

2E3-2 (K,Na)NbO_3 micro-energy harvesters with multi-beam structure(Piezoelectric Devices, Ocean Acoustics)

Minh Le Van, Hara Motoaki, Kuwano Hiroki

Proceedings of Symposium on Ultrasonic Electronics   33   277 - 278   2012.11

円弧形状を有するすだれ状電極を用いた点集束型表面弾性波噴霧器

矢部敦士, 濱手雄一郎, 大口裕之, 長澤純人, 原基揚, 桑野博喜

日本機械学会マイクロ・ナノ工学シンポジウム講演論文集   4th   231 - 232   2012.10

表面弾性波素子を用いた無線計測用高感度ひずみセンサ

BAO Zhonqing, 原基揚, 長澤純人, 桑野博喜

日本機械学会東北支部総会・講演会講演論文集   47th   136‐137   2012.3

166 A Study of a Vibration-Based Piezoelectric Micro Generator by Depositing ZnOThin Films

Hosokawa Shota, Cao Ziping, hara Motoaki, Nagasawa Sumito, Kuwano Hiroki

2012 ( 47 )   138 - 139   2012.3

ZnO薄膜を用いたマイクロ振動発電の研究

細川翔多, CAO Ziping, 原基揚, 長澤純人, 桑野博喜

日本機械学会東北支部総会・講演会講演論文集   47th   138‐139   2012.3

温度補償SAWデバイスへのSiOF膜の適用

松田聡, 三浦道雄, 松田隆志, 上田政則, 佐藤良夫, 原基揚, 橋本研也

圧電材料・デバイスシンポジウム   2012   71 - 72   2012.1

2Pa3-5 A New Technique for Suppression of Spurious Responses in an Aluminum Nitride Based Thin Film Bulk Acoustic Resonator(Poster Session)

Hara Motoaki, Kuwano Hiroki

Proceedings of Symposium on Ultrasonic Electronics   32   101 - 102   2011.11

1J3-2 Experimental Study of Highly Sensitive Strain Sensor Using a Surface Acoustic Wave Resonator for Wireless Monitoring System(Piezoelectric Devices (Bulk wave devices, Surface wave devices))

Zhongqing Bao, Hara Motoaki, Mitsui Misato, Konno Riyo, Sano Koji, Nagasawa Sumito, Kuwano Hiroki

Proceedings of Symposium on Ultrasonic Electronics   32   3 - 4   2011.11

2Pb3-5 Optimization of SiO_2 Films and Application of Fluorine Doped SiO_2 Films for Temperature Compensated Surface Acoustic Wave Devices(Poster Session)

Matsuda S, Hara M, Miura M, Matsuda T, Ueda M, Satoh Y, Hashimoto K

Proceedings of Symposium on Ultrasonic Electronics   32   221 - 222   2011.11

Thin-Film Bulk Acoustic Resonator Duplexer with Super Wide Band Receiver Filter Aiming for the 4th Generation Cellular Phone

HARA Motoaki, SAKASHITA Takeshi, NISHIHARA Tokihiro, UEDA Masanori, SATOH Yoshio, OKA Shinya, OKADA Takashi

The Transactions of the Institute of Electronics, Information and Communication Engineers. A   94 ( 6 )   438 - 439   2011.6

超高周波帯通信システムのための圧電薄膜共振子フィルタ

原基揚, 横山剛, 坂下武, 岩城匡郁, 谷口眞司, 西原時弘, 上田政則, 佐藤良夫

EMシンポジウム   39th   43 - 46   2010.5

3P3-1 SHF Band Filters Configured with Air-gap Type Thin Film Bulk Acoustic Resonators(Poster Session)

Hara Motoaki, Yokoyama Tsuyoshi, Sakashita Takeshi, Taniguchi Shinji, Iwaki Masafumi, Nishihara Tokihiro, Ueda Masanori, Satoh Yoshio

Proceedings of Symposium on Ultrasonic Electronics   30   477 - 478   2009.11

Air‐gap型圧電薄膜共振器を用いたKバンドフィルタ

横山剛, 原基揚, 谷口眞司, 西原時弘, 上田政則, 佐藤良夫

圧電材料・デバイスシンポジウム   2009   55 - 58   2009.2

エアギャップ型FBARフィルタ

上田政則, 原基揚, 横山剛, 谷口眞司, 岩城匡郁, 西原時弘, 橋本研也, 佐藤良夫

圧電材料・デバイスシンポジウム   2008   85 - 88   2008.1

Air‐Gap型高周波FBARフィルタ

横山剛, 原基揚, 谷口眞司, 西原時弘, 上田政則, 佐藤良夫

EMシンポジウム   37th   65 - 68   2008

1-05-04 High Frequency Acoustic Filters using Air-Gap type Film Bulk Acoustic Resonators(Bulk wave devices)

Ueda Masanori, Hara Motoaki, Yokoyama Tsuyoshi, Satoh Yoshio, Taniguchi Shinji, Iwaki Masafumi, Nishihara Tokihiro

Proceedings of Symposium on Ultrasonic Electronics   28   153 - 154   2007.11

Air‐Gap型圧電薄膜共振器を使用した高周波フィルタ

上田政則, 原基揚, 横山剛, 佐藤良夫, 谷口眞司, 岩城匡郁, 西原時弘

超音波エレクトロニクスの基礎と応用に関するシンポジウム講演予稿集   28th   153 - 154   2007.11

高音響インピーダンス電極膜を用いたAir‐Gap型FBARフィルタの開発

横山剛, 谷口眞司, 原基揚, 岩城匡郁, 西原時弘, 上田政則, 佐藤良夫

EMシンポジウム   36th   59 - 62   2007

RFMEMS及びMEMSパッケージング(原標題は英語)

原基揚, 江刺正喜

EMシンポジウム   33rd   41 - 46   2004

ガラス基板貫通配線を用いたアレイMEMSの大口径ウェハ対応プロセス

李興華, 安部隆, 原基揚, 江刺正喜

センサ・マイクロマシンと応用システムシンポジウム講演概要集   20th   97   2003.7

Research Project on Micromachined Gas Turbine Generators

TANAKA Shuji, SUGIMOTO Shinya, LI Jing Feng, YAMADA Takashi, YAMAGUCHI Hiroshi, IJICHI Nobuaki, ESASHI Masayoshi, ISOMURA Kousuke, GENDA Takashi, HARA Motoaki, MURAYAMA Motohide, TAKAHASHI Katsuyoshi, KATO Takuma, KAMATSUCHI Toshihiro, NAKAHASHI Kazuhiro

The Proceedings of the National Symposium on Power and Energy Systems   2002 ( 0 )   507 - 512   2002.6

マイクロエアタービンの高速化に関する研究

原基揚, 田中秀治, 江刺正喜

センサ・マイクロマシンと応用システムシンポジウム講演概要集   19th   113   2002

フーリエ変換赤外分光用エアタービン駆動マイクロ偏光変調器の開発

田中秀治, 原基揚, 江刺正喜

センサ・マイクロマシンと応用システムシンポジウム講演概要集   17th   4   2000.5

Silicon Carbide Micromachining And Micromachined Gas Turbines

TANAKA Shuji, NAKAHASHI Kazuhiro, ESASHI Masayoshi, SUGIMOTO Shinya, HARA Motoaki, KAMATSUCHI Toshihiro

IIP   2000 ( 0 )   92 - 97   2000.3