DIELECTRIC-PROPERTIES OF (BA, SR)TIO3 THIN-FILMS DEPOSITED BY RF-SPUTTERING

T HORIKAWA, N MIKAMI, T MAKITA, J TANIMURA, M KATAOKA, K SATO, M NUNOSHITA

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   32 ( 9B )   4126 - 4130   1993.9

Detail analysis of reflection behavior for O-band and C-band silicon waveguides by OFDR profiles

Tsuyoshi Horikawa, Nobuhiko Nishiyama

JAPANESE JOURNAL OF APPLIED PHYSICS   65 ( 4 )   2026.2

Low propagation loss in LPCVD Si₃N₄ waveguides without the need for high-temperature annealing: expanding applications in silicon photonics

Norikatsu Takaura, Shoma Miyata, Moataz Eissa, Takaaki Noda, Yuji Urano, Zhao Jiaang, Hiroaki Takahashi, Shuntaro Machida, Tsuyoshi Horikawa, Nobuhiko Nishiyama

JAPANESE JOURNAL OF APPLIED PHYSICS   65 ( 1 )   2026.1

Silicon Oxynitride/Silicon Interlayer Couplers: Flexible Index Control, High Efficiency and Compact on Silicon Platform

Kaibin Yao, Moataz Eissa, Tsuyoshi Horikawa, Nobuhiko Nishiyama

2025 30TH OPTOELECTRONICS AND COMMUNICATIONS CONFERENCE, OECC AND 2025 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING AND COMPUTING, PSC   2025

Low-loss amorphous-Si Strip-Loaded Thin Film Lithium Niobate on Insulator Waveguides with Compact Bending Radius

Moataz Eissa, Yoshitaka Ohiso, Kensuke Ogawa, Yuki Nomoto, Tsuyoshi Horikawa, Shoichiro Yamaguchi, Masahiko Namerikawa, Nobuhiko Nishiyama

2025 30TH OPTOELECTRONICS AND COMMUNICATIONS CONFERENCE, OECC AND 2025 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING AND COMPUTING, PSC   2025

Integrated Testing Strategy of Wafer and Chip-level Characterization for Photonic Integrated Circuits

Moataz Eissa, Tsuyoshi Horikawa, Suguru Yoshida, Nobuhiko Nishiyama

2025 30TH OPTOELECTRONICS AND COMMUNICATIONS CONFERENCE, OECC AND 2025 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING AND COMPUTING, PSC   2025

Wafer and chip-level characterization of edge-coupled photonic integrated circuits by cascaded grating couplers and spot-size converters

Moataz Eissa, Ryuya Sasaki, Tsuyoshi Horikawa, Tomohiro Amemiya, Nobuhiko Nishiyama

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers   63 ( 7 )   2024.7

Precise waveguide loss extraction using 300-mm wafer-level OFDR for optical process control monitoring

Tsuyoshi Horikawa, Atsushi Kitamura, Masanori Yatani, Nobuhiko Nishiyama

2024 IEEE SILICON PHOTONICS CONFERENCE, SIPHOTONICS   2024

Monolithic integration of various-type III-V epitaxial structures on silicon-photonics platform using chip-on-wafer hydrophilic bonding process

Takehiko Kikuchi, Munetaka Kurokawa, Naoki Fujiwara, Naoko Inoue, Takuya Mitarai, Hidenari Fujikata, Takuo Hiratani, Toshiyuki Nitta, Yuhki Itoh, Tohma Watanabe, Chang-Yong Lee, Akira Furuya, Tsuyoshi Horikawa, Nobuhiko Nishiyama, Hideki Yagi

2024 IEEE SILICON PHOTONICS CONFERENCE, SIPHOTONICS   2024

Coupling structure for enabling both wafer- and chip-level characterization of silicon photonic integrated circuits

Moataz Eissa, Ryuya Sasaki, Tsuyoshi Horikawa, Tomohiro Amemiya, Nobuhiko Nishiyama

2024 IEEE SILICON PHOTONICS CONFERENCE, SIPHOTONICS   2024

Mach–Zehnder interferometric engineering in silicon optical modulators: towards extrinsic OMA enhancement

Tadashi Murao, Tsuyoshi Horikawa

Applied Optics   62 ( 28 )   7387 - 7387   2023.9

High-temperature and high-efficiency operation of a membrane optical link with a buried-ridge-waveguide bonded on a Si substrate

Weicheng Fang, Naoki Takahashi, Tsuyoshi Horikawa, Yoshitaka Ohiso, Ruihao Xue, Shunto Katsumi, Tomohiro Amemiya, Nobuhiko Nishiyama

Optics Express   30 ( 19 )   34420 - 34428   2022.9

Compact behavioral model and parametric extraction for optical phase shifters in carrier-depletion Mach–Zehnder silicon modulators

Tadashi Murao, Jun Ushida, Hiroyuki Takahashi, Masatoshi Tokushima, Akemi Shiina, Tsuyoshi Horikawa

Optics Communications   507   2022.3

Systematic identification of crosstalk and bandwidth upper limit in highly cascaded Mach-Zehnder lattice optical filters

Jun Ushida, Tadashi Murao, Akemi Shiina, Tsuyoshi Horikawa

JAPANESE JOURNAL OF APPLIED PHYSICS   61 ( 2 )   2022.2

High Temperature Operation of Membrane Photonic Integrated Circuits with Buried-Ridge-Waveguide on Si

Weicheng Fang, Naoki Takahashi, Tsuyoshi Horikawa, Yoshitaka Ohiso, Ruihao Xue, Shunto Katsumi, Tomohiro Amemiya, Nobuhiko Nishiyama

Conference Digest - IEEE International Semiconductor Laser Conference   2022-October   2022

Understanding Inter-Arm Imbalance in MachZehnder Silicon Optical Modulators: Impact on OMA and Frequency Chirp

Tadashi Murao, Jun Ushida, Hiroyuki Takahashi, Masatoshi Tokushima, Akemi Shiina, Tsuyoshi Horikawa

Journal of Lightwave Technology   40 ( 15 )   5171 - 5189   2022

High-Temperature Operation of Chip-Scale Silicon-Photonic Transceiver

Di Okamoto, Y. Suzuki, J. Fujikata, M. Tokushima, J. Ushida, T. Horikawa, K. Takemura, T. Nakamura, Y. Hagihara, K. Yashiki, M. Kurihara, K. Kinoshita, K. Kurata

Digest of Technical Papers - Symposium on VLSI Technology   2020-June   2020.6

Phase behaviors or silicon-wire multistage delayed interferometric WDM filters across a whole 300-mm silicon-on-insulator wafer Reviewed

Seok-Hwan Jeong, Tsuyoshi Horikawa, Takahiro Nakamura

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS   37 ( 6 )   1847 - 1856   2020.6

Polarization Diversified 16 lambda Demultiplexer Based on Silicon Wire Delayed Interferometers and Arrayed Waveguide Gratings Reviewed

Seok-Hwan Jeong, Yosuke Onawa, Daisuke Shimura, Hideaki Okayama, Tsuyoshi Aoki, Hiroki Yaegashi, Tsuyoshi Horikawa, Takahiro Nakamura

JOURNAL OF LIGHTWAVE TECHNOLOGY   38 ( 9 )   2680 - 2687   2020.5

Fingertip-Size Optical Module, "Optical I/O Core", and Its Application in FPGA Reviewed

Takahiro Nakamura, Kenichiro Yashiki, Kenji Mizutani, Takaaki Nedachi, Junichi Fujikata, Masatoshi Tokushima, Jun Ushida, Masataka Noguchi, Daisuke Okamoto, Yasuyuki Suzuki, Takanori Shimizu, Koichi Takemura, Akio Ukita, Yasuhiro Ibusuki, Mitsuru Kurihara, Keizo Kinoshita, Tsuyoshi Horikawa, Hiroshi Yamaguchi, Junichi Tsuchida, Yasuhiko Hagihara, Kazuhiko Kurata

IEICE TRANSACTIONS ON ELECTRONICS   E102C ( 4 )   333 - 339   2019.4

Development of chip-scale silicon photonic optical transceiver: “Optical I/O core” Reviewed

Kazuhiko Kurata, Keizo Kinoshita, Mitsuru Kurihara, Yasuhiko Hagihara, Kenichiro Yashiki, Daisuke Okamoto, Takanori Shimizu, Koichi Takemura, Masatoshi Tokushima, Tsuyoshi Horikawa

Journal of Japan Institute of Electronics Packaging   22 ( 6 )   551 - 558   2019

Silicon photonics based 16O-WDM demultiplexers for operating in C-band and O-band spectral regimes

Seok Hwan Jeong, Yosuke Onawa, Daisuke Shimura, Hideaki Okayama, Tsuyoshi Aoki, Hiroki Yaegashi, Tsuyoshi Horikawa, Takahiro Nakamura

IET Conference Publications   2019 ( CP765 )   2019

A 300-mm-wafer silicon photonics technology for advanced information systems Reviewed

Koji Yamada, Guangwei Cong, Makoto Okano, Yuriko Maegami, Morifumi. Ohno, Keijiro Suzuki, Satoshi Suda, Ryotaro Konoike, Kazuhiro Ikeda, Hitoshi Kawashima, Tsuyoshi Horikawa, Shu Namiki, Masahiko Mori, Shota Kita, Kengo Nozaki, Akihiko Shinya, Masaya Notomi

2019 2ND INTERNATIONAL SYMPOSIUM ON DEVICES, CIRCUITS AND SYSTEMS (ISDCS 2019)   2019

Post-Integrated Dual-Core Large-End Spot-Size Converter with Si Vertical Taper for Fiber Butt-Coupling to Si-Photonics Chip Reviewed

Masatoshi Tokushima, Hitoshi Kawashima, Tsuyoshi Horikawa, Kazuhiko Kurata

Journal of Lightwave Technology   36 ( 20 )   4783 - 4791   2018.10

1.2 Tbps/cm² Enabling Silicon Photonics IC Technology Based on 40-nm Generation Platform Reviewed

Tohru Mogami, Tsuyoshi Horikawa, Keizo Kinoshita, Yasuhiko Hagihara, Jun Ushida, Masatoshi Tokushima, Junichi Fujikata, Shigeki Takahashi, Takanori Shimizu, Akio Ukita, Koichi Takemura, Mitsuru Kurihara, Kenichiro Yashiki, Daisuke Okamoto, Yasuyuki Suzuki, Yohei Sobu, Seok Hwan Jeong, Yu Tanaka, Takahiro Nakamura, Kazuhiko Kurata

Journal of Lightwave Technology   36 ( 20 )   4701 - 4712   2018.10

Study on the effects of the Si capping layer growth conditions on the leakage current of Ge photodetector Reviewed

Shigekazu Okumura, Keizo Kinoshita, Junichi Fujikata, Takasi Simoyama, Hideki Ono, Yu Tanaka, Ken Morito, Tsuyoshi Horikawa, Tohru Mogami

Japanese Journal of Applied Physics   56 ( 10 )   2017.10

A 300-mm-wafer silicon photonics technology for ultra-low energy optical network systems

Koji Yamada, Tsuyoshi Horikawa, Makoto Okano, Guangwei Cong, Yuriko Maegami, Morifumi Ohno, Noritsugu Yamamoto, Keijiro Suzuki, Ken Tanizawa, Satoshi Suda, Hiroyuki Matsuura, Keiji Koshino, Nobuyuki Yokoyama, Minoru Ohtsuka, Miyoshi Seki, Kazuyuki Matsumaro, Toshihiro Narushima, Kazuhiro Ikeda, Hitoshi Kawashima, Shu Namiki, Masahiko Mori

2017 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP)   2017

Hydrogenated amorphous silicon waveguide with vertical pin structure for infrared detection Reviewed

Y. Maegami, R. Takei, G. Cong, M. Ohno, M. Okano, T. Horikawa, K. Yamada, T. Kamei

Electronics Letters   52 ( 20 )   1705 - 1707   2016.9

High-speed and high-efficiency Si optical modulator with MOS junction, using solid-phase crystallization of polycrystalline silicon

Junichi Fujikata, Masashi Takahashi, Shigeki Takahashi, Tsuyoshi Horikawa, Takahiro Nakamura

JAPANESE JOURNAL OF APPLIED PHYSICS   55 ( 4 )   2016.4

High-performance optical waveguide devices using 300 mm Si photonics platform Reviewed

Tohru Mogami, Tsuyoshi Horikawa, Keizo Kinoshita, Hironori Sasaki, Ken Morito, Kazuhiko Kurata

Microelectronic Engineering   156   55 - 58   2016.4

First Demonstration of Athermal Silicon Optical Interposers With Quantum Dot Lasers Operating up to 125 degrees C Reviewed

Yutaka Urino, Nobuaki Hatori, Kenji Mizutani, Tatsuya Usuki, Junichi Fujikata, Koji Yamada, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

JOURNAL OF LIGHTWAVE TECHNOLOGY   33 ( 6 )   1223 - 1229   2015.3

Electrical characterization of 3C-SiC lateral MOSFETs fabricated on heteroepitaxial films including high density of defects Reviewed

Yukimune Watanabe, Noriyasu Kawana, Tsuyoshi Horikawa, Kiichi Kamimura

Materials Science Forum   821-823   733 - 736   2015

Athermal silicon optical interposers operating up to 125 degrees C Reviewed

Yutaka Urino, Nobuaki Hatori, Kenji Mizutani, Tatsuya Usuki, Junichi Fujikata, Koji Yamada, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

NEXT-GENERATION OPTICAL NETWORKS FOR DATA CENTERS AND SHORT-REACH LINKS II   9390   2015

Ultra-fine Si photonics fabrication technology based on 40-nm-node CMOS process Reviewed

Tsuyoshi Horikawa, Tohru Mogami

2015 IEEE 12TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP)   201 - 202   2015

A 300mm Si Photonics Platform for Optical Interconnection Reviewed

Tohru Mogami, Tsuyoshi Horikawa, Keizo Kinoshita, Hironori Sasaki, Ken Morito, Kazuhiko Kurata

2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)   273 - 275   2015

A 300mm Si Photonics Platform for Multi-applications Reviewed

Tohru Mogami, Tsuyoshi Horikawa, Keizo Kinoshita, Hironori Sasaki, Ken Morito, Kazuhiko Kurata

2015 OPTO-ELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC)   2015

Process Control and Monitoring in Device Fabrication for Optical Interconnection using Silicon Photonics Technology Reviewed

Tsuyoshi Horikawa, Daisuke Shimura, Seok-Hwan Jeong, Masatoshi Tokushima, Keizo Kinoshita, Tohru Mogami

2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)   277 - 279   2015

Athermal silicon optical interposers with quantum dot lasers operating from 25 to 125 degrees C Reviewed

Y. Urino, N. Hatori, T. Akagawa, T. Shimizu, M. Okano, M. Ishizaka, T. Yamamoto, H. Okayama, Y. Onawa, H. Takahashi, D. Shimura, H. Yaegashi, H. Nishi, H. Fukuda, K. Yamada, M. Miura, J. Fujikata, S. Akiyama, T. Baba, T. Usuki, Y. Noguchi, M. Noguchi, M. Imai, N. Hirayama, S. Saitou, M. Yamagishi, M. Takahashi, E. Saito, D. Okamoto, M. Mori, T. Horikawa, T. Nakamura, Y. Arakawa

ELECTRONICS LETTERS   50 ( 19 )   1377 - +   2014.9

Si-nanowire-based multistage delayed Mach-Zehnder interferometer optical MUX/DeMUX fabricated by an ArF-immersion lithography process on a 300 mm SOI wafer Reviewed

Seok-Hwan Jeong, Daisuke Shimura, Takasi Simoyama, Tsuyoshi Horikawa, Yu Tanaka, Ken Morito

OPTICS LETTERS   39 ( 13 )   3702 - 3705   2014.7

High-density and wide-bandwidth optical interconnects with silicon optical interposers [Invited] Reviewed

Yutaka Urino, Tatsuya Usuki, Junichi Fujikata, Masashige Ishizaka, Koji Yamada, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

PHOTONICS RESEARCH   2 ( 3 )   A1 - A7   2014.6

Growth mechanisms of 3C-SiC layer by carbonization of Si(100) substrates in high-vacuum region Reviewed

Yukimune Watanabe, Tsuyoshi Horikawa, Kiichi Kamimura

JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 4 )   2014.4

High-density optical interconnects by using silicon photonics Reviewed

Yutaka Urino, Tatsuya Usuki, Junichi Fujikata, Masashige Ishizaka, Koji Yamada, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

NEXT-GENERATION OPTICAL NETWORKS FOR DATA CENTERS AND SHORT-REACH LINKS   9010   2014

First Demonstration of Athermal Silicon Optical Interposers with Quantum Dot Lasers Operating up to 125 degrees C Reviewed

Yutaka Urino, Nobuaki Hatori, Takeshi Akagawa, Takanori Shimizu, Makoto Okano, Masashige Ishizaka, Tsuyoshi Yamamoto, Hideaki Okayama, Yosuke Onawa, Hiroyuki Takahashi, Daisuke Shimura, Hiroki Yaegashi, Hidetaka Nishi, Hiroshi Fukuda, Koji Yamada, Makoto Miura, Junichi Fujikata, Suguru Akiyama, Takeshi Baba, Tatsuya Usuki, Yoshiji Noguchi, Masataka Noguchi, Masahiko Imai, Naoki Hirayama, Shigeru Saitou, Masashi Yamagishi, Masashi Takahashi, Emiko Saito, Daisuke Okamoto, Masahiko Mori, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

2014 EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC)   33 ( 6 )   1223 - 1229   2014

The influence of the carbonization mechanisms on the crystalline quality of the carbonization layer for heteroepitaxial growth of 3C-SiC Reviewed

Yukimune Watanabe, Tsuyoshi Horikawa, Kiichi Kamimura

SILICON CARBIDE AND RELATED MATERIALS 2013, PTS 1 AND 2   778-780   230 - +   2014

Observation of Suppressed dark current of Ge on Si (100) using ultrathin Ge seed layer Reviewed

Shigekazu Okumura, Takasi Simoyama, Hideki Ono, Masaki Okuno, Makoto Miura, Junichi Fujikata, Masataka Noguchi, Tohru Mogami, Tsuyoshi Horikawa, Yu Tanaka, Ken Morito

2014 7TH INTERNATIONAL SILICON-GERMANIUM TECHNOLOGY AND DEVICE MEETING (ISTDM)   89 - 90   2014

High precision Si waveguide devices designed for 1.31 mu m and 1.55 mu m wavelengths on 300mm-SOI Reviewed

Daisuke Shimura, Tsuyoshi Horikawa, Hideaki Okayama, Seok-Hwan Jeong, Masatoshi Tokushima, Hironori Sasaki, Tohru Mogami

2014 IEEE 11TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP)   2014

Low-loss, flat-topped and spectrally uniform silicon-nanowire-based 5th-order CROW fabricated by ArF-immersion lithography process on a 300-mm SOI wafer Reviewed

Seok-Hwan Jeong, Daisuke Shimura, Takasi Simoyama, Miyoshi Seki, Nobuyuki Yokoyama, Minoru Ohtsuka, Keiji Koshino, Tsuyoshi Horikawa, Yu Tanaka, Ken Morito

OPTICS EXPRESS   21 ( 25 )   30163 - 30174   2013.12

High-density optical interposers fully integrated with silicon photonics

Y. Urino, Y. Urino, J. Fujikata, J. Fujikata, T. Usuki, T. Usuki, M. Ishizaka, M. Ishizaka, K. Yamada, K. Yamada, T. Horikawa, T. Horikawa, T. Nakamura, T. Nakamura, Y. Arakawa, Y. Arakawa

2013 18th OptoElectronics and Communications Conference Held Jointly with 2013 International Conference on Photonics in Switching, OECC/PS 2013   2013.10

Differential receivers with highly-uniform MSM Germanium photodetectors capped by SiGe layer Reviewed

Makoto Miura, Junichi Fujikata, Masataka Noguchi, Daisuke Okamoto, Tsuyoshi Horikawa, Yasuhiko Arakawa

Optics Express   21 ( 20 )   23295 - 23306   2013.10

Si wire array waveguide grating with stray light reduction scheme fabricated by ArF excimer immersion lithography Reviewed

H. Okayama, D. Shimura, Y. Onawa, H. Takahashi, M. Seki, K. Koshino, N. Yokoyama, M. Oshtsuka, T. Tsuchizawa, H. Nishi, K. Yamada, H. Yaegashi, T. Horikawa, H. Sasaki

ELECTRONICS LETTERS   49 ( 22 )   1401 - 1402   2013.10

50-Gb/s ring-resonator-based silicon modulator Reviewed

Takeshi Baba, Suguru Akiyama, Masahiko Imai, Naoki Hirayama, Hiroyuki Takahashi, Yoshiji Noguchi, Tsuyoshi Horikawa, Tatsuya Usuki

OPTICS EXPRESS   21 ( 10 )   11869 - 11876   2013.5

Si waveguide-integrated metal-semiconductor-metal and p-i-n-Type ge photodiodes using si-capping layer Reviewed

Junichi Fujikata, Makoto Miura, Masataka Noguchi, Daisuke Okamoto, Tsuyoshi Horikawa, Yasuhiko Arakawa

Japanese Journal of Applied Physics   52 ( 4 )   2013.4

Si wire array waveguide grating with parallel star coupler configuration fabricated by ArF excimer immersion lithography Reviewed

H. Okayama, D. Shimura, H. Takahashi, M. Seki, M. Toyama, T. Sano, K. Koshino, N. Yokoyama, M. Ohtsuka, A. Sugiyama, S. Ishitsuka, T. Tsuchizawa, H. Nishi, K. Yamada, H. Yaegashi, T. Horikawa, H. Sasaki

Electronics Letters   49 ( 6 )   422 - 424   2013.3

Compact PIN-diode-based silicon modulator using side-wall-grating waveguide Reviewed

Suguru Akiyama, Masahiko Imai, Takeshi Baba, Takeshi Akagawa, Naoki Hirayama, Yoshiji Noguchi, Miyoshi Seki, Keiji Koshino, Munehiro Toyama, Tsuyoshi Horikawa, Tatsuya Usuki

IEEE Journal on Selected Topics in Quantum Electronics   19 ( 6 )   2013

Study of carbonization process on surface of Si substrate in high vacuum region with hydrocarbon gas Reviewed

Yukimune Watanabe, Keisuke Shinoda, Masahiro Tsukahara, Hiroyuki Shimada, Masahiro Furusawa, Tsuyoshi Horikawa, Kiichi Kamimura

Materials Science Forum   740-742   161 - 164   2013

Demonstration of 12.5-Gbps optical interconnects integrated with lasers, optical splitters, optical modulators and photodetectors on a single silicon substrate Reviewed

Yutaka Urino, Yoshiji Noguchi, Masataka Noguchi, Masahiko Imai, Masashi Yamagishi, Shigeru Saitou, Naoki Hirayama, Masashi Takahashi, Hiroyuki Takahashi, Emiko Saito, Makoto Okano, Takanori Shimizu, Nobuaki Hatori, Masashige Ishizaka, Tsuyoshi Yamamoto, Takeshi Baba, Takeshi Akagawa, Suguru Akiyama, Tatsuya Usuki, Daisuke Okamoto, Makoto Miura, Junichi Fujikata, Daisuke Shimura, Hideaki Okayama, Hiroki Yaegashi, Tai Tsuchizawa, Koji Yamada, Masahiko Mori, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

OPTICS EXPRESS   20 ( 26 )   B256 - B263   2012.12

Mach-Zehnder filter using multiple Si waveguide structure sections for width error tolerance Reviewed

H. Okayama, D. Shimura, H. Takahashi, M. Seki, M. Toyama, T. Sano, H. Yaegashi, T. Horikawa, H. Sasaki

ELECTRONICS LETTERS   48 ( 14 )   869 - U96   2012.7

Dual-Tapered 10-mu m-Spot-Size Converter with Double Core for Coupling Polarization-Independent Silicon Rib Waveguides to Single-Mode Optical Fibers Reviewed

Masatoshi Tokushima, Akio Kamei, Tsuyoshi Horikawa

APPLIED PHYSICS EXPRESS   5 ( 2 )   2012.2

12.5-Gb/s operation with 0.29-V.cm V pi L using silicon Mach-Zehnder modulator based-on forward-biased pin diode Reviewed

Suguru Akiyama, Takeshi Baba, Masahiko Imai, Takeshi Akagawa, Masashi Takahashi, Naoki Hirayama, Hiroyuki Takahashi, Yoshiji Noguchi, Hideaki Okayama, Tsuyoshi Horikawa, Tatsuya Usuki

OPTICS EXPRESS   20 ( 3 )   2911 - 2923   2012.1

Abrupt Lateral-Source Heterostructures with Relaxed/Strained Layers for Ballistic Complementary Metal Oxide Semiconductor Transistors Fabricated by Local O+ Ion-Induced Relaxation Technique of Strained Substrates Reviewed

Tomohisa Mizuno, Mitsuo Hasegawa, Keiji Ikeda, Masashi Nojiri, Tsuyoshi Horikawa

JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 4 )   2011.4

SiO2/Si interfaces on high-index surfaces: Re-evaluation of trap densities and characterization of bonding structures Reviewed

Shoichi Ogata, Shinya Ohno, Masatoshi Tanaka, Takahiro Mori, Tsuyoshi Horikawa, Tetsuji Yasuda

APPLIED PHYSICS LETTERS   98 ( 9 )   2011.2

Vacuum-ultraviolet reflectance difference spectroscopy for characterizing dielectrics-semiconductor interfaces Reviewed

Shoichi Ogata, Shinya Ohno, Masatoshi Tanaka, Takahiro Mori, Tsuyoshi Horikawa, Tetsuji Yasuda

THIN SOLID FILMS   519 ( 9 )   2830 - 2833   2011.2

Reflectance Difference Spectroscopy in Vacuum-Ultraviolet Range: Developing Measurement System and Applying to Characterization of SiO2/Si Interfaces Reviewed

Shoichi Ogata, Shinya Ohno, Masatoshi Tanaka, Tsuyoshi Horikawa, Tetsuji Yasuda

JAPANESE JOURNAL OF APPLIED PHYSICS   49 ( 2 )   2010

Reliability perspective of high-k gate stack assessed by temperature dependence of dielectric breakdown Reviewed

Kenji Okada, Tsuyoshi Horikawa, Hideki Satake, Seiji Inumiya, Yasushi Akasaka, Fumio Ootsuka, Yasuo Nara, Hiroyuki Ota, Toshihide Nabatame, Akira Toriumi

2007 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS   34 - +   2007

Roles of predominant and subordinate carriers in breakdown mechanism of high-k gate dielectrics studied with HfAlOx/SiO2 stacks

Kenji Okada, Hiroyuki Ota, Arito Ogawa, Wataru Mizubayashi, Tsuyoshi Horikawa, Hideki Satake, Toshihide Nabatame, Akira Toriumi, Akira Toriumi

ECS Transactions   1   179 - 189   2005.12

Two-dimensional void growth during thermal decomposition of thin HfO2 films on Si Reviewed

Noriyuki Miyata, Yukinori Morita, Tsuyoshi Horikawa, Toshihide Nabatame, Masakazu Ichikawa, Akira Toriumi

Physical Review B - Condensed Matter and Materials Physics   71 ( 23 )   2005.6

Advantages of HfAlON gate dielectric film for advanced low power CMOS application Reviewed

A Toriumi, K Iwamoto, H Ota, M Kadoshima, W Mizubayashi, T Nabatame, A Ogawa, K Tominaga, T Horikawa, H Satake

MICROELECTRONIC ENGINEERING   80 ( SUPPL. )   190 - 197   2005.6

Nanometer-scale crystallization of thin HfO2 films studied by HF-chemical etching Reviewed

S Fujii, N Miyata, S Migita, T Horikawa, A Toriumi

APPLIED PHYSICS LETTERS   86 ( 21 )   1 - 3   2005.5

Degradation mechanism of HfAlOX/SiO2 stacked gate dielectrics studied by transient and steady-state leakage current analysis Reviewed

K Okada, W Mizubayashi, N Yasuda, H Ota, K Tominaga, K Iwamoto, T Horikawa, K Yamamoto, H Hisamatsu, H Satake, T Nabatame, A Toriumi

JOURNAL OF APPLIED PHYSICS   97 ( 7 )   2005.4

Importance of Leakage Current Noise Analysis for Accurate Lifetime Prediction of High-k Gate Dielectrics

Kenji OKADA, Hiroyuki OTA, Tsuyoshi HORIKAWA, Yasuyuki TAMURA, Takaoki SASAKI, Tomonori AOYAMA, Fumio OOTSUKA, Akira TORIUM

2005

Effect of the interfacial SiO2 layer thickness on the dominant carrier type in leakage currents through HfAlOx/SiO2 gate dielectric films Reviewed

W Mizubayashi, N Yasuda, H Hisamatsu, K Iwamoto, K Tominaga, K Yamamoto, H Ota, T Horikawa, T Nabatame, A Toriumi

APPLIED PHYSICS LETTERS   85 ( 25 )   6227 - 6229   2004.12

Roles of nitrogen incorporation in HfAlOx(N) gate dielectrics for suppression of boron penetration Reviewed

T Nabatame, K Iwamoto, K Yamamoto, K Tominaga, H Hisamatsu, M Ohno, K Akiyama, M Ikeda, T Nishimura, H Ota, T Horikawa, A Toriumi

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   22 ( 4 )   2128 - 2131   2004.7

Decomposition of SiN interlayer during thermal annealing of HfAlOx/SiN/Si(001) structure Reviewed

M Kundu, N Miyata, Y Morita, T Horikawa, T Nabatame, M Ichikawa, A Toriumi

APPLIED PHYSICS LETTERS   84 ( 26 )   5326 - 5328   2004.6

Flat-band Voltage Tunability and No Depletion Effect of Poly-Si Gate CMOS with Nanometer-size Metal Dots at the Poly-Si/Dielectric Interface

Hideaki Fujiwara, Masaru Kadoshima, Koji Akiyama, Nobuyuki Mise, Shinji Migita, Hiroyuki Ota, Morifumi Ohno, Toshihide Nabatame, Tsuyoshi Horikawa, Akira Torium

2004

Study of HfAlOx films deposited by layer-by-layer growth for CMOS high-k gate dielectrics Reviewed

A Toriumi, T Nabatame, T Horikawa

FUNDAMENTALS OF NOVEL OXIDE/SEMICONDUCTOR INTERFACES   786   135 - 145   2004

Comparative studies on oxygen diffusion coefficients for amorphous and gamma-Al2O3 films using O-18 isotope

T Nabatame, T Yasuda, M Nishizawa, M Ikeda, T Horikawa, A Toriumi

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   42 ( 12 )   7205 - 7208   2003.12

Void nucleation in thin HfO2 layer on Si Reviewed

N Miyata, T Nabatame, T Horikawa, M Ichikawa, A Toriumi

APPLIED PHYSICS LETTERS   82 ( 22 )   3880 - 3882   2003.6

Effect of Al2O3 capping layer on suppression of interfacial SiO2 growth in HfO2/ultrathin SiO2/Si(001) structure Reviewed

M Kundu, N Miyata, T Nabatame, T Horikawa, M Ichikawa, A Toriumi

APPLIED PHYSICS LETTERS   82 ( 20 )   3442 - 3444   2003.5

Thermal stability of a thin HfO2/ultrathin SiO2/Si structure: Interfacial Si oxidation and silicidation

N Miyata, M Ichikawa, T Nabatame, T Horikawa, A Toriumi

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS   42 ( 2B )   L138 - L140   2003.2

Etching yields of HfO2 under Ar+ and CFX+ (X = 1, 2, 3) ion beam irradiation

Kazuhiro Karahashi, Nobuhisa Yamagishi, Tsuyoshi Horikawa, Akira Torium

2003

Improved fabrication process for Ru/BST/Ru capacitor by liquid source chemical vapor deposition Reviewed

M Tarutani, M Yamamuka, T Takenaga, T Kuroiwa, T Horikawa

THIN SOLID FILMS   409 ( 1 )   8 - 14   2002.4

Surface reaction mechanisms in the chemical vapor deposition of (Ba,Sr)TiO3 films

M. Yamamuka, T. Kawahara, M. Tarutani, T. Horikawa, T. Oomori, T. Shibano

Materials Research Society Symposium - Proceedings   2001.12

Measurement of atomic incorporation rates and modeling of surface reactions in (Ba, Sr)TiO3 films prepared by a liquid source chemical vapor deposition

M Yamamuka, T Kawahara, M Tarutani, T Horikawa, T Shibano, T Oomori

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   40 ( 5A )   3435 - 3441   2001.5

Conformal step coverage of (Ba,Sr)TiO3 films prepared by liquid source CVD using Ti(t-BuO)2(DPM)2

Takaaki Kawahara, Shigeru Matsuno, Mikio Yamamuka, Masayoshi Tarutani, Takehiko Sato, Tsuyoshi Horikawa, Fusaoki Uchikawa, Kouichi Ono, Kouichi Ono

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers   38 ( 4 )   2205 - 2209   1999.12

Modeling of gas-phase and surface reactions in liquid-source chemical-vapor deposition of (Ba,Sr)TiO3 films

M Yamamuka, T Kawahara, M Tarutani, T Horikawa, T Oomori, K Ono

JOURNAL OF APPLIED PHYSICS   86 ( 2 )   1082 - 1089   1999.7

Chemical vapor deposition technology of (Ba,Sr)TiO3 thin films for Gbit-scale dynamic random access memories Reviewed

T Horikawa, M Tarutani, T Kawahara, M Yamamuka, N Hirano, T Sato, S Matsuno, T Shibano, F Uchikawa, K Ono, T Oomori

FERROELECTRIC THIN FILMS VII   541   3 - 10   1999

Effects of post-annealing on dielectric properties of (Ba, Sr)TiO3 thin films prepared by liquid source chemical vapor deposition

Tsuyoshi Horikawa, Junji Tanimura, Takaaki Kawahara, Mikio Yamamuka, Masayoshi Tarutani, Kouichi Ono

IEICE Transactions on Electronics   E81-C   497 - 503   1998.12

Effects of post-annealing on dielectric properties of (Ba, Sr)TiO3 thin films prepared by liquid source chemical vapor deposition Reviewed

T Horikawa, J Tanimura, T Kawahara, M Yamamuka, M Tarutani, K Ono

IEICE TRANSACTIONS ON ELECTRONICS   E81C ( 4 )   497 - 504   1998.4

Mechanisms of x-ray radiation-induced damage in (Ba,Sr)TiO3 capacitors

M Tarutani, M Suita, T Horikawa, J Tanimura, T Kawahara, M Yamamura, H Sumitani, K Ono

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   37 ( 3B )   1328 - 1331   1998.3

Step coverage and electrical properties of (Ba,Sr)TiO3 films prepared by liquid source chemical vapor deposition Reviewed

T Kawahara, M Yamamuka, M Tarutani, T Horikawa, K Ono

DIELECTRIC MATERIAL INTEGRATION FOR MICROELECTRONICS   98 ( 3 )   190 - 195   1998

Effects of post-annealing on dielectric properties of (Ba, Sr)TiO3 thin films prepared by liquid source CVD

T Horikawa, T Kawahara, M Yamamuka, K Ono

INTEGRATED FERROELECTRICS   20 ( 1-4 )   249 - 250   1998

Effects of post-annealing on dielectric properties of (Ba, Sr)TiO3 thin films prepared by liquid source CVD Reviewed

T Horikawa, T Kawahara, M Yamamuka, K Ono

INTEGRATED FERROELECTRICS   20 ( 1-4 )   249 - 250   1998

Influence of buffer layers and barrier metals on properties of (Ba, Sr)TiO3 films prepared by liquid source chemical vapor deposition

T Kawahara, M Yamamuka, J Tanimura, M Tarutani, T Kuroiwa, T Horikawa, K Ono

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   36 ( 9B )   5874 - 5878   1997.9

Novel stacked capacitor technology for 1-Gbit DRAMs with (Ba,Sr)TiO3 thin films Reviewed

T Horikawa, A Yuuki, T Shibano, T Kawahara, T Makita, T Kuroiwa, M Yamamuka, T Oomori, N Mikami, K Ono

ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS   80 ( 5 )   70 - 78   1997.5

A mass spectrometric study of reaction mechanisms in chemical vapor deposition of (Ba, Sr)TiO3 films

M Yamamuka, T Kawahara, T Horikawa, K Ono

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   36 ( 4B )   2555 - 2560   1997.4

(Ba,Sr)TiO3 capacitor technology for Gbit-scale DRAMs Reviewed

N Mikami, T Kawahara, T Horikawa, M Yamamuka, T Makita, T Kuroiwa, A Yuuki, T Shibano, T Oomori, K Ono, S Satoh, H Abe

JOURNAL OF THE KOREAN PHYSICAL SOCIETY   29   S598 - S602   1996.11

Integration of BaxSr1-xTiO3 thin film for DRAM application Reviewed

K Kashihara, T Okudaira, Y Tsunemine, Y Ohno, H Itoh, T Nishimura, M Hirayama, T Horikawa, T Shibano, K Horie

MICROELECTRONIC DEVICE AND MULTILEVEL INTERCONNECTION TECHNOLOGY   2636   134 - 142   1995

Integration of BST thin film for DRAM fabrication Reviewed

H Itoh, K Kashihara, T Okudaira, Y Tsunemine, Y Ohno, T Nishimura, T Horikawa, T Shibano

INTEGRATED FERROELECTRICS   11 ( 1-4 )   101 - 109   1995

(BA0.75SR0.25) TIO3 FILMS FOR 256-MBIT DRAM

T HORIKAWA, N MIKAMI, H ITO, Y OHNO, T MAKITA, K SATO

IEICE TRANSACTIONS ON ELECTRONICS   E77C ( 3 )   385 - 391   1994.3

Dielectric properties of (BaxSr1–x)TiO3 thin films prepared by rf sputtering for dynamic random access memory application

Takeharu Kuroiwa, Yoshikazu Tsunemine, Tsuyoshi Horikawa, Tetsuro Makita, Jyunji Tanimura, Noboru Mikami, Kazunao Sato

Japanese Journal of Applied Physics   33 ( 9 S )   5187 - 5191   1994

Edge enhancement recording with ferroelectric liquid crystal spatial light modulator using si02/a-si:H photosensor Reviewed

Hajime Nakajima, Masahiro Shikai, Shin Tahata, Tsuyoshi Horikawa, Tatsuo Masumi

Ferroelectrics   149 ( 1 )   207 - 215   1993

ELECTRICAL-PROPERTIES AND FILM STRUCTURES OF (BAXSR1-X)TIO3 THIN-FILMS BY RF-SPUTTERING Reviewed

T MAKITA, T HORIKAWA, H KUROKI, M KATAOKA, J TANIMURA, N MIKAMI, K SATO, M NUNOSHITA

AMORPHOUS INSULATING THIN FILMS   284   529 - 534   1993

Uniformly aligned ferroelectric liquid crystal cell applied to a light valve Reviewed

Shin Tahata, Tatsuo Masumi, Shigeyuki Kaho, Masaya Mizunuma, Tsuyoshi Horikawa, Hajime Nakajima, Kazuro Nishi

Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals   222 ( 1 )   189 - 194   1992.1

UNIFORMLY ALIGNED FERROELECTRIC LIQUID-CRYSTAL CELL APPLIED TO A LIGHT VALVE Reviewed

S TAHATA, T MASUMI, S KAHO, M MIZUNUMA, T HORIKAWA, H NAKAJIMA, K NISHI

MOLECULAR CRYSTALS AND LIQUID CRYSTALS   223 ( 1 )   189 - 194   1992

FERROELECTRIC LIQUID-CRYSTAL LIGHT VALVE USING SIO2 A-SI-H PHOTODIODE Reviewed

T HORIKAWA, S TAHATA, S KAHO, T MASUMI, N MIKAMI, K TAKAHASHI, M NUNOSHITA, H NAKAJIMA, K NISHI

AMORPHOUS SILICON TECHNOLOGY - 1991   219   203 - 208   1991

HIGH-RESOLUTION DISPLAY USING A LASER ADDRESSED FERROELECTRIC LIQUID-CRYSTAL LIGHT VALVE Reviewed

H NAKAJIMA, J KISAKI, S TAHATA, T HORIKAWA, K NISHI

LARGE-SCREEN-PROJECTION, AVIONIC, AND HELMET-MOUNTED DISPLAYS   1456   29 - 39   1991

GENERAL GRAPH-THEORETICAL FORMULA FOR THE LONDON SUSCEPTIBILITY OF A CYCLIC CONJUGATED SYSTEM WITH HIGHLY DEGENERATE ORBITALS Reviewed

J AIHARA, T HORIKAWA

CHEMICAL PHYSICS LETTERS   95 ( 6 )   561 - 563   1983

GRAPH-THEORETICAL FORMULA FOR RING CURRENTS INDUCED IN A POLYCYCLIC CONJUGATED SYSTEM Reviewed

J AIHARA, T HORIKAWA

BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN   56 ( 6 )   1853 - 1854   1983

CONTRIBUTION OF QUADRUPLY DEGENERATE PI-ELECTRON ORBITALS TO LONDON SUSCEPTIBILITY Reviewed

T HORIKAWA, J AIHARA

BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN   56 ( 5 )   1547 - 1548   1983

新LSI技術体系 MIRAIの挑戦

鳥海 明, 生田目 俊秀, 堀川 剛

日経マイクロデバイス   2002 ( 12 )   163 - 170   2002.12

半導体デバイス : 微細化を越えて機能融合へ

高田裕, 堀川剛

三菱電機技報   75(1)   2001.1

The latest semiconductor processes technology in 2000. Technology & Equipment. The first edition. Chapter 2. New materials and new process technologies in the 0.13 .MU.m age. Capacitor formation process to which introduction of high dielectric is aime

KASHIHARA KEIICHIRO, TSUNEMINE YOSHIKAZU, ABURATANI AKISHIGE, OKUHIRA TOMOHITO, FUJITA YASUSHI, HORIKAWA TSUYOSHI, SHIBANO TERUO, OMORI TATSUO, INUISHI MASAHIDE

月刊Semiconductor World   18 ( 13 )   58 - 64   1999.11

BST technologies of MITSUBISHI.

KASHIWABARA KEIICHIRO, ABURATANI AKIE, OKUDAIRA TOMOHITO, FUJITA YASUSHI, ITO HIROMI, HORIKAWA TSUYOSHI, SHIBANO TERUO, OMORI TATSUO, ONO KOICHI

月刊Semiconductor World   18 ( 4 )   58 - 63   1999.4

Applications and developments of material and analsyis techniques. BST capacitor film for next generation memory prepared by vaporized solution source CVD.

MATSUNO SHIGERU, HORIKAWA TSUYOSHI, SATO TAKEHIKO, KAWAHARA TAKAAKI, UCHIKAWA HIDEOKI

三菱電機技報   73 ( 2 )   116 - 119   1999.2

Dielectric Properties of (BaxSr1-x)TiO3 Thin Films Deposited by RF Sputtering. Invited

HORIKAWA Tsuyoshi

J. Surf. Sci. Soc. Jpn.   17 ( 11 )   660 - 665   1996.11

Ru/BST/Ru Stacked Capacitor Cell for a 1Gbit DRAM Fabricated by X-Ray Lithography.

NISHIOKA YASUTAKA, HORIKAWA TSUYOSHI, SUMITANI HIROAKI, SHIBANO TERUO, YUKI TERUMASA, KIMURA YOSHIKA

三菱電機技報   70 ( 3 )   322 - 326   1996.3

(Ba,Sr)TiO3 Thin films for DRAM Capacitor.

MIKAMI NOBORU, HORIKAWA TSUYOSHI, MAKITA TETSURO, TSUNEMINE YOSHIKAZU, KUROIWA TAKEHARU, NANBA KEITEN

NSMF News (New Supercond Mater Forum)   1994.10

256MDRAMセル向けに高誘電率膜の薄膜と低リークを両立 Invited

栄森 貴尚, 大野 吉和, 伊藤 博巳, 西村 正, 堀川 剛, 芝野 照夫, 佐藤 一直, 難波 敬典

日経マイクロデバイス   1994 ( 2 )   99 - 103   1994.2

Low-loss amorphous-Si Strip-Loaded Thin Film Lithium Niobate on Insulator Waveguides with Compact Bending Radius

Moataz Eissa, Yoshitaka Ohiso, Kensuke Ogawa, Yuki Nomoto, Tsuyoshi Horikawa, Shoichiro Yamaguchi, Masahiko Namerikawa, Nobuhiko Nishiyama

2025 30TH OPTOELECTRONICS AND COMMUNICATIONS CONFERENCE, OECC AND 2025 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING AND COMPUTING, PSC  2025 

Coupling structure for enabling both wafer- and chip-level characterization of silicon photonic integrated circuits

Moataz Eissa, Ryuya Sasaki, Tsuyoshi Horikawa, Tomohiro Amemiya, Nobuhiko Nishiyama

2024 IEEE SILICON PHOTONICS CONFERENCE, SIPHOTONICS  2024 

Peak Frequency Control of Photon-Photon Resonance GaInAsP Membrane DR Lasers on Si with Rear-Side Spacer Waveguide

N. Takahashi, S. Yoshida, Y. Oiso, T. Horikawa, K. Tsutsui, K. Nishimura, S. Nimura, H. Takahashi, M. Suzuki, N. Nishiyama

Conference Digest - IEEE International Semiconductor Laser Conference  2024 

Formulation for multiple reflection in silicon waveguide observed in OFDR depth profile

Tsuyoshi Horikawa, Atsushi Kitamura, Masanori Yatani, Nobuhiko Nishiyama

2024 IEEE PHOTONICS CONFERENCE, IPC 2024  2024 

Precise waveguide loss extraction using 300-mm wafer-level OFDR for optical process control monitoring

Tsuyoshi Horikawa, Atsushi Kitamura, Masanori Yatani, Nobuhiko Nishiyama

2024 IEEE SILICON PHOTONICS CONFERENCE, SIPHOTONICS  2024 

Extraction of Reflection Coefficient in Silicon Waveguides using Multiple Reflection Signals in OFDR

Tsuyoshi Horikawa, Atsushi Kitamura, Masanori Yatani, Nobuhiko Nishiyama

CLEO: Applications and Technology, CLEO: A and T 2024 in Proceedings CLEO 2024 - Part of Conference on Lasers and Electro-Optics  2024 

Monolithic integration of various-type III-V epitaxial structures on silicon-photonics platform using chip-on-wafer hydrophilic bonding process

Takehiko Kikuchi, Munetaka Kurokawa, Naoki Fujiwara, Naoko Inoue, Takuya Mitarai, Hidenari Fujikata, Takuo Hiratani, Toshiyuki Nitta, Yuhki Itoh, Tohma Watanabe, Chang-Yong Lee, Akira Furuya, Tsuyoshi Horikawa, Nobuhiko Nishiyama, Hideki Yagi

2024 IEEE SILICON PHOTONICS CONFERENCE, SIPHOTONICS  2024 

Wafer-level characterization of integrated optical devices using OFDR-Highly reproducible extraction of propagation loss in wire-waveguides-

堀川剛, 北村敦, 八谷将典, 西山伸彦, 西山伸彦, 西山伸彦

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2023.9 

Status and Prospects of the Integrated Photonics Ecosystem

堀川剛

電子情報通信学会技術研究報告(Web)  2023.8 

Inverse Design of Low Back Reflection Grating Coupler

Yuduan Wang, Tsuyoshi Horikawa, Yoshitaka Ohiso, Tomohiro Amemiya, Nobuhiko Nishiyama

JSAP-Optica Joint Symposia in Proceedings JSAP-Optica Joint Symposia 2023 Abstracts, JSAP 2023  2023 

Impact of Reflections at MMI Combiner in Mach-Zehnder Silicon Optical Modulators: Towards Extrinsic OMA Enhancement

村尾覚志, 堀川剛

電子情報通信学会技術研究報告(Web)  2023 

Variation Analysis for Splitting Ratio of Directional Coupler Based on Waveguide Process Monitoring

堀川剛, 西山伸彦, 西山伸彦, 西山伸彦

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2023 

UV Nanoimprinting process development for large-scale integrated photonics

雨宮智宏, 岡田祥, 高橋直樹, 佐々木龍耶, 堀川剛, 渥美裕樹, 小田悠貴, 原悠太, 野田真司, 山本宏, UHRMANN Thomas, KNEIDINGER Andrea, 森莉紗子, 藤井恭, 浅井隆宏, 塩田大, 西山伸彦

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2023 

Extraordinary OMA enhancement effect in Mach-Zehnder Silicon Optical Modulators

村尾覚志, 堀川剛

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2023 

Impact of Reflections at MMI Combiner on Dynamic Extinction Ratio in Mach-Zehnder Silicon Optical Modulators

村尾覚志, 堀川剛

電子情報通信学会大会講演論文集(CD-ROM)  2023 

Analysis of Adjustable Chirp in Mach-Zehnder Silicon Optical Modulators in Dual-Drive Regime

村尾覚志, 牛田淳, 高橋博之, 徳島正敏, 椎名明美, 堀川剛

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2022 

Impact of Inter-Arm Imbalance on Frequency Chirp in Mach-Zehnder Silicon Optical Modulators

村尾覚志, 牛田淳, 高橋博之, 徳島正敏, 椎名明美, 堀川剛

電子情報通信学会大会講演論文集(CD-ROM)  2022 

Theoretical and Experimental Investigation of Frequency Chirp Induced by Inter-Arm Imbalance in Mach-Zehnder Silicon Optical Modulators

村尾覚志, 村尾覚志, 牛田淳, 高橋博之, 徳島正敏, 椎名明美, 堀川剛

電子情報通信学会技術研究報告(Web)  2022 

Evaluation of Absorption Losses in Each Arm Separately in Mach-Zehnder Silicon Optical Modulators: How to Include Effect of Power-Split Imbalance

村尾覚志, 牛田淳, 高橋博之, 徳島正敏, 椎名明美, 堀川剛

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2022 

Compact Modeling and Parametric Extraction for Optical Phase Shifters in Carrier-Depletion MachZehnder Silicon Modulators

村尾覚志, 牛田淳, 高橋博之, 徳島正敏, 椎名明美, 堀川剛

電子情報通信学会大会講演論文集(CD-ROM)  2021 

Theoretical and Experimental Investigation of OMA Penalty by Inter-Arm Imbalance in Mach-Zehnder Silicon Optical Modulators

村尾覚志, 牛田淳, 高橋博之, 徳島正敏, 椎名明美, 堀川剛

電子情報通信学会技術研究報告(Web)  2021 

Fully-Automatic Wafer-Level Testing for Extinction Ratio and Absorption Loss in Mach-Zehnder Silicon Optical Modulators

村尾覚志, 牛田淳, 高橋博之, 徳島正敏, 椎名明美, 堀川剛

電子情報通信学会大会講演論文集(CD-ROM)  2021 

OMA penalty by Inter-Arm Imbalance in Mach-Zehnder Silicon Optical Modulators

村尾覚志, 牛田淳, 高橋博之, 徳島正敏, 椎名明美, 堀川剛

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2021 

Extraction of SOI thickness deviation based on resonant wavelength analysis for silicon photonics devices

Tsuyoshi Horikawa, Daisuke Shimura, Hiroyuki Takahashi, Jun Ushida, Yohei Sobu, Akemi Shiina, Masatoshi Tokushima, Seok Hwan Jeong, Keizo Kinoshita, Tohru Mogami

2017 IEEE SOI-3D-Subthreshold Microelectronics Unified Conference, S3S 2017  2018.3 

300mmラインによるシリコンフォトニクス集積回路開発と今後の展望

最上徹, 堀川剛, 堀川剛

電子情報通信学会大会講演論文集(CD-ROM)  2018.3 

シリコンリング共振器のスペクトルを用いた導波路加工偏差解析

堀川剛, 堀川剛, 志村大輔, 高橋博之, 牛田淳, 蘇武洋平, 椎名明美, JEONG Seok‐Hwan, 徳島正敏, 木下啓藏, 最上徹

電子情報通信学会大会講演論文集(CD-ROM)  2018.3 

Spectral Variation Analysis of Integrated Silicon Photonics Devices by Using Optical Wafer Probing

Tsuyoshi Horikawa, Tohru Mogami

2018 INTERNATIONAL CONFERENCE ON IC DESIGN AND TECHNOLOGY (ICICDT 2018)  2018 

Advanced devices and packaging of Si-photonics-based optical transceiver for optical interconnection Invited

K. Kurata, K. Yashiki, J. Fujikata, T. Horikawa, K. Kinoshita, J. Ushida, M. Tokushima, Y. Suzuki, D. Okamoto, S. Takahashi, A. Ukita, K. Takemura, Y. Ibusuki, T. Shimizu, M. Kurihara, Y. Hagihara, T. Mogami, T. Nakamura

2017 IEDM  2017.12 

High-performance Si optical modulator with strained p-SiGe layer and its application to 25 Gbps optical transceiver

Junichi Fujikata, Keizo Kinoshita, Jaehoon Han, Tsuyoshi Horikawa, Shigeki Takahashi, Kenichiro Yashiki, Mitsuru Kurihara, Yasuhiko Hagihara, Mitsuru Takenaka, Takahiro Nakamura, Kazuhiko Kurata, Tohru Mogami

14th International Conference on Group IV Photonics, GFP 2017  2017.10 

簡易構造横PIN型Ge受光器の高速動作特性

下山峰史, 木下啓藏, 堀川剛, 田中有, 最上徹

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2017.8 

シリコン導波路における光反射の解析

臼杵達哉, 蘇武洋平, JEONG Seok‐Hwan, 堀川剛

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2017.8 

High-performance silicon photonics platform for low-power photonic integrated circuits

Tohru Mogami, Tsuyoshi Horikawa, Keizo Kinoshita

Proceedings of the 24th International Conference on Mixed Design of Integrated Circuits and Systems, MIXDES 2017  2017.8 

High density optical and electrical interfaces for chip-scale silicon photonic receiver

Koichi Takemura, Yasuhiro Ibusuki, Akio Ukita, Mitsuru Kurihara, Keizo Kinoshita, Daisuke Okamoto, Junichi Fujikata, Kenichiro Yashiki, Yasuyuki Suzuki, Tsuyoshi Horikawa, Tohru Mogami, Kazuhiko Kurata

2017 International Conference on Electronics Packaging, ICEP 2017  2017.6 

Cu/ポリイミド再配線を適用した12ch用光I/Oコア受信機

竹村浩一, 木下啓藏, 岡本大典, 浮田明生, 指宿康弘, 栗原充, 藤方潤一, 屋敷健一郎, 鈴木康之, 堀川剛, 最上徹, 蔵田和彦

エレクトロニクス実装学会講演大会講演論文集(CD-ROM)  2017.3 

シリコン導波路における光散乱の解析

臼杵達哉, 蘇武洋平, JEONG Seok‐Hwan, 堀川剛

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2017.3 

高集積受信回路実現に向けた300mm径SOI基板上高性能面入射型Ge受光器の開発

藤方潤一, 木下啓藏, 堀川剛, 堀川剛, 竹村浩一, 岡本大典, 高橋重樹, 今井雅彦, 野口将高, 鈴木康之, 栗原充, 萩原靖彦, 中村隆宏, 蔵田和彦, 最上徹

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2017.3 

A 300-mm-wafer silicon photonics technology for ultra-low energy optical network systems

Koji Yamada, Tsuyoshi Horikawa, Makoto Okano, Guangwei Cong, Yuriko Maegami, Morifumi Ohno, Noritsugu Yamamoto, Keijiro Suzuki, Ken Tanizawa, Satoshi Suda, Hiroyuki Matsuura, Keiji Koshino, Nobuyuki Yokoyama, Minoru Ohtsuka, Miyoshi Seki, Kazuyuki Matsumaro, Toshihiro Narushima, Kazuhiro Ikeda, Hitoshi Kawashima, Shu Namiki, Masahiko Mori

2017 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP)  2017 

High-performance silicon photonics process platform for low-power photonic integrated circuits

Tohru Mogami, Suguru Akiyama, Takeshi Baba, Shigekazu Okumura, Junichi Fujikata, Tsuyoshi Horikawa, Keizo Kinoshita

2016 IEEE Silicon Nanoelectronics Workshop, SNW 2016  2016.9 

シリコングレーティングカプラの波長特性ばらつきに及ぼす製造誤差の影響

堀川剛, 堀川剛, 牛田淳, 蘇武洋平, 志村大輔, 椎名明美, 徳島正敏, JEONG Seok‐Hwan, 木下啓藏, 最上徹

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2016.9 

Ultra-fme Si photonics fabrication technology based on 40-nm-node CMOS process

Tsuyoshi Horikawa, Tohru Mogami

IEEE International Conference on Group IV Photonics GFP  2015.10  IEEE Computer Society

Process Issues in Optical Integrated Circuits using Silicon Photonics Technology (IV) Developments on Ge/Si Selective Epitaxial Growth Processes for Photodetector

Kinoshita Keizo, Okumura Shigekazu, Fujikata Junichi, Horikawa Tsuyoshi, Mogami Tohru

JSAP Annual Meetings Extended Abstracts  2015.8  The Japan Society of Applied Physics

選択成長Siキャップ層適用低暗電流Ge受光器の開発

OKUMURA SHIGEKAZU, KINOSHITA KEIZO, FUJIKATA JUN'ICHI, SHIMOYAMA TAKASHI, ONO HIDEKI, TANAKA YU, MORITO KEN, HORIKAWA TSUYOSHI, MOGAMI TOORU

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2015.8 

シリコンフォトニクス光集積回路におけるプロセス課題(III)低LER加工と表面清浄化による低損失導波路の形成

HORIKAWA TSUYOSHI, HORIKAWA TSUYOSHI, SHIMURA DAISUKE, JEONG SEOK-HWAN, TOKUSHIMA MASATOSHI, KINOSHITA KEIZO, MOGAMI TOORU

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2015.8 

シリコンフォトニクス光集積回路におけるプロセス課題(IV)Ge受光器に向けた選択Ge/Siエピ成長技術開発

KINOSHITA KEIZO, OKUMURA SHIGEKAZU, FUJIKATA JUN'ICHI, HORIKAWA TSUYOSHI, HORIKAWA TSUYOSHI, MOGAMI TOORU

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2015.8 

CI-4-7 Low-loss and High-precision Si Wire-waveguides Invited

Horikawa Tsuyoshi, Mogami Tohru

Proceedings of the Society Conference of IEICE  2015.8 

シリコンフォトニクス技術を用いた光インターコネクション Invited

MOGAMI TOORU, HORIKAWA TSUYOSHI

半導体・集積回路技術シンポジウム講演論文集  2015.7 

Process Issues in Optical Integrated Circuits using Silicon Photonics Technology (II) Process Integration and Assembly of Optical Modules

Kinoshita Keizo, Horikawa Tsuyoshi, Okumura Shigekazu, Takemura Koichi, Shimizu Takanori, Fujikata Junichi, Mogami Tohru

JSAP Annual Meetings Extended Abstracts  2015.2  The Japan Society of Applied Physics

シリコンフォトニクス光集積回路におけるプロセス課題(II)光機能素子の集積と実装

KINOSHITA KEIZO, HORIKAWA TSUYOSHI, OKUMURA SHIGEKAZU, TAKEMURA KOICHI, SHIMIZU TAKANORI, FUJIKATA JUN'ICHI, MOGAMI TOORU

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2015.2 

Siの結晶異方性エッチングを利用したスポットサイズ変換器

MIYAMURA SATOSHI, ONO HIDEKI, OKABE YUTAKA, ONAWA YOSUKE, YAEGASHI HIROKI, HORIKAWA TSUYOSHI, HIRAYAMA NAOKI, SASAKI HIROKI

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2015.2 

シリコンフォトニクス光集積回路におけるプロセス課題(I)高精度加工及びプロセスモニタリング

HORIKAWA TSUYOSHI, SHIMURA DAISUKE, JEONG SEOK-HWAN, TOKUSHIMA MASATOSHI, KINOSHITA KEIZO, MOGAMI TOORU

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2015.2 

Ultra-fine Si photonics fabrication technology based on 40-nm-node CMOS process

Tsuyoshi Horikawa, Tohru Mogami

2015 IEEE 12TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP)  2015 

Process Control and Monitoring in Device Fabrication for Optical Interconnection using Silicon Photonics Technology

Tsuyoshi Horikawa, Daisuke Shimura, Seok-Hwan Jeong, Masatoshi Tokushima, Keizo Kinoshita, Tohru Mogami

2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)  2015 

A 300mm Si Photonics Platform for Optical Interconnection

Tohru Mogami, Tsuyoshi Horikawa, Keizo Kinoshita, Hironori Sasaki, Ken Morito, Kazuhiko Kurata

2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)  2015 

A 300mm Si Photonics Platform for Multi-applications

Tohru Mogami, Tsuyoshi Horikawa, Keizo Kinoshita, Hironori Sasaki, Ken Morito, Kazuhiko Kurata

2015 OPTO-ELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC)  2015 

C-3-57 Propagation Loss and Fabrication Error in Silicon-Wire Based Silicon Photonic Devices

Horikawa Tsuyoshi, Shimura Daisuke, Jeong Seok-Hwan, Tokushima Masatoshi, Mogami Tohru

Proceedings of the Society Conference of IEICE  2014.9 

MOS型Si光変調器とGe受光器の集積化とCMOS駆動による高速動作

FUJIKATA JUN'ICHI, TAKAHASHI SHIGEKI, TAKAHASHI MASASHI, NOGUCHI MASATAKA, NOGUCHI HIDEMI, KURIHARA MITSURU, HORIKAWA TSUYOSHI, NAKAMURA TAKAHIRO, ARAKAWA YASUHIKO

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2014.9 

Si細線導波路に対応した偏波無依存型スポットサイズ変換器

MIYAMURA SATOSHI, OKABE YUTAKA, ONO HIDEKI, KAMEI AKIO, TOKUSHIMA MASATOSHI, HORIKAWA TSUYOSHI, SASAKI HIRONORI

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2014.9 

PINダイオードを用いたシリコン変調器によるαV_πLの低減

BABA TAKESHI, AKIYAMA SUGURU, IMAI MASAHIKO, HORIKAWA TSUYOSHI, USUKI TATSUYA

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2014.9 

極薄膜Geシード層を適用したSi(001)基板上Ge層の低暗電流の観察

OKUMURA SHIGEKAZU, SHIMOYAMA TAKASHI, ONO HIDEKI, MIURA MAKOTO, NOGUCHI MASATAKA, FUJIKATA JUN'ICHI, MOGAMI TOORU, HORIKAWA TSUYOSHI, TANAKA TAMOTSU, MORITO KEN

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2014.9 

First demonstration of athermal silicon optical interposers with quantum dot lasers operating up to 125 °C International conference

Yutaka Urino, Nobuaki Hatori, Takeshi Akagawa, Takanori Shimizu, Makoto Okano, Masashige Ishizaka, Tsuyoshi Yamamoto, Hideaki Okayama, Yosuke Onawa, Hiroyuki Takahashi, Daisuke Shimura, Hiroki Yaegashi, Hidetaka Nishi, Hiroshi Fukuda, Koji Yamada, Makoto Miura, Junichi Fujikata, Suguru Akiyama, Takeshi Baba, Tatsuya Usuki, Yoshiji Noguchi, Masataka Noguchi, Masahiko Imai, Naoki Hirayama, Shigeru Saitou, Masashi Yamagishi, Masashi Takahashi, Emiko Saito, Daisuke Okamoto, Masahiko Mori, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakaw

ECOC 2014  2014.9 

C-3-71 Demonstration of 1200-Channel Hybrid Integrated Light Source for Ultra-High Bandwidth Interchip Optical Interconnection

Shimizu Takanori, Okano Makoto, Takahashi Hiroyuki, Hatori Nobuaki, Ishizaka Masashige, Yamamoto Tsuyoshi, Mori Masahiko, Horikawa Tsuyoshi, Urino Yutaka, Nakamura Takahiro, Arakawa Yasuhiko

Proceedings of the IEICE General Conference  2014.3 

C-3-77 Si-Wire Delayed Interferometer Based Demultiplexers Fabricated by 300-mm Wafer-scale ArF-Immersion Lithography Process

Jeong Seok-Hwan, Shimura Daisuke, Simoyama Takasi, Horikawa Tsuyoshi, Tanaka Yu, Morito Ken

Proceedings of the IEICE General Conference  2014.3 

C-3-81 Link demonstration of silicon optical interposers with quantum dot lasers at high temperature Invited

Urino Yutaka, Hatori Nobuaki, Akagawa Takeshi, Shimizu Takanori, Okano Makoto, Ishizaka Masashige, Yamamoto Tsuyoshi, Okayama Hideaki, Onawa Yosuke, Takahashi Hiroyuki, Shimura Daisuke, Yaegashi Hiroki, Nishi Hidetaka, Fukuda Hiroshi, Yamada Koji, Miura Makoto, Fujikata Junichi, Akiyama Suguru, Baba Takeshi, Usuki Tatsuya, Noguchi Yoshiji, Noguchi Masataka, Imai Masahiko, Hirayama Naoki, Saitou Shigeru, Yamagishi Masashi, Takahashi Masashi, Saito Emiko, Okamoto Daisuke, Mori Masahiko, Horikawa Tsuyoshi, Nakamura Takahiro, Arakawa Yasuhiko

Proceedings of the IEICE General Conference  2014.3 

C-3-76 Platform Technology for Process Integration in Silicon Photonics

Horikawa Tsuyoshi, Noguchi Yoshiji, Noguchi Masataka, Imai Masahiko, Yamagishi Masashi, Saitou Shigeru, Hirayama Naoki, Saito Emiko, Takahashi Masashi, Takahashi Hiroyuki, Urino Yutaka, Akiyama Suguru, Fujikata Junichi, Miura Makoto, Shimizu Takanori, Okano Makoto, Hatori Nobuaki, Nakamura Takahiro

Proceedings of the IEICE General Conference  2014.3 

CI-2-2 Integration technology of silicon nano-photonic devices for inter-chip optical interconnects Invited

Urino Yutaka, Usuki Tatsuya, Fujikata Junichi, Ishizaka Masashige, Yamada Koji, Horikawa Tsuyoshi, Nakamura Takahiro, Arakawa Yasuhiko

Proceedings of the IEICE General Conference  2014.3 

大容量チップ間光インターコネクション向けハイブリッド集積光源の1200チャンネル動作

SHIMIZU TAKANORI, OKANO MAKOTO, TAKAHASHI HIROYUKI, HATORI NOBUAKI, ISHIZAKA MASASHIGE, YAMAMOTO TSUYOSHI, MORI MASAHIKO, HORIKAWA TSUYOSHI, URINO YUTAKA, NAKAMURA TAKAHIRO, ARAKAWA YASUHIKO

電子情報通信学会大会講演論文集(CD-ROM)  2014.3 

3D‐AFMおよびCDSEMによるSi光導波路側面ラフネス解析

HIRAYAMA NAOKI, YAMAGISHI MASASHI, NOGUCHI YOSHIJI, SAITO SHIGERU, TAKAHASHI HIROYUKI, HORIKAWA TSUYOSHI

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2014.3 

Al系積層型ジョセフソン接合を用いた超伝導量子ビットの作製

SATO TETSURO, NOGUCHI YOSHIJI, YAMAGISHI MASASHI, NAGASAWA SHUICHI, HINODE KENJI, HIDAKA MUTSUO, MAEZAWA MASAAKI, HORIKAWA TSUYOSHI

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2014.3 

Trilayer Junction Technology for Superconducting Quantum Integrated Circuit

MAEZAWA MASAAKI, SATO TETSUO, NOGUCHI YOSHIJI, YAMAGISHI MASASHI, HIDAKA MUTSUO, HORIKAWA TSUYOSHI

電子情報通信学会技術研究報告  2014.1 

Fully integrated silicon optical interposers with high bandwidth density

Yutaka Urino, Tatsuya Usuki, Junichi Fujikata, Masashige Ishizaka, Koji Yamada, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

Optics InfoBase Conference Papers  2014.1 

Observation of Suppressed dark current of Ge on Si (100) using ultrathin Ge seed layer

Shigekazu Okumura, Takasi Simoyama, Hideki Ono, Masaki Okuno, Makoto Miura, Junichi Fujikata, Masataka Noguchi, Tohru Mogami, Tsuyoshi Horikawa, Yu Tanaka, Ken Morito

2014 7TH INTERNATIONAL SILICON-GERMANIUM TECHNOLOGY AND DEVICE MEETING (ISTDM)  2014 

3D-AFMおよびCDSEMによるSi光導波路側面ラフネス解析

平山直紀, 平山直紀, 山岸雅司, 山岸雅司, 埜口良二, 埜口良二, 斉藤茂, 斉藤茂, 高橋博之, 高橋博之, 堀川剛, 堀川剛

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2014 

シリコンフォトニクス細線導波路デバイスの伝搬損失と製造誤差

堀川剛, 志村大輔, JEONG Seok-Hwan, 徳島正敏, 最上徹

電子情報通信学会大会講演論文集(CD-ROM)  2014 

Delayed Interferometer Based Si-wire WDM Demultiplexers Fabricated by Phase Controllable and Productive 300-mm Wafer-scale ArF-Immersion Lithography Technology

Seok-Hwan Jeong, Daisuke Shimura, Takasi Simoyama, Tsuyoshi Horikawa, Yu Tanaka, Ken Morito

2014 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC)  2014 

Demonstration of over 1000-Channel Hybrid Integrated Light Source for Ultra-High Bandwidth Interchip Optical Interconnection

Takanori Shimizu, Makoto Okano, Hiroyuki Takahashi, Nobuaki Hatori, Masashige Ishizaka, Tsuyoshi Yamamoto, Masahiko Mori, Tsuyoshi Horikawa, Yutaka Urino, Takahiro Nakamura, Yasuhiko Arakawa

2014 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXHIBITION (OFC)  2014 

Multi-channel and High-density Hybrid Integrated Light Source by Thermal Management for Low Power Consumption for Ultra-high Bandwidth Optical Interconnection

Takanori Shimizu, Makoto Okano, Hiroyuki Takahashi, Nobuaki Hatori, Masashige Ishizaka, Tsuyoshi Yamamoto, Masahiko Mori, Tsuyoshi Horikawa, Yutaka Urino, Takahiro Nakamura, Yashuhiko Arakawa

2014 INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING (ICEP)  2014 

シリコンフォトニクスに向けた集積プロセスプラットフォーム技術

堀川剛, 堀川剛, 埜口良二, 埜口良二, 野口将高, 野口将高, 今井雅彦, 今井雅彦, 山岸雅司, 山岸雅司, 斎藤茂, 斎藤茂, 平山直紀, 平山直紀, 斉藤恵美子, 斉藤恵美子, 高橋正志, 高橋正志, 高橋博之, 高橋博之, 賣野豊, 賣野豊, 秋山傑, 秋山傑, 藤方潤一, 藤方潤一, 三浦真, 三浦真, 清水隆徳, 清水隆徳, 岡野誠, 岡野誠, 羽鳥伸明, 羽鳥伸明, 中村隆宏, 中村隆宏

電子情報通信学会大会講演論文集(CD-ROM)  2014 

300ミリArF液浸露光工程を用いて作製したシリコン細線遅延干渉型合分波器

JEONG Seok-Hwan, 志村大輔, 下山峰史, 堀川剛, 堀川剛, 田中有, 森戸健

電子情報通信学会大会講演論文集(CD-ROM)  2014 

Demonstration of 25-Gbps Optical Data Links on Silicon Optical Interposer Using FPGA Transceiver

Daisuke Okamoto, Yutaka Urino, Takeshi Akagawa, Suguru Akiyama, Takeshi Baba, Tatsuya Usuki, Makoto Miura, Junichi Fujikata, Takanori Shimizu, Makoto Okano, Nobuaki Hatori, Masashige Ishizaka, Tsuyoshi Yamamoto, Hiroyuki Takahashi, Yoshiji Noguchi, Masataka Noguchi, Masahiko Imai, Masashi Yamagishi, Shigeru Saitou, Naoki Hirayama, Masashi Takahashi, Emiko Saito, Daisuke Shimura, Hideaki Okayama, Yosuke Onawa, Hiroki Yaegashi, Hidetaka Nishi, Hiroshi Fukuda, Koji Yamada, Masahiko Mori, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

2014 EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC)  2014 

High precision Si waveguide devices designed for 1.31 mu m and 1.55 mu m wavelengths on 300mm-SOI

Daisuke Shimura, Tsuyoshi Horikawa, Hideaki Okayama, Seok-Hwan Jeong, Masatoshi Tokushima, Hironori Sasaki, Tohru Mogami

2014 IEEE 11TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP)  2014 

Low-alpha V L-pi 25-Gb/s Silicon Modulator Based on Forward-Biased Pin Diodes

T. Baba, S. Akiyama, M. Imai, T. Horikawa, T. Usuki

2014 IEEE 11TH INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS (GFP)  2014 

Low-loss and flatband silicon-nanowire-based 5th-order coupled resonator optical waveguides (CROW) fabricated by ArF-immersion lithography process on a 300-mm SOI wafer

Seok-Hwan Jeong, Daisuke Shimura, Takasi Simoyama, Miyoshi Seki, Nobuyuki Yokoyama, Minoru Ohtsuka, Keiji Koshino, Tsuyoshi Horikawa, Yu Tanaka, Ken Morito

SILICON PHOTONICS IX  2014 

Advances in photonics-electronics convergent system technology Invited International conference

Yasuhiko Arakawa, Yasuhiko Arakawa, Takahiro Nakamura, Takahiro Nakamura, Yutaka Urino, Yutaka Urino, Tsuyoshi Horikawa, Tsuyoshi Horikawa

Optics InfoBase Conference Papers  2013.12 

Si wire array waveguide grating with reduced phase error: Effect of advanced lithography process International conference

H. Okayama, D. Shimura, H. Takahashi, M. Seki, M. Toyama, T. Sano, K. Koshino, N. Yokoyama, M. Ohtsuka, A. Sugiyama, S. Ishitsuka, T. Tsuchizawa, H. Nishi, K. Yamada, H. Yaegashi, T. Horikawa, H. Sasaki

2013 18th OptoElectronics and Communications Conference Held Jointly with 2013 International Conference on Photonics in Switching, OECC/PS 2013  2013.10 

全ての光コンポーネントを単一シリコン基板上に集積したシリコン光インターポーザの30Tbps/cm²動作実証 Invited

URINO YUTAKA, AKIYAMA SUGURU, AKAGAWA TAKESHI, BABA TAKESHI, USUKI TATSUYA, OKAMOTO DAISUKE, MIURA MAKOTO, FUJIKATA JUN'ICHI, SHIMIZU TAKANORI, OKANO MAKOTO, HATORI NOBUAKI, ISHIZAKA MASASHIGE, YAMAMOTO TSUYOSHI, TAKAHASHI HIROYUKI, NOGUCHI YOSHIJI, NOGUCHI MASATAKA, IMAI MASAHIKO, YAMAGISHI MASASHI, SAITO SHIGERU, HIRAYAMA NAOKI, TAKAHASHI MASASHI, SAITO EMIKO, SHIMURA DAISUKE, OKAYAMA HIDEAKI, ONAWA YOSUKE, YAEGASHI HIROKI, NISHI HIDETAKA, FUKUDA HIROSHI, YAMADA KOJI, MORI MASAHIKO, HORIKAWA TSUYOSHI, NAKAMURA TAKAHIRO, ARAKAWA YASUHIKO

電子情報通信学会大会講演論文集(CD-ROM)  2013.9 

Two-Dimensional Photonic Crystal Slab Waveguides Fabricated by Using Immersion ArF Excimer Lithography

Horikawa Tsuyoshi, Okano Makoto, Suzuki Keijiro, Toyama Munehiro, Seki Miyoshi, Sano Tsukuru

Proceedings of the Society Conference of IEICE  2013.9 

Demonstration of 30-Tbps/cm2 Bandwidth Density by Silicon Optical Interposers Fully Integrated with Optical Components Invited

Urino Yutaka, Akiyama Suguru, Akagawa Takeshi, Baba Takeshi, Usuki Tatsuya, Okamoto Daisuke, Miura Makoto, Fujikata Junichi, Shimizu Takanori, Okano Makoto, Hatori Nobuaki, Ishizaka Masashige, Yamamoto Tsuyoshi, Takahashi Hiroyuki, Noguchi Yoshiji, Noguchi Masataka, Imai Masahiko, Yamagishi Masashi, Saitou Shigeru, Hirayama Naoki, Takahashi Masashi, Saito Emiko, Shimura Daisuke, Okayama Hideaki, Onawa Yosuke, Yaegashi Hiroki, Nishi Hidetaka, Fukuda Hiroshi, Yamada Koji, Mori Masahiko, Horikawa Tsuyoshi, Nakamura Takahiro, Arakawa Yasuhiko

Proceedings of the Society Conference of IEICE  2013.9 

Silicon Phonics Devices Fabricated by using Immersion ArF Excimer Lithography Invited

Horikawa Tsuyoshi

Proceedings of the Society Conference of IEICE  2013.9 

微小Al系積層型ジョセフソン接合作製プロセスの改善

SATO TETSURO, NOGUCHI YOSHIJI, YAMAGISHI MASASHI, NAGASAWA SHUICHI, HINODE KENJI, HIDAKA MUTSUO, MAEZAWA MASAAKI, HORIKAWA TSUYOSHI

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2013.8 

SiOx薄膜スラブを用いたモード制御によるSiテーパ‐SSCの構造トレランスの拡大

TAKAHASHI HIROYUKI, HATORI NOBUAKI, SHIMIZU TAKANORI, ISHIZAKA MASASHIGE, OKANO MAKOTO, HORIKAWA TSUYOSHI

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2013.8 

300mm SOI基板上にハーフトーンマスクで作製したシリコン細線導波路

HIRANO SHU, SOUMA MUNETOSHI, KITA TOMOHIRO, TANUSHI YUICHIRO, SEKI MIYOSHI, TOYAMA MUNEHIRO, HORIKAWA TSUYOSHI, YAMADA HIROHITO

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2013.8 

1.55μm及び1.3μm波長帯用高効率MOS型Si光変調器

TAKAHASHI SHIGEKI, FUJIKATA JUN'ICHI, TAKAHASHI MASASHI, HORIKAWA TSUYOSHI, NAKAMURA TAKAHIRO, ARAKAWA YASUHIKO

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2013.8 

PINダイオードを用いたリング共振器型シリコン変調器の50Gb/s動作

BABA TAKESHI, AKIYAMA SUGURU, IMAI MASAHIKO, HIRAYAMA NAOKI, TAKAHASHI HIROYUKI, NOGUCHI YOSHIJI, HORIKAWA TSUYOSHI, USUKI TATSUYA

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2013.8 

50GHz帯域Si導波路集積PIN型Geフォトダイオードの検討

NOGUCHI MASATAKA, FUJIKATA JUN'ICHI, MIURA MAKOTO, OKAMOTO DAISUKE, HORIKAWA TSUYOSHI, ARAKAWA YASUHIKO

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2013.8 

300mm SOI基板上に作製したリング共振器の特性均一性

SOUMA MUNETOSHI, HIRANO SHU, TANUSHI YUICHIRO, KITA TOMOHIRO, TOYAMA MUNEHIRO, SANO TSUKURU, HORIKAWA TSUYOSHI, YAMADA HIROHITO

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2013.8 

High-Speed and Efficient Operation of PIN-Diode-Based Silicon Modulator Using Side-Wall Grating Waveguide Invited

AKIYAMA Suguru, BABA Takeshi, IMAI Masahiko, HIRAYAMA Naoki, TAKAHASHI Hiroyuki, NOGUCHI Yoshiji, HORIKAWA Takeshi, USUKI Tatsuya

電子情報通信学会技術研究報告. LQE, レーザ・量子エレクトロニクス, R, 信頼性,EMD, 機構デバイス, CPM, 電子部品・材料,OPE, 光エレクトロニクス  2013.8 

Uniform characteristics of Si-wire waveguide devices fabricated on 300 mm SOI wafers by using ArF immersion lithography

Yuichiro Tanushi, Tomohiro Kita, Munehiro Toyama, Miyoshi Seki, Keiji Koshino, Nobuyuki Yokoyama, Minoru Ohtsuka, Akinobu Sugiyama, Eiichi Ishitsuka, Tsukuru Sano, Tsuyoshi Horikawa, Hirohito Yamada

10th International Conference on Group IV Photonics  2013.8  IEEE

Advances in High-Density Inter-Chip Interconnects with Photonic Wiring Invited

Yutaka Urino, Yoshiji Noguchi, Nobuaki Hatori, Masashige Ishizaka, Tatsuya Usuki, Junichi Fujikata, Koji Yamada, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

IEICE TRANSACTIONS ON ELECTRONICS  2013.7 

Silicon photonics devices on 300mm wafer fabricated by using ArF immersion lithography

KITA Tomohiro, TANUSHI Yuichiro, NARA Masaki, HIRANO Syu, TOYAMA Munehiro, SEKI Miyoshi, KOSHINO Keiji, YOKOYAMA Nobuyuki, OHTSUKA Minoru, SUGIYAMA Akinobu, ISHITSUKA Eiichi, SANO Tsukuru, HORIKAWA Tsuyoshi, YAMADA Hirohito

電子情報通信学会技術研究報告. OPE, 光エレクトロニクス, LQE, レーザ・量子エレクトロニクス  2013.6 

光結合器応用に向けたRF‐PECVDを用いたSiOx膜の検討

TAKAHASHI HIROYUKI, YAMAGISHI MASASHI, HIRAYAMA NAOKI, SAITO SHIGERU, NOGUCHI YOSHIJI, HORIKAWA TSUYOSHI

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2013.3 

超小型Ge受光器実現に向けたエピタキシャル成長プロセス検討

MIURA MAKOTO, FUJIKATA JUN'ICHI, NOGUCHI MASATAKA, HORIKAWA TSUYOSHI, ARAKAWA YASUHIKO

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2013.3 

High Density Inter-chip Interconnects with Silicon Photonics Invited

URINO Yutaka, HORIKAWA Tsuyoshi, NAKAMURA Takahiro, ARAKAWA Yasuhiko

電子情報通信学会技術研究報告. EST, エレクトロニクスシミュレーション, PN, フォトニックネットワーク, LQE, レーザ・量子エレクトロニクス  2013.1 

ArF液浸露光を用いた2次元フォトニック結晶スラブ導波路

堀川剛, 岡野誠, 鈴木恵治郎, 外山宗博, 関三好, 佐野作

電子情報通信学会大会講演論文集(CD-ROM)  2013 

Large-scale silicon photonics integrated circuits for interconnect and telecom applications

Hiroshi Fukuda, Kotaro Takeda, Tatsuro Hiraki, Tai Tsuchizawa, Hidetaka Nishi, Rai Kou, Yasuhiko Ishikawa, Kazumi Wada, Tsuyoshi Yamamoto, Koji Yamada, Yutaka Urino, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

IEEE International Conference on Group IV Photonics GFP  2013 

Efficient 50-Gb/s silicon microring modulator based on forward-biased pin diodes

T. Baba, S. Akiyama, M. Imai, N. Hirayama, H. Takahashi, Y. Noguchi, T. Horikawa, T. Usuki

IEEE International Conference on Group IV Photonics GFP  2013 

High Performance PIN Ge Photodetector and Si Optical Modulator with MOS Junction for Photonics-Electronics Convergence System

Junichi Fujikata, Masataka Noguchi, Makoto Miura, Masashi Takahashi, Shigeki Takahashi, Tsuyoshi Horikawa, Yutaka Urino, Takahiro Nakamura, Yasuhiko Arakawa

2013 18TH ASIA AND SOUTH PACIFIC DESIGN AUTOMATION CONFERENCE (ASP-DAC)  2013 

High speed and highly efficient Si optical modulator with MOS junction for 1.55 μm and 1.3 μm wavelengths

Junichi Fujikata, Shigeki Takahashi, Masashi Takahashi, Tsuyoshi Horikawa

IEEE International Conference on Group IV Photonics GFP  2013 

High-density Silicon Optical Interposer for Inter-chip Interconnects based on Compact and High Speed Components

Takahiro Nakamura, Yutaka Urino, Junichi Fujikata, Tatsuya Usuki, Masashige Ishizaka, Koji Yamada, Tsuyoshi Horikawa, Yasuhiko Arakawa

2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)  2013 

High Density Optical Interconnects Integrated with Lasers, Optical Modulators and Photodetectors on a Single Silicon Chip

Yutaka Urino, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

2013 OPTICAL FIBER COMMUNICATION CONFERENCE AND EXPOSITION AND THE NATIONAL FIBER OPTIC ENGINEERS CONFERENCE (OFC/NFOEC)  2013 

Demonstration of 30-Tbps/cm2 bandwidth density by silicon optical interposers fully integrated with optical components

Yutaka Urino, Suguru Akiyama, Takeshi Akagawa, Takeshi Baba, Tatsuya Usuki, Daisuke Okamoto, Makoto Miura, Junichi Fujikata, Takanori Shimizu, Makoto Okano, Nobuaki Hatori, Masashige Ishizaka, Tsuyoshi Yamamoto, Hiroyuki Takahashi, Yoshiji Noguchi, Masataka Noguchi, Masahiko Imai, Masashi Yamagishi, Shigeru Saitou, Naoki Hirayama, Masashi Takahashi, Emiko Saito, Daisuke Shimura, Hideaki Okayama, Yosuke Onawa, Hiroki Yaegashi, Hidetaka Nishi, Hiroshi Fukuda, Koji Yamada, Masahiko Mori, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

IET Conference Publications  2013 

SiOx薄膜スラブを用いたモード制御によるSiテーパ-SSCの構造トレランスの拡大

高橋博之, 高橋博之, 羽鳥伸明, 羽鳥伸明, 清水隆徳, 清水隆徳, 石坂政茂, 石坂政茂, 岡野誠, 岡野誠, 堀川剛, 堀川剛

応用物理学会秋季学術講演会講演予稿集(CD-ROM)  2013 

光結合器応用に向けたRF-PECVDを用いたSiOx膜の検討

高橋博之, 高橋博之, 山岸雅司, 山岸雅司, 平山直紀, 平山直紀, 斉藤茂, 斉藤茂, 埜口良二, 埜口良二, 堀川剛, 堀川剛

応用物理学会春季学術講演会講演予稿集(CD-ROM)  2013 

高精度ArF液浸露光を用いたシリコンフォトニクスデバイス

堀川剛

電子情報通信学会大会講演論文集(CD-ROM)  2013 

C-3-56 Integration Process Technology for High-Density Si photonics Circuit (I)

Imai Masahiko, Fujikata Junichi, Noguchi Yoshiji, Noguchi Masataka, Takahashi Hiroyuki, Miura Makoto, Akiyama Suguru, Yamada Koji, Wada Kazumi, Urino Yutaka, Horikawa Tsuyoshi

Proceedings of the Society Conference of IEICE  2012.8 

C-3-66 Demonstration of 12.5-Gbps Silicon Optical Interposers Integrated with Lasers, Optical Splitters, Optical Modulators, and Photodetectors on a Single Silicon Substrate Invited

Urino Yutaka, Noguchi Yoshiji, Noguchi Masataka, Imai Masahiko, Yamagishi Masashi, Saitou Shigeru, Hirayama Naoki, Takahashi Masashi, Takahashi Hiroyuki, Saito Emiko, Okano Makoto, Shimizu Takanori, Hatori Nobuaki, Ishizaka Masashige, Yamamoto Tsuyoshi, Baba Takeshi, Akagawa Takeshi, Akiyama Suguru, Usuki Tatsuya, Okamoto Daisuke, Miura Makoto, Fujikata Junichi, Shimura Daisuke, Okayama Hideaki, Yaegashi Hiroki, Tsuchizawa Tai, Yamada Koji, Mori Masahiko, Horikawa Tsuyoshi, Nakamura Takahiro, Arakawa Yasuhiko

Proceedings of the Society Conference of IEICE  2012.8 

C-11-2 Influence of Air Exposure after SiON Formation on the Gate-Dielectric Breakdown

Matsuki Takeo, Ogawa Arito, Itoh Shu, Horikawa Tsuyoshi, Kikuchi Toshiyuki, Liu Ziyuan

Proceedings of the Society Conference of IEICE  2012.8 

C-3-64 Study on Si waveguide-integrated PIN and Schottky Type Ge Photodiode

Noguchi Masataka, Fujikata Junichi, Miura Makoto, Okamoto Daisuke, Horikawa Tsuyoshi, Arakawa Yasuhiko

Proceedings of the Society Conference of IEICE  2012.8 

C-3-57 SOI Waveguide Process(VI) : Waveguide Pattern Formed by ArF Immersion Lithography(II)

Horikawa Tsuyoshi, Seki Miyoshi, Toyama Munehiro, Koshino Keiji, Yokoyama Nobuyuki, Ohtsuka Minoru, Sugiyama Akinobu, Ishitsuka Eiichi, Yamagishi Masashi, Sano Tsukuru

Proceedings of the Society Conference of IEICE  2012.8 

微小Al/AlO_x/Al積層型ジョセフソン接合の作製プロセス開発

SATO TETSURO, NOGUCHI YOSHIJI, YAMAGISHI MASASHI, NAGASAWA SHUICHI, HINODE KENJI, HIDAKA MUTSUO, MAEZAWA MASAAKI, HORIKAWA TSUYOSHI

応用物理学会学術講演会講演予稿集(CD-ROM)  2012.8 

PIN型ダイオードを用いた作用長250μmのシリコン変調器の50Gbps動作

AKIYAMA SUGURU, BABA TAKESHI, IMAI MASAHIKO, AKAGAWA TAKESHI, NOGUCHI MASATAKA, SAITO EMIKO, NOGUCHI YOSHIJI, HIRAYAMA NAOKI, HORIKAWA TSUYOSHI, USUKI TATSUYA

応用物理学会学術講演会講演予稿集(CD-ROM)  2012.8 

SOI導波路プロセス(V)―光集積回路に向けたEB露光技術の確立―

HORIKAWA TSUYOSHI, HIRAYAMA NAOKI, TAKAHASHI HIROYUKI, NOGUCHI RYOJI, YAMAGISHI MASASHI

応用物理学会学術講演会講演予稿集(CD-ROM)  2012.8 

低損失ポリシリコンゲートを有する高効率MOS型Si光変調器

TAKAHASHI SHIGEKI, FUJIKATA JUN'ICHI, TAKAHASHI MASASHI, AKAGAWA TAKESHI, NOGUCHI MASATAKA, HORIKAWA TSUYOSHI, NAKAMURA TAKAHIRO, ARAKAWA YASUHIKO

応用物理学会学術講演会講演予稿集(CD-ROM)  2012.8 

SiGe cap層を用いた差動対MSM型Ge受光素子

MIURA MAKOTO, NOGUCHI MASATAKA, FUJIKATA JUN'ICHI, OKAMOTO DAISUKE, HORIKAWA TSUYOSHI, ARAKAWA YASUHIKO

応用物理学会学術講演会講演予稿集(CD-ROM)  2012.8 

ArF液浸露光を用いたシリコンフォトニクスデバイスの作製誤差制御

TAKAHASHI HIROYUKI, SEKI MIYOSHI, TOYAMA MUNEHIRO, SHIMURA DAISUKE, KOSHINO KEIJI, YOKOYAMA NOBUYUKI, OTSUKA MINORU, SUGIYAMA AKINOBU, ISHITSUKA EIICHI, SANO TSUKURU, HORIKAWA TSUYOSHI

応用物理学会学術講演会講演予稿集(CD-ROM)  2012.8 

多結晶シリコン導波路における導波損失と抵抗率の改善

HORIKAWA TSUYOSHI, TAKAHASHI MASASHI, FUJIKATA JUN'ICHI, NOGUCHI MASATAKA, AKAGAWA TAKESHI

応用物理学会学術講演会講演予稿集(CD-ROM)  2012.8 

光集積回路と光ファイバーの直接光結合技術 信号光を拡大縮小する微小な光変換器を高性能化

TOKUSHIMA MASATOSHI, KAMEI AKIO, HORIKAWA TSUYOSHI

産総研TODAY(Web)  2012.8 

C-3-36 Advanced CMOS Technology enabling the Integrated Silicon Photonics Invited

Horikawa Tsuyoshi, Takahashi Hiroyuki, Fujikata Junichi, Akiyama Suguru, Tokushima Masatoshi, Shimizu Takanori, Hirayama Naoki, Seki Miyoshi, Nakamura Takahiro

Proceedings of the IEICE General Conference  2012.3 

CI-3-3 Silicon Photonics Integrated Circuits for High-Density Optical Interconnects Invited

Nakamura Takahiro, Urino Yutaka, Usuki Tatsuya, Fujikata Junichi, Ishizaka Masashige, Yamada Kouji, Yaegashi Hiroki, Horikawa Tsuyoshi, Arakawa Yasuhiko

Proceedings of the IEICE General Conference  2012.3 

Si導波路集積PIN型Geフォトダイオードの検討

NOGUCHI MASATAKA, FUJIKATA JUN'ICHI, MIURA MAKOTO, OKAMOTO DAISUKE, HORIKAWA TSUYOSHI, ARAKAWA YASUHIKO

応用物理学関係連合講演会講演予稿集(CD-ROM)  2012.2 

SOI導波路プロセス(IV)―液浸ArF露光を用いた導波路パターン形成―

SEKI MIYOSHI, TAKAHASHI HIROYUKI, TOYAMA MUNEHIRO, KOSHINO KEIJI, YOKOYAMA NOBUYUKI, OTSUKA MINORU, SUGIYAMA AKINOBU, ISHITSUKA EIICHI, HIRAYAMA NAOKI, SANO TSUKURU, HORIKAWA TSUYOSHI

応用物理学関係連合講演会講演予稿集(CD-ROM)  2012.2 

Si導波路と10μm光ファイバーの結合用スポットサイズ変換器

TOKUSHIMA MASATOSHI, KAMEI AKIO, HORIKAWA TSUYOSHI

応用物理学関係連合講演会講演予稿集(CD-ROM)  2012.2 

高密度光配線用シリコン光集積回路

中村隆宏, 中村隆宏, 賣野豊, 賣野豊, 臼杵達哉, 臼杵達哉, 藤方潤一, 藤方潤一, 石坂政茂, 石坂政茂, 山田浩治, 山田浩治, 八重樫浩樹, 八重樫浩樹, 堀川剛, 堀川剛, 荒川泰彦, 荒川泰彦

電子情報通信学会大会講演論文集  2012 

Demonstration of 12.5-Gbps optical interconnects integrated with lasers, optic

Yutaka Urino, Yoshiji Noguchi, Masataka Noguchi, Masahiko Imai, Masashi Yamagishi, Shigeru Saitou, Naoki Hirayama, Masashi Takahashi, Hiroyuki Takahashi, Emiko Saito, Makoto Okano, Takanori Shimizu, Nobuaki Hatori, Masashige Ishizaka, Tsuyoshi Yamamoto, Takeshi Baba, Takeshi Akagawa, Suguru Akiyama, Tatsuya Usuki, Daisuke Okamoto, Makoto Miura, Junichi Fujikata, Daisuke Shimura, Hideaki Okayama, Hiroki Yaegashi, Tai Tsuchizawa, Koji Yamada, Masahiko Mori, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

European Conference and Exhibition on Optical Communication, ECEOC 2012  2012 

SiONゲート絶縁膜形成後大気曝露の絶縁破壊特性への影響

松木武雄, 小川有人, 伊藤周, 堀川剛, 菊池俊之, LIU Ziyuan

電子情報通信学会大会講演論文集  2012 

50-Gb/s silicon modulator using 250-μm-Long phase shifter based-on forward-biased pin diodes

S. Akiyama, T. Baba, M. Imai, T. Akagawa, M. Noguchi, E. Saito, Y. Noguchi, N. Hirayama, T. Horikawa, T. Usuki

IEEE International Conference on Group IV Photonics GFP  2012 

High-uniformity waveguide-integrated metal-semiconductor-metal germanium photodetector with sige capping layer and its application to differential receivers

Makoto Miura, Junichi Fujikata, Masataka Noguchi, Daisuke Okamoto, Tsuyoshi Horikawa, Yasuhiko Arakawa

IEEE International Conference on Group IV Photonics GFP  2012 

Photonics-Electronics Convergence System for High Density Inter-chip Interconnects by using Silicon Photonics

Yutaka Urino, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

2012 IEEE COMPOUND SEMICONDUCTOR INTEGRATED CIRCUIT SYMPOSIUM (CSICS)  2012 

Demonstration of 12.5-Gbps Optical Interconnects Integrated with Lasers, Optical Splitters, Optical Modulators and Photodetectors on a Single Silicon Substrate

Yutaka Urino, Yoshiji Noguchi, Masataka Noguchi, Masahiko Imai, Masashi Yamagishi, Shigeru Saitou, Naoki Hirayama, Masashi Takahashi, Hiroyuki Takahashi, Emiko Saito, Makoto Okano, Takanori Shimizu, Nobuaki Hatori, Masashige Ishizaka, Tsuyoshi Yamamoto, Takeshi Baba, Takeshi Akagawa, Suguru Akiyama, Tatsuya Usuki, Daisuke Okamoto, Makoto Miura, Junichi Fujikata, Daisuke Shimura, Hideaki Okayama, Hiroki Yaegashi, Tai Tsuchizawa, Koji Yamada, Masahiko Mori, Tsuyoshi Horikawa, Takahiro Nakamura, Yasuhiko Arakawa

2012 38TH EUROPEAN CONFERENCE AND EXHIBITION ON OPTICAL COMMUNICATIONS (ECOC)  2012 

25-Gbps Operation of Silicon p-i-n Mach-Zehnder Optical Modulator with 100-mu m-Long Phase Shifter

T. Baba, S. Akiyama, M. Imai, T. Akagawa, M. Takahashi, N. Hirayama, H. Takahashi, Y. Noguchi, H. Okayama, T. Horikawa, T. Usuki

2012 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)  2012 

SOI導波路プロセス(V)-光集積回路に向けたEB露光技術の確立-

堀川剛, 堀川剛, 平山直紀, 平山直紀, 高橋博之, 高橋博之, 埜口良二, 埜口良二, 山岸雅司, 山岸雅司

応用物理学会学術講演会講演予稿集(CD-ROM)  2012 

Si導波路集積PIN型およびショットキー型Ge受光器の検討

野口将高, 野口将高, 藤方潤一, 藤方潤一, 三浦真, 三浦真, 岡本大典, 岡本大典, 堀川剛, 堀川剛, 荒川泰彦, 荒川泰彦

電子情報通信学会大会講演論文集  2012 

SOI導波路プロセス(VI)-液浸ArF露光を用いた導波路パターン形成(II)-

堀川剛, 関三好, 外山宗博, 越野圭二, 横山信幸, 大塚実, 杉山曜宣, 石塚栄一, 山岸雅司, 佐野作

電子情報通信学会大会講演論文集  2012 

シリコンフォトニクス集積に向けたCMOS技術

堀川剛, 堀川剛, 高橋博之, 高橋博之, 藤方潤一, 藤方潤一, 秋山傑, 秋山傑, 徳島正敏, 清水隆徳, 清水隆徳, 平山直紀, 平山直紀, 関三好, 関三好, 中村隆宏, 中村隆宏

電子情報通信学会大会講演論文集  2012 

高密度シリコンフォトニクス回路向け集積プロセス技術(I)

今井雅彦, 今井雅彦, 藤方潤一, 藤方潤一, 埜口良二, 埜口良二, 野口将高, 野口将高, 高橋博之, 高橋博之, 三浦真, 三浦真, 秋山傑, 秋山傑, 山田浩治, 山田浩治, 和田一実, 和田一実, 賣野豊, 賣野豊, 堀川剛, 堀川剛

電子情報通信学会大会講演論文集  2012 

Si導波路集積MSM型Geフォトダイオードの検討

NOGUCHI MASATAKA, FUJIKATA JUN'ICHI, MIURA MAKOTO, OKAMOTO DAISUKE, HORIKAWA TSUYOSHI, ARAKAWA YASUHIKO

応用物理学会学術講演会講演予稿集(CD-ROM)  2011.8 

MSM型Geフォトダイオードと光電子集積に向けた受信回路の検討

NOGUCHI MASATAKA, FUJIKATA JUN'ICHI, OKAMOTO DAISUKE, MIURA MAKOTO, HORIKAWA TSUYOSHI, ARAKAWA YASUHIKO

応用物理学関係連合講演会講演予稿集(CD-ROM)  2011.3 

多結晶シリコン導波路における導波損失機構の検討

TAKAHASHI MASASHI, FUJIKATA JUN'ICHI, NOGUCHI MASATAKA, YAMAMOTO NORITSUGU, AKAGAWA TAKESHI, TAKAHASHI HIROYUKI, HIRAYAMA NAOKI, HORIKAWA TSUYOSHI

応用物理学関係連合講演会講演予稿集(CD-ROM)  2011.3 

NiGe/n⁺ Geコンタクトの低抵抗/浅接合化

MIURA MAKOTO, NOGUCHI MASATAKA, FUJIKATA JUN'ICHI, HORIKAWA TSUYOSHI, TAKAHASHI MASASHI, NOGUCHI YOSHIJI, ARAKAWA YASUHIKO

応用物理学関係連合講演会講演予稿集(CD-ROM)  2011.3 

SOI導波路プロセス(III)―EB多重露光プロセスによる導波損失低減―

HIRAYAMA NAOKI, TAKAHASHI HIROYUKI, SHIMURA DAISUKE, HORIKAWA TSUYOSHI

応用物理学関係連合講演会講演予稿集(CD-ROM)  2011.3 

リブ導波路の曲がりのための緩和曲線に関する考察

TOKUSHIMA MASATOSHI, KAMEI AKIO, CHU TAO, HORIKAWA TSUYOSHI

応用物理学関係連合講演会講演予稿集(CD-ROM)  2011.3 

C-3-59 Low Loss Polycrystalline Si Waveguide and its Application to Optical Modulator

Fujikata Junichi, Takahashi Masashi, Noguchi Masataka, Takahashi Shigeki, Yamamoto Noritsugu, Akagawa Takeshi, Takahashi Hiroyuki, Hirayama Naoki, Horikawa Tsuyoshi

Proceedings of the IEICE General Conference  2011.2 

12.5-Gb/s operation of efficient silicon modulator using side-wall grating waveguide

S. Akiyama, T. Baba, M. Imai, T. Akagawa, M. Takahashi, N. Hirayama, H. Takahashi, Y. Noguchi, H. Okayama, T. Horikawa, T. Usuki

IEEE International Conference on Group IV Photonics GFP  2011 

SOI導波路プロセス(III)-EB多重露光プロセスによる導波損失低減-

平山直紀, 高橋博之, 志村大輔, 堀川剛, 平山直紀, 高橋博之, 志村大輔, 堀川剛

応用物理学関係連合講演会講演予稿集(CD-ROM)  2011 

IMPACT OF AIR-INDUCED POLY-SI/OXYNITRIDE INTERFACE LAYER DEGRADATION ON GATE-EDGE LEAKAGE

Ziyuan Liu, Shuu Ito, Tomoya Saito, Soon W. Chang, Arito Ogawa, Sadayoshi Horii, Tsuyoshi Horikawa, Markus Wilde, Katsuyuki Fukutani, Toyohiro Chikyow

2011 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS)  2011 

CI-3-5 The Status and Scope of Optical-device Foundry

Nakamura Takahiro, Horikawa Tsuyoshi, Arakawa Yasuhiko

Proceedings of the Society Conference of IEICE  2010.8 

TiN電極へのAl導入によるEOTの低減

OGAWA ARITO, ITATANI HIDEHARU, HORII SADAYOSHI, MISE NOBUYUKI, HORIKAWA TSUYOSHI

応用物理学会学術講演会講演予稿集(CD-ROM)  2010.8 

単一半導体を用いた新ソースヘテロ構造の検討(III):急峻な横方向歪み分布の実現

MIZUNO TOMOHISA, HASEGAWA MITSUO, NOJIRI MASASHI, HORIKAWA TSUYOSHI

応用物理学会学術講演会講演予稿集(CD-ROM)  2010.8 

緩和曲線による多モード・リブ導波路の透過改善

TOKUSHIMA MASATOSHI, KAMEI AKIO, CHU TAO, HORIKAWA TSUYOSHI

応用物理学会学術講演会講演予稿集(CD-ROM)  2010.8 

MOS構造における電極の仕事関数抽出の再検討

OGAWA ARITO, ITATANI HIDEHARU, HORII SADAYOSHI, MISE NOBUYUKI, HORIKAWA TSUYOSHI

応用物理学関係連合講演会講演予稿集(CD-ROM)  2010.3 

SOI導波路プロセス(II)―リブ導波路の高速/高精度形成

TOKUSHIMA MASATOSHI, CHU TAO, KAMEI AKIO, HORIKAWA TSUYOSHI

応用物理学関係連合講演会講演予稿集(CD-ROM)  2010.3 

SOI導波路プロセス(I)―CMOSプロセスの適用検討―

HORIKAWA TSUYOSHI, CHU TAO, TOKUSHIMA MASATOSHI, KAMEI AKIO

応用物理学関係連合講演会講演予稿集(CD-ROM)  2010.3 

EUPSによるTiN膜の仕事関数の膜厚及び下地high‐k膜依存の評価

ISHITSUKA, TOMOAKI, OTSUKA TERUHISA, KASAI TAKESHI, OGAWA ARITO, HORIKAWA TSUYOSHI, TOMIE TOSHIHISA

応用物理学関係連合講演会講演予稿集(CD-ROM)  2010.3 

SOI導波路プロセス(I)-CMOSプロセスの適用検討-

堀川剛, CHU Tao, 徳島正敏, 亀井明夫

応用物理学関係連合講演会講演予稿集(CD-ROM)  2010 

EUPSによるTiN膜の仕事関数の膜厚及び下地high-k膜依存の評価

石塚知明, 大塚照久, 葛西彪, 小川有人, 堀川剛, 富江敏尚

応用物理学関係連合講演会講演予稿集(CD-ROM)  2010 

Si高指数面上に形成したSiO₂界面の真空紫外RDS評価:ウェット酸化とドライ酸化の比較

OGATA SHOICHI, ONO SHIN'YA, TANAKA MASATOSHI, HORIKAWA TSUYOSHI, YASUDA TETSUJI

応用物理学会学術講演会講演予稿集  2009.9 

Analysis of transient charging components in NBTI degradation studied for TaN gated HfO2/SiO2 dielectrics

Kenji Okada, Tsuyoshi Horikawa, Hiroyuki Ota, Toshihide Nabatame, Akira Toriumi

ESSDERC 2007: PROCEEDINGS OF THE 37TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE  2007 

Reliability perspective of high-k gate stack assessed by temperature dependence of dielectric breakdown

Kenji Okada, Tsuyoshi Horikawa, Hideki Satake, Seiji Inumiya, Yasushi Akasaka, Fumio Ootsuka, Yasuo Nara, Hiroyuki Ota, Toshihide Nabatame, Akira Toriumi

2007 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS  2007 

Si表面量子化層中のドーパント不純物電荷の考慮によるフラットバンド電圧の精密評価

YASUDA NAOKI, OTA HIROYUKI, HORIKAWA TSUYOSHI, TORIUMI AKIRA, TAMURA YASUYUKI

応用物理学関係連合講演会講演予稿集  2006.3 

Mechanism of gradual increase of gate current in high-k gate dielectrics and its application to reliability assessment

Kenji Okada, Tsuyoshi Horikawa, Hideki Satake, Hiroyuki Ota, Arito Ogawa, Toshihide Nabatame, Akira Toriumi

2006 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM PROCEEDINGS - 44TH ANNUAL  2006 

Impact of Initial Traps on TDDB and NBTI Reliabilities in High-k Gate Dielectrics

Kenji OKADA, Hiroyuki OTA, Tsuyoshi HORIKAWA, Masaru KADOSHIMA, Arito OGAWA, Toshihide NABATAME, Akira TORIUM

2006 

Carrier separation analysis for clarifying carrier conduction and degradation mechanisms in high-k stack gate dielectrics

W Mizubayashi, N Yasuda, K Okada, H Ota, H Hisamatsu, K Iwamoto, K Tominaga, K Yamamoto, T Horikawa, T Nabatame, H Satake, A Toriumi

MICROELECTRONICS RELIABILITY  2005.7 

HfAlO_X/SiO₂ゲート絶縁膜における絶縁破壊機構

OKADA KENJI, MIZUBAYASHI WATARU, YASUDA NAOKI, SATAKE HIDEKI, OTA HIROYUKI, KADOSHIMA MASARU, TOMINAGA KOJI, HORIKAWA TSUYOSHI, TORIUMI AKIRA

応用物理学関係連合講演会講演予稿集  2005.3 

Quantitative analysis of contribution of initial traps to breakdown in HfAlOX/SiO2 stacked gate dielectrics

K Okada, H Ota, W Mizubayashi, H Satake, A Ogawa, K Iwamoto, T Horikawa, T Nabatame, A Toriumi

2005 Symposium on VLSI Technology, Digest of Technical Papers  2005 

Low frequency noise characteristics in HfAlOx/SiO2 n-mosfets

T. Horikawa, N. Yasuda, W. Mizubayashi, K. Iwamoto, K. Tominaga, K. Akiyama, K. Yamamoto, H. Hisamatsu, H. Ota, T. Nabatame, A. Toriumi, A. Toriumi

Proceedings - Electrochemical Society  2004.10 

Degradation Mechanism of HfAlO_x/SiO_2 Stacked Gate Dielectric Films through Transient and Steady State Leakage Current Analysis

OKADA Kenji, MIZUBAYASHI Wataru, YASUDA Naoki, OTA Hiroyuki, TOMINAGA Koji, IWAMOTO Kunihiko, HORIKAWA Tsuyoshi, YAMAMOTO Katsuhiko, HISAMATSU Hirokazu, SATAKE Hideki, NABATAME Toshihide, TORIUMI Akira

2004.9 

Drastic decrease of HF-etching rate of HfO2 films by increase of CVD deposition temperature

FUJII SHINJI, MIYATA NORIYUKI, MIGITA SHINJI, HORIKAWA TSUYOSHI, TORIUMI AKIRA

電子情報通信学会技術研究報告  2004.6 

Drastic decrease of HF-etching rate of HfO_2 films by increase of CVD deposition temperature

Fujii Shinji, Miyata Noriyuki, Migita Shinji, Horikawa Tsuyoshi, Toriumi Akira

Technical report of IEICE. SDM  2004.6 

Poly‐Si/High‐k界面を持つMIS構造に特有な非飽和C‐V特性

YASUDA NAOKI, IWAMOTO KUNIHIKO, TOMINAGA KOJI, OTA HIROYUKI, HISAMATSU HIROKAZU, AKIYAMA KOJI, NABATAME TOSHIHIDE, HORIKAWA TAKESHI, TORIUMI AKIRA

応用物理学関係連合講演会講演予稿集  2004.3 

BCl_x⁺,SiCl_x⁺イオン照射によるHfO₂エッチング反応のエネルギー依存性

KARAHASHI KAZUHIRO, MISE NOBUYUKI, YAMAGISHI NOBUHISA, HORIKAWA TAKESHI, TORIUMI AKIRA

応用物理学関係連合講演会講演予稿集  2004.3 

フルシリサイドNiSiメタルゲート電極におけるドーパントの効果

NABATAME TOSHIHIDE, KADOSHIMA MASARU, YAMAMOTO KATSUHIKO, ONO MORIFUMI, MISE NOBUYUKI, AKIYAMA KOJI, IWAMOTO KUNIHIKO, TOMINAGA KOJI, HORIKAWA TSUYOSHI

応用物理学関係連合講演会講演予稿集  2004.3 

薄いHfO₂膜の熱分解過程で観察される二次元ボイド成長機構のモデル化

MIYATA NORIYUKI, ICHIKAWA MASAKAZU, NABATAME TOSHIHIDE, HORIKAWA TSUYOSHI, TORIUMI AKIRA

応用物理学関係連合講演会講演予稿集  2004.3 

HfAlO_x(N)MOSFETにおける電子と正孔の散乱機構の違い

OTA HIROYUKI, HISAMATSU HIROKAZU, IWAMOTO KUNIHIKO, TOMINAGA KOJI, MIZUBAYASHI WATARU, YASUDA NAOKI, ONO MORIFUMI, HORIKAWA TAKESHI, NABATAME TOSHIHIDE

応用物理学関係連合講演会講演予稿集  2004.3 

LL‐D&A法を用いたHfAlO_X(N)ゲートスタック技術

ONO MORIFUMI, HORIKAWA TAKESHI, NABATAME TOSHIHIDE, TORIUMI AKIRA

応用物理学関係連合講演会講演予稿集  2004.3 

HfO₂上へのMOCVD法によるモノレイヤーSiO₂形成

MIGITA SHINJI, FUJII SHINJI, MIYATA NORIYUKI, XUAN Y, YAMAMOTO KATSUHIKO, HORIKAWA TAKESHI, TORIUMI AKIRA

応用物理学関係連合講演会講演予稿集  2004.3 

HfAlO_x/SiO₂ゲートMOSFETにおけるキャリア分離法用いたリーク電流解析

MIZUBAYASHI WATARU, YASUDA NAOKI, HISAMATSU HIROKAZU, OTA HIROYUKI, TOMINAGA KOJI, IWAMOTO KUNIHIKO, YAMAMOTO KATSUHIKO, HORIKAWA TAKESHI, NABATAME TOSHIHIDE

応用物理学関係連合講演会講演予稿集  2004.3 

成膜温度上昇によるCVD HfO₂膜のフッ酸エッチング速度の急激な低下

FUJII SHINJI, MIYATA NORIYUKI, MIGITA SHINJI, HORIKAWA TAKESHI, TORIUMI AKIRA

応用物理学関係連合講演会講演予稿集  2004.3 

TaNゲート電極の実効仕事関数制御とHfO₂膜上でのフェルミレベルピニングの定量化

AKIYAMA KOJI, MIGITA SHINJI, ZHANG L, MISE NOBUYUKI, KADOSHIMA MASARU, FUJIWARA HIDEAKI, ONO MORIFUMI, HORIKAWA TSUYOSHI, NABATAME TOSHIHIDE

応用物理学関係連合講演会講演予稿集  2004.3 

HfAlO_x/SiO₂ n‐MOSFETにおける低周波雑音解析

HORIKAWA TAKESHI, YASUDA NAOKI, MIZUBAYASHI WATARU, IWAMOTO KUNIHIKO, TOMINAGA KOJI, AKIYAMA KOJI, YAMAMOTO KATSUHIKO, HISAMATSU HIROKAZU, OTA HIROYUKI

応用物理学関係連合講演会講演予稿集  2004.3 

LL-D&A法を用いたHfAlO_X(N)ゲートスタック技術

大野守史, 堀川剛, 生田目俊秀, 鳥海明

応用物理学関係連合講演会講演予稿集  2004 

Model for dielectric breakdown mechanism of HfAlOx/SiO2 stacked gate dielectrics dominated by the generated subordinate carrier injection

K Okada, W Mizubayashi, N Yasuda, H Satake, H Ota, M Kadoshima, K Tominaga, A Ogawa, K Iwamoto, T Horikawa, T Nabatame, A Toriumi

IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2004, TECHNICAL DIGEST  2004 

Carrier separation analysis for clarifying leakage mechanism in unstressed and stressed HfAlO<inf>x</inf>/SiO<inf>2</inf> stack dielectric layers

Wataro Mizubayashi, Naoki Yasuda, Hiroyuki Ota, Hirokazu Hisamatsu, Koji Tominaga, Kunihiko Iwamoto, Katsuhiko Yamamoto, Tsuyoshi Horikawa, Toshihide Nabatame, Akira Toriumi

IEEE International Reliability Physics Symposium Proceedings  2004  Institute of Electrical and Electronics Engineers Inc.