Updated on 2026/03/12

写真a

 
HIRAMOTO TOSHIRO
 
Organization
Institute of Integrated Research Integrated Green-niX+ Research Unit Visiting Professor
Title
Visiting Professor
External link

Degree

  • Doctor of Engineering ( The University of Tokyo )

Research Interests

  • Low power

  • Nanotechnology

  • Quantum dot

  • Single electron transistor

  • Single electron devices

  • シリコン

  • 半導体

  • Nanodevices

  • Nanoelectronics

  • ナノエレクトロニクス

  • SOI

  • ナノテクノロジー

  • ナノデバイス

  • Semiconductor

  • CMOS

  • MOSFET

  • VLSI

  • Silicon

  • MOSFET

  • 集積回路

  • VLSI

  • 量子効果

  • SOI

  • 低消費電力

  • CMOS

  • 量子ドット

  • 単電子トランジスタ

  • 単一電子デバイス

  • Quantum effect

Research Areas

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Electron device and electronic equipment

Education

  • The University of Tokyo

    1984.4 - 1989.3

      More details

    Country: Japan

    researchmap

  • The University of Tokyo   The Faculty of Engineering   Department of Electronic Engineering

    1982.4 - 1984.3

      More details

    Country: Japan

    researchmap

Research History

  • - 東京大学生産技術研究所教授

    2002

      More details

  • The University of Tokyo   VLSI (Very Scale Integration Large) Design and Education Center

    1996 - 2002

      More details

  • The University of Tokyo   Institute of Industrial Science

    1994 - 1996

      More details

  • スタンフォード大学客員研究員

    1993 - 1994

      More details

  • Hitachi, Ltd.,

    1989 - 1994

      More details

Professional Memberships

Committee Memberships

  • SSDM   組織委員長  

    2025   

      More details

  • VLSI Symposium on Technology   Executive Committee Chair  

    2024.6   

      More details

    Committee type:Academic society

    researchmap

  • 応用物理学会   会長  

    2022.3 - 2024.3   

      More details

    Committee type:Academic society

    researchmap

  • 応用物理学会   副会長  

    2020.3 - 2022.3   

      More details

    Committee type:Academic society

    researchmap

  • 電子通信情報学会ELEX   編集委員長  

    2018.4 - 2020.3   

      More details

    Committee type:Academic society

    researchmap

  • 応用物理学会   理事  

    2016.3 - 2018.3   

      More details

    Committee type:Academic society

    researchmap

  • SSDM   論文委員長  

    2016   

      More details

    Committee type:Academic society

    researchmap

  • VLSI Symposium on Technology   General Chair  

    2015   

      More details

    Committee type:Academic society

    researchmap

  •   VLSI Symposium on Technology, Program Chair  

    2013   

      More details

  • IEC TC91国内委員会   委員長  

    2012.4   

      More details

    Committee type:Academic society

    researchmap

  • 応用物理学会シリコンテクノロジー分科会   幹事長  

    2011.4 - 2013.3   

      More details

    Committee type:Academic society

    応用物理学会

    researchmap

  • 日本学術振興会シリコン超集積システム第165委員会   委員長  

    2009.11 - 2022.3   

      More details

    Committee type:Academic society

    researchmap

  • IEDM   Executive Committee Member  

    2003 - 2009   

      More details

    Committee type:Academic society

    researchmap

  • IEEE Electron Device Society   Elected AdCom Member  

    2001 - 2006   

      More details

    Committee type:Academic society

    IEEE Electron Device Society

    researchmap

  • 電子情報通信学会シリコンデバイス・材料研究会   委員  

    1999   

      More details

    Committee type:Academic society

    電子情報通信学会

    researchmap

▼display all

Papers

  • Design–technology co-optimization (DTCO) of inner-spacer length dependence in nanosheet logic transistors using hierarchical performance–power metrics

    Xiaoran Mei, Yaoping Xiao, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Japanese Journal of Applied Physics   2026.3

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ae3d78

    researchmap

  • Anomalous variability of subthreshold characteristics in bulk and silicon on insulator MOSFETs at cryogenic temperatures

    Tomoko Mizutani, Kiyoshi Takeuchi, Takuya Saraya, Takumi Inaba, Hiroshi Oka, Hidehiro Asai, Takahiro Mori, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   2026.2

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ae3c22

    researchmap

  • Vertically stacked two-layer silicon quantum dots with selective bottom layer control via substrate bias for 3D integration

    Junoh Kim, Daiki Futagi, Tomoko Mizutani, Takuya Saraya, Hiroshi Oka, Takahiro Mori, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   2026.1

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ae34bc

    researchmap

  • A simulation study on the operating principle of field-limiting ring edge termination using a quasi-2D three-terminal model

    Kiyoshi Takeuchi, Munetoshi Fukui, Takuya Saraya, Kazuo Itou, Toshihiko Takakura, Shinichi Suzuki, Hiroyuki Takase, Toshiro Hiramoto

    Japanese Journal of Applied Physics   2025.12

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ae248a

    researchmap

  • A Gate-All-Around Oxide Semiconductor FETs With Selectively Crystallized InGaOₓ Channel for Performance and Reliability Improvement

    Ki-Woong Park, Anlan Chen, Kota Sakai, Sunbin Hwang, Xingyu Huang, Takuya Saraya, Toshiro Hiramoto, Takanori Takahashi, Mutsunori Uenuma, Yukiharu Uraoka, Masaharu Kobayashi

    IEEE Transactions on Electron Devices   2025.12

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TED.2025.3605574

    researchmap

  • Reliability improvement of InGaO x FETs by adding Zn in atomic layer deposition process

    Kota Sakai, Kaito Hikake, Sung-hun Kim, Yuki Itoya, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Japanese Journal of Applied Physics   2025.10

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ae0775

    researchmap

  • Nanosheet oxide semiconductor FETs with ALD InZnO x compared to InGaO x

    Sung-Hun Kim, Kaito Hikake, Zhuo Li, Yuki Itoya, Kota Sakai, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Japanese Journal of Applied Physics   2025.3

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/adac1f

    researchmap

  • Demonstration of superior UIS robustness of 3300 V scaled IGBT by non-proportional scaling methods

    Xiang Zhou, Wataru Saito, Toshiro Hiramoto

    Japanese Journal of Applied Physics   2025.3

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/adb5e3

    researchmap

  • Enhanced reliability of ferroelectric Hf0.5Zr0.5O2 capacitors by bottom electrode surface oxidation

    Yuki Itoya, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Japanese Journal of Applied Physics   2025.2

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ada163

    researchmap

  • Indexing Current–Voltage Characteristics Using a Hash Function

    T. Tanamoto, S. Furukawa, R. Kitahara, T. Mizutani, K. Ono, T. Hiramoto

    IEEE Transactions on Electron Devices   2025

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TED.2025.3588498

    researchmap

  • Gate Voltage Dependence of MOSFET Random Telegraph Noise Amplitude at Room and Cryogenic Temperatures

    Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Hiroshi Oka, Takahiro Mori, Masaharu Kobayashi, Toshiro Hiramoto

    IEEE Journal of the Electron Devices Society   2025

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/JEDS.2025.3632306

    researchmap

  • Cryogenic threshold voltage and on-current variability comparative analysis of same-fab 65 nm bulk and fully depleted silicon-on-insulator metal–oxide–semiconductor field-effect transistors

    Zihao Liu, Tomoko Mizutani, Kiyoshi Takeuchi, Takuya Saraya, Hiroshi Oka, Takahiro Mori, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   2024.12

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ad9482

    researchmap

  • High-Field Transport and Statistical Variability of Nanosheet Oxide Semiconductor FETs With Channel Length Scaling

    Xingyu Huang, Kaito Hikake, Sung-Hun Kim, Kota Sakai, Zhuo Li, Tomoko Mizutani, Takuya Saraya, Toshiro Hiramoto, Takanori Takahashi, Mutsunori Uenuma, Yukiharu Uraoka, Masaharu Kobayashi

    IEEE Transactions on Electron Devices   2024.12

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TED.2024.3473888

    researchmap

  • Robust reverse bias safe operating area and improved electrical performance in 3300 V non-proportionally scaled insulated gate bipolar transistors

    Xiang Zhou, Munetoshi Fukui, Kiyoshi Takeuchi, Takuya Saraya, Wataru Saito, Toshiro Hiramoto

    Japanese Journal of Applied Physics   2024.2

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ad189f

    researchmap

  • Oxide-semiconductor channel ferroelectric field-effect transistors for high-density memory applications: 3D NAND operation and the potential impact of in-plane polarization

    Junxiang Hao, Xiaoran Mei, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Japanese Journal of Applied Physics   2024.1

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ad11b8

    researchmap

  • A Nanosheet Oxide Semiconductor FET Using ALD InGaOx Channel for 3-D Integrated Devices

    Kaito Hikake, Zhuo Li, Junxiang Hao, Chitra Pandy, Takuya Saraya, Toshiro Hiramoto, Takanori Takahashi, Mutsunori Uenuma, Yukiharu Uraoka, Masaharu Kobayashi

    IEEE Transactions on Electron Devices   1 - 7   2024

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical and Electronics Engineers (IEEE)  

    DOI: 10.1109/ted.2024.3370534

    researchmap

  • Energy-Efficient Annealing Process of Ferroelectric Hf0.5Zr0.5O2 Capacitor Using Ultraviolet-LED for Green Manufacturing

    Hirotaka Yamada, Satoru Furue, Takehiko Yokomori, Yuki Itoya, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    IEEE Journal of the Electron Devices Society   2024

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/JEDS.2024.3365150

    researchmap

  • Superior Turn-Off dV/dt Controllability From Suppression of Dynamic Avalanche in 3300V Scaled IGBTs

    Xiang Zhou, Munetoshi Fukui, Kiyoshi Takeuchi, Takuya Saraya, Toshiro Hiramoto

    IEEE Journal of the Electron Devices Society   2024

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/JEDS.2023.3342869

    researchmap

  • A Nanosheet Oxide Semiconductor FET Using ALD InGaOx Channel and InSnOx Electrode with Normally-off Operation, High Mobility and Reliability for 3D Integrated Devices

    Kaito Hikake, Zhuo Li, Junxiang Hao, Chitra Pandy, Takuya Saraya, Toshiro Hiramoto, Takanori Takahashi, Mutsunori Uenuma, Yukiharu Uraoka, Masaharu Kobayashi

    2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)   2023.6

     More details

    Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    DOI: 10.23919/vlsitechnologyandcir57934.2023.10185234

    researchmap

  • Device modeling of oxide–semiconductor channel antiferroelectric FETs using half-loop hysteresis for memory operation

    Xingyu Huang, Yuki Itoya, Zhuo Li, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Japanese Journal of Applied Physics   2023.4

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/acac3b

    researchmap

  • MOSFET series resistance extraction at cryogenic temperatures

    Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Hiroshi Oka, Takahiro Mori, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   2023.4

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/acac3c

    researchmap

  • Pixel-Parallel Three-Layer Stacked CMOS Image Sensors Using Double-Sided Hybrid Bonding of SOI Wafers

    Masahide Goto, Yuki Honda, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    IEEE Transactions on Electron Devices   70 ( 9 )   4705 - 4711   2023

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TED.2023.3298308

    Scopus

    researchmap

  • Mesoscopic-scale grain formation in HfO2-based ferroelectric thin films and its impact on electrical characteristics

    Masaharu Kobayashi, Jixuan Wu, Yoshiki Sawabe, Saraya Takuya, Toshiro Hiramoto

    Nano Convergence   9 ( 1 )   2022.11

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Springer Science and Business Media LLC  

    Abstract

    Ferroelectric memory devices are expected for low-power and high-speed memory applications. HfO2-based ferroelectric is attracting attention for its CMOS-compatibility and high scalability. Mesoscopic-scale grains, of which size is almost comparable to device size, are formed in HfO2-based ferroelectric poly-crystalline thin films, which largely influences electrical characteristics in memory devices. It is important to study the impact of mesoscopic-scale grain formation on the electrical characteristics. In this work, first, we have studied the thickness dependence of the polarization switching kinetics in HfO2-based ferroelectric. While static low-frequency polarization is comparable for different thickness, dynamic polarization switching speed is slower in thin Hf0.5Zr0.5O2 (HZO) capacitors. Based on the analysis using the NLS model and physical characterization, thinner HZO contains smaller grains with orientation non-uniformity and more grain boundaries than thicker HZO, which can impede macroscopic polarization switching. We have also theoretically and experimentally studied the polar-axis alignment of a HfO2-based ferroelectric thin film. While in-plane polar orientation is stable in as-grown HZO, out-of-plane polarization can be dominant by applying electric field, which indicates the transition from in-plane polar to out-of-plane polar orientation in the ferroelectric phase grains. This is confirmed by calculating kinetic pathway using ab-initio calculation.

    DOI: 10.1186/s40580-022-00342-6

    researchmap

    Other Link: https://link.springer.com/article/10.1186/s40580-022-00342-6/fulltext.html

  • On the thickness dependence of the polarization switching kinetics in HfO2-based ferroelectric

    Yoshiki Sawabe, Takuya Saraya, Toshiro Hiramoto, Chun-Jung Su, Vita Pi-Ho Hu, Masaharu Kobayashi

    Applied Physics Letters   2022.8

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/5.0098436

    researchmap

  • A 3D Vertical-Channel Ferroelectric/Anti-Ferroelectric FET With Indium Oxide

    Zhuo Li, Jixuan Wu, Xiaoran Mei, Xingyu Huang, Takuya Saraya, Toshiro Hiramoto, Takanori Takahashi, Mutsunori Uenuma, Yukiharu Uraoka, Masaharu Kobayashi

    IEEE Electron Device Letters   43 ( 8 )   1227 - 1230   2022.8

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical and Electronics Engineers (IEEE)  

    DOI: 10.1109/led.2022.3184316

    researchmap

  • A Vertical Channel Ferroelectric/Anti-Ferroelectric FET with ALD InOx and Field-Induced Polar-Axis Alignment for 3D High-Density Memory

    Zhuo Li, Jixuan Wu, Xiaoran Mei, Xingyu Huang, Takuya Saraya, Toshiro Hiramoto, Takanori Takahashi, Mutsunori Uenuma, Yukiharu Uraoka, Masaharu Kobayashi

    2022 IEEE Silicon Nanoelectronics Workshop (SNW)   2022.6

     More details

    Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    DOI: 10.1109/snw56633.2022.9889037

    researchmap

  • Effect of percolation path on temperature dependence of threshold voltage variability in bulk MOSFETs

    Tomoko Mizutani, Kiyoshi Takeuchi, Takuya Saraya, Hiroshi Oka, Takahiro Mori, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   2022.5

     More details

    Publishing type:Research paper (scientific journal)   Publisher:{IOP} Publishing  

    DOI: 10.35848/1347-4065/ac3a92

    researchmap

  • Cause analysis of width-dependence of on-current variability in thin gate-all-around silicon nanowire MOSFET

    Zihao Liu, Tomoko Mizutani, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   2022.5

     More details

    Publishing type:Research paper (scientific journal)   Publisher:{IOP} Publishing  

    DOI: 10.35848/1347-4065/ac3a8c

    researchmap

  • A simulation study on memory characteristics of InGaZnO-channel ferroelectric FETs with 2D planar and 3D structures

    Fei Mo, Xiaoran Mei, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Japanese Journal of Applied Physics   61 ( SC )   SC1013 - SC1013   2022.5

     More details

    Publishing type:Research paper (scientific journal)   Publisher:IOP Publishing  

    <title>Abstract</title>
    We have investigated the memory characteristics of InGaZnO (IGZO)-channel ferroelectric FETs (FeFETs) with 2D planar and 3D structures by TCAD simulation to improve the memory window (MW) with a floating-body channel for high-density memory applications. From the study on 2D planar FeFETs with a single gate and a double gate, the MW depends on channel length (<italic>L</italic>) and is enhanced with shorter <italic>L</italic> due to stronger electrostatic coupling from the source and drain to the center region of the IGZO layer. From the study on 3D structure FeFETs with macaroni (MAC) and nanowire (NW) structures, a large MW can be obtained especially in NW FeFETs due to the electric field concentration by Gauss’s law in the 3D electrostatics. Furthermore, we have systematically studied and discussed the device design of MAC and NW structure FeFETs in terms of the diameter and thickness for high-density memory applications. As the IGZO thickness and the outer diameter of the IGZO layer decrease, the MW increases due to the voltage divider and the electric field concentration. The device parameters that can maximize the MW can be determined under the constraints of the layout and material based on this study.

    DOI: 10.35848/1347-4065/ac3d0e

    researchmap

    Other Link: https://iopscience.iop.org/article/10.35848/1347-4065/ac3d0e/pdf

  • Estimation of minimum operating voltage in fully depleted SOI SRAM cells using gamma distribution

    Hongkuan Yu, Tomoko Mizutani, Kiyoshi Takeuchi, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   2022.5

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ac4447

    researchmap

  • A robust single device MOSFET series resistance extraction method considering horizontal-field-dependent mobility

    Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   2022.5

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ac3eb7

    researchmap

  • Corrigendum: “A robust single device MOSFET series resistance extraction method considering horizontal-field-dependent mobility” [Jpn. J. Appl. Phys. 61, SC1016 (2022)]

    Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   61 ( 4 )   049301 - 049301   2022.4

     More details

    Publishing type:Research paper (scientific journal)   Publisher:{IOP} Publishing  

    DOI: 10.35848/1347-4065/ac5dfb

    researchmap

  • A Threshold Voltage Definition Based on a Standardized Charge Versus Voltage Relationship

    Kiyoshi Takeuchi, Masaharu Kobayashi, Toshiro Hiramoto

    IEEE Transactions on Electron Devices   2022.3

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TED.2022.3144623

    researchmap

  • Efficient Erase Operation by GIDL Current for 3D Structure FeFETs with Gate Stack Engineering and Compact Long-term Retention Model

    Fei Mo, Jiawen Xiang, Xiaoran Mei, Yoshiki Sawabe, Takuya Saraya, Toshiro Hiramoto, Chun-Jung Su, Vita Pi-Ho Hu, Masaharu Kobayashi

    IEEE Journal of the Electron Devices Society   1 - 1   2022

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical and Electronics Engineers (IEEE)  

    DOI: 10.1109/jeds.2022.3142046

    researchmap

  • 3-Layer Stacking Technology with Pixel-Wise Interconnections for Image Sensors Using Hybrid Bonding of Silicon-on-Insulator Wafers Mediated by Thin Si Layers

    Masahide Goto, Yuki Honda, Masakazu Nanba, Yoshinori Iguchi, Eiji Higurashi, Takuya Saraya, Masaharu Kobayashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    Proceedings - Electronic Components and Technology Conference   2022-May   122 - 125   2022

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ECTC51906.2022.00029

    Scopus

    researchmap

  • 3-Layer Stacked Pixel-Parallel CMOS Image Sensors Using Hybrid Bonding of SOI Wafers

    Masahide Goto, Yuki Honda, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    IS and T International Symposium on Electronic Imaging Science and Technology   34 ( 7 )   2022

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.2352/EI.2022.34.7.ISS-258

    Scopus

    researchmap

  • Monolithic Integration of Oxide Semiconductor FET and Ferroelectric Capacitor Enabled by Sn-Doped InGaZnO for 3-D Embedded RAM Application

    Jixuan Wu, Fei Mo, Takuya Saraya, Toshiro Hiramoto, Mototaka Ochi, Hiroshi Goto, Masaharu Kobayashi

    IEEE Transactions on Electron Devices   68 ( 12 )   6617 - 6622   2021.12

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical and Electronics Engineers (IEEE)  

    DOI: 10.1109/ted.2021.3111145

    researchmap

  • Variability characteristics and corner effects of gate-all-around (GAA) p-type poly-Si junctionless nanowire/nanosheet transistors

    Min-Ju Ahn, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   60   2021.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:IOP Publishing Ltd  

    DOI: 10.35848/1347-4065/abdb84

    Scopus

    researchmap

  • TCAD validation of an intercept-at-zero-gate-length MOSFET series resistance extraction method

    Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    VLSI-TSA 2021 - 2021 International Symposium on VLSI Technology, Systems and Applications, Proceedings   2021.4

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/VLSI-TSA51926.2021.9440119

    Scopus

    researchmap

  • Subthreshold Swing in Silicon Gate-All-Around Nanowire MOSFET at Cryogenic Temperature

    Shohei Sekiguchi, Min-Ju Ahn, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021   2021.4

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/EDTM50988.2021.9420934

    Scopus

    researchmap

  • Accurate TCAD simulation of trench-gate IGBTs and its application to prediction of carrier lifetime requirements for future scaled devices

    M. Watanabe, N. Shigyo, T. Hoshii, K. Furukawa, K. Kakushima, K. Satoh, T. Matsudai, T. Saraya, T. Takakura, I. Muneta, H. Wakabayashi, A. Nakajima, S. Nishizawa, K. Tsutsui, T. Hiramoto, H. Ohashi, H. Iwai

    2021 5th IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2021   2021.4

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/EDTM50988.2021.9420922

    Scopus

    researchmap

  • Design space exploration of hysteretic negative capacitance ferroelectric FETs based on static solutions of Landau-Khalatnikov model for nonvolatile memory applications

    Kiyoshi Takeuchi, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   60 ( 3 )   2021.3

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:IOP Publishing Ltd  

    DOI: 10.35848/1347-4065/abe8a5

    Scopus

    researchmap

  • Study on the Roles of Charge Trapping and Fixed Charge on Subthreshold Characteristics of FeFETs

    C. Jin, C. J. Su, Y. J. Lee, P. J. Sung, T. Hiramoto, M. Kobayashi

    IEEE Transactions on Electron Devices   68 ( 3 )   1304 - 1312   2021.3

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical and Electronics Engineers (IEEE)  

    DOI: 10.1109/ted.2020.3048916

    researchmap

  • Ultrathin MoS2-Channel FeFET Memory with Enhanced Ferroelectricity in HfZrO2 and Body-Potential Control

    Jiawen Xiang, Wen Hsin Chang, Takuya Saraya, Toshiro Hiramoto, Toshifumi Irisawa, Masaharu Kobayashi

    IEEE Journal of the Electron Devices Society   10   1 - 1   2021

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical and Electronics Engineers (IEEE)  

    DOI: 10.1109/jeds.2021.3133570

    researchmap

  • Reconfigurable Multivalue Logic Functions of a Silicon Ellipsoidal Quantum-Dot Transistor Operating at Room Temperature

    Youngmin Lee, Jin Woo Lee, Sejoon Lee, Toshiro Hiramoto, Kang L. Wang

    ACS Nano   2021

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:American Chemical Society  

    DOI: 10.1021/acsnano.1c08208

    Scopus

    researchmap

  • A first-principles study on ferroelectric phase formation of Si-doped HfO2 through nucleation and phase transition in thermal process

    Jixuan Wu, Fei Mo, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Applied Physics Letters   117 ( 25 )   252904 - 252904   2020.12

     More details

    Publishing type:Research paper (scientific journal)   Publisher:AIP Publishing  

    DOI: 10.1063/5.0035139

    researchmap

  • 3.3 kV back-gate-controlled IGBT (BC-IGBT) using manufacturable double-side process technology

    T. Saraya, K. Itou, T. Takakura, M. Fukui, S. Suzuki, K. Takeuchi, M. Tsukuda, K. Satoh, T. Matsudai, K. Kakushima, T. Hoshii, K. Tsutsui, H. Iwai, A. Ogura, W. Saito, S. Nishizawa, I. Omura, H. Ohashi, T. Hiramoto

    Technical Digest - International Electron Devices Meeting, IEDM   2020-December   5.3.1 - 5.3.4   2020.12

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/IEDM13553.2020.9371909

    Scopus

    researchmap

  • A Monolithic 3-D Integration of RRAM Array and Oxide Semiconductor FET for In-Memory Computing in 3-D Neural Network

    Jixuan Wu, Fei Mo, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    IEEE Transactions on Electron Devices   67 ( 12 )   5322 - 5328   2020.12

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical and Electronics Engineers (IEEE)  

    DOI: 10.1109/ted.2020.3033831

    researchmap

  • Origin of carrier lifetime degradation in floating-zone silicon during a high-temperature process for insulated gate bipolar transistor

    Ryo Yokogawa, Hiroto Kobayashi, Yohichiroh Numasawa, Atsushi Ogura, Shin-ichi Nishizawa, Takuya Saraya, Kazuo Ito, Toshihiko Takakura, Shinichi Suzuki, Munetoshi Fukui, Kiyoshi Takeuchi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   59 ( 11 )   115503 - 115503   2020.11

     More details

    Publishing type:Research paper (scientific journal)   Publisher:IOP Publishing  

    DOI: 10.35848/1347-4065/abc1d0

    researchmap

    Other Link: https://iopscience.iop.org/article/10.35848/1347-4065/abc1d0

  • (Invited) 3D Neural Network: Monolithic Integration of Resistive-RAM Array with Oxide-Semiconductor FET

    Masaharu Kobayashi, Jixuan Wu, Fei Mo, Takuya Saraya, Toshiro Hiramoto

    ECS Transactions   98 ( 8 )   57 - 61   2020.9

     More details

    Publishing type:Research paper (scientific journal)   Publisher:The Electrochemical Society  

    DOI: 10.1149/09808.0057ecst

    researchmap

    Other Link: https://iopscience.iop.org/article/10.1149/09808.0057ecst/pdf

  • Modeling and simulation of Si IGBTs

    N. Shigyo, M. Watanabe, K. Kakushima, T. Hoshii, K. Furukawa, A. Nakajima, K. Satoh, T. Matsudai, T. Saraya, T. Takakura, K. Itou, M. Fukui, S. Suzuki, K. Takeuchi, I. Muneta, H. Wakabayashi, S. Nishizawa, K. Tsutsui, T. Hiramoto, H. Ohashi, H. Iwai

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD   2020-September   129 - 132   2020.9

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.23919/SISPAD49475.2020.9241627

    Scopus

    researchmap

  • Superior subthreshold characteristics of gate-all-around p-type junctionless poly-Si nanowire transistor with ideal subthreshold slope

    Min-Ju Ahn, Takuya Saraya, Masaharu Kobayashi, Naomi Sawamoto, Atsushi Ogura, Toshiro Hiramoto

    Japanese Journal of Applied Physics   2020.7

     More details

    Publishing type:Research paper (scientific journal)   Publisher:{IOP} Publishing  

    DOI: 10.35848/1347-4065/ab9e7d

    researchmap

  • Reliability characteristics of metal/ferroelectric-HfO2/IGZO/metal capacitor for non-volatile memory application Reviewed

    Fei Mo, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Applied Physics Express   13 ( 7 )   074005 - 074005   2020.7

     More details

    Publishing type:Research paper (scientific journal)   Publisher:IOP Publishing  

    DOI: 10.35848/1882-0786/ab9a92

    researchmap

    Other Link: https://iopscience.iop.org/article/10.35848/1882-0786/ab9a92/pdf

  • A Monolithic 3D Integration of RRAM Array with Oxide Semiconductor FET for In-memory Computing in Quantized Neural Network AI Applications

    Jixuan Wu, Fei Mo, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Digest of Technical Papers - Symposium on VLSI Technology   2020-   2020.6

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/VLSITechnology18217.2020.9265062

    Scopus

    researchmap

  • Integrated Circuits Composed of Nanowire and Single-Electron Transistors Operating at Room Temperature

    Tomoko Mizutani, Kiyoshi Takeuchi, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    2020 IEEE Silicon Nanoelectronics Workshop, SNW 2020   33 - 34   2020.6

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/SNW50361.2020.9131650

    Scopus

    researchmap

  • Performance enhancement of BF2+implanted poly-Si junctionless transistors by boron segregation and fluorine effect

    Min-Ju Ahn, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    2020 IEEE Silicon Nanoelectronics Workshop, SNW 2020   51 - 52   2020.6

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/SNW50361.2020.9131671

    Scopus

    researchmap

  • Superior subthreshold slope of gate-all-around (GAA) p-type poly-Si junctionless nanowire transistors with highly suppressed grain boundary defects

    Min-Ju Ahn, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    2020 IEEE Silicon Nanoelectronics Workshop, SNW 2020   55 - 56   2020.6

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/SNW50361.2020.9131416

    Scopus

    researchmap

  • Bipolar Transistor Test Structures for Extracting Minority Carrier Lifetime in IGBTs Reviewed

    Kiyoshi Takeuchi, Munetoshi Fukui, Takuya Saraya, Kazuo Itou, Toshihiko Takakura, Shinichi Suzuki, Yohichiroh Numasawa, Naoyuki Shigyo, Kuniyuki Kakushima, Takuya Hoshii, Kazuyoshi Furukawa, Masahiro Watanabe, Hitoshi Wakabayashi, Kazuo Tsutsui, Hiroshi Iwai, Atsushi Ogura, Wataru Saito, Shin-Ichi Nishizawa, Masanori Tsukuda, Ichiro Omura, Hiromichi Ohashi, Toshiro Hiramoto

    IEEE Transactions on Semiconductor Manufacturing   33 ( 2 )   159 - 165   2020.5

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical and Electronics Engineers (IEEE)  

    DOI: 10.1109/tsm.2020.2972369

    researchmap

  • A simulation study on low voltage operability of hafnium oxide based ferroelectric FET memories Reviewed

    Kiyoshi Takeuchi, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   59 ( {SG} )   GB11   2020.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:{IOP} Publishing  

    DOI: 10.35848/1347-4065/ab6cb4

    researchmap

  • Statistical analysis of temperature dependence of worst case static random access memory data retention voltage using extreme value theory

    Tomoko Mizutani, Kiyoshi Takeuchi, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    Japanese Journal of Applied Physics   59   2020.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Institute of Physics Publishing  

    DOI: 10.35848/1347-4065/ab70a2

    Scopus

    researchmap

  • Impact of structural parameter scaling on on-state voltage in 1200 V scaled IGBTs

    Takuya Saraya, Kazuo Itou, Toshihiko Takakura, Munetoshi Fukui, Shinichi Suzuki, Kiyoshi Takeuchi, Kuniyuki Kakushima, Takuya Hoshii, Kazuo Tsutsui, Hiroshi Iwai, Shin-ichi Nishizawa, Ichiro Omura, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   59   2020.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ab7414

    Web of Science

    researchmap

  • 強誘電体トンネル接合メモリの大規模集積化に向けた設計に関する検討

    吉村英将, 莫非, 平本俊郎, 小林正治

    第67回応用物理学会春季学術講演会,上智大学(COVID-19のため開催中止),2020年3月14日   14p-A303-13   2020.3

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    2020/3/14

    researchmap

  • Fabrication of Multi-stacked Integrated Circuit for High-Performance Image Sensors

    Nakatani Naoki, Toshiyoshi Hiroshi, Hiramoto Toshiro, Honda Yuki, Goto Masahide, Watabe Toshihisa, Nanba Masakazu, Iguchi Yoshinori, Saraya Takuya, Kobayashi Masaharu, Higurashi Eiji

    Transactions of The Japan Institute of Electronics Packaging   13   E20 - 004-1-E20-004-3   2020

     More details

    Language:English   Publisher:The Japan Institute of Electronics Packaging  

    <p>We have been developing a three-dimensionally (3D) structured complementary metal-oxide semiconductor (CMOS) image sensor (CIS), which has individual signal processing circuits in each pixel under the photoelectronic conversion area for high-performance and multi-functional operation. In this paper, we report on our experimental 3D integrated circuits developed using multi-stack technology, which enables us to fabricate 3D-CISs with small pixels. The results showed the fundamental operation of the prototype circuit, which indicates the feasibility of highly integrated 3D-CIS of More-than-Moore type applications.</p>

    DOI: 10.5104/jiepeng.13.E20-004-1

    researchmap

  • Fabrication of 3-layer stacked pixel for pixel-parallel CMOS image sensors by Au/SiO<inf>2</inf> hybrid bonding of SOI wafers

    Masahide Goto, Naoki Nakatani, Yuki Honda, Toshihisa Watabe, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    ECS Transactions   98 ( 4 )   167 - 171   2020

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/09804.0167ecst

    Scopus

    researchmap

  • Low-Voltage Operating Ferroelectric FET with Ultrathin IGZO Channel for High-Density Memory Application Reviewed

    Fei Mo, Yusaku Tagawa, Chengji Jin, MinJu Ahn, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    IEEE Journal of the Electron Devices Society   8   717 - 723   2020

     More details

    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical and Electronics Engineers (IEEE)  

    DOI: 10.1109/jeds.2020.3008789

    researchmap

  • Width dependence of drain current and carrier mobility in gate-all-around multi-channel polycrystalline silicon nanowire transistors with 10 nm width scale Reviewed

    Ki Hyun Jang, Takuya Saraya, Masaharu Kobayashi, Naomi Sawamoto, Atsushi Ogura, Toshiro Hiramoto

    Japanese Journal of Applied Physics   59 ( 2 )   2020

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1347-4065/ab6f2c

    Scopus

    researchmap

  • Physical Mechanisms of Reverse DIBL and NDR in FeFETs with Steep Subthreshold Swing

    Chengji Jin, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    IEEE Journal of the Electron Devices Society   8   429 - 434   2020

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/JEDS.2020.2986345

    Scopus

    researchmap

  • An Architectural Study for Inference Coprocessor Core at the Edge in IoT Sensing. Reviewed

    Daisuke Watanabe, Yuji Yano, Shintaro Izumi, Hiroshi Kawaguchi, Kiyoshi Takeuchi, Toshiro Hiramoto, Shoichi Iwai, Masami Murakata, Masahiko Yoshimoto

    2nd IEEE International Conference on Artificial Intelligence Circuits and Systems(AICAS)   305 - 309   2020

     More details

    Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    DOI: 10.1109/AICAS48895.2020.9073992

    researchmap

    Other Link: https://dblp.uni-trier.de/db/conf/aicas/aicas2020.html#WatanabeYIKTHIM20

  • 強誘電体HfO2トンネル接合メモリのスケーラビリティに関する検討 Invited

    小林正治, 莫非, 多川友作, 更屋拓哉, 平本俊郎

    シリコン材料・デバイス研究会(SDM研究会),機械振興会館,2019年11月7日   5 - 8   2019.11

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • Triple-Stacked Silicon-on-Insulator Integrated Circuits Using Au/SiO<inf>2</inf>Hybrid Bonding

    Yuki Honda, Masahide Goto, Toshihisa Watabe, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    2019 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2019   2019.10

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/S3S46989.2019.9320733

    Scopus

    researchmap

  • Comprehensive understanding of negative capacitance fet from the perspective of transient ferroelectric model

    Masaharu Kobayashi, Chengji Jin, Toshiro Hiramoto

    Proceedings of International Conference on ASIC   2019.10

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:IEEE Computer Society  

    DOI: 10.1109/ASICON47005.2019.8983568

    Scopus

    researchmap

  • Switching of 3300v scaled igbt by 5v gate drive

    T. Hiramoto, K. Satoh, T. Matsudai, W. Saito, K. Kakushima, T. Hoshii, K. Furukawa, M. Watanabe, N. Shigyo, H. Wakabayashi, K. Tsutsui, T. Sarava, H. Iwai, A. Ogura, S. Nishizawa, I. Omura, H. Ohash, K. Itou, T. Takakura, M. Fukui, S. Suzuki, K. Takeuchi, M. Tsukuda, Y. Numasawa

    Proceedings of International Conference on ASIC   2019.10

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ASICON47005.2019.8983633

    Scopus

    researchmap

  • Mechanisms of Reverse-DIBL and NDR Observed in Ferroelectric FETs

    Chengji Jin, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    第80回応用物理学会秋季学術講演会,北海道大学(北海道),18p-B11-1   2019.9

     More details

    Language:English   Publishing type:Research paper (other academic)  

    researchmap

  • 極薄IGZOチャネルを有する強誘電体トランジスタメモリの検討 Invited

    小林正治, 莫非, 多川友作, 金成吉, 安珉柱, 更屋拓哉, 平本俊郎

    シリコン材料・デバイス(SDM)研究会,北海道大学,2019年8月9日   59 - 62   2019.8

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • Experimental Demonstration of Ferroelectric HfO2 FET with Ultrathin-body IGZO for High-Density and Low-Power Memory Application Reviewed

    Fei Mo, Yusaku Tagawa, Chengji Jin, MinJu Ahn, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    VLSI technology symposium 2019, June 11th, 2019, Kyoto   42 - 43   2019.6

     More details

    Language:English  

    researchmap

  • Transient Negative Capacitance as Cause of Reverse Drain-induced Barrier Lowering and Negative Differential Resistance in Ferroelectric FETs Reviewed

    Chengji Jin, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    VLSI technology symposium 2019, June 13th, 2019, Kyoto   220 - 221   2019.6

     More details

    Language:English  

    researchmap

  • 反強誘電体ZrO2を有するMIS構造のユニポーラスイッチング特性

    2019.3

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • Vertical bipolar transistor test structure for measuring minority carrier lifetime in IGBTs Reviewed International journal

    K. Takeuchi, M. Fukui, T. Saraya, K. Itou, T. Takakura, S. Suzuki, Y. Numasawa, K. Kakushima, T. Hoshii, K. Furukawa, M. Watanabe, N. Shigyo, H. Wakabayashi, M. Tsukuda, A. Ogura, K. Tsutsui, H. Iwai, Shinichi Nishizawa, I. Omura, H. Ohashi, T. Hiramoto

    32nd IEEE International Conference on Microelectronic Test Structures, ICMTS 2019 2019 IEEE 32nd International Conference on Microelectronic Test Structures, ICMTS 2019   98 - 101   2019.3

     More details

    Language:English  

    Vertical PNP bipolar transistor test structures were fabricated, which can be integrated on the same wafer with functional IGBTs. Common-base current gain was measured by applying zero voltage to the leaky back side junction, from which minority carrier lifetime in the base region was extracted. The structure makes it possible to measure the lifetime after a real IGBT fabrication process flow, and to correlate it with the characteristics of IGBTs on the same wafer.

    DOI: 10.1109/ICMTS.2019.8730922

    researchmap

  • Scalability Study on Ferroelectric-HfO2 Tunnel Junction Memory

    莫 非, 多川 友作, 更屋 拓哉, 平本 俊郎, 小林 正治

    第66回応用物理学会春季学術講演会、東京、10p-W934-5   2019.3

     More details

    Language:English   Publishing type:Research paper (conference, symposium, etc.)  

    2019/3/10

    researchmap

  • Polarization Switching as the Cause of Steep Subthreshold Slope in Ferroelectric FETs

    Chengji Jin, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    第66回応用物理学会春季学術講演会、東京、10p-W631-11   2019.3

     More details

    Language:English   Publishing type:Research paper (conference, symposium, etc.)  

    2019/3/10

    researchmap

  • A Feasibility Study on Ferroelectric Shadow SRAMs Using a New Variability Design Scheme Reviewed

    Kiyoshi Takeuchi, Masaharu Kobayashi, Toshiro Hiramoto

    3rd Electron Devices Technology and Manufacturing (EDTM) Conference 2019, Marina Bay Sands, Singapore, March 14, 2019.   109 - 111   2019.3

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • CMOS 互換プロセスによるスケーラブルな積層構造型シリコン量子ビットの提案

    伊藤優希, 小林正治, 平本俊郎

    第66回応用物理学会春季学術講演会,東京工業大学大岡山キャンパス,10a-S221-7,2019年3月10日.   2019.3

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    3/10

    researchmap

  • Steep Subthreshold Slope below 60mV/dec in Junctionless SOI Transistors at Low Drain Voltage of 50mV Reviewed

    Min-Ju Ahn, Kiyoshi Takeuchi, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    3rd Electron Devices Technology and Manufacturing (EDTM) Conference 2019, Marina Bay Sands, Singapore, March 14, 2019   2019.3

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • Scalability Study on Ferroelectric-HfO2 Tunnel Junction Memory

    MO FEI, yusaku Tagawa, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    JSAP Annual Meetings Extended Abstracts   2019.1   2639 - 2639   2019.2

     More details

    Language:English   Publisher:The Japan Society of Applied Physics  

    DOI: 10.11470/jsapmeeting.2019.1.0_2639

    CiNii Research

    researchmap

  • Demonstration of 1200V Scaled IGBTs Driven by 5V Gate Voltage with Superiorly Low Switching Loss

    T. Saraya, K. Itou, T. Takakura, M. Fukui, S. Suzuki, K. Takeuchi, M. Tsukuda, Y. Numasawa, K. Satoh, T. Matsudai, W. Saito, K. Kakushima, T. Hoshii, K. Furukawa, M. Watanabe, N. Shigyo, K. Tsutsui, H. Iwai, A. Ogura, S. Nishizawa, I. Omura, H. Ohashi, T. Hiramoto

    Technical Digest - International Electron Devices Meeting, IEDM   2018-December   2019.1

  • Experimental Study on the Role of Polarization Switching in Subthreshold Characteristics of HfO 2 -based Ferroelectric and Anti-ferroelectric FET

    Chengji Jin, Kyungmin Jang, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Technical Digest - International Electron Devices Meeting, IEDM   2018-   31.5.1 - 31.5.4   2019.1

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/IEDM.2018.8614486

    Scopus

    researchmap

  • Self-Turn-on-Free 5V Gate Driving for 1200V Scaled IGBT

    Masanori Tsukuda, Masaki Sudo, Kazunori Hasegawa, Seiya Abe, Takuya Saraya, Toshihiko Takakura, Munetoshi Fukui, Kazuo Itou, Shinichi Suzuki, Kiyoshi Takeuchi, Tamotsu Ninomiya, Toshiro Hiramoto, Ichiro Omura

    2019 31ST INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND ICS (ISPSD)   339 - 342   2019

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Triple-Layering Technology for Pixel-Parallel CMOS Image Sensors Developed by Hybrid Bonding of SOI Wafers. Reviewed

    Masahide Goto, Joeri De Vos, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Eiji Higurashi, Yuki Honda, Takuya Saraya, Masaharu Kobayashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    2019 International 3D Systems Integration Conference (3DIC)(3DIC)   1 - 4   2019

     More details

    Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    DOI: 10.1109/3DIC48104.2019.9058785

    researchmap

  • Quarter Video Graphics Array Image Sensor with Linear and Wide-Dynamic-Range Output Developed by Pixel-Wise 3D Integration

    118 ( 337 )   43 - 48   2018.12

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    CiNii Books

    researchmap

  • Proposal of scalable silicon qubits with vertically stacked structures fabricated by CMOS technology Reviewed

    Yuki Ito, Masaharu Kobayashi, Toshiro Hiramoto

    Silicon Quantum Electronics Workshop (SQEW), Doltone House, Sydney, Australia, Poster No. 23, November 13, 2018.   2018.11

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • 多量子ビット化実現に向けたスケーラブルな積層構造型シリコン量子ビットの提案

    伊藤優希, 小林正治, 平本俊郎

    電子情報通信学会量子情報技術研究会,東京大学先端科学技術研究センター,2018年11月26日   2018.11

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    11/26

    researchmap

  • 320×240 Pixel-Parallel 3D Integrated CMOS Image Sensors by Direct Bonding of SOI Layers Reviewed

    35   4p   2018.10

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)   Publisher:Institute of Electrical Engineers of Japan  

    researchmap

  • New Methodology for Evaluating Minority Carrier Lifetime for Process Assessment

    K. Kakushima, T. Hoshii, M. Watanabe, N. Shizyo, K. Furukawa, T. Saraya, T. Takakura, K. Itou, M. Fukui, S. Suzuki, K. Takeuchi, I. Muneta, H. Wakabayashi, Y. Numasawa, A. Ogura, S. Nishizawa, K. Tsutsui, T. Hiramoto, H. Ohashi, H. Iwai

    IEEE Symposium on VLSI Circuits, Digest of Technical Papers   2018-June   105 - 106   2018.10

  • Pixel-Parallel Three-Dimensional Integrated CMOS Image Sensors by Using Direct Bonding of Silicon-on-Insulator Wafers for Next-Generation Television Systems Invited Reviewed

    Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    The Forum on the Science and Technology of Silicon Materials 2018, Tsushima Campus, Okayama University, October 21, 2018   2018.10

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • Verification of the injection enhancement effect in IGBTs by measuring the electron and hole currents separately Reviewed

    T. Hoshii, K. Furukawa, K. Kakushima, M. Watanabe, N. Shigvo, T. Saraya, T. Takakura, K. Ltou, M. Fukui, S. Suzuki, K. Takeuchi, I. Muneta, H. Wakabayashi, Shinichi Nishizawa, K. Tsutsui, T. Hiramoto, H. Ohashi, H. Lwai

    48th European Solid-State Device Research Conference, ESSDERC 2018 2018 48th European Solid-State Device Research Conference, ESSDERC 2018   26 - 29   2018.10

     More details

    Language:English  

    The injection enhancement effect in IGBTs was experimentally verified by separately measuring emitter electron-and hole-currents for the first time. Finger contacts were employed as ladder-like periodic n+ and p+ emitters to allow the independent measurement of these currents. Both reducing the mesa width and increasing the cell pitch were found to increase electron injection from the emitter, demonstrating the injection enhancement effect. These experimental results agreed well with the simulation results.

    DOI: 10.1109/ESSDERC.2018.8486870

    researchmap

  • Temperature Effect on DIBL Variability in Bulk and SOTB MOSFETs Reviewed

    S. Gao, T. Mizutani, K. Takeuchi, M. Kobayashi, T. Hiramoto

    International Conference on Solid State Devices and Materials (SSDM) 2018, Tokyo, Japan   167 - 168   2018.9

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • 画素並列信号処理3層構造イメージセンサの設計 Reviewed

    後藤正英, 本田悠葵, 渡部俊久, 萩原 啓, 難波正和, 井口義則, 更屋拓哉, 小林正治, 日暮栄治, 年吉 洋, 平本俊郎

    第79回応用物理学会秋季学術講演会,名古屋国際会議場,19p-432-7,2018年9月19日.   79th   2018.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    J-GLOBAL

    researchmap

  • Ferroelectric Neuron for Feedforward Neural Network Application Reviewed

    Fei Mo, Tagawa Yusaku, Saraya Takuya, Hiramoto Toshiro, Kobayashi Masaharu

    第79回応用物理学会秋季学術講演会、名古屋   20p-141-13   2018.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 高TER・多値メモリ性を有するHfO2強誘電トンネル接合メモリのためのデバイスおよびプロセス設計 Reviewed

    多川 友作, 莫 非, 更屋 拓哉, 平本 俊郎, 小林 正治

    第79回応用物理学会秋季学術講演会、名古屋   19p-233-11   2018.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 複数回ストレスを利用した特性ばらつき自己修復手法のBulk SRAMセルへの応用 Reviewed

    水谷 朋子, 竹内 潔, 更屋 拓哉, 小林 正治, 平本 俊郎

    20a-CE-4   2018.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • Reduced Drain-Induced-Barrier-Lowering (DIBL) Variability at High Temperature in Bulk and SOTB MOSFETs Reviewed

    Shuang Gao, Tomoko Mizutani, Kiyoshi Takeuchi, Masaharu Kobayashi, Toshiro Hiramoto

    第79回応用物理学会秋季学術講演会、名古屋   20a-CE-3   2018.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • On the Physical Origin of Steep Subthreshold Slope in Ferroelectric FET: Transient Negative Capacitance Effect Caused by Polarization Switching Delay Reviewed

    C. Jin, T. Hiramoto, M. Kobayashi

    International Conference on Solid State Devices and Materials (SSDM) 2018, Tokyo, Japan   199 - 200   2018.9

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • SRAMの安定性自己修復手法における複数回ストレス印加の効果

    水谷朋子, 竹内 潔, 更屋拓哉, 小林正治, 平本俊郎

    電子情報通信学会シリコン材料・デバイス研究会(SDM)および集積回路研究会(ICD)合同研究会,8/7-8/9,北海道   2018.8

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    2018/8/9

    researchmap

  • Understanding Temperature Effect on Subthreshold Slope Variability in Bulk and SOTB MOSFETs Reviewed

    Shuang Gao, Tomoko Mizutani, Kiyoshi Takeuchi, Masaharu Kobayashi, Toshiro Hiramoto

    電子情報通信学会シリコン材料・デバイス研究会 (SDM)、北海道   2018.8

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 強誘電体HfO2 FTJの高TER化と多値化のためのデバイスおよびプロセス設計 Reviewed

    小林正治, 多川友作, バク ヒ, 平本俊郎

    電子情報通信学会シリコン材料・デバイス研究会(SDM)および集積回路研究会(ICD)合同研究会,8/7-8/9,北海道   2018.8

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • Scalability Study on Fcrroclcctric-HfO<inf>2</inf> Tunnel Junction Memory Based on Non-equilibrium Green Function Method with Self-consistent Potential

    Fei Mo, Yusaku Tagawa, Takuya Saraya, Toshiro Hiramoto, Masaharu Kobayashi

    Technical Digest - International Electron Devices Meeting, IEDM   2018-December   16.3.1 - 16.3.4   2018.7

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/IEDM.2018.8614702

    Scopus

    researchmap

  • Device and Process Design for HfO 2 -Based Ferroelectric Tunnel Junction - 3 - Memory with Large Tunneling Electroresistance Effect and Multi-level Cell Reviewed

    M. Kobayashi, Y. Tagawa, M. Fei, T. Saraya, T. Hiramoto

    2018 IEEE Silicon Nanoelectronics Workshop, Honolulu, HI, USA   29 - 30   2018.6

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • Improving Performance and Variability of Gate-All-Around Polycrystalline Silicon Nanowire Transistors by High Temperature Annealing with Passivation Oxide , Reviewed

    K. –H. Jang, T. Saraya, M. Kobayashi, N. Sawamoto, A. Ogura, T. Hiramoto

    2018 IEEE Silicon Nanoelectronics Workshop Hilton Hawaiian Village, Honolulu, HI USA   59 - 60   2018.6

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • Reduced Subthreshold Slope Variability at High Temperature in Bulk and SOTB MOSFETs Reviewed

    S. Gao, T. Mizutani, K. Takeuchi, M. Kobayashi, T. Hiramoto

    2018 IEEE Silicon Nanoelectronics Workshop June 17-18, 2018 Hilton Hawaiian Village, Honolulu, HI USA Satellite conference of 2018 IEEE Silicon Nanoelectronics Workshop Hilton Hawaiian Village, Honolulu, HI USA   9 - 10   2018.6

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • Drain-Induced Variability Due to Quantum Confinement Effect in Extremely Narrow Silicon Nanowire Transistors with Width down to 2nm Reviewed

    Toshiro Hiramoto, Tomoko Mizutani, Kiyoshi Takeuchi, Takuya Saraya, Masaharu Kobayashi

    International Conference on Nanoelectronics Strategy (INS), Qatar Science Hall, Tohoku University, May 14, 2018   2018.5

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • Statistics of Random Telegraph Noise Amplitude in Extremely Narrow Silicon Nanowire Transistors with Width down to 2nm Reviewed

    Toshiro Hiramoto, Hao Qiu, Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Masaharu Kobayashi

    International Conference on Nanoelectronics Strategy (INS), Qatar Science Hall, Tohoku University, May 14, 2018   2018.5

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • A Nonvolatile SRAM Based on Ferroelectric HfO2 capacitor for IoT Power Management Invited Reviewed

    Masaharu Kobayashi, Nozomu Ueyama, Toshiro Hiramoto

    ECS Transactions, Seattle, WA   85 ( 6 )   111 - 114   2018.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    researchmap

  • Quarter Video Graphics Array Full-Digital Image Sensing with Wide Dynamic Range and Linear Output Using Pixel-Wise 3D Integration Reviewed

    Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    Proceedings - IEEE International Symposium on Circuits and Systems   2018-May   2018.4

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ISCAS.2018.8351002

    Scopus

    researchmap

  • MOS-Gated Thyristorの電圧ベース等価回路モデルを用いた急峻スロープPN-Body Tied SOI FETのパラメータ依存性の検討 Reviewed

    植田大貴, 竹内 潔, 小林正治, 平本俊郎

    第65回応用物理学会春季学術講演会,早稲田大学西早稲田キャンパス(東京)   18a-G203-5   2018.3

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 複数回ストレスを利用した特性ばらつき自己修復手法によるSRAMデータ保持電圧の最小化 Reviewed

    水谷朋子, 竹内 潔, 更屋拓哉, 小林正治, 平本俊郎

    第65回応用物理学会春季学術講演会,早稲田大学西早稲田キャンパス(東京)   18p-G203-1   2018.3

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • Pixel-parallel 3-D integrated CMOS image sensors for next-generation video systems Reviewed

    Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    ECS Transactions   85 ( 8 )   163 - 166   2018

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/08508.0163ecst

    Scopus

    researchmap

  • 3次元構造撮像デバイスの微細・高集積化に向けた直接接合による多層積層技術 Reviewed

    本田悠葵, 後藤正英, 渡部俊久, 萩原 啓, 難波正和, 井口義則, 更屋拓哉, 小林正治, 日暮栄治, 年吉 洋, 平本俊郎

    応用物理学会第9回集積化MEMSシンポジウム,広島   34th   2017.11

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    J-GLOBAL

    researchmap

  • Fabrication of Three-Dimensional Integrated CMOS Image Sensors with Quarter VGA Resolution by Pixel-Wise Direct Bonding Technology Reviewed

    Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    30th International Microprocesses and Nanotechnology Conference (MNC2017), Ramada Plaza JeJu Hotel, Jeju, Korea   2017.11

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • Parallel Programmable Nonvolatile Memory Using SRAM Cells Invited Reviewed

    Toshiro Hiramoto, Tomoko Mizutani, Kiyoshi Takeuchi, Masaharu Kobayashi

    12th International Conference on ASIC (ASICON 2017), Hotel Pullman Guiyang, Guiyang, China   434 - 437   2017.10

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • 3次元構造撮像デバイスの画素内A/D変換回路に適用可能なイベントドリブン型雑音除去回路の開発 Reviewed

    後藤正英, 本田悠葵, 渡部俊久, 萩原 啓, 難波正和, 井口義則, 更屋拓哉, 小林正治, 日暮栄治, 年吉 洋, 平本俊郎

    応用物理学会第9回集積化MEMSシンポジウム,広島   34th   2017.10

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    J-GLOBAL

    researchmap

  • Lowering Minimum Operation Voltage (Vmin) in SRAM Array by Post-Fabrication Self-Improvement of Cell Stability by Multiple Stress Application Reviewed

    Tomoko Mizutani, Kiyoshi Takeuchi, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    International Conference on Solid State Devices and Materials (SSDM), Sendai International Center, Miyagi   245 - 246   2017.9

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • Development of Event-Driven Correlated Double Sampling for A/D Converters in Pixel-Parallel 3-D Integrated CMOS Image Sensors Reviewed

    後藤正英, 本田悠葵, 渡部俊久, 萩原 啓, 難波正和, 井口義則, 更屋拓哉, 小林正治, 日暮栄治, 年吉 洋, 平本俊郎

    情報センシング研究会,械振興会館(東京)   41 ( 32 )   1 - 4   2017.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    CiNii Books

    researchmap

  • 急峻サブスレッショルドスロープPN-Body Tied SOI FETの最適化に向けたMOS-Gated Thyristorの電圧ベース等価回路モデル Reviewed

    植田大貴, 竹内 潔, 小林正治, 平本俊郎

    第78回応用物理学会秋季学術講演会,福岡国際会議場   8a-C18-6   2017.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 低消費電力応用に向けた強誘電体HfO2薄膜不揮発性SRAMの動作実証 Reviewed

    小林正治, 上山 望, 平本 俊郎

    第78回応用物理学会秋季学術講演会,福岡国際会議場   7p-A204-14   2017.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 強誘電性マルチドメイン相互作用モデルを用いた強誘電体HfO2の動特性に関する考察 Reviewed

    Jang Kyungmin, 上山 望, 小林正治, 平本俊郎

    第78回応用物理学会秋季学術講演会,福岡国際会議場   7p-A204-13   2017.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • ノーマリーオフ動作のための強誘電体HfO2を集積した不揮発性SRAM Invited Reviewed

    小林正治, 上山 望, 平本俊郎

    電子情報通信学会シリコン材料・デバイス研究会(SDM)および集積回路研究会(ICD)合同研究会,北海道大学情報教育館   SDM2017-37   2017.8

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 不揮発情報一括書き込み・読み出し可能な初期値確定SRAM Reviewed

    水谷朋子, 竹内 潔, 更屋拓哉, 篠原尋史, 小林正治, 平本俊郎

    電子情報通信学会シリコン材料・デバイス研究会(SDM)および集積回路研究会(ICD)合同研究会,北海道大学情報教育館   SDM2017-38   2017.8

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • Statistical analyses of random telegraph noise amplitude in ultra-narrow (deep sub-10nm) silicon nanowire transistors Reviewed

    Hao Qiu, Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Jiezhi Chen, Masaharu Kobayashi, Toshiro Hiramoto

    Digest of Technical Papers - Symposium on VLSI Technology   T50 - T51   2017.7

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.23919/VLSIT.2017.7998197

    Scopus

    researchmap

  • A nonvolatile SRAM integrated with ferroelectric HfO2 capacitor for normally-off and ultralow power IoT application Reviewed

    Masaharu Kobayashi, Nozomu Ueyama, Toshiro Hiramoto

    Digest of Technical Papers - Symposium on VLSI Technology   T156 - T157   2017.7

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.23919/VLSIT.2017.7998161

    Scopus

    researchmap

  • Event-Driven Correlated Double Sampling for Pulse-Frequency-Modulation A/D Converters Integrated in Pixel-Parallel Image Sensors Reviewed

    Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    2017 International Image Sensor Workshop (IISW), Grand Prince Hotel Hiroshima, Hiroshima   2017.5

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • 強誘電体HfO2を用いたGate-All-Aroundナノワイヤ負性容量FETにおけるIon/Ioff比の向上とそのスケーラビリティ Reviewed

    Jang Kyungmin, 更屋拓哉, 小林正治, 平本俊郎

    第64回応用物理学会春季学術講演会,パシフィコ横浜(神奈川)   17p-304-15   2017.3

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 強誘電体HfO2ダブルゲート負性容量FETの動特性に関する考察 Reviewed

    Jang Kyungmin, 上山 望, 小林正治, 平本俊郎

    第64回応用物理学会春季学術講演会,パシフィコ横浜(神奈川)   17p-304-14   2017.3

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 通常のSRAMセルを利用した一括書き込み可能な不揮発性メモリ Reviewed

    水谷朋子, 竹内 潔, 更屋拓哉, 篠原尋史, 小林正治, 平本俊郎

    第64回応用物理学会春季学術講演会,パシフィコ横浜(神奈川)   16a-412-5   2017.3

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 負性容量トランジスタに向けた強誘電性HfZrO2膜における負性容量の直接観測 Reviewed

    上山 望, 小林正治, 平本俊郎

    第64回応用物理学会春季学術講演会,パシフィコ横浜(神奈川)   17p-304-13   2017.3

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • SRAM の電源投入直後初期状態とトランジスタばらつきの関係 Reviewed

    竹内 潔, 水谷朋子, 篠原尋史, 更屋拓哉, 小林正治, 平本俊郎

    第64回応用物理学会春季学術講演会,パシフィコ横浜(神奈川)   16a-412-6   2017.3

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • Experimental study on polarization-limited operation speed of negative capacitance FET with ferroelectric HfO2 Reviewed

    Masaharu Kobayashi, Nozomu Ueyama, Kyungmin Jang, Toshiro Hiramoto

    Technical Digest - International Electron Devices Meeting, IEDM   12.3.1 - 12.3.4   2017.1

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/IEDM.2016.7838402

    Scopus

    researchmap

  • 強誘電性HfO2を用いた負性容量トランジスタの動作速度に関する実験検討 Invited Reviewed

    小林正治, 上山 望, 蒋 京珉, 平本俊郎

    電子情報通信学会回路・デバイス・境界領域技術研究会,国民宿舎みやじま杜の宿(広島)   2017.1

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • Three-layered stacking process by Au/SiO<inf>2</inf> hybrid bonding for 3D structured image sensors Reviewed

    Yuki Honda, Masahide Goto, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    ECS Transactions   80 ( 4 )   227 - 231   2017

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/08004.0227ecst

    Scopus

    researchmap

  • 3D Scaling for Insulated Gate Bipolar Transistors (IGBTs) with Low V-ce(sat)

    K. Tsutsui, K. Kakushima, T. Hoshii, A. Nakajima, S. Nishizawa, H. Wakabayashi, I. Muneta, K. Sato, T. Matsudai, W. Saito, T. Saraya, K. Itou, M. Fukui, S. Suzuki, M. Kobayashi, T. Takakura, T. Hiramoto, A. Ogura, Y. Numasawa, I. Omura, H. Ohashi, H. Iwai

    2017 IEEE 12TH INTERNATIONAL CONFERENCE ON ASIC (ASICON)   1137 - 1140   2017

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • 3次元構造撮像デバイスの微細・高集積化に向けた接合電極の微細・狭ピッチ化 Reviewed

    本田悠葵, 萩原啓, 後藤正英, 渡部俊久, 難波正和, 井口義則, 更屋拓哉, 小林正治, 年吉洋, 日暮栄治, 平本俊郎

    第8回集積化MEMSシンポジウム,平戸文化センター(長崎)   33rd   2016.10

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    J-GLOBAL

    researchmap

  • A Study on the Correlation between SRAM Power-up State and Transistor Variation Reviewed

    Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Hirofumi Shinohara, Masaharu Kobayashi, Toshiro Hiramoto

    International Conference on Solid State Devices and Materials (SSDM), Tsukuba International Congress Center, Ibaraki   55 - 56   2016.9

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • 線幅2nmの超微細シリコンナノワイヤトランジスタにおけるドレイン電圧に起因する特性ばらつき Reviewed

    水谷朋子, 竹内 潔, 鈴木龍太, 更屋拓哉, 小林正治, 平本俊郎

    第77回応用物理学会秋季学術講演会,朱鷺メッセ(新潟)   14a-B13-6   2016.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • SRAMセルアレーTEGを用いた電源投入直後データの測定 Reviewed

    竹内 潔, 水谷朋子, 篠原尋史, 更屋拓哉, 小林正治, 平本俊郎

    第77回応用物理学会秋季学術講演会,朱鷺メッセ(新潟)   14a-B13-7   2016.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • サブ0.2Vの高エネルギー効率動作に向けた強誘電体HfO2ダブルゲート負性容量FETにおけるゲートスタックのスケーラビリティ Reviewed

    Jang Kyungmin, 更屋拓哉, 小林正治, 平本 俊郎

    第77回応用物理学会秋季学術講演会,朱鷺メッセ(新潟)   13p-B13-5   2016.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 負性容量によるトンネルFETの性能向上負性容量によるトンネルFETの性能向上 Reviewed

    小林正治, 蔣 京珉, 上山 望, 平本俊郎

    第77回応用物理学会秋季学術講演会,朱鷺メッセ(新潟)   13p-B13-4   2016.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • Parallel Programmable Non-volatile Memory Using Normal SRAM Cells Reviewed

    Tomoko Mizutani, Kiyoshi Takeuchi, Takuya Saraya, Hirofumi Shinohara, Masaharu Kobayashi, Toshiro Hiramoto

    International Conference on Solid State Devices and Materials (SSDM), Tsukuba International Congress Center, Ibaraki   57 - 58   2016.9

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • 線幅2nmの超微細シリコンナノワイヤトランジスタにおけるDIBLばらつきおよびデバイス内ばらつき Reviewed

    水谷朋子, 竹内 潔, 鈴木龍太, 更屋拓哉, 小林正治, 平本俊郎

    電子情報通信学会シリコン材料・デバイス研究会(SDM),中央電気倶楽部(大阪)   116 ( 172 )   123 - 126   2016.8

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    CiNii Books

    researchmap

  • 負性容量によるトンネルFETの性能向上に関する検討 Reviewed

    小林正治, チャン キュンミン, 上山 望, 平本俊郎

    電子情報通信学会シリコン材料・デバイス研究会(SDM),中央電気倶楽部(大阪)   40 ( 24 )   127 - 130   2016.8

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    CiNii Books

    researchmap

  • 128×96 Pixel-Parallel Three-Dimensional Integrated CMOS Image Sensors with 16-bit Output Reviewed

    後藤正英, 萩原 啓, 本田悠葵, 渡部俊久, 難波正和, 井口義則, 更屋拓哉, 小林正治, 日暮栄治, 年吉 洋, 平本俊郎

    電気学会E部門総合研究会,金沢市文化ホール(石川)   2016 ( 9 )   15 - 20   2016.6

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • A New Variability Origin in Extremely Narrow Silicon Nanowire MOSFETs with Nanowire Width down to 2nm Reviewed

    T. Hiramoto, T. Mizutani, Y. Tanahashi, R. Suzuki, T. Saraya, M. Kobayashi

    CMOS Emerging Technologies, Hotel Bonaventure Montreal, Montreal, Canada   2016.5

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • C-12-14 Pulse-Frequency-Modulation A/D Converters Suitable for CMOS Image Sensor Pixel Reviewed

    Goto Masahide, Hagiwara Kei, Honda Yuki, Nanba Masakazu, Iguchi Yoshinori, Saraya Takuya, Kobayashi Masaharu, Higurashi Eiji, Toshiyoshi Hiroshi, Hiramoto Toshiro

    Proceedings of the IEICE General Conference   2016 ( 2 )   87 - 87   2016.3

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CiNii Books

    researchmap

  • ランダムテレグラフノイズに起因するSRAM誤動作のトランジスタレベル解析 Reviewed

    水谷朋子, 更屋拓哉, 竹内 潔, 小林 正治, 平本 俊郎

    第63回応用物理学会春季学術講演会,東京工業大学大岡山キャンパス(東京)   20a-S422-3   2016.3

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • Ultra-Low Power and Ultra-Low Voltage Devices and Circuits for IoT Applications Invited Reviewed

    T. Hiramoto, K. Takeuchi, T. Mizutani, A. Ueda, T. Saraya, M. Kobayashi, Y. Yamamoto, H. Makiyama, T. Yamashita, H. Oda, S. Kamohara, N. Sugii, Y. Yamaguchi

    2016 IEEE SILICON NANOELECTRONICS WORKSHOP (SNW)   146 - 147   2016

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/SNW.2016.7578025

    Web of Science

    researchmap

  • 画素並列信号処理を行うSOI積層型3次元構造撮像デバイスの試作と評価 Reviewed

    後藤正英, 萩原 啓, 井口義則, 大竹 浩, 更屋拓哉, 小林正治, 日暮栄治, 年吉 洋, 平本俊郎

    第7回集積化MEMSシンポジウム,朱鷺メッセ(新潟コンベンションセンター)   32nd   30pm1-D-5   2015.10

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    J-GLOBAL

    researchmap

  • 線幅2nmの超微細シリコンナノワイヤトランジスタにおける量子閉じ込め効果によるしきい値電圧および電流ばらつき Reviewed

    水谷朋子, 棚橋裕麻, 鈴木龍太, 更屋拓哉, 小林正治, 平本俊郎

    第76回応用物理学会秋季学術講演会,名古屋国際会議場(愛知)   15p-1C-7   2015.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • On the Device Design for Steep Slope Negative Capacitance FET (NCFET) Toward Sub-0.2V operation Reviewed

    Masaharu Kobayashi, Toshiro Hiramoto

    第76回応用物理学会秋季学術講演会,名古屋国際会議場(愛知)   16a-1C-7   2015.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • パルス周波数変調方式A/D変換回路の3次元集積化 Reviewed

    後藤正英, 萩原 啓, 井口義則, 大竹 浩, 更屋拓哉, 小林正治, 日暮栄治, 年吉 洋, 平本俊郎

    第76回応用物理学会秋季学術講演会,名古屋国際会議場(愛知)   76th   14a-1C-2   2015.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    J-GLOBAL

    researchmap

  • FD-SOTB nMOSFETにおけるRTN振幅統計分布の基板バイアス依存性 Reviewed

    Jang Kyungmin, 水谷朋子, 竹内潔, 更屋拓哉, 小林正治, 平本俊郎

    第76回応用物理学会秋季学術講演会,名古屋国際会議場(愛知)   15p-1C-1   2015.9

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 負性容量による急峻スロープトランジスタ(NCFET)の設計指針 Reviewed

    小林正治, 平本俊郎

    電子情報通信学会 シリコン材料・デバイス研究会 集積回路研究会合同研究会,熊本市民会館崇城大学ホール   60   2015.8

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • high-k添加シングルp+Polyゲートを用いた超低リーク用途向け薄膜BOX-SOI CMOS Reviewed

    山本芳樹, 槇山秀樹, 山下朋弘, 尾田秀一, 蒲原史朗, 山口泰男, 杉井信之, 水谷朋子, 小林正治, 平本俊郎

    応用物理学会シリコンテクノロジー研究会 第184回研究集会「2015 VLSIシンポジウム」特集,甲南大学ネットワークキャンパス東京   67   2015.8

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • 線幅2nmの超微細シリコンナノワイヤトランジスタにおけるしきい値電圧および電流ばらつき Reviewed

    水谷朋子, 棚橋裕麻, 鈴木龍太, 更屋拓哉, 小林正治, 平本俊郎

    電子情報通信学会 シリコン材料・デバイス研究会 集積回路研究会合同研究会,熊本市民会館崇城大学ホール   68   2015.8

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • Development of Three-Dimensional Integrated Circuits and Pixel-Parallel CMOS Image Sensors Using Direct Bonding of SOI Layers Reviewed

    後藤正英, 萩原 啓, 井口義則, 大竹 浩, 更屋拓哉, 小林正治, 日暮栄治, 年吉 洋, 平本俊郎

    第79回半導体集積回路シンポジウム, 早稲田大学西早稲田キャンパス   79   43 - 46   2015.7

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    CiNii Books

    researchmap

  • 画像並列信号処理を行う3次元構造撮像デバイスの試作 Reviewed

    後藤正英, 萩原 啓, 井口義則, 大竹 浩, 更屋拓哉, 小林正治, 日暮栄治, 年吉 洋, 平本俊郎

    応用物理学会第6回集積化MEMS技術研究ワークショップ,NHK放送技術研究所(東京)   2015.7

     More details

    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)  

    researchmap

  • A Three-Dimensional Integration Technology with Embedded Au Electrodes for stacked CMOS Image Sensors Reviewed

    Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    2015 International Image Sensor Workshop (IISW), Vaals, The Netherlands   2015.6

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • Threshold Voltage Self-Adjusting MOSFETs and SRAM Cells Operating at 0.1V Reviewed

    Toshiro Hiramoto, Akitsugu Ueda, Seung-Min Jung, Tomoko Mizutani, Takuya Saraya, Masaharu Kobayashi

    11th International Nanotechnology Conference on Communication and Cooperation (INC11), Hilton Fukuoka Sea Hawk, Fukuoka   94   2015.5

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • Three-dimensional integrated CMOS image sensors with pixel-parallel A/D converters fabricated by direct bonding of SOI layers Reviewed

    Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    Technical Digest - International Electron Devices Meeting, IEDM   2015-February ( February )   4.2.1 - 4.2.4   2015.2

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/IEDM.2014.7046980

    Scopus

    researchmap

  • Re-Invention of FET Reviewed

    Toshiro Hiramoto

    Emerging Nanoelectronic Devices   277 - 297   2015.1

     More details

    Language:English   Publishing type:Part of collection (book)   Publisher:Wiley Blackwell  

    DOI: 10.1002/9781118958254.ch14

    Scopus

    researchmap

  • Threshold Voltage and Current Variability of Extremely Narrow Silicon Nanowire MOSFETs with Width down to 2nm Reviewed

    T. Mizutani, Y. Tanahashi, R. Suzuki, T. Saraya, M. Kobayashi, T. Hiramoto

    2015 SILICON NANOELECTRONICS WORKSHOP (SNW)   21 - 22   2015

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Novel Single p plus Poly-Si/Hf/SiON Gate Stack Technology on Silicon-on-Thin-Buried-Oxide (SOTB) for Ultra-Low Leakage Applications Reviewed

    Y. Yamamoto, H. Makiyama, T. Yamashita, H. Oda, S. Kamohara, N. Sugii, Y. Yamaguchi, T. Mizutani, M. Kobayashi, T. Hiramoto

    2015 SYMPOSIUM ON VLSI TECHNOLOGY (VLSI TECHNOLOGY)   170 - 171   2015

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/VLSIT.2015.7223665

    Web of Science

    researchmap

  • Foreword Reviewed

    Klaus Schruefer, Toshiro Hiramoto

    Digest of Technical Papers - Symposium on VLSI Technology   2014.9

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/VLSIT.2014.6894337

    Scopus

    researchmap

  • Three-dimensional integration of fully depleted silicon-on-insulator transistor substrates for CMOS image sensors using Au/SiO2 hybrid bonding and XeF2 etching Reviewed

    Hagiwara, Kei, Goto, Masahide, Ohtake, Hiroshi, Iguchi, Yoshinori, Saraya, Takuya, Toshiyoshi, Hiroshi, Higurashi, Eiji, Hiramoto, Toshiro

    ECS Transactions   64 ( 5 )   391 - 396   2014

     More details

    Publishing type:Research paper (scientific journal)  

    DOI: 10.1149/06405.0391ecst

    Scopus

    researchmap

  • Development of novel three-dimensional structuring of integrated circuits by using low temperature direct bonding for CMOS image sensors Reviewed

    Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    ECS Transactions   61 ( 6 )   87 - 90   2014

     More details

    Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/06106.0087ecst

    Scopus

    researchmap

  • Three-Dimensional Integrated Circuits with NFET and PFET on Separate Layers Fabricated by Low Temperature Au/SiO2 Hybrid Bonding Reviewed

    M. Goto, K. Hagiwara, Y. Iguchi, H. Ohtake, T. Saraya, E. Higurashi, H. Toshiyoshi, T. Hiramoto

    2013 IEEE SOI-3D-SUBTHRESHOLD MICROELECTRONICS TECHNOLOGY UNIFIED CONFERENCE (S3S)   2013

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Ultralow-voltage operation of Silicon-on-Thin-BOX (SOTB) 2Mbit SRAM down to 0.37 v utilizing adaptive back bias

    Y. Yamamoto, H. Makiyama, H. Shinohara, T. Iwamatsu, H. Oda, S. Kamohara, N. Sugii, Y. Yamaguchi, T. Mizutani, T. Hiramoto

    Digest of Technical Papers - Symposium on VLSI Technology   T212 - T213   2013

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Scopus

    researchmap

  • Vmin=0.4 v LSIs are the real with silicon-on-thin-buried-oxide (SOTB)-How is the application with 'Perpetuum-Mobile' micro-controller with SOTB? Reviewed

    N. Sugii, T. Iwamatsu, Y. Yamamoto, H. Makiyama, H. Shinohara, H. Oda, S. Kamohara, Y. Yamaguchi, K. Ishibashi, T. Mizutani, T. Hiramoto

    2013 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2013   2013

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:IEEE Computer Society  

    DOI: 10.1109/S3S.2013.6716576

    Scopus

    researchmap

  • Suppression of die-to-die delay variability of silicon on thin buried oxide (SOTB) CMOS circuits by balanced P/N drivability control with back-bias for ultralow-voltage (0.4 V) operation Reviewed

    H. Makiyama, Y. Yamamoto, H. Shinohara, T. Iwamatsu, H. Oda, N. Sugii, K. Ishibashi, T. Mizutani, T. Hiramoto, Y. Yamaguchi

    Technical Digest - International Electron Devices Meeting, IEDM   33.2.4   2013

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/IEDM.2013.6724742

    Scopus

    researchmap

  • Silicon on Thin Buried Oxide (SOTB) Technology for Ultralow-Power Applications Reviewed

    N. Sugii, T. Iwamatsu, Y. Yamamoto, H. Makiyama, H. Shinohara, H. Aono, H. Oda, S. Kamohara, Y. Yamaguchi, T. Mizutani, Toshiro Hiramoto

    2013 INTERNATIONAL CONFERENCE ON SEMICONDUCTOR TECHNOLOGY FOR ULTRA LARGE SCALE INTEGRATED CIRCUITS AND THIN FILM TRANSISTORS (ULSIC VS. TFT 4)   54 ( 1 )   189 - 196   2013

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/05401.0189ecst

    Web of Science

    researchmap

  • Reduced drain current variability in fully depleted silicon-on-thin-BOX (SOTB) MOSFETs Reviewed

    T. Mizutani, Y. Yamamoto, H. Makiyama, T. Tsunomura, T. Iwamatsu, H. Oda, N. Sugii, T. Hiramoto

    2012 IEEE Silicon Nanoelectronics Workshop, SNW 2012   2012

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/SNW.2012.6243344

    Scopus

    researchmap

  • Variability in Scaled MOSFETs: Measurements, Analysis, and Suppression Reviewed

    Toshiro Hiramoto, Anil Kumar, Tomoko Mizutani, Takuya Saraya

    2012 IEEE 11TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT-2012)   654 - 657   2012

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Development of Novel MOSFET with Front and Back Side Electrodes for 3D-Structured Image Sensors Reviewed

    Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Hiroshi Toshiyoshi, Toshiro Hiramoto

    INTERNATIONAL SYMPOSIUM ON FUNCTIONAL DIVERSIFICATION OF SEMICONDUCTOR ELECTRONICS   50 ( 14 )   49 - 54   2012

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/05014.0049ecst

    Web of Science

    researchmap

  • Mechanisms of high hole mobility in (100) nanowire pMOSFETs with width of less than 10nm Reviewed

    Hirotoshi Nomura, Ryota Suzuki, Tomohiro Kutsuki, Takuya Saraya, Toshiro Hiramoto

    2012 13th International Conference on Ultimate Integration on Silicon, ULIS 2012   41 - 44   2012

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ULIS.2012.6193352

    Scopus

    researchmap

  • Poly/high-k/SiON gate stack and novel profile engineering dedicated for ultralow-voltage silicon-on-thin-BOX (SOTB) CMOS operation Reviewed

    Y. Yamamoto, H. Makiyama, T. Tsunomura, T. Iwamatsu, H. Oda, N. Sugii, Y. Yamaguchi, T. Mizutani, T. Hiramoto

    Digest of Technical Papers - Symposium on VLSI Technology   109 - 110   2012

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/VLSIT.2012.6242485

    Scopus

    researchmap

  • Characteristics control of single electron transistor with floating gate by charge pump circuit Reviewed

    Motoki Nozue, Ryota Suzuki, Hirotoshi Nomura, Takuya Saraya, Toshiro Hiramoto

    2012 13th International Conference on Ultimate Integration on Silicon, ULIS 2012   161 - 164   2012

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ULIS.2012.6193382

    Scopus

    researchmap

  • Self-improvement of cell stability in SRAM by post fabrication technique Reviewed

    Anil Kumar, Takuya Saraya, Shinji Miyano, Toshiro Hiramoto

    2012 IEEE Silicon Nanoelectronics Workshop, SNW 2012   2012

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/SNW.2012.6243348

    Scopus

    researchmap

  • Reinvestigation of dot formation mechanisms in silicon nanowire channel single-electron/hole transistors operating at room temperature Reviewed

    Ryota Suzuki, Motoki Nozue, Takuya Saraya, Toshiro Hiramoto

    2012 IEEE Silicon Nanoelectronics Workshop, SNW 2012   2012

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/SNW.2012.6243337

    Scopus

    researchmap

  • Silicon Single Electron Transistors Operating at Room Temperature and Their Applications Reviewed

    K. Miyaji, T. Hiramoto

    Comprehensive Semiconductor Science and Technology   1-6   340 - 382   2011.1

     More details

    Language:English   Publishing type:Part of collection (book)   Publisher:Elsevier Inc.  

    DOI: 10.1016/B978-0-44-453153-7.00032-8

    Scopus

    researchmap

  • Suppression of VT variability degradation induced by NBTI with RDF control

    T. Tsunomura, J. Nishimura, A. Kumar, A. Nishida, S. Inaba, K. Takeuchi, T. Hiramoto, T. Mogami

    Digest of Technical Papers - Symposium on VLSI Technology   150 - 151   2011

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Scopus

    researchmap

  • Statistical comparison of random telegraph noise (RTN) in bulk and fully depleted SOI MOSFETs Reviewed

    Jun Nishimura, Takuya Saraya, Toshiro Hiramoto

    2011 12th International Conference on Ultimate Integration on Silicon, ULIS 2011   191 - 194   2011

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ULIS.2011.5757959

    Scopus

    researchmap

  • From bulk toward FDSOI and silicon nanowire transistors: Challenges and opportunities Reviewed

    Toshiro Hiramoto

    2011 12th International Conference on Ultimate Integration on Silicon, ULIS 2011   1 - 2   2011

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ULIS.2011.5757958

    Scopus

    researchmap

  • Origin of "current-onset voltage" variability in scaled MOSFETs Reviewed

    A. Kumar, T. Mizutani, K. Shimizu, T. Tsunomura, A. Nishida, K. Takeuchi, S. Inaba, S. Kamohara, K. Terada, T. Hiramoto

    2010 Silicon Nanoelectronics Workshop, SNW 2010   2010

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/SNW.2010.5562596

    Scopus

    researchmap

  • Suppression of DIBL and Current-Onset Voltage Variability in Intrinsic Channel Fully Depleted SOI MOSFETs Reviewed

    T. Hiramoto, T. Mizutani, A. Kumar, A. Nishida, T. Tsunomura, S. Inaba, K. Takeuchi, S. Kamohara, T. Mogami

    2010 IEEE INTERNATIONAL SOI CONFERENCE   2010

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Analysis and Prospect of Local Variability of Drain Current in Scaled MOSFETs by a New Decomposition Method Reviewed

    T. Tsunomura, A. Kumar, T. Mizutani, C. Lee, A. Nishida, K. Takeuchi, S. Inaba, S. Kamohara, K. Terada, T. Hiramoto, T. Mogami

    2010 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS   97 - +   2010

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Impact of DIBL Variability on SRAM Static Noise Margin Analyzed by DMA SRAM TEG Reviewed

    X. Song, M. Suzuki, T. Saraya, A. Nishida, T. Tsunomura, S. Kamohara, K. Takeuchi, S. Inaba, T. Mogami, T. Hiramoto

    2010 INTERNATIONAL ELECTRON DEVICES MEETING - TECHNICAL DIGEST   2010

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Variation; key issue of the advanced CMOS &amp; LSI's Reviewed

    Shiro Kamohara, Akio Nishida, Toshiro Hiramoto, Toru Mogami

    Proceedings of 2010 International Symposium on VLSI Technology, System and Application, VLSI-TSA 2010   122 - 123   2010

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/VTSA.2010.5488922

    Scopus

    researchmap

  • Direct measurements, analysis, and post-fabrication improvement of noise margins in SRAM cells utilizing DMA SRAM TEG Reviewed

    M. Suzuki, T. Saraya, K. Shimizu, A. Nishida, S. Kamohara, K. Takeuchi, S. Miyano, T. Sakurai, T. Hiramoto

    Digest of Technical Papers - Symposium on VLSI Technology   191 - 192   2010

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/VLSIT.2010.5556223

    Scopus

    researchmap

  • Statistic characteristics of "current-onset voltage" in scaled MOSFETs analyzed by 8k DMA TEG Reviewed

    T. Mizutani, A. Kumar, T. Tsunomura, A. Nishida, K. Takeuchi, S. Inaba, S. Kamohara, K. Terada, T. Hiramoto

    2010 Silicon Nanoelectronics Workshop, SNW 2010   2010

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/SNW.2010.5562557

    Scopus

    researchmap

  • Mobility enhancement in silicon nanowire transistors Reviewed

    Toshiro Hiramoto, Jiezhi Chen, Takuya Saraya

    ICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings   9 - 12   2010

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ICSICT.2010.5667872

    Scopus

    researchmap

  • Silicon on thin BOX (SOTB) CMOS for ultralow standby power with forward-biasing performance booster Reviewed

    T. Ishigaki, R. Tsuchiya, Y. Morita, H. Yoshimoto, N. Sugii, T. Iwamatsu, H. Oda, Y. Inoue, T. Ohtou, T. Hiramoto, S. Kimura

    SOLID-STATE ELECTRONICS   53 ( 7 )   717 - 722   2009.7

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.sse.2009.02.008

    Web of Science

    researchmap

  • Transistor evolution for CMOS extension and future information processing technologies Reviewed

    Toshiro Hiramoto

    Extended Abstracts of the 9th International Workshop on Junction Technology, IWJT 2009   3 - 6   2009

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/IWJT.2009.5166205

    Scopus

    researchmap

  • Superior &lt; 110 &gt;-Directed Mobility to &lt; 100 &gt;-Directed Mobility in Ultrathin Body (110) nMOSFETs Reviewed

    Ken Shimizu, Takuya Saraya, Toshiro Hiramoto

    2009 IEEE INTERNATIONAL SOI CONFERENCE   143 - 144   2009

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Analysis of Extra V-T Variability Sources in NMOS Using Takeuchi Plot Reviewed

    T. Tsunomura, A. Nishida, F. Yano, A. T. Putra, K. Takeuchi, S. Inaba, S. Kamohara, K. Terada, T. Mama, T. Hiramoto, T. Mogami

    2009 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS   110 - +   2009

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Random Fluctuations in Scaled MOS Devices Reviewed

    Kiyoshi Takeuchi, Akio Nishida, Toshiro Hiramoto

    2009 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES   79 - +   2009

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Anomalous back-bias dependence of threshold voltage variability in NMOSFETs due to high concentration regions near source and drain Reviewed

    Ichiro Yamato, Tatsuya Mama, Takaaki Tsunomura, Akio Nishida, Toshiro Hiramoto

    2009 International Semiconductor Device Research Symposium, ISDRS '09   2009

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ISDRS.2009.5378141

    Scopus

    researchmap

  • Improvement of static noise margin in SRAM by post-fabrication self-convergence technique Reviewed

    Makoto Suzuki, Takuya Saraya, Ken Shimizu, Takayasu Sakurai, Toshiro Hiramoto

    2009 International Semiconductor Device Research Symposium, ISDRS '09   2009

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ISDRS.2009.5378309

    Scopus

    researchmap

  • Experimental study on uniaxially stressed gate-all-around silicon nanowires nMOSFETs on (110) silicon-on-insulator Reviewed

    Jiezhi Chen, Takuya Saraya, Toshiro Hiramoto

    2009 International Semiconductor Device Research Symposium, ISDRS '09   2009

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ISDRS.2009.5378148

    Scopus

    researchmap

  • A new methodology for evaluating VT variability considering dopant depth profile

    A. T. Putra, T. Tsunomura, A. Nishida, S. Kamohara, K. Takeuchi, S. Inaba, K. Terada, T. Hiramoto

    Digest of Technical Papers - Symposium on VLSI Technology   116 - 117   2009

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Scopus

    researchmap

  • Transport in silicon nanowire transistors Reviewed

    T. Hiramoto, J. Chen, Y. J. Jeong, T. Saraya

    ECS Transactions   18 ( 1 )   55 - 60   2009

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/1.3096427

    Scopus

    researchmap

  • Analyses of random threshold voltage fluctuations in MOS devices Reviewed

    K. Takeuchi, T. Tsunomura, A. T. Putra, T. Fukai, A. Nishida, S. Kamohara, T. Hiramoto

    Extended Abstracts of the 9th International Workshop on Junction Technology, IWJT 2009   7 - 10   2009

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/IWJT.2009.5166206

    Scopus

    researchmap

  • Impact of fixed charge at MOSFETs' SiO2/Si interface on V th variation Reviewed

    A. T. Putra, T. Tsunomura, A. Nishida, S. Kamohara, K. Takeuchi, T. Hiramoto

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD   25 - 28   2008

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/SISPAD.2008.4648228

    Scopus

    researchmap

  • Impact of Atomic Oxide Roughness and Local Gate Depletion on V-th Variation in MOSFETs Reviewed

    Arifin Tamsir Putra, Takaaki Tsunomura, Akio Nishida, Shiro Kamohara, Kiyoshi Takeuchi, Toshiro Hiramoto

    2008 IEEE SILICON NANOELECTRONICS WORKSHOP   21 - +   2008

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Silicon on Thin BOX (SOTB) CMOS for Ultralow Standby Power with Forward-biasing Performance Booster Reviewed

    T. Ishigaki, R. Tsuchiya, Y. Morita, H. Yoshimoto, N. Sugii, T. Iwamatsu, H. Oda, Y. Inoue, T. Ohtou, T. Hiramoto, S. Kimura

    ESSDERC 2008: PROCEEDINGS OF THE 38TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE   198 - +   2008

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Experimental Study on Silicon Nanowire nMOSFET and Single-Electron Transistor at Room Temperature under Uniaxial Tensile Strain Reviewed

    YeonJoo Jeong, Kousuke Miyaji, Toshiro Hiramoto

    2008 IEEE SILICON NANOELECTRONICS WORKSHOP   37 - 38   2008

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Characteristic Modulation of Silicon MOSFETs and Single Electron Transistors with a Movable Gate Electrode Reviewed

    J. S. Park, T. Saraya, K. Miyaji, K. Shimizu, A. Higo, K. Takahashi, Y. H. Yi, H. Toshiyoshi, T. Hiramoto

    2008 IEEE SILICON NANOELECTRONICS WORKSHOP   9 - 10   2008

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Experimental study of mobility in [110]- and [100]-directed multiple silicon nanowire GAA MOSFETs on (100) SOI Reviewed

    Jiezhi Chen, Takuya Saraya, Kousuke Miyaji, Ken Shimizu, Toshiro Hiramoto

    Digest of Technical Papers - Symposium on VLSI Technology   32 - 33   2008

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/VLSIT.2008.4588552

    Scopus

    researchmap

  • Hole Mobility Enhancement by [110] Uniaxial Compressive Strain in (110) Oriented Ultra-Thin Body pFETs with SOI Thickness of Less Than 4 nm Reviewed

    Ken Shimizu, Toshiro Hiramoto

    2008 IEEE SILICON NANOELECTRONICS WORKSHOP   17 - +   2008

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Analyses of 5 sigma V-th fluctuation in 65nm-MOSFETs using Takeuchi plot Reviewed

    T. Tsunomura, A. Nishida, F. Yano, A. T. Putra, K. Takeuchi, S. Inaba, S. Kamohara, K. Terada, T. Hiramoto, T. Mogami

    2008 SYMPOSIUM ON VLSI TECHNOLOGY   121 - +   2008

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Novel Long-Range-Extension of Coulomb Blockade Region in Room-Temperature Operating Silicon Single-Hole Transistor Reviewed

    S. Lee, K. Miyaji, M. Kobayashi, T. Hiramoto

    Silicon Nanoelectronics Workshop, Kyoto   115 - 116   2007.6

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • 2007 IEEE International SOI Conference Reviewed

    Toshiro Hiramoto

    Proceedings - IEEE International SOI Conference   2007

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/SOI.2007.4357819

    Scopus

    researchmap

  • Understanding random threshold voltage fluctuation by comparing multiple fabs and technologies Reviewed

    K. Takeuchi, T. Fukai, T. Tsunomura, A. T. Putra, A. Nishida, S. Kamohara, T. Hiramoto

    Technical Digest - International Electron Devices Meeting, IEDM   467 - 470   2007

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/IEDM.2007.4418975

    Scopus

    researchmap

  • Transport in ultrathin SOI MOSFETs and silicon nanowire transistors Reviewed

    T. Hiramoto

    ECS Transactions   11 ( 6 )   403 - 411   2007

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1149/1.2778397

    Scopus

    researchmap

  • Impact of local poly-Si gate depletion on Vth variation in nanoscale MOSFETs investigated by 3D device simulation Reviewed

    A. T. Putra, A. Nishida, S. Kamohara, T. Tsunomura, T. Hiramoto

    2007 International Semiconductor Device Research Symposium, ISDRS   2007

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ISDRS.2007.4422270

    Scopus

    researchmap

  • Silicon VLSI device technology and nanoelectronics Reviewed

    Toshiro Hiramoto

    MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS   6 - 7   2007

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Transport in silicon nanowire and single-electron transistors Invited Reviewed

    Toshiro Hiramoto, Kousuke Miyaji, Masaharu Kobayashi

    SISPAD 2007: SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES 2007   209 - 215   2007

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • FinFETs with both large body factor and high drive-current Reviewed

    Keisuke Takahashi, Arifin Tamsir Putra, Ken Shimizu, Toshiro Hiramoto

    2007 INTERNATIONAL SEMICONDUCTOR DEVICE RESEARCH SYMPOSIUM, VOLS 1 AND 2   108 - 109   2007

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Transport in ultra-thin-body SOI and silicon nanowire MOSFETs Reviewed

    Toshiro Hiramoto, Gen Tsutsui, Ken Shimizu, Masaharu Kobayashi

    2007 INTERNATIONAL SEMICONDUCTOR DEVICE RESEARCH SYMPOSIUM, VOLS 1 AND 2   417 - 418   2007

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Suppression of Electron Mobility Degradation in (100)-Oriented Double-Gate Ultra-Thin Body nMOSFETs with SOI Thickness of Less Than 2 nm Reviewed

    Ken Shimizu, Toshiro Hiramoto

    2007 IEEE INTERNATIONAL SOI CONFERENCE PROCEEDINGS   125 - 126   2007

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Integration of silicon single-electron transistors operating at room temperature Reviewed

    Toshiro Hiramoto

    Nanoscaled Semiconductor-on-Insulator Structures and Devices   97 - 112   2007

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Integration of silicon single-electron transistors operating at room temperature Reviewed

    Toshiro Hiramoto

    NATO Security through Science Series C: Environmental Security   97 - 112   2007

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1007/978-1-4020-6380-0_7

    Scopus

    researchmap

  • Experimental study on mobility universality in (100) ultra thin body nMOSFET with SOI thickness of 5nm Reviewed

    Ken Shimizu, Gen Tsutsui, Toshiro Hiramoto

    Proceedings - IEEE International SOI Conference   159 - 160   2007

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/SOI.2006.284486

    Scopus

    researchmap

  • Charge Polarity Dependence of Negative Differential Conductance in Room-Temperature Operating Silicon Single-Charge Transistors Reviewed

    Masaharu Kobayashi, Kousuke Miyaji, Toshiro Hiramoto

    International Conference on Solid State Devices and Materials (SSDM), Yokohama   2006   806 - 807   2006.9

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    CiNii Books

    researchmap

  • Emerging nanoscale silicon devices taking advantage of nanostructure physics Reviewed

    T. Hiramoto, M. Saitoh, G. Tsutsui

    IBM JOURNAL OF RESEARCH AND DEVELOPMENT   50 ( 4-5 )   411 - 418   2006.7

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Compact analytical model for room-temperature-operating silicon single-electron transistors with discrete quantum energy levels Reviewed

    K Miyaji, M Saitoh, T Hiramoto

    IEEE TRANSACTIONS ON NANOTECHNOLOGY   5 ( 3 )   167 - 173   2006.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TNANO.2006.869949

    Web of Science

    researchmap

  • Multi-gate MOSFETs with back-gate control Reviewed

    Toshiro Hiramoto, Toshiharu Nagumo

    2006 IEEE INTERNATIONAL CONFERENCE ON INTEGRATED CIRCUIT DESIGN AND TECHNOLOGY, PROCEEDINGS   80 - +   2006

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Mobility enhancement in (110)-oriented ultra-thin-body single-gate and double-gate SOI MOSFETs Reviewed

    Toshiro Hiramoto, Gen Tsutsui, Masurni Saitoh, Toshiharu Nagumo, Takuya Saraya

    2006 INTERNATIONAL WORKSHOP ON NANO CMOS, PROCEEDINGS   44 - 55   2006

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Large Temperature Dependence of Negative Differential Conductance in Room-Temperature Operating Silicon Single-Electron/Single-Hole Transistor Reviewed

    Masaharu Kobayashi, Kousuke Miyaji, Masumi Saitoh, Toshiro Hiramoto

    International Semiconductor Device Research Symposium 2005, Bethesda, MD, USA   TP3-03   2005.12

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    researchmap

  • Large Temperature Dependence of Coulomb Blockade Oscillations in Room-Temperature Operating Silicon Single-Hole Transistor Reviewed

    Masaharu Kobayashi, Masumi Saitoh, Toshiro Hiramoto

    International Conference on Solid State Devices and Materials (SSDM) 2005, Kobe, Hyogo   2005   164 - 165   2005.9

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    CiNii Books

    researchmap

  • Reverse short-channel effect of body factor in low-fin field-effect transistors induced by corner effect Reviewed

    T Nagumo, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   44 ( 1A )   50 - 54   2005.1

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.44.50

    Web of Science

    researchmap

  • Mobility enhancement due to volume inversion in (110)-oriented ultra-thin body double-gate nMOSFETs with body thickness less than 5 nm Reviewed

    G Tsutsui, M Saitoh, T Saraya, T Nagumo, T Hiramoto

    IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2005, TECHNICAL DIGEST   747 - 750   2005

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Emerging devices for post-classical CMOS - From memory, logic to architectures Reviewed

    Toshiro Hiramoto

    2005 IEEE VLSI-TSA - International Symposium on VLSI Technology - VLSI-TSA-TECH, Proceedings of Technical Papers   1 - 4   2005

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/VTSA.2005.1497059

    Scopus

    researchmap

  • Integration and performance improvements of silicon nanocrystal memories Reviewed

    T Hiramoto, Kim, I, M Saitoh, K Yanagidaira

    Materials and Processes for Nonvolatile Memories   830   37 - 44   2005

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • V-th control of t(pd)-degradation-free FD SOT MOSFET with extremely thin BOX using variable body-factor scheme Reviewed

    T Ohtou, K Yokoyama, T Nagumo, T Hiramoto

    2005 IEEE International SOI Conference, Proceedings   101 - 103   2005

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Design guideline of multi-gate MOSFETs considering body effect

    Toshiharu Nagumo, Toshiro Hiramoto

    2005 International Semiconductor Device Research Symposium   2005   205 - 206   2005

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Scopus

    researchmap

  • On the accuracy of analytical model for room-temperature operating silicon single-electron transistors with discrete quantum energy levels

    Kousuke Miyaji, Masaharu Kobayashi, Tetsu Ohtou, Masumi Saitoh, Toshiro Hiramoto

    2005 International Semiconductor Device Research Symposium   2005   348 - 349   2005

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Scopus

    researchmap

  • Superior mobility characteristics in (110)-oriented ultra thin body pMOSFETs with SOI thikness less than 6 nm Reviewed

    G Tsutsui, M Saitoh, T Hiramoto

    2005 Symposium on VLSI Technology, Digest of Technical Papers   76 - 77   2005

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Room-temperature demonstration of low-voltage and tunable static memory based on negative differential conductance in silicon single-electron transistors Reviewed

    M Saitoh, H Harata, T Hiramoto

    APPLIED PHYSICS LETTERS   85 ( 25 )   6233 - 6235   2004.12

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.1839643

    Web of Science

    researchmap

  • Analytical model of body factor in short channel bulk MOSFETs for low voltage applications Reviewed

    A Kumar, T Nagumo, G Tsutsui, T Hiramoto

    SOLID-STATE ELECTRONICS   48 ( 10-11 )   1763 - 1766   2004.10

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.sse.2004.05.011

    Web of Science

    researchmap

  • Variable body effect factor fully depleted silicon-on-insulator metal oxide semiconductor field effect transistor for ultra low-power variable-threshold-voltage complementary metal oxide semiconductor applications Reviewed

    T Ohtou, T Nagumo, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   43 ( 6A )   3311 - 3314   2004.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.43.3311

    Web of Science

    researchmap

  • Room-temperature demonstration of highly-functional single-hole transistor logic based on quantum mechanical effect Reviewed

    M Saitoh, T Hiramoto

    ELECTRONICS LETTERS   40 ( 13 )   836 - 837   2004.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1049/el:20040554

    Web of Science

    researchmap

  • Scaling of nanocrystal memory cell by direct tungsten bitline on self-aligned landing plug polysilicon contact Reviewed

    GI Kim, K Yanagidaira, T Hiramoto

    IEEE ELECTRON DEVICE LETTERS   25 ( 5 )   265 - 267   2004.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/LED.2004.826542

    Web of Science

    researchmap

  • Extension of Coulomb blockade region by quantum confinement in the ultrasmall silicon dot in a single-hole transistor at room temperature Reviewed

    M Saitoh, T Hiramoto

    APPLIED PHYSICS LETTERS   84 ( 16 )   3172 - 3174   2004.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.1710709

    Web of Science

    researchmap

  • Room-temperature observation of negative differential conductance due to large quantum level spacing in silicon single-electron transistor Reviewed

    M Saitoh, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS   43 ( 2A )   L210 - L213   2004.2

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.43.L210

    Web of Science

    researchmap

  • Degradation of body factor (gamma) of single gate fully depleted SOI MOSFETs due to short channel effects Reviewed

    A Kumar, T Nagumo, G Tsutsui, T Hiramoto

    2004 IEEE INTERNATIONAL SOI CONFERENCE, PROCEEDINGS   58 - 59   2004

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Room-temperature demonstration of integrated silicon single-electron transistor circuits for current switching and analog pattern matching Reviewed

    M Saitoh, H Harata, T Hiramoto

    IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2004, TECHNICAL DIGEST   187 - 190   2004

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Enhancement of adjustable threshold voltage range by substrate bias due to quantum confinement in ultrathin body SOI pMOSFETs Reviewed

    G Tsutsui, T Nagumo, T Hiramoto

    IEEE TRANSACTIONS ON NANOTECHNOLOGY   2 ( 4 )   314 - 318   2003.12

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TNANO.2003.820985

    Web of Science

    researchmap

  • IEEE Transactions on Nanotechnology: Foreword Reviewed

    Toshiro Hiramoto, Michiharu Tabe

    IEEE Transactions on Nanotechnology   2 ( 4 )   191 - 192   2003.12

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/TNANO.2003.820809

    Scopus

    researchmap

  • Large Coulomb blockade oscillations at room temperature in ultranarrow wire channel MOSFETs formed by slight oxidation process Reviewed

    M Saitoh, T Murakami, T Hiramoto

    IEEE TRANSACTIONS ON NANOTECHNOLOGY   2 ( 4 )   241 - 245   2003.12

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TNANO.2003.820796

    Web of Science

    researchmap

  • VTCMOS Characteristics and Its Optimum Conditions Predicted by a Compact Analytical Model Reviewed

    Hyunsik Im, Takashi Inukai, Hiroyuki Gomyo, Toshiro Hiramoto, Takayasu Sakurai

    IEEE Transactions on Very Large Scale Integration (VLSI) Systems   11 ( 5 )   755 - 761   2003.10

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TVLSI.2003.814320

    Scopus

    researchmap

  • Quantum effects and single-electron charging effects in nano-scale silicon MOSFETs at room temperature Reviewed

    T Hiramoto, H Majima, M Saitoh

    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY   101 ( 1-3 )   24 - 27   2003.8

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/S0921-5107(02)00696-7

    Web of Science

    researchmap

  • Tunneling barrier structures in room-temperature operating silicon single-electron and single-hole transistors Reviewed

    M Saitoh, H Majima, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   42 ( 4B )   2426 - 2428   2003.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Future electron devices and SOI technology - Semi-planar SOI MOSFETs with sufficient body effect Reviewed

    T Hiramoto, T Saito, T Nagumo

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   42 ( 4B )   1975 - 1978   2003.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.42.1975

    Web of Science

    researchmap

  • Current drive improvement using enhanced body effect factor due to finite inversion layer thickness in variable-threshold-voltage complementary MOS (VTCMOS) Reviewed

    T Nagumo, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   42 ( 4B )   1988 - 1992   2003.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.42.1988

    Web of Science

    researchmap

  • Optimum device consideration for standby power reduction scheme using drain-induced barrier lowering Reviewed

    QY Liu, T Sakurai, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   42 ( 4B )   2171 - 2175   2003.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Large memory window and long charge-retention time in ultranarrow-channel silicon floating-dot memory Reviewed

    M Saitoh, E Nagata, T Hiramoto

    APPLIED PHYSICS LETTERS   82 ( 11 )   1787 - 1789   2003.3

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.1562343

    Web of Science

    researchmap

  • Low-Power device design of fully-depleted SOI MOSFETs Reviewed

    Toshiro Hiramoto, Toshiaki Nagumo, Tetsu Ohtou

    2003 International Semiconductor Device Research Symposium, ISDRS 2003 - Proceedings   388 - 389   2003

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/ISDRS.2003.1272148

    Scopus

    researchmap

  • Scanning probe nanolithography using self-assembled monolayer for fabrication of single electron transistors Reviewed

    Y. Isono, K. Shimamoto, G. Hashiguchi, Y. Mihara, H. Mimura, T. Hiramoto, H. Fujita

    TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers   1   242 - 245   2003

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/SENSOR.2003.1215298

    Scopus

    researchmap

  • Integration of fluorinated nano-crystal memory cells with 4.6F(2) size by landing plug polysilicon contact and direct-tungsten bitline Reviewed

    IG Kim, K Yanagidaira, T Hiramoto

    2003 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST   605 - 608   2003

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Room-temperature operation of highly functional single-electron transistor logic based on quantum mechanical effect in ultra-small silicon dot Reviewed

    M Saitoh, T Hiramoto

    2003 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST   753 - 756   2003

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • 0.5V, 400MHz, VDD-hopping processor with zero VTH FD-SOI technology

    Hiroshi Kawaguchi, Kouichi Kanda, Koichi Nose, Sadaaki Hattori, Danardono Dwi Antono, Daisuke Yamada, Takayuki Miyazaki, Kenichi Inagaki, Toshiro Hiramoto, Takayasu Sakurai

    Digest of Technical Papers - IEEE International Solid-State Circuits Conference   101 - 481   2003

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Scopus

    researchmap

  • Experimental study on the mobility universality in ultra thin body SOI pMOSFETs Reviewed

    G. Tsutsui, M. Saitoh, T. Nagumo, T. Hiramoto

    2003 International Semiconductor Device Research Symposium, ISDRS 2003 - Proceedings   361 - 362   2003

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/ISDRS.2003.1272136

    Scopus

    researchmap

  • Analytical expression of body factor in short channel bulk MOSFETs Reviewed

    Anil Kumar, Toshiharu Nagumo, Gen Tsutsui, Toshiro Hiramoto

    2003 International Semiconductor Device Research Symposium, ISDRS 2003 - Proceedings   476 - 477   2003

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/ISDRS.2003.1272200

    Scopus

    researchmap

  • Effects of oxidation process on the tunneling barrier structures in room-temperature operating silicon single-electron transistors Reviewed

    M Saitoh, T Murakami, T Hiramoto

    IEEE TRANSACTIONS ON NANOTECHNOLOGY   1 ( 4 )   214 - 218   2002.12

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TNANO.2002.807379

    Web of Science

    researchmap

  • Suppression of short channel effect in triangular parallel wire channel MOSFETs Reviewed

    T Saito, T Saraya, T Inukai, H Majima, T Nagumo, T Hiramoto

    IEICE TRANSACTIONS ON ELECTRONICS   E85C ( 5 )   1073 - 1078   2002.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Observation of current staircase due to large quantum level spacing in a silicon single-electron transistor with low parasitic series resistance Reviewed

    M Saitoh, T Hiramoto

    JOURNAL OF APPLIED PHYSICS   91 ( 10 )   6725 - 6728   2002.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.1471928

    Web of Science

    researchmap

  • Origin of critical substrate bias in variable threshold voltage complementary MOS (VTCMOS) Reviewed

    T Inukai, H Im, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   41 ( 4B )   2312 - 2315   2002.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.41.2312

    Web of Science

    researchmap

  • Physical insight into fractional power dependence of saturation current on gate voltage in advanced short channel MOSFETS (Alpha-Power law model) Reviewed

    H Im, M Song, T Hiramoto, T Sakurai

    ISLPED'02: PROCEEDINGS OF THE 2002 INTERNATIONAL SYMPOSIUM ON LOW POWER ELECTRONICS AND DESIGN   13 - 18   2002

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Optimum design of device/circuit cooperative schemes for ultra-low power applications Reviewed

    T. Hiramoto

    ICCDCS 2002 - 4th IEEE International Caracas Conference on Devices, Circuits and Systems   2002

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:IEEE Computer Society  

    DOI: 10.1109/ICCDCS.2002.1004066

    Scopus

    researchmap

  • Effects of ultra-narrow channel on characteristics of MOSFET memory with silicon nanocrystal floating gates Reviewed

    M Saitoh, E Nagata, T Hiramoto

    INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST   181 - 184   2002

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Transport spectroscopy of the ultrasmall silicon quantum dot in a single-electron transistor Reviewed

    M Saitoh, T Saito, T Inukai, T Hiramoto

    APPLIED PHYSICS LETTERS   79 ( 13 )   2025 - 2027   2001.9

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Effects of discrete quantum levels on electron transport in silicon single-electron transistors with an ultra-small quantum dot Reviewed

    M Saitoh, T Hiramoto

    IEICE TRANSACTIONS ON ELECTRONICS   E84C ( 8 )   1071 - 1076   2001.8

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • High drive-current electrically induced body dynamic threshold SOI MOSFET (EIB-DTMOS) with large body effect and low threshold voltage Reviewed

    M Takamiya, T Hiramoto

    IEEE TRANSACTIONS ON ELECTRON DEVICES   48 ( 8 )   1633 - 1640   2001.8

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Optimum device parameters and scalability of variable threshold voltage complementary MOS (VTCMOS) Reviewed

    T Hiramoto, M Takamiya, H Koura, T Inukai, H Gomyo, H Kawaguchi, T Sakurai

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   40 ( 4B )   2854 - 2858   2001.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Effects of dot size and its distribution on electron number control in metal-oxide-semiconductor-field-effect-transistor memories based on silicon nanocrystal floating dots Reviewed

    HN Wang, N Takahashi, H Majima, T Inukai, M Saitoh, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   40 ( 3B )   2038 - 2040   2001.3

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Large electron addition energy above 250 meV in a silicon quantum dot in a single-electron transistor Reviewed

    M Saitoh, N Takahashi, H Ishikuro, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   40 ( 3B )   2010 - 2012   2001.3

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Room Temperature Operation of SiliconSingle Electron Transsistors Fabricated by Anisotropic Etching Technique

    Hiramoto Toshiro, Takahashi Nobuyoshi, Ishikuro Hiroki, Saitoh Masumi

    Monthly journal of the Institute of Industrial Science, University of Tokyo   53 ( 2 )   116 - 118   2001.2

     More details

    Language:Japanese   Publisher:The University of Tokyo  

    DOI: 10.11188/seisankenkyu.53.116

    CiNii Books

    researchmap

  • Suppression of series parasitic resistance and observation of quantum effects in a silicon single-electron transistor Reviewed

    M Saitoh, T Hiramoto

    PROCEEDINGS OF THE 2001 1ST IEEE CONFERENCE ON NANOTECHNOLOGY   243 - 247   2001

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Dynamics of tunneling into charge-tunable Si quantum dots Reviewed

    Y Shi, XL Yuan, J Wu, HM Bu, HG Yang, P Han, YD Zheng, T Hiramoto

    SUPERLATTICES AND MICROSTRUCTURES   28 ( 5-6 )   387 - 392   2000.11

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Separation of effects of statistical impurity number fluctuations and position distribution on Vth fluctuations in scaled MOSFETs Reviewed

    Y Yasuda, M Takamiya, T Hiramoto

    IEEE TRANSACTIONS ON ELECTRON DEVICES   47 ( 10 )   1838 - 1842   2000.10

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Magnetic actuation of bending and torsional vibrations for 2D optical-scanner application Reviewed

    A. Garnier, T. Bourouina, H. Fujita, T. Hiramoto, E. Orsier, J. C. Peuzin

    Sensors and Actuators, A: Physical   84 ( 1 )   156 - 160   2000.8

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Elsevier Sequoia SA  

    DOI: 10.1016/S0924-4247(99)00301-5

    Scopus

    researchmap

  • A Device Operating by Single Electron

    HIRAMOTO Toshiro

    IEEJ Transactions on Sensors and Micromachines   120 ( 8 )   518 - 521   2000.8

     More details

    Language:Japanese   Publisher:The Institute of Electrical Engineers of Japan  

    DOI: 10.1541/ieejjournal.120.518

    CiNii Books

    researchmap

    Other Link: https://jlc.jst.go.jp/DN/JALC/00067724611?from=CiNii

  • Experimental evidence for quantum mechanical narrow channel effect in ultra-narrow MOSFET's Reviewed

    H Majima, H Ishikuro, T Hiramoto

    IEEE ELECTRON DEVICE LETTERS   21 ( 8 )   396 - 398   2000.8

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Random telegraph signals and low-frequency noise in n-metal-oxide-semiconductor field-effect transistors with ultranarrow channels Reviewed

    HM Bu, Y Shi, XL Yuan, J Wu, SL Gu, YD Zheng, H Majima, H Ishikuro, T Hiramoto

    APPLIED PHYSICS LETTERS   76 ( 22 )   3259 - 3261   2000.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Optimum conditions of body effect factor and substrate bias in variable threshold voltage MOSFETs Reviewed

    H Koura, M Takamiya, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   39 ( 4B )   2312 - 2317   2000.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Suppression of stand-by tunnel current in ultra-thin gate oxide MOSFETs by dual oxide thickness-multiple threshold voltage CMOS (DOT-MTCMOS) Reviewed

    T Inukai, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   39 ( 4B )   2287 - 2290   2000.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Low power and low voltage MOSFETs with variable threshold voltage controlled by back-bias Reviewed

    T Hiramoto, M Takamiya

    IEICE TRANSACTIONS ON ELECTRONICS   E83C ( 2 )   161 - 169   2000.2

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Control of Coulomb blockade oscillations in silicon single electron transistors using silicon nanocrystal floating gates Reviewed

    N Takahashi, H Ishikuro, T Hiramoto

    APPLIED PHYSICS LETTERS   76 ( 2 )   209 - 211   2000.1

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Effects of interface traps in silicon-quantum-dots-based memory structures Reviewed

    Yuan Xiaoli, Shi Yi, Gu Shulin, Zhu Jianmin, Zheng Youdou, Saito Kenichi, Ishikuro Hiroki, Hiramoto Toshiro

    Physica E: Low-Dimensional Systems and Nanostructures   8 ( 2 )   189 - 193   2000

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Elsevier Sci B.V.  

    DOI: 10.1016/S1386-9477(00)00138-7

    Scopus

    researchmap

  • Characteristics of silicon nano-scale devices Reviewed

    T Hiramoto, H Majima

    2000 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES   179 - 183   2000

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Boosted gate MOS (BGMOS): Device/circuit cooperation scheme to achieve leakage-free giga-scale integration Reviewed

    T Inukai, M Takamiya, K Nose, H Kawaguchi, T Hiramoto, T Sakurai

    PROCEEDINGS OF THE IEEE 2000 CUSTOM INTEGRATED CIRCUITS CONFERENCE   409 - 412   2000

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Threshold voltage fluctuations induced by statistical 'position' and 'number' impurity fluctuations in bulk MOSFETs Reviewed

    Yuri Yasuda, Makoto Takamiya, Toshiro Hiramoto

    Superlattices and Microstructures   28 ( 5-6 )   357 - 361   2000

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1006/spmi.2000.0934

    Scopus

    researchmap

  • Characteristic distributions of narrow channel metal-oxide-semiconductor field-effect transistor memories with silicon nanocrystal floating gates Reviewed

    E Nagata, N Takahashi, Y Yasuda, T Inukai, H Ishikuro, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   38 ( 12B )   7230 - 7232   1999.12

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Characteristics of narrow channel MOSFET memory based on silicon nanocrystals Reviewed

    Y Shi, K Saito, H Ishikuro, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   38 ( 4B )   2453 - 2456   1999.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • High-performance accumulated back-interface dynamic threshold SOI MOSFET (AB-DTMOS) with large body effect at low supply voltage Reviewed

    M Takamiya, T Saraya, TN Duyet, Y Yasuda, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   38 ( 4B )   2483 - 2486   1999.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Measurement of energetic and lateral distribution of interface state density in fully-depleted silicon on insulator metal-oxide-semiconductor field-effect transistors Reviewed

    TN Duyet, H Ishikuro, Y Shi, M Takamiya, T Saraya, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   38 ( 4B )   2496 - 2500   1999.4

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • On the origin of tunneling barriers in silicon single electron and single hole transistors Reviewed

    H Ishikuro, T Hiramoto

    APPLIED PHYSICS LETTERS   74 ( 8 )   1126 - 1128   1999.2

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Fabrication of nano-scale point contact metal-oxide-semiconductor field-effect-transistors using micrometer-scale design rule Reviewed

    H Ishikuro, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   38 ( 1B )   396 - 398   1999.1

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Effects of interface traps on charge retention characteristics in silicon-quantum-dot-based metal-oxide-semiconductor diodes Reviewed

    Y Shi, K Saito, H Ishikuro, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   38 ( 1B )   425 - 428   1999.1

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Characteristics distribution of narrow channel MOSFET memories with silicon nano-crystal floating gates Reviewed

    E. Nagata, N. Takahashi, H. Ishikuro, T. Hiramoto

    1999 International Microprocesses and Nanotechnology Conference   86 - 87   1999

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/IMNC.1999.797489

    Scopus

    researchmap

  • Highly integrated single electron devices and giga-bit lithography Reviewed

    T. Hiramoto, H. Ishikuro, H. Majima

    Journal of Photopolymer Science and Technology   12 ( 3 )   417 - 422   1999

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Tokai University  

    DOI: 10.2494/photopolymer.12.417

    Scopus

    researchmap

  • Coulomb blockade in VLSI-compatible multiple-dot and single-dot MOSFETs Reviewed

    Toshiro Hiramoto, Hiroki Ishikuro

    International Journal of Electronics   86 ( 5 )   591 - 603   1999

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1080/002072199133274

    Scopus

    researchmap

  • Directional current switch using silicon single electron transistors controlled by charge injection into silicon nano-crystal floating dots

    Nobuyoshi Takahashi, Hiroki Ishikuro, Toshiro Hiramoto

    Technical Digest - International Electron Devices Meeting   371 - 374   1999

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    Scopus

    researchmap

  • Quantum energy and charging energy in point contact MOSFETs acting as single electron transistors

    Toshiro Hiramoto, Hiroki Ishikuro

    Superlattices and Microstructures   25 ( 1-2 )   263 - 267   1999

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Academic Press  

    DOI: 10.1006/spmi.1998.0645

    Scopus

    researchmap

  • Deep sub-0.1-mu m MOSFETs with very thin SOI layer for ultralow-power applications Reviewed

    M Takamiya, Y Yasuda, T Hiramoto

    ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS   81 ( 11 )   18 - 25   1998.11

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Effects of traps on charge storage characteristics in metal-oxide-semiconductor memory structures based on silicon nanocrystals Reviewed

    Y Shi, K Saito, H Ishikuro, T Hiramoto

    JOURNAL OF APPLIED PHYSICS   84 ( 4 )   2358 - 2360   1998.8

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Suppression of Geometric Component of Charge Pumping Current in Thin Film Silicon on Insulator Metal-Oxide-Semiconductor Field-Effect Transistors

    Duyet Tran, Ishikuro Hiroki, Takamiya Makoto, Saraya Takuya, Hiramoto Toshiro

    Jpn J Appl Phys   37 ( 7 )   L855 - L858   1998.7

     More details

    Language:English   Publisher:The Japan Society of Applied Physics  

    A new reverse pulse method is proposed for precise measurement of charge pumping current in silicon on insulator metal-oxide-semiconductor field-effect transistors (SOI MOSFETs), where the reverse pulse voltage is applied to the body only at the gate voltage rise time. The majority carries of the high resistive body region can be completely removed by applying the reverse pulse to the body. Therefore, the undesirable, geometry-dependent component which causes imprecise measurement of the interface trap density on SOI MOSFETs is suppressed. This method also suppresses the reduction of effective channel length which takes place when using a DC reverse bias.It is demonstrated that the accurate measurements of the interface density on SOI MOSFETs are possible.

    DOI: 10.1143/JJAP.37.L855

    CiNii Books

    researchmap

    Other Link: https://jlc.jst.go.jp/DN/JALC/00054588646?from=CiNii

  • Fabrication of gate-all-around MOSFET by silicon anisotropic etching technique Reviewed

    T Mukaiyama, K Saito, H Ishikuro, M Takamiya, T Saraya, T Hiramoto

    SOLID-STATE ELECTRONICS   42 ( 7-8 )   1623 - 1626   1998.7

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Hopping transport in multiple-dot silicon single electron MOSFET Reviewed

    H Ishikuro, T Hiramoto

    SOLID-STATE ELECTRONICS   42 ( 7-8 )   1425 - 1428   1998.7

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • New measurement technique for sub-bandgap impact ionization current by transient characteristics of partially depleted SOI MOSFETs Reviewed

    T Saraya, M Takamiya, TN Duyet, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   37 ( 3B )   1271 - 1273   1998.3

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Effects of body reverse pulse bias on geometric component of charge pumping current in FD SOI MOSFETs

    Tran Ngoc Duyet, Hiroki Ishikuro, Makoto Takamiya, Takuya Saraya, Toshiro Hiramoto

    IEEE International SOI Conference   79 - 80   1998

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    Scopus

    researchmap

  • Influence of quantum confinement effects on single electron and single hole transistors

    Hiroki Ishikuro, Toshiro Hiramoto

    Technical Digest - International Electron Devices Meeting   119 - 122   1998

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    Scopus

    researchmap

  • High performance electrically induced body dynamic threshold SOI MOSFET (EIB-DTMOS) with large body effect and low threshold voltage Reviewed

    M Takamiya, T Hiramoto

    INTERNATIONAL ELECTRON DEVICES MEETING 1998 - TECHNICAL DIGEST   423 - 426   1998

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    Web of Science

    researchmap

  • Quantum mechanical effects in the silicon quantum dot in a single-electron transistor Reviewed

    H Ishikuro, T Hiramoto

    APPLIED PHYSICS LETTERS   71 ( 25 )   3691 - 3693   1997.12

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Room temperature Coulomb blockade and low temperature hopping transport in a multiple-dot-channel metal-oxide-semiconductor field-effect-transistor Reviewed

    T Hiramoto, H Ishikuro, T Fujii, G Hashiguchi, T Ikoma

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   36 ( 6B )   4139 - 4142   1997.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Contactless actuation of giant magnetostriction thin film alloy bimorphs for two-dimensional scanning application Reviewed

    E. Orsier, A. Gamier, T. Hiramoto, H. Fujita, J. Betz, K. Mackay, J. C. Peuzin, D. Givord

    Proceedings of SPIE - The International Society for Optical Engineering   3224   98 - 108   1997

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1117/12.284505

    Scopus

    researchmap

  • Energy spectrum of the quantum-dot in a Si single-electron device

    Hiroki Ishikuro, Toshiro Hiramoto

    Annual Device Research Conference Digest   84 - 85   1997

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    Scopus

    researchmap

  • Fabrication of Si nanostructures for single electron device applications by anisotropic etching Reviewed

    T Hiramoto, H Ishikuro, K Saito, T Fujii, T Saraya, G Hashiguchi, T Ikoma

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   35 ( 12B )   6664 - 6667   1996.12

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Coulomb blockade oscillations at room temperature in a Si quantum wire metal-oxide-semiconductor field-effect transistor fabricated by anisotropic etching on a silicon-on-insulator substrate Reviewed

    H Ishikuro, T Fujii, T Saraya, G Hashiguchi, T Hiramoto, T Ikoma

    APPLIED PHYSICS LETTERS   68 ( 25 )   3585 - 3587   1996.6

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Extremely large amplitude random telegraph signals in a very narrow split-gate MOSFET at low temperatures Reviewed

    H Ishikuro, T Saraya, T Hiramoto, T Ikoma

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   35 ( 2B )   858 - 860   1996.2

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Characterization of precisely width-controlled Si quantum wires fabricated on SOI substrates Reviewed

    T. Hiramoto, H. Ishikuro, T. Fujii, T. Saraya, G. Hashiguchi, T. Ikoma

    Physica B: Condensed Matter   227 ( 1-4 )   95 - 97   1996

     More details

    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Elsevier  

    DOI: 10.1016/0921-4526(96)00363-8

    Scopus

    researchmap

  • A 1.5-NS CYCLE-TIME 18-KB PSEUDO-DUAL-PORT RAM WITH 9K LOGIC GATES Reviewed

    M IWABUCHI, M USAMI, M KASHIYAMA, T OOMORI, S MURATA, T HIRAMOTO, T HASHIMOTO, Y NAKAJIMA

    IEICE TRANSACTIONS ON ELECTRONICS   E77C ( 5 )   749 - 755   1994.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • A 1.5-ns Cycle-Time 18-kb Pseudo-Dual-Port RAM with 9K Logic Gates Reviewed

    Masato Iwabuchi, Masami Usami, Takashi Oomori, Shigeharu Murata, Toshiro Hiramoto, Masamori Kashiyama, Yasuhiro Nakajima

    IEEE Journal of Solid-State Circuits   29 ( 4 )   419 - 425   1994

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/4.280690

    Scopus

    researchmap

  • A 1.5-ns 256-kb BiCMOS SRAM with 60-ps 11-K Logic Gates Reviewed

    Hiroaki Nambu, Tsuyoshi Fujiwara, Akio Anzai, Masayuki Ohayashi, Toshiro Hiramoto, Tadanori Kokubu, Sohei Ohmori, Tetsuya Muraya, Atsuyuki Kishimoto, Makoto Yoshida, Kunihiko Watanabe, Akihisa Uchida, Masanori Odaka, Kunihiko Yamaguchi, Takahide Ikeda

    IEEE Journal of Solid-State Circuits   29 ( 11 )   1344 - 1352   1994

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/4.328635

    Scopus

    researchmap

  • 1.5ns cycle-time 18kb pseudo-dual-port RAM

    Masami Usami, Masato Iwabuchi, Masamori Kashiyama, Takashi Oomori, Shigeharu Murata, Toshiro Hiramoto, Takashi Hashimoto, Yasuhiro Nakajima

    1993 Symposium on VLSI Circuits Digest of Technical Papers   109 - 110   1993

     More details

    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Publ by IEEE  

    Scopus

    researchmap

  • A 1.5-ns Access Time, 78-μm&lt;sup&gt;2&lt;/sup&gt; Memory-Cell Size, 64-kb ECL-CMOS SRAM Reviewed

    Kunihiko Yamaguchi, Hiroaki Nambu, Kazuo Kanetani, Youji Idei, Noriyuki Homma, Toshiro Hiramoto, Nobuo Tamba, Kunihiko Watanabe, Masanori Odaka, Takahide Ikeda, Kenichi Ohhata, Yoshiaki Sakurai

    IEEE Journal of Solid-State Circuits   27 ( 2 )   167 - 174   1992

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/4.127339

    Scopus

    researchmap

  • PHASE COHERENCE LENGTH OF ELECTRON WAVES IN NARROW ALGAAS GAAS QUANTUM WIRES FABRICATED BY FOCUSED ION-BEAM IMPLANTATION Reviewed

    T HIRAMOTO, K HIRAKAWA, Y IYE, T IKOMA

    APPLIED PHYSICS LETTERS   54 ( 21 )   2103 - 2105   1989.5

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Non-equilibrium effects on quasi-one-dimensional weak and strong localizations Reviewed

    Toshiaki Ikoma, Kazuhiko Hirakawa, Toshiro Hiramoto, Takahide Odagiri

    Solid State Electronics   32 ( 12 )   1793 - 1799   1989

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/0038-1101(89)90314-6

    Scopus

    researchmap

  • ONE-DIMENSIONAL GAAS WIRES FABRICATED BY FOCUSED ION-BEAM IMPLANTATION Reviewed

    T HIRAMOTO, K HIRAKAWA, Y IYE, T IKOMA

    APPLIED PHYSICS LETTERS   51 ( 20 )   1620 - 1622   1987.11

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • Evidence for creation of gallium antisite defect in surface region of heat-treated gaas Reviewed

    Toshiro Hiramoto, Yasunori Mochizuki, Toshiaki Ikoma

    Japanese Journal of Applied Physics   25 ( 10 A )   L830 - L832   1986

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.25.L830

    Scopus

    researchmap

  • RAPID THERMAL ANNEALING OF SI+ IMPLANTED GAAS IN THE PRESENCE OF ARSENIC PRESSURE BY GAAS POWDER Reviewed

    T HIRAMOTO, T SAITO, T IKOMA

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS   24 ( 3 )   L193 - L195   1985

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    Web of Science

    researchmap

  • The role of gallium antisite defect in activation and type-conversion in si implanted GaAs Reviewed

    Toshiro Hiramoto, Yasunori Mochizuki, Toshio Saito, Toshiaki Ikoma

    Japanese Journal of Applied Physics   24 ( 12 )   L921 - L924   1985

     More details

    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1143/JJAP.24.L921

    Scopus

    researchmap

▼display all

MISC

  • SOIウェハのハイブリッド接合を用いた画素並列3層積層CMOSイメージセンサ—Pixel-Parallel 3-Layer Stacked CMOS Image Sensors Using Hybrid Bonding of SOI Wafers

    後藤 正英, 本田 悠葵, 難波 正和, 井口 義則, 更屋 拓哉, 小林 正治, 日暮 栄治, 年吉 洋, 平本 俊郎

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   39   5p   2022.11

     More details

    Language:Japanese   Publisher:Institute of Electrical Engineers of Japan  

    CiNii Research

    researchmap

  • SOIウェハのハイブリッド接合を用いた3層積層画素並列CMOSイメージセンサ—3-Layer Stacked Pixel-Parallel CMOS Image Sensors Using Hybrid Bonding of SOI Wafers—情報センシング

    後藤 正英, 本田 悠葵, 難波 正和, 井口 義則, 更屋 拓哉, 小林 正治, 日暮 栄治, 年吉 洋, 平本 俊郎

    映像情報メディア学会技術報告 = ITE technical report   46 ( 14 )   5 - 8   2022.3

     More details

    Language:Japanese   Publisher:映像情報メディア学会  

    CiNii Books

    CiNii Research

    researchmap

  • 両面リングラフィ技術を用いた3.3kV両面ゲートIGBT (BC-IGBT)—3.3kV Back-Gate-Controlled IGBT (BC-IGBT) Using Manufacturable Double-Side Process Technology—電子デバイス/半導体電力変換合同研究会・パワーデバイス・パワーエレクトロニクスとその実装技術

    更屋 拓哉, 伊藤 一夫, 高倉 俊彦, 福井 宗利, 鈴木 慎一, 竹内 潔, 附田 正則, 佐藤 克己, 末代 知子, 角嶋 邦之, 星井 拓也, 筒井 一生, 岩井 洋, 小椋 厚志, 齋藤 渉, 西澤 伸一, 大村 一郎, 大橋 弘通, 平本 俊郎

    電気学会研究会資料. SPC = The papers of technical meeting on semiconductor power converter, IEE Japan / 半導体電力変換研究会 [編]   2021 ( 144-148 )   7 - 12   2021.10

     More details

    Language:Japanese   Publisher:東京 : 電気学会  

    CiNii Books

    CiNii Research

    researchmap

    Other Link: https://ndlsearch.ndl.go.jp/books/R000000004-I031797807

  • Three-Dimensional Device Simulation of Si IGBTs-Investigation of physical models and comparisons with measurements-

    執行直之, 渡辺正裕, 角嶋邦之, 星井拓也, 古川和由, 中島昭, 佐藤克己, 末代知子, 更屋拓哉, 高倉俊彦, 伊藤一夫, 福井宗利, 鈴木慎一, 竹内潔, 宗田伊里也, 若林整, 西澤伸一, 筒井一生, 平本俊郎, 大橋弘通, 岩井洋

    電子情報通信学会技術研究報告(Web)   120 ( 239(SDM2020 22-34) )   2020

  • Multi-Layer Stacking Technology for Pixel-Parallel CMOS Image Sensors by Using Room-Temperature Wafer Bonding

    後藤正英, 中谷真規, 本田悠葵, 渡部俊久, 難波正和, 井口義則, 更屋拓哉, 小林正治, 日暮栄治, 年吉洋, 平本俊郎

    映像情報メディア学会冬季大会講演予稿集(CD-ROM)   2020   2020

  • 5Vゲート駆動による3300VスケーリングIGBTの動作実証—3300V Scaled IGBTs Driven by 5V Gate Voltage—電子デバイス 半導体電力変換合同研究会・パワーデバイス・パワーエレクトロニクスとその実装技術

    更屋 拓哉, 伊藤 一夫, 高倉 俊彦, 福井 宗利, 鈴木 慎一, 竹内 潔, 附田 正則, 沼沢 陽一郎, 佐藤 克己, 末代 知子, 齋藤 渉, 角嶋 邦之, 星井 拓也, 古川 和由, 渡辺 正裕, 執行 直之, 若林 整, 筒井 一生, 岩井 洋, 小椋 厚志, 西澤 伸一, 大村 一郎, 大橋 弘通, 平本 俊郎

    電気学会研究会資料. SPC = The papers of technical meeting on semiconductor power converter, IEE Japan / 半導体電力変換研究会 [編]   2019 ( 161-172 )   61 - 65   2019.11

     More details

    Language:Japanese   Publisher:東京 : 電気学会  

    CiNii Books

    CiNii Research

    researchmap

    Other Link: https://ndlsearch.ndl.go.jp/books/R000000004-I030119332

  • Triple-Layered Ring Oscillators and Image Sensors Developed by Direct Bonding of SOI Wafers

    119 ( 284 )   45 - 49   2019.11

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • 招待講演 トレンチゲート型Si-IGBTの3次元精密TCADシミュレーション—Three-dimensional accurate TCAD simulation of trench-gate Si-IGBTs—シリコン材料・デバイス

    渡辺 正裕, 執行 直之, 星井 拓也, 古川 和由, 角嶋 邦之, 佐藤 克己, 末代 知子, 更屋 拓哉, 高倉 俊彦, 伊藤 一夫, 福井 宗利, 鈴木 慎一, 竹内 潔, 宗田 伊里也, 若林 整, 中島 昭, 西澤 伸一, 筒井 一生, 平本 俊郎, 大橋 弘通, 岩井 洋

    電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   119 ( 273 )   45 - 48   2019.11

     More details

    Language:Japanese   Publisher:東京 : 電子情報通信学会  

    CiNii Books

    CiNii Research

    researchmap

    Other Link: https://ndlsearch.ndl.go.jp/books/R000000004-I030128987

  • 3次元構造撮像デバイスの多層積層化に向けたウェハ接合による多層積層技術

    ゴトウ マサヒデ, ワタベ トシヒサ, ナンバ マサカズ, イグチ ヨシノリ, サラヤ タクヤ, コバヤシ マサハル, トシヨシ ヒロシ, ヒラモト トシロウ, ヒグラシ エイジ

    36   4p   2019.11

     More details

    Language:Japanese   Publisher:Institute of Electrical Engineers of Japan  

    CiNii Research

    researchmap

  • Triple-Stacked Au/SiO2 Hybrid Bonding With 6-mu m-Pitch Au Electrodes on Silicon-on-Insulator Substrates Using O-2 Plasma Surface Activation for 3-D Integration

    Yuki Honda, Masahide Goto, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY   9 ( 9 )   1904 - 1911   2019.9

     More details

  • Digital Pixel Image Sensors with Linear and Wide-Dynamic-Range Output Developed by Pixel-Wise 3-D Integration

    後藤正英, 本田悠葵, 渡部俊久, 萩原啓, 難波正和, 井口義則, 更屋拓哉, 小林正治, 日暮栄治, 年吉洋, 平本俊郎

    映像情報メディア学会技術報告   43 ( 31 )   17 - 20   2019.9

     More details

  • 依頼講演 5Vゲート駆動による3300VスケーリングIGBTのスイッチング動作—3300V Scaled IGBT Switched by 5V Gate Drive—情報センシング

    平本 俊郎, 更屋 拓哉, 伊藤 一夫, 高倉 俊彦, 福井 宗利, 鈴木 慎一, 竹内 潔, 附田 正則, 沼沢 陽一郎, 佐藤 克己, 末代 知子, 齋藤 渉, 角嶋 邦之, 星井 拓也, 古川 和由, 渡辺 正裕, 執行 直之, 若林 整, 筒井 一生, 岩井 洋, 小椋 厚志, 西澤 伸一, 大村 一郎, 大橋 弘通

    映像情報メディア学会技術報告 = ITE technical report   43 ( 25 )   31 - 34   2019.8

     More details

    Language:Japanese   Publisher:東京 : 映像情報メディア学会  

    CiNii Books

    CiNii Research

    researchmap

    Other Link: https://ndlsearch.ndl.go.jp/books/R000000004-I029947160

  • 依頼講演 5Vゲート駆動による3300VスケーリングIGBTのスイッチング動作—3300V Scaled IGBT Switched by 5V Gate Drive—シリコン材料・デバイス

    平本 俊郎, 更屋 拓哉, 伊藤 一夫, 高倉 俊彦, 福井 宗利, 鈴木 慎一, 竹内 潔, 附田 正則, 沼沢 陽一郎, 佐藤 克己, 末代 知子, 齋藤 渉, 角嶋 邦之, 星井 拓也, 古川 和由, 渡辺 正裕, 執行 直之, 若林 整, 筒井 一生, 岩井 洋, 小椋 厚志, 西澤 伸一, 大村 一郎, 大橋 弘通

    電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   119 ( 161 )   31 - 34   2019.8

     More details

    Language:Japanese   Publisher:東京 : 電子情報通信学会  

    CiNii Books

    CiNii Research

    researchmap

    Other Link: https://ndlsearch.ndl.go.jp/books/R000000004-I029947188

  • Evaluations of minority carrier lifetime in floating zone Si affected by Si insulated gate bipolar transistor processes

    Kobayashi, Hiroto, Yokogawa, Ryo, Kinoshita, Kosuke, Numasawa, Yohichiroh, Ogura, Atsushi, Nishizawa, Shin-ichi, Saraya, Takuya, Ito, Kazuo, Takakura, Toshihiko, Suzuki, Shin-ichi, Fukui, Munetoshi, Takeuchi, Kiyoshi, Hiramoto, Toshiro

    JAPANESE JOURNAL OF APPLIED PHYSICS   58   2019.4

     More details

  • Reduced variability of drain-induced barrier lowering and subthreshold slope at high temperature in bulk and silicon-on-thin-buried-oxide (SOTB) MOSFETs

    Gao, Shuang, Mizutani, Tomoko, Takeuchi, Kiyoshi, Kobayashi, Masaharu, Hiramoto, Toshiro

    JAPANESE JOURNAL OF APPLIED PHYSICS   58   2019.4

     More details

  • Quarter Video Graphics Array Digital Pixel Image Sensing With a Linear and Wide-Dynamic-Range Response by Using Pixel-Wise 3-D Integration

    Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    IEEE TRANSACTIONS ON ELECTRON DEVICES   66 ( 2 )   969 - 975   2019.2

     More details

  • 招待講演 5Vゲート駆動1200V級スケーリングIGBTの動作実証とスイッチング損失の低減—シリコン材料・デバイス

    更屋 拓哉, 伊藤 一夫, 高倉 俊彦, 福井 宗利, 鈴木 慎一, 竹内 潔, 附田 正則, 沼沢 陽一郎, 佐藤 克己, 末代 知子, 齋藤 渉, 角嶋 邦之, 星井 拓也, 古川 和由, 渡辺 正裕, 執行 直之, 筒井 一生, 岩井 洋, 小椋 厚志, 西澤 伸一, 大村 一郎, 大橋 弘通, 平本 俊郎

    電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   118 ( 429 )   39 - 44   2019.1

     More details

    Language:Japanese   Publisher:東京 : 電子情報通信学会  

    CiNii Books

    CiNii Research

    researchmap

    Other Link: https://ndlsearch.ndl.go.jp/books/R000000004-I029501951

  • Triple-Stacked Wafer-to-Wafer Hybrid Bonding for 3D Structured Image Sensors

    Yuki Honda, Masahide Goto, Toshihisa Watabe, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    PROCEEDINGS OF 2019 6TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D)   45 - 45   2019

     More details

    Language:English  

    Web of Science

    researchmap

  • 撮像デバイスの高集積化に向けた裏面電極素子の試作

    中谷真規, 本田悠葵, 後藤正英, 渡部俊久, 難波正和, 井口義則, 更屋拓哉, 小林正治, 日暮栄治, 年吉洋, 平本俊郎

    映像情報メディア学会冬季大会講演予稿集(CD-ROM)   2019   2019

  • 3次元構造撮像素子の高集積化に向けた直接接合による多層積層技術

    本田悠葵, 後藤正英, 渡部俊久, 難波正和, 井口義則, 更屋拓哉, 小林正治, 日暮栄治, 年吉洋, 平本俊郎

    映像情報メディア学会年次大会講演予稿集(CD-ROM)   2019   2019

  • A Feasibility Study on Ferroelectric Shadow SRAMs Based on Variability-Aware Design Optimization

    Takeuchi, Kiyoshi, Kobayashi, Masaharu, Hiramoto, Toshiro

    IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY   7 ( 1 )   1284 - 1292   2019

     More details

  • Impact of three-dimensional current flow on accurate TCAD simulation for trench-gate IGBTs

    Watanabe, Masahiro, Shigyo, Naoyuki, Hoshii, Takuya, Furukawa, Kazuyoshi, Kakushima, Kuniyuki, Satoh, Katsumi, Matsudai, Tomoko, Saraya, Takuya, Takakura, Toshihiro, Itou, Kazuo, Fukui, Munetoshi, Suzuki, Shinichi, Takeuchi, Kiyoshi, Muneta, Iriya, Wakabayashi, Hitoshi, Nakajima, Akira, Nishizawa, Shin-ichi, Tsutsui, Kazuo, Hiramoto, Toshiro, Ohashi, Hiromichi, Iwai, Hiroshi

    2019 31ST INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND ICS (ISPSD)   311 - 314   2019

     More details

    Language:English  

    Web of Science

    researchmap

  • On the Physical Mechanism of Transient Negative Capacitance Effect in Deep Subthreshold Region

    Jin, Chengji, Saraya, Takuya, Hiramoto, Toshiro, Kobayashi, Masaharu

    IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY   7 ( 1 )   368 - 374   2019

     More details

  • Ferroelectric HfO2 Tunnel Junction Memory With High TER and Multi-Level Operation Featuring Metal Replacement Process

    Kobayashi, Masaharu, Tagawa, Yusaku, Mo, Fei, Saraya, Takuya, Hiramoto, Toshiro

    IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY   7 ( 1 )   134 - 139   2019

     More details

  • Application of Extreme Value Theory to Statistical Analyses of Worst Case SRAM Data Retention Voltage

    Mizutani, Tomoko, Takeuchi, Kiyoshi, Saraya, Takuya, Kobayashi, Masaharu, Hiramoto, Toshiro

    2019 SILICON NANOELECTRONICS WORKSHOP (SNW)   25 - 26   2019

     More details

    Language:English  

    Web of Science

    researchmap

  • 3300V Scaled IGBTs Driven by 5V Gate Voltage

    Saraya, Takuya, Itou, Kazuo, Takakura, Toshihiko, Fukui, Munetoshi, Suzuki, Shinichi, Takeuchi, Kiyoshi, Tsukuda, Masanori, Numasawa, Yohichiroh, Satoh, Katsumi, Matsudai, Tomoko, Saito, Wataru, Kakushima, Kuniyuki, Hoshii, Takuya, Furukawa, Kazuyoshi, Watanabe, Masahiro, Shigyo, Naoyuki, Wakabayashi, Hitoshi, Tsutsui, Kazuo, Iwai, Hiroshi, Ogura, Atsushi, Nishizawa, Shin-ichi, Omura, Ichiro, Ohashi, Hiromichi, Hiramoto, Toshiro

    2019 31ST INTERNATIONAL SYMPOSIUM ON POWER SEMICONDUCTOR DEVICES AND ICS (ISPSD)   43 - 46   2019

     More details

    Language:English  

    Web of Science

    researchmap

  • Three-dimensional accurate TCAD simulation of trench-gate Si-IGBTs

    渡辺正裕, 執行直之, 星井拓也, 古川和由, 角嶋邦之, 佐藤克己, 末代知子, 更屋拓哉, 高倉俊彦, 伊藤一夫, 福井宗利, 鈴木慎一, 竹内潔, 宗田伊里也, 若林整, 中島昭, 西澤伸一, 筒井一生, 平本俊郎, 大橋弘通, 岩井洋

    電子情報通信学会技術研究報告   119 ( 273(SDM2019 68-79) )   2019

  • Role of gate current and polarization switching in sub-60 mV/decade steep subthreshold slope in metal-ferroelectric HfZrO2-metal-insulator-Si FET

    Jang, Kyungmin, Kobayashi, Masaharu, Hiramoto, Toshiro

    JAPANESE JOURNAL OF APPLIED PHYSICS   57 ( 11 )   2018.11

     More details

  • Lowering data retention voltage in static random access memory array by post fabrication self-improvement of cell stability by multiple stress application

    Mizutani, Tomoko, Takeuchi, Kiyoshi, Saraya, Takuya, Kobayashi, Masaharu, Hiramoto, Toshiro

    JAPANESE JOURNAL OF APPLIED PHYSICS   57 ( 4 )   2018.4

     More details

  • Optimizing MOS-gated thyristor using voltage-based equivalent circuit model for designing steep-subthreshold-slope PN-body-tied silicon-on-insulator FET

    Ueda, Daiki, Takeuchi, Kiyoshi, Kobayashi, Masaharu, Hiramoto, Toshiro

    JAPANESE JOURNAL OF APPLIED PHYSICS   57 ( 4 )   2018.4

     More details

  • On gate stack scalability of double-gate negative-capacitance FET with ferroelectric HfO2 for energy efficient sub-0.2V operation

    Jang, Kyungmin, Saraya, Takuya, Kobayashi, Masaharu, Hiramoto, Toshiro

    JAPANESE JOURNAL OF APPLIED PHYSICS   57 ( 2 )   2018.2

     More details

  • 少数キャリアライフタイムによる半導体プロセスの評価手法の提案

    角嶋邦之, 星井拓也, 渡辺正裕, 執行直之, 古川和由, 更屋拓哉, 高倉俊彦, 伊藤一夫, 福井宗利, 鈴木慎一, 竹内潔, 宗田伊理也, 若林整, 沼沢陽一郎, 小椋厚志, 西澤伸一, 筒井一生, 平本俊郎, 大橋弘通, 岩井洋

    電気学会電子・情報・システム部門大会講演論文集(CD-ROM)   2018   2018

  • Experimental Demonstration of a Nonvolatile SRAM With Ferroelectric HfO2 Capacitor for Normally Off Application

    Kobayashi, Masaharu, Ueyama, Nozomu, Jang, Kyungmin, Hiramoto, Toshiro

    IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY   6 ( 1 )   280 - 285   2018

     More details

  • Scalability Study on Ferroelectric-HfO2 Tunnel Junction Memory Based on Non-equilibrium Green Function Method with Self-consistent Potential

    Mo, Fei, Tagawa, Yusaku, Saraya, Takuya, Hiramoto, Toshiro, Kobayashi, Masaharu

    2018 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)   2018

     More details

    Language:English  

    Web of Science

    researchmap

  • Measurement of IGBT trench MOS-gated region characteristics using short turn-around-time MOSFET test structures

    Takeuchi, Kiyoshi, Fukui, Munetoshi, Saraya, Takuya, Itou, Kazuo, Suzuki, Shinichi, Takakura, Toshihiko, Hiramoto, Toshiro

    PROCEEDINGS OF THE 2018 IEEE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES (ICMTS)   157 - 160   2018

     More details

    Language:English  

    Web of Science

    researchmap

  • Quarter Video Graphics Array Full-Digital Image Sensing with Wide Dynamic Range and Linear Output Using Pixel-Wise 3D Integration

    Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    2018 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS (ISCAS)   2018

     More details

  • Improving Data Retention Voltage in SRAM by Post-Fabrication Multiple Stress Application

    Hiramoto, Toshiro, Mizutani, Tomoko, Takeuchi, Kiyoshi, Saraya, Takuya, Kobayashi, Masaharu

    2018 14TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT)   870 - 872   2018

     More details

    Language:English  

    Web of Science

    researchmap

  • Experimental Observation and Simulation Model for Transient Characteristics of Negative-Capacitance in Ferroelectric HfZrO2 Capacitor

    Jang, Kyungmin, Ueyama, Nozomu, Kobayashi, Masaharu, Hiramoto, Toshiro

    IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY   6 ( 1 )   346 - 353   2018

     More details

  • Experimental Study on the Role of Polarization Switching in Subthreshold Characteristics of HfO2-based Ferroelectric and Anti-ferroelectric FET

    Jin, Chengji, Jang, Kyungmin, Saraya, Takuya, Hiramoto, Toshiro, Kobayashi, Masaharu

    2018 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)   2018

     More details

    Language:English  

    Web of Science

    researchmap

  • Pixel-Parallel 3D Integrated CMOS Image Sensors Developed by Direct Bonding of SOI Layers for Next-Generation Video Systems

    Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    2018 IEEE SOI-3D-SUBTHRESHOLD MICROELECTRONICS TECHNOLOGY UNIFIED CONFERENCE (S3S)   2018

     More details

    Language:English  

    Web of Science

    researchmap

  • Experimental Verification of a 3D Scaling Principle for Low VCEsat IGBTs

    筒井一生, 角嶋邦之, 星井拓也, 中島昭, 西澤伸一, 若林整, 宗田伊理也, 佐藤克己, 末代知子, 齋藤渉, 更屋拓哉, 伊藤一夫, 福井宗利, 鈴木慎一, 小林正治, 高倉俊彦, 平本俊郎, 小椋厚志, 沼沢陽一郎, 大村一郎, 大橋弘通, 岩井洋

    電気学会電子デバイス研究会資料   EDD-17 ( 74-86 )   1‐6   2017.11

     More details

    Language:Japanese  

    J-GLOBAL

    researchmap

  • I-on/I-off ratio enhancement and scalability of gate-all-around nanowire negative-capacitance FET with ferroelectric HfO2

    Kyungmin Jang, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    SOLID-STATE ELECTRONICS   136   60 - 67   2017.10

     More details

  • Measurement of Static Random Access Memory Power-Up State Using an Addressable Cell Array Test Structure

    Kiyoshi Takeuchi, Tomoko Mizutani, Hirofumi Shinohara, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING   30 ( 3 )   209 - 215   2017.8

     More details

  • Correlation between static random access memory power-up state and transistor variation

    Takeuchi, Kiyoshi, Mizutani, Tomoko, Saraya, Takuya, Shinohara, Hirofumi, Kobayashi, Masaharu, Hiramoto, Toshiro

    JAPANESE JOURNAL OF APPLIED PHYSICS   56 ( 4 )   2017.4

     More details

  • Parallel programmable nonvolatile memory using ordinary static random access memory cells

    Tomoko Mizutani, Kiyoshi Takeuchi, Takuya Saraya, Hirofumi Shinohara, Masaharu Kobayashi, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   56 ( 4 )   2017.4

     More details

  • Negative Capacitance for Boosting Tunnel FET performance

    Masaharu Kobayashi, Kyungmin Jang, Nozomu Ueyama, Toshiro Hiramoto

    IEEE TRANSACTIONS ON NANOTECHNOLOGY   16 ( 2 )   253 - 258   2017.3

     More details

  • 招待講演 Experimental Study on Polarization-Limited Operation Speed of Negative Capacitance FET with Ferroelectric HfO₂ (シリコン材料・デバイス)

    小林 正治, 上山 望, 蔣 京珉, 平本 俊郎

    電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   116 ( 448 )   9 - 12   2017.1

     More details

    Language:Japanese   Publisher:電子情報通信学会  

    CiNii Books

    researchmap

  • 招待講演 強誘電体HfO₂を用いた負性容量トランジスタの動作速度に関する実験検討 (シリコン材料・デバイス)

    小林 正治, 上山 望, 蔣 京珉, 平本 俊郎

    電子情報通信学会技術研究報告 = IEICE technical report : 信学技報   116 ( 445 )   51 - 54   2017.1

     More details

    Language:Japanese   Publisher:電子情報通信学会  

    CiNii Books

    researchmap

  • 3次元構造撮像デバイスの画素内A/D変換回路に適用可能なイベントドリブン型雑音除去回路の開発—Development of Event-Driven Noise Reduction Circuits for In-Pixel A/D Converters Integrated in 3-D Integrated CMOS Image Sensors—第9回 集積化MEMSシンポジウム

    後藤 正英, 本田 悠葵, 渡部 俊久, 萩原 啓, 難波 正和, 井口 義則, 更屋 拓哉, 小林 正治, 日暮 栄治, 年吉 洋, 平本 俊郎

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   34   4p   2017

     More details

    Language:Japanese   Publisher:Institute of Electrical Engineers of Japan  

    CiNii Research

    researchmap

  • Carrier-Separated Equivalent Circuit Modeling for Steep Subthreshold Slope PN-Body Tied SOI FET

    Ueda, Daiki, Takeuchi, Kiyoshi, Kobayashi, Masaharu, Hiramoto, Toshiro

    2017 SILICON NANOELECTRONICS WORKSHOP (SNW)   13 - 14   2017

     More details

    Language:English  

    Web of Science

    researchmap

  • Three-Layered Stacking Process By Au/SiO2 Hybrid Bonding for 3D Structured Image Sensors

    Yuki Honda, Masahide Goto, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    SEMICONDUCTOR PROCESS INTEGRATION 10   80 ( 4 )   227 - 231   2017

     More details

  • Characterictics Variability of Gate-All-Around Polycrystalline Silicon Nanowire Transistors with Width 10nm Scale

    Jang, Ki-Hyun, Saraya, Takuya, Kobayashi, Masaharu, Sawamoto, Naomi, Gura, Atsushi, Hiramoto, Toshiro

    2017 SILICON NANOELECTRONICS WORKSHOP (SNW)   33 - 34   2017

     More details

    Language:English  

    Web of Science

    researchmap

  • Investigations on Dynamic Characteristics of Ferroelectric HfO2 Based on Multi-Domain Interaction Model

    Jang, Kyungmin, Ueyama, Nozomu, Kobayashi, Masaharu, Hiramoto, Toshiro

    2017 SILICON NANOELECTRONICS WORKSHOP (SNW)   15 - 16   2017

     More details

    Language:English  

    Web of Science

    researchmap

  • Investigations on Dynamic Characteristics of Ferroelectric HfO2 Based on Multi-Domain Interaction Model

    Jang, Kyungmin, Ueyama, Nozomu, Kobayashi, Masaharu, Hiramoto, Toshiro

    2017 SILICON NANOELECTRONICS WORKSHOP (SNW)   17 - 18   2017

     More details

    Language:English  

    Web of Science

    researchmap

  • Parallel Nonvolatile Programming of Power-up States of SRAM Cells

    Hiramoto, Toshiro, Mizutani, Tomoko, Takeuchi, Kiyoshi, Kobayashi, Masaharu

    2017 IEEE 12TH INTERNATIONAL CONFERENCE ON ASIC (ASICON)   418 - 421   2017

     More details

    Language:English  

    Web of Science

    researchmap

  • 3-Layered Au/SiO2 Hybrid Bonding with 6-mu m-Pitch Au Electrodes for 3D Structured Image Sensors

    Yuki Honda, Masahide Goto, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    2017 5TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D)   7 - 7   2017

     More details

    Language:English  

    Web of Science

    researchmap

  • 3次元構造撮像デバイスの微細・高集積化に向けた直接接合による多層積層技術—Three-Layered Stacking Process by Au/SiO2 Hybrid Bonding for 3D Structured Image Sensors—第9回 集積化MEMSシンポジウム

    本田 悠葵, 後藤 正英, 渡部 俊久, 萩原 啓, 難波 正和, 井口 義則, 更屋 拓哉, 小林 正治, 日暮 栄治, 年吉 洋, 平本 俊郎

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   34   1 - 4   2017

     More details

    Language:Japanese   Publisher:Institute of Electrical Engineers of Japan  

    CiNii Research

    researchmap

  • Development of Three-Dimensional Integrated CMOS Image Sensors with Pixel-Parallel Signal Processors by Using Direct Bonding of SOI Layers

    116 ( 333 )   17 - 21   2016.11

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • Development of Three-Dimensional Integrated CMOS Image Sensors with Pixel-Parallel Signal Processors by Using Direct Bonding of SOI Layers

    116 ( 335 )   17 - 21   2016.11

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • Development of Three-Dimensional Integrated CMOS Image Sensors with Pixel-Parallel Signal Processors by Using Direct Bonding of SOI Layers

    116 ( 334 )   17 - 21   2016.11

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • Statistical Write Stability Characterization in SRAM Cells at Low Supply Voltage

    Hao Qiu, Kiyoshi Takeuchi, Tomoko Mizutani, Yoshiki Yamamoto, Hideki Makiyama, Tomohiro Yamashita, Hidekazu Oda, Shiro Kamohara, Nobuyuki Sugii, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    IEEE TRANSACTIONS ON ELECTRON DEVICES   63 ( 11 )   4302 - 4308   2016.11

     More details

  • 3次元構造撮像デバイスの微細・高集積化に向けた接合電極の微細・狭ピッチ化—Au/SiO₂ Hybrid Bonding with 6-μm-Pitch Au Electrodes for 3D Structured Image Sensors—第8回 集積化MEMSシンポジウム

    本田 悠葵, 萩原 啓, 後藤 正英, 渡部 俊久, 難波 正和, 井口 義則, 更屋 拓哉, 小林 正治, 年吉 洋, 日暮 栄治, 平本 俊郎

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   33   1 - 4   2016.10

     More details

    Language:Japanese   Publisher:Institute of Electrical Engineers of Japan  

    CiNii Research

    researchmap

  • Transistor-level characterization of static random access memory bit failures induced by random telegraph noise

    Tomoko Mizutani, Takuya Saraya, Kiyoshi Takeuchi, Masaharu Kobayashi, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   55 ( 4 )   2016.4

     More details

  • Special Issue: Planar Fully-Depleted SOI technology Foreword

    F. Allibert, T. Hiramoto, B. Y. Nguyen

    SOLID-STATE ELECTRONICS   117   1 - 1   2016.3

     More details

  • On device design for steep-slope negative-capacitance field-effect-transistor operating at sub-0.2V supply voltage with ferroelectric HfO2 thin film

    Masaharu Kobayashi, Toshiro Hiramoto

    AIP ADVANCES   6 ( 2 )   2016.2

     More details

  • In-Pixel A/D Converters with 120-dB Dynamic Range Using Event-Driven Correlated Double Sampling for Stacked SOI Image Sensors

    Masahide Goto, Yuki Honda, Toshihisa Watabe, Kei Hagiwara, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    2016 IEEE SOI-3D-SUBTHRESHOLD MICROELECTRONICS TECHNOLOGY UNIFIED CONFERENCE (S3S)   2016

     More details

    Language:English  

    Web of Science

    researchmap

  • Negative Capacitance as a Performance Booster for Tunnel FET

    Masaharu Kobayashi, Kyungmin Jang, Nozomu Ueyama, Toshiro Hiramoto

    2016 IEEE SILICON NANOELECTRONICS WORKSHOP (SNW)   150 - 151   2016

     More details

    Language:English  

    Web of Science

    researchmap

  • Experimental Study on Polarization-Limited Operation Speed of Negative Capacitance FET with Ferroelectric HfO2

    Masaharu Kobayashi, Nozomu Ueyama, Kyungmin Jang, Toshiro Hiramoto

    2016 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)   2016

     More details

  • Increased Drain-Induced Variability and Within-Device Variability in Extremely Narrow Silicon Nanowire MOSFETs with Width down to 2nm

    Tomoko Mizutani, Kiyoshi Takeuchi, Ryota Suzuki, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    2016 IEEE SILICON NANOELECTRONICS WORKSHOP (SNW)   138 - 139   2016

     More details

    Language:English  

    Web of Science

    researchmap

  • Pixel-Parallel CMOS Image Sensors with 16-bit A/D Converters Developed by 3-D Integration of SOI Layers with Au/SiO2 Hybrid Bonding

    Masahide Goto, Kei Hagiwara, Yuki Honda, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    INTERNATIONAL SYMPOSIUM ON FUNCTIONAL DIVERSIFICATION OF SEMICONDUCTOR ELECTRONICS 3 (MORE-THAN-MOORE 3)   72 ( 3 )   3 - 6   2016

     More details

  • Variability in Extremely Narrow (similar to 2nm) Silicon Nanowire FETs Induced by Quantum Confinement Variation Due to Line Width Roughness

    Hiramoto, Toshiro, Mizutani, Tomoko, Saraya, Takuya, Takeuchi, Kiyoshi, Kobayashi, Masaharu

    2016 13TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT)   272 - 274   2016

     More details

    Language:English  

    Web of Science

    researchmap

  • Au/SiO2 Hybrid Bonding with 6-mu m- Pitch Au Electrodes for 3D Structured Image Sensors

    Yuki Honda, Kei Hagiwara, Masahide Goto, Toshihisa Watabe, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Hiroshi Toshiyoshi, Eiji Higurashi, Toshiro Hiramoto

    SEMICONDUCTOR WAFER BONDING: SCIENCE, TECHNOLOGY AND APPLICATIONS 14   75 ( 9 )   103 - 106   2016

     More details

  • Three-Dimensional Integration Technology of Separate SOI Layers for Photodetectors and Signal Processors of CMOS Image Sensors

    Masahide Goto, Kei Hagiwara, Yuki Honda, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    2016 INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING (ICEP)   70 - 73   2016

     More details

    Language:English  

    Web of Science

    researchmap

  • On Gate Stack Scalability of Double-Gate Negative-Capacitance FET with Ferroelectric HfO2 for Energy-Efficient Sub-0.2V Operation

    Kyungmin Jang, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    2016 IEEE SILICON NANOELECTRONICS WORKSHOP (SNW)   176 - 177   2016

     More details

    Language:English  

    Web of Science

    researchmap

  • Measurement of SRAM Power-Up State for PUF Applications using an Addressable SRAM Cell Array Test Structure

    Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto, Hirofumi Shinohara

    2016 INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES (ICMTS)   130 - 134   2016

     More details

    Language:English  

    Web of Science

    researchmap

  • A New Write Stability Metric Using Extended Write Butterfly Curve for Yield Estimation in SRAM Cells at Low Supply Voltage

    Hao Qiu, Kiyoshi Takeuchi, Tomoko Mizutani, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    2016 INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES (ICMTS)   126 - 129   2016

     More details

    Language:English  

    Web of Science

    researchmap

  • Pixel-Parallel 3-D Integrated CMOS Image Sensors With Pulse Frequency Modulation A/D Converters Developed by Direct Bonding of SOI Layers

    Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    IEEE TRANSACTIONS ON ELECTRON DEVICES   62 ( 11 )   3530 - 3535   2015.11

     More details

  • 画素並列信号処理を行うSOI積層型3次元構造撮像デバイスの試作と評価—Fabrication and Evaluation of Three-Dimensional Integrated CMOS Image Sensors with Pixel-Parallel Signal Processing using Stacked SOI Layers—第7回 集積化MEMSシンポジウム

    後藤 正英, 萩原 啓, 井口 義則, 大竹 浩, 更屋 拓哉, 小林 正治, 日暮 栄治, 年吉 洋, 平本 俊郎

    「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   32   1 - 4   2015.10

     More details

    Language:Japanese   Publisher:Institute of Electrical Engineers of Japan  

    CiNii Research

    researchmap

  • Device Design Guideline for negative capacitance FET (NCFET)

    115 ( 190 )   15 - 18   2015.8

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • Nanoelectronics Research Gaps and Recommendations A Report from the International Planning Working Group on Nanoelectronics (IPWGN)

    Kosmas Galatsis, Paolo Gargini, Toshiro Hiramoto, Dirk Beernaert, Roger DeKeersmaecker, Joachim Pelka, Lothar Pfitzner

    IEEE TECHNOLOGY AND SOCIETY MAGAZINE   34 ( 2 )   21 - 30   2015.6

     More details

  • Detailed analysis of minimum operation voltage of extraordinarily unstable cells in fully depleted silicon-on-buried-oxide six-transistor static random access memory

    Tomoko Mizutani, Yoshiki Yamamoto, Hideki Makiyama, Tomohiro Yamashita, Hidekazu Oda, Shiro Kamohara, Nobuyuki Sugii, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   54 ( 4 )   2015.4

     More details

  • Comparison and statistical analysis of four write stability metrics in bulk CMOS static random access memory cells

    Hao Qiu, Tomoko Mizutani, Takuya Saraya, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   54 ( 4 )   2015.4

     More details

  • CI-4-7 Low Voltage and Low Power Devices by Threshold Voltage Control

    Proceedings of the IEICE General Conference   2015 ( 2 )   "SS - 100"   2015.2

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CiNii Books

    researchmap

  • Multiple logic functions from extended blockade region in a silicon quantum-dot transistor

    Youngmin Lee, Sejoon Lee, Hyunsik Im, Toshiro Hiramoto

    JOURNAL OF APPLIED PHYSICS   117 ( 6 )   2015.2

     More details

  • Three-Dimensional Integrated CMOS Image Sensors with Pixel-Parallel A/D Converters Fabricated by Direct Bonding of SOI Layers

    GOTO Masahide, HAGIWARA Kei, IGUCHI Yoshinori, OHTAKE Hiroshi, SARAYA Takuya, KOBAYASHI Masaharu, HIGURASHI Eiji, TOSHIYOSHI Hiroshi, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   114 ( 421 )   25 - 28   2015.1

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    We report the first demonstration of three-dimensional (3D) integrated CMOS image sensors with pixel-parallel A/D converters (ADCs), thereby meeting the demand for high resolution and high frame rate imaging. Photodiode (PD) and inverter layers were directly bonded with the damascened Au electrodes to provide each pixel with in-pixel A/D conversion. We designed ADC with a pulse frequency output and fabricated a prototype sensor with 64 pixels. The developed sensor successfully captured video images and confirmed excellent linearity with a wide dynamic range of more than 80 dB, which showed feasibility of pixel-level 3D integration for high-performance CMOS image sensors.

    CiNii Books

    researchmap

  • Device Design Guideline for Steep Slope Ferroelectric FET Using Negative Capacitance in Sub-0.2V Operation: Operation Speed, Material Requirement and Energy Efficiency

    Masaharu Kobayashi, Toshiro Hiramoto

    2015 SYMPOSIUM ON VLSI TECHNOLOGY (VLSI TECHNOLOGY)   2015

     More details

    Language:English  

    Web of Science

    researchmap

  • V-th Self-Adjusting Tri-Gate Nanowire MOSFET for Stability Improvement of SRAM Cell Operating at 0.1 V

    Seung-Min Jung, Takuya Saraya, Kiyoshi Takeuchi, Masaharu Kobayashi, Toshiro Hiramoto

    2015 IEEE SOI-3D-SUBTHRESHOLD MICROELECTRONICS TECHNOLOGY UNIFIED CONFERENCE (S3S)   2015

     More details

    Language:English  

    Web of Science

    researchmap

  • Impact of Random Telegraph Noise on Write Stability in Silicon-on-Thin-BOX (SOTB) SRAM Cells at Low Supply Voltage in Sub-0.4V Regime

    Hao Qiu, Tomoko Mizutani, Yoshiki Yamamoto, Hideki Makiyama, Tomohiro Yamashita, Hidekazu Oda, Shiro Kamohara, Nobuyuki Sugii, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    2015 SYMPOSIUM ON VLSI TECHNOLOGY (VLSI TECHNOLOGY)   2015

     More details

    Language:English  

    Web of Science

    researchmap

  • Development of a Three-Dimensional Integrated Image Sensor with Pixel-Parallel Signal Processing Architecture

    Kei Hagiwara, Masahide Goto, Yuki Honda, Masakazu Nanba, Hiroshi Ohtake, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Hiroshi Toshiyoshi, Eiji Higurashi, Toshiro Hiramoto

    2015 IEEE SENSORS   1905 - 1908   2015

     More details

    Language:English  

    Web of Science

    researchmap

  • Au/SiO2ハイブリッド接合を用いた3次元集積回路の開発

    後藤正英, 萩原啓, 井口義則, 大竹浩, 更屋拓哉, 日暮栄治, 年吉洋, 平本俊郎

    応用物理学会春季学術講演会講演予稿集(CD-ROM)   62nd   2015

  • Three-Dimensional Integrated CMOS Image Sensors with Pixel-Parallel Signal Processors

    GOTO Masahide, HAGIWARA Kei, IGUCHI Yoshinori, OHTAKE Hiroshi, SARAYA Takuya, KOBAYASHI Masaharu, HIGURASHI Eiji, TOSHIYOSHI Hiroshi, HIRAMOTO Toshiro

    ITE Technical Report   39 ( 0 )   5 - 8   2015

     More details

    Language:Japanese   Publisher:The Institute of Image Information and Television Engineers  

    We report the first demonstration of three-dimensional (3D) integrated CMOS image sensors with pixel-parallel A/D converters (ADCs), thereby meeting the demand for high resolution and high frame rate imaging. Photodiode (PD) and inverter layers were directly bonded with the damascened Au electrodes to provide each pixel with in-pixel A/D conversion. We designed ADC with a pulse frequency output and fabricated a prototype sensor with 64 pixels. The developed sensor successfully captured video images and confirmed excellent linearity with a wide dynamic range of more than 80 dB, which showed feasibility of pixel-level 3D integration for high-performance CMOS image sensors.

    CiNii Books

    researchmap

  • 128 x 96 Pixel-Parallel Three-Dimensional Integrated CMOS Image Sensors with 16-bit A/D Converters by Direct Bonding with Embedded Au Electrodes

    Masahide Goto, Kei Hagiwara, Yuki Honda, Masakazu Nanba, Hiroshi Ohtake, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    2015 IEEE SOI-3D-SUBTHRESHOLD MICROELECTRONICS TECHNOLOGY UNIFIED CONFERENCE (S3S)   2015

     More details

    Language:English  

    Web of Science

    researchmap

  • Three-Dimensional Integrated Circuits and Stacked CMOS Image Sensors using Direct Bonding of SOI Layers

    Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    2015 INTERNATIONAL 3D SYSTEMS INTEGRATION CONFERENCE (3DIC 2015)   2015

     More details

    Language:English  

    Web of Science

    researchmap

  • Effect of drain-induced barrier lowering on performance of ultralow-supply-voltage CMOS circuits operating in subthreshold region

    Seung-Min Jung, Tomoko Mizutani, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 12 )   2014.12

     More details

  • Back-Bias Control Technique for Suppression of Die-to-Die Delay Variability of SOTB MOS Circuits at Ultralow-Voltage (0.4 V) Operation

    Makiyama H., Yamamoto Y., Oda H., Kamohara S., Sugii N., Yamaguchi Y., Ishibashi K., Mizutani T., Hiramoto T.

    Technical report of IEICE. SDM   114 ( 255 )   61 - 68   2014.10

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Small-variability transistors such as silicon on thin buried oxide (SOTB) are effective for reducing the operation voltage (V_<dd>). In the ultralow-V_<dd> regime, however, the upsurging delay (τ_<pd>) variability is the most important challenge. This paper proposes the balanced n/p drivability control method for reducing the die-to-die delay variation by back bias applicable for various circuits. Excellent variability reduction by this balanced control is demonstrated at V_<dd> = 0.4 V.

    CiNii Books

    researchmap

  • Statistical Analysis of Minimum Operation Voltage (Vmin) in Fully Deplete Silicon-on-Thin-BOX (SOTB) SRAM Cells

    MIZUTANI Tomoko, YAMAMOTO Yoshiki, MAKIYAMA Hideki, YAMASHITA Tomohiro, ODA Hidekazu, KAMOHARA Shiro, SUGII Nobuyuki, HIRAMOTO Toshiro

    Technical report of IEICE. ICD   114 ( 175 )   55 - 58   2014.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The minimum operation voltage (V_<min>) of fully depleted (FD) silicon-on-thin-BOX (SOTB) SRAM cells are measured and statistically analyzed. It is newly found that V_<min> deviates from a normal distribution and follows a log-normal distribution. Furthermore, it is found that the behaviors of the worst V_<min> are different from the median V_<min> or static noise margin (SNM), indicating that cell stability of high density SRAM must be judged by the worst V_<min>.

    CiNii Books

    researchmap

  • Invited Talk : Ultra-Low Voltage (0.1V) Operation of Threshold Voltage Self-Adjusting MOSFET and SRAM Cell

    HIRAMOTO Toshiro, Ueda Akitsugu, Jung Seung-Min, MIZUTANI Tomoko, Saraya Takuya

    Technical report of IEICE. ICD   114 ( 175 )   51 - 54   2014.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    A new Vth self-adjusting MOSFET operating at 0.1V is proposed, where Vth automatically decreases at on-state and increases at off-state, resulting in high I_<on>/I_<off> ratio as well as stable SRAM operation at low V_<dd>. The device has a floating gate. The charges are injected into and from the floating gate, and V_<th> is self-adjusted. The V_<th> self-adjustment of nFETs and pFETs at 0.1V and the minimum operation voltage in 6T SRAM cell at 0.1V are experimentally demonstrated.

    CiNii Books

    researchmap

  • Statistical Analysis of Minimum Operation Voltage (Vmin) in Fully Deplete Silicon-on-Thin-BOX (SOTB) SRAM Cells

    MIZUTANI Tomoko, YAMAMOTO Yoshiki, MAKIYAMA Hideki, YAMASHITA Tomohiro, ODA Hidekazu, KAMOHARA Shiro, SUGII Nobuyuki, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   114 ( 174 )   55 - 58   2014.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The minimum operation voltage (V_<min>) of fully depleted (FD) silicon-on-thin-BOX (SOTB) SRAM cells are measured and statistically analyzed. It is newly found that V_<min> deviates from a normal distribution and follows a log-normal distribution. Furthermore, it is found that the behaviors of the worst V_<min> are different from the median V_<min> or static noise margin (SNM), indicating that cell stability of high density SRAM must be judged by the worst V_<min>.

    CiNii Books

    researchmap

  • Invited Talk : Ultra-Low Voltage (0.1V) Operation of Threshold Voltage Self-Adjusting MOSFET and SRAM Cell

    HIRAMOTO Toshiro, Ueda Akitsugu, Jung Seung-Min, MIZUTANI Tomoko, Saraya Takuya

    Technical report of IEICE. SDM   114 ( 174 )   51 - 54   2014.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    A new Vth self-adjusting MOSFET operating at 0.1V is proposed, where Vth automatically decreases at on-state and increases at off-state, resulting in high I_<on>/I_<off> ratio as well as stable SRAM operation at low V_<dd>. The device has a floating gate. The charges are injected into and from the floating gate, and V_<th> is self-adjusted. The V_<th> self-adjustment of nFETs and pFETs at 0.1V and the minimum operation voltage in 6T SRAM cell at 0.1V are experimentally demonstrated.

    CiNii Books

    researchmap

  • 3-D Silicon-on-Insulator Integrated Circuits With NFET and PFET on Separate Layers Using Au/SiO2 Hybrid Bonding

    Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    IEEE TRANSACTIONS ON ELECTRON DEVICES   61 ( 8 )   2886 - 2892   2014.8

     More details

  • Threshold voltage shifts and their variability behaviors in p-channel FETs by high voltage on-state and off-state stress

    Nurul Ezaila Alias, Anil Kumar, Takuya Saraya, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 8 )   32 - 36   2014.8

     More details

  • A novel MOSFET with vertical signal-transfer capability for 3D-structured CMOS image sensors

    Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Hiroshi Toshiyoshi, Toshiro Hiramoto

    IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   9 ( 3 )   329 - 333   2014.5

     More details

  • Ultralow-power SOTB CMOS technology operating down to 0.4 V

    Nobuyuki Sugii, Yoshiki Yamamoto, Hideki Makiyama, Tomohiro Yamashita, Hidekazu Oda, Shiro Kamohara, Yasuo Yamaguchi, Koichiro Ishibashi, Tomoko Mizutani, Toshiro Hiramoto

    Journal of Low Power Electronics and Applications   4 ( 2 )   65 - 76   2014.4

     More details

    Language:English   Publishing type:Book review, literature introduction, etc.   Publisher:MDPI AG  

    DOI: 10.3390/jlpea4020065

    Scopus

    researchmap

  • Ultralow-Voltage Operation of Silicon-on-Thin-BOX (SOTB) 2Mbit SRAM Down to 0.37 V Utilizing Adaptive Back Bias

    Yamamoto Y., Makiyama H., Yamashita T., Oda H., Kamohara S., Sugii N., Yamaguchi Y., Mizutani T., Hiramoto T.

    Technical report of IEICE. ICD   114 ( 13 )   53 - 57   2014.4

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    We demonstrated record 0.37V minimum operation voltage (V_<MIN>) of 2Mb Silicon-on-Thin-Buried-oxide (SOTB) 6T-SRAM. Thanks to the small variability of SOTB (A_<VT>〜1.3mVμm) and adaptive back biasing (ABB), V_<MIN> was lowered down to 〜0.4V regardless of temperature. Both fast access time and small standby leakage were achieved by ABB.

    CiNii Books

    researchmap

  • Peak position control of Coulomb blockade oscillations in silicon single-electron transistors with floating gate operating at room temperature

    Yuma Tanahashi, Ryota Suzuki, Takuya Saraya, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 4 )   2014.4

     More details

  • Comparison and distribution of minimum operation voltage in fully depleted silicon-on-thin-buried-oxide and bulk static random access memory cells

    Tomoko Mizutani, Yoshiki Yamamoto, Hideki Makiyama, Hirofumi Shinohara, Toshiaki Iwamatsu, Hidekazu Oda, Nobuyuki Sugii, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   53 ( 4 )   2014.4

     More details

  • Transport behaviors and mechanisms in cuspidal blockade region for silicon single-hole transistor

    Youngmin Lee, Sejoon Lee, Toshiro Hiramoto

    CURRENT APPLIED PHYSICS   14 ( 3 )   428 - 432   2014.3

  • Suppression of Die-to-Die Delay Variability of Silicon on Thin Buried Oxide (SOTB) CMOS Circuits by Balanced P/N Drivability Control with Back-Bias for Ultralow-Voltage (0.4V) Operation

    Makiyama H., Yamamoto Y., Shinohara H., Iwamatsu T., Oda H., Sugii N., Ishibashi K., Mizutani T., Hiramoto T., Yamaguchi Y.

    Technical report of IEICE. SDM   113 ( 420 )   35 - 38   2014.1

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Small-variability transistors such as silicon on thin buried oxide (SOTB) are effective for reducing the operation voltage (V_<dd>). In the ultralow-V_<dd> regime, however, the upsurging delay (τ_<pd>) variability is the most important challenge. This paper proposes the balanced n/p drivability control method for reducing the die-to-die delay variation by back bias applicable for various circuits. Excellent variability reduction by this balanced control is demonstrated at V_<dd> = 0.4 V.

    CiNii Books

    researchmap

  • Analysis of Transistor Characteristics in Distribution Tails beyond ±5.4σ of 11 Billion Transistors

    MIZUTANI Tomoko, KUMAR Anil, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   113 ( 420 )   31 - 34   2014.1

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Transistors in distribution tails of 11G (11 billion) transistors were intensively measured and compared with transistors in the center of distribution. It is found that extrapolated V_<TH> (V_<THEX>) roughly follows the normal distribution, while some transistors show extraordinary small on-current (I_<ON>) which deviates from the normal distribution. The origin of abnormal distribution and the impact on yield loss are discussed.

    CiNii Books

    researchmap

  • Observation of Single Electron Transport via Multiple Quantum States of a Silicon Quantum Dot at Room Temperature

    Sejoon Lee, Youngmin Lee, Emil B. Song, Toshiro Hiramoto

    NANO LETTERS   14 ( 1 )   71 - 77   2014.1

     More details

  • Au/SiO2ハイブリッド接合を用いた3次元集積回路の試作

    後藤正英, 萩原啓, 井口義則, 大竹浩, 更屋拓哉, 日暮栄治, 年吉洋, 平本俊郎

    応用物理学会春季学術講演会講演予稿集(CD-ROM)   61st   2014

  • Statistical Analysis of Minimum Operation Voltage (V-min) in Fully Depleted Silicon-on-Thin-BOX (SOTB) SRAM Cells

    Tomoko Mizutani, Yoshiki Yamamoto, Hideki Makiyama, Tomohiro Yamashita, Hidekazu Oda, Shiro Kamohara, Nobuyuki Sugii, Toshiro Hiramoto

    2014 IEEE SILICON NANOELECTRONICS WORKSHOP (SNW)   2014

     More details

    Language:English  

    Web of Science

    researchmap

  • Analysis of Delay Time in Subthreshold CMOS Circuits Operating at Ultra-Low Supply Voltage

    Seung-Min Jung, Takuya Saraya, Toshiro Hiramoto

    2014 IEEE SILICON NANOELECTRONICS WORKSHOP (SNW)   2014

     More details

    Language:English  

    Web of Science

    researchmap

  • Ultralow-Voltage Design and Technology of Silicon-on-Thin-Buried-Oxide (SOTB) CMOS for Highly Energy Efficient Electronics in IoT Era

    Shiro Kamohara, Nobuyuki Sugii, Yoshiki Yamamoto, Hideki Makiyama, Tomohiro Yamashita, Takumi Hasegawa, Shinobu Okanishi, Hiroshi Yanagita, Masaru Kadoshima, Keiichi Maekawa, Hitoshi Mitani, Yasushi Yamagata, Hidekazu Oda, Yasuo Yamaguchi, Koichiro Ishibashi, Hideharu Amano, Kimiyoshi Usami, Kazutoshi Kobayashi, Tomoko Mizutani, Toshiro Hiramoto

    2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers   2014

     More details

    Language:English  

    Web of Science

    researchmap

  • Development of Novel Three-Dimensional Structuring of Integrated Circuits by using Low Temperature Direct Bonding for CMOS Image Sensors

    Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    INTERNATIONAL SYMPOSIUM ON FUNCTIONAL DIVERSIFICATION OF SEMICONDUCTOR ELECTRONICS 2 (MORE-THAN-MOORE 2)   61 ( 6 )   87 - 90   2014

     More details

  • Three-Dimensional Integrated CMOS Image Sensors with Pixel-Parallel A/D Converters Fabricated by Direct Bonding of SOI Layers

    Masahide Goto, Kei Hagiwara, Yoshinori Iguchi, Hiroshi Ohtake, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

    2014 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)   2014

     More details

    Language:English  

    Web of Science

    researchmap

  • Mechanical Grinding of Au/SiO2 Hybrid-bonded Substrates for 3D Integrated Image Sensors

    Kei Hagiwara, Masahide Goto, Hiroshi Ohtake, Yoshinori Iguchi, Takuya Saraya, Hiroshi Toshiyoshi, Eiji Higurashi, Toshiro Hiramoto

    2014 4TH IEEE INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D)   11 - 11   2014

     More details

    Language:English  

    Web of Science

    researchmap

  • TOWARD 0.1V OPERATION OF MOSFETS FOR ULTRA-LOW POWER APPLICATIONS

    Toshiro Hiramoto, Akitsugu Ueda, Seung-Min Jung, Tomoko Mizutani, Takuya Saraya

    2014 12TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT)   2014

     More details

    Language:English  

    Web of Science

    researchmap

  • 画素並列信号処理撮像デバイスに適用可能な直接接合を用いた立体構造回路の試作

    井口義則, 後藤正英, 萩原啓, 大竹浩, 更屋拓哉, 日暮栄治, 年吉洋, 平本俊郎

    映像情報メディア学会年次大会講演予稿集(CD-ROM)   2014   2014

  • 3次元構造撮像デバイスの実現に向けた画素回路の試作

    後藤正英, 萩原啓, 井口義則, 大竹浩, 更屋拓哉, 日暮栄治, 年吉洋, 平本俊郎

    応用物理学会秋季学術講演会講演予稿集(CD-ROM)   75th   2014

  • 9-3 3-D integrated circuits using direct bonding method for pixel-parallel signal processing image sensors

    IGUCHI Yoshinori, GOTO Masahide, HAGIWARA Kei, OHTAKE Hiroshi, SARAYA Takuya, HIGURASHI Eiji, TOSHIYOSHI Hiroshi, HIRAMOTO Toshiro

    PROCEEDINGS OF THE ITE ANNUAL CONVENTION   2014 ( 0 )   9 - 3-1_-_9-3-1_   2014

     More details

    Language:Japanese   Publisher:The Institute of Image Information and Television Engineers  

    This paper describes a 3D-integrated oscillator circuit and a design of an in-pixel A/D converter for a pixel-parallel 3D-integrated image sensor which can achieve both ultrahigh definition and high frame frequency.

    CiNii Books

    researchmap

  • Recovery and Parmanent Components of vertical bar V-th vertical bar Shifts in pFETs by High-Voltage ON-state Stress

    Nurul Ezaila Alias, Tomoko Mizutani, Anil Kumar, Takuya Saraya, Toshiro Hiramoto

    2014 IEEE SILICON NANOELECTRONICS WORKSHOP (SNW)   2014

     More details

    Language:English  

    Web of Science

    researchmap

  • Comparison of Statistical Distributions of Random Telegraph Noise (RTN) in Subthreshold Region and Strong Inversion Region

    Hitoshi Ohno, Tomoko Mizutani, Takuya Saraya, Toshiro Hiramoto

    2014 IEEE SILICON NANOELECTRONICS WORKSHOP (SNW)   2014

     More details

    Language:English  

    Web of Science

    researchmap

  • Statistical Analysis of Four Write Stability Metrics in Fully Depleted Silicon-on-Thin-BOX (SOTB) and Bulk SRAM Cells at Low Supply Voltage

    Hao Qiu, Tomoko Mizutani, Yoshiki Yamamoto, Hideki Makiyama, Tomohiro Yamashita, Hidekazu Oda, Shiro Kamohara, Nobuyuki Sugii, Takuya Saraya, Masaharu Kobayashi, Toshiro Hiramoto

    2014 12TH IEEE INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY (ICSICT)   2014

     More details

    Language:English  

    Web of Science

    researchmap

  • Ultra-Low Voltage (0.1V) Operation of V-th Self-Adjusting MOSFET and SRAM Cell

    Akitsugu Ueda, Seung-Min Jung, Tomoko Mizutani, Anil Kumar, Takuya Saraya, Toshiro Hiramoto

    2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers   2014

     More details

    Language:English  

    Web of Science

    researchmap

  • Two types of on-state observed in the operation of a redox-based three-terminal device

    Qi Wang, Yaomi Itoh, Tohru Tsuruoka, Tsuyoshi Hasegawa, Satoshi Watanabe, Shu Yamaguchi, Toshiro Hiramoto, Masakazu Aono

    ADVANCED MICRO-DEVICE ENGINEERING IV   596   111 - +   2014

  • The characteristic of elongated Coulomb-blockade regions in a Si quantum-dot device coupled via asymmetric tunnel barriers

    Sejoon Lee, Youngmin Lee, Emil B. Song, Toshiro Hiramoto

    JOURNAL OF APPLIED PHYSICS   114 ( 16 )   164513-164513-7   2013.10

     More details

  • Characteristics control of room-temperature operating single electron transistor with floating gate by charge pump circuit

    Motoki Nozue, Ryota Suzuki, Hirotoshi Nomura, Takuya Saraya, Toshiro Hiramoto

    SOLID-STATE ELECTRONICS   88   61 - 64   2013.10

  • Experimental Observation of Quantum Confinement Effect in &lt; 110 &gt; and &lt; 100 &gt; Silicon Nanowire Field-Effect Transistors and Single-Electron/Hole Transistors Operating at Room Temperature

    Ryota Suzuki, Motoki Nozue, Takuya Saraya, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 10 )   104001.1-104001.10   2013.10

     More details

  • Modulation of peak-to-valley current ratio of Coulomb blockade oscillations in Si single hole transistors

    Sejoon Lee, Youngmin Lee, Emil B. Song, Toshiro Hiramoto

    APPLIED PHYSICS LETTERS   103 ( 10 )   103502-103502-4   2013.9

     More details

  • Reduced Cell Current Variability in Fully Depleted Silicon-on-Thin-BOX (SOTB) SRAM Cells at Supply Voltage of 0.4V

    MIZUTANI Tomoko, YAMAMOTO Yoshiki, MAKIYAMA Hideki, SHINOHARA Hirofumi, IWAMATSU Toshiaki, ODA Hidekazu, SUGII Nobuyuki, HIRAMOTO Toshiro

    Technical report of IEICE. ICD   113 ( 173 )   47 - 52   2013.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Cell current (I_<CELL>) variability in 6T-SRAM composed of silicon-on-thin-BOX (SOTB) MOSFETs by 65nm technology is measured and compared with that of conventional bulk MOSFETs. It is found that I_<CELL> variability in SOTB SRAM is drastically suppressed compared with bulk SRAM especially at low supply voltage (V_<DD>) of 0.4V. It is confirmed that the main origin of suppressed I_<CELL> variability is small V_<TH> variability while small Gm, DIBL, and current-onset voltage (COV) variability has only minor effects.

    CiNii Books

    researchmap

  • Reduced Cell Current Variability in Fully Depleted Silicon-on-Thin-BOX (SOTB) SRAM Cells at Supply Voltage of 0.4V

    MIZUTANI Tomoko, YAMAMOTO Yoshiki, MAKIYAMA Hideki, SHINOHARA Hirofumi, IWAMATSU Toshiaki, ODA Hidekazu, SUGII Nobuyuki, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   113 ( 172 )   47 - 52   2013.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Cell current (I_<CELL>) variability in 6T-SRAM composed of silicon-on-thin-BOX (SOTB) MOSFETs by 65nm technology is measured and compared with that of conventional bulk MOSFETs. It is found that I_<CELL> variability in SOTB SRAM is drastically suppressed compared with bulk SRAM especially at low supply voltage (V_<DD>) of 0.4V. It is confirmed that the main origin of suppressed I_<CELL> variability is small V_<TH> variability while small Gm, DIBL, and current-onset voltage (COV) variability has only minor effects.

    CiNii Books

    researchmap

  • SRAM Cell Stability Parameter : Noise Margin or Vmin?

    KUMAR Anil, SARAYA Takuya, MIYANO Shinji, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   113 ( 172 )   43 - 46   2013.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    This paper reports the comprehensive analysis of the stability parameter of SRAM cells. Results show that even if noise margin (NM) of SRAM cells is same at higher V_<DD>, minimum operation voltage (Vmin) of the same cells is different. The origin of this discrepancy is analyzed. It can be concluded that NM at high V_<DD> is not a good indicator and NM should be measured at as low V_<DD> as possible to obtain NM data that are well correlated with Vmin.

    CiNii Books

    researchmap

  • SRAM Cell Stability Parameter : Noise Margin or Vmin?

    KUMAR Anil, SARAYA Takuya, MIYANO Shinji, HIRAMOTO Toshiro

    Technical report of IEICE. ICD   113 ( 173 )   43 - 46   2013.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    This paper reports the comprehensive analysis of the stability parameter of SRAM cells. Results show that even if noise margin (NM) of SRAM cells is same at higher V_<DD>, minimum operation voltage (Vmin) of the same cells is different. The origin of this discrepancy is analyzed. It can be concluded that NM at high V_<DD> is not a good indicator and NM should be measured at as low V_<DD> as possible to obtain NM data that are well correlated with Vmin.

    CiNii Books

    researchmap

  • Nonvolatile three-terminal operation based on oxygen vacancy drift in a Pt/Ta2O5-x/Pt, Pt structure

    Qi Wang, Yaomi Itoh, Tsuyoshi Hasegawa, Tohru Tsuruoka, Shu Yamaguchi, Satoshi Watanabe, Toshiro Hiramoto, Masakazu Aono

    Applied Physics Letters   102 ( 23 )   233508-233508-5   2013.6

     More details

  • Experimental Demonstration of Post-Fabrication Self-Improvement of SRAM Cell Stability by High-Voltage Stress

    Toshiro Hiramoto, Anil Kumar, Takuya Saraya, Shinji Miyano

    IEICE TRANSACTIONS ON ELECTRONICS   E96C ( 6 )   759 - 765   2013.6

  • NBTI Reliability of PFETs under Post-Fabrication Self-Improvement Scheme for SRAM

    Nurul Ezaila Alias, Anil Kumar, Takuya Saraya, Shinji Miyano, Toshiro Hiramoto

    IEICE TRANSACTIONS ON ELECTRONICS   E96C ( 5 )   620 - 623   2013.5

  • Statistical Analysis of Current Onset Voltage (CM) Distribution of Scaled MOSFETs

    Tomoko Mizutani, Anil Kumar, Toshiro Hiramoto

    IEICE TRANSACTIONS ON ELECTRONICS   E96C ( 5 )   630 - 633   2013.5

  • Integration of Complementary Metal-Oxide-Semiconductor 1-Bit Analog Selectors and Single-Electron Transistors Operating at Room Temperature

    Ryota Suzuki, Motoki Nozue, Takuya Saraya, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 4 )   04CJ05.1-04CJ05.6   2013.4

     More details

  • Direct Measurement of Carrier Mobility in Intrinsic Channel Tri-Gate Single Silicon Nanowire Metal-Oxide-Semiconductor Field-Effect Transistors

    Ke Mao, Takuya Saraya, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 4 )   04CC08.1-04CC08.6   2013.4

     More details

  • Statistical Analysis of Subthreshold Swing in Fully Depleted Silicon-on-Thin-Buried-Oxide and Bulk Metal-Oxide-Semiconductor Field Effect Transistors

    Tomoko Mizutani, Yoshiki Yamamoto, Hideki Makiyama, Toshiaki Iwamatsu, Hidekazu Oda, Nobuyuki Sugii, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 4 )   04CC02.1-04CC02.5   2013.4

     More details

  • Effects of Side Surface Roughness on Carrier Mobility in Tri-Gate Single Silicon Nanowire Metal-Oxide-Semiconductor Field-Effect Transistors

    Ke Mao, Takuya Saraya, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   52 ( 4 )   04CC11.1-04CC11.5   2013.4

     More details

  • Integration of CMOS 1-bit Analog Selector Circuits and Single-Electron Transistors Operating at Room Temperature

    SUZUKI Ryota, NOZUE Motoki, SARAYA Takuya, HIRAMOTO Toshiro

    IEICE technical report. Electron devices   112 ( 445 )   47 - 52   2013.2

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    In this paper, integrated circuit operation of CMOS analog selector circuits and silicon single-electron transistors is presented. The improvements in the fabrication process of SETs operating at room temperature have achieved better compatibility with CMOS, in terms of reduction in parasitic resistance and normally-off operation of MOSFETs Selective voltage application to the gate of a SET and selective readout of the output currents of two SETs through CMOS analog selectors have been demonstrated at room temperature.

    CiNii Books

    researchmap

  • Gate-tunable selective operation of single electron/hole transistor modes in a silicon single quantum dot at room temperature

    Sejoon Lee, Youngmin Lee, Emil B. Song, Kang L. Wang, Toshiro Hiramoto

    APPLIED PHYSICS LETTERS   102 ( 8 )   083504-083504-4   2013.2

     More details

  • 11-3 Development of elemental technology for 3D-integrated image sensors

    HAGIWARA Kei, GOTO Masahide, OHTAKE Hiroshi, IGUCHI Yoshinori, SARAYA Takuya, HIGURASHI Eiji, TOSHIYOSHI Hiroshi, HIRAMOTO Toshiro

    PROCEEDINGS OF THE ITE WINTER ANNUAL CONVENTION   2013 ( 0 )   11 - 3   2013

     More details

    Language:Japanese   Publisher:The Institute of Image Information and Television Engineers  

    We have studied a 3D-integrated image sensor that is intended to provide both an ultrahigh-definition and a high frame frequency. For such new sensors, we have developed a fundamental technology to directly bond substrates and to construct 3D-integrated logic circuits.

    DOI: 10.11485/itewac.2013.0_11_2

    researchmap

  • Analysis of Transistor Characteristics in Distribution Tails beyond +/- 5.4 sigma of 11 Billion Transistors

    Tomoko Mizutani, Anil Kumar, Toshiro Hiramoto

    2013 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)   2013   826 - 829   2013

  • 撮像デバイスの3次元集積化に向けた要素技術の開発

    萩原啓, 後藤正英, 大竹浩, 井口義則, 更屋拓哉, 日暮栄治, 年吉洋, 平本俊郎

    映像情報メディア学会冬季大会講演予稿集(CD-ROM)   2013   2013

  • 撮像デバイスの3次元構造化に向けた画素内A/D変換回路の設計

    後藤正英, 萩原啓, 井口義則, 大竹浩, 更屋拓哉, 日暮栄治, 年吉洋, 平本俊郎

    センサ・マイクロマシンと応用システムシンポジウム(CD-ROM)   30th   2013

  • 表面活性化処理を用いた金属/絶縁体混在基板の直接接合

    萩原啓, 後藤正英, 後藤正英, 大竹浩, 井口義則, 更屋拓哉, 年吉洋, 日暮栄治, 平本俊郎

    応用物理学会春季学術講演会講演予稿集(CD-ROM)   60th   2013

  • Silicon on Thin Buried Oxide (SOTB) Technology for Ultralow-Power (ULP) Applications

    SUGII Nobuyuki, IWAMATSU Toshiaki, YAMAMOTO Yoshiki, MAKIYAMA Hideki, TSUNOMURA Takaaki, SHINOHARA Hirofumi, AONO Hideki, ODA Hidekazu, KAMOHARA Shiro, YAMAGUCHI Yasuo, MIZUTANI Tomoko, HIRAMOTO Toshiro

    Technical report of IEICE. ICD   112 ( 170 )   29 - 32   2012.7

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Needs for low-power CMOS devices are still increasing. Ultralow-voltage-operation (ULV) CMOS with maximum power efficiency can extend the application field of electron devices: ubiquitous sensor network, etc. The main issues for ULV operation for the modern scaled CMOS are reducing variability and adaptive control of circuit performances enabling the operation at voltages as low as possible. In order to solve these issues, we are developing the silicon-on-thin-buried-oxide (SOTB) transistors. Features of the SOTB, transistor technology dedicated for ULV operation are presented and importance of device-circuit interaction to extend the application field is discussed.

    CiNii Books

    researchmap

  • Threshold Voltage Variability of 10 Billion Transistors

    MIZUTANI Tomoko, KUMAR Anil, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   111 ( 422 )   9 - 12   2012.2

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Threshold voltage (V_<TH>) variability of 10G (10 billion) transistors is measured using a special device-matrix-array test-element-group (DMA TEG) exclusively for ultra-fast V_<TH> measurements. It is found that V_<TH> variability in nFETs almost follows the normal distribution up to ±6σ, while pFETs have a clear "tail" in low V_<TH> region. The origin of the non-normal distribution is analyzed by measuring transistors fabricated in two different fabs and by 3D device simulation.

    CiNii Books

    researchmap

  • Gate Length and Gate Width Dependence of Drain Induced Barrier Lowering and Current-Onset Voltage Variability in Bulk and Fully Depleted Silicon-on-Insulator Metal Oxide Semiconductor Field Effect Transistors

    Anil Kumar, Tomoko Mizutani, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 2 )   024106.1-024106.5   2012.2

     More details

  • Suppression of Within-Device Variability in Intrinsic Channel Tri-Gate Silicon Nanowire Metal-Oxide-Semiconductor Field-Effect Transistors

    Ke Mao, Tomoko Mizutani, Anil Kumar, Takuya Saraya, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   51 ( 2 )   02BC06.1-02BC06.5   2012.2

     More details

  • Characteristics Variability and Random Telegraph Noise in Fully Depleted SOI MOSFETs

    HIRAMOTO Toshiro

    Technical report of IEICE. SDM   111 ( 249 )   1 - 4   2011.10

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Statistical characteristics of intrinsic channel fully depleted (FD) SOI MOSFETs and conventional bulk MOSFETs are compared. It is experimentally confirmed that threshold voltage (Vth) variability is well suppressed in FD SOI MOSFETs. Moreover, the worst value of time-dependent Vth change due to random telegraph noise (RTN) is also smaller in FD SOI MOSFETs. The mechanisms of these variability suppressions are discussed using three dimensional device simulation and it turns out that the absence of random dopant fluctuation (RDF) in channel is responsible for suppressed variability. These results strongly demonstrate the advantage of intrinsic channel MOSFETs where the channel does not include dopant atoms.

    CiNii Books

    researchmap

  • Statistical Analysis of DIBL and Current-Onset Voltage (COV) Variability in Scaled MOSFETs

    KUMAR Anil, MIZUTANI Tomoko, NISHIDA Akio, TAKEUCHI Kiyoshi, INABA Satoshi, KAMOHARA Shiro, TERADA Kazuo, MOGAMI Tohru, HIRAMOTO Toshiro

    IEICE technical report   111 ( 187 )   69 - 73   2011.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    This paper presents the statistical analysis of a newly found drain current variability component called "current-onset voltage" (COV) variability as well as DIBL variability in CMOS devices. 3D device simulation based results show that al-though gate length and gate width dependent aVTH falls on the same line on the Pelgrom plot, σCOV and σDIBL deviate for the smaller gate areas. Their mechanisms are also discussed.

    CiNii Books

    researchmap

  • Statistical Analysis of DIBL and Current-Onset Voltage (COV) Variability in Scaled MOSFETs

    KUMAR Anil, MIZUTANI Tomoko, NISHIDA Akio, TAKEUCHI Kiyoshi, INABA Satoshi, KAMOHARA Shiro, TERADA Kazuo, MOGAMI Tohru, HIRAMOTO Toshiro

    IEICE technical report   111 ( 188 )   69 - 73   2011.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    This paper presents the statistical analysis of a newly found drain current variability component called "current-onset voltage" (COV) variability as well as DIBL variability in CMOS devices. 3D device simulation based results show that al-though gate length and gate width dependent aVTH falls on the same line on the Pelgrom plot, σCOV and σDIBL deviate for the smaller gate areas. Their mechanisms are also discussed.

    CiNii Books

    researchmap

  • Evaluation of Variability in High-k/Metal-Gate MOSFET using Takeuchi Plot

    MIZUTANI Tomoko, KUMAR Anil, NISHIDA Akio, TAKEUCHI Kiyoshi, INABA Satoshi, KAMOHARA Shiro, TERADA Kazuo, MOGAMI Tohru, HIRAMOTO Toshiro

    IEICE technical report   111 ( 188 )   65 - 68   2011.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    VTH variability in high-k/metal-gate (HKMG) MOSFETs are evaluated using Takeuchi plot and compared with that in SiON MOSFETs for the first time. Parameters needed for Takeuchi plot is extracted from C-V measurement. It is found that, although VTH variability caused by random dopant fluctuation (RDF) is well suppressed, effects by the other variability causes are larger in HKMG MOSFETs. Takeuchi plot is a powerful tool to study variability origins in not only conventional SiON MOSFETs but also HKMG MOSFETs.

    CiNii Books

    researchmap

  • Direct Measurement of Correlation Between SRAM Noise Margin and Individual Cell Transistor Variability by Using Device Matrix Array

    Toshiro Hiramoto, Makoto Suzuki, Xiaowei Song, Ken Shimizu, Takuya Saraya, Akio Nishida, Takaaki Tsunomura, Shiro Kamohara, Kiyoshi Takeuchi, Tohru Mogami

    IEEE TRANSACTIONS ON ELECTRON DEVICES   58 ( 8 )   2249 - 2256   2011.8

  • High-Temperature Properties of Drain Current Variability in Scaled Field-Effect Transistors Analyzed by Decomposition Method

    Takaaki Tsunomura, Anil Kumar, Tomoko Mizutani, Akio Nishida, Kiyoshi Takeuchi, Satoshi Inaba, Shiro Kamohara, Kazuo Terada, Toshiro Hiramoto, Tohru Mogami

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 4 )   04DC08.1-04DC08.5   2011.4

     More details

  • Effect of Channel Dopant Profile on Difference in Threshold Voltage Variability Between NFETs and PFETs

    Takaaki Tsunomura, Akio Nishida, Toshiro Hiramoto

    IEEE TRANSACTIONS ON ELECTRON DEVICES   58 ( 2 )   364 - 369   2011.2

  • Proposal of a Model for Increased NFET Random Fluctuations

    TAKEUCHI KIYOSHI, NISHIDA AKIO, KAMOHARA SHIRO, HIRAMOTO TOSHIRO, MOGAMI TOHRU

    Dig Tech Pap Symp VLSI Technol   2011   192 - 193   2011

     More details

    Language:English  

    J-GLOBAL

    researchmap

  • Ultra-low-voltage operation: Device perspective

    Toshiro Hiramoto

    Proceedings of the International Symposium on Low Power Electronics and Design   2011   59 - 60   2011

     More details

  • Effect of Back Bias on Variability in Intrinsic Channel SOD MOSFETs

    Toshiro Hiramoto, Takuya Saraya, Chiho Lee

    TECHNOLOGY EVOLUTION FOR SILICON NANO-ELECTRONICS   470   214 - 217   2011

  • Statistical Advantages of Intrinsic Channel Fully Depleted SOI MOSFETs over Bulk MOSFETs

    Toshiro Hiramoto, Anil Kumar, Tomoko Mizutani, Jun Nishimura, Takuya Saraya

    2011 IEEE CUSTOM INTEGRATED CIRCUITS CONFERENCE (CICC)   2011   70 - 73   2011

  • Measuring Threshold Voltage Variability of 10G Transistors

    Tomoko Mizutani, Anil Kumar, Toshiro Hiramoto

    2011 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM)   2011   563 - 566   2011

  • 科学技術・研究開発の国際比較 2011年版 電子情報通信分野

    SAKURAI TAKAYASU, KIMOTO TSUNENOBU, KADA MORIHIRO, KURODA TADAHIRO, SOMEYA TAKAO, TAKEUCHI KEN, HIRAMOTO TOSHIRO, HARA KAZUHIRO, FUJITA MASAHIRO, MATSUZAWA AKIRA, MOGAMI TOORU, YASUURA HIROTO, ITO YOSHITERU, NAKANO YOSHIAKI, ITO MASAHIDE, IMOTO NOBUYUKI, KOSHIBA MASANORI, GOTO KEN'YA, KOYAMA OSAMU, SHINDO NORIO, BABA TOSHIHIKO, MOMOI TSUNEHIRO, MIYAMOTO YUTAKA, ISHIZUKA MITSURU, AIZAWA KIYOHARU, UEDA KAZUNORI, ONAI RIKIO, KITSUREGAWA MASARU, SAKAI SHUICHI, TAKAGI HIDEAKI, CHIKAYAMA TAKASHI, TSUJII JUN'ICHI, HIRAKI KEI, HON'IDEN SHIN'ICHI, KOBARA KAZUKUNI, INUMA MANABU, IMAFUKU KENTARO, ETO MASASHI, KORAI KEN'ICHI, SUZAKI KUNIYASU

    科学技術・研究開発の国際比較 2011年版 電子情報通信分野   197P   2011

     More details

    Language:Japanese  

    J-GLOBAL

    researchmap

  • Regional, National, and International Nanoelectronics Research Programs: Topical Concentration and Gaps

    Michel Brillouet, George I. Bourianoff, Ralph Keary Cavin, Toshiro Hiramoto, James A. Hutchby, Adrian M. Ionescu, Ken Uchida

    PROCEEDINGS OF THE IEEE   98 ( 12 )   1993 - 2004   2010.12

  • Nanoelectronics Research for Beyond CMOS Information Processing

    George Bourianoff, Michel Brillouet, Ralph K. Cavin, Toshiro Hiramoto, James A. Hutchby, Adrian M. Ionescu, Ken Uchida

    PROCEEDINGS OF THE IEEE   98 ( 12 )   1986 - 1992   2010.12

     More details

  • Hole Mobility Characteristics in Si Nanowire pMOSFETs on (110) Silicon-on-Insulator

    Jiezhi Chen, Takuya Saraya, Toshiro Hiramoto

    IEEE ELECTRON DEVICE LETTERS   31 ( 11 )   1181 - 1183   2010.11

  • Direct Measurement and Analysis of Static Noise Margin in SRAM Cells Using DMA TEG

    HIRAMOTO Toshiro, SUZUKI Makoto, SARAYA Takuya, SHIMIZU Ken, NISHIDA Akio, KAMOHARA Shiro, TAKEUCHI Kiyoshi, MOGAMI Tohru

    IEICE technical report   110 ( 183 )   111 - 114   2010.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    A special device-matrix-array (DMA) TEG of 16k bit SRAM cells has been designed. Static noise margins (SNM) and 6 transistors in cells are directly measured and their fluctuations are examined. It is found for the first time that one-side SNM follows the normal distribution up to ±4σ. It is also found that the cell stability is worse than circuit simulation using V_<th> of measured 6 transistors.

    CiNii Books

    researchmap

  • Random Drain Current Variation Caused by "Current-Onset Voltage" Variability in Scaled MOSFETs

    MIZUTANI Tomoko, TSUNOMURA Takaaki, KUMAR Anil, NISHIDA Akio, TAKEUCHI Kiyoshi, INABA Satoshi, KAMOHARA Shiro, TERADA Kazuo, MOGAMI Tohru, HIRAMOTO Toshiro

    IEICE technical report   110 ( 183 )   143 - 148   2010.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    It is revealed that drain current variability is fluctuated by "current-onset voltage" as well as threshold voltage V_<TH> and transconductance G_m. Device-matrix-array (DMA) TEG with 8k transistors fabricated by the 65nm technology is measured. Moreover, it is found by 3D device simulation and measured data that "current-onset voltage" variability is mainly determined by the channel potential fluctuates by random dopant fluctuations (RDF).

    CiNii Books

    researchmap

  • Direct Measurement and Analysis of Static Noise Margin in SRAM Cells Using DMA TEG

    HIRAMOTO Toshiro, SUZUKI Makoto, SARAYA Takuya, SHIMIZU Ken, NISHIDA Akio, KAMOHARA Shiro, TAKEUCHI Kiyoshi, MOGAMI Tohru

    IEICE technical report   110 ( 182 )   111 - 114   2010.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    A special device-matrix-array (DMA) TEG of 16k bit SRAM cells has been designed. Static noise margins (SNM) and 6 transistors in cells are directly measured and their fluctuations are examined. It is found for the first time that one-side SNM follows the normal distribution up to ±4σ. It is also found that the cell stability is worse than circuit simulation using V_<th> of measured 6 transistors.

    CiNii Books

    researchmap

  • Random Drain Current Variation Caused by "Current-Onset Voltage" Variability in Scaled MOSFETs

    MIZUTANI Tomoko, TSUNOMURA Takaaki, KUMAR Anil, NISHIDA Akio, TAKEUCHI Kiyoshi, INABA Satoshi, KAMOHARA Shiro, TERADA Kazuo, MOGAMI Tohru, HIRAMOTO Toshiro

    IEICE technical report   110 ( 182 )   143 - 148   2010.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    It is revealed that drain current variability is fluctuated by "current-onset voltage" as well as threshold voltage V_<TH> and transconductance G_m. Device-matrix-array (DMA) TEG with 8k transistors fabricated by the 65nm technology is measured. Moreover, it is found by 3D device simulation and measured data that "current-onset voltage" variability is mainly determined by the channel potential fluctuates by random dopant fluctuations (RDF).

    CiNii Books

    researchmap

  • Superior &lt; 110 &gt;-Directed Electron Mobility to &lt; 100 &gt;-Directed Electron Mobility in Ultrathin Body (110) n-Type Metal-Oxide-Semiconductor Field-Effect Transistors

    Ken Shimizu, Takuya Saraya, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   49 ( 5 )   051303.1-051303.3   2010.5

     More details

  • Investigation of Threshold Voltage Variability at High Temperature Using Takeuchi Plot

    Takaaki Tsunomura, Akio Nishida, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   49 ( 5 )   054101.1-054101.6   2010.5

     More details

  • Suppression of Electron Mobility Degradation in (100)-Oriented Double-Gate Ultrathin Body nMOSFETs

    Ken Shimizu, Takuya Saraya, Toshiro Hiramoto

    IEEE ELECTRON DEVICE LETTERS   31 ( 4 )   284 - 286   2010.4

  • Origin of Larger Drain Current Variability in N-Type Field-Effect Transistors Analyzed by Variability Decomposition Method

    Takaaki Tsunomura, Anil Kumar, Tomoko Mizutani, Akio Nishida, Kiyoshi Takeuchi, Satoshi Inaba, Shiro Kamohara, Kazuo Terada, Toshiro Hiramoto, Tohru Mogami

    APPLIED PHYSICS EXPRESS   3 ( 11 )   114201.1-114201.3   2010

     More details

  • Mobility Degradation in (110)-Oriented Ultrathin-Body Double-Gate p-Type Metal-Oxide-Semiconductor Field-Effect Transistors with Silicon-on-Insulator Thickness of Less than 5 nm

    Ken Shimizu, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   49 ( 4 )   041302.1-041302.3   2010

     More details

  • Threshold Voltage Dependence of Threshold Voltage Variability in Intrinsic Channel Silicon-on-Insulator Metal-Oxide-Semiconductor Field-Effect Transistors with Ultrathin Buried Oxide

    Chiho Lee, Arifin Tamsir Putra, Ken Shimizu, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   49 ( 4 )   04DC01.1-04DC01.4   2010

     More details

  • Possible Origins of Extra Threshold Voltage Variability in N-Type Field-Effect Transistors by Intentionally Changing Process Conditions and Using Takeuchi Plot

    Takaaki Tsunomura, Fumiko Yano, Akio Nishida, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   49 ( 7 )   074104.1-074104.4   2010

     More details

  • Mobility Enhancement over Universal Mobility in (100) Silicon Nanowire Gate-All-Around MOSFETs with Width and Height of Less Than 10nm Range

    Jiezhi Chen, Takuya Saraya, Toshiro Hiramoto

    2010 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS   2010   175 - 176   2010

     More details

  • Verification of Threshold Voltage Variation of Scaled Transistors with Ultralarge-Scale Device Matrix Array Test Element Group

    Takaaki Tsunomura, Akio Nishida, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 12 )   124505.1-124505.4   2009.12

     More details

  • Experimental Investigations of Electron Mobility in Silicon Nanowire nMOSFETs on (110) Silicon-on-Insulator

    Jiezhi Chen, Takura Saraya, Toshiro Hiramoto

    IEEE ELECTRON DEVICE LETTERS   30 ( 11 )   1203 - 1205   2009.11

  • C-11-1 A Study on Variability in Scaled MOS Transistors

    Hiramoto Toshiro, Takeuchi Kiyoshi, Nishida Akio

    Proceedings of the Society Conference of IEICE   2009 ( 2 )   63 - 63   2009.9

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CiNii Books

    researchmap

  • Analysis of NMOS and PMOS Difference in V-T Variation With Large-Scale DMA-TEG

    Takaaki Tsunomura, Akio Nishida, Toshiro Hiramoto

    IEEE TRANSACTIONS ON ELECTRON DEVICES   56 ( 9 )   2073 - 2080   2009.9

  • Velocity Saturation Effects in a Short Channel Si-MOSFET and its Small Signal Characteristics

    Sanghoon Hwang, Hyunsik Im, Minkyu Song, Koichi Ishida, Toshiro Hiramoto, Takayasu Sakurai

    JOURNAL OF THE KOREAN PHYSICAL SOCIETY   55 ( 2 )   581 - 584   2009.8

     More details

  • Mobility in Silicon Nanowire GAA Transistor on (110) SOI

    CHEN Jiezhi, SARAYA Takuya, HIRAMOTO Toshiro

    IEICE technical report   109 ( 134 )   45 - 48   2009.7

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Systematic study on hole mobility in gate-all-around (GAA) multiple Si nanowire pFETs on (110) SOI is presented for the first time. [110]-nanowires show high mobility, 2.4x enhancement over universal (100) mobility, even in high N_<inv> region and in narrow (25nm) nanowires. Furthermore, effects of uniaxial tensile stress are also investigated, indicating that [110] direction uniaxial stress is effective to modulate hole mobility in nanowires.

    CiNii Books

    researchmap

  • Mobility in Silicon Nanowire GAA Transistor on (110) SOI

    CHEN Jiezhi, SARAYA Takuya, HIRAMOTO Toshiro

    IEICE technical report   109 ( 133 )   45 - 48   2009.7

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Systematic study on hole mobility in gate-all-around (GAA) multiple Si nanowire pFETs on (110) SOI is presented for the first time. [110]-nanowires show high mobility, 2.4x enhancement over universal (100) mobility, even in high N_<inv> region and in narrow (25nm) nanowires. Furthermore, effects of uniaxial tensile stress are also investigated, indicating that [110] direction uniaxial stress is effective to modulate hole mobility in nanowires.

    CiNii Books

    researchmap

  • Variability of Characteristics in Scaled MOSFETs

    HIRAMOTO Toshiro, TAKEUCHI Kiyoshi, NISHIDA Akio

    The Journal of the Institute of Electronics, Information and Communication Engineers   92 ( 6 )   416 - 426   2009.6

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CiNii Books

    researchmap

  • Impact of Oxide Thickness Fluctuation and Local Gate Depletion on Threshold Voltage Variation in Metal-Oxide-Semiconductor Field-Effect Transistors

    Arifin Tamsir Putra, Takaaki Tsunomura, Akio Nishida, Shiro Kamohara, Kiyoshi Takeuchi, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 6 )   064504.1-064504.5   2009.6

     More details

  • Silicon nanowire n-type metal-oxide-semiconductor field-effect transistors and single-electron transistors at room temperature under uniaxial tensile strain

    YeonJoo Jeong, Kousuke Miyaji, Takuya Saraya, Toshiro Hiramoto

    JOURNAL OF APPLIED PHYSICS   105 ( 8 )   084514   2009.4

     More details

  • Evaluation of Threshold-Voltage Variation in Silicon on Thin Buried Oxide Complementary Metal-Oxide-Semiconductor and Its Impact on Decreasing Standby Leakage Current

    Nobuyuki Sugii, Ryuta Tsuchiya, Takashi Ishigaki, Yusuke Morita, Hiroyuki Yoshimoto, Toshiaki Iwamatsu, Hidekazu Oda, Yasuo Inoue, Toshiro Hiramoto, Shin&apos;ichiro Kimura

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 4 )   04C043.1-04C043.5   2009.4

     More details

  • Consideration of Random Dopant Fluctuation Models for Accurate Prediction of Threshold Voltage Variation of Metal-Oxide-Semiconductor Field-Effect Transistors in 45 nm Technology and Beyond

    Arifin Tamsir Putra, Akio Nishida, Shiro Kamohara, Takaaki Tsunomura, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 4 )   044502.1-044502.5   2009.4

     More details

  • Silicon Nanowire pMOSFETs and Single-Hole Transistors at Room Temperature under Uniaxial Strain

    JEONG YeonJoo, CHEN Jiezhi, SARAYA Takuya, HIRAMOTO Toshiro

    IEICE technical report   108 ( 437 )   59 - 62   2009.2

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Uniaxial strain effects on NW pFET and SHT are investigated. In the NW pFET, considerably larger current modulation than NW nFET is observed. To enhance the MOSFET mobility, tensile and compressive direction is beneficial to transverse and longitudinal strain, respectively. The strain effect is decreased as NW width becomes narrower due to small effective mass modulation at narrow NW pFET. In the SHT, Coulomb oscillation characteristics are modulated by the strain and after oscillation vanishes current modulation converges to constant value due to drift current in SHT.

    CiNii Books

    researchmap

  • Random Threshold Voltage Variability Induced by Gate-Edge Fluctuations in Nanoscale Metal-Oxide-Semiconductor Field-Effect Transistors

    Arifin Tamsir Putra, Akio Nishida, Shiro Kamohara, Toshiro Hiramoto

    APPLIED PHYSICS EXPRESS   2 ( 2 )   024501.1-024501.3   2009.2

     More details

  • Experimental Investigation on the Origin of Direction Dependence of Si (110) Hole Mobility Utilizing Ultra-Thin Body pMOSFETs

    SHIMIZU Ken, SARAYA Takuya, HIRAMOTO Toshiro

    IEICE technical report   108 ( 407 )   9 - 12   2009.1

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The direction dependence of hole mobility in (110) SOI pMOSFETs has been systematically investigated for the first time utilizing a new device structure. It is newly found that the high hole mobility in Si(110)/<110> even at high electric field originates from not only the large subband energy difference but also lighter conductivity mass than Si(110)/<100> caused by quantum confinement.

    CiNii Books

    researchmap

  • Electron Mobility in Silicon Gate-All-Around [100]- and [110]-Directed Nanowire Metal-Oxide-Semiconductor Field-Effect Transistor on (100)-Oriented Silicon-on-Insulator Substrate Extracted by Improved Split Capacitance-Voltage Method

    Jiezhi Chen, Takura Saraya, Kousuke Miyaji, Ken Shimizu, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   48 ( 1 )   011205.1-011205.4   2009.1

     More details

  • Physical Understandings of Si (110) Hole Mobility in Ultra-Thin Body pFETs by &lt; 110 &gt; and &lt; 111 &gt; Uniaxial Compressive Strain

    Ken Shimizu, Takuya Saraya, Toshiro Hiramoto

    2009 IEEE INTERNATIONAL ELECTRON DEVICES MEETING   2009   440 - 443   2009

  • Post-Fabrication Self-Convergence Scheme for Suppressing Variability in SRAM Cells and Logic Transistors

    Makoto Suzuki, Takuya Saraya, Ken Shimizu, Takayasu Sakurai, Toshiro Hiramoto

    2009 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS   2009   148 - 149   2009

     More details

  • MOSトランジスタのスケーリングに伴う特性ばらつき

    平本俊郎

    電子情報通信学会誌   92 ( 6 )   440 - 445   2009

     More details

  • 電子情報通信分野 科学技術・研究開発の国際比較 2009年版

    桜井貴康, 伊東義曜, 今井正治, 大橋弘通, 嘉田守宏, 黒田忠広, 財満鎭明, 角南英夫, 筒井哲夫, 平本俊郎, 松澤昭, 安浦寛人, 黒田和男, 伊藤雅英, 井元信之, 小柴正則, 後藤顕也, 小山理, 進藤典男, 田口常正, 馬場俊彦, 宮本裕, 石塚満, 相澤清晴, 上田和紀, 尾内理紀夫, 喜連川優, 坂井修一, 高木英明, 近山隆, 辻井潤一, 南谷崇, 平木敬, 本位田真一, 今井秀樹, 今福健太郎, 宇根正志, 大岩寛, 大塚玲, 古原和邦

    電子情報通信分野 科学技術・研究開発の国際比較 2009年版   265P   2009

     More details

    Language:Japanese  

    J-GLOBAL

    researchmap

  • High Hole Mobility in Multiple Silicon Nanowire Gate-All-Around pMOSFETs on (110) SOI

    Jiezhi Chen, Takuya Saraya, Toshiro Hiramoto

    2009 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS   2009   90 - 91   2009

     More details

  • Characteristics Variation in Scaled MOSFETs

    HIRAMOTO Toshiro, TAKEUCHI Kiyoshi, TSUNOMURA Takaaki, ARIFIN Tamsir Putra, NISHIDA Akio, KAMOHARA Shiro

    72   77 - 80   2008.7

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • Present Status and Future Trend of Characteristic Variations in Scaled CMOS

    HIRAMOTO T., TAKEUCHI K., TSUNOMURA T., PUTRA A. T., NISHIDA A., KAMOHARA S.

    IEICE technical report   108 ( 139 )   41 - 45   2008.7

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The variability is one of the most critical issues for further miniaturization of MOS transistors. Although the variability may place the limit of MOS transistor scaling, the origins of characteristics variation of MOS transistors have not been fully understood. Intensive and extensive investigations have been performed in order to elucidate the origins of random variation in scaled MOSFETs in framework of the MIRAI Project. The main achievements are: (1) Designed 1M device-matrix-array TEG and found that V_<TH> distributions of both nFETs and pFETs show high normality in the range of ±5σ, (2) Developed a new normalization method of Vth fluctuations in terms not only of device size but also of V_<TH> and T_<INV> (Takeuchi Plot), and (3) Compared the Vth fluctuation data in different technologies and fabs using Takeuchi Plot and found that pFET fluctuations can be almost fully explained by discrete dopant fluctuations while nFET has some fluctuation mechanisms other than dopant fluctuations.

    CiNii Books

    researchmap

  • Strong dependence of tunneling transport properties on overdriving voltage for room-temperature-operating single electron/hole transistors formed with ultranarrow [100] silicon nanowire channel

    Sejoon Lee, Toshiro Hiramoto

    APPLIED PHYSICS LETTERS   93 ( 4 )   043508   2008.7

     More details

  • Mobility Enhancement in Ultra Thin Body MOSFETs by Quantum Effects

    HIRAMOTO Toshiro, SHIMIZU Ken, TSUTSUI Gen

    108 ( 80 )   29 - 34   2008.6

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • Wide-range threshold voltage controllable silicon on thin buried oxide integrated with bulk complementary metal oxide semiconductor featuring fully silicided NiSi gate electrode

    Takashi Ishigaki, Ryuta Tsuchiya, Yusuke Morita, Nobuyuki Sugii, Shinichiro Kimura, Toshiaki Iwamatsu, Takashi Ipposhi, Yasuo Inoue, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   47 ( 4 )   2585 - 2588   2008.4

     More details

  • 可動ゲートを有するナノワイヤMOSFETと室温動作単電子トランジスタにおける特性変調

    PARK Jongsin, 宮地幸祐, 更屋拓哉, 肥後昭雄, 高橋一浩, 清水健, YI Yuheon, 年吉洋, 平本俊郎

    応用物理学関係連合講演会講演予稿集   55th ( 2 )   912   2008.3

     More details

    Language:Japanese  

    J-GLOBAL

    researchmap

  • Beyond CMOS とは?

    平本 俊郎

    應用物理   77 ( 3 )   253 - 253   2008.3

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • On the origin of negative differential conductance in ultranarrow-wire-channel silicon single-electron and single-hole transistors

    Masaharu Kobayashi, Kousuke Miyaji, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS   47 ( 3 )   1813 - 1817   2008.3

     More details

  • Experimental study on quantum confinement effects in silicon nanowire metal-oxide-semiconductor field-effect transistors and single-electron transistors

    Masaharu Kobayashi, Toshiro Hiramoto

    JOURNAL OF APPLIED PHYSICS   103 ( 5 )   053709   2008.3

     More details

  • Extremely high flexibilities of Coulomb blockade and negative differential conductance oscillations in room-temperature-operating silicon single hole transistor

    Sejoon Lee, Kousuke Miyaji, Masaharu Kobayashi, Toshiro Hiramoto

    APPLIED PHYSICS LETTERS   92 ( 7 )   073502   2008.2

     More details

  • Mobility Enhancement in Uniaxially Strained (110) Oriented Ultra-Thin Body Single- and Double-Gate MOSFETs with SOI Thickness of Less Than 4nm

    SHIMIZU Ken, HIRAMOTO Toshiro

    IEICE technical report   107 ( 455 )   5 - 8   2008.1

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    In this study, uniaxial tensile strain effects on Si (110) ultra-thin body SOI MOSFETs have been studied for the first time. As a result, mobility enhancement in both n- and p-type UTB MOSFETs is experimentally confirmed. Considering the facts that the quantum confinement effect caused by ultimately thin SOI layer enlarges the subband energy differences, our experimental results strongly suggest the effective mass change by strain both in n- and p-MOSFETs.

    CiNii Books

    researchmap

  • Understanding Random Threshold Voltage Fluctuation by Comparing Multiple Fabs and Technologies

    TAKEUCHI Kiyoshi, FUKAI Toshinori, TSUNOMURA Takaaki, PUTRA Arifin Tamsir, NISHIDA Akio, KAMOHARA Shiro, HIRAMOTO Toshiro

    IEICE technical report   107 ( 455 )   29 - 32   2008.1

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Random threshold voltage (V_<TH>) fluctuation data obtained from multiple fabs, generations and technologies, as well as theoretical/TCAD results are carefully compared using a special normalization method. It is revealed that P-FET fluctuation can be almost fully accounted for by dopant fluctuation regardless of device generations and designs, whereas extra fluctuation mechanism(s) significantly contributes to N-FETs.

    CiNii Books

    researchmap

  • Variable-body-factor SOI MOSFET with ultrathin buried oxide for adaptive threshold voltage and leakage control

    Tetsu Ohtou, Takuya Saraya, Toshiro Hiramoto

    IEEE TRANSACTIONS ON ELECTRON DEVICES   55 ( 1 )   40 - 47   2008.1

  • Experimental study of mobility in [110]- and [100]-directed multiple silicon nanowire GAA MOSFETs on (100) SOI

    Jiezhi Chen, Takuya Saraya, Kousuke Miyaji, Ken Shimizu, Toshiro Hiramoto

    2008 SYMPOSIUM ON VLSI TECHNOLOGY   2008   25 - 26   2008

     More details

  • Electron Mobility in Multiple Silicon Nanowires GAA nMOSFETs on (110) and (100) SOI at Room and Low Temperature

    Jiezhi Chen, Takuya Saraya, Toshiro Hiramoto

    IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008, TECHNICAL DIGEST   2008 Vol.2   757 - 760   2008

  • Experimental Investigation on the Origin of Direction Dependence of Si (110) Hole Mobility Utilizing Ultra-Thin Body pMOSFETs

    Ken Shimizu, Takuya Saraya, Toshiro Hiramoto

    IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008, TECHNICAL DIGEST   2008 Vol.1   67 - 70   2008

  • Variability in scaled MOS transistors: Present status and measures

    Toshiro Hiramoto, Kiyoshi Takeuchi, Akio Nishida

    IEEJ Transactions on Electronics, Information and Systems   128 ( 6 )   820 - 824   2008

     More details

    Language:Japanese   Publishing type:Book review, literature introduction, etc.   Publisher:Institute of Electrical Engineers of Japan  

    DOI: 10.1541/ieejeiss.128.820

    Scopus

    researchmap

  • Uniaxial Strain Effects on Silicon Nanowire pMOSFET and Single-Hole Transistor at Room Temperature

    YeonJoo Jeong, Jiezhi Chen, Takuya Saraya, Toshiro Hiramoto

    IEEE INTERNATIONAL ELECTRON DEVICES MEETING 2008, TECHNICAL DIGEST   2008 Vol.2   761 - 764   2008

  • Mobility Degradation in (110)-Oriented Ultra-thin Body Double-Gate pMOSFETs with SOI Thickness of less than 5nm

    SHIMIZU Ken, HIRAMOTO Toshiro

    2007   732 - 733   2007.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Experimental study on mobility in (110)-oriented ultrathin-body silicon-on-insulator n-type metal oxide semiconductor field-effect transistor with single- and double-gate operations

    Gen Tsutsui, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   46 ( 9A )   5686 - 5690   2007.9

     More details

  • CT-1-1 Measure to Overcome Variability in 10 nm MOS Transistors

    Hiramoto Toshiro

    Proceedings of the Society Conference of IEICE   2007 ( 2 )   "SS - 18"-"SS-19"   2007.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CiNii Books

    researchmap

  • Experimental Study on Mobility Universality in (100) Ultra Thin Body nMOSFET with SOI thickness of 5nm

    SHIMIZU Ken, HIRAMOTO Toshiro

    IEICE technical report   107 ( 194 )   107 - 111   2007.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Experimental study on mobility universality in (100) oriented ultrathin body SOI nMOSFETs was performed for the first time. It is newly found that the mobility universality in ultrathin body SOI nMOSFETs is not the same as that in bulk or relatively thick SOI nMOSFETs and that η value becomes larger as SOI thickness becomes thinner. These tendencies are well-described by the subband structure of MOS inversion layer. These results help the modeling of the mobility universality in ultrathin body SOI nMOSFETs.

    CiNii Books

    researchmap

  • Impact of parameter variations and random dopant fluctuations on short-channel fully depleted SOI MOSFETs with extremely thin BOX

    Tetsi Ohtou, Nobuyuki Sugii, Toshiro Hirarnoto

    IEEE ELECTRON DEVICE LETTERS   28 ( 8 )   740 - 742   2007.8

  • Control of full width at half maximum of Coulomb oscillation in silicon single-hole transistors at room temperature

    Kousuke Miyaji, Toshiro Hiramoto

    APPLIED PHYSICS LETTERS   91 ( 5 )   053509-053509-3   2007.7

     More details

  • Robust Design of Transistors : Present Status and Measures to Characteristic Variations

    HIRAMOTO Toshiro

    IEICE technical report   107 ( 110 )   5 - 8   2007.6

     More details

    Language:English   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The variations in transistor characteristics rapidly increase as the transistor size is miniaturized. Although each transistor operates correctly, the margin of circuit operation is severely degraded or the circuit fails. The origin of the characteristic variations is not simple in the nanoscale regimes. The various elements causing fluctuations are complexly related and the quantitative total fluctuations have not been understood yet. In this presentation, the present status and measures to the characteristic variations are described, and the activities of "Robust Design of Transistors" Program of the MIRAI Project are also introduced.

    CiNii Books

    researchmap

  • Experimental study on mobility universality in (100) ultrathin body nMOSFETs with SOI thickness of 5 nm

    Ken Shimizu, Gen Tsutsui, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS   46 ( 20-24 )   L480 - L482   2007.6

     More details

  • Experimental study on breakdown of mobility universality in &lt; 100 &gt;-directed (110)-oriented pMOSFETs

    Ken Shimizu, Gen Tsutsui, Doni Januar, Takuya Saraya, Toshiro Hiramoto

    IEEE TRANSACTIONS ON NANOTECHNOLOGY   6 ( 3 )   358 - 361   2007.5

  • Device design of nanoscale MOSFETs considering the suppression of short channel effects and characteristics variations

    Toshiro Hiramoto, Toshiharu Nagumo, Tetsu Ohtou, Kouki Yokoyama

    IEICE TRANSACTIONS ON ELECTRONICS   E90C ( 4 )   836 - 841   2007.4

  • Threshold-voltage control of AC performance degradation-free FD SOI MOSFET with extremely thin BOX using variable body-factor scheme

    Tetsu Ohtou, Kouki Yokoyama, Ken Shimizu, Toshiharu Nagumo, Toshiro Hiramoto

    IEEE TRANSACTIONS ON ELECTRON DEVICES   54 ( 2 )   301 - 307   2007.2

  • Experimental Demonstrations of Superior Characteristics of Variable Body-Factor (γ) Fully-Depleted SOI MOSFETs with Extremely Thin BOX

    OHTOU Tetsu, SARAYA Takuya, SHIMOKAWA Kimiaki, DOUMAE Yasuhiro, NAGATOMO Yoshiki, IDA Jiro, HIRAMOTO Toshiro

    IEICE technical report   106 ( 504 )   25 - 28   2007.1

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The superior characteristics of variable body-factor (γ) FD SOI MOSFETs which we have recently proposed are experimentally demonstrated. Devices were fabricated on a SOI wafer with BOX thickness of 10nm by using the 140nm technology. Their advantages, small leakage-current in the standby-state and improved delay in the active-state, are clearly validated by the measurements. This scheme is expected to be promising for future low-power, high-performance VLSIs.

    CiNii Books

    researchmap

  • Large Coulomb-blockade oscillations and negative differential conductance in silicon single-electron transistors with [100]- and [110]-directed channels at room temperature

    Masaharu Kobayashi, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   46 ( 1 )   24 - 27   2007.1

     More details

  • Mobility enhancement in uniaxially strained (110) oriented ultra-thin body single- and double-gate MOSFETs with SOI thickness of less than 4 nm

    Ken Shimizu, Toshiro Hiramoto

    2007 IEEE INTERNATIONAL ELECTRON DEVICES MEETING, VOLS 1 AND 2   2007 Vol.2   715 - +   2007

  • Design guideline of multi-gate MOSFETs with substrate-bias control

    Toshiharu Nagumo, Toshiro Hiramoto

    IEEE TRANSACTIONS ON ELECTRON DEVICES   53 ( 12 )   3025 - 3031   2006.12

  • Mobility and threshold-voltage comparison between (110)- and (100)-oriented ultrathin-body silicon MOSFETs

    Gen Tsutsui, Toshiro Hiramoto

    IEEE TRANSACTIONS ON ELECTRON DEVICES   53 ( 10 )   2582 - 2588   2006.10

  • Room Temperature Demonstration of Variable Full Width at Half Maximum of Coulomb Oscillation in Silicon Single-Hole Transistor

    MIYAJI Kousuke, HIRAMOTO Toshiro

    2006   836 - 837   2006.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Experimental Study on Breakdown of Mobility Universality in <100>-Directed (110)-Oriented pMOSFETs

    SHIMIZU Ken, SARAYA Takuya, HIRAMOTO Toshiro

    IEICE technical report   106 ( 206 )   105 - 109   2006.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    (110)-oriented pMOSFET is a promising choice for future CMOS device. However, physical origin of breakdown on mobility universality is still unknown. This paper describes experimental determination of the value of η by changing SOI thickness and temperature. It is found that in the case of <100>-directed channel on (110)-oriented pMOSFETs, η should be larger than unity, which implies the collapse of mobility universality, when temperature is low or SOI thickness is ultimately thin. The possible origin of universality breakdown is due to direction-dependent scattering mechanisms.

    CiNii Books

    researchmap

  • SRAM : challenges to lower operating voltage and higher immunity for characteristic variation

    HIRAMOTO Toshiro, INABA Satoshi, NODA Kenji, SANBONSUGI Yasuhiro, KAWASUMI Atsushi, TAKEUCHI Kiyoshi, YAMAOKA Masanao

    IEICE technical report   106 ( 206 )   167 - 169   2006.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CMOS SRAM is still a key device in high performance CPU and SoC products and further cell size scaling should be continued. In this panel discusstion, we will focus on the SRAM technology for lower operating voltage and higher immunity for characteristic variation. The featuring items are (1) key issues for SRAM device integration or circuit design (2) the root cause for SRAM scaling limit or lowering SRAM operating voltage (3) alternatives to 6T-SRAM (4) requests from SRAM device engineer to circuit designer and vise versa. We hope all paticipants will enjoy the discussion.

    CiNii Books

    researchmap

  • Parameter and Random Dopant Fluctuation on Fully-Depleted SOI MOSFETs with a Very Thin BOX

    OHTOU Tetsu, SUGII Nobuyuki, HIRAMOTO Toshiro

    IEICE technical report   106 ( 206 )   111 - 114   2006.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Characteristic variations of folly-depleted (FD) SOI MOSFETs with extremely thin buried oxide (BOX) are examined by simulation. It is found that an SOI device with low channel impurity concentration and high substrate concentration has high immunity to both parameter variations and random dopant fluctuations.

    CiNii Books

    researchmap

  • Large temperature dependence of Coulomb blockade oscillations in room-temperature-operating silicon single-hole transistor

    Masaharu Kobayashi, Masumi Saitoh, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   45 ( 8A )   6157 - 6161   2006.8

     More details

  • Modeling of body factor and subthreshold swing in bulk metal oxide semiconductor field effect transistors in short-channel regime

    Arifin Tamsir Putra, Masumi Saitoh, Gen Tsutsui, Toshiro Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   45 ( 8A )   6173 - 6176   2006.8

     More details

  • Voltage gain dependence of the negative differential conductance width in silicon single-hole transistors

    K Miyaji, M Saitoh, T Hiramoto

    APPLIED PHYSICS LETTERS   88 ( 14 )   143505-143505-3   2006.4

     More details

  • Emerging MOS Transistor Technologies

    HIRAMOTO Toshiro

    The Journal of the Institute of Electronics, Information and Communication Engineers   89 ( 2 )   123 - 129   2006.2

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CiNii Books

    researchmap

  • Impact of drain induced barrier lowering on read scheme in silicon nanocrystal memory with two-bit-per-cell operation

    S Park, H Im, Kim, I, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   45 ( 2A )   638 - 642   2006.2

     More details

  • Mobility Enhancement due to Volume Inversion in (110)-oriented Ultra-thin Body Double-gate nMOSFETs with Body Thickness less than 5nm

    TSUTSUI Gen, SAITOH Masumi, SARAYA Takuya, NAGUMO Toshiharu, HIRAMOTO Toshiro

    IEICE technical report   105 ( 541 )   5 - 8   2006.1

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Electron mobility enhancement due to volume inversion at inversion layer carrier density of 6×10^<12>cm^<-2> in (110)-oriented ultra-thin body (UTB) double-gate (DG) nMOSFETs with body thickness range of less than 5nm is demonstrated. The physical origin of the mobility enhancement is attributable to the suppression of surface roughness scattering by relaxed electric field and negligibly small degradation of the mobility limited by SOI thickness fluctuation induced scattering compared to single-gate (SG) that severely degrades mobility in (100)-oriented UTB DG nMOSFETs by quantum confinement.

    CiNii Books

    researchmap

  • Fully-Depleted SOI CMOS circuits and technology: For ultralow-power applications

    Takayasu Sakurai, Akira Matsuzawa, Takakuni Douseki, Hideaki Matsuhashi, Toshiaki Tsuchiya, Yasuhisa Omura, Hiroshi Shimomura, Masashi Yonemaru, Koji Fujii, Atsushi Kameyama, Hiroshi Kawaguchi, Tsuneo Tsukahara, Minoru Kozaki, Masayoshi Kinoshita, Akihiro Sawada, Yasuyuki Matsuya, Jun Terada, Yoshitsugu Inagaki, Tsuneaki Fuse, Yusuke Ohtomo, Hiroshi Koizumi, Shunsuke Baba, Kazuyoshi Nishimura, Yoshifumi Yoshida, Norio Hama, Tohru Mogami, Toshiro Hiramoto, Ken Uchida, Shin-Ichi Takagi, Toshinori Numata

    Fully-Depleted SOI CMOS Circuits and Technology: For Ultralow-Power Applications   1 - 411   2006

     More details

    Language:English   Publisher:Springer US  

    DOI: 10.1007/978-0-387-29218-2

    Scopus

    researchmap

  • Experimental demonstrations of superior characteristics of variable body-factor (gamma) fully-depleted SOI MOSFETs with extremely thin BOX of 10 nm

    Tetsu Ohtou, Takuya Saraya, Kiniiaki Shimokawa, Yasuhiro Doumae, Yoshiki Nagatomo, Jiro Ida, Toshiro Hiramoto

    2006 INTERNATIONAL ELECTRON DEVICES MEETING, VOLS 1 AND 2   2006 Vol.2   626 - +   2006

  • Experimental study on quantum structure of silicon nano wire and its impact on nano wire MOSFET and single-electron transistor

    Masaharu Kobayashi, Toshiro Hiramoto

    2006 INTERNATIONAL ELECTRON DEVICES MEETING, VOLS 1 AND 2   2006 Vol.2   855 - 857   2006

  • Silicon Nanoscale Devices

    HIRAMOTO Toshiro

    IEICE technical report   105 ( 492 )   47 - 52   2005.12

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The present status of the research on emerging silicon nanoscale devices that take full advantage of new physical phenomena in silicon nanostructures is reviewed. The new physics includes the quantum effects that will enhance the performance of MOS transistors and the single-electron charging effects that add new function in conventional CMOS circuits. These new physics is expected to break the scaling and performance limits of conventional CMOS.

    CiNii Books

    researchmap

  • Experimental study on superior mobility in (110)-oriented UTB SOI pMOSFETs

    G Tsutsui, M Saitoh, T Hiramoto

    IEEE ELECTRON DEVICE LETTERS   26 ( 11 )   836 - 838   2005.11

  • Mobility Increase in High-Ns Region in (110)-Oriented UTB pMOSFET Through Surface Roughness Improvement

    JANUAR Doni, TSUTSUI Gen, SAITOH Masumi, HIRAMOTO Toshiro

    2005   264 - 265   2005.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Very Sharp Room-Temperature Negative Differential Conductance in Silicon Single-Hole Transistor with High Voltage Gain

    MIYAJI Kousuke, SAITOH Masumi, HIRAMOTO Toshiro

    2005   166 - 167   2005.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Modeling of Body Factor and Subthreshold Swing in Short Channel Bulk MOSFETs

    TAMSIR Arifin, SAITOH Masumi, TSUTSUI Gen, HIRAMOTO Toshiro

    2005   284 - 285   2005.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Variable body-factor FD SOI MOSFET for VTCMOS applications

    OHTOU Tetsu, NAGUMO Toshiharu, YOKOYAMA Kouki, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   105 ( 232 )   37 - 42   2005.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    A variable body-factor Fully-Depleted (FD) SOI MOSFET is proposed as an optimum device for Variable threshold-voltage (VT) CMOS. The proposed device utilizes an SOI substrate with thin buried-oxide (BOX) and low impurity substrate concentration, and the body-factor can be widely changed using the modulation of depletion layer under the BOX. We show that the proposed scheme has advantages in VTCMOS both in the long and short channel region by the device simulations and measurements.

    CiNii Books

    researchmap

  • Experimental Study on the Mobility Superiority in (110)-oriented Ultra-thin Body pMOSFETs

    TSUTSUI Gen, SAITOH Masumi, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   105 ( 232 )   31 - 36   2005.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Ultra-thin body (UTB) SOI MOSFET is one of the most promising structures for future VLSIs because of its high short channel effect immunity. Mobility in UTB pMOSFETs in conventional (100) substrate has been experimentally investigated, and severe mobility degradation has been observed as tsor is reduced below 5nm. In this study, hole mobility in (110)-oriented UTB pMOSFETs is investigated. It is shown that the mobility, which is much higher than that in the universal curve in conventional (100)-oriented pMOSFET, is not degraded until tsor is thinned to 3nm. The high mobility in the UTB regime in (110) pMOSFET is attributed to subband modulation by carrier confinement and heavier hole effective mass normal to channel surface.

    CiNii Books

    researchmap

  • Enhancement of charge storage performance in double-gate silicon nanocrystal memories with ultrathin body structure

    K Yanagidaira, M Saitoh, T Hiramoto

    IEEE ELECTRON DEVICE LETTERS   26 ( 7 )   473 - 475   2005.7

  • Short-channel characteristics of variable-body-factor fully-depleted silicon-on-insulator metal-oxide-semiconductor-field-effect-transistors

    T Ohtou, T Nagumo, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   44 ( 6A )   3885 - 3888   2005.6

     More details

  • Body factor conscious modeling of single gate fully depleted SOI MOSFETs for low power applications

    A Kumar, T Nagumo, G Tsutsui, T Ohtou, T Hiramoto

    SOLID-STATE ELECTRONICS   49 ( 6 )   997 - 1001   2005.6

  • Experimental study on the universality of mobility behavior in ultra thin body metal oxide semiconductor field effect transistors

    G Tsutsui, M Saitoh, T Nagumo, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   44 ( 6A )   3889 - 3892   2005.6

     More details

  • シリコンナノドットを用いた不揮発性メモリ (特集1 次世代不揮発メモリーの開発・高集積化とその市場)

    平本 俊郎

    マテリアルステージ   5 ( 3 )   14 - 17   2005.6

     More details

    Language:Japanese   Publisher:技術情報協会  

    researchmap

  • Impact of SOI thickness fluctuation on threshold voltage variation in ultra-thin body SOI MOSFETs

    G Tsutsui, M Saitoh, T Nagumo, T Hiramoto

    IEEE TRANSACTIONS ON NANOTECHNOLOGY   4 ( 3 )   369 - 373   2005.5

  • Channel width and length dependence in Si nanocrystal memories with ultra-nanoscale channel

    J Brault, M Saitoh, T Hiramoto

    IEEE TRANSACTIONS ON NANOTECHNOLOGY   4 ( 3 )   349 - 354   2005.5

  • Re-examination of impact of intrinsic dopant fluctuations on static RAM (SRAM) static noise margin

    F Tachibana, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   44 ( 4B )   2147 - 2151   2005.4

     More details

  • Temperature dependence of off-current in bulk and fully depleted SOI MOSFETs

    K Miyaji, MI Saitoh, T Nagumo, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   44 ( 4B )   2371 - 2375   2005.4

     More details

  • Effects of channel thinning on threshold voltage shift in ultrathin-body silicon nanocrystal memories

    K Yanagidaira, M Saitoh, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   44 ( 4B )   2608 - 2611   2005.4

     More details

  • Room-Temperature Demonstration of Current Switching and Analog Pattern Matching Using Integrated Silicon Single-Electron Transistor Circuits

    SAITOH Masumi, HARATA Hidehiro, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   104 ( 577 )   17 - 20   2005.1

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    This paper reports the first room-temperature (RT) operation of integrated single-electron transistor (SET) circuits. We fabricate silicon single-hole transistors (SHTs) with high controllability and observe ultra-large Coulomb blockade (CB) oscillation with the peak-to-valley current ratio of over 10^3 at RT. Current switching operation using two SHTs integrated under a single gate is demonstrated at RT. We propose a novel application of SHTs, an ultra-compact analog pattern matching circuit. Its basic operation is demonstrated at RT using three SHTs fabricated on one chip, whose CB peak positions and currents are properly controlled by hole injection into silicon nanocrystals embedded in the gate oxide.

    CiNii Books

    researchmap

  • Silicon single-hole transistor with large Coulomb blockade oscillations and high voltage gain at room temperature

    H Harata, M Saitoh, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS   44 ( 20-23 )   L640 - L642   2005

     More details

  • Room-temperature operation of current switching circuit using integrated silicon single-hole transistors

    M Saitoh, H Harata, T Hiramoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS   44 ( 8-11 )   L338 - L341   2005

     More details

  • Short Channel Characteristics of Variable Body Factor FD SOI MOSFETs

    OHTOU Tetsu, NAGUMO Toshiharu, HIRAMOTO Toshiro

    2004   502 - 503   2004.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Room-Temperature Demonstration of Low-Voltage Static Memory Based on Negative Differential Conductance in Silicon Single-Hole Transistors

    SAITOH Masumi, HARATA Hidehiro, HIRAMOTO Toshiro

    2004   124 - 125   2004.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Re-examination of Impact of Intrinsic Dopant Fluctuations on SRAM Static Noise Margin

    TACHIBANA Fumihiko, HIRAMOTO Toshiro

    Proc. of Intl. Conf. on Solid State Devices and Materials, 2004   2004   192 - 193   2004.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Temperature Dependence of Off-Current in Bulk and FD SOI MOSFETs

    MIYAJI Kousuke, SAITOH Masumi, NAGUMO Toshiharu, HIRAMOTO Toshiro

    2004   236 - 237   2004.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Impact of Drain Induced Barrier Lowering on Read Scheme in Silicon Nanocrystal Memory with Two-Bit-per-Cell Operation

    PARK Sangsu, IM Hyunsik, KIM Ilgweon, HIRAMOTO Toshiro

    2004   610 - 611   2004.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Large Threshold Voltage Shift and Narrow Threshold Voltage Distribution in Ultra Thin Body Silicon Nanocrystal Memories

    YANAGIDAIRA Kosuke, SAITOH Masumi, HIRAMOTO Toshiro

    2004   130 - 131   2004.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Corner Effect on body factor of short channel low-Fin FETs

    NAGUMO Toshiharu, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   104 ( 249 )   31 - 35   2004.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Impact of Fin-corner shape on body factor γ of low-Fin (tri-gate) FET in the both cases of highly-doped channel and undoped channel has been investigated by means of three-dimensional device simulation. Behavior of both threshold voltage (V_<th>) and γ depends on whether V_<th> is derived from on-state or off-state. In highly-doped low-Fin, γ derived from off-state characteristics (γ_<IO>) are strongly affected by corner shape, and increase in γ_<IO> with reducing gate length (reverse short channel of γ) due to corner effect has been found in sharp corner device. Variation of off-current due to gate length fluctuation can be suppressed by applying negative substrate bias thanks to the reverse short channel effect of γ in highly-doped low-Fin with sharp corner. On the other hand, in undoped low-Fin, corner shape dependence is very weak and short channel characteristics become considerably worse than highly-doped case.

    CiNii Books

    researchmap

  • Study on the Threshold Voltage Variation and the Mobility Behavior in Ultra Thin Body SOI MOSFETs

    TSUTSUI Gen, SAITOH Masumi, NAGUMO Toshiharu, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   104 ( 249 )   25 - 30   2004.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Threshold voltage variation due to quantum confinement effect and mobility behavior in ultra thin body SOI MOSFETs are experimentally examined. It is demonstrated that threshold voltage variation drastically increases when SOI layer is thinned down to 3 nm. Suppression method of the threshold voltage variation is also proposed, and around 20% reduction in threshold voltage variation is achieved by applying substrate bias. It is experimentally demonstrated that the mobility in 8.1-nm-thick SOI pMOSFET degrades due only to the increased phonon scattering, while other degradation mechanisms appear in 4.5-nm-thick SOI pMOSFET.

    CiNii Books

    researchmap

  • Room-Temperature Demonstration of Highly-Functional Single-Electron Transistor Logic Based on Quantum Mechanical Effect in Ultra-Small Silicon Dot

    SAITOH Masumi, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   103 ( 631 )   29 - 36   2004.1

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    This paper describes the room-temperature (RT) demonstration of new highly-functional single-electron transistor (SET) logic based on the quantum mechanical effect in the ultra-small silicon dot. We fabricate single-hole transistors (SHTs) in the form of extremely constricted channel MOSFETs and observe large Coulomb blockade (CB) oscillations with the peak-to-valley current ratio (PVCR) of 10^2 at RT. In the fabricated single-dot SHTs, clear negative differential conductance (NDC) with the PVCR of 11.8 is also observed at RT because of the large quantum level spacing in the ultra-small dot. By utilizing the observed NDC, XOR operation is successfully demonstrated as a current output in just one SHT.

    CiNii Books

    researchmap

  • Quantum effects in nanoscale narrow-channel MOSFETs

    HIRAMOTO Toshiro

    72 ( 9 )   1167 - 1170   2003.9

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • Enhancement of Adjustable Threshold Voltage Range Due to Quantum Confinement Effect in Ultra Thin Body pMOSFETs

    TSUTSUI Gen, NAGUMO Toshiharu, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   103 ( 259 )   7 - 11   2003.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The body effect in ultra thin body SOI MOSFETs has been investigated using analytical model and experiments. It is demonstrated for the first time that the adjustable threshold voltage range by substrate bias is enhanced due to the quantum confinement effect in ultra thin body SOI. The enhancement ratio of the adjustable threshold voltage range in a 4.3 nm thick SOI MOSFET is around 10 %. This indicates that ultra thin body MOSFETs are useful not only for suppressing the short channel effects, but also for suppressing the off-leak current in the Variable Threshold CMOS (VTCMOS) scheme.

    CiNii Books

    researchmap

  • Semi-Planar SOI MOSFETs for low-power operation

    NAGUMO Toshiharu, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   103 ( 259 )   19 - 24   2003.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    We propose semi-planar silicon-on-insulator (SOI) MOSFETs for ultra-low power LSIs. As device dimensions scale down, threshold voltage fluctuation becomes the most serious issue as well as the short channel effect. Adaptive control of threshold voltage utilizing substrate bias is quite effective for suppressing threshold voltage fluctuation. Semi-planar SOI MOSFETs offers not only suppression of the short channel effect by the three-dimensional gate structure, but also finite value of body effect factor, thus suppression of fluctuation is possible. This paper describes superiority of semi-planar SOI MOSFETs over the conventional SOI MOSFETs by demonstrating simulation and experimental results of the short channel effect, S-factor, and the body effect factor on triangular wire channel structure and low-Fin structure.

    CiNii Books

    researchmap

  • Silicon nanocrystal MOSFET memory with ultranarrow wire channel

    SAITOH Masumi, NAGATA Eiji, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   102 ( 641 )   59 - 64   2003.2

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    We propose and demonstrate a silicon floating-dot MOSFET memory with an ultran arrow wire channel whose width is scaled to sub-10 nm. In the fabricated ultranarrow channel memory, larger threshold voltage shift and longer retention time have been observed than in the wide channel memory. From numerical calculations, it turns out that these characteristics are caused by the classical bottleneck effect and the quantum confinement effect in the ultranarrow channel. In the narrowest (5 nm) channel device, the stepwise increase in the drain current has been clearly observed due to the emission of a single electron from a dot.

    CiNii Books

    researchmap

  • Optimum Device Consideration for Standby Power Reduction Scheme Using Drain Induced Barrier Lowering (DIBL)

    LIU Qingyan, SAKURAI Takayasu, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   102 ( 489 )   17 - 22   2002.11

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The optimum device for a standby power reduction scheme utilizing drain-induced barrier lowering (DIBL) has been investigated. In this scheme, supply voltage is lowered in the standby mode to relax DIBL effect, resulting in the increase in threshold voltage and the reduction of subthreshold leakage current. It is found that a critical supply voltage, Vo, exists that determines the optimum DIBL value for the standby power suppression. It is also shown that the fluctuations of standby power due to the threshold voltage variation can be suppressed in this circuit scheme utilizing DIBL.

    CiNii Books

    researchmap

  • Influence of Finite Inversion Layer Thickness on Variable Threshold Voltage CMOS (VTCMOS)

    NAGUMO Toshiharu, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   102 ( 489 )   11 - 16   2002.11

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The current drive of MOSFET degrades due to finite inversion layer thickness and gate depletion. On the other hand, due to these two effects, the body effect is enhanced. A new scheme for recovering the current drive using this enhanced body effect, in high-speed mode variable threshold voltage CMOS (VTCMOS), has been proposed. By comparing the measured body effect factor on long channel fully-depleted SOI MOSFETs and its analytical form, the enhancement of body effect factor has been verified. It has been confirmed that current drive is effectively recovered by means of 2-D device simulation. The impact of scaling of gate oxide thickness and short channel effect are discussed, and it has been clarified that effectiveness of this scheme will increase in the future by proper scaling of film thickness.

    CiNii Books

    researchmap

  • Memory Devices Using Silicon Nano-Dots

    HIRAMOTO Toshiro

    The Journal of the Institute of Electronics,Information and Communication Engineers   85 ( 11 )   794 - 799   2002.11

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CiNii Books

    researchmap

  • Threshold Voltage Control Range in Variable Threshold Voltage Fully-Depleted SOI MOSFETs

    NAGUMO Toshiharu, INUKAI Takashi, OHSAWA Atsumasa, HIRAMOTO Toshiro

    Technical report of IEICE. ICD   102 ( 273 )   19 - 24   2002.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The controllable range of the threshold voltage (V_<th>) in fully-depleted SOT MOSFETs is limited by the inversion or accumulation condition of the SOI-buried oxide interface. We studied the film thickness dependence of the control range of V_<th>, analytically, with introducing a new device parameter γ'. Measured and simulated results of long channel devices were compared, and the origin of discrepancy between analysis and experiment was also discussed qualitatively taking the electron distribution in SOI film into consideration.

    CiNii Books

    researchmap

  • Threshold Voltage Control Range in Variable Threshold Voltage Fully-Depleted SOI MOSFETs

    NAGUMO Toshiharu, INUKAI Takashi, OHSAWA Atsumasa, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   102 ( 271 )   19 - 24   2002.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The controllable range of the threshold voltage (V_<th>) in fully-depleted SOI MOSFETs is limited by the inversion or accumulation condition of the SOI-buried oxide interface. We studied the film thickness dependence of the control range of V_<th> analytically, with introducing a new device parameter γ'. Measured and simulated results of long channel devices were compared, and the origin of discrepancy between analysis and experiment was also discussed qualitatively taking the electron distribution in SOI film into consideration.

    CiNii Books

    researchmap

  • Special Issue on Advanced Sub-0.1μm CMOS Devices

    HIRAMOTO Toshiro

    IEICE transactions on electronics   85 ( 5 )   1051 - 1051   2002.5

     More details

    Language:English   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CiNii Books

    researchmap

  • Suppression of Short Channel Effect in Triangular Parallel Wire Channel MOSFETs

    SAITO Toshiki, SARAYA Takuya, INUKAI Takashi, MAJIMA Hideaki, NAGUMO Toshiharu, HIRAMOTO Toshiro

    IEICE Trans. Electron.   85 ( 5 )   1073 - 1078   2002.5

     More details

    Language:English   Publisher:The Institute of Electronics, Information and Communication Engineers  

    We have proposed the high-density triangular parallel wire channel MOSFET on an SOI substrate and demonstrated the suppressed short channel effects by simulation and experiment. In this device structure, the fabrication process is fully compatible with the planar MOSFET process and is much less complicated than other non-planer device structures including gate-all-around (GAA) and double-gate SOI MOSFETs. In addition, our fabrication process makes it possible to double the wire density resulting in the higher current drive. The three-dimensional simulation results show that the proposed triangular wire channel MOSFET has better short channel characteristics than single-gate and double-gate SOI MOSFETs. The fabricated triangular parallel wire channel MOSFETs show better subthreshold characteristics and less drain induced barrier lowering (DIBL) than the single-gate SOI MOSFETs.

    CiNii Books

    researchmap

  • Device Technology for Sub-100nm Low Power Circuits

    Hiramoto Toshiro

    Proceedings of the IEICE General Conference   2002   508 - 509   2002.3

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CiNii Books

    researchmap

  • Device Design Using Quantum Mechanical Narrow Channel Effects in Ultra-Narrow MOSFETs

    MAJIMA Hideaki, SAITO Yuta, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   101 ( 573 )   81 - 88   2002.1

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The impact of quantum mechanical effects and device design guidelines in nano-scale narrow channel n-type and p-type MOSFETs are presented. Ultra-narrow channel MOSFETs with n- and p-type source/drain have been successfully fabricated and threshold voltage increase due to quantum confinement has been clearly observed in both n- and p-type devices. By analytical calculations, device design for threshold voltage adjustment in n- and p-type MOSFETs using quantum mechanical effects is discussed. The calculations also demonstrate that ultra-narrow channel along <100> direction has large advantage in device design over <110> direction due to higher mobility.

    CiNii Books

    researchmap

  • Origin of Critical Substrate Bias in Variable Threshold Voltage CMOS

    INUKAI Takashi, IM Hyunsik, HIRAMOTO Toshiro

    2001   106 - 107   2001.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Device Consideration of Variable Threshold Voltage CMOS Circuits

    HIRAMOTO Toshiro

    Technical report of IEICE. SDM   101 ( 247 )   43 - 49   2001.7

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The optimum device parameters of variable threshold voltage CMOS(VTCMOS)have been investigated by means of device simulation and its scalability has been discussed. The optimum body effect factor depends on the relationship between the substrate bias and the supply voltage. It is shown that the VTCMOS scheme aiming at extremely low stand-by power will fail as the divice size and the supply voltage scaled. The advantage of VTCMOS will be its high speed, and the VTCMOS will be essential in the high-speed circuits operating at low supply voltage in the combination with another low stand-by scheme such as leak cut-off switches.

    CiNii Books

    researchmap

  • Low-Power-LSI Technologies in Sub-100-nm Era : Is it for Differentiation or Just for Admission?

    ENOMOTO Tadayosi, YANO Kazuo, HIRAMOTO Toshiro, KURODA Tadahiro, UCHIYAMA Kunio, MATSUZAWA Akira, DOUSEKI Takakuni, OHIRA Hideo

    101 ( 247 )   83 - 86   2001.7

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • Memory Devicse Using Silicon Nano-Structures

    HIRAMOTO Toshiro

    Technical report of IEICE. ICD   101 ( 1 )   67 - 74   2001.4

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    This paper describes the operation principle and characteristics of silicon nanocrystal dot memories that have attracted much attention for the future non-volatile memory device. Although the present FLASH memories suffer from slow write speed, bad endurance, and high write voltage, the new nanocrystal dot memories have potential to overcome these disadvantages. Moreover, the precise control of few electrons in the dots is possible by the Coulomb blockade. The experimental characteristics of silicon dot memories are reviewed.

    CiNii Books

    researchmap

  • Quantum Mechanical Narrow Channel Effect in Ultra Narrow MOSFETs

    MAJIMA H., HIRAMOTO T.

    Technical report of IEICE. SDM   100 ( 668 )   23 - 30   2001.3

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Quantum mechanical narrow channel effect has large impact on threshold voltage in ultra-narrow MOSFETs. We have successfully demonstrated threshold voltage increase caused by the quantum mechanical narrow channel effect. Threshold voltage increase is observed at room temperature in ultra-narrow MOSFETs whose channel width is less than 10 nm. The result is in excellent agreement with numerical calculation which takes into account quantum confinement in a silicon narrow wire.

    CiNii Books

    researchmap

  • Transport characteristics of silicon single-electron transistors with gate oxides formed by LP-CVD

    SAITOH Masumi, TAKAHASHI Nobuyoshi, HIRAMOTO Toshiro

    IEICE technical report. Electron devices   100 ( 642 )   15 - 20   2001.2

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    We fabricated silicon point-contact channel MOSFETs with gate oxides formed by LP-CVD and successfully demonstrated Coulomb blockade oscillations at room temperature. In one device, the peak-to-valley current ratio of Coulomb blockade oscillations at room temperature is about 2, and single-electron addition energy is as large as 251 meV. In another device, staircase feature due to discrete quantum levels in a dot is observed at low temperatures. The formation mechanisms of silicon dot and tunnel barriers are not clear at present, calling for further investigation.

    CiNii Books

    researchmap

  • Effects of Dot Size and its Distribution on Electron Number Control and Distribution of Potential in MOSFET Memories Based on Silicon Nanocrystal Floating Dots

    WANG Haining, MAJIMA Hideaki, INUKAI Takashi, GOMYO Hiroyuki, SAITOH Masumi, HIRAMOTO Toshiro

    IEICE technical report. Electron devices   100 ( 641 )   109 - 113   2001.2

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Effects of dot size and dot size distribution on electron number control in silicon floating dot memories at room temperature are investigated by numerical calculation. As the dot size increases and the size distribution increases, the staircase feature disappears due to the averaging effects. It is found that, to obtain a distinct staircase feature, the size distribution should be less than 7% for the 8-nm-diameter dot size and 12% for the 3-nm-diameter dot. These results provide good guidelines for setting device parameters for fabricating silicon floating dot memories.

    CiNii Books

    researchmap

  • 超高集積Siデバイス (IT基盤研究開発 FED2001--2001年度新機能素子シンポジウム講演録)

    平本 俊郎

    FEDジャ-ナル   12 ( 4 )   97 - 108   2001

     More details

    Language:Japanese   Publisher:新機能素子研究開発協会  

    CiNii Books

    researchmap

  • Boosted Gate MOS (BGMOS) : Leakage-Free Circuits by Device/Circuit Cooperation Scheme

    INUKAI T., TAKAMIYA M., NOSE K., KAWAGUCHI H., SAKURAI T., HIRAMOTO T.

    IEICE technical report. Electron devices   100 ( 266 )   1 - 8   2000.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    An increase of stand-by power is one of the most important issues in future LSI devices. In this paper, a new device/circuit cooperation scheme, Boosted Gate MOS(BGMOS), is proposed to achieve leakage free circuits. In the proposed scheme, CMOS circuits consist of MOSFETs with low V_<th> and ultra-thin oxide to obtain hign speed and low voltage operation. On the other hand, low leakage devices with hign V_<th> and thick oxide are inserted in series with CMOS circuits and driven by higher gate voltage to achieve extremely low stand-by power while maintaining small area penalty. The application of the proposed scheme to other components such as SRAMs is also discussed.

    CiNii Books

    researchmap

  • Optimum Conditions of Body Effect Factor and Substrate Bias in Variable Threshold Voltage MOSFETs (VTCMOS) and its Scalability

    KOURA Hiroshi, TAKAMIYA Makoto, INUKAI Takashi, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   99 ( 681 )   21 - 28   2000.3

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The effects of a body effect factor (γ) and substrate bias (V_<bs>) in VTCMOS have been examined by a device simulation. When γ is fixed, |ΔV_<bs>| should be as large as the breakdown and leakage current permits to make drive-current maximum. When ΔV_<bs> is fixed by some reasons, such as the breakdown, the optimum γ depends on the value of ΔV_<bs>. The scalability of VTCMOS is also discussed. Due to BTBT(Band-to Band-Tunneling) current, there is the optimum substrate bias where the off-current in the standby mode is minimum. BTBT should be suppressed to use VTCMOS.

    CiNii Books

    researchmap

  • A Directional Current Switch Using Integrated Si SETs

    TAKAHASHI Nobuyoshi, ISHIKURO Hiroki, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   99 ( 617 )   65 - 70   2000.2

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    A directional current switch using integrated SETs is successfully demonstrated. In order to control the peak positions of the Coulomb blockade oscillations, memory effect based on Si nano-crystal floating gates is utilized without using additional gate electrodes. Two SETs are integrated under a common gate electrode, and the peak positions of the two SETs are independently controlled by charge injection/ejection at asymmetrical bias condition. This technique is very important for practical integration of SETs.

    CiNii Books

    researchmap

  • Optimum Conditions of Body Effect Factor and Substrate Bias in Variable Threshold Voltage MOSFETs

    KOURA Hiroshi, TAKAMIYA Makoto, HIRAMOTO Toshiro

    1999   446 - 447   1999.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Suppression of Stand-by Tunnel Current in Ultra-Thin Gate Oxide MOSFETs by Dual Oxide Thickness MTCMOS(DOT-MTCMOS)

    INUKAI Takashi, HIRAMOTO Toshiro

    1999 SSDM, Sept.   1999   264 - 265   1999.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • High Performance Electrically Induced Body Dynamic Threshold MOSFET (EIB-DTMOS) with Large Body Effect

    TAKAMIYA Makoto, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   98 ( 652 )   1 - 8   1999.3

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    We have proposed and fabricated a high performance EIB-DTMOS with large body erfect and low Vth. Electrically induced body with high carrier concentration at back interface and thin SOI layer reduce the channel depletion layer width and maximize the body effect. Among several DTMOS's, the accumulation mode EIB-DTMOS shows the highest current drive at fixed off-current due to the large Vth shift and the suppressed short channel effect. Therefore, the accumulation mode EIB-DTMOS is a high performance MOSFET, which can achieve both high current drive and low off-current at very low supply voltage below O.5V.

    CiNii Books

    researchmap

  • Measurement of Energetic and Lateral Distribution of Interface State Density in FD SOI MOSFETs

    DUYET Tran Ngoc, ISHIKURO Hiroki, SHI Yi, SARAYA Takuya, TAKAMIYA Makoto, HIRAMOTO Toshiro

    1998   322 - 323   1998.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Characteristics of Narrow Channel MOSFET Memory Based on Silicon Nanocrystals

    SHI Yi, SAITO Kenichi, ISHIKURO Hiroki, HIRAMOTO Toshiro

    1998   172 - 173   1998.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • High Performance Accumulated Back-Interface Dynamic Threshold SOI MOS-FET's (AB-DTMOS) with Large Body Effect at Low Supply Voltage

    TAKAMIYA Makoto, SARAYA Takuya, DUYET Tran Ngoc, YASUDA Yuri, HIRAMOTO Toshiro

    1998   312 - 313   1998.9

     More details

    Language:English  

    CiNii Books

    researchmap

  • Scaling of delta-doped channel MOSFET with suppressed statistical Vth fluctuations

    YASUDA Yuri, TAKAMIYA Makoto, HIRAMOTO Toshiro

    Technical report of IEICE. ICD   98 ( 195 )   13 - 18   1998.7

     More details

    Language:English   Publisher:The Institute of Electronics, Information and Communication Engineers  

    We have analyzed the Vth fluctuations due to the statistical fluctuations in the number of channel impurity atoms in scaled delta-doped MOSFET and proposed a new scaling method with constant Vth fluctuations.Although the Vth fluctuations increase if the deltadoped MOSFET is simply scaled down, they can be kept constant when the device is scaled as N2〜K^<1.3> and tl〜K^<-0.4>, where N2 is impurity concentration of the bottom layer with a high concentration, tl is the thickness of the upper layer with a low concentration, and K is the scaling factor.The scaling method proposed in this study can be applied to the retrogradechannel MOSFET.

    CiNii Books

    researchmap

  • Scaling of delta-doped channel MOSFET with suppressed statistical Vth fluctuations

    YASUDA Yuri, TAKAMIYA Makoto, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   98 ( 193 )   13 - 18   1998.7

     More details

    Language:English   Publisher:The Institute of Electronics, Information and Communication Engineers  

    We have analyzed the Vth fluctuations due to the statistical fluctuations in the number of channel impurity atoms in scaled delta-doped MOSFET and proposed a new scaling method with constant Vth fluctuations. Although the Vth fluctuations increase if the delta-doped MOSFET is simply scaled down, they can be kept constant when the device is scaled as N2-K^1.3 and t1-K^-0.4, where N2 is impurity concentration of the bottom layer with a high concentration, t1 is the thickness of the upper layer with a low concentration, and K is the scaling factor. The scaling method proposed in this study can be applied to the retrograde-channel MOSFET.

    CiNii Books

    researchmap

  • Operation principles of scaled MOS transistors

    HIRAMOTO Toshiro

    67 ( 5 )   571 - 575   1998.5

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • Characterization of Quantum Effect in Silicon Single Electron Transistor

    ISHIKURO Hiroki, HIRAMOTO Toshiro

    IEICE technical report. Electron devices   98 ( 28 )   21 - 25   1998.4

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Silicon single electron transistors are fabricated in the form of point-contact MOSFET. Coulomb blockade oscillations are observed at room temperature, and fine structures and negative differntial conductance due to quantum effect and resonant tunneling are observed at low temperatures. The energy states in the dot are derived from the experimental data. The single electron charging energy and energy separation between quantum levels in the dot are larger than the thermal energy at room temperarute. It is suggested that the quantitative understanding of quantum effects is essential for the design of 10 nm size MOSFET and single electron devices.

    CiNii Books

    researchmap

  • Deep Sub-0.1μm MOSFET's with Very Thin SOI Layer for Ultra-Low Power Applications

    TAKAMIYA Makoto, YASUDA Yuri, HIRAMOTO Toshiro

    The Transactions of the Institute of Electronics,Information and Communication Engineers. C-(0xF9C2)   81 ( 3 )   313 - 319   1998.3

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CiNii Books

    researchmap

  • New Measurement Technique for Sub-Bandgap Impact Ionization Current by Transient Characteristics of Partially Depleted SOI MOSFETs

    SARAYA Takuya, TAKAMIYA Makoto, DUYET Tran Ngoc, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   97 ( 557 )   35 - 39   1998.2

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    We have developed a novel, sensitive measurement technique for the sub-bandgap impact ionization current in scaled metal-oxide-semiconductor field effect trasistors (MOSFETs). In this technique, partially depleted silicon on insulator MOSFETs is utilized where the floating body potential is gradually charged by the impact ionization current. The transient increase of the body potential causes a decrease in the threshold voltage due to the body effect, resulting in transient increase in the drain current. The derived impact ionization current is in good agreement with the direct current measurement. Furthermore, the new measurement technique is very sensitive even in the sub-bandgap region and measurements of less than 50fA are demonstrated.

    CiNii Books

    researchmap

  • Scaling Methodology for Low Power Fully Depleted SOI MOSFET's and Comparison with Bulk MOSFET's

    TAKAMIYA Makoto, YASUDA Yuri, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   97 ( 272 )   87 - 94   1997.9

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    We have developed the scaling methodology for FD SOI MOSFETs for very low power applications and shown a scaling scenario to the deep sub-0.1μm regime. Based on the methodology, we have proposed device structures of ultra thin FD SOI MOSFETs. We compared FD SOI MOSFETs with bulk MOSFETs by the 2D device simulation and shown that, unlike bulk MOSFETs, FD SOI MOSFETs will be miniaturized further by thinning SOI thickness without degrading the steep subthreshold slope and increasing Vth fluctuations, even if the gate oxide thickness is not scaled. Ultra small FD SOI MOSFETs will realize ultra low power LSIs, because of the steep subthreshold swing, low parasitic capacitances, and the miniaturization.

    CiNii Books

    researchmap

  • Highly controlled fabrication process of Si nano structures using anisotropic etching

    SAITO Kenichi, ISHIKURO Hiroki, MUKAIYAMA Toshikazu, HIRAMOTO Toshiro

    Technical report of IEICE. SDM   97 ( 240 )   59 - 66   1997.8

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    It is strongly required to establish the fabrication techniques of very small structures such as single electron devices without using EB lithography. In this study, we have developed the fabrication process of very small structures beyond the lithography limit using SOI wafer and anisotropic etching. In this process, the size of structures is determined only by the thickness of the SOI layer. Moreover, using SiN film and SiO_2 film, we have fabricated as small as several tens of nano-meter structures with high controllability.

    CiNii Books

    researchmap

  • Floating Body Effect in 0.15μm Partially Depleted SOI MOSFETs below 1V

    49 ( 4 )   231 - 234   1997.4

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • Sub-band Gap Impact Ionization and Floating Body Effect in 0.15μm Partially Depleted SOI MOSFETs

    SARAYA Takuya, TAKAMIYA Makoto, DUYET Tran Ngoc, HIRAMOTO Toshiro, IKOMA Toshiaki

    Technical report of IEICE. SDM   96 ( 570 )   15 - 20   1997.3

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    The SOI MOSFET has attracted much attention as a very low power, low voltage device. However, most of the previous studies on the floating body effects have been reported in the regime of 1.5-3V. In this study, we have investigated the floating body effects in 0.15μm PD MOSFETs below 1V. In this measurements, the body current due to the impact ionization is clearly observed even when the drain potential is less than the band gap energy (1.1 eV). The floating body effects such as the kink or the transient effects have a significant influence on the device characteristics in scaled MOSFETs even when the supply voltages reduced below 1V. These results suggest the floating body effects still remain as a serious problem even in the generation of 1V operation.

    CiNii Books

    researchmap

  • Sub-0.1μmSOI MOSFET : Scaling Methodology and Floating Body Effects

    Hiramoto T., Saraya T., Takamiya M., Ikoma T.

    Proceedings of the IEICE General Conference   1997 ( 2 )   338 - 339   1997.3

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CiNii Books

    researchmap

  • Fabrication of the Si Ultra-sm all MOSFET by Using Anisotropic Etching and Room Temperature Observation of the Coulomb Blockade Oscillations

    49 ( 3 )   174 - 177   1997.3

     More details

    Language:Japanese  

    CiNii Books

    researchmap

  • Research Trend of Thin Film SOI CMOS Devices for VLSI Applicatiions

    Hiramoto Toshiro

    Monthly journal of the Institute of Industrial Science, University of Tokyo   48 ( 11 )   568 - 569   1996.11

     More details

    Language:Japanese   Publisher:The University of Tokyo  

    CiNii Books

    researchmap

  • Device and Process Design and Characterization of 0.1μm Thin Film SOI MOSFETs

    Takamiya Makoto, Saraya Takuya, Ngoc Duyet Tran, Tanaka Tsuyoshi, Ishikuro Hiroki, Hiramoto Toshiro, Ikoma Toshiaki

    Monthly journal of the Institute of Industrial Science, University of Tokyo   48 ( 10 )   502 - 506   1996.10

     More details

    Language:Japanese   Publisher:The University of Tokyo  

    CiNii Books

    researchmap

    Other Link: http://hdl.handle.net/2261/52992

  • Room Temperature Observation of Coulomb Blockade in a Si Wire MOSFET Beyond the Lithography Limit

    Ishikuro Hiroki, Hiramoto Toshiro, Fujii Tomoyuki, Saraya Takuya, Hashiguchi Gen, Ikoma Toshiaki

    Proceedings of the Society Conference of IEICE   1996 ( 2 )   110 - 110   1996.9

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    CiNii Books

    researchmap

  • Fabrication and Characterization of Low Voltage 0.1μm Thin Film SOI MOSFETs

    TAKAMIYA M., SARAYA T., DUYET T. N., TANAKA T., ISHIKURO H., HIRAMOTO T., IKOMA T.

    IEICE technical report. Electron devices   96 ( 108 )   81 - 86   1996.6

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    Thin film SOI MOSFETs with gate length of 0.1μm are designed and fabricated. The body was doped by ion implantation whose projected range is located around the SOI/buried oxide interface. Simulation results show that this simple process makes a gradient in body impurity concentration and prevents the short channel effects. A 0.095μm SOI MOSFET operates successfully.

    CiNii Books

    researchmap

  • Room Temperature Observation of Coulomb Blockade Oscillations in a Si Very Small MOSFET Fabricated by Anisotropic Etching

    ISHIKURO Hiroki, HIRAMOTO Toshiro, FUJII Tomoyuki, SARAYA Takuya, HASHIGUCHI Gen, IKOMA Toshiaki

    IEICE technical report. Electron devices   96 ( 18 )   37 - 44   1996.4

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    We have fabricated very uniform Si quantum wires using anisotropic etching and selective oxidation on SIMOX substrates and applied this technique to the fabrication of Si quantum wire MOSFETs (W〜10nm). In this technique, the the width of the Si wire is determined only by the thickness of the SOI layer and is not restricted by the lithography limit. We have observed Coulomb blockade oscillations even at room temperature, which become pronounced at 77 K. Furthermore, the oscillation peaks at 77K split into some fine peaks as the temperature decreases. Considering the experimental results, it is concluded that the channel is separated into some quantum dots which weakly couple each other.

    CiNii Books

    researchmap

  • Conductance Oscillations in a Very Small Channel SOI-MOSFET with a Slip-gate

    Ishikuro Hiroki, Hiramoto Toshiro, Ikoma Toshiaki

    Monthly journal of the Institute of Industrial Science, University of Tokyo   47 ( 9 )   428 - 431   1995.9

     More details

    Language:Japanese   Publisher:The University of Tokyo  

    CiNii Books

    researchmap

    Other Link: http://hdl.handle.net/2261/52558

  • Extremely Large Amplitude of Random Telegraph Signals in a Very Narrow Split-Gate MOSFET at Low Temperatures

    ISHIKURO Hiroki, SARAYA Takuya, HIRAMOTO Toshiro, IKOMA Toshiaki

    1995   342 - 344   1995.8

     More details

    Language:English  

    CiNii Books

    researchmap

  • Conductance Oscillations in a Split-Gate MOSFET Fabricated on an SOI Substrate

    ISHIKURO Hiroki, HIRAMOTO Toshiro, FUJITA Hiroyuki, IKOMA Toshiaki

    Technical report of IEICE. SDM   95 ( 10 )   77 - 81   1995.4

     More details

    Language:Japanese   Publisher:The Institute of Electronics, Information and Communication Engineers  

    A very narrow, short channel n-MOSFET has been fabricated utilizing the electrostatic potential confinement by a split-gate on an SOI substrate and it's electrical transport properties have been investigated at very low temperatures (&le;4.2 K). Conductance as a function of the split-gate voltage exhibits oscillations near the pinchoff voltage. The oscillations consist of a periodic component and aperiodic components. Current-voltage (I_<ds>-V_<ds>) characteristics show nonlinearity at small drain voltage when the split-gate voltage was kept at the valley of the conductance oscillations. The origin of the conductance oscillations is discussed in terms of the Coulomb blockade of single electron tunneling and hopping transport .

    CiNii Books

    researchmap

  • A Bipolar-Based 0.5μm BiCMOS Technology on Bonded SOI for High-Speed LSIs (Special Section on High Speed and High Density Multi Functional LSI Memories)

    Yoshida Makoto, Hiramoto Toshiro, Fujiwara Tsuyoshi, Hashimoto Takashi, Muraya Tetsuya, Murata Shigeharu, Watanabe Kunihiko, Tamba Nobuo, Ikeda Takahide

    IEICE transactions on electronics   77 ( 8 )   1395 - 1403   1994.8

     More details

    Language:English   Publisher:The Institute of Electronics, Information and Communication Engineers  

    A new BiCMOS process based on a high-speed bipolar process with 0.5μm emitter width has been developed using a bonded SOI substrate. Double polysilicon bipolar transistors with the trench isolation, shallow junctions and the pedestal collector implantation provide a high cut-off frequency of 27 GHz. Stress induced device degradation is carefully examined and a low stress trench isolation process is proposed.

    CiNii Books

    researchmap

  • GAAS QUANTUM WIRE TRANSISTORS FABRICATED BY FOCUSED ION-BEAM IMPLANTATION

    T ODAGIRI, T HIRAMOTO, K HIRAKAWA, T IKOMA

    JOURNAL OF THE ELECTROCHEMICAL SOCIETY   135 ( 8 )   C375 - C375   1988.8

     More details

    Language:English   Publishing type:Research paper, summary (international conference)  

    Web of Science

    researchmap

▼display all

Industrial property rights

  • 半導体装置及び記憶装置並びにその制御方法

    平本 俊郎

     More details

    Application no:特願2014-021398  Date applied:2014.2

    researchmap

  • 電気化学素子および電気化学素子を用いた相補型回路

    平本 俊郎

     More details

    Application no:特願2011-158981  Date applied:2011.7

    researchmap

  • ラッチ回路の電圧特性調整方法および半導体装置の電圧特性調整方法並びにラッチ回路の電圧特性調整器

    平本 俊郎

     More details

    Application no:特願2009-141510  Date applied:2009.6

    Announcement no:特開2011-518580 

    Patent/Registration no:特許5331204  Date issued:2013.8

    researchmap

Awards

  • IEEE EDS Leo Esaki Award

    2023.12   IEEE EDS   Efficient Erase Operation by GIDL Current for 3D Structure FeFETs With Gate Stack Engineering and Compact Long-Term Retention Model

    Fei Mo, Jiawen Xiang, Xiaoran Mei, Yoshiki Sawabe, Takuya Saraya, Toshiro Hiramoto, Chun-Jung Su, Vita Pi-Ho Hu, Masaharu Kobayashi

     More details

  • IEEE EDS Paul Rappaport Award

    2022.12   IEEE EDS   Monolithic Integration of Oxide Semiconductor FET and Ferroelectric Capacitor Enabled by Sn-Doped InGaZnO for 3-D Embedded RAM Application

    Jixuan Wu, Fei Mo, Takuya Saraya, Toshiro Hiramoto, Mototaka Ochi, Hiroshi Goto, Masaharu Kobayashi

     More details

  • 産業標準化事業表彰(経済産業大臣表彰賞)

    2022.10   経済産業省   電子実装技術

    平本俊郎

     More details

  • Arnaud Darmont Award for Best Paper, Electronics Imaging 2022, Imaging Sensors and Systems Conference 2022

    2022.1   Imaging Sensors and Systems Conference   3-Layer stacked pixel-parallel CMOS image sensors using hybrid bonding of SOI wafers

    Masahide Goto, Yuki Honda, Masakazu Nanba, Yoshinori Iguchi, Takuya Saraya, Masaharu Kobayashi, Eiji Higurashi, Hiroshi Toshiyoshi, Toshiro Hiramoto

     More details

  • IEEE EDS Leo Esaki Award

    2020.12   IEEE EDS   Ferroelectric HfO2 Tunnel Junction Memory with High TER and Multi-level Operation Featuring Metal Replacement Process

    Masaharu Kobayashi, Yusaku Tagawa, Fei Mo, Takuya Saraya, Toshiro Hiramoto

     More details

  • 2017 IEEE Best Paper Award for the IEEE Transactions on Nanotechnology

    2018.7   IEEE Nanotechnology Council   Negative Capacitance for Boosting Tunnel FET Performance

    HIRAMOTO Toshiro

     More details

  • ICSICT 30-Year Anniversary Contribution Award

    2016.10  

    HIRAMOTO Toshiro

     More details

  • Paper Award

    2015.3   3-D Silicon-on-Insulator Integrated Circuits With NFET and PFET on Separate Layers Using Au/SiO2 Hybrid Bonding

    HIRAMOTO Toshiro

     More details

  • 藤尾フロンティア賞

    2014.6   映像情報メディア学会   画素並列信号処理3次元構造撮像デバイスの研究

    平本 俊郎

     More details

  • 応用物理学会フェロー

    2009.9   応用物理学会  

    平本 俊郎

     More details

  • 電子情報通信学会エレクトロニクスソサイエティ賞

    2009.9   電子情報通信学会  

    平本 俊郎

     More details

  • 丸文学術奨励賞

    2000  

     More details

    Country:Japan

    researchmap

▼display all

Research Projects

  • Generation and extraction of device fingerprints (quantum fingerprints) based on physics of spin qubits

    Grant number:22K03497  2022.4 - 2026.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (C)

      More details

    Grant amount:\3250000 ( Direct Cost: \2500000 、 Indirect Cost:\750000 )

    researchmap

  • 三次元集積化に向けたスケーラブルな積層構造シリコン量子ビットに関する研究

    Grant number:19H00754  2019.4 - 2023.3

    日本学術振興会  科学研究費助成事業  基盤研究(A)

    平本 俊郎

      More details

    Grant amount:\45110000 ( Direct Cost: \34700000 、 Indirect Cost:\10410000 )

    本研究の目的は,シリコン量子ビットのスケーラブルな三次元集積化を目指して,積層構造の集積量子ビットを提案し,試作・実測を通してその概念を実証することである.本研究では,三次元に拡張可能な構造として上下に量子ビットを積む積層量子ビットを提案する.シリコン積層構造集積量子ビットの作製プロセスでキーとなるプロセスは,電子ビーム露光およびドライエッチングによる微細ナノワイヤチャネル・微細ゲート電極作製プロセス,およびSi/SiGe積層膜による上下にチャネルを複数作製するプロセスである.昨年度は,前者の微細ナノワイヤチャネル・微細ゲート構造作製プロセスをHSQという高解像度の電子ビーム露光レジストを用いて立ちあげた.ところが,このプロセスはレジスト現像後のプロセスマージンがやや不足していることがわかり,より高度な積層量子ビット作製プロセスに適用することは難しいと判断した.そこで本年度は,電子ビーム露光レジストをma-N2400と呼ばれるレジストに変更し,よりフレキシブルな微細ゲート構造作製プロセスの確立を目指した.その結果,HSQを用いた従来プロセスと比較して解像度は問題なく,またプロセスマージンを保ったままプロセス簡略化も実現できることがわかり,ピッチ100nm以下という極微細複数ゲート電極パターンを作製することに成功した.本年度開発した微細ゲート構造作製プロセスを積層量子ビット作製プロセスに適用することに決定した.

    researchmap

  • マルチモーダルな超低消費電力エッジシステムに向けたAIコンピューティング技術の研究開発

    2018.7 - 2019.7

    NEDO  革新的AIエッジコンピューティグ技術の開発 

    平本 俊郎

      More details

    Authorship:Principal investigator  Grant type:Competitive

    researchmap

  • 電源電圧0.1V動作に向けたトランジスタの特性ばらつきの自己収束機構に関する研究

    2017.4 - 2019.3

    JSPS  科研費挑戦的萌芽研究 

    平本 俊郎

      More details

    Authorship:Principal investigator  Grant type:Competitive

    researchmap

  • 超低消費電力データ収集システムの研究開発

    2016.7 - 2019.3

    NEDO  IoT推進のための横断技術開発プロジェクト 

    平本 俊郎

      More details

    Authorship:Principal investigator  Grant type:Competitive

    researchmap

  • Research and development of ultralow power circuit built by steep subthreshold slope FET and embedded FeRAM based on ferroelectric HfO2 thin film

    Grant number:16K18085  2016.4 - 2018.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Young Scientists (B)

    Kobayashi Masaharu, HIRAMOTO Toshiro

      More details

    Grant amount:\4160000 ( Direct Cost: \3200000 、 Indirect Cost:\960000 )

    We have studied and developed transistor and memory technology for ultralow power integrated circuit system in IoT sensor node module. For transistor, we have clarified device design guideline of negative capacitance FET (NCFET) which can operate at below supply voltage 0.2V. We have fabricated and demonstrated NCFET with steep subthreshold slope, and proposed new physical mechanism on device operation principle. For memory, we have successfully designed, fabricated and demonstrated non-volatile SRAM cell which can significantly suppress standby leakage. Both for transistor and memory, we have introduced ferroelectric HfO2 thin film which enables very low cost process integration for manufacturing. The above-mentioned results are important achievements demonstrating possibility and usefulness and will open new paths for very low-cost ultralow power device technology

    researchmap

  • 室温動作シリコン単電子トランジスタとナノワイヤCMOSによる新機能回路の低電圧化

    2015.4 - 2019.3

    JSPS  科研費基盤研究(A) 

    平本 俊郎

      More details

    Authorship:Principal investigator  Grant type:Competitive

    researchmap

  • しきい値電圧自己調整機構を有する超低電圧動作シリコンナノワイヤトランジスタ

    2015.4 - 2017.3

    JSPS  科研費挑戦的萌芽研究 

    平本 俊郎

      More details

    Authorship:Principal investigator  Grant type:Competitive

    researchmap

  • 新世代Si-IGBTと応用基本技術の研究開発

    2014.4 - 2020.2

    NEDO  低炭素社会を実現する次世代パワーエレクトロニクスプロジェクト 

    平本 俊郎

      More details

    Authorship:Principal investigator  Grant type:Competitive

    researchmap

  • 単一不純物が微細トランジスタ特性の統計的性質に与える影響に関する基礎研究

    2014.4 - 2015.3

    JSPS  科研費挑戦的萌芽研究 

    平本 俊郎

      More details

    Authorship:Principal investigator  Grant type:Competitive

    researchmap

  • SRAM セルへの一括高電圧ストレス印加による不揮発性メモリの研究

    2013.4 - 2016.3

    半導体理工学研究センター  フィージビリティ・スタディ 

    平本 俊郎

      More details

    Authorship:Principal investigator  Grant type:Competitive

    researchmap

  • サブ100mV動作を目指した超低電圧MOSトランジスタの基礎研究

    2013.4 - 2014.3

    JSPS  科研費挑戦的萌芽研究 

    平本 俊郎

      More details

    Authorship:Principal investigator  Grant type:Competitive

    researchmap

  • 室温動作集積単電子トランジスタと大規模CMOS回路との融合による新機能創出

    2011.4 - 2015.3

    JSPS  科研費基盤研究(A) 

    平本 俊郎

      More details

    Authorship:Principal investigator  Grant type:Competitive

    researchmap

  • Technology Evolution for Silicon Nano-Electronics

    Grant number:18063013  2006 - 2010

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research on Priority Areas

    ZAIMA Shigeaki, HORI Masaru, TAKAGI Shinichi, MASU Kazuya, MIYAZAKI Seiichi, HIRAMOTO Toshiro, TABATA Hitoshi

      More details

    Grant amount:\50800000 ( Direct Cost: \50800000 )

    researchmap

  • Nano MOSFET Fluctuations and Device Integrity

    Grant number:18063006  2006 - 2009

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research on Priority Areas

    HIRAMOTO Toshiro, SARAYA Takuya

      More details

    Grant amount:\51200000 ( Direct Cost: \51200000 )

    Random variability has been studied by measurements and simulation. It has been clarified that SOI MOSFETs with very thin buried oxide is less sensitive to random dopant fluctuations. A new method of self-suppression of variability after chip fabrication has been proposed and its validity has been demonstrated by simulation.

    researchmap

  • A research on silicon nano-devices for single-electron, quantum, CMOS integrated circuits operating at room temperature

    Grant number:16201029  2004 - 2007

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (A)

    HIRAMOTO Toshiro, SAKURAI Takayasu, SARAYA Takuya

      More details

    Grant amount:\49530000 ( Direct Cost: \38100000 、 Indirect Cost:\11430000 )

    This research aims at a new concept of integrate circuit in which new functional devices utilizing single-electron/quantum effect and conventional CMOS devices are merged operating at room temperature. At first, the fabrication process of single-electron transistors was developed. The world largest peak-to-valley current ratios of Coulomb blockade oscillations and negative differential conductance at room temperature were successfully obtained. Furthermore, the precise control of the peak position of the Coulomb blockade oscillations was achieved for the first time in single-hole transistors which have very small quantum dots. The unique characteristics originate from large quantum energy spacing in the quantum dot. Next, the integration of single-electron transistors operating at room temperature was pursued. The process conditions were finely tuned and finally, the single-electron transistors operating at room temperature were successfully integrated for the first time. Moreover, analog pattern matching circuits were fabricated by integrating single-electron transistors and their operations were demonstrated at room temperature.

    researchmap

  • 超低消費電力向け微細MOSトランジスタの研究

    Grant number:02F02821  2002 - 2004

    日本学術振興会  科学研究費助成事業  特別研究員奨励費

    平本 俊郎, ANIL Kumar

      More details

    Grant amount:\600000 ( Direct Cost: \600000 )

    本研究では、ゲート長10nmスケールの超低消費電力MOSトランジスタを実現するために、ナノスケールMOSFETの正確な短チャネル効果の解析的モデリングを行った。本年度は、昨年度のバルクMOSFETに引き続いて,完全空乏型SOI MOSFETにおける短チャネル効果に着目し、しきい値電圧の劣化、サブスレッショルド係数の劣化、および基板バイアス係数の劣化について解析的な検討を行った。完全空乏型SOI MOSFETのしきい値電圧に関しては、従来からよく研究されているが、基板バイアス係数の解析および、サブスレッショルド係数と基板バイアス係数の関係の解析は、本研究が世界で初めての成果である。具体的には、短チャネルの完全空乏型SOI MOSFETにおける基板バイアス係数を解析的求め、これをシミュレーション結果と比較して解析の妥当性を確認した。次に、長チャネルのMOSFETで知られているサブスレッショルド係数と基板バイアス係数の関係を短チャネルに拡張し、両者の関係の一般的な数式を導いた。この関係もシミュレーションにより確認し、その有効性を実証した。これらの結果は、完全空乏型SOI MOSFETに基板バイアスを印加して超低消費電力デバイスを実現する上で、極めて重要なデバイス設計指針を与えるものである。

    researchmap

  • 超低消費電力向け微細MOSトランジスタの研究

    Grant number:02F00821  2002 - 2004

    日本学術振興会  科学研究費助成事業  特別研究員奨励費

    平本 俊郎, KUMAR Anil, ANIL Kumar

      More details

    Grant amount:\1300000 ( Direct Cost: \1300000 )

    本研究では、ゲート長10nmスケールの超低消費電力MOSトランジスタを実現するために、ナノスケールMOSFETの正確な短チャネル効果の解析的モデリングを行っている。本年度は、バルクMOSFETにおける短チャネル効果に着目し、しきい値電圧の劣化、サブスレッショルド係数の劣化、および基板バイアス係数の劣化について解析的な検討を行った。しきい値電圧に関しては、従来からよく研究されているが、基板バイアス係数の解析および、サブスレッショルド係数と基板バイアス係数の関係の解析は、本研究が世界で初めての成果である。具体的には、短チャネルのバルクMOSFETにおける基板バイアス係数を解析的求め、これをシミュレーション結果と比較して解析の妥当性を確認した。次に、長チャネルのMOSFETで知られているサブスレッショルド係数と基板バイアス係数の関係を短チャネルに拡張し、両者の関係の一般的な数式を導いた。この関係もシミュレーションにより確認し、その有効性を実証した。これらの結果は、バルクMOSFETに基板バイアスを印加して長低消費電力デバイスを実現する上で、極めて重要なデバイス設計指針を与えるものである。どうようの解析を完全空乏型SOI MOSFETについても進めている。

    researchmap

  • シリコン量子ドット中のクーロンブロッケードを利用したメモリデバイス

    Grant number:02F00810  2002 - 2004

    日本学術振興会  科学研究費助成事業  特別研究員奨励費

    平本 俊郎, BRAULT Julien

      More details

    Grant amount:\1300000 ( Direct Cost: \1300000 )

    次世代の不揮発性メモリとして期待されているシリコン微結晶(量子ドット)を用いたメモリの性能を飛躍的に向上させることを目的に、シリコン量子ドットの形成メカニズムを詳細に調べ、サイズが均一なナノスケールシリコンドットを制御性よく形成するために研究を進めている。本メモリデバイスでは、ゲート電極に電圧を印加するとシリコン量子ドットに電子が注入され、シリコンドットがメモリの記憶ノードとして働く。本年度は、減圧化学気相成長法により形成した直径約8nmのシリコン量子ドットを有するシリコン微結晶メモリを実際に作製し、その特性の評価を行った。極めてチャネル幅の細いナノスケールMOSFETに本メモリ構造を適用し、そのサイズ依存性を詳細に評価した結果、チャネル幅が細くゲート長が短いほどメモリの特性が向上することから、本メモリ構造は良好なスケーラビリティを有するという極めて重要な結論を得た。また、チャネル幅が5nm以下という極めて細いシリコン微結晶メモリでは、データの保持時間が極めて長くなることを実験的に示した。この結果は、チャネル中のキャリアの量子閉じ込め効果により説明できる。以上の結果から、ナノスケールのチャネルを有するシリコン微結晶メモリは、将来の不揮発性メモリとして有望なメモリ構造であることを明らかにした。

    researchmap

  • シリコン量子ドット中のクローンブロッケードを利用したメモリデバイスの研究

    Grant number:02F02810  2002 - 2004

    日本学術振興会  科学研究費助成事業  特別研究員奨励費

    平本 俊郎, JURIEN Brault

      More details

    Grant amount:\600000 ( Direct Cost: \600000 )

    本研究の目的は,次世代の不揮発性メモリとして期待されているシリコン微結晶(量子ドット)を用いたメモリの性能を向上させることである.そのために,メモリを構成するトランジスタのチャネル構造をナノスケールに微細化する方法を提案し,実験によりメモリ特性向上を実証する研究を行った.本メモリデバイスでは、通常のMOSトランジスタ構造のゲート絶縁膜中にシリコンドット(微結晶)が埋め込まれた構造を有する.ゲート電極に電圧を印加するとシリコン量子ドットに電子が注入され、シリコンドットがメモリの記憶ノードとして働く。極めてチャネル幅の細いナノスケールMOSFETに本メモリ構造を適用し、そのサイズ依存性を詳細に評価した結果、チャネル幅が細い場合だけでなく,ゲート長が短い場合もメモリの特性が向上することから、本メモリ構造は良好なスケーラビリティを有するという極めて重要な結論を得た。また、チャネル幅が5nm以下という極めて細いシリコン微結晶メモリでは、データの保持時間が極めて長くなることを実験的に示した。この結果は、チャネル中のキャリアの量子閉じ込め効果により説明できる。以上の結果から、ナノスケールのチャネルを有するシリコン微結晶メモリは、将来の不揮発性メモリとして有望なメモリ構造であることを明らかにした。

    researchmap

  • 高・強誘電体膜を用いた極低電圧・超低消費電力FET,及び高性能新機能素子の開発

    Grant number:13025213  2001 - 2003

    日本学術振興会  科学研究費助成事業  特定領域研究

    平本 俊郎, 石原 宏

      More details

    Grant amount:\84200000 ( Direct Cost: \84200000 )

    低電圧で動作する超低消費電力・高性能論理デバイスおよび高機能を有する強誘電体ゲートFETの検討を行った。論理デバイスでは、完全空乏型のSOI MOSFETに基板バイアス効果を適用することにより、超低消費電力と高速性を実現する方策について検討した。SOI MOSFETにおいてしきい値電圧を有効に変化させる方法として、基板バイアス係数可変MOSFETという全く新しいデバイスを提案した。埋込酸化膜直下の空乏層の伸縮を利用して、動作時には基板バイアス係数を小さくして高速動作を可能とし、待機時には基板バイアス係数を大きくして待機時電流を抑制する。デバイスシミュレーションの結果、このデバイスが予想通り動作することを確認した。また、実験により、基板バイアス係数が実際に変化していることを確認した。
    一方、強誘電体ゲートFETは、集積回路の機能を高め、その機能を不揮発性化することができる。本年度は特性改善に関して取り組み、強誘電体膜とシリコン基板との間に挿入するバッファ層にハフニウム酸化膜を用いることにより、データ保持期間を10日以上に長くすることができた。また、このデバイスを不揮発性ラッチ回路に用いる場合の最適回路構成について検討し、CMOSインバータの個々のFETに強誘電体キャパシタを配置するよりも、両FETの入力を一体化したインバータ回路としての入力端子に強誘電体キャパシタを接続する方が回路の安定性を高められることを明らかにした。さらに、この回路を実際に作製して動作の検証を行った。

    researchmap

  • Exploration of Physics and Integration of Nano-Scale MOSEFET with Suppressed Fluctuations

    Grant number:13450135  2001 - 2003

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (B)

    HIRAMOTO Toshiro

      More details

    Grant amount:\14800000 ( Direct Cost: \14800000 )

    The purpose of this research is to investigate the physics in nano-scale MOSEFET with suppressed size fluctuations and to apply new phenomena to integrated circuit devices. We have developed the fabrication process of nano-devices with dimensions less than 10nm by means of electron beam lithography and etching. Quantum effects and single-electron charging effect appear at room temperature in the fabricated devices. In the MOSFET with extremely narrow channel less than 10nm, the increase in threshold voltage is observed due to the rise of ground energy of electrons in narrow channel. We have proposed a new method to control threshold voltage in nano-scale MOSFET using this effect. It is also shown by simulation that electron and hole mobility increases in ultra-narrow channel MOSFET. On the other hand, Coulomb blockade oscillations due to single-electron charging effect is observed at room temperature in point-contact MOSFETs. A silicon dot is self-formed between source and drain and the device acts as a single-electron or single-hole transistor. We fabricated a point-contact MOSFET with a dot of 2nm diameter. The peak-to-valley current ratio of the Coulomb blockade oscillations is over 40 at room temperature. Negative differential conductance due to resonant tunneling is also observed. The two-input logic operation using a single device is demonstrated for the first time using a single-hole transistor.

    researchmap

  • 量子ドット構造による電子の制御と次世代エレクトロニクスへの応用

    Grant number:12CE2004  2000 - 2004

    日本学術振興会  科学研究費助成事業  特別推進研究(COE)

    榊 裕之, 荒川 泰彦, 安藤 恒也, 藤田 博之, 平川 一彦, 平本 俊郎

      More details

    Grant amount:\1706900000 ( Direct Cost: \1463000000 、 Indirect Cost:\243900000 )

    (1)量子ドット関連構造の形成と電子状態の制御に関する研究成果
    (1-1)InAs系量子ドット:成長条件や被覆層の組成の最適化を進め、光通信に整合した1.5μmでの発光と、狭い蛍光線幅(〜16meV)を持つドットを実現した。また、GaAs層による埋込みをしない表面ドットが電子を蓄積し、電気的に活性であることを見出した。
    (1-2)GaSb系およびGaN系量子ドットとリング:成長プロセスを工夫すると、GaSbドットの代りに正孔のみを閉じ込める量子リング構造が自己形成できることを示した。また、GaSbドットをSi中に埋め込んだ系で、電子の状態に直接遷移的要素が交じり、強い蛍光の生じることを示した。さらに、GaNドットの形状を調整し、電子正孔の分離度の制御に成功した。
    (1-3)SiおよびGe系ドット:量子点接触素子内に自然にできるSiドットの形成法を検討し、2nm以下の極微ドットを実現した。Ge系ドットの寸法微細化と高密度化の道を開いた。
    (2)量子ドットと関連構造の伝導特性と素子応用に関する成果
    (2-1)Si単正孔トランジスタ(SHT)とInAs単電子トランジスタ(SET):SiMOS点接触構造内に自己形成するドットの微細化を進め、室温で40対1に及ぶクーロン振動と10対1を越す負性抵抗を示すSHTを実現、さらにGaAs表面の自己形成InAsドットを用いた新構造SETを実現、電子準位のシェル構造などを反映する特性を得た。
    (2-2)ドット埋め込みABリング素子:ABリング構造の一部に量子ドットを埋め込んだ素子を調べ、電子の位相シフトに伴うFano共鳴を反映した伝導とドット内の電子のスピン状態に依存する位相緩和過程を見出した。
    (2-3)量子ドット・量子細線アレー(列)の伝導特性:蜂の巣状のドット格子で、炭素ナノチューブと同様に電子散乱が抑制できること、量子細線列の伝導では、新規の磁気抵抗振動や電子の多体効果に由来する温度依存性を見出した。
    (2-4)量子ドットメモリー素子:極薄または極細伝導路の近傍にInAsやSiのドットを配したメモリー素子で、伝導電子と局在電子の相互作用や情報処理応用の特色を解明した。
    (3)量子ドットと関連構造の光物性と応用素子に関する成果
    (3-1)量子ドットレーザと単一光子発生素子:自己形成InAs量子ドットを用い、温度安定装置無しでも10Gb/sの直接変調可能なレーザを実現、1.3μm帯での単一光子素子を実現した。GaN系ドットで、より高温での単一光子の発生を実証した。
    (3-2)量子ドットと関連構造の光学特性の電界効果:GaN系ドットで、ピエゾ電界による電子・正孔の分離が強く効き、双励起子の発光が青方変位すること、自己形成GaSbドットやリングで電子・正孔間の引力とピエゾ電界が協業すること、InAsドットでの多体効果の電圧依存性に伴い電気光学効果が増すことを示した。また、量子構造での光による屈折率制御の特色も示した。
    (3-3)量子ドットおよび関連構造での中赤外・THz帯光応答:量子ドット内の正孔の数を中赤外光の照射で増減させた高感度の光検出器を実現、バイアス印加の超格子をフェムト秒レーザで励起し、テラヘルツ帯での利得の存在や特色を示した。
    (4)ナノ探針とマイクロマシンによる局所物性の評価と制御および新規ナノ物質の研究
    (4-1)マイクロマシンおよびマルチナノ探針:
    カンチレバーの変形により、埋込んだドットに加わる歪みやフォトニック結晶構造の等価屈折率を変化させ、発光や透過スペクトルの制御に成功した。Siのマイクロマシン技術で複数のナノ探針を作り、液中のDNAの捕捉を可能とした。静電制御カンチレバーと光起電力素子を一体化した素子を開発し、光信号による変形を可能とした。InAsドットとその周辺表面電位に関し、新知見を得た。
    (4-2)ナノ構造新規物質の物性と機能
    探索有機分子をチャネルとするFETの形成法に工夫を加え、高い正孔移動度を実現し、さらに感圧素子や感光素子との一体化により、折曲げ可能な光センサや人工触覚(皮膚)機能を達成した。また、銀表面上の水素分子の核スピンの状態の制御や高感度検出を可能とし、量子情報応用のための基礎的知見を得た。鉄シリサイドやマンガン酸化物材料のナノ構造も形成し、物性上の特色を明らかにした。

    researchmap

  • ディープサブミクロン配線のタイミング特性の研究

    Grant number:10555118  1998 - 2000

    日本学術振興会  科学研究費助成事業  基盤研究(B)

    櫻井 貴康, 平本 俊郎

      More details

    Grant amount:\12600000 ( Direct Cost: \12600000 )

    近年、LSI中のトランジスタの微細化に伴い配線も微細化され、配線の寄生抵抗・寄生容量による配線遅延の増大が問題となってきている。スケーリングによってゲート遅延は減少する一方、配線遅延が増加するため回路全体の高速化が難しくなり、配線遅延増加のための対策が必要となる。
    配線における重要な技術の一つにリピータ挿入という配線長とともに2乗で増加する配線遅延を緩和するが方法ある。長い配線にリピータを挿入することにより分割し、配線遅延の増加を線形程度の増加に抑えることができる。本研究ではリピータ挿入のための遅延時間計算モデルを構築したのち、遅延時間最適化のための分岐を持つ配線へのリピータ挿入の方法についての検討を行った。低消費電力設計に向けたリピータ挿入の問題について、単一配線の場合での研究も行った。消費電力・遅延時間積(PD積)最適化設計のためのリピータ数、リピータサイズの最適値を示し、消費電力と遅延時間の関係についての考察を行った。
    最適リピータ挿入法が明らかになるとリピータ挿入間隔はテクノロジーと配線長によって一義的に決まる。実際に利用される信号配線においてはこのリピータ挿入間隔分の長さを持ち、配線形状、間隔等はテクノロジーによって規定される。このことにより、テクノロジーごとに単一のケースの配線における挙動を調べればよいことがわかった。
    近年、配線におけるインダクタンス成分の影響が声高に叫ばれているが、実際にリピータ挿入により分割された配線におけるインダクタンスが設計に影響を与えるかどうかは未だ調べられていない。本研究では実チップにおけるインダクタンスの影響を実測することにより設計の指導原理を得るべく研究中である。被測定チップ内に波形検出回路を設けた配線の試作回路を作り波形を読み取ることによりインダクタンスの影響を抽出する。
    これらの要素をまとめ、スーパーコネクトの概念を提案した。スーパーコネクトとは従来のLSI技術とパッケージ技術の中間に位置する10um前後の製造・設計技術を指す。従来からのスケーリングの考えからでは増大しつつある配線の消費電力、遅延を抑えることができず、プロセス進化とともに巨大化する配線を提案している。この考え方により、配線の抵抗を軽減し、高速化、消費電力の影響を抑えることができ、配線層数を押さえることができるためチップコストの低減にもつながる。

    researchmap

  • Study on Performance Increase and Fluctuation Suppression in Thin Film SOI MOSFET by utilizing quantum effects

    Grant number:10555117  1998 - 2000

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (B).

    HIRAMOTO Toshiro, FUJISHIMA Minoru, SAKURAI Takayasu, SHIBATA Tadashi, IKEDA Takahide

      More details

    Grant amount:\12600000 ( Direct Cost: \12600000 )

    The purpose of this study is to increase the performance and suppress the fluctuations in scaled MOSFETs by utilizing the quantum effects. We fabricated ultra-narrow channel MOSFETS and observed the threshold voltage increase by the quantum effect, which is confirmed by the numerical simulations. In the experiments, in order to confine electrons not only vertically but also laterally, extremely narrow silicon channels are fabricated by the electron beam lithography and dry etching technique. The channel width is varied from 2nm to 100nm. The channel width is very uniform and its distribution is less than 2nm. The dependences on channel orientation and polarity of carriers are also investigated. The threshold voltane rapidly increases when the channel width is less than 10 nm both in NMOS and PMOS.In order to clarify the origin of these phenomena, the Schrodinger equations are solved by the finite element method and the electron states in narrow channels are obtained. The results show that the threshold voltage increase is caused by the quantum confinement. We refer to this effect as the quantum mechanical narrow channel effect. This effect can be utilized to suppress the fluctuations and control the threshold voltage.

    researchmap

  • Fabrication of Silicon Nano-Devices with High Controllability beyond Lithography Limit

    Grant number:10450112  1998 - 1999

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (B)

    HIRAMOTO Toshiro, FUJISHIMA Minoru, HOH Koichiro

      More details

    Grant amount:\13600000 ( Direct Cost: \13600000 )

    The purpose of this study is to develop a highly controllable method for fabricating ultra-small silicon nano-devices beyond the lithography limit without using fine lithography techniques such as electron beam lithography. We have proposed a new method that makes use of anisotropic etching and multiple layers of silicon oxide and silicon nitride. Fine point contact channel was successfully fabricated by selective oxidation and two anisotropic etching steps on silicon-on-insulator (SOI) substrate. The fabricated MOSFET shows good uniformity. The distribution of drain current is less than 10%. Moreover, Coulomb blockade oscillations due to single electron tunneling are observed at low temperatures. Using this technique, the integration of single electron transistors is also performed. By combining the single electron transistor and a memory device with silicon nano-crystal floating dots, the characteristics of single electron transistors are precisely controlled and the peak positions of Coulomb blockade oscillations are adjusted to the desired positions. Then, two single electron transistors are integrated to form a directional current switch. The fabrication process and device control are very effective for the practical integration of single electron transistors.

    researchmap

  • 量子ドットにおけるクローン閉塞現象を利用した双安定状態の発現に関する研究

    Grant number:10875068  1998

    日本学術振興会  科学研究費助成事業  萌芽的研究

    平本 俊郎

      More details

    Grant amount:\2200000 ( Direct Cost: \2200000 )

    本研究は,シリコンナノ結晶におけるクーロンブロッケード現象を利用したメモリデバイスを実現するための基礎研究を目的とする.実際にシリコンドットを多数有するMOSFETを作製し,ヒステリシス特性をもつメモリデバイス動作を室温で観測することに成功した.また,クーロンブロッケード現象とメモリ特性のばらつきとの関係についても検討を行った.作製したメモリデバイスは,極めて細いMOSFETチャネル上に薄いトンネル酸化膜,多数のシリコンナノ結晶(ドット),厚い酸化膜,およびゲート電極を有している.ゲートに正のパルス電圧を印加すると,チャネル中の電子がトンネル酸化膜を介してシリコンドットに注入されそこに止まるので,MOSFETのしきい値電圧が正の方向にシフトする.一方,ゲートに負の電圧を印加するとドット中の電子はチャネルに逃げ,しきい値電圧は元に戻る.これがメモリ動作(ヒステリシス)の原理である.室温においてメモリ動作を確認した.また,MOSFETのチャネル幅が細くなるほど,しきい値電圧のシフト量は大きくなるが,同時にシフトのばらつきも大きくなることがわかった.これは,シリコンドットの分布のランダムさが原因である.一方,クーロンブロッケードによるシリコンドット中の電子数をシミュレーションにより求め,ドットサイズのばらつきが大きい場合は,ドット中の電子数の制御が困難となることを明らかにした.従って,シリコンドットを有するMOSFETメモリにおいては,ドットの分布およびサイズの制御が極めて重要であることを示した.

    researchmap

  • 磁気歪み効果もつ薄膜材料を利用したマイクロマシンシステムの基礎研究

    Grant number:09875085  1997

    日本学術振興会  科学研究費助成事業  萌芽的研究

    平本 俊郎

      More details

    Grant amount:\2400000 ( Direct Cost: \2400000 )

    本研究では,磁気歪み効果を有する薄膜材料を利用したコンタクトレスの新しいマイクロマシンシステムを構築するための基礎研究を行った.近年,マイクロマシンの研究の進展は目覚ましく,さまざまな方法で微細アクチュエータが試作されているが,コンタクトが不必要なアクチュエータの開発が強く求められている.磁気歪み効果とは,磁場によって材料が伸び縮みする性質のことである.磁場を一様に印加すれば,この効果はコンタクトレスのマイクロマシンに応用が可能であり,将来の重要なマイクロマシン技術となるポテンシャルを秘めている.本研究では,磁気歪み薄膜材料とシリコンVLSI技術を組み合わせた新しいマイクロマシンシステムの構築を目標とした.
    本実験では,磁気歪み効果を利用したアクチュエータとして,単結晶Siのカンチレバ-上に磁気歪み薄膜を堆積した構造を用いた.磁場を印加すると薄膜のみが磁気歪み効果で伸張するので,カンチレバ-は下方向に曲がる.従って磁場をカンチレバ-の共鳴振動数で印加すると,カンチレバ-は磁場の大きさに比例した振幅で振動する.磁気歪み効果をもつ材料としては,(Tb0.27Dy0.73)Fe合金を用いた.この組成のバルク材料をターゲットとして用い,スパッタリング法で薄膜を堆積させた.まずはシリコンの棒状のバルク結晶(長さ数ミリ)に薄膜を堆積し,磁場を印加してその曲がり具合を評価することにより,磁気歪み薄膜の歪み率を測定した.一方,Siプロセスとの互換性を得るため,スパッタ薄膜のドライエッチングプロセスを確立した.また,スパッタ後の熱処理等のプロセスによる磁気歪み率等への影響を詳細に評価し,Siプロセスとの整合性を検討した.
    以上の方法により,シリコンカンチレバ-が磁場により振動することを確認した.これらの基礎データを用いて,マイクロアクチュエータを集積したマイクロメカトロニクスシステムに応用していく予定である.

    researchmap

  • MOS構造を有する単一電子デバイスの作成とそのCMOSチップへの集積化の研究

    Grant number:09233211  1997

    日本学術振興会  科学研究費助成事業  重点領域研究

    平本 俊郎

      More details

    Grant amount:\2700000 ( Direct Cost: \2700000 )

    本研究の目的は,Si単一電子デバイスを将来の超低消費電力デバイスととらえ,従来のVLSl M0Sデバイスと単一電子デバイスが将来同一チップ上に集積する技術を確立することてある.単一電子デバイスは,電子1個で動作する究極のデバイスであり,従来,金属や化合物半導体で研究が行われてきた.本研究では,既存のVLSIとの融合と共存を考慮して,シリコンで単一電子デバイスの試作評価を行った.本年度の成果は以下の通りである.
    (1)VLSIプロセスと互換性のあるプロセスを用いて,リソグラフィ限界を越えたポイントコンタクト構造を作製する技術を開発した.狭窄された部分の最小線幅は10nm以下,長さは約10nmである.
    (2)このプロセスを用いて極微細MOSFETを作製し,室温において単一電子トンネルによるクーロンブロッケード振動を観測すること成功した.
    (3)本デバイスを詳細に評価した結果,チャネルは1個のドットからなることを明らかにした.また,単一電子現象に加え,共鳴トンネル現象などの量子効果も起こっていることを明らかにし,ドット中の量子レベルと測定結果から求めることに成功した.
    (4)求めた充電エネルギーは約60meV,量子エネルギーは約30meV,ドットサイズは約6nmであった.
    (5) シリコン微結晶と用いた単一電子メモリの試作にも成功した.これらのデバイスとメモリは集積化に適していることを明らかにし,単一電子デバイスをVLSIチップに集積するための基礎検討を行った.

    researchmap

  • 不純物揺らぎによる特性ばらつきを抑えたデルタドープ型MOSデバイスに関する研究

    Grant number:09224205  1997

    日本学術振興会  科学研究費助成事業  重点領域研究

    平本 俊郎

      More details

    Grant amount:\2100000 ( Direct Cost: \2100000 )

    VLSIデバイスは性能向上のため急速に微細化しているが、微細化が進むと各種ばらつきが特性に大きく影響を及ぼすようになる。特に、チャネル中の不純物数の統計的な揺らぎは本質的な問題である。これは、サイズが全く同じデバイスであっても、デバイス中に存在する不純物の数は一定ではなく、統計的にばらつくという問題である。この不純物数の揺らぎがそのままデバイスの特性ばらつきとなる。このようなばらつきはデバイスが微細化するほど顕著になることは自明であり、将来のVLSIデバイスの限界を決める要因になりうる。本研究では、不純物揺らぎによる特性ばらつきを抑制する方法として、デルタドープ型MOSデバイスを提案した。このデバイスは、チャネル部分が高不純物濃度の下層と低濃度の上層の2層で構成されており、最近のディープサブミクロンデバイスで主流となりつつあるレトログレードチャネル構造をモデル化した構造である。まず、解析的にデルタドープMOSFETのしきい値電圧を求め、通常の均一ドープMOSFETと比較してデルタドープMOSFETは不純物揺らぎによるしきい値電圧ばらつきが本質的に小さい構造であることを明らかにした。また、低濃度層膜厚と高濃度層不純物濃度を適当にバランスさせることにより、しきい値電圧ばらつきを一定に保ったままデルタドープMOSFETを微細化する新しいスケーリング法を開発した。以上の結果から、デルタドープMOSFETは、短チャネル効果を抑えつつしかも不純物揺らぎを抑えることができ、将来のサブ0.1μm世代の有望なVLSIデバイスデバイスであることを明らかにした。

    researchmap

  • Investigation of Oxidation Mechanisms in SOI Structures

    Grant number:08455161  1996 - 1997

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (B)

    HIRAMOTO Toshiro, SAITO Toshio, HIRAKAWA Kazuhiro, FUJITA Hiroyuki

      More details

    Grant amount:\7600000 ( Direct Cost: \7600000 )

    Thin film Silicom-on-Insulator (SOI) technology has attracted much attention for high-speed and low-power device applications. Usually, the process for SOI device fabrication is compatible with conventional bulk devices. However, the SOI device has one more silicon/oxide interfaces and the mechanisms of oxidation and other process in SOI substrates are not necessarily the same as the bulk materials. The purpose of this study is to investigate the oxidation mechanisms and the interface trap characteristics in SOI structures. First, a new technique is developed to measure the interface traps in SOI using charge pumping method. The conventional charge pumping method are not applied to SOI because of high resistivity of body region. We fabricated SOI structures with body terminal. In our new method, the pulse voltage is applied not only to the gate but also the body. The body pulse suppresses the reduction of the charge pumping current and enables us to accurately measure the interface traps in SOI devices. Next, a new technique is also developed to measure the energy distribution of the interface traps in SOI using modified charge pumping method. The oxidation mechanisms and interface trap characteristics are intensively investigated by above mentioned new technique and it is suggested that the interface of SOI structure is not degraded compared with the interfaces in convensional bulk materials.

    researchmap

  • 不純物揺らぎによる特性ばらつきを抑えたデルタドープ型MOSデバイスに関する研究

    Grant number:08238204  1996

    日本学術振興会  科学研究費助成事業  重点領域研究

    平本 俊郎

      More details

    Grant amount:\1800000 ( Direct Cost: \1800000 )

    VLSIデバイスは性能向上のため急速に微細化しているが,微細化が進むと各種ばらつきが特性に大きく影響を及ぼすようになる.特に,チャネル中の不純物数の統計的な揺らぎは本質的な問題である.これは,サイズが全く同じデバイスであっても,デバイス中に存在する不純物の数は一定ではなく,統計的にばらつくという問題である.この不純物数の揺らぎがそのままデバイスの特性ばらつきとなり,将来のVLSIデバイスの限界を決める要因になりうる.本研究では,不純物揺らぎによる特性ばらつきを抑制する方法として,デルタドープ型MOSデバイスを提案した.このデバイスは,チャネル部分が高不純物濃度の下層と低濃度の上層の2層で構成されている.まず,2次元デバイスシミュレーションを用いてデルタドープMOSデバイスと従来の均一チャネルドープMOSデバイスの設計を行い,しきい値電圧および短チャネル効果の比較を行った.その結果,デルタドープMOSデバイスの方が短チャネル効果に強く,またしきい値電圧を低く設定できることが明らかとなった.次に,両デバイスについて,統計的不純物揺らぎによるしきい値電圧ばらつきの大きさを定量的に求め,両者の比較を行った.その結果,デルタドープMOSデバイスの方が不純物揺らぎの効果を格段に抑制できることを明らかにした.即ち,デルタドープMOSデバイスは,短チャネル効果を抑えつつしかも不純物揺らぎを抑えることができ,将来のサブ0.1μm世代の有望なVLSIデバイスデバイスであることを明らかにした.

    researchmap

  • MOS構造を有する単一電子デバイスの作製とそのCMOSチップへの集積化の研究

    Grant number:08247207  1996

    日本学術振興会  科学研究費助成事業  重点領域研究

    平本 俊郎

      More details

    Grant amount:\3000000 ( Direct Cost: \3000000 )

    本研究の目的は,Si単一電子デバイスを将来の超低消費電力デバイスととらえ,従来のVLSI MOSデバイスと単一電子デバイスが将来同一チップ上に集積する技術を確立することである.単一電子デバイスは,電子1個で動作する究極のデバイスであり,従来,金属や化合物半導体で研究が行われてきた.本研究では,既存のVLSIとの融合と共存を考慮して,Siで単一電子デバイスの試作評価を行った.本年度の成果は以下の通りである.
    (1)VLSIプロセスと互換性のあるプロセスを用いて,リソグラフィ限界を越えたSi極細量子細線を作製する技術を開発した.最小線幅は10nm以下である.
    (2)このプロセスを用いて極微細MOSFETを作製し,室温において単一電子トンネルによるクーロンブロッケード振動を観測すること成功した.
    (3)本デバイスを詳細に評価した結果,チャネルが複数のドットに分裂していることを明らかにした.ドット間の量子効果カップリングを考慮することにより,低温における電気伝導が,共鳴トンネル的伝導と熱励起型ホッピング伝導に区別できることを明らかにした.
    (4)上記のリソグラフィ限界を越えた細線作製プロセスを用い,T字構造や十字構造の作製に成功した.これらの構造をデバイスに応用すると,端子数が多いのでより多くの機能をもったデバイスが期待できる.また,これらの構造は集積化に適していることを明らかにし,単一電子デバイスをVLSIチップに集積するための基礎検討を行った.

    researchmap

  • Quantum Semiconductor Electronics

    Grant number:07044120  1995 - 1997

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for international Scientific Research

    ARAKAWA Yasuhiko, HIRAKAWA Kazuhiko, SASAKI Hiryoyuki, MIURA Noboru, HAMAGUCHI Chihiro, ANDO Tsuneya

      More details

    Grant amount:\12900000 ( Direct Cost: \12900000 )

    (1) Nano-scale semiconductor structures are fabricated using selective crystal growth or electron beam lithography technique. The archived size is about 10 nm. Moreover, Semiconductor nano-crystals of InAs or Si whose size is less than 10 nm are successfully formed using self-organization mechanism in the initial stage of crystal growth.
    (2) It is found for the first time that the coherence length of the edge states which is formed at the edges of the device under very strong magnetic field is much longer than normal states. The mechanisms for the break down of the quantized Hall effect in the large current region are also clarified. It is found that the resistance of the two-dimensional electron gas in the quantized Hall regime is very sensitive to far-infrared irradiation. This effect is possibly applied to the far-infrared detectors.
    (3) New memory structures with InAs nano-crystals near the channel is developed. MOS memory with Si nano-crystals is also fabricated and room temperature operation of memory effects is demonstrated. Point contact MOSFETs acting as single electron transistors are successfully fabricated and single electron tunneling is observed at room temperature. Quantum effects in such small devices are also intensively investigated.

    researchmap

  • Fluctuations of Characteristics in Sub-0.1mum Thin Film SOI CMOS LSI Devices

    Grant number:07555109  1995 - 1997

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (A)

    HIRAMOTO Toshiro, IKEDA Takahide, SAITO Toshio, HIRAKAWA Kazuhiko, FUJITA Hiroyuki

      More details

    Grant amount:\10600000 ( Direct Cost: \10600000 )

    Thin film SOI CMOS Devices have attracted much attention for future LSI devices. When the devices are scaled down to sub-0.1mum regime, fluctuation problems are dominant. The purpose of this study is to investigate the fluctuations of the device characteristics in sub-0.1 mum SOI MOSFET and to propose a new technique to compensate these fluctuations. We have fabricated the thin film SOI MOSFET.The fluctuation problems are addressed by both experimental measurements and simulation. First, the relation between the SOI thickness fluctuations and threshold voltage fluctuations are discussed. It is elucidated that the threshold voltage fluctuations become larger when the gate width is smaller than the period of the SOI thickness fluctuations. This result suggests that the SOI DRAMs which have very narrow gate width will have the fluctuation problem in the future. Next, the scaling methodology for SOI device is developed and the stochastic fluctuations of dopant atoms in SOI channel is discussed based on the scaling theory. It is concluded that the thin film SOI devices can be scaled down without the increase in impurity concentration and that the fluctuations of device characteristics due to the stochastic fluctuations are much smaller in SOI device than in bulk devices.

    researchmap

  • Integration of Fabrication Technology for Micromechatronics

    Grant number:07044122  1995 - 1996

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for international Scientific Research

    MASUZAWA Takahisa, HIRAMOTO Toshirou, FUJITA Hiroyuki, HASHIMOTO Hideki, PORTE Henri, HARASHIMA Fumio, DUCROQUET Frederique, PLANA Robert, FUJINO Masatoshi, TOSHIYOSHI Hiroshi, CAMON Henri, MOLLIER Pasca, MINOTTI Partrice, GORECKI Christophe, PIERALLI Christian, HAESE Nahtalie, ROLLAND Paul-Alain, HOUDEN Daniel, DECARPIGNY Jean-Noel, GAGNEPAIN Jean-Jaeques

      More details

    Grant amount:\11600000 ( Direct Cost: \11600000 )

    The research project aims at the integration of micromachining technologies to fabricate micromechatronic systems ; these systems are composed of microstructures, actuators, electronic circuits, sensors and optical devices. Because the process technologies for these elements differ each other, it is difficult to apply them all together to built a mcirosystem.
    We have selected three target systems : (1) Micro optical systems, (2) scanning probe microscopes, and (3) Scanner for mili-wave anttena. Design, fabrication processes and testing of the systems were carried out.
    (1) As for micro optical systems, an optical aligner based on a microactuated stage was designed. The stage should have three dimensional (3-D) shapes to enable multi-degree-of-freedom alignment. We have developed a new technology to self-assemble 3-D microstructures made of polysilicon films. Surface micromachined thin films, i.e.flat microstructures, were elastically deformed into 3-D shapes by the force of microactuators. The deformation was fixed by annealing structures with Joule heating. No manual manipulation of structures was needed in the process.
    (2) As for scanning probe microscopes, an atomic force microscope (AFM) using a very small vibrational probe, called nano-cantilever, was designed. Due to the small mass of the cantilever and the associated high vibrational frequency, it is expected to have extra high sensitivity. The tip of the cantilever was electrochemically etched in a thin film of electrolite. We succeeded to apply the probe in the AFM.
    (3) The scanner for mili-wave antena was composed of a tortional stage with the antenna on top, a triangular support with electrostatic driving electrodes and a mili-wave oscillator. The anntena was patterned using thin-film technology. The stage and the support were bulk-micromachined from a fused-quartz substrate and a silicon substrate, respectively. The oscillator was made by the compound semiconductor technology, At the last process, all of them are assembled together. We confirmed the motion of scanner by electrostatic actuation and also the mili-wave emission from the antenna. Thus we demostrated the feasibility of the combined usage of different micromachining processes.

    researchmap

  • 二重ゲートを有するシリコン超微細構造デバイスの作製とその量子輸送現象に関する研究

    Grant number:07837002  1995

    日本学術振興会  科学研究費助成事業  一般研究(C)

    平本 俊郎, 平川 一彦

      More details

    Grant amount:\1500000 ( Direct Cost: \1500000 )

    半導体超LSIデバイスの微細化は,その高集積化にともない急ピッチで進んでおり,近い将来,量子効果や単一電子現象などの特異な現象がSiデバイスでも起こることが期待されている.本研究は,将来のLSIへの応用を目指してSiの超微細構造デバイスを作製しその量子輸送現象の基礎研究を行うことを目的としている.
    まず,Siの微細加工に関しては,リソグラフィに依らず制御性の良いSi量子細線作製プロセスの開発に成功した.本プロセスでは,Si結晶の面方位に依存する異方性エッチングと選択酸化をSOI基板に適用し,10nm以下の線幅を達成した.線幅は,SOI基板のSi膜厚のみに依存しリソグラフィに依存しない.また,結晶の面方位を出すことで,極めて均一に細線を形成できる.次に,上記プロセス等を用いて二重ゲートMOSFET及び量子細線MOSFETの作製を行った.チャネル幅は10nm以下,チャネル長は約100nmである.ドレイン電流のゲート電圧依存性を測定したところ,77Kで大きな振動が観測され,この振動は室温でも観測された.種々の測定から,この振動は単一電子現象に起因するクーロンブロッケード振動であるとの結論を得た.また,さらに低温では,振動が複数の鋭いピークに分裂することから,チャネルが複数の量子ドットに分裂していることを明らかにした.
    以上のように,本研究ではSiデバイスにおいて明瞭な単一電子現象の観測に成功し,将来の単一電子現象のLSIデバイスへの応用に関して重要な指針を得た.

    researchmap

  • 半導体量子位相デバイス

    Grant number:06238104  1994 - 1996

    日本学術振興会  科学研究費助成事業  重点領域研究

    古屋 一仁, 奥村 次徳, 蒲生 健次, 榊 裕之, 平本 俊郎, 生駒 俊明

      More details

    Grant amount:\165600000 ( Direct Cost: \165600000 )

    GalnAsOMVPEにより三重バリア電子波共振器を作製し共鳴エネルギー幅測定からバリスティック電子のコヒーレンス長推定方法を研究し、電子ビーム描画により回折観測用超微埋め込みスリットを作製し電子波回折観測を行い、走査ホットエレクトロン顕微鏡動作に初めて成功した(古屋)。VLSIプロセスと互換性をもつシリコン異方性エッチングにより、リソグラフィ限界を越える微細なT字、十字および単一ドット構造を作製し、シリコン量子デバイスとVLSIとの集積化の基礎を固めた(生駒)。同プロセスを用いて極微細MOSFETを作製し、室温および低温での単一電子現象を観測し、理論的考察から、チャネルが複数のドットに分裂し、熱励起型ホッピング伝導が支配的であることを明らかに、室温動作シリコン量子デバイス実現を一歩近づけた(平本)。へき開量子井戸構造端面(エッジ)上に量子井戸を成長させて交叉部にT字形量子細線を形成し、一次元励起子束縛エネルギーの増大、偏波依存性を見出し、自己形成InAs量子箱トラップを有するGaAs/AlGaAsヘテロFETを作製し単一電子正孔捕縛を観測した(榊)。真空一貫プロセス埋め込み量子構造作製をめざし結晶成長中断条件把握と低エネルギーFIBその場注入およびMBE再成長によりGaAs埋め込みデルタドープ層形成に成功し、ホールおよびCV測定により高移動度の電子系形成を確認した(蒲生)。電界液中でSTMを用いて、n-GaAs表面に対して、局所的なエッチングおよび金属折出を行い、表面酸化状態、不純物濃度および基板電位依存性を明らかにし、エッチングメカニズムが探針からのホール注入によることを明らかにした(奥村)。

    researchmap

  • New concept device utilizing silicon nano-structure

    1994

      More details

    Grant type:Competitive

    researchmap

  • 10nm scale low power MOSFET

    1994

      More details

    Grant type:Competitive

    researchmap

▼display all