2025/04/29 更新

写真a

カミヤ トシオ
神谷 利夫
KAMIYA TOSHIO
所属
総合研究院 元素戦略MDX研究センター 教授
職名
教授
外部リンク

News & Topics

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学位

  • 博士(工学) ( 東京工業大学 )

研究キーワード

  • シミュレーション

  • データ科学

  • 固体デバイス

  • 電気物性:電子伝導

  • 電子構造

  • Solid-state devices

  • Electrical properties: electronic conduction

  • Electronic structure

研究分野

  • ナノテク・材料 / 薄膜、表面界面物性

  • ナノテク・材料 / 結晶工学

  • ナノテク・材料 / 無機物質、無機材料化学

  • 情報通信 / 計算科学

  • ナノテク・材料 / 無機材料、物性

  • ナノテク・材料 / 応用物性

  • 自然科学一般 / 半導体、光物性、原子物理

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学歴

  • 東京工業大学

    - 1991年

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  • 東京工業大学大学院   理工学研究科   無機材料工学専攻

    - 1991年

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    国名: 日本国

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  • 東京工業大学   工学部   無機材料工学科

    - 1990年

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    国名: 日本国

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経歴

  • 東京工業大学   科学技術創成研究院 フロンティア材料研究所   研究所長

    2017年4月 - 2021年3月

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    国名:日本国

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  • 東京工業大学   科学技術創成研究院   副研究院長

    2017年4月 - 2021年3月

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    国名:日本国

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  • 東京工業大学   大学院総合理工学研究科 物質創造科学専攻   専攻長

    2016年4月 - 2017年3月

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    国名:日本国

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  • 東京工業大学   元素戦略研究センター   副センター長

    2012年12月 - 2022年9月

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    国名:日本国

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  • 東京工業大学   応用セラミックス研究所   教授

    2010年10月 - 現在

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    国名:日本国

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  • 東京工業大学   応用セラミックス研究所   助教授

    2003年12月 - 2010年7月

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    国名:日本国

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  • -:

    2003年

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  • -:東京工業大学 助教授

    2003年

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  • :

    2002年 - 2003年

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  • :東京工業大学 講師

    2002年 - 2003年

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  • :

    1991年 - 2002年

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  • :東京工業大学 助手

    1991年 - 2002年

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所属学協会

論文

  • Simultaneous Realization of Single-Crystal-Like Electron Transport and Strong Phonon Scattering in Polycrystalline SrTiO3–xHx

    Takayoshi Katase, Seiya Nomoto, Xinyi He, Suguru Kitani, Takashi Honda, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    ACS Applied Electronic Materials   6 ( 10 )   7424 - 7429   2024年9月

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    掲載種別:研究論文(学術雑誌)   出版者・発行元:American Chemical Society (ACS)  

    DOI: 10.1021/acsaelm.4c01306

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  • Room‐Temperature Possible Current‐Induced Transition in Ca2RuO4 Thin Films Grown Through Intercalation‐Like Cation Diffusion in the A2BO4 Ruddlesden–Popper Structure

    Atsushi Fukuchi, Takayoshi Katase, Toshio Kamiya

    Small Methods   2024年9月

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    掲載種別:研究論文(学術雑誌)   出版者・発行元:Wiley  

    Abstract

    Cation deficiency tuning is a central issue in thin‐film epitaxy of functional metal oxides, as it is typically more difficult than anion deficiency tuning, as anions can be readily supplied from gas sources. Here, highly effective internal deficiency compensation of Ru cations is demonstrated for Ca2RuO4 epitaxial films based on diffusive transfer of metal cations in the A2BO4 Ruddlesden–Popper lattice from solid‐phase cation sources. Through detailed structural characterization of Ca2RuO4/LaAlO3 (001) thin films grown with external cation sources by solid‐phase epitaxy, the occurrence of intercalation‐like, interstitial diffusion of La cations (from the substrates) in the A2BO4 structure is revealed, and that of Ru cations is also suggested. Relying on the interstitial‐type diffusion, an optimized Ru deficiency compensation method, which does not induce the formation of Can+1RunO3n+1 Ruddlesden–Popper impurity phases with higher n, is proposed for Ca2RuO4 epitaxial films. In the Ca2RuO4/LaAlO3 (001) thin films grown with Ru deficiency compensation, record‐high resistivity values (102–10−1 Ω cm) and a large (more than 200 K) increase in the temperature range of the nonlinear transport properties are demonstrated by transport measurements, demonstrating the possible advantages of this method in the control of the current‐induced quantum phase transition of Ca2RuO4.

    DOI: 10.1002/smtd.202400264

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  • Wide-Gap p-Type Layered Oxychalcogenides AE2CuInO3Ch (AE: Alkaline Earth; Ch: Chalcogen): Unusually Low Residual Carrier Concentration and Green-to-Red Emission 査読

    Chemistry of Materials   2024年6月

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1021/acs.chemmater.4c00724

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  • Hydrogen-included plasma-assisted reactive sputtering for conductivity control of ultra-wide bandgap amorphous gallium oxide 査読

    Kosuke Takenaka, Hibiki Komatsu, Taichi Sagano, Keisuke Ide, Susumu Toko, Takayoshi Katase, Toshio Kamiya, Yuichi Setsuhara

    Japanese Journal of Applied Physics   63 ( 4 )   04SP65/1 - 04SP65/5   2024年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IOP Publishing  

    Abstract

    Conductivity control of a-Ga2Ox films by cation/anion off-stoichiometry such as oxygen vacancy formation and hydrogen doping have been achieved by hydrogen-included plasma-assisted reactive sputter deposition system and physical and electrical properties of a-Ga2Ox films formed by this system have been investigated. The change in resistivity of a-Ga2Ox thin films deposited by the hydrogen-included plasma-assisted reactive sputtering was then investigated by changing the H2 flow rate ratio H2/(Ar + H2). The a-Ga2Ox thin films with semiconducting properties with a resistivity as low as 102 Ωcm was demonstrated using the plasma-assisted reactive sputtering system with addition to H2. Along with the low resistivity, the a-GaOx thin films with high film density and band gap energy of 5.2 g cm−3 and 4.8 eV were realized. The electrical resistivity of the a-Ga2Ox thin films can be controlled from 102 Ωcm to 105 Ωcm by appropriately controlling the amount of hydrogen introduced from the plasma. The results indicate that the hydrogen acts as a shallow donor, which increases the carrier concentration, can be efficiently introduced by using the plasma-assisted reactive sputtering system with addition to H2.

    DOI: 10.35848/1347-4065/ad364e

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    その他リンク: https://iopscience.iop.org/article/10.35848/1347-4065/ad364e/pdf

  • Inverse‐Perovskite Ba3BO (B = Si and Ge) as a High Performance Environmentally Benign Thermoelectric Material with Low Lattice Thermal Conductivity 査読

    Xinyi He, Shigeru Kimura, Takayoshi Katase, Terumasa Tadano, Satoru Matsuishi, Makoto Minohara, Hidenori Hiramatsu, Hiroshi Kumigashira, Hideo Hosono, Toshio Kamiya

    Advanced Science   - 2307058   2023年12月

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1002/advs.202307058

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  • Significant effects of epitaxial strain on the nonlinear transport properties in Ca2RuO4 thin films with the current-driven transition 査読

    Keiji Tsubaki, Masashi Arita, Takayoshi Katase, Toshio Kamiya, Atsushi Tsurumaki-Fukuchi, Yasuo Takahashi

    Japanese Journal of Applied Physics   2023年8月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.35848/1347-4065/acf2a3

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  • Dynamics of an Electrically Driven Phase Transition in Ca2RuO4 Thin Films: Nonequilibrium High‐Speed Resistive Switching in the Absence of an Abrupt Thermal Transition

    Keiji Tsubaki, Atsushi Tsurumaki‐Fukuchi, Takayoshi Katase, Toshio Kamiya, Masashi Arita, Yasuo Takahashi

    Advanced Electronic Materials   2023年4月

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    掲載種別:研究論文(学術雑誌)   出版者・発行元:Wiley  

    DOI: 10.1002/aelm.202201303

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  • Hydride Anion Substitution Boosts Thermoelectric Performance of Polycrystalline SrTiO 3 via Simultaneous Realization of Reduced Thermal Conductivity and High Electronic Conductivity 査読

    Xinyi He, Seiya Nomoto, Takehito Komatsu, Takayoshi Katase, Terumasa Tadano, Suguru Kitani, Hideto Yoshida, Takafumi Yamamoto, Hiroshi Mizoguchi, Keisuke Ide, Hidenori Hiramatsu, Hitoshi Kawaji, Hideo Hosono, Toshio Kamiya

    Advanced Functional Materials   2023年4月

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1002/adfm.202213144

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  • Local electronic structure of dilute hydrogen in <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML"><mml:mrow><mml:mi>β</mml:mi><mml:mtext>−</mml:mtext><mml:msub><mml:mi>Ga</mml:mi><mml:mn>2</mml:mn></mml:msub><mml:msub><mml:mi mathvariant="normal">O</mml:mi><mml:mn>3</mml:mn></mml:msub></mml:mrow></mml:math> probed by muons

    M. Hiraishi, H. Okabe, A. Koda, Ryosuke Kadono, Takeo Ohsawa, Naoki Ohashi, Keisuke Ide, T. Kamiya, H. Hosono

    Physical Review B   107 ( 4 )   2023年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:American Physical Society ({APS})  

    DOI: 10.1103/physrevb.107.l041201

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  • Low-temperature-processable amorphous-oxide-semiconductor-based phosphors for durable light-emitting diodes 査読

    Keisuke Ide, Naoto Watanabe, Takayoshi Katase, Masato Sasase, Junghwan Kim, Shigenori Ueda, Koji Horiba, Hiroshi Kumigashira, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    Applied Physics Letters   2022年11月

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1063/5.0115384

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  • Design, Synthesis, and Optoelectronic Properties of the High-Purity Phase in Layered AETMN2 (AE = Sr, Ba; TM = Ti, Zr, Hf) Semiconductors

    Akihiro Shiraishi, Shigeru Kimura, Xinyi He, Naoto Watanabe, Takayoshi Katase, Keisuke Ide, Makoto Minohara, Kosuke Matsuzaki, Hidenori Hiramatsu, Hiroshi Kumigashira, Hideo Hosono, Toshio Kamiya

    Inorganic Chemistry   2022年5月

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    掲載種別:研究論文(学術雑誌)   出版者・発行元:American Chemical Society ({ACS})  

    DOI: 10.1021/acs.inorgchem.2c00604

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  • Degenerated Hole Doping and Ultra-Low Lattice Thermal Conductivity in Polycrystalline SnSe by Nonequilibrium Isovalent Te Substitution 査読

    Xinyi He, Haoyun Zhang, Takumi Nose, Takayoshi Katase, Terumasa Tadano, Keisuke Ide, Shigenori Ueda, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    ADVANCED SCIENCE   9 ( 13 )   2022年5月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:WILEY  

    Tin mono-selenide (SnSe) exhibits the world record of thermoelectric conversion efficiency ZT in the single crystal form, but the performance of polycrystalline SnSe is restricted by low electronic conductivity (sigma) and high thermal conductivity (kappa), compared to those of the single crystal. Here an effective strategy to achieve high sigma and low kappa simultaneously is reported on p-type polycrystalline SnSe with isovalent Te ion substitution. The nonequilibrium Sn(Se1-xTex) solid solution bulks with x up to 0.4 are synthesized by the two-step process composed of high-temperature solid-state reaction and rapid thermal quenching. The Te ion substitution in SnSe realizes high sigma due to the 10(3)-times increase in hole carrier concentration and effectively reduced lattice kappa less than one-third at room temperature. The large-size Te ion in Sn(Se1-xTex) forms weak Sn-Te bonds, leading to the high-density formation of hole-donating Sn vacancies and the reduced phonon frequency and enhanced phonon scattering. This result-doping of large-size ions beyond the equilibrium limit-proposes a new idea for carrier doping and controlling thermal properties to enhance the ZT of polycrystalline SnSe.

    DOI: 10.1002/advs.202105958

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  • High-Mobility Metastable Rock-Salt Type (Sn,Ca)Se Thin Film Stabilized by Direct Epitaxial Growth on a YSZ (111) Single-Crystal Substrate

    Xinyi He, Jinshuai Chen, Takayoshi Katase, Makoto Minohara, Keisuke Ide, Hidenori Hiramatsu, Hiroshi Kumigashira, Hideo Hosono, Toshio Kamiya

    ACS Applied Materials &amp; Interfaces   2022年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:American Chemical Society ({ACS})  

    DOI: 10.1021/acsami.2c01464

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  • Photoinduced transient states of antiferromagnetic orderings in La1/3Sr2/3FeO3 and SrFeO3-delta thin films observed through time-resolved resonant soft x-ray scattering

    Kohei Yamamoto, Tomoyuki Tsuyama, Suguru Ito, Kou Takubo, Iwao Matsuda, Niko Pontius, Christian Schuessler-Langeheine, Makoto Minohara, Hiroshi Kumigashira, Yuichi Yamasaki, Hironori Nakao, Youichi Murakami, Takayoshi Katase, Toshio Kamiya, Hiroki Wadati

    NEW JOURNAL OF PHYSICS   24 ( 4 )   2022年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IOP Publishing Ltd  

    The relationship between the magnetic interaction and photoinduced dynamics in antiferromagnetic perovskites is investigated in this study. In La1/3Sr2/3FeO3 thin films, commensurate spin ordering is accompanied by charge disproportionation, whereas SrFeO3-delta thin films show incommensurate helical antiferromagnetic spin ordering due to increased ferromagnetic coupling compared to La1/3Sr2/3FeO3. To understand the photoinduced spin dynamics in these materials, we investigate the spin ordering through time-resolved resonant soft x-ray scattering. In La1/3Sr2/3FeO3, ultrafast quenching of the magnetic ordering within 130 fs through a nonthermal process is observed, triggered by charge transfer between the Fe atoms. We compare this to the photoinduced dynamics of the helical magnetic ordering of SrFeO3-delta . We find that the change in the magnetic coupling through optically induced charge transfer can offer an even more efficient channel for spin-order manipulation.

    DOI: 10.1088/1367-2630/ac5f31

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  • Effect of intentional chemical doping on crystallographic and electric properties of the pyrochlore Bi2Sn2O7 査読

    Makoto Minohara, Naoto Kikuchi, Kouhei Tsukuda, Yuka Dobashi, Akane Samizo, Keishi Nishio, Xinyi He, Takayoshi Katase, Toshio Kamiya, Yoshihiro Aiura

    MATERIALS & DESIGN   216   2022年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCI LTD  

    The development of p-type oxide semiconductors is challenging owing to the localized nature of the valence band maximum (VBM), which primarily comprises O 2p orbitals. Although some Sn2+-based pyrochlore-type oxides (A2B2O7) with VBMs comprising spatially spread Sn 5s orbitals show p-type semiconducting properties, these properties cannot be tuned by an intentional chemical doping owing to the instability of their valence states. Herein, the influence of chemical doping on the crystal structure and electrical properties of Bi2Sn2O7, whose VBM is composed of valence-stable ions with Bi 6s orbitals, in the VBM is investigated. X-ray absorption spectroscopy reveals that In3+ is doped substitutionally at the Sn4+ site. Although the doped In3+ ions are expected to act as acceptors, their electrical properties always show n-type character. Simultaneously, extended X-ray absorption fine structure reveals the formation of oxygen vacancies in Bi-O-Bi bonds contributing to the VBM, whereas negligible changes are observed in the SnO6 octahedra, suggesting that the generated holes are electrically compensated by electrons because of the oxygen vacancies. P-type electric properties can be observed under oxidizing conditions, providing a critical design concept for the realization of hole conduction in acceptor-doped Bi2Sn2O7. (c) 2022 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY license (http:// creativecommons.org/licenses/by/4.0/).

    DOI: 10.1016/j.matdes.2022.110549

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  • Electronic and Lattice Thermal Conductivity Switching by 3D-2D Crystal Structure Transition in Nonequilibrium (Pb1-xSnx)Se 査読

    Yusaku Nishimura, Xinyi He, Takayoshi Katase, Terumasa Tadano, Keisuke Ide, Suguru Kitani, Kota Hanzawa, Shigenori Ueda, Hidenori Hiramatsu, Hitoshi Kawaji, Hideo Hosono, Toshio Kamiya

    ADVANCED ELECTRONIC MATERIALS   2022年3月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:WILEY  

    Dynamic control of thermal transport in solid materials is highly desired for thermal management technology. However, the development of a material exhibiting large modulation of thermal conductivity (kappa) by external stimuli remains a major challenge. Here, the large kappa modulation is reported by the reversible 3D to 2D crystal structure transition in a nonequilibrium solid solution of (Pb1-xSnx)Se, where Pb2+ stabilizes a 3D cubic structure while Sn2+ does a 2D layered structure. The phase boundary of these phases is induced in (Pb0.5Sn0.5)Se bulk polycrystals by thermally quenching the high-temperature solid solution phase. Through the 3D-2D phase transition, the 1/2.9-times decrease of lattice kappa (kappa(lat.)) is achieved by strong phonon scattering in the 2D layered structure, and the electronic kappa (kappa(ele.)) is also decreased by 5 orders of magnitude due to the electronic phase transition from a 3D high conductivity state to a 2D semiconducting state. The total kappa (=kappa(lat.) + kappa(ele.)) modulation ratio kappa(3D phase)/kappa(2D phase) = 3.6 is attained at 373 K. The present strategy will lead to a novel concept for designing thermal management materials through crystal-structure dimensionality switch using nonequilibrium phase boundaries.

    DOI: 10.1002/aelm.202200024

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  • Tuning of Hole Carrier Density in p-type α-SnWO4 by Exploiting Oxygen Defects

    Makoto Minohara, Makoto Minohara, Yuka Dobashi, Naoto Kikuchi, Akane Samizo, Takashi Honda, Xinyi He, Takayoshi Katase, Toshio Kamiya, Keishi Nishio, Yoshihiro Aiura

    Materials Advances   2022年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Royal Society of Chemistry ({RSC})  

    <jats:p>The development of p-type oxide semiconductors has shown promise in overcoming limitations restricting the practical usage of oxide semiconductors and the realization of innovative functional devices. Through numerous studies based...</jats:p>

    DOI: 10.1039/d2ma00815g

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  • Low Residual Carrier Density and High In-Grain Mobility in Polycrystalline Zn3N2Films on a Glass Substrate 査読

    Li, K., Shimizu, A., He, X., Ide, K., Hanzawa, K., Matsuzaki, K., Katase, T., Hiramatsu, H., Hosono, H., Zhang, Q., Kamiya, T.

    ACS Applied Electronic Materials   4 ( 4 )   2022年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1021/acsaelm.2c00181

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  • Breaking of Thermopower-Conductivity Trade-Off in LaTiO3 Film around Mott Insulator to Metal Transition

    Takayoshi Katase, Xinyi He, Terumasa Tadano, Jan M. Tomczak, Takaki Onozato, Keisuke Ide, Bin Feng, Tetsuya Tohei, Hidenori Hiramatsu, Hiromichi Ohta, Yuichi Ikuhara, Hideo Hosono, Toshio Kamiya

    ADVANCED SCIENCE   8 ( 23 )   2021年12月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:WILEY  

    Introducing artificial strain in epitaxial thin films is an effective strategy to alter electronic structures of transition metal oxides (TMOs) and to induce novel phenomena and functionalities not realized in bulk crystals. This study reports a breaking of the conventional trade-off relation in thermopower (S)-conductivity (sigma) and demonstrates a 2 orders of magnitude enhancement of power factor (PF) in compressively strained LaTiO3 (LTO) films. By varying substrates and reducing film thickness down to 4 nm, the out-of-plane to the in-plane lattice parameter ratio is controlled from 0.992 (tensile strain) to 1.034 (compressive strain). This tuning induces the electronic structure change from a Mott insulator to a metal and leads to a 10(3)-fold increase in sigma up to 2920 S cm(-1). Concomitantly, the sign of S inverts from positive to negative, and both sigma and S increase and break the trade-off relation between them in the n-type region. As a result, the PF (=S-2 sigma) is significantly enhanced to 300 mu W m(-)(1)K(-2), which is 10(2) times larger than that of bulk LTO. Present results propose epitaxial strain as a means to finely tune strongly correlated TMOs close to their Mott transition, and thus to harness the hidden large thermoelectric PF.

    DOI: 10.1002/advs.202102097

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  • Large phonon drag thermopower boosted by massive electrons and phonon leaking in LaAlO3/LaNiO3/LaAlO3 heterostructure

    Masatoshi Kimura, Xinyi He, Takayoshi Katase, Terumasa Tadano, Jan M. Tomczak, Makoto Minohara, Ryotaro Aso, Hideto Yoshida, Keisuke Ide, Shigenori Ueda, Hidenori Hiramatsu, Hiroshi Kumigashira, Hideo Hosono, Toshio Kamiya

    NANO LETTERS   21 ( 21 )   9240 - 9246   2021年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    An unusually large thermopower (S) enhancement is induced by heterostructuring thin films of the strongly correlated electron oxide LaNiO3. The phonon-drag effect, which is not observed in bulk LaNiO3, enhances S for thin films compressively strained by LaAlO3 substrates. By a reduction in the layer thickness down to three unit cells and subsequent LaAlO3 surface termination, a 10 times S enhancement over the bulk value is observed due to large phonon drag S (S-g), and the Sg contribution to the total S occurs over a much wider temperature range up to 220 K. The S-g enhancement originates from the coupling of lattice vibration to the d electrons with large effective mass in the compressively strained ultrathin LaNiO3, and the electron-phonon interaction is largely enhanced by the phonon leakage from the LaAlO3 substrate and the capping layer. The transition-metal oxide heterostructures emerge as a new playground to manipulate electronic and phononic properties in the quest for high-performance thermoelectrics.

    DOI: 10.1021/acs.nanolett.1c03143

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  • Ion Substitution Effect on Defect Formation in Two-Dimensional Transition Metal Nitride Semiconductors, AETiN(2) (AE = Ca, Sr, and Ba)

    Xinyi He, Takayoshi Katase, Keisuke Ide, Hideo Hosono, Toshio Kamiya

    INORGANIC CHEMISTRY   60 ( 14 )   10227 - 10234   2021年7月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    A layered semiconductor, SrTiN2, has an interesting crystal structure as a two-dimensional (2D) electron system embedded in a three-dimensional bulk periodic structure because it has alternate stacking of a SrN blocking layer and a TiN conduction layer, in which the Ti 3d(xy) orbital forms the conduction band minimum (CBM) similar to the SrTiO3-based thin-film heterostructure. However, SrTiN2 has been reported to exhibit nearly degenerate conduction, but we reported that it would be due to the easy formation of nitrogen vacancies and oxygen impurities from air. In this paper, we extend the materials to family compounds, alkaline earth (AE) ion-substituted, AETiN(2) (AE = Ca, Sr, and Ba), and investigated how we can suppress the defect formation by (hybrid) density functional theory calculations. All AETiN(2) compounds possess thermodynamic stability in the wide nitrogen (N) chemical potential window. Especially, CaTiN2 is the most stable even against N-poor conditions. Unintentional carrier generation occurs due to the nitrogen vacancies (VN), oxygen substitution (ON), and hydrogen anion substitution (HN) at the nitrogen sites. The V-N and H-N impurities can be suppressed under N-moderate and N-rich conditions. The ON defect is easily formed in SrTiN2 and also in BaTiN2 under N-rich conditions, but its formation can be suppressed in CaTiN2. Present results suggest that high-purity CaTiN2 can be obtained under wider N chemical conditions, which would lead to the realization of the novel functional properties originating from Ti 3d(xy) 2D bands embedded in the bulk crystal structure.

    DOI: 10.1021/acs.inorgchem.1c00526

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  • Local Structure Properties of Hydrogenated and Nonhydrogenated Amorphous In–Ga–Zn–O Thin Films Using XAFS and High-Energy XRD

    Loku Singgappulige Rosantha Kumara, Kyohei Ishikawa, Keisuke Ide, Hideo Hosono, Toshio Kamiya, Osami Sakata

    The Journal of Physical Chemistry C   125 ( 24 )   13619 - 13628   2021年6月

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    掲載種別:研究論文(学術雑誌)   出版者・発行元:American Chemical Society (ACS)  

    DOI: 10.1021/acs.jpcc.1c02437

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  • Hard x-ray photoemission study on strain effect in LaNiO3 thin films 査読

    Kohei Yamagami, Keisuke Ikeda, Atushi Hariki, Yujun Zhang, Akira Yasui, Yasumasa Takagi, Takayoshi Katase, Toshio Kamiya, Hiroki Wadati

    Appl. Phys. Lett.   118 ( 16 )   161601 - 161601   2021年4月

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1063/5.0044047

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  • Reversible 3D-2D structural phase transition and giant electronic modulation in nonequilibrium alloy semiconductor, lead-tin-selenide

    Takayoshi Katase, Yudai Takahashi, Xinyi He, Terumasa Tadano, Keisuke Ide, Hideto Yoshida, Shiro Kawachi, Jun-ichi Yamaura, Masato Sasase, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    Science Advances   7 ( 12 )   eabf2725 - eabf2725   2021年3月

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    掲載種別:研究論文(学術雑誌)   出版者・発行元:American Association for the Advancement of Science (AAAS)  

    Material properties depend largely on the dimensionality of the crystal structures and the associated electronic structures. If the crystal-structure dimensionality can be switched reversibly in the same material, then a drastic property change may be controllable. Here, we propose a design route for a direct three-dimensional (3D) to 2D structural phase transition, demonstrating an example in (Pb1−<italic>x</italic>Sn<italic>x</italic>)Se alloy system, where Pb2+ and Sn2+ have similar <italic>n</italic>s2 pseudo-closed shell configurations, but the former stabilizes the 3D rock-salt-type structure while the latter a 2D layered structure. However, this system has no direct phase boundary between these crystal structures under thermal equilibrium. We succeeded in inducing the direct 3D-2D structural phase transition in (Pb1−<italic>x</italic>Sn<italic>x</italic>)Se alloy epitaxial films by using a nonequilibrium growth technique. Reversible giant electronic property change was attained at <italic>x</italic> ~ 0.5 originating in the abrupt band structure switch from gapless Dirac-like state to semiconducting state.

    DOI: 10.1126/sciadv.abf2725

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  • Double Charge Polarity Switching in Sb-Doped SnSe with Switchable Substitution Sites

    Chihiro Yamamoto, Xinyi He, Takayoshi Katase, Keisuke Ide, Yosuke Goto, Yoshikazu Mizuguchi, Akane Samizo, Makoto Minohara, Shigenori Ueda, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    ADVANCED FUNCTIONAL MATERIALS   31 ( 8 )   2021年2月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:WILEY-V C H VERLAG GMBH  

    Tin mono-selenide (SnSe) is one of the most promising thermoelectric materials; however, it experiences difficulty in controlling the carrier polarity, which is inevitable for realizing p-n homojunction devices. Herein, double switching of charge polarity in (Sn1-xSbx)Se by varying x is reported; pure SnSe shows p-type conduction, whereas the polarity of (Sn1-xSbx)Se switches to n-type conduction for 0.005 < x < 0.05, and then re-switches to p-type conduction for x > 0.05. The major Sb substitution site switches from the Se (Sb-Se) to Sn site (Sb-Sn) with increasing x. Sb-Sn (Sb3+ at Sn2+) works as a donor, but Sb-Se (Sb3- at Se2-) does not produce a hole because of the Sb-Sb dimer formation. The mechanism of double polarity switching is explained by native p-type conduction in pure SnSe due to Sn-vacancy formation, whereas (Sn1-xSbx)Se exhibits n-type behavior due to conduction through the Sb-Se impurity band formed above the valence band maximum, and finally re-switches to weak p-type, where the Fermi level approaches the midgap level between the Sb-Se band and conduction band minimum. Clarification of the Sb doping mechanism will provide a crucial guide for developing more sophisticated doping routes for SnSe and high-performance energy-related devices.

    DOI: 10.1002/adfm.202008092

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  • Understanding and controlling electronic defects in amorphous oxide semiconductor

    Keisuke Ide, Hideo Hosono, Toshio Kamiya

    Digest of Technical Papers - SID International Symposium   52 ( 1 )   97 - 99   2021年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:John Wiley and Sons Inc  

    Amorphous oxide semiconductors (AOSs) have been widely applied for state-of-the-art flat-panel display as a thin-film transistor (TFT) since 2012. Besides, AOSs have been studied not only for TFT but also for other electronic devices such as sensor, diode, transport layer, memory, and so on. To realize those next-generation electronics using AOS material, it is important to understand the defect state in AOS material. Here we review research about defects in AOS up to now including O-related, hydrogen-related, and structure-related defects, which are important to understand the AOS feature. At the conference, we will also mention the exploration of new functional AOS materials based on defect engineering.

    DOI: 10.1002/sdtp.14389

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  • Shallow Valence Band of Rutile GeO2 and P-type Doping

    Christian A. Niedermeier, Keisuke Ide, Takayoshi Katase, Hideo Hosono, Toshio Kamiya

    JOURNAL OF PHYSICAL CHEMISTRY C   124 ( 47 )   25721 - 25728   2020年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    GeO2 has an a-quartz-type crystal structure with a very wide fundamental band gap of 6.6 eV and is a good insulator. Here, we find that the stable rutile-GeO2 polymorph with a 4.6 eV band gap has a surprisingly low similar to 6.8 eV ionization potential, as predicted from the band alignment using first-principles calculations. Because of the short O-O distances in the rutile structure containing cations of small effective ionic radii such as Ge4+, the antibonding interaction between O 2p orbitals raises the valence band maximum energy level to an extent that hole doping appears feasible. Experimentally, we report the flux growth of 1.5 x 1.0 x 0.8 mm(3) large rutile GeO2 single crystals and confirm the thermal stability for temperatures up to 1021 +/- 10 degrees C. X-ray fluorescence spectroscopy shows the inclusion of unintentional Mo impurities from the Li2O-MoO3 flux, as well as the solubility of Ga in the r-GeO2 lattice as a prospective acceptor dopant. The resistance of the Ga- and Mo-codoped r-GeO2 single crystals is very high at room temperature, but it decreases by 2-3 orders of magnitude upon heating to 300 degrees C, which is attributed to thermally activated p-type conduction.

    DOI: 10.1021/acs.jpcc.0c07757

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  • Stable and Tunable Current-Induced Phase Transition in Epitaxial Thin Films of Ca2RuO4 査読

    Atsushi Tsurumaki-Fukuchi, Keiji Tsubaki, Takayoshi Katase, Toshio Kamiya, Masashi Arita, Yasuo Takahashi

    ACS Applied Materials & Interfaces   2020年5月

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    掲載種別:研究論文(学術雑誌)   出版者・発行元:American Chemical Society (ACS)  

    DOI: 10.1021/acsami.0c05181

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  • Thermoelectric (BaxSr1-x)Si-2 films prepared by sputtering method over the barium solubility limit

    Kodai Aoyama, Takao Shimizu, Hideto Kuramochi, Masami Mesuda, Ryo Akiike, Keisuke Ide, Takayoshi Katase, Toshio Kamiya, Yoshisato Kimura, Hiroshi Funakubo

    JAPANESE JOURNAL OF APPLIED PHYSICS   59   2020年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IOP PUBLISHING LTD  

    In this work, (BaxSr1-x)Si-2 thin films were prepared by the co-sputtering method at various deposition temperatures. The constituent phase of the films primarily depended on the deposition temperature and the composition x. The composition to make a solid solution was expanded by lowering the deposition temperature, compared to that of bulk-sintered bodies. Further lowering the deposition temperature produced a metastable phase, which was a layered structure (trigonal, EuGe2-type structure), with a low thermoelectric power factor. Substitution with Ba led to an increase in the temperature showing the highest power factor. The samples with Ba concentrations over 17% showed the maximum power factor around room temperature. (c) 2020 The Japan Society of Applied Physics

    DOI: 10.7567/1347-4065/ab645b

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  • Phonon scattering limited mobility in the representative cubic perovskite semiconductors SrGeO3 , BaSnO3 , and SrTiO3 査読

    Christian A. Niedermeier, Yu Kumagai, Keisuke Ide, Takayoshi Katase, Fumiyasu Oba, Hideo Hosono, Toshio Kamiya

    Physical Review B   101 ( 12 )   2020年3月

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    掲載種別:研究論文(学術雑誌)   出版者・発行元:American Physical Society (APS)  

    DOI: 10.1103/physrevb.101.125206

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    その他リンク: https://link.aps.org/article/10.1103/PhysRevB.101.125206

  • 熱起電力と導電率のトレードオフの関係を破る酸化物熱電材料LaNiO3の高出力特性

    樋口 雄飛, 片瀬 貴義, 只野 央将, 藤岡 淳, 井手 啓介, 平松 秀典, 細野 秀雄, 神谷 利夫

    応用物理学会学術講演会講演予稿集   2020.1   3583 - 3583   2020年2月

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    記述言語:日本語   出版者・発行元:公益社団法人 応用物理学会  

    DOI: 10.11470/jsapmeeting.2020.1.0_3583

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  • Fabrication and characterization of (CaxSr1-x)Si2 films prepared by co-sputtering method 査読

    K. Aoyama, T. Shimizu, H. Kuramochi, M. Mesuda, R. Akiike, K. Ide, T. Katase, T. Kamiya, Y. Kimura, H. Funakubo

    MRS Advances   5 ( 10 )   451 - 458   2020年1月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    DOI: 10.1557/adv.2020.67

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  • Electronic defects in amorphous oxide semiconductor and recent development

    Keisuke Ide, Hideo Hosono, Toshio Kamiya

    2020 TWENTY-SEVENTH INTERNATIONAL WORKSHOP ON ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES (AM-FPD 20): TFT TECHNOLOGIES AND FPD MATERIALS   2020年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:IEEE  

    Amorphous oxide semiconductors (AOSs) represented by amorphous In-Ga-Zn-O have been applied for state-of-the-art flat panel displays as thin-film transistor backplane since 2012. Understanding defects in AOS is critically important for controlling the instability of TFTs. It is found in the past decades that many AOS defects arc related to oxygen and hydrogen impurities, though oxygen is the major constituent of AOS and hydrogen is not intentionally incorporated.

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  • New Amorphous In-Ga-Zn-O Thin-Film Transistor-Based Optical Pixel Sensor for Optical Input Signal With Short Wavelength

    Chia-En Wu, Keisuke Ide, Takayoshi Katase, Hidenori Hiramatsu, Hideo Hosono, Chih-Lung Lin, Toshio Kamiya

    IEEE TRANSACTIONS ON ELECTRON DEVICES   66 ( 9 )   3848 - 3853   2019年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    This paper presents an optical sensor based onamorphous In-Ga-Zn-O(a-IGZO) photo thin-film transistors (TFTs). To maintain a high signal-to-noise ratio (SNR) of the optical sensor against a variety of ambient white light, this paper employed a-IGZO photo-TFTs for detecting optical input signal sensitive only to short-wavelength light. Measurements of the photosensitivity for optical signal with different wavelengths and optical response for optical input signal under various white light irradiances are proposed to support the reliability of the a-IGZO photo-TFTs under different ambient white light conditions. This paper also simulates a-IGZO photo-TFTs under various white light conditions to predict and design the proposed new sensors and circuits. The simulation results indicated that the proposed optical sensor can maintain the obvious difference in the output voltages with or without optical input signal under the white light irradiances of 0, 268, and 750 mu W/cm(2), demonstrating the feasibility and the reliability of the proposed optical pixel sensor.

    DOI: 10.1109/TED.2019.2925091

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  • New crystal structure built from a GeO6-GeO5 polyhedra network with high thermal stability: b-SrGe2O5 査読

    Christian A. Niedermeier, Junichi Yamaura, Jiazhen Wu, Xinyi He, Takayoshi Katase, Hideo Hosono, Toshio Kamiya

    ACS Appl. Electron. Mater.   1   1989 - 1993   2019年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

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  • Symmetric Ambipolar Thin-Film Transistors and High-Gain CMOS-like Inverters Using Environmentally Friendly Copper Nitride 査読

    Kosuke Matsuzaki, Takayoshi Katase, Toshio Kamiya, Hideo Hosono

    ACS Appl. Mater. Interfaces   11   35132 - 35137   2019年8月

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    記述言語:英語  

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  • Intrinsic and Extrinsic Defects in Layered Nitride Semiconductor SrTiN2

    Xinyi He, Zewen Xiao, Takayoshi Katase, Keisuke Ide, Hideo Hosono, Toshio Kamiya

    JOURNAL OF PHYSICAL CHEMISTRY C   123 ( 32 )   19307 - 19314   2019年8月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    SrTiN2 is expected to exhibit unique carrier transport properties since it has a two-dimensional (2D) electron transport layer in its natural layered crystal structure, and its conduction band minimum is formed mainly of Ti 3d(xy) orbitals similar to the SrTiO3-based 2D electron gas system. However, only-nearly metallic conduction has been reported for SrTiN2, which is probably due to difficulty in synthesizing high purity, low defect density samples. In this paper, we report a density functional theory study to determine the origin of the unintentional high carrier generation and to design the synthesis routes to high purity SrTiN2 with high controllability of carrier doping. We found that SrTiN2 is thermodynamically stable in a wide chemical potential window from N-poor to N-rich conditions, but high-density residual electrons are generated at the N-poor condition due to the easy formation of N vacancies (V-N). The formation of V-N is suppressed at larger N chemical potentials, but unintentional incorporation of O impurity at N sites in turn produces a donor even in the high N chemical potential conditions, indicating the synthesis condition should be tuned in the N-moderate conditions in equilibrium with SrN to obtain high purity SiTiN2 with low defect densities. For hydrogen impurities, all p-type H-related defects are compensated by other n-type H-related defects in the N-moderate conditions, and thus H impurity produces no efficient carriers. As for extrinsic dopants, La works as a shallow donor for any N chemical potentials while Y and Nb work only at the N-poor and N-rich conditions. Meanwhile, SrTiN2 is hard to convert to p-type because the acceptor candidates, e.g., Na, K, Rb at Sr site, have high formation energy and are compensated by V-N and O-N donors.

    DOI: 10.1021/acs.jpcc.9b03643

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  • Multiple Color Inorganic Thin-Film Phosphor, RE-Doped Amorphous Gallium Oxide (RE = Rare Earth: Pr, Sm, Tb, and Dy), Deposited at Room Temperature

    Naoto Watanabe, Keisuke Ide, Junghwan Kim, Takayoshi Katase, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   216 ( 5 )   2019年3月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:WILEY-V C H VERLAG GMBH  

    Multi-color inorganic thin-film phosphors are deposited at room temperature on glass substrates using ultra-wide bandgap amorphous gallium oxide (a-GO) as a host material. All of the a-GO films doped with four kinds of rare-earth ions (a-GO:REx) emit visible light, originating from the RE ions, by 238-257 nm ultraviolet light excitation; that is, blue & red emission from RE = Pr3+, red from Sm3+, green from Tb3+, and blue and yellow from Dy3+. The a-GO:Pr-x and a-GO:Tb-x films emit bright light clearly visible by human eyes. Although the internal quantum efficiencies of unannealed a-GO:Pr-0.02 and a-GO:Tb-0.02 films are 0.2 and 1.8%, respectively, those are improved to 2.4 and 3.8 %, respectively, by post-deposition thermal annealing in O-2 at 400 degrees C through desorption of weakly-bonded oxygen and structural relaxation. On the other hand, the annealing temperature to improve photoluminescence is limited by crystallization (onset temperatures 400-500 degrees C).

    DOI: 10.1002/pssa.201700833

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  • Electronic Defects in Amorphous Oxide Semiconductors: A Review

    Keisuke Ide, Kenji Nomura, Hideo Hosono, Toshio Kamiya

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   216 ( 5 )   2019年3月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:WILEY-V C H VERLAG GMBH  

    Amorphous oxide semiconductors (AOSs) have been commercialized since 2012 as thin-film transistor (TFT) backplanes in flat-panel displays. This review first provides a brief history and current status of AOS technology, and then introduces electronic defects in AOSs reported to date that are critically important for understanding and controlling the instability of TFTs that is the most serious issue in the development of the AOS technology. In particular, it is important to know that many AOS defects are related to oxygen and hydrogen impurities, though oxygen is the major constituent of AOS and hydrogen is not intentionally incorporated. Instability issues and their underlying mechanisms are also discussed in relation to these defects.

    DOI: 10.1002/pssa.201800372

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  • Effects of Base Pressure on Growth and Optoelectronic Properties of Amorphous In-Ga-Zn-O: Ultralow Optimum Oxygen Supply and Bandgap Widening

    Keisuke Ide, Kyohei Ishikawa, Haochun Tang, Takayoshi Katase, Hidenori Hiramatsu, Hideya Kumomi, Hideo Hosono, Toshio Kamiya

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   216 ( 5 )   2019年3月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:WILEY-V C H VERLAG GMBH  

    It is generally thought that deposition of device-quality oxide semiconductors requires somewhat high oxygen supply in order to reduce oxygen deficiency and to suppress generation of free electrons. This paper reports that such high oxygen supply is not an essential requirement for a representative amorphous oxide semiconductor, amorphous In-Ga-Zn-O (a-IGZO). That is, the optimum oxygen flow rate ratio (R-O2) is approximate to 3% for standard (STD) sputtering with the base pressure of approximate to 10(-4) Pa, while it is reduced dramatically to 10(-3)-10(-5)% for ultrahigh vacuum (UHV) sputtering with the base pressure of approximate to 10(-7) Pa. We consider that the ultralow optimum oxygen supply originates from residual hydrogen, because the STD and the UHV films have different hydrogen contents at the orders of 10(20) and 10(19) cm(-3), respectively. This comparison also suggests that the inclusion of impurity hydrogen widens the optical bandgap by approximate to 0.1 eV, which causes a bandgap minimum by post annealing at approximate to 500 degrees C for the STD a-IGZO films accompanying the removal of incorporated hydrogen as H2O. Furthermore, crystallization onset temperature is reduced remarkably by approximate to 100 K for the UHV a-IGZO films.

    DOI: 10.1002/pssa.201700832

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  • Insulator-like behavior coexisting with metallic electronic structure in strained FeSe thin films grown by molecular beam epitaxy 査読

    半沢幸太, 山口祐太, 小畑由紀子, 松石聡, 平松秀典, 神谷利夫, 細野秀雄

    PHYSICAL REVIEW B   99 ( 035148 )   2019年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1103/PhysRevB.99.035148

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  • Metal oxide semiconductor thin-films and related devices

    Mamoru Furuta, Mutsumi Kimura, Toshio Kamiya, Yukiharu Uraoka

    Japanese Journal of Applied Physics   58 ( 9 )   2019年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Institute of Physics Publishing  

    DOI: 10.7567/1347-4065/ab148c

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  • Electronic structure of interstitial hydrogen in In-Ga-Zn-O semiconductor simulated by muon 査読

    Kojima, K.M., Hiraishi, M., Okabe, H., Koda, A., Kadono, R., Ide, K., Matsuishi, S., Kumomi, H., Kamiya, T., Hosono, H.

    Applied Physics Letters   115 ( 12 )   2019年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1063/1.5117771

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  • Multiple states and roles of hydrogen in p-type SnS semiconductors

    Zewen Xiao, Fan-Yong Ran, Min Liao, Hidenori Hiramatsu, Keisuke Ide, Hideo Hosono, Toshio Kamiya

    PHYSICAL CHEMISTRY CHEMICAL PHYSICS   20 ( 32 )   20952 - 20956   2018年8月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ROYAL SOC CHEMISTRY  

    Hydrogen (H) plays critical roles in the electrical properties of semiconductor materials and devices. In this work, we report multiple states and roles of H in SnS by H plasma treatment and density functional theory (DFT) calculations. The as-deposited SnS films include impurity H at 2.3 x 10(19) cm(-3), four orders of magnitude larger than the hole density. The DFT calculations reveal that H exists in multiple states at the equilibrium mainly at the interstitial and the Sn-substitutional sites, which have formation enthalpies lower than those for the intrinsic defects. These H states work as donors and acceptors, respectively, and strongly pin the Fermi level in the p-type region. The native p-type conduction in the actual SnS semiconductors is caused mainly by the H-on-Sn (H-Sn) acceptors, rather than the previously reported Sn vacancies (V-Sn) for pure SnS. It is also confirmed that even stronger H doping with larger H chemical potentials cannot convert SnS to an n-type conductor because it reduces SnS to Sn metal.

    DOI: 10.1039/c8cp02261e

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  • Transition metal-doped amorphous oxide semiconductor thin-film phosphor, chromium-doped amorphous gallium oxide 査読

    Keisuke Ide, Yuki Futakado, Naoto Watanabe, Junghwan Kim, Takayoshi Katase, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    physica status solidi (a)   1800198   2018年8月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

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  • Effects of impurity hydrogen in amorphous In-Ga-Zn-O: ultralow optimum oxygen supply for ultrahigh vacuum sputtering and bandgap widening by impurity hydrogen 査読

    Keisuke Ide, Kyohei Ishikawa, Haochun Tang, Takayoshi Katase, Hidenori Hiramatsu, Hideya Kumomi, Hideo Hosono, Toshio Kamiya

    physica status solidi (a)   8   1700832   2018年2月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

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  • Multi-color light-emitting thin films based on ultra-wide bandgap amorphous oxide semiconductor deposited at room temperature on glass 査読

    Naoto Watanabe, Keisuke Ide, Junghwan Kim, Takayoshi Katase, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    physica status solidi (a)   8   1700833   2018年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

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  • An Exceptionally Narrow Band-Gap (∼4 eV) Silicate Predicted in the Cubic Perovskite Structure: BaSiO3 査読

    56 ( 17 )   10535 - 10542   2017年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1021/acs.inorgchem.7b01510

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  • The Unique Electronic Structure of Mg2Si: Shaping the Conduction Bands of Semiconductors with Multicenter Bonding 査読

    Hiroshi Mizoguchi, Yoshinori Muraba, Daniel C. Fredrickson, Satoru Matsuishi, Toshio Kamiya, Hideo Hosono

    ANGEWANDTE CHEMIE-INTERNATIONAL EDITION   56 ( 34 )   10135 - 10139   2017年8月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:WILEY-V C H VERLAG GMBH  

    The electronic structures of the antifluorite-type compound Mg2Si is described in which a sublattice of short cation-cation contacts creates a very low conduction band minimum. Since Mg2Si shows n-type conductivity without intentional carrier doping, the present result indicates that the cage defined by the cations plays critical roles in carrier transport similar to those of inorganic electrides, such as 12CaO center dot 7Al(2)O(3):e(-) and Ca2N. A distinct difference in the location of conduction band minimum between Mg2Si and the isostructural phase Na2S is explained in terms of factors such as the differing interaction strengths of the Si/S 3s orbitals with the cation levels, with the more core-like character of the S 3s leading to a relatively low conduction band energy at the G point. Based on these results and previous research on electrides, approaches can be devised to control the energy levels of cation sublattices in semiconductors.

    DOI: 10.1002/anie.201701681

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  • Key Factors for Insulator-Superconductor Transition in FeSe Thin Films by Electric Field 査読

    Kota Hanzawa, Hikaru Sato, Hidenori Hiramatsu, Toshio Kamiya, Hideo Hosono

    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY   27 ( 4 )   2017年6月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    Insulator-like FeSe epitaxial thin films were grown at three different growth conditions (i.e., at Fe flux rates = 2, 4, and 6 x 10(-6) Pa under a constant Se flux rate), and the superconducting properties induced by electric double-layer transistors (EDLTs) were investigated in relation to the crystal/defect structures of the FeSe channels. The maximum critical temperature (T-c) of 35 K was obtained for the FeSe channel grown at the intermediate Fe flux rate. The other EDLTs (i.e., grown at a higher and a lower Fe flux rates, respectively) exhibited lower Tc of approximate to 20 K, which were in the under-and the overdoped states, respectively, as confirmed by Hall effect measurements. The underdoped state of the channel grown at the higher rate is explained by electron traps at surface pits. This study revealed that high crystallinity and atomically flat surfaces are the key factors to achieving the optimum doping level and inducing the high Tc in insulator-like FeSe EDLTs.

    DOI: 10.1109/TASC.2016.2639738

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  • P-187: Electronic Structures of Various Color Light-Emitting Amorphous Oxide Semiconductor Thin Films

    Naoto Watanabe, Junghwan Kim, Keisuke Ide, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    SID Symposium Digest of Technical Papers   48 ( 1 )   1974 - 1976   2017年5月

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    掲載種別:研究論文(学術雑誌)   出版者・発行元:Wiley-Blackwell  

    DOI: 10.1002/sdtp.12047

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  • BaFe2(As1-xPx)(2) (x=0.22-0.42) thin films grown on practical metal-tape substrates and their critical current densities 査読

    Hidenori Hiramatsu, Hikaru Sato, Toshio Kamiya, Hideo Hosono

    SUPERCONDUCTOR SCIENCE & TECHNOLOGY   30 ( 4 )   2017年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IOP PUBLISHING LTD  

    We optimized the substrate temperature (T-s) and phosphorus concentration (x) of BaFe2(As1-xPx)(2) films on practical metal-tape substrates for pulsed laser deposition from the viewpoints of crystallinity, superconductor critical temperature (T-c), and critical current density (J(c)). It was found that the optimum T-s and x values are 1050 degrees C and x = 0.28, respectively. The optimized film exhibits T-c(onset) = 26.6 and T-c(zero) = 22.4 K along with a high self-field J(c) at 4 K (similar to 1 MAcm(-2)) and relatively isotropic J(c) under magnetic fields up to 9 T. Unexpectedly, we found that lower crystallinity samples, which were grown at a higher T-s of 1250 degrees C than the optimized T-s = 1050 degrees C, exhibit higher J(c) along the ab plane under high magnetic fields than the optimized samples. The presence of horizontal defects that act as strong vortex pinning centers, such as stacking faults, are a possible origin of the high J(c) values in the poor crystallinity samples.

    DOI: 10.1088/1361-6668/aa621c

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  • Electron effective mass and mobility limits in degenerate perovskite stannate BaSnO3 査読

    Christian A. Niedermeier, Sneha Rhode, Keisuke Ide, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya, Michelle A. Moram

    PHYSICAL REVIEW B   95 ( 16 )   2017年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER PHYSICAL SOC  

    The high room temperature mobility and the electron effective mass in BaSnO3 are investigated in depth by evaluation of the free carrier absorption observed in infrared spectra for epitaxial films with free electron concentrations from 8.3x10(18) to 7.6x10(20) cm(-3). Both the optical band gap widening by conduction band filling and the carrier scattering mechanisms in the low- and high-doping regimes are consistently described employing parameters solely based on the intrinsic physical properties of BaSnO3. The results explain the current mobility limits in epitaxial films and demonstrate the potential of BaSnO3 to outperform established wide-band gap semiconductors also in the moderate doping regime.

    DOI: 10.1103/PhysRevB.95.161202

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  • Conversion of an ultra-wide bandgap amorphous oxide insulator to a semiconductor 査読

    Junghwan Kim, Takumi Sekiya, Norihiko Miyokawa, Naoto Watanabe, Koji Kimoto, Keisuke Ide, Yoshitake Toda, Shigenori Ueda, Naoki Ohashi, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    NPG ASIA MATERIALS   9   2017年3月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:NATURE PUBLISHING GROUP  

    The variety of semiconductor materials has been extended in various directions, for example, to very wide bandgap materials such as oxide semiconductors as well as to amorphous semiconductors. Crystalline beta- Ga2O3 is known as a transparent conducting oxide with an ultra- wide bandgap of similar to 4.9 eV, but amorphous (a-) Ga2Ox is just an electrical insulator because the combination of an ultra-wide bandgap and an amorphous structure has serious difficulties in attaining electronic conduction. This paper reports semiconducting a-(GaOx)-O-2 thin films deposited on glass at room temperature and their applications to thin-film transistors and Schottky diodes, accomplished by suppressing the formation of charge compensation defects. The film density is the most important parameter, and the film density is increased by enhancing the film growth rate by an order of magnitude. Additionally, as opposed to the cases of conventional oxide semiconductors, an appropriately high oxygen partial pressure must be chosen for a-Ga2Ox to reduce electron traps. These considerations produce semiconducting a-Ga2Ox thin films with an electron Hall mobility of similar to 8 cm(2)V(-1) s (-1), a carrier density Ne of similar to 2x10(14) cm-3 and an ultra-wide bandgap of similar to 4.12 eV. An a-Ga2Ox thin-film transistor exhibited reasonable performance such as a saturation mobility of similar to 1.5 cm(2) V-1 s -1 and an on/ off ratio 4107.

    DOI: 10.1038/am.2017.20

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  • Effects of working pressure and annealing on bulk density and nanopore structures in amorphous In-Ga-Zn-O thin-film transistors

    Keisuke Ide, Mitsuho Kikuchi, Masato Ota, Masato Sasase, Hidenori Hiramatsu, Hideya Kumomi, Hideo Hosono, Toshio Kamiya

    JAPANESE JOURNAL OF APPLIED PHYSICS   56 ( 3 )   2017年3月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IOP PUBLISHING LTD  

    Microstructures of amorphous In-Ga-Zn-O (a-IGZO) thin films of different densities were analyzed. Device-quality a-IGZO films were deposited under optimum conditions, e.g., the total pressure P-tot = 0.55 Pa produced high film densities of similar to 6.1 g/cm(3), while a very high P-tot = 5.0 Pa produced low film densities of 5.5 g/cm(3). Both films formed uniform high-density layers in the vicinity of the glass substrate, 10-20nm in thickness depending on Ptot, while their growth mode changed to a sparse columnar structure in thicker regions. X-ray reflectivity and in situ spectroscopic ellipsometry provided different results on densification by post deposition thermal annealing; i.e., the latter has a higher sensitivity. High-Z-contrast images obtained by high-angle annular dark-field scanning transmission electron microscopy were also useful for detecting nanometer-size non uniformity even in device-quality a-IGZO films. (C) 2017 The Japan Society of Applied Physics

    DOI: 10.7567/JJAP.56.03BB03

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  • Transparent amorphous oxide semiconductors for organic electronics: Application to inverted OLEDs 査読

    Hideo Hosono, Junghwan Kim, Yoshitake Toda, Toshio Kamiya, Satoru Watanabe

    PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA   114 ( 2 )   233 - 238   2017年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:NATL ACAD SCIENCES  

    Efficient electron transfer between a cathode and an active organic layer is one key to realizing high-performance organic devices, which require electron injection/transport materials with very low work functions. We developed two wide-bandgap amorphous (a-) oxide semiconductors, a-calcium aluminate electride (a-C12A7:e) and a-zinc silicate (a-ZSO). A-ZSO exhibits a low work function of 3.5 eV and high electron mobility of 1 cm(2)/(V . s); furthermore, it also forms an ohmic contact with not only conventional cathode materials but also anode materials. A-C12A7:e has an exceptionally low work function of 3.0 eV and is used to enhance the electron injection property from a-ZSO to an emission layer. The inverted electron-only and organic light-emitting diode (OLED) devices fabricated with these two materials exhibit excellent performance compared with the normal type with LiF/Al. This approach provides a solution to the problem of fabricating oxide thin-film transistor-driven OLEDs with both large size and high stability.

    DOI: 10.1073/pnas.1617186114

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  • Amorphous Gallium Oxide as an Improved Host for Inorganic Light-Emitting Thin Film Semiconductor Fabricated at Room Temperature on Glass 査読

    Naoto Watanabe, Junghwan Kim, Keisuke Ide, Hidenori Hiramatsu, Hiroshi Kumigashira, Shigenori Ueda, Hideo Hosono, Toshio Kamiya

    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY   6 ( 7 )   P410 - P414   2017年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELECTROCHEMICAL SOC INC  

    We report new amorphous oxide semiconductor (AOS)-based thin film phosphor, Eu-doped a-Ga2Ox (a-GO:Eu), to solve the issues of previously reported a-In-Ga-Zn-O: Eu (a-IGZO:Eu). The internal quantum efficiencies (IQE) of a-GO:Eu (2.3% for unannealed, 8.3% for annealed films) are improved from those of a-IGZO:Eu (0.9% and 1.6%, respectively) because of the much wider bandgap (4.26 eV), subsequent low residual electron density, and higher available annealing temperature. We found that the annealing temperature to improve IQE is limited by crystallization temperature. Another issue of a-IGZO:Eu is that the initial state of Eu3+ 4f is deeper than the valence band maximum (VBM), which is not suitable for light-emitting diode. We expected that Eu3+ 4f would locate above the VBM in a-GO:Eu because the VBM of a-Ga2Ox is similar to 0.8 eV deeper than that of a-IGZO. However, resonant photoemission spectroscopy revealed that the Eu 4f states are bound more to the O 2p valence band than to the vacuum level, and the Eu3+ 4f states in a-GO:Eu are still buried in the valence band. (C) 2017 The Electrochemical Society. All rights reserved.

    DOI: 10.1149/2.0181707jss

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  • Multiple Roles of Hydrogen Treatments in Amorphous In-Ga-Zn-O Films 査読

    Haochun Tang, Yosuke Kishida, Keisuke Ide, Yoshitake Toda, Hidenori Hiramatsu, Satoru Matsuishi, Shigenori Ueda, Naoki Ohashi, Hideya Kumomi, Hideo Hosono, Toshio Kamiya

    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY   6 ( 7 )   P365 - P372   2017年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELECTROCHEMICAL SOC INC  

    The roles of hydrogen introduced by post-deposition hydrogen treatments were investigated for amorphous In-Ga-Zn-O (a-IGZO) films using room-temperature hydrogen plasma (H-plasma) and high-temperature H-2 annealing. It was found that these treatments cause different effects as confirmed by hard X-ray photoemission spectroscopy and difference spectrum analyses. The H-plasma treatment increased both the near-valence band maximum (near-VBM) states (observed just above VBM) and the -OH bonds (confirmed by O 1s core spectrum) if a-IGZO films were deposited under an optimum condition, leading to the conclusion that the room-temperature H treatment incorporates H to a-IGZO films as -OH bonds, and the increase in the relatively shallow near-VBM states (peaked at similar to 1.0 eV, extended to similar to 2.4 eV from VBM) is ascribed to the generated -OH bonds. On the other hand, high-temperature H-2 annealing did not increase the O 1s -OH signal, and its difference spectrum showed a different peak centered at similar to 0.7 eV. This difference spectrum is similar to that of H-less a-IGZO films deposited without O-2 supply by ultra-high vacuum sputtering and assigned to oxygen deficiency. These results will contribute to control the operation characteristics and the instability issues of a-IGZO TFTs. Further, the deconvoluted difference spectra will be the standard fingerprints of these defects in a-IGZO. (C) 2017 The Electrochemical Society. All rights reserved.

    DOI: 10.1149/2.0071707jss

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  • Publisher's Note: Amorphous Gallium Oxide as an Improved Host for Inorganic Light-Emitting Thin Film Semiconductor Fabricated at Room Temperature on Glass (vol 6, pg P410, 2017) 査読

    Naoto Watanabe, Junghwan Kim, Keisuke Ide, Hidenori Hiramatsu, Hiroshi Kumigashira, Shigenori Ueda, Hideo Hosono, Toshio Kamiya

    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY   6 ( 8 )   XI - XI   2017年

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    記述言語:英語   出版者・発行元:ELECTROCHEMICAL SOC INC  

    DOI: 10.1149/2.0171708jss

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  • Amorphous Gallium Oxide as an Improved Host for Inorganic Light-Emitting Thin Film Semiconductor Fabricated at Room Temperature on Glass (vol 6, pg P410, 2017) 査読

    Naoto Watanabe, Junghwan Kim, Keisuke Ide, Hidenori Hiramatsu, Hiroshi Kumigashira, Shigenori Ueda, Hideo Hosono, Toshio Kamiya

    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY   6 ( 7 )   X1 - X1   2017年

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    記述言語:英語   出版者・発行元:ELECTROCHEMICAL SOC INC  

    DOI: 10.1149/2.0171708jss

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  • Amorphous pnictide semiconductor BaZn2As2 exhibiting high hole mobility 査読

    Zewen Xiao, Fan-Yong Ran, Min Liao, Shigenori Ueda, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    APPLIED PHYSICS LETTERS   109 ( 24 )   2016年12月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER INST PHYSICS  

    We selected BaZn2As2 as a candidate for a high-mobility p-type amorphous semiconductor because of the valence band maximum formed mainly of widely spread As 4p orbitals. The hole mobility of amorphous BaZn2As2 films increased from 1 to 10 cm(2) V-1 s(-1) as the annealing temperature increased from 300 to 400 degrees C. 500 degrees C annealing started crystallizing the film with the hole mobility similar to 20 cm(2) V-1 s(-1). The optical bandgaps of amorphous BaZn2As2 were 1.04-1.37 eV, which are much larger than that of the crystalline beta-BaZn2As2 (0.23 eV). It is explained by the broken symmetry at the Ba site and the weakening of the As-As direct bonds, which is supported by 6 keV hard X-ray photoemission spectroscopy measurement. Published by AIP Publishing.

    DOI: 10.1063/1.4972039

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  • Enhanced critical-current in P-doped BaFe2As2 thin films on metal substrates arising from poorly aligned grain boundaries 査読

    Hikaru Sato, Hidenori Hiramatsu, Toshio Kamiya, Hideo Hosono

    SCIENTIFIC REPORTS   6   2016年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:NATURE PUBLISHING GROUP  

    Thin films of the iron-based superconductor BaFe2(As1-xPx)(2) (Ba122:P) were fabricated on polycrystalline metal-tape substrates with two kinds of in-plane grain boundary alignments (well aligned (4 degrees) and poorly aligned (8 degrees)) by pulsed laser deposition. The poorly aligned substrate is not applicable to cuprate-coated conductors because the in-plane alignment &gt; 4 degrees results in exponential decay of the critical current density (J(c)). The Ba122:P film exhibited higher J(c) at 4 K when grown on the poorly aligned substrate than on the well-aligned substrate even though the crystallinity was poorer. It was revealed that the misorientation angles of the poorly aligned samples were less than 6 degrees, which are less than the critical angle of an iron-based superconductor, cobalt-doped BaFe2As2 (similar to 9 degrees), and the observed strong pinning in the Ba122:P is attributed to the high-density grain boundaries with the misorientation angles smaller than the critical angle. This result reveals a distinct advantage over cuprate-coated conductors because well-aligned metal-tape substrates are not necessary for practical applications of the iron-based superconductors.

    DOI: 10.1038/srep36828

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  • Preface 査読

    David Ginley, Claes-G. Granqvist, George Kiriakidis, Andreas Klein, Toshio Kamiya, Hideo Hosono

    Thin Solid Films   614   43   2016年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Elsevier B.V.  

    DOI: 10.1016/j.tsf.2016.07.054

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  • Effects of thermal annealing on elimination of deep defects in amorphous In-Ga-Zn-O thin-film transistors 査読

    Haochun Tang, Keisuke Ide, Hidenori Hiramatsu, Shigenori Ueda, Naoki Ohashi, Hideya Kumomi, Hideo Hosono, Toshio Kamiya

    THIN SOLID FILMS   614   73 - 78   2016年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    We investigated the effects of thermal annealing for high-density subgap states in amorphous In-Ga-Zn-O (a-IGZO) films by focusing on low-quality defective films deposited without O-2 supply (LQ films). It was found that most of the subgap states were thermally unstable and decreased dramatically by annealing at &lt;= 400 degrees C in O-2. These defects (but with different shapes) were further reduced by 600 degrees C annealing, whose subgap states appeared similar to that of a-IGZO films deposited at an optimum condition (high quality, HQ films) and annealed at 300 degrees C. However, electron Hall mobilities and field-effect mobilities of their thin-film transistors (TFTs) were low for the LQ films/TFTs even annealed at 600 degrees C compared to those for the HQ films/TFTs. It implies that not only the subgap states but also heavier structural disorder deteriorated the electron transport in the LQ films. The present results also suggest that although a-IGZO deposition without O-2 supply is sometimes employed in particular for DC sputtering, supplying some O-2 gas would be better to produce good TFTs at lower temperatures. (C) 2016 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2016.03.005

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  • Ultrawide band gap amorphous oxide semiconductor, Ga-Zn-O 査読

    Junghwan Kim, Norihiko Miyokawa, Takumi Sekiya, Keisuke Ide, Yoshitake Toda, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    THIN SOLID FILMS   614   84 - 89   2016年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    We fabricated amorphous oxide semiconductor films, a-(Ga1-xZnx)O-y, at room temperature on glass, which have widely tunable band gaps (E-g) ranging from 3.47-4.12 eV. The highest electron Hall mobility similar to 7 cm(2) V-1 s(-1) was obtained for E-g = similar to 3.8 eV. Ultraviolet photoemission spectroscopy revealed that the increase in E-g with increasing the Ga content comes mostly from the deepening of the valence band maximum level while the conduction band minimum level remains almost unchanged. These characteristics are explained by their electronic structures. As these films can be fabricated at room temperature on plastic, this achievement extends the applications of flexible electronics to opto-electronic integrated circuits associated with deep ultraviolet region. (C) 2016 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2016.03.003

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  • 69-4: NBIS-Stable Oxide Thin-Film Transistors Using Ultra-Wide Bandgap Amorphous Oxide Semiconductors

    Junghwan Kim, Nobuhiro Nakamura, Toshio Kamiya, Hideo Hosono

    SID Symposium Digest of Technical Papers   47 ( 1 )   951 - 953   2016年5月

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    掲載種別:研究論文(学術雑誌)   出版者・発行元:Wiley-Blackwell  

    DOI: 10.1002/sdtp.10883

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  • Transparent amorphous oxide semiconductor thin film phosphor, In-Mg-O:Eu 査読

    Junghwan Kim, Norihiko Miyokawa, Keisuke Ide, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN   124 ( 5 )   532 - 535   2016年5月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:CERAMIC SOC JAPAN-NIPPON SERAMIKKUSU KYOKAI  

    We succeeded in fabricating light-emitting amorphous oxide (LEAO) thin films by doping Eu3+ ions to amorphous In-Mg-O deposited at room temperature using (In, Eu)(2)MgO4 polycrystalline targets by pulsed laser deposition. Clearly visible photoluminescence (PL) with a peak at 615 nm was observed at room temperature by 270 nm light excitation even without post-deposition thermal annealing. The unusual variation of PL intensity with Eu concentration is understood in terms of non-radiative Auger recombination via conduction carriers. The PL intensity also exhibited maximums with respect to oxygen pressure during deposition (PO2) and annealing temperature (T-a), which are explained by recombination centers generated by oxygen deficiency-related defects at low PO2, by excess/weakly-bonded oxygen at high PO2, and by hydrogen depletion at high T-a. Since the LEAO films can be obtained even by room-temperature deposition, it is expected to have flexible optoelectronic applications using plastic substrates. (C) 2016 The Ceramic Society of Japan. All rights reserved.

    DOI: 10.2109/jcersj2.15283

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  • Novel solid-phase epitaxy for multi-component materials with extremely high vapor pressure elements: An application to KFe2As2 査読

    Taisuke Hatakeyama, Hikaru Sato, Hidenori Hiramatsu, Toshio Kamiya, Hideo Hosono

    APPLIED PHYSICS EXPRESS   9 ( 5 )   2016年5月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IOP PUBLISHING LTD  

    We propose a novel solid-phase epitaxy technique applicable to high annealing temperatures up to 1000 degrees C without re-vaporization of alkali metal elements with high vapor pressures. This technique is demonstrated through the successful growth of high-quality KFe2As2 epitaxial films. The key factors are employing a custom-designed alumina vessel/cover and sealing it in a stainless tube with a large amount of atmospheric KFe2As2 powder in tightly closed sample spaces. This technique can also be effective for other materials composed of elements with very high vapor pressures, such as alkali metals, and can lead to the realization of spintronics devices in the future using KFe2As2. (C) 2016 The Japan Society of Applied Physics.

    DOI: 10.7567/APEX.9.055505

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  • N-type conduction in SnS by anion substitution with Cl 査読

    Hiroshi Yanagi, Yuki Iguchi, Taiki Sugiyama, Toshio Kamiya, Hideo Hosono

    Applied Physics Express   9 ( 5 )   2016年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IOP Publishing  

    DOI: 10.7567/APEX.9.051201

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  • Electric field-induced superconducting transition of insulating FeSe thin film at 35 K 査読

    Kota Hanzawa, Hikaru Sato, Hidenori Hiramatsu, Toshio Kamiya, Hideo Hosono

    PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA   113 ( 15 )   3986 - 3990   2016年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:NATL ACAD SCIENCES  

    It is thought that strong electron correlation in an insulating parent phase would enhance a critical temperature (T-c) of superconductivity in a doped phase via enhancement of the binding energy of a Cooper pair as known in high-T-c cuprates. To induce a superconductor transition in an insulating phase, injection of a high density of carriers is needed (e.g., by impurity doping). An electric double-layer transistor (EDLT) with an ionic liquid gate insulator enables such a field-induced transition to be investigated and is expected to result in a high T-c because it is free from deterioration in structure and carrier transport that are in general caused by conventional carrier doping (e.g., chemical substitution). Here, for insulating epitaxial thin films (similar to 10 nm thick) of FeSe, we report a high T-c of 35 K, which is 4x higher than that of bulk FeSe, using an EDLT under application of a gate bias of + 5.5 V. Hall effect measurements under the gate bias suggest that highly accumulated electron carrier in the channel, whose area density is estimated to be 1.4 x 10(15) cm(-2) (the average volume density of 1.7 x 10(21) cm(-3)), is the origin of the high-T-c superconductivity. This result demonstrates that EDLTs are useful tools to explore the ultimate T-c for insulating parent materials.

    DOI: 10.1073/pnas.1520810113

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  • Solid phase epitaxial growth of high mobility La: BaSnO3 thin films co-doped with interstitial hydrogen 査読

    Christian A. Niedermeier, Sneha Rhode, Sarah Fearn, Keisuke Ide, Michelle A. Moram, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    APPLIED PHYSICS LETTERS   108 ( 17 )   2016年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER INST PHYSICS  

    This work presents the solid phase epitaxial growth of high mobility La: BaSnO3 thin films on SrTiO3 single crystal substrates by crystallization through thermal annealing of nanocrystalline thin films prepared by pulsed laser deposition at room temperature. The La: BaSnO3 thin films show high epitaxial quality and Hall mobilities up to 26 +/- 1 cm(2)/Vs. Secondary ion mass spectroscopy is used to determine the La concentration profile in the La: BaSnO3 thin films, and a 9%-16% La doping activation efficiency is obtained. An investigation of H doping to BaSnO3 thin films is presented employing H plasma treatment at room temperature. Carrier concentrations in previously insulating BaSnO3 thin films were increased to 3 +/- 10(19) cm(-3) and in La: BaSnO3 thin films from 6 x 10(19) cm(-3) to 1.5 x 10(20) cm(-3), supporting a theoretical prediction that interstitial H serves as an excellent n-type dopant. An analysis of the free electron absorption by infrared spectroscopy yields a small (H, La): BaSnO3 electron effective mass of 0.27 +/- 0.05 m(0) and an optical mobility of 26 +/- 7cm(2)/Vs. As compared to La: BaSnO3 single crystals, the smaller electron mobility in epitaxial thin films grown on SrTiO3 substrates is ascribed to threading dislocations as observed in high resolution transmission electron micrographs. Published by AIP Publishing.

    DOI: 10.1063/1.4948355

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  • Nonequilibrium Rock-Salt-Type Pb-Doped SnSe with High Carrier Mobilities approximate to 300 cm(2)/(Vs) 査読

    Takeshi Inoue, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    CHEMISTRY OF MATERIALS   28 ( 7 )   2278 - 2286   2016年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    We synthesized nonequilibrium cubic rock-salt (RS)-type (Sn,Pb)Se and investigated their optoelectronic properties with the expectation that the RS-type structure would exhibit better carrier transport properties than the equilibrium GeS-type layered crystal structure in SnSe because the RS-type structure has the three-dimensional network of (PbSe6) octahedra, while the GeS-type structure has the two-dimensional network of (SnSe3), leading to larger band dispersions and smaller carrier effective masses. To stabilize the nonequilibrium phase, epitaxial thin films were grown by a unique method, a reactive solid-phase epitaxy with a thin RS-type PbSe epitaxial template layer. Additionally, a rapid quenching process from 600 degrees C to room temperature was also effective for stabilizing the nonequilibrium RS-type (Sn,Pb)Se epitaxial films. We succeeded in controlling Pb concentration continuously from 0 to 100% in the (Sn,Pb)Se solid-solution films. The minimum Pb concentration to stabilize the RS-type SnSe was extended from the previously reported value of 63% to 50%. A band gap bowing effect was observed with the smallest estimated band gap of similar to 0.14 eV for the RS-type (Sn0.35Pb0.65)Se. The GeS-type to RS-type structural change increased hole mobility drastically from 60 for SnSe to 290 cm(2)/(Vs) for 58% Pb-doped RS-type (Sn,Pb)Se film as expected. It was found that p-type to n-type conversion occurs by further higher Pb concentrations &gt;= 61%, and the highest electron mobility of 340 cm(2)/(Vs) was observed.

    DOI: 10.1021/acs.chemmater.6b00307

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  • Oxide TFTs 査読

    Toshio Kamiya, Hideo Hosono

    Handbook of Visual Display Technology   1111 - 1144   2016年1月

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    記述言語:英語   掲載種別:論文集(書籍)内論文   出版者・発行元:Springer International Publishing  

    Research on oxide semiconductor has advanced significantly in the last decade. In particular, transparent amorphous oxide semiconductor (TAOS) was proposed as a novel class of amorphous semiconductors having large electron mobility comparable to those in the corresponding crystals. Since the application of TAOS to an active layer in thin-film transistors (TFTs) was reported in late 2004, extensive research on application of TAOS TFT, in particular In-Ga-Zn-O (IGZO)-based TAOS, to the backplanes of state-of-the-art flat-panel displays has been performed, and many displays driven by oxide backplanes have been commercialized. This chapter first gives a review on the history and present status of oxide semiconductors, then explains the unique nature of TAOS and advantages of TAOS over other semiconductors, and finally describes the fabrication process and condition suitable for TAOS TFTs.

    DOI: 10.1007/978-3-319-14346-0_52

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  • Room-temperature fabrication of light-emitting thin films based on amorphous oxide semiconductor 査読

    Junghwan Kim, Norihiko Miyokawa, Keisuke Ide, Yoshitake Toda, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    AIP ADVANCES   6 ( 1 )   2016年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER INST PHYSICS  

    We propose a light-emitting thin film using an amorphous oxide semiconductor (AOS) because AOS has low defect density even fabricated at room temperature. Eu-doped amorphous In-Ga-Zn-O thin films fabricated at room temperature emitted intense red emission at 614 nm. It is achieved by precise control of oxygen pressure so as to suppress oxygen-deficiency/excess-related defects and free carriers. An electronic structure model is proposed, suggesting that non-radiative process is enhanced mainly by defects near the excited states. AOS would be a promising host for a thin film phosphor applicable to flexible displays as well as to light-emitting transistors. (C) 2016 Author(s).

    DOI: 10.1063/1.4939939

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  • SnS thin films prepared by H2S-free process and its p-type thin film transistor 査読

    Fan-Yong Ran, Zewen Xiao, Hidenori Hiramatsu, Keisuke Ide, Hideo Hosono, Toshio Kamiya

    AIP ADVANCES   6 ( 1 )   2016年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER INST PHYSICS  

    Polycrystalline SnS thin films were fabricated by a H2S-free process combing pulsed laser deposition at room temperature and post-deposition thermal annealing in Ar. Thermal annealing improved the crystalline quality of the SnS films and the best films were obtained by 400 degrees C annealing. The obtained SnS films exhibited p-type conduction with the highest Hall mobility of 28 cm(2)/(V.s) and the carrier densities of 1.5 x 10(15) - 1.8 x 10(16) cm(-3). The SnS TFT exhibited p-type operation with a field effect mobility and an on-off drain current ratio of 0.4 cm(2)/(V.s) and 20, respectively. (C) 2016 Author(s).

    DOI: 10.1063/1.4940931

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  • Why high-pressure sputtering must be avoided to deposit a-In-Ga-Zn-O films 査読

    Keisuke Ide, Mitsuho Kikuchi, Masato Sasase, Hidenori Hiramatsu, Hideya Kumomi, Hideo Hosono, Toshio Kamiya

    2016 23RD INTERNATIONAL WORKSHOP ON ACTIVE-MATRIX FLATPANEL DISPLAYS AND DEVICES (AM-FPD)   298 - 301   2016年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:IEEE  

    Film density of amorphous In-Ga-Zn-O (a-IGZO) was varied in a wide range to investigate the origin of the low film density and its effect on thin-film transistor (TFT) characteristics. Device-quality a-IGZO films have the densities similar to 6.1 g/cm(3), which is similar to 5% smaller than that of single-crystal InGaZnO4 (c-IGZO) (6.4 g/cm(3)). On the other hand, extremely low density of 5.5 g/cm(3) was obtained when the sputtering working pressure (P-Tot) was increased to 5 Pa. High density desorption of H2O and O-2 was detected in the low-density films, which are attributed to an origin of the low density. Although the low-density channel produced poor TFTs, good TFT characteristics were obtained by annealing at T-ann = 300 degrees C. The densities of the low-density films obtained by X-ray reflectivity (XRR) analysis were, however, almost unchanged up to T-ann = 500 degrees C, while spectroscopic ellipsometry (SE) analysis showed that densification started from 100 degrees C. This contradiction is explained by transmission electron microscopy (TEM). Although conventional high-resolution TEM (HR-TEM) observation could not detect a microstructure in the high-density a-IGZO films, high-angle annular dark field scanning TEM (HAADF-STEM) detected nano-scale low-density regions. The low-density films had larger and more voids. These void structures were not found in very thin regions (5-10 nm from the substrate surface) but increased in thicker regions.

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  • Difficulty of carrier generation in orthorhombic PbO 査読

    Liao Min, Takemoto Seiji, Xiao Zewen, Toda Yoshitake, Tada Tomofumi, Ueda Shigenori, Kamiya Toshio, Hosono Hideo

    Journal of Applied Physics   119 ( 16 )   2016年

  • Electron Confinement in Channel Spaces for One-Dimensional Electride 査読

    Yaoqing Zhang, Zewen Xiao, Toshio Kamiya, Hideo Hosono

    JOURNAL OF PHYSICAL CHEMISTRY LETTERS   6 ( 24 )   4966 - 4971   2015年12月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    Electrides are characteristic of anionic electrons trapped at the structural voids in the host lattice. Electrides are potentially useful in various technological applications; however, electrides, particularly their inorganic subgroup, have been discovered only in limited material systems, notably zero-dimensional [Ca24Al28O64](4+):4e(-) and two-dimensional [Ca2N](+):e(-) and [Y2C](1.8+):1.8e(-). Here, on the basis of density functional theory calculations, we report the first one- dimensional (1D) electride with a [La8Sr2(SiO4)(6)](4+):4e(-) configuration, in which the four anionic electrons are confined in the channel spaces of the host material. According to this theoretical prediction, an insulator semiconductor transition originating from electron confinement in the crystallographic channel sites was demonstrated experimentally, where 10.5% of the channel oxygen was removed by reacting an oxygen stoichiometric La8Sr2(SiO4)(6)O-2 precursor with Ti metal at a high temperature. This study not only adds an unprecedented role to silicate apatite as a parent phase to a new 1D electride, but also, and more importantly, demonstrates an effective approach for developing new electrides with the assistance of computational design.

    DOI: 10.1021/acs.jpclett.5b02283

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  • Effects of residual hydrogen in sputtering atmosphere on structures and properties of amorphous In-Ga-Zn-O thin films 査読

    Haochun Tang, Kyohei Ishikawa, Keisuke Ide, Hidenori Hiramatsu, Shigenori Ueda, Naoki Ohashi, Hideya Kumomi, Hideo Hosono, Toshio Kamiya

    JOURNAL OF APPLIED PHYSICS   118 ( 20 )   2015年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER INST PHYSICS  

    We investigated the effects of residual hydrogen in sputtering atmosphere on subgap states and carrier transport in amorphous In-Ga-Zn-O (a-IGZO) using two sputtering systems with different base pressures of similar to 10(-4) and 10(-7) Pa (standard (STD) and ultrahigh vacuum (UHV) sputtering, respectively), which produce a-IGZO films with impurity hydrogen contents at the orders of 10(20) and 10(19) cm(-3), respectively. Several subgap states were observed by hard X-ray photoemission spectroscopy, i.e., peak-shape near-valence band maximum (near-VBM) states, shoulder-shape near-VBM states, peak-shape near-conduction band minimum (near-CBM) states, and step-wise near-CBM states. It was confirmed that the formation of these subgap states were affected strongly by the residual hydrogen (possibly H2O). The step-wise near-CBM states were observed only in the STD films deposited without O-2 gas flow and attributed to metallic In. Such step-wise near-CBM state was not detected in the other films including the UHV films even deposited without O-2 flow, substantiating that the metallic In is segregated by the strong reduction effect of the hydrogen/H2O. Similarly, the density of the near-VBM states was very high for the STD films deposited without O-2. These films had low film density and are consistent with a model that voids in the amorphous structure form a part of the near-VBM states. On the other hand, the UHV films had high film densities and much less near-VBM states, keeping the possibility that some of the near-VBM states, in particular, of the peak-shape ones, originate from -OH and weakly bonded oxygen. These results indicate that 2% of excess O-2 flow is required for the STD sputtering to compensate the effects of the residual hydrogen/H2O. The high-density near-VBM states and the metallic In segregation deteriorated the electron mobility to 0.4 cm(2)/(V s). (C) 2015 AIP Publishing LLC.

    DOI: 10.1063/1.4936552

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  • Heteroepitaxial growth of SnSe films by pulsed laser deposition using Se-rich targets 査読

    Takeshi Inoue, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    JOURNAL OF APPLIED PHYSICS   118 ( 20 )   2015年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER INST PHYSICS  

    Epitaxial growth of SnSe was studied using pulsed laser deposition on three kinds of single-crystalline substrates, MgO (100), NaCl (100), and SrF2 (100), along with silica glass. For polycrystalline SnSe grown on glass, we found that a 20% Se-rich polycrystalline target is effective for obtaining stoichiometric SnSe films. The crystal structure of all the obtained films was the same as that of bulk SnSe, and the optimum temperatures for epitaxial growth were 400-500 degrees C, where the highest temperature was limited by re-evaporation. All the epitaxial films exhibited an a-axis orientation. For in-plane epitaxial structures, a quasi cube-on-cube heteroepitaxy was observed for MgO, whereas a 45 degrees-rotated heteroepitaxy was observed for NaCl and SrF2, which can be explained by in-plane lattice matching. The anisotropic lattice mismatching and thermal expansion explain the compressive strain induced along the in-plane c-axis and the tensile strains along the in-plane b-axis and the out-of-plane a-axis. The epitaxial films on NaCl exhibited the best crystallinity, but the highest hole mobility of 60 cm(2)/(V s) was obtained on MgO. The indirect optical gap of the best films was determined to be 0.8 eV. Plausible interface models were proposed based on density functional calculations. (C) 2015 AIP Publishing LLC.

    DOI: 10.1063/1.4936202

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  • Ligand-Hole in [SnI6] Unit and Origin of Band Gap in Photovoltaic Perovskite Variant Cs2SnI6 査読

    Zewen Xiao, Hechang Lei, Xiao Zhang, Yuanyuan Zhou, Hideo Hosono, Toshio Kamiya

    BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN   88 ( 9 )   1250 - 1255   2015年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:CHEMICAL SOC JAPAN  

    Cs2SnI6, a variant of perovskite CsSnI3, is gaining interest as a photovoltaic material. Based on a simple ionic model, it is expected that Cs2SnI6 is composed of Cs+, I-, and Sn4+ ions and that the band gap is primarily made of occupied I- 5p(6) valence band maximum (VBM) and unoccupied Sn4+ 5s conduction band minimum (CBM) similar to SnO2. In this work, we performed density functional theory (DFT) calculations and revealed that the real oxidation state of the Sn ion in Cs2SnI6 is +2 similar to CsSnI3. The +2 oxidation state of Sn originates from 2 ligand holes (L+) in the [SnI6](2-) octahedron unit, where the ligand [Id cluster has the apparent [I-6(6)-(L) under bar (+)(2)](4-) oxidation state, because the band gap is formed mainly by occupied I 5p VBM and unoccupied I 5p CBM. The +2 oxidation state of Sn and the band gap originate from the intracluster hybridization and stabilized by the strong covalency of the Sn-I bonds.

    DOI: 10.1246/bcsj.20150110

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  • Analyses of Surface and Interfacial Layers in Polycrystalline Cu2O Thin-Film Transistors 査読

    Fan-Yong Ran, Masataka Taniguti, Hideo Hosono, Toshio Kamiya

    JOURNAL OF DISPLAY TECHNOLOGY   11 ( 9 )   720 - 724   2015年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    Effects of low temperature (300 degrees C) annealing on Cu2O films were investigated by analyzing the film stacking structures with photoemission spectroscopy, X-ray reflectivity spectroscopy and spectroscopic ellipsometory in relation to p-channel TFT characteristics and possible origins of trap states. The Hall mobility of optimum Cu2O films was 2.1 cm(2)/(V.s); however, the bottom-gate Cu2O TFT exhibited a much lower field effect mobility of the order of 10(-4) cm(2)/(V.s) and an on/ off drain current ratio of 10(3). This work detected a surface layer and an interface layer in the Cu2O/SiO2 samples, i.e., the surface layer included the state of Cu ions that would form subgap hole trap states at the back channel region. In addition, the low-density layer at the Cu2O-SiO2 interface would produce extra interfacial trap states.

    DOI: 10.1109/JDT.2015.2432752

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  • Detection of dead layers and defects in polycrystalline Cu2O thin-film transistors by x-ray reflectivity and photoresponse spectroscopy analyses 査読

    Fan-Yong Ran, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya, Masataka Taniguti

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   33 ( 5 )   2015年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:A V S AMER INST PHYSICS  

    Polycrystalline Cu2O films were fabricated on amorphous SiO2 glass by pulsed laser deposition at room temperature and postdeposition thermal annealing in N-2 + O-2 mixing gases. The authors made a phase map in annealing temperature (T-ann) vs R-O2 = [O-2]/([O-2] +[N-2]) ratio and found that highly pure Cu2O films were obtained at R-O2 similar to 0.002%. The increase in T-ann improved the crystal quality of the Cu2O films, and the maximum Hall mobility of similar to 26 cm(2)/(V s) was obtained at 700 degrees C. Bottom-gate Cu2O thin-film transistors (TFTs) using the optimum Cu2O channels exhibited clear p-type operation; however, the largest field effect mobility is as small as the order of 10(-2) cm(2)/(V s), indicating the existence of high-density hole trap states. Several subgap states were observed by optical absorption spectra of films and photoresponse spectroscopy of the TFTs. X-ray reflectivity analysis detected a low-density dead layer at the Cu2O-SiO2 glass substrate interface, which would be attributed to Cu diffusion into the glass substrate. (C) 2015 American Vacuum Society.

    DOI: 10.1116/1.4929445

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  • Fabrication and opto-electrical properties of amorphous (Zn, B) O thin film by pulsed laser deposition 査読

    Hao-Chun Tang, Junghwan Kim, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN   123 ( 1439 )   523 - 526   2015年7月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:CERAMIC SOC JAPAN-NIPPON SERAMIKKUSU KYOKAI  

    Growth of amorphous ZnO by B doping and their opto-electrical properties are reported. The B-doped ZnO (ZnO:B) films were grown by pulsed laser deposition using polycrystalline ZnO:B ceramic targets. Although the solubility limit of B in bulk ZnO polycrystal was similar to 4%, 18%-doped ZnO:B showed the shrinkage in the c-axis length. Preferentially (002)-oriented polycrystalline ZnO:B films were grown for the B concentration [B] &lt;= 18%; while, amorphous ZnO:B films were obtained for [B] similar to 26%. It was found that the density of the amorphous ZnO:B film was smaller by 9% than that of crystalline ZnO (5.61 g.cm(-3)), which is explained mainly by the incorporation of the light B atoms. The optical bandgap of the ZnO:B films increased with [B] and that of the amorphous ZnO:B film was similar to 3.38 eV. The amorphous ZnO:B films have low free electron density of similar to 10(15) cm(-3), suggesting the existence of electron traps. Hall mobility of the amorphous ZnO:B [similar to 1 cm(2)(V.s)(-1)] was smaller than those of the polycrystalline ZnO:B films. (C) 2015 The Ceramic Society of Japan. All rights reserved.

    DOI: 10.2109/jcersj2.123.523

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  • Effects of sulfur substitution in amorphous InGaZnO4: optical properties and first-principles calculations 査読

    Junghwan Kim, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    JOURNAL OF THE CERAMIC SOCIETY OF JAPAN   123 ( 1439 )   537 - 541   2015年7月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:CERAMIC SOC JAPAN-NIPPON SERAMIKKUSU KYOKAI  

    Amorphous InGaZnO4-xSx thin films were fabricated using a polycrystalline InGaZnO4 target by pulsed laser deposition in an H2S gas flow. The optical band gap first decreased from 3.05 to 1.65 eV as x increased from 0 to 1.5, and then increased to 2.6 eV at larger x, showing a bandgap bowing behavior. All the sulfur-containing films have high resistance beyond our measurement limit. Film density of the a-InGaZnS4 film was decreased by similar to 40% from that of a-InGaZnO4. Density functional theory calculations were performed to explain these results. (C) 2015 The Ceramic Society of Japan. All rights reserved.

    DOI: 10.2109/jcersj2.123.537

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  • Origin of Lower Film Density and Larger Defect Density in Amorphous In-Ga-Zn-O Deposited at High Total Pressure 査読

    Jakub Grochowski, Yuichiro Hanyu, Katsumi Abe, Jakub Kaczmarski, Jan Dyczewski, Hidenori Hiramatsu, Hideya Kumomi, Hideo Hosono, Toshio Kamiya

    JOURNAL OF DISPLAY TECHNOLOGY   11 ( 6 )   523 - 527   2015年6月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    Amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) are employed in current flat-panel displays. It is known that deposition conditions and post-deposition thermal annealing affect structure and electrical properties of a-IGZO thin films. It was previously reported that total pressure during sputter-deposition deteriorates subthreshold swing, defect density and operation characteristics of a-IGZO TFTs. Here, we provide comprehensive results on effects of total pressure on film density, chemical composition, and TFT characteristics. Rutherford backscattering measurements detected a small amount of argon incorporated in all of the a-IGZO films. We found that increasing the total pressure deteriorated TFT characteristics; i.e., saturation mobility was dropped from 10 to 4 cm(2)/(V.s), subthreshold swing was increased from 0.2 to 0.5 V/dec, and threshold voltage was positive-shifted from 2 to 15 V. It is related to increased oxygen concentration and decreased weight density of the a-IGZO films. Thermal desorption spectra showed that amounts of weakly-bonded oxygen increased as the total pressure increased, which is considered to be related to the TFT deterioration.

    DOI: 10.1109/JDT.2014.2359746

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  • Vortex Pinning Properties of Phosphorous-Doped BaFe2As2 Epitaxial Films: Comparison Between (La, Sr)(Al, Ta)O-3 and MgO Substrates 査読

    Hikaru Sato, Hidenori Hiramatsu, Toshio Kamiya, Hideo Hosono

    IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY   25 ( 3 )   2015年6月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    Phosphorus-doped BaFe2As2 (BaFe2As2 : P) epitaxial films were fabricated on (La, Sr)(Al, Ta)O-3 single-crystal substrates, and their crystallinity, microstructure, and transport critical current density (J(c)) properties were characterized. Compared with those of previously reported BaFe2As2 : P epitaxial films on MgO substrates, a decrease in the self-field J(c) and strong pinning properties along the c-axis under high magnetic fields were observed. These results can be understood by considering the poor crystallinity and the large density of the domain boundary pinning centers of the present films on (La, Sr)(Al, Ta)O-3, which would be caused by a thin reaction layer produced between the BaFe2As2 : P film and the (La, Sr)(Al, Ta)O-3 substrate.

    DOI: 10.1109/TASC.2014.2368073

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  • n-type conversion of SnS by isovalent ion substitution: Geometrical doping as a new doping route 査読

    Fan-Yong Ran, Zewen Xiao, Yoshitake Toda, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    SCIENTIFIC REPORTS   5   2015年5月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:NATURE PUBLISHING GROUP  

    Tin monosulfide (SnS) is a naturally p-type semiconductor with a layered crystal structure, but no reliable n-type SnS has been obtained by conventional aliovalent ion substitution. In this work, carrier polarity conversion to n-type was achieved by isovalent ion substitution for polycrystalline SnS thin films on glass substrates. Substituting Pb2+ for Sn2+ converted the majority carrier from hole to electron, and the free electron density ranged from 10(12) to 10(15) cm(-3) with the largest electron mobility of 7.0 cm(2)/(Vs). The n-type conduction was confirmed further by the position of the Fermi level (EF) based on photoemission spectroscopy and electrical characteristics of pn heterojunctions. Density functional theory calculations reveal that the Pb substitution invokes a geometrical size effect that enlarges the interlayer distance and subsequently reduces the formation energies of Sn and Pb interstitials, which results in the electron doping.

    DOI: 10.1038/srep10428

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  • Route to n-type doping in SnS 査読

    Zewen Xiao, Fan-Yong Ran, Hideo Hosono, Toshio Kamiya

    APPLIED PHYSICS LETTERS   106 ( 15 )   2015年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER INST PHYSICS  

    SnS is intrinsically a p-type semiconductor, and much effort has been made to attain n-type conduction. In this letter, we performed density functional theory calculations to seek an effective doping route for n-type SnS. It was found that aliovalent doping of SnS by Sb or Bi is not effective due to their high formation enthalpies; while the isovalent Pb-substitution of the Sn sites largely reduces formation enthalpies of Sn and Pb interstitials, which explain the recently demonstrated n-type conduction in the Sn1-xPbxS films fabricated under low H2S pressures. (c) 2015 AIP Publishing LLC.

    DOI: 10.1063/1.4918294

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  • Widely bandgap tunable amorphous Cd-Ga-O oxide semiconductors exhibiting electron mobilities ≥10-cm2-V-1-s-1 査読

    Yanagi, H., Sato, C., Kimura, Y., Suzuki, I., Omata, T., Kamiya, T., Hosono, H.

    Applied Physics Letters   106 ( 8 )   82106   2015年2月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1063/1.4913691

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  • Intrinsic defects in a photovoltaic perovskite variant Cs2SnI6 査読

    Zewen Xiao, Yuanyuan Zhou, Hideo Hosono, Toshio Kamiya

    PHYSICAL CHEMISTRY CHEMICAL PHYSICS   17 ( 29 )   18900 - 18903   2015年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ROYAL SOC CHEMISTRY  

    Cs2SnI6, a rarely studied perovskite variant material, is recently gaining a lot of interest in the field of photovoltaics owing to its nontoxicity, air-stability and promising photovoltaic properties. In this work, we report intrinsic defects in Cs2SnI6 using first-principles density functional theory calculations. It is revealed that iodine vacancy and tin interstitial are the dominant defects that are responsible for the intrinsic n-type conduction in Cs2SnI6. Tin vacancy has a very high formation energy (&gt;3.6 eV) due to the strong covalency in the Sn-I bonds and is hardly generated for p-type doping. All the dominant defects in Cs2SnI6 have deep transition levels in the band gap. It is suggested that the formation of deep defects can be suppressed significantly by employing an I-rich synthesis condition, which is inevitable for photovoltaic and other semiconductor applications.

    DOI: 10.1039/c5cp03102h

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  • Advances in oxide thin-film transistors in recent decade and their future 査読

    Hideya Kumomi, Toshio Kamiya, Hideo Hosono

    ECS Transactions   67 ( 1 )   3 - 8   2015年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:Electrochemical Society Inc.  

    Electronic devices using oxide semiconductor based thin-film transistors (TFTs) were commercialized for the first time in 2012 as backplane active-matrix circuits for flat-panel displays after almost half a century from their first demonstration in 1964. Such a miraculous revival was induced by discovery of high-mobility semiconductor materials made from amorphous oxides of post-transition metals and invention of TFTs using them for their channel materials in 2004. The present paper provides a historical review of oxide semiconductor based TFTs, their recent advances in the recent decade along the strategy and scenario, and a prediction of their future.

    DOI: 10.1149/06701.0003ecst

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  • Effects of Pb Doping on Hole Transport Properties and Thin-Film Transistor Characteristics of SnO Thin Films 査読

    Min Liao, Zewen Xiao, Fan-Yong Ran, Hideya Kumomi, Toshio Kamiya, Hideo Hosono

    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY   4 ( 3 )   Q26 - Q30   2015年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELECTROCHEMICAL SOC INC  

    Effects of Pb doping on the microstructural, optical, and hole transport properties of Sn1-xfPbxfO films fabricated by pulsed laser deposition were investigated. It was found that Pb was not solved in bulk ceramic samples, while solved up to x(f) = 0.035 in the thin films. The Pb doping enlarged the optical bandgap, decreased the hole concentration, and reduced the Hall mobility (mu(Hall), from 1.95 to 0.68 cm(2) V-1 s(-1) up to x(f) = 0.035) as xf increased. The field-effect mobility in thin-film transistors also decreased with xf (mu(lin), from 0.34 to 0.0024 cm(2) V-1 s(-1)), but the deterioration of mu(lin) was significantly larger than that of mu(Hall). It is speculated that the deterioration of mu(Hall) would be due to the increase in grain boundary potential barriers. The deterioration of mu(lin), low on-state current, and high off-state current are explained semiquantitatively by a simple hole trap model. Similar explanations would be applied also to previous reports on Sb/Y doped-SnO. Location of the highest occupied states of Pb2+ relative to that of Sn2+ (i.e., Pb 6s(2) and Sn 5s(2), respectively) clarified by DFTcalculations provides an explantion for the observed result. (C) 2015 The Electrochemical Society. All rights reserved.

    DOI: 10.1149/2.0231503jss

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  • Effects of High-Temperature Annealing on Operation Characteristics of a-In-Ga-Zn-O TFTs 査読

    Yuichiro Hanyu, Katsumi Abe, Kay Domen, Kenji Nomura, Hidenori Hiramatsu, Hideya Kumomi, Hideo Hosono, Toshio Kamiya

    JOURNAL OF DISPLAY TECHNOLOGY   10 ( 11 )   979 - 983   2014年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    We report operation characteristics of amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) annealed in dry O-2 at temperatures up to 700 degrees C. The largest TFT mobilities were obtained by annealing at 200 degrees C-300 degrees C and the smallest subthreshold voltage swing (S) was obtained at 200 degrees C, while those annealed at higher T exhibited poorer mobilities and S values. The TFTs annealed at &gt;= 600 degrees C were crystallized and exhibited further poorer characteristics probably due to grain boundary issues; while, the deterioration by the 400 degrees C-500 degrees C annealing is attributed to depletion of hydrogen and consequent de-passivation effects. Device simulations and photoresponse spectroscopy extracted systematic variation of trap densities in the a-IGZO layer.

    DOI: 10.1109/JDT.2014.2352860

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  • Two-Dimensional Transition-Metal Electride Y2C 査読

    Xiao Zhang, Zewen Xiao, Hechang Lei, Yoshitake Toda, Satoru Matsuishi, Toshio Kamiya, Shigenori Ueda, Hideo Hosono

    CHEMISTRY OF MATERIALS   26 ( 22 )   6638 - 6643   2014年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    Electrides are ionic crystals in which the anionic electrons are confined to interstitial subnanometer-sized spaces. At present, the reported electrides only consist of main-group elements. Here, we report a layered-structure transition-metal hypocarbide electride, Y2C, with quasi-two-dimensional (quasi-2D) anionic electrons confined in the interlayer space. Physical properties measurements reveal polycrystalline Y2C exhibits semimetallic behavior, and paramagnetism with an effective magnetic moment of similar to 0.6 mu(B)/Y, because of the existence of localized d-electrons. Photoelectron spectroscopy measurements illustrate the work function of polycrystalline Y2C is 2.9 eV, lower than Y metal, revealing the loosely bound nature of the anionic electrons. Density functional theory calculations indicate the density of states at the Fermi level originates from the states at interstitial sites and the Y 4d-orbitals, supporting the confinement of anionic electrons within the interlayer space. These results demonstrate that Y2C is a quasi-2D electride in term of [Y2C](1.8+).1.8e , and the coexistence of the anionic electrons and the Y 4d-electrons leads to the semimetallic behavior.

    DOI: 10.1021/cm503512h

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  • Positive-Bias Stress Test on Amorphous In-Ga-Zn-O Thin Film Transistor: Annealing-Temperature Dependence 査読

    Kay Domen, Takaya Miyase, Katsumi Abe, Hideo Hosono, Toshio Kamiya

    JOURNAL OF DISPLAY TECHNOLOGY   10 ( 11 )   975 - 978   2014年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    We performed constant positive gate bias stress tests on sputter-deposited amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) fabricated with various annealing conditions. We found that the time evolution of threshold voltage shift (Delta V-th) during the stress test exhibits two different behaviors; a power function type and a logarithmic function type. Combining with thermal desorption spectroscopy (TDS), we found that the Delta V-th type changes fromthe log-function type to the power-function type as H desorption increases. The power-function type is attributed to a H-diffusion limited process. As for the log-function type, the magnitude of Delta V-th has correlation with the hysteresis width in a first transfer curve and the desorption amount of H2O and O-2 species between 200 degrees C-300 degrees C. Hence, it is considered that the traps causing the log-function type Delta V-th are meta-stable states related to O- and/or OH-related weak bonds.

    DOI: 10.1109/JDT.2014.2350518

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  • Narrow Bandgap in beta-BaZn2As2 and Its Chemical Origins 査読

    Zewen Xiao, Hidenori Hiramatsu, Shigenori Ueda, Yoshitake Toda, Fan-Yong Ran, Jiangang Guo, Hechang Lei, Satoru Matsuishi, Hideo Hosono, Toshio Kamiya

    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY   136 ( 42 )   14959 - 14965   2014年10月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    beta-BaZn2As2 is known to be a p-type semiconductor with the layered crystal structure similar to that of LaZnAsO, leading to the expectation that beta-BaZn2As2 and LaZnAsO have similar bandgaps; however, the bandgap of beta-BaZn2As2 (previously reported value similar to 0.2 eV) is 1 order of magnitude smaller than that of LaZnAsO (1.5 eV). In this paper, the reliable bandgap value of beta-BaZn2As2 is determined to be 0.23 eV from the intrinsic region of the temperature dependence of electrical conductivity. The origins of this narrow bandgap are discussed based on the chemical bonding nature probed by 6 keV hard X-ray photoemission spectroscopy, hybrid density functional calculations, and the ligand theory. One origin is the direct AsAs hybridization between adjacent [ZnAs] layers, which leads to a secondary splitting of As 4p levels and raises the valence band maximum. The other is that the nonbonding Ba 5d(x2y2) orbitals form an unexpectedly deep conduction band minimum (CBM) in beta-BaZn2As2 although the CBM of LaZnAsO is formed mainly of Zn 4s. These two origins provide a quantitative explanation for the bandgap difference between beta-BaZn2As2 and LaZnAsO.

    DOI: 10.1021/ja507890u

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  • Growth of c-Axis-Oriented Superconducting KFe2As2 Thin Films 査読

    Hidenori Hiramatsu, Shogo Matsuda, Hikaru Sato, Toshio Kamiya, Hideo Hosono

    ACS APPLIED MATERIALS & INTERFACES   6 ( 16 )   14293 - 14301   2014年8月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    KFe2As2, an iron-based superconductor, is expected to exhibit large spin Hall conductivity, and fabrication of high-quality thin films is requisite for evaluation of this effect and application to spintronics devices. Thin-film growth of KFe2As2 is difficult because of two intrinsic properties; its extremely hygroscopic nature and the high vapor pressure of potassium. We solved these issues by combining room-temperature pulsed laser deposition using K-rich KFe2As2 targets with thermal crystallization in KFe2As2 powder after encapsulation in an evacuated silica-glass tube with all of the processes conducted in a vacuum chamber and a dry Ar atmosphere in a glovebox. The optimized KFe2As2 films on (La,Sr)(Al,Ta)O-3 single-crystal substrates were obtained by crystallization at 700 degrees C, and they were strongly c-axis oriented. The electrical measurements were performed with thin films protected by grease passivation to block reaction with the atmosphere. The KFe2As2 films exhibited a superconductivity transition at 3.7 K.

    DOI: 10.1021/am5036016

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  • Positive Gate Bias Instability Induced by Diffusion of Neutral Hydrogen in Amorphous In-Ga-Zn-O Thin-Film Transistor 査読

    Kay Domen, Takaya Miyase, Katsumi Abe, Hideo Hosono, Toshio Kamiya

    IEEE ELECTRON DEVICE LETTERS   35 ( 8 )   832 - 834   2014年8月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    Origin of constant positive gate bias stress instability in amorphous In-Ga-Zn-O thin-film transistor is studied. Threshold voltage shift (Delta V-th) during the stress test exhibits two different behaviors: 1) a power function-type and 2) a logarithmic function-type depending on thermal treatment atmosphere and temperature. Thermal desorption spectroscopy indicated that the Delta V-th behavior changes from the log-function type to the power-function type as the amount of H-2 desorption increases. Furthermore, the recovery behavior of Delta V-th was not affected by gate bias. These results are explained by a diffusion-limited process of neutral hydrogen, which occurs within 2 nm in the vicinity of the channel-insulator interface.

    DOI: 10.1109/LED.2014.2327234

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  • Fabrication and characterization of ZnS:(Cu,Al) thin film phosphors on glass substrates by pulsed laser deposition 査読

    Junghwan Kim, Hidenori Hiramatsu, Hideo Hosono, Toshio Kamiya

    THIN SOLID FILMS   559   18 - 22   2014年5月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    We fabricated ZnS:(Cu, Al) thin film phosphors on glass substrates by pulsed laser deposition (PLD) using a KrF 248 nm laser in a H2S gas flow. Firstly, we investigated effects of annealing temperature, stress and crystallinity on photoluminescence properties of powder samples. For thin films, photoluminescence intensity increased with increasing the substrate temperature up to 700 degrees C and then decreased. The former increase is attributed to improvement of crystalline quality and strain, while the latter degradation is attributed to reduction of the Cu acceptors. Intense photoluminescence is observed under an ambient light when excited by 325 nm monochromated light from a fluorescence spectrophotometer. It was confirmed that the PLD process stabilized the wurtzite structure, which is not stable in bulk samples at the thermal equilibrium. (C) 2013 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2013.11.058

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  • Mobility-and temperature-dependent device model for amorphous In-Ga-Zn-O thin-film transistors 査読

    Katsumi Abe, Ayumu Sato, Kenji Takahashi, Hideya Kumomi, Toshio Kamiya, Hideo Hosono

    THIN SOLID FILMS   559   40 - 43   2014年5月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    A device model for amorphous In-Ga-Zn-O thin-film transistors (a-IGZO TFTs) that explains temperature dependence is proposed. It incorporates a carrier-density dependent mobility and a density of subgap traps of a-IGZO. The model parameters were extracted from only one transfer curve of an a-IGZO TFT at a low drain voltage through a simple analytical model. Device simulation based on this model reproduced current-and mobility-gate voltage characteristics of the a-IGZO TFT well over a wide range of bias voltage and temperature (253-393 K). (C) 2013 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2013.11.066

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  • Epitaxial growth and electronic structure of a layered zinc pnictide semiconductor, beta-BaZn2As2 査読

    Zewen Xiao, Fan-Yong Ran, Hidenori Hiramatsu, Satoru Matsuishi, Hideo Hosono, Toshio Kamiya

    THIN SOLID FILMS   559   100 - 104   2014年5月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    BaZn2As2 is expected for a good p-type semiconductor and has two crystalline phases of an orthorhombic alpha phase and a higher-symmetry tetragonal beta phase. Here, we report that high-quality epitaxial films of the tetragonal beta-BaZn2As2 were grown on single-crystal MgO (001) substrates by a reactive solid-phase epitaxy technique. Out-of-plane and in-plane epitaxial relationships between the film and the substrate were BaZn2As2 (001)//MgO (001) and BaZn2As2 [200]//MgO [200], respectively. The full-widths at halfmaximumwere 0.082 degrees for a 008 out-of- plane rocking curve and 0.342 degrees for a 200 in-plane rocking curve. A step-and-terrace structure was observed by atomic force microscopy. The band gap of beta-BaZn2As2 was evaluated to be around 0.2 eV, which is much smaller than that of a family compound LaZnOAs (1.5 eV). Density functional theory calculation using the Heyd-Scuseria-Ernzerhof hybrid functionals supports the small band gap. (C) 2013 Elsevier B. V. All rights reserved.

    DOI: 10.1016/j.tsf.2013.10.135

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  • High critical-current density with less anisotropy in BaFe2(As,P)(2) epitaxial thin films: Effect of intentionally grown c-axis vortex-pinning centers 査読

    Hikaru Sato, Hidenori Hiramatsu, Toshio Kamiya, Hideo Hosono

    APPLIED PHYSICS LETTERS   104 ( 18 )   2014年5月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER INST PHYSICS  

    We report herein a high and isotropic critical-current density J(c) for BaFe2(As,P)(2) epitaxial films. The isotropy of J(c) with respect to the magnetic-field direction was improved significantly by decreasing the film growth rate to 2.2 angstrom/s. The low growth rate served to preferentially align dislocations along the c-axis, which work well as c-axis vortex-pinning centers. Because of the intentional introduction of effective pinning, the absolute J(c) at 9 T was larger than that obtained for other iron-based superconductors and conventional alloy superconducting wires. (C) 2014 AIP Publishing LLC.

    DOI: 10.1063/1.4875956

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  • Electric double-layer transistor using layered iron selenide Mott insulator TlFe1.6Se2 査読

    Katase, Takayoshi, Hiramatsu, Hidenori, Kamiya, Toshio, Hosono, Hideo

    Proceedings of the National Academy of Sciences of the United States of America   111 ( 11 )   3979 - 3983   2014年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1073/pnas.1318045111

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  • Film Texture, Hole Transport and Field-Effect Mobility in Polycrystalline SnO Thin Films on Glass 査読

    Po-Ching Hsu, Chung-Chih Wu, Hidenori Hiramatsu, Toshio Kamiya, Hideo Hosono

    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY   3 ( 9 )   Q3040 - Q3044   2014年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELECTROCHEMICAL SOC INC  

    A p-type oxide semiconductor, tin monoxide (SnO), is expected for high-mobility p-channel oxide thin-film transistors. In this study, we fabricated polycrystalline SnO films by three methods based on pulsed laser deposition, direct deposition at high temperatures, in-situ thermal annealing without exposure to air, and ex-situ thermal annealing after exposure to air. It was found that the crystallite orientation depends largely on the fabrication methods; i.e., the direct deposition enhanced c-axis orientation in particular at higher temperatures, and the in-situ thermal annealing induced homogeneous nucleation of non-oriented crystallites at high temperatures. Further, ex-situ thermal annealing nucleated (101)-oriented crystallites due probably to surface contamination originating from air exposure. In-plane Hall mobility was related to the film texture; i.e., the c-axis oriented films exhibited higher hole mobilities in the a-b plane while the more (101)-oriented films exhibited lower mobilities. This observation was attributed to an intrinsic nature that heavier effective hole mass along the Gamma-Z direction ([001] direction) than that of the Gamma-M direction ([110] direction), originating from strong anisotropy of the layered crystal structure of SnO. The on-state currents of SnO TFTs fabricated by 300 degrees C deposition or thermal annealing were explained qualitatively by the hole mobilities measured by Hall effect. (c) 2014 The Electrochemical Society. All rights reserved.

    DOI: 10.1149/2.009409jss

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  • Critical factor for epitaxial growth of cobalt-doped BaFe2As2 films by pulsed laser deposition 査読

    Hiramatsu, Hidenori, Sato, Hikaru, Katase, Takayoshi, Kamiya, Toshio, Hosono, Hideo

    Applied Physics Letters   104 ( 17 )   72602   2014年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1063/1.4874609

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  • Magnetic structure and electromagnetic properties of LnCrAsO with a ZrCuSiAs-type structure (Ln = La, Ce, Pr, and Nd) 査読

    Park, S.-W., Mizoguchi, H., Kodama, K., Shamoto, S.-I., Otomo, T., Matsuishi, S., Kamiya, T., Hosono, H.

    Inorganic Chemistry   52 ( 23 )   13363 - 13368   2013年12月

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1021/ic401487q

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  • 3-D Stacked complementary TFT devices using n-Type a-IGZO and p-Type F8T2 TFTs comparison between stacked and sided configurations

    Takayuki Hasegawa, Masashi Inoue, Tokiyoshi Matsuda, Mutsumi Kimura, Kenji Nomura, Toshio Kamiya, Hideo Hosono

    Proceedings of the International Display Workshops   1   331 - 332   2013年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:International Display Workshops  

    We have developed 3-D stacked complementary TFT devices using n-Type u-IGZO and p-Type F8T2 TFTs on PET substrates. We confirm correct input-output characteristics of inverter circuits. Particularly in this presentation, we compare n-Type a-IGZO, p-Type F8T2, stacked complementary, and sided complementary inverters.

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  • Unusual pressure effects on the superconductivity of indirectly electron-doped (Ba1-xLax)Fe2As2 epitaxial films 査読

    Katase, T., Sato, H., Hiramatsu, H., Kamiya, T., Hosono, H.

    Physical Review B - Condensed Matter and Materials Physics   88 ( 14 )   503   2013年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1103/PhysRevB.88.140503

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  • Magnetic scattering and electron pair breaking by rare-earth-ion substitution in BaFe2As2 epitaxial films 査読

    Katase, T., Hiramatsu, H., Kamiya, T., Hosono, H.

    New Journal of Physics   15   073019   2013年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1088/1367-2630/15/7/073019

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  • Superconducting Properties and Phase Diagram of Indirectly Electron-Doped (Sr1-xLax)Fe2As2 Epitaxial Films Grown by Pulsed Laser Deposition 査読

    Hiramatsu, Hidenori, Katase, Takayoshi, Kamiya, Toshio, Hosono, Hideo

    Ieee Transactions on Applied Superconductivity   23 ( 3 )   7300405   2013年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1109/TASC.2012.2234935

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  • Anomalous scaling behavior in a mixed-state Hall effect of a cobalt-doped BaFe2As2 epitaxial film with a high critical current density over 1 MA/cm(2) 査読

    Sato, Hikaru, Katase, Takayoshi, Kang, Won Nam, Hiramatsu, Hidenori, Kamiya, Toshio, Hosono, Hideo

    Physical Review B   87 ( 6 )   064504   2013年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1103/PhysRevB.87.064504

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  • Doping effects in amorphous oxides 査読

    Funabiki, Fuji, Kamiya, Toshio, Hosono, Hideo

    Journal of the Ceramic Society of Japan   120 ( 1407 )   447 - 457   2012年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.2109/jcersj2.120.447

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  • Band alignment of InGaZnO4/Si interface by hard x-ray photoelectron spectroscopy 査読

    Lee, Kyeongmi, Nomura, Kenji, Yanagi, Hiroshi, Kamiya, Toshio, Ikenaga, Eiji, Sugiyama, Takeharu, Kobayashi, Keisuke, Hosono, Hideo

    Journal of Applied Physics   112 ( 3 )   2012年8月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:American Institute of Physics  

    DOI: 10.1063/1.4744983

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  • Operation model with carrier-density dependent mobility for amorphous In-Ga-Zn-O thin-film transistors 査読

    Katsumi Abe, Kenji Takahashi, Ayumu Sato, Hideya Kumomi, Kenji Nomura, Toshio Kamiya, Hideo Hosono

    THIN SOLID FILMS   520 ( 10 )   3791 - 3795   2012年3月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    An operation model for an amorphous In-Ga-Zn-O (a-IGZO) based thin film transistor (TFT) is studied. The model is not based on the exponential tail states employed in hydrogenated amorphous Si (a-Si:H) TFT, but on a power function of the carrier density which is observed in the TFT and Hall mobilities of a-IGZO. A 20 numerical simulator employing this model reproduced current-voltage characteristics under on operation of coplanar homojunction a-IGZO TFTs. Although the mathematical expression of the mobility is similar to the field effect mobility of a-Si:H TFT, the present model explains the temperature dependence of the on characteristics of a-IGZO TFT. (C) 2011 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2011.10.060

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  • Stability and high-frequency operation of amorphous In-Ga-Zn-O thin-film transistors with various passivation layers 査読

    Kenji Nomura, Toshio Kamiya, Hideo Hosono

    THIN SOLID FILMS   520 ( 10 )   3778 - 3782   2012年3月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    The stability of amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) was investigated focusing on the effects of passivation layer materials (Y2O3, Al2O3, HfO2, and SiO2) and thermal annealing. Positive bias constant current stress (CCS), negative bias stress without light illumination (NBS), and negative bias light illumination stress (NBLS) were examined. It was found that Y2O3 was the best passivation layer material in this study in terms of all the stability tests if the channel was annealed prior to the passivation formation (post-deposition annealing) and the passivation layer was annealed at &gt;= 250 degrees C (post-fabrication annealing). Post-fabrication thermal annealing of the Y2O3 passivation layer produced very stable TFTs against the CCS and NBS stresses and eliminated subgap photoresponse up to the photon energy of 2.9 eV. Even for NBLS with 2.7 eV photons, the threshold voltage shift is suppressed well to -4.4 V after 3 h of test. These results provide the following information: (i) passivation removes the surface deep subgap defects in a-IGZO and eliminates the subgap photoresponse, but (ii) the bulk defects in a-IGZO should be removed prior to the passivation process. The Y2O3-passivated TFT is not only stable for these stress conditions, but is also compatible with high-frequency operation with the current gain cut-off frequency of 91 kHz, which is consistent with the static characteristics. (C) 2011 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2011.10.068

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  • Electron injection barriers between air-stable electride with low work function, C12A7:e−, and pentacene, C60 and copper phthalocyanine 招待 査読

    Hiroshi Yanagi, Toshifumi Kuroda, Ki-Beom Kim, Yoshitake Toda, Toshio Kamiya, Hideo Hosono

    Journal of Materials Chemistry (Communication)   22 ( 10 )   4278 - 4281   2012年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Royal Society of Chemistry  

    DOI: 10.1039/c2jm14966d

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  • Photovoltaic properties of n-type amorphous In–Ga–Zn–O and p-type single crystal Si heterojunction solar cells: Effects of Ga content 査読

    Kyeongmi Lee, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Hideo Hosono

    Thin Solid Films   520 ( 10 )   3808 - 3812   2012年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Elsevier  

    DOI: 10.1016/j.tsf.2011.10.066

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  • Light Irradiation History Sensor Using Amorphous In-Ga-Zn-O Thin-Film Transistor Exposed to Ozone Annealing 査読

    Kimura, Mutsumi, Hasegawa, Takayuki, Ide, Keisuke, Nomura, Kenji, Kamiya, Toshio, Hosono, Hideo

    Ieee Electron Device Letters   33 ( 3 )   384 - 386   2012年

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    掲載種別:研究論文(学術雑誌)  

    March 2012

    DOI: 10.1109/LED.2011.2179111

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  • Maximum applied voltage detector using amorphous In-Ga-Zn-O thin-film transistor exposed to ozone annealing 査読

    Kimura, Mutsumi, Hasegawa, Takayuki, Ide, Keisuke, Nomura, Kenji, Kamiya, Toshio, Hosono, Hideo

    Solid-State Electronics   75   74 - 76   2012年

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    掲載種別:研究論文(学術雑誌)  

    Sept. 2012

    DOI: 10.1016/j.sse.2012.04.037

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  • Microstructure and transport properties of [0 0 1]-tilt bicrystal grain boundaries in iron pnictide superconductor, cobalt-doped BaFe 2As 2 査読

    Hiramatsu, H., Katase, T., Ishimaru, Y., Tsukamoto, A., Kamiya, T., Tanabe, K., Hosono, H.

    Materials Science and Engineering B: Solid-State Materials for Advanced Technology   177 ( 7 )   515 - 519   2012年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1016/j.mseb.2011.12.009

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  • Identical effects of indirect and direct electron doping of superconducting BaFe2As2 thin films 査読

    Katase, Takayoshi, Iimura, Soshi, Hiramatsu, Hidenori, Kamiya, Toshio, Hosono, Hideo

    Physical Review B   85 ( 14 )   140516   2012年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1103/PhysRevB.85.140516

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  • Thin film growth by pulsed laser deposition and properties of 122-type iron-based superconductor AE(Fe1-xCox)(2)As-2 (AE = alkaline earth) 査読

    Katase, Takayoshi, Hiramatsu, Hidenori, Kamiya, Toshio, Hosono, Hideo

    Superconductor Science & Technology   25 ( 8 )   084015   2012年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1088/0953-2048/25/8/084015

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  • Involvement of oxidative stress and mucosal addressin cell adhesion molecule-1 (MAdCAM-1) in inflammatory bowel disease

    Tanida, Satoshi, Mizoshita, Tsutomu, Mizushima, Takashi, Sasaki, Makoto, Shimura, Takaya, Kamiya, Takeshi, Kataoka, Hiromi, Joh, Takashi

    Journal of Clinical Biochemistry and Nutrition   48 ( 2 )   2011年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.3164/jcbn.10-41

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  • Electronic Structure and Photovoltaic Properties of n-Type Amorphous In-Ga-Zn-O and p-Type Single Crystal Si Heterojunctions 査読

    Kyeongmi Lee, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Hideo Hosono

    ELECTROCHEMICAL AND SOLID STATE LETTERS   14 ( 8 )   H346 - H349   2011年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELECTROCHEMICAL SOC INC  

    The photovoltaic properties and electronic structures of amorphous In-Ga-Zn-O (a-IGZO)/p-type Si heterojunctions were investigated. An optimized solar cell with a conversion efficiency of 5.3% was obtained by vacuum annealing at 300 degrees C. The short circuit current was 28.1 mA.cm(-2), which approaches the theoretical limit without an electron back reflector. The open circuit voltage (V(oc)) was 0.31 V, which was limited by the built-in potential of 0.39 V. This result combined with hard x-ray photoemission spectroscopy provided the electron affinity and ionization potential of a-IGZO, indicating the low V(OC) was controlled by the deep conduction band bottom of a-IGZO. (C) 2011 The Electrochemical Society. [DOI: 10.1149/1.3595741] All rights reserved.

    DOI: 10.1149/1.3595741

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  • Effects of excess oxygen on operation characteristics of amorphous In-Ga-Zn-O thin-film transistors 査読

    Ide, Keisuke, Kikuchi, Yutomo, Nomura, Kenji, Kimura, Mutsumi, Kamiya, Toshio, Hosono, Hideo

    Applied Physics Letters   99 ( 9 )   093507   2011年

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    掲載種別:研究論文(学術雑誌)  

    Aug. 2011

    DOI: 10.1063/1.3633100

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  • Advantageous grain boundaries in iron pnictide superconductors 査読

    Katase, Takayoshi, Ishimaru, Yoshihiro, Tsukamoto, Akira, Hiramatsu, Hidenori, Kamiya, Toshio, Tanabe, Keiichi, Hosono, Hideo

    Nature Communications   2   409   2011年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1038/ncomms1419

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  • Biaxially textured cobalt-doped BaFe2As2 films with high critical current density over 1 MA/cm(2) on MgO-buffered metal-tape flexible substrates 査読

    Katase, Takayoshi, Hiramatsu, Hidenori, Matias, Vladimir, Sheehan, Chris, Ishimaru, Yoshihiro, Kamiya, Toshio, Tanabe, Keiichi, Hosono, Hideo

    Applied Physics Letters   98 ( 24 )   242510   2011年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1063/1.3599844

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  • Origins of Hole Doping and Relevant Optoelectronic Properties of Wide Gap p-Type Semiconductor, LaCuOSe 査読

    Hiramatsu, Hidenori, Kamiya, Toshio, Tohei, Tetsuya, Ikenaga, Eiji, Mizoguchi, Teruyasu, Ikuhara, Yuichi, Kobayashi, Keisuke, Hosono, Hideo

    Journal of the American Chemical Society   132 ( 42 )   15060 - 15067   2010年10月

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1021/ja107042r

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  • Electronic structures of MnP-based crystals: LaMnOP, BaMn2P2, and KMnP 査読

    Kamiya, Toshio, Yanagi, Hiroshi and, Watanabe, Takumi, Hirano, Masahiro, Hosono, Hideo

    Materials Science and Engineering B-Advanced Functional Solid-State Materials   173 ( 1-3 )   239 - 243   2010年10月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Elsevier  

    DOI: 10.1016/j.mseb.2010.02.007

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  • Short-channel nanowire transistor using a nanoporous crystal semiconductor 12CaO·7Al2O3 査読

    Y. Nishio, K. Nomura, H. Yanagi, T. Kamiya, M. Hirano, H. Hosono

    Materials Science and Engineering B   173 ( 1-3 )   37 - 40   2010年10月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Elsevier  

    DOI: 10.1016/j.mseb.2009.12.018

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  • Electrical and magnetic properties of quaternary compounds LnMnPO (Ln = Nd, Sm, Gd) with ZrCuSiAs-type structure 査読

    Yanagi, Hiroshi, Fukuma, Katsutoshi, Kamiya, Toshio, Hirano, Masahiro, Hosono, Hideo

    Materials Science and Engineering B-Advanced Functional Solid-State Materials   173 ( 1-3 )   47 - 50   2010年10月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Elsevier  

    DOI: 10.1016/j.mseb.2010.01.004

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  • Nitric oxide mitigates apoptosis in human endothelial cells induced by 9,10-phenanthrenequinone: Role of proteasomal function

    Matsunaga, Toshiyuki, Arakaki, Marina, Kamiya, Tetsuro, Haga, Mariko, Endo, Satoshi, El-Kabbani, Ossama, Hara, Akira

    Toxicology   268 ( 3 )   2010年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1016/j.tox.2009.12.015

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  • Intrinsic carrier mobility in amorphous In-Ga-Zn-O thin-film transistors determined by combined field-effect technique

    Kimura, Mutsumi, Kamiya, Toshio, Nakanishi, Takashi, Nomura, Kenji, Hosono, Hideo

    Applied Physics Letters   96 ( 26 )   262105   2010年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1063/1.3455072

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  • Three-dimensionally stacked flexible integrated circuit: Amorphous oxide/polymer hybrid complementary inverter using n-type a-In-Ga-Zn-O and p-type poly-(9,9-dioctylfluorene-co-bithiophene) thin-film transistors

    Nomura, Kenji, Aoki, Takashi, Nakamura, Kiyoshi, Kamiya, Toshio, Nakanishi, Takashi, Hasegawa, Takayuki, Kimura, Mutsumi, Kawase, Takeo, Hirano, Masahiro, Hosono, Hideo

    Applied Physics Letters   96 ( 26 )   263509   2010年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1063/1.3458799

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  • Impurities in FeAs-based superconductor, SrFe2As2, studied by first-principles calculations 査読

    Kamiya, Toshio, Hiramatsu, Hidenori, Katase, Takayoshi, Hirano, Masahiro, Hosono, Hideo

    Materials Science and Engineering B-Advanced Functional Solid-State Materials   173 ( 1-3 )   244 - 247   2010年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1016/j.mseb.2010.01.051

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  • Fabrication of nanowires by varying energy microbeam lithography using heavy ions at the TIARA

    Kamiya, T., Takano, K., Ishii, Y., Satoh, T., Oikawa, M., Ohkubo, T., Haga, J., Nishikawa, H., Furuta, Y., Uchiya, N., Seki, S., Sugimoto, M.

    Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms   267 ( 12-13 )   2009年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1016/j.nimb.2009.03.043

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  • Comparative study of transient current induced in SiC p(+)n and n(+)p diodes by heavy ion micro beams

    Ohshima, Takeshi, Iwamoto, Naoya, Onoda, Shinobu, Kamiya, Tomihiro, Kawano, Katsuyasu

    Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms   267 ( 12-13 )   2009年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1016/j.nimb.2009.03.056

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  • Itinerant ferromagnetism in the layered crystals LaCoOX (X=P,As) 査読

    Yanagi, Hiroshi, Kawamura, Ryuto, Kamiya, Toshio, Kamihara, Yoichi, Hirano, Masahiro, Nakamura, Tetsuya, Osawa, Hitoshi, Hosono, Hideo

    Physical Review B   77 ( 22 )   2008年6月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:American Physical Society  

    DOI: 10.1103/PhysRevB.77.224431

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  • Electromagnetic properties and electronic structure of the iron-based layered superconductor LaFePO 査読

    Kamihara, Yoichi, Hirano, Masahiro, Yanagi, Hiroshi, Kamiya, Toshio, Saitoh, Yuji, Ikenaga, Eiji, Kobayashi, Keisuke, Hosono, Hideo

    Physical Review B   77 ( 21 )   2008年6月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:American Physical Society  

    DOI: 10.1103/PhysRevB.77.214515

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  • Apparent bipolarity and Seebeck sign inversion in a layered semiconductor: LaZnOP 査読

    Kayanuma, Kentaro, Hiramatsu, Hidenori, Hirano, Masahiro, Kawamura, Ryuto, Yanagi, Hiroshi, Kamiya, Toshio, Hosono, Hideo

    Physical Review B   76 ( 19 )   2007年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:American Physical Society  

    DOI: 10.1103/PhysRevB.76.195325

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  • Anion Incorporation-Induced Cage Deformation in 12CaO・7Al2O3

    Takatoshi Nomura, Katsuro Hayashi, Yoshiki Kubota, Masaki Takata, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Chem. Lett.   36 ( 7 )   902 - 903   2007年7月

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    掲載種別:研究論文(学術雑誌)  

    Effects of O 2- or OH - ion incorporation on the cage geometry in 12CaO·7Al 2O 3 (C12A7) crystals are examined by the maximum entropy method (MEM)/Rietveld analyses of synchrotron powder X-ray diffraction data. Presence of an extraframework anion in a cage causes inward displacements of two Ca 2+ ions axially coordinating to the anion. The OHion locates at the cage center and induces smaller symmetric displacements of the two Ca 2+ ions, while the O 2- ion likely locates on off-axis positions and induces larger asymmetric Ca 2+ ion displacements. Copyright © 2007 The Chemical Society of Japan.

    DOI: 10.1246/cl.2007.902

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  • Intermediate-temperature proton conduction in Al 3+ -doped Sn P 2O 7

    Tomita, A., Kajiyama, N., Kamiya, T., Nagao, M., Hibino, T.

    Journal of the Electrochemical Society   154 ( 12 )   2007年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1149/1.2789296

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  • Sn 0.9 In 0.1 P 2 O 7 -based organic/inorganic composite membranes

    Heo, P., Nagao, M., Kamiya, T., Sano, M., Tomita, A., Hibino, T.

    Journal of the Electrochemical Society   154 ( 1 )   2007年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1149/1.2388737

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  • Novel room temperature stable electride 12SrO · 7Al 2O3 thin films: Fabrication, optical and electron transport properties

    Miyakawa, M., Ueda, N., Kamiya, T., Hirano, M., Hosono, H.

    Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan   115 ( 1345 )   2007年

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    掲載種別:研究論文(学術雑誌)  

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  • Combinatorial study on In-Ga-Zn-O semiconductor films as active-channel layers for thin-film transistor

    T. Iwasaki, N. Itagaki, T. Den, H. Kumomi, K. Nomura, T. Kamiya, H. Hosono

    Materials Research Society Symposium Proceedings   928   80 - 85   2006年12月

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    The device characteristics of thin-film transistors (TFTs) having amorphous In-Ga-Zn-O channel layers with various chemical compositions were studied by using combinatorial synthesis techniques. The In-Ga-Zn-O films were prepared by a radio-frequency magnetron sputtering method at room temperature in mixed-gas atmosphere of argon and oxygen. The TFT libraries enabled us to systematically survey the device characteristics of the TFTs in a wide compositional range of channel materials. It is found that the TFT characteristics are very sensitive to the chemical composition ratio of In:Ga:Zn and depend also on the oxygen partial pressure during deposition. Some devices exhibited good performance of the field-effect mobility of ∼10 cm2V-1sec -1 and on-to-off current ratio of ∼108. © 2006 Materials Research Society.

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  • Opto-electronic properties and light-emitting device application of widegap layered oxychalcogenides: LaCuOCh (Ch = chalcogen) and La2CdO2Se2

    Hidenori Hiramatsu, Hayato Kamioka, Kazushige Ueda, Hiromichi Ohta, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   203 ( 11 )   2800 - 2811   2006年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:WILEY-V C H VERLAG GMBH  

    Electronic and optical properties of widegap oxychalcogenides, LaCuOCh (Ch = chalcogen) and La2CdO2Se2, are reviewed with a focus on those relevant to their layered crystal structures, including high hole mobility, degenerate p-type conduction, room temperature exciton, and large third order optical nonlinearity. In particular, the widegap p-type metallic conduction was realized in Mg-doped LaCuOSe: the first demonstration among any class of widegap materials including GaN: Mg. Furthermore, we demonstrate the room temperature operation of a blue light-emitting diode using a pn hetero-junction composed of a LaCuOSe epilayer and an n-type amorphous InGaZn5O8. Those results strongly suggest that a series of the layered oxychalcogenides are applicable to the light-emitting layers in opto-electronic devices that operate in the ultraviolet-blue region as well as to transparent p-type conductors. (c) 2006 WILEY-VCH Verlag GmbH & Co. KG&A, Weinheim.

    DOI: 10.1002/pssa.200669665

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  • Iron-based layered superconductor: LaOFeP 査読

    Kamihara, Yoichi, Hiramatsu, Hidenori, Hirano, Masahiro, Kawamura, Ryuto, Yanagi, Hiroshi, Kamiya, Toshio, Hosono, Hideo

    Journal of the American Chemical Society   128 ( 31 )   10012 - 10013   2006年7月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:American Chemical Society  

    DOI: 10.1021/ja063355c

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  • Synthesis, structure and physical properties of layered semiconductors MCuFCh (M = Sr, Eu, Ch = S, Se) 査読

    Motomitsu, E., Yanagi, H., Kamiya, T., Hirano, M., Hosono, H.

    Journal of Solid State Chemistry   179 ( 6 )   1668 - 1673   2006年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Elsevier  

    DOI: 10.1016/j.jssc.2006.02.031

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  • Proton conduction in In 3+-doped SnP 2O 7 at intermediate temperatures

    Nagao, M., Kamiya, T., Heo, P., Tomita, A., Hibino, T., Sano, M.

    Journal of the Electrochemical Society   153 ( 8 )   2006年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1149/1.2210669

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  • Photoemission spectroscopic studies on oxide/SiC interfaces formed by dry and pyrogenic oxidation

    Hijikata, Y., Yaguchi, H., Ishida, Y., Yoshikawa, M., Kamiya, T., Yoshida, S., Madar, R., Camassel, J.

    Silicon Carbide and Related Materials 2003, Prts 1 and 2   457-460   2004年

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  • The role of high-injection effects on the transient ion beam induced current response of high-speed photodetectors

    Laird, JS, Hirao, T., Onoda, S., Kamiya, T.

    Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms   219   2004年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1016/j.nimb.2004.01.206

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  • N-channel MOSFETs fabricated on homoepitaxy-grown 3C-SiC films

    Lee, KK, Ishida, Y., Ohshima, T., Kojima, K., Tanaka, Y., Takahashi, T., Okumura, H., Arai, K., Kamiya, T.

    Ieee Electron Device Letters   24 ( 7 )   2003年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1109/LED.2003.815006

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  • Observation of single-ion induced charge collection in diode by a heavy ion microbeam system

    Kamiya, T., Oikawa, M., Ohshima, T., Hirao, T., Lee, KK, Onoda, S., Laird, JS

    Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms   210   2003年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1016/S0168-583X(03)01071-1

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  • The electrical characteristics of metal-oxide-semiconductor field effect transistors fabricated on cubic silicon carbide

    Ohshima, T., Lee, KK, Ishida, Y., Kojima, K., Tanaka, Y., Takahashi, T., Yoshikawa, M., Okumura, H., Arai, K., Kamiya, T.

    Japanese Journal of Applied Physics Part 2-Letters   42 ( 6B )   2003年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1143/JJAP.42.L625

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  • Thin film fabrication of nano-porous 12CaO center dot 7Al(2)O(3) crystal and its conversion into transparent conductive films by light illumination

    Toda, Y., Miyakawa, M., Hayashi, K., Kamiya, T., Hirano, M., Hosono, H.

    Thin Solid Films   445 ( 2 )   2003年

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    掲載種別:研究論文(学術雑誌)  

    DOI: 10.1016/S0040-6090(03)01170-2

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書籍等出版物

  • 薄膜トランジスタ

    コロナ社  2008年 

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  • Transparent Conductive Oxide Thin Films 2007

    2008年 

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  • Transparent Conductive Oxide Thin Films 2007

    2008年 

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  • 酸化物薄膜トランジスタ: 透明結晶TFTからフレキシブルアモルファスTFTまで

    シーエムシー出版  2007年 

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  • 自然超格子構造をもつ透明酸化物半導体の単結晶薄膜成長と透明トランジスタへの応用 「材料開発のための顕微鏡法と応用写真集」

    日本金属学会  2006年 

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  • 透明導電膜の技術 改訂第2版 第4章 透明導電膜の新しい展開

    オーム社  2006年 

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  • 透明金属が拓く驚異の世界 不可能に挑むナノテクノロジーの錬金術

    ソフトバンク クリエイティブ株式会社  2006年 

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  • 透明酸化物の電子構造概論

    シーエムシー出版  2006年 

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  • p型アモルファス酸化物半導体と室温で形成したpn接合ダイオード 「透明酸化物機能材料とその応用」

    2006年 

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  • 2.2 電子状態の理解はセラミックスの研究にどう役立つか ~酸化物半導体のバンドラインアップを例として~

    社団法人 日本セラミックス協会  2006年 

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  • Chap. 4 Ceramics, in Hartree-Fock-Slater Method for Materials Science -The DV-X Alpha Method for Design and Characterization of Materials- (Eds. Hirohiko Adachi, Takeshi Mukoyama, Jun Kawai)

    Springer  2005年 

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  • Chap. 4 Ceramics, in Hartree-Fock-Slater Method for Materials Science -The DV-X Alpha Method for Design and Characterization of Materials- (Eds. Hirohiko Adachi, Takeshi Mukoyama, Jun Kawai)

    Springer  2005年 

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  • 単一電子デバイス 実験化学講座 第5版 28巻 ナノテクノロジーの化学

    日本化学会編、丸善株式会社  2005年 

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  • 透明酸化物のナノ構造を活用した機能開拓

    化学工業  2004年 

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  • 透明ナノポ-ラス結晶:12CaO・7Al_2_O_3_

    オプトロニクス 「機能性透明酸化物とオプトエレクトロニクス -ERATO細野透明電子活性プロジェクト成果」  2004年 

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  • 透明酸化物半導体とデバイスへの展開

    オプトロニクス「機能性透明酸化物とオプトエレクトロニクス -ERATO細野透明電子活性プロジェクト成果」  2004年 

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  • ナノ構造を利用した透明酸化物の高機能化 -ユビキタス元素を使って新機能に迫る-

    セラミックスと建築材料 (応用セラミックス研究所 創立70周年記  2004年 

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  • 透明酸化物半導体: 材料設計からデバイス応用まで

    セラミックデータブック  2004年 

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  • 台湾工業技術研究院に招かれて

    東工大クロニクル  2003年 

     詳細を見る

  • 電子状態の理解はセラミックスの研究にどう役立つか ~酸化物半導体のバンドラインナップを例として~

    セラミックス  2003年 

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  • Control of bandgap and network structure in hydrogenated amorphous silicon

    Recent Developments in Non-Crystalline Solids (Transworld Research Network, Kerala, India)  2002年 

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  • Control of bandgap and network structure in hydrogenated amorphous silicon

    Recent Developments in Non-Crystalline Solids (Transworld Research Network, Kerala, India)  2002年 

     詳細を見る

  • Carrier transport across a few grain boudnaries in polycrystallien silicon

    FEMD News Letter  2001年 

     詳細を見る

  • Room temperature single-electron effects in nanostructured silicon

    FEMD News Letter  2001年 

     詳細を見る

  • Carrier transport across a few grain boudnaries in polycrystallien silicon

    FEMD News Letter  2001年 

     詳細を見る

  • Room temperature single-electron effects in nanostructured silicon

    FEMD News Letter  2001年 

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  • 分光エリプソメトリによる多(微)結晶Si成長のその場観察

    学術振興会薄膜第131委員会第189回研究会資料  1997年 

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  • 強誘電性ペロブスカイト酸化物の材料設計と計算機シミュレーション

    セラミックスデータブック1993  1993年 

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  • ペロブスカイト強誘電体物性のシミュレーション

    セラミックス  1992年 

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▼全件表示

MISC

  • Josephson junction in cobalt-doped BaFe2As2 epitaxial thin films on (La,Sr)(Al,Ta)O-3 bicrystal substrates

    Takayoshi Katase, Yoshihiro Ishimaru, Akira Tsukamoto, Hidenori Hiramatsu, Toshio Kamiya, Keiichi Tanabe, Hideo Hosono

    APPLIED PHYSICS LETTERS   96 ( 14 )   142507   2010年4月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Josephson junctions were fabricated in epitaxial films of cobalt-doped BaFe2As2 on [001]-tilt (La,Sr)(Al,Ta)O-3 bicrystal substrates. 10-mu m-wide microbridges spanning a 30 degrees-tilted bicrystal grain boundary (BGB bridge) exhibited resistively-shunted-junction (RSJ)-like current-voltage characteristics up to 17 K, and the critical current was suppressed remarkably by a magnetic field. Microbridges without a BGB did not show the RSJ-like behavior, and their critical current densities were 20 times larger than those of BGB bridges, confirming BGB bridges display a Josephson effect originating from weakly-linked BGB.

    DOI: 10.1063/1.3371814

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  • Device characteristics improvement of a-In-Ga-Zn-O TFTs by low-temperature annealing

    Yutomo Kikuchi, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    THIN SOLID FILMS   518 ( 11 )   3017 - 3021   2010年3月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    A low-temperature process to improve performances of a-In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) fabricated at room temperature was examined Two deposition methods, pulsed laser deposition (PLD) and RF magnetron sputtering were employed to deposit the a-IGZO channels For the PLO case, the TFT characteristics were improved significantly by wet annealing at dew point (d p) of 50 degrees C at the annealing temperature of 200 degrees C For the sputtered TFTs, a wider range of annealing temperature from 100 to 200 degrees C was examined. It was found that annealing at &gt;= 150 degrees C improved the TFT characteristics when dry annealing was employed On the other hand, wet annealing also improved mu(sat) and S values, but very large negative threshold voltage (V(th)) shift was observed These results indicate that the annealing at 150 degrees C is enough to obtain mobility (mu(sat)) as large as 8 cm(2) Vs(-1), but annealing temperature as high as 200 degrees C provides larger mu(sat) comparable to those obtained by 400 degrees C annealing It is speculated that the large negative V(th) shift originates from compensated donors in as-deposited sputtered films (C) 2009 Published by Elsevier B V

    DOI: 10.1016/j.tsf.2009.10.132

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  • Fabrication of GaN epitaxial thin film on InGaZnO4 single-crystalline buffer layer

    Tomomasa Shinozaki, Kenji Nomura, Takayoshi Katase, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    THIN SOLID FILMS   518 ( 11 )   2996 - 2999   2010年3月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Epitaxial (0001) films of GaN were grown on (111) YSZ substrates using single-crystalline InGaZnO4 (sc-IGZO) lattice-matched buffer layers by molecular beam epitaxy with a NH3 source The epitaxial relationships are (0001)(GaN)//(0001)(IGZO)//(111)(YSZ) in out-of-plane and [11 (2) over bar0](GaN)//[11 (2) over bar0]IGZO//[1 (1) over bar0](YSZ) in in-plane. This is different from those reported for GaN on many oxide crystals, the In-plane orientation of GaN crystal lattice is rotated by 300 with respect to those of oxide substrates except for ZnO Although these GaN films showed relatively large tilting and twisting angles, which would be due to the reaction between GaN and IGZO, the GaN films grown on the sc-IGZO buffer layers exhibited stronger band-edge photoluminescence than GaN grown on a low-temperature GaN buffer layer. (C) 2009 Published by Elsevier B V

    DOI: 10.1016/j.tsf.2009.10.131

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  • Steady-state photoconductivity of amorphous In窶敵a窶纏n窶徹

    Dong Hee Lee, Ken-ichi Kawamura, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Thin Solid Films   518 ( 11 )   3000 - 3003   2010年3月

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  • Comprehensive studies on the stabilities of a-In-Ga-Zn-O based thin film transistor by constant current stress

    Kenji Nomura, Toshio Kamiya, Yutomo Kikuchi, Masahiro Hirano, Hideo Hosono

    THIN SOLID FILMS   518 ( 11 )   3012 - 3016   2010年3月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Stability under constant current stress, along with hysteresis characteristics, was studied for a-In-Ga-Zn-O thin-film transistors (TFTs) in several atmospheres and at several temperatures. Unannealed TFTs showed rather large instability, ie large hysteresis in transfer curves (Delta V(G) &gt; 0 8 V) and large positive threshold voltage shift (Delta V(th) &gt; 10 V for 50h tests at 5 mu A) with deterioration of subthreshold voltage swing was observed The instability for the unannealed TFT had a strong dependence on the stress atmosphere and the stress temperature, which suggests that trap states generated by the stress test is related to oxygen vacancy formed by breaking weak chemical bonds Wet annealing improved stability, the hysteresis disappeared and the Delta V(th) was reduced to &lt;2 V The improvement is considered to be related to the reduction of weak chemical bonds by wet annealing with the strong oxidation power of water molecules (C) 2009 Elsevier B V. All rights reserved

    DOI: 10.1016/j.tsf.2009.09.193

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  • Device characteristics improvement of a-In窶敵a窶纏n窶徹 TFTs by low-temperature annealing

    Yutomo Kikuchi, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Thin Solid Films   518 ( 11 )   3017 - 3021   2010年3月

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  • Origin of definite Hall voltage and positive slope in mobility-donor density relation in disordered oxide semiconductors

    Toshio Kamiya, Kenji Nomura, Hideo Hosono

    APPLIED PHYSICS LETTERS   96 ( 12 )   122103   2010年3月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Amorphous oxide semiconductors (AOSs) are expected for alternative channel materials in thin-film transistors owing to their large electron mobilities. While, it is known that AOSs exhibit peculiar electron transport properties. Definite Hall voltages are observed even for mobilities &lt; 0.2 cm(2)/V s, which correspond to a very short mean free path (MFP) of 0.008 nm. Furthermore, Hall mobility increases with increasing the donor density. This paper reports that a percolation conduction model explains them; quantitative analyses based on the Boltzmann&apos;s transport theory prove that carriers within the potential barriers have large MFPs of 0.5-1 nm. The percolation model also explains variable-range-hoppinglike and weak-localizationlike behaviors.

    DOI: 10.1063/1.3364131

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  • Fabrication of Atomically Flat ScAlMgO4 Epitaxial Buffer Layer and Low-Temperature Growth of High-Mobility ZnO Films

    Takayoshi Katase, Kenji Nomura, Hiromichi Ohta, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    CRYSTAL GROWTH & DESIGN   10 ( 3 )   1084 - 1089   2010年3月

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    記述言語:英語   出版者・発行元:AMER CHEMICAL SOC  

    Atomically flat single-crystalline thin films or ScAlMgO4 (SCAM) were fabricated on yttria-stabilized zirconia (YSZ) (111)substrates by reactive solid-phase epitaxy using an ablation ceramic target with an optimized chemical composition. Owing to the good lattice matching, the SCAM layers enhanced two-dimensional growth of ZnO epitaxial films, suppressed the formation of threading dislocations at step edges, and provided larger Hall mobilities than those of ZnO films on YSZ and Al2O3 single-crystal substrates especially at low deposition temperatures &lt; 700 degrees C. The ZnO films exhibited Hall voltage anomaly at temperatures &lt; 140 K, which is explained by a two-layer model with a degenerated layer.

    DOI: 10.1021/cg900616c

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  • Steady-state photoconductivity of amorphous In-Ga-Zn-O

    Dong Hee Lee, Ken-ichi Kawamura, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    THIN SOLID FILMS   518 ( 11 )   3000 - 3003   2010年3月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Photoresponse was investigated for an amorphous oxide semiconductor, In-Ga-Zn-O, by the steady-state photoconductivity (SSPC) method All the films exhibited extremely slow reversible photoresponses. Analysis of the transient photocurrent at varied temperatures provided similar activation energies of similar to 0.5 eV for both the time constants and the photoconductivity. Mobility-lifetime (mu tau) products were estimated from the photoconductivity spectra measured at the sweep rate of 2 nm/s, which monotonically increased with increasing dark conductivity sigma(D) (i e the Fermi level E-F becomes shallower) The obtained mu tau values are larger than those of hydrogenated amorphous silicon even if the E-F dependence is considered (C) 2009 Elsevier B.V. All rights reserved

    DOI: 10.1016/j.tsf.2009.10.129

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  • Fabrication and electron transport properties of epitaxial films of electron-doped 12CaO center dot 7Al(2)O(3) and 12SrO center dot 7Al(2)O

    Masashi Miyakawa, Hidenori Hiramatsu, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    JOURNAL OF SOLID STATE CHEMISTRY   183 ( 2 )   385 - 391   2010年2月

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    記述言語:英語   出版者・発行元:ACADEMIC PRESS INC ELSEVIER SCIENCE  

    Epitaxial growth and electron doping of 12CaO center dot 7Al(2)O(3) (C12A7) and 12SrO center dot 7Al(2)O(3) (S12A7) are reported. The C12A7 films were prepared on Y3Al5O12 (YAG) single-crystal substrates by pulsed laser deposition at room temperature and subsequent thermal crystallization. X-ray diffraction patterns revealed the films were grown epitaxially with the orientation relationship of (001)[100] C12A7 parallel to (001)[100] YAG. For S12A7, pseudo-homoepitaxial growth was attained on the C12A7 epitaxial layer. Upon electron doping, metallic conduction was achieved in the C12A7 film and the S12A7/C12A7 double-layered films. Analyses of optical absorption spectra for the S12A7/C12A7 Minis provided the densities of free electrons in each layer separately. Hall measurements exhibited larger electron mobility in the S12A7/C12A7 film than those in C12A7 and S12A7 films, Suggesting free electrons may be accumulated at the S12A7/C12A7 interface due presumably to a discontinuity of the cage conduction bands. (C) 2009 Elsevier Inc. All rights reserved.

    DOI: 10.1016/j.jssc.2009.11.031

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  • Fabrication and electron transport properties of epitaxial lms of electron-doped 12CaO窶「7Al2O3 and 12SrO窶「7Al2O3

    Masashi Miyakawa, Hidenori Hiramatsu, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Journal of Solid State Chemistry   183 ( 2 )   385 - 391   2010年2月

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  • Material characteristics and applications of transparent amorphous oxide semiconductors

    Toshio Kamiya, Hideo Hosono

    NPG Asia Mater.   2   1522   2010年

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  • 酸化物半導体新材料の設計とアモルファス酸化物TFT開発の現状

    神谷利夫, 細野秀雄

    鉱山   63 ( 3 )   20 - 30   2010年

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    記述言語:日本語   出版者・発行元:金属鉱山会  

    CiNii Books

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  • High Critical Current Density 4 MA/cm(2) in Co-Doped BaFe2As2 Epitaxial Films Grown on (La, Sr)(Al, Ta)O-3 Substrates without Buffer Layers

    Takayoshi Katase, Hidenori Hiramatsu, Toshio Kamiya, Hideo Hosono

    APPLIED PHYSICS EXPRESS   3 ( 6 )   063101   2010年

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    記述言語:英語   出版者・発行元:JAPAN SOC APPLIED PHYSICS  

    High critical current densities J(c) of 4 MA/cm(2) at 4 K were obtained in Co-doped BaFe2As2 (BaFe2As2:Co) epitaxial films grown directly on (La, Sr)(Al, Ta)O-3 substrates by pulsed laser deposition. Use of a highly pure target and improvement of film homogeneity were the critical factors to achieve the high J(c). The improved BaFe2As2:Co epitaxial films contained almost no Fe impurity and showed high crystallinity (crystallite tilt angle Delta omega = 0.5 degrees and twist angle Delta phi = 0.5 degrees) and a sharp superconducting transition with a width of 1.1 K. It is considered that these improvements resulted in the enhanced superconducting properties comparable to those of single crystals. (C) 2010 The Japan Society of Applied Physics

    DOI: 10.1143/APEX.3.063101

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  • Material characteristics and applications of transparent amorphous oxide semiconductors

    Kamiya, Toshio, Hosono, Hideo

    Npg Asia Materials   2 ( 1 )   1522   2010年

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  • Origin of denite Hall voltage and positive slope in mobility-donor density relation in disordered oxide semiconductors

    Toshio Kamiya, Kenji Nomura, Hideo Hosono

    Appl. Phys. Lett.   96 ( 12 )   122103   2010年

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  • Electronic Structures Above Mobility Edges in Crystalline and Amorphous In-Ga-Zn-O: Percolation Conduction Examined by Analytical Model

    Toshio Kamiya, Kenji Nomura, Hideo Hosono

    JOURNAL OF DISPLAY TECHNOLOGY   5 ( 12 )   462 - 467   2009年12月

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    記述言語:英語   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    Electronic structures and carrier transport mechanisms in disordered oxide semiconductors, crystalline InGaO3 ZnO)(m) (m = 1, 5) (c-IGZO) and amorphous InGaZnO4 (a-IGZO), are examined based on a percolation conduction model. Donor levels (E-d) and densities (N-D) are estimated by numerical calculations of free electron densities (n(e)) obtained by Hall measurements. It shows that the donor levels are rather deep, similar to 0.15 eV for c-IGZO and similar to 0.11 eV for a-IGZO. This analysis indicates that use of a simple analytical relation of n(e) proportional to exp(-E-d/2kT) can not always be used to estimate E-d and N-D even for a low n(e) film because the film can be in the saturation regime at room temperature if E-d and N-D are small, which is actually the case for a-IGZO. The temperature dependences of electron mobilities are analyzed using an analytical equation of the percolation conduction model, which reveals that distributed potential barriers exist above mobility edges in IGZO with average heights 30-100 meV and distribution widths 5-20 meV, which depend on atomic structure and deposition condition of IGZO films. High-quality a-IGZO films have the lowest potential barriers among the IGZO films examined, in spite that a-IGZO has a more disordered amorphous structure than c-IGZO have. It is explained by the partly disordered structure of c-IGZO.

    DOI: 10.1109/JDT.2009.2022064

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  • Electronic structures above mobility edges in crystalline and amorphous In-Ga-Zn-O: Percolation conduction examined by analytical model

    Toshio Kamiya, Kenji Nomura, Hideo Hosono

    IEEE/OSA Journal of Display Technology   5 ( 12 )   462 - 467   2009年12月

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    記述言語:英語  

    Electronic structures and carrier transport mechanisms in disordered oxide semiconductors, crystalline InGaO3(ZnO)m (m = 1, 5) (c-IGZO) and amorphous InGaZnO4 (a-IGZO), are examined based on a percolation conduction model. Donor levels (Ed) and densities (N D) are estimated by numerical calculations of free electron densities (ne) obtained by Hall measurements. It shows that the donor levels are rather deep, ∼ 0.15 eV for c-IGZO and ∼ 0.11 eV for a-IGZO. This analysis indicates that use of a simple analytical relation of ne (-Ed/2kT) can not always be used to estimate Ed and N D even for a low ne film because the film can be in the saturation regime at room temperature if Ed and ND are small, which is actually the case for a-IGZO. The temperature dependences of electron mobilities are analyzed using an analytical equation of the percolation conduction model, which reveals that distributed potential barriers exist above mobility edges in IGZO with average heights 30100 meV and distribution widths 520 meV, which depend on atomic structure and deposition condition of IGZO films. High-quality a-IGZO films have the lowest potential barriers among the IGZO films examined, in spite that a-IGZO has a more disordered amorphous structure than c-IGZO have. It is explained by the partly disordered structure of c-IGZO. © 2006 IEEE.

    DOI: 10.1109/JDT.2009.2022064

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  • Amorphous In-Ga-Zn-O thin-film transistor with coplanar homojunction structure

    Ayumu Sato, Mikio Shimada, Katsumi Abe, Ryo Hayashi, Hideya Kumomi, Kenji Nomura, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    THIN SOLID FILMS   518 ( 4 )   1309 - 1313   2009年12月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) with a coplanar homojunction structure are demonstrated. The coplanar source and drain regions made of a-IGZO were formed by depositing a hydrogenated silicon nitride (SiNX:H) layer onto the a-IGZO layer. The a-IGZO regions on which the SiNX:H layer was directly deposited showed the low resistivity of 4.7 x 10(-3) Omega cm and degenerated conduction. The fabricated TFT showed excellent transfer and output characteristics with a field-effect mobility of 11 cm(2) V-1 s(-1), a subthreshold swing of 0.17 V decade(-1,) and an on-to-off current ratio larger than 1 x 10(9). The width-normalized source-to-drain resistance (R-sd W) calculated using a channel resistance method was 51 Omega cm. This TFT also showed good stability over environment change and under electrical stress. (C) 2009 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2009.01.165

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  • Atomically-flat, chemically-stable, superconducting epitaxial thin film of iron-based superconductor, cobalt-doped BaFe2As2

    Takayoshi Katase, Hidenori Hiramatsu, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    SOLID STATE COMMUNICATIONS   149 ( 47-48 )   2121 - 2124   2009年12月

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    記述言語:英語   出版者・発行元:PERGAMON-ELSEVIER SCIENCE LTD  

    The epitaxial growth of Fe-based superconductors such as Co-doped SrFe2As2 (SrFe2As2:CO) was reported recently, but has still insufficient properties for a device application because they have rough surfaces and are decomposed by reactions with water vapor in an ambient atmosphere. This paper reports that epitaxial Films of Co-doped BaFe2As2 grown at 700 degrees C show the onset superconducting transition temperature of similar to 20 K. The transition is sharper than those observed on the SrFe2As2:Co films, which would originate from their improved crystallinity. These films also have atomically-flat surfaces with step-and-terrace structures and exhibit chemical stability against exposure to water vapor. (C) 2009 Elsevier Ltd. All rights reserved.

    DOI: 10.1016/j.ssc.2009.10.001

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  • Tin monoxide as an s-orbital-based p-type oxide semiconductor: Electronic structures and TFT application

    Yoichi Ogo, Hidenori Hiramatsu, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Mutsumi Kimura, Masahiro Hirano, Hideo Hosono

    Physica Status Solidi (A) Applications and Materials Science   206 ( 9 )   2187 - 2191   2009年9月

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    記述言語:英語  

    Tin monoxide (SnO) is a stable p-type oxide semiconductor. This paper reports electrical properties, electronic structures, and thin-film transistors (TFTs) of SnO. Epitaxial films were fabricated by pulsed laser deposition. The Hall mobility and he hole density of the epitaxial films were 2.4 cm 2 V -1 s -1 and 2.5×10 17, respectively. X-ray photoelectron spectroscopy (PES) indicated that the closed-shell 5s 2 orbitals of Sn 2+ ions heavily contribute to the hole conduction path in SnO. Top gate type TFTs (W/L=300/50 μm) employing 20 nm thick SnO channels exhibited field-effect mobilities μ sat =0.7 cm 2V -1 s -1 and μ lin =1.3 cm 2 V -1 s -1, which are larger by two orders of magnitude than those reported for pchannel oxide TFTs to date. On/off current ratios werẽ10 2 and subthreshold voltage swings (S) ̃7 V/decade. The parameters required for TFT simulations were estimated by ultraviolet PES and first-principles calculations. The TFT simulations indicated that subgap hole trap density in the SnO channel is&gt
    10 19 cm -3, which limits the TFT mobilities and the S values. © 2009 WILEY-VCH Verlag GmbH &amp
    Co. KGaA, Weinheim.

    DOI: 10.1002/pssa.200881792

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  • Tin monoxide as an s-orbital-based p-type oxide semiconductor: Electronic structures and TFT application

    Yoichi Ogo, Hidenori Hiramatsu, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Mutsumi Kimura, Masahiro Hirano, Hideo Hosono

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   206 ( 9 )   2187 - 2191   2009年9月

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    記述言語:英語   出版者・発行元:WILEY-V C H VERLAG GMBH  

    Tin monoxide (SnO) is a stable p-type oxide semiconductor. This paper reports electrical properties, electronic structures, and thin-film. transistors (TFTs) of SnO. Epitaxial films were fabricated by pulsed laser deposition. The Hall mobility and the hole density of the epitaxial films were 2.4 cm(2) V(-1) s(-1) and 2.5 x 10(17), respectively. X-ray photoelectron spectroscopy (PES) indicated that the closed-shell 5s(2) orbitals of Sn(2+) ions heavily contribute to the hole conduction path in SnO. Top gate type TFTs (W/L = 300/50 mu m) employing 20 nm thick SnO channels exhibited field-effect mobilities mu(sat) = 0.7 cm(2) V(-1) s(-1) and mu(lin) = 1.3 cm(2) V(-1) s(-1), which are larger by two orders of magnitude than those reported for p-channel oxide TFTs to date. On/off current ratios were similar to 10(2) and subthreshold voltage swings (S) similar to 7 V/decade. The parameters required for TFT simulations were estimated by ultraviolet PES and first-principles calculations. The TFT simulations indicated that subgap hole trap density in the SnO channel is &gt; 10(19) cm-3, which limits the TFT mobilities and the S values. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

    DOI: 10.1002/pssa.200881792

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  • Effects of post-annealing on (110) Cu(2)O epitaxial films and origin of low mobility in Cu(2)O thin-film transistor

    Kosuke Matsuzaki, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   206 ( 9 )   2192 - 2197   2009年9月

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    記述言語:英語   出版者・発行元:WILEY-V C H VERLAG GMBH  

    We grew epitaxial (110) Cu(2)O films on (110) MgO substrates toward high-mobility p-channel oxide thin-film transistors (TFTs). The (110) Cu(2)O films exhibited high Hall mobilities similar to 90 cm(2)(Vs)(-1) comparable to those of high-quality single-crystals, which were obtained in a narrow growth condition for 650 nm-thick films. TFTs using the epitaxial (110) Cu(2)O channels exhibited p-channel operation, but the field-effect mobilities and the on-to-off drain current ratio were far from satisfaction (similar to 0.04 cm(2)(Vs)(-1) and similar to 2, respectively). In order to investigate the origin of the poor mobility, the films were subjected to post-deposition annealing under various oxygen partial pressures (P(O2-A) = 0.65-10(-3) Pa). Optical measurements revealed that subgap states exist in all the films and their amounts were increased by post-deposition annealing irrespective of P(O2-A). The subgap density of states estimated by the optical analyses are consistent roughly with that estimated from the TFT mobility. (C) 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

    DOI: 10.1002/pssa.200881795

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  • Water-induced superconductivity in SrFe2As2

    Hidenori Hiramatsu, Takayoshi Katase, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    PHYSICAL REVIEW B   80 ( 5 )   052501   2009年8月

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    記述言語:英語   出版者・発行元:AMER PHYSICAL SOC  

    It has been considered that FeAs-based high-transition temperature (high-T-c) superconductors need electron or hole doping by aliovalent-ion substitution or large off stoichiometry in order to induce superconductivity. We report that exposure of undoped SrFe2As2 epitaxial thin films to water vapor induces a superconducting transition. These films exhibit a higher onset T-c (25 K) and larger magnetic field anisotropy than those of cobalt-doped SrFe2As2 epitaxial films, suggesting that the mechanism for the observed superconducting transition differs from that of the aliovalent-ion-doped SrFe2As2. The present finding provides an interesting approach to induce superconductivity with a higher T-c in FeAs-based superconductors.

    DOI: 10.1103/PhysRevB.80.052501

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  • Origins of threshold voltage shifts in room-temperature deposited and annealed a-In-Ga-Zn-O thin-film transistors

    Kenji Nomura, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    APPLIED PHYSICS LETTERS   95 ( 1 )   013502   2009年7月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Threshold voltage (V(th)) stability was examined under constant current stress for a-In-Ga-Zn-O thin film transistors (TFTs) deposited at room temperature and annealed at 400 degrees C in dry or wet O(2) atmospheres. All the TFTs exhibited positive V(th) shifts (Delta V(th)) and the Delta V(th) value was reduced by the thermal annealing to &lt; 2 V for 50 h. TFT simulations revealed that the Delta V(th) for the annealed TFTs is explained by increase in deep charged defects. Large Delta V(th) over 10 V and deterioration in subthreshold voltage swing were observed in the unannealed TFTs, which are attributed to the increase in shallow trap states. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3159831]

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  • Origins of threshold voltage shifts in room-temperature deposited and annealed a-In窶敵a窶纏n窶徹 thin-film transistors

    Kenji Nomura, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Appl. Phys. Lett.   95 ( 1 )   013502   2009年7月

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  • Electronic structure of the amorphous oxide semiconductor a-lnGaZnO 4-x: Tauc-Lorentz optical model and origins of subgap states

    Toshio Kamiya, Kenji Nomura, Hideo Hosono

    Physica Status Solidi (A) Applications and Materials Science   206 ( 5 )   860 - 867   2009年5月

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    記述言語:英語  

    This paper discusses an optical model and subgap electronic states for a representative amorphous oxide semiconductor, InGaZnO 4 (a-IGZO). Parameterized optical models were de veloped based on the Tauc-Lorentz model combined with a Lorentz-type oscillator. The measured optical absorption spectra exhibit nearly linear dependences on photon energy (E) between 3 eV &lt
    E &lt
    5 eV, which requires the transition energies in the Tauc -Lorentz model (E 0,TL) being around 4 eV. The optimized parameters for the fixed E 0,TL of 3.7 eV are provided for four different a-IGZO films with root-mean square errors less than 1%. Formation energies of crystalline IGZO, stoichiometric a-IGZO, oxygen deficient a-IGZO and their constituent oxides were calculated by the density func tional theory using the local density approximation (LDA) and generalized gradient approximation with PBE96 func tionals (PBE). PBE gives larger unit cell volumes at the ground states and better agreement in the formation energies than LDA does. The formation energies of an oxygen defi ciency in a-IGZO were calculated to be 3.2-3.5 eV. The cal culated electronic structures of stoichiometric a-IGZO models exhibit somewhat large dispersions for conduction bands (CB), which are not largely affected by the disordered struc ture in a-IGZO, while the dispersions of the valence bands (VBs) are very small, unlike the crystalline IGZO, showing that a-IGZO have strongly localized states at the VB maxi mums (VBMs). Oxygen-deficient a-IGZO models showed that oxygen deficiencies form both a deep localized state at 0.4-1 eV above VBM and a shallow donor state depending on local atomic configurations. An oxygen deficiency that forms a deep state breaks the dispersion of the CB, which could be an origin of the subgap states observed near CB. © 2009 WILEY-VCH Verlag GmbH &amp
    Co. KQaA.

    DOI: 10.1002/pssa.200881303

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  • Electronic structure of the amorphous oxide semiconductor a-InGaZnO4窶度: Tauc窶鏑orentz optical model and origins of subgap states

    Toshio Kamiya, Kenji Nomura, Hideo Hosono

    Phys. Status Solidi A   206 ( 5 )   860 - 867   2009年5月

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  • Heteroepitaxial film growth of layered compounds with the ZrCuSiAs-type and ThCr2Si2-type structures: From Cu-based semiconductors to Fe-based superconductors

    Hidenori Hiramatsu, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    PHYSICA C-SUPERCONDUCTIVITY AND ITS APPLICATIONS   469 ( 9-12 )   657 - 666   2009年5月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    FeAs-based layered superconductors such as F-doped LaFeAsO have recently been investigated intensively because of their high Superconducting transition temperatures. Epitaxial films of these compounds are important to examine their intrinsic materials properties as well as to transfer them to device applications. In this review, we first present our research route from transparent p-type oxides semiconductors to the Fe-based superconductors. Then we review growth of epitaxial thin films for the layered oxychalcogenides and oxypnictides. Reactive solid-phase epitaxy technique was inevitable to prepare epitaxial thin films of the oxychalcogenides and Zn-based oxypnictides. On the other hand, epitaxial thin films of Mn-based oxypnictides were grown by standard Pulsed laser deposition. These techniques, however, did not grow epitaxial thin films for LaFeAsO. Thus, we developed a modified pulsed laser deposition process and Succeeded in obtaining epitaxial thin films of FeAs-based superconductors, LaFeAsO and cobalt-doped SrFe2As2. (C) 2009 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.physc.2009.03.026

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  • First-principles study of native point defects in crystalline indium gallium zinc oxide

    Hideyuki Omura, Hideya Kumomi, Kenji Nomura, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    JOURNAL OF APPLIED PHYSICS   105 ( 9 )   093712   2009年5月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Materials in In-Ga-Zn-O system are promising candidates for channel layers of high- performance thin-film transistors (TFTs). We investigated the atomic arrangements and the electronic structures of crystalline InGaZnO(4) containing point defects such as oxygen vacancy (V(O)), interstitial hydrogen (H(i)), and interstitial oxygen (O(i)) by density functional theory (DFT) using a plane-wave pseudopotential method. The calculations for the atomic structure relaxation suggest that Hi bonds to a lattice oxygen (O(O)), and Oi occupies a split interstitial site [O(i) (split)] forming a chemical bond with O(O) which is similar to O(2) molecule, or Oi occupies an octahedral interstitial site [O(i)(oct)]. The electronic structure calculations reveal that V(O) forms fully occupied states around the middle of the DFT band gap, while Hi does not form a defect level in the band gap but raises the Fermi level above the conduction band minimum. O(i)(split) forms fully occupied states above the valence band maximum of the defect-free model (VBM(0)), while O(i)(oct) forms both occupied and unoccupied states above the VBM(0). It is thus suggested that V(O) and O(i)(split) are electrically inactive for electrons but work as hole traps, Hi acts as a donor, and O(i)(oct) is electrically active, trapping both electrons and holes. These observations imply that VO and O(i)(split) do not but Hi and O(i)(oct) influence electrical properties of the n-channel TFTs based on the In-Ga-Zn-O semiconductor materials. (C) 2009 American Institute of Physics. [DOI:10.1063/1.3089232]

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  • Antiferromagnetic bipolar semiconductor LaMnPO with ZrCuSiAs-type structure

    Hiroshi Yanagi, Takumi Watanabe, Katsuaki Kodama, Satoshi Iikubo, Shin-ichi Shamoto, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    JOURNAL OF APPLIED PHYSICS   105 ( 9 )   093916   2009年5月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Electronic and magnetic properties of a layered compound LaMnPO are examined in relation to a newly discovered iso-structural superconductor LaFeAs(P)O. Neutron diffraction measurements, together with temperature dependent magnetic susceptibility, clarify that LaMnPO is an antiferromagnet at least up to 375 K. The spin moment of a Mn ion is determined to be 2.26 mu(B) at room temperature, and the spin configuration is antiparallel in the Mn-P plane and parallel between the Mn-P planes, which is rather different from that of LaFeAsO. Optical absorption spectra, photoemission spectra, and temperature dependent electrical conductivity indicate that LaMnPO is a semiconductor. Furthermore, nominally undoped LaMnPO exhibits n-type conduction while the conduction type is changed by doping of Cu or Ca to the La sites, indicating that LaMnPO is a bipolar conductor. Density functional calculation using the GGA+U approximation supports the above conclusions; the electronic band structure has an open band gap and the antiferromagnetic spin configuration is more stable than the ferromagnetic one. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3124582]

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  • Bistable resistance switching in surface 窶登xidized C12A7:e-single-crystal

    Y.Adachi, S-W.Kim, T.Kamiya, H.Hosono

    Mater.Sci. & Eng.B   161 ( 1-3 )   76 - 79   2009年4月

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  • Bistable resistance switching in surface-oxidized C12A7:e(-) single-crystal

    Yutaka Adachi, Sung-Wng Kim, Toshio Kamiya, Hideo Hosono

    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS   161 ( 1-3 )   76 - 79   2009年4月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    12CaO center dot 7Al(2)O(3) (C12A7) is a typical band insulator, but may be converted to a metallic conductor C12A7:e(-) by electron-doping via removal of free oxygen ions sitting in the subnanometer-sized cages as the counter ions. Also, C12A7 is known as a fast oxygen ion conductor. These unique features let us expect that it would be possible to dope electrons to C12A7 by removing the free oxygen ions by an external electric field. in this Study, we fabricated C12A7/C12A7:e(-) stacking devices and examined their current-voltage characteristics. The thickness of the top C12A7 layer was controlled by low-temperature oxidation with an aid of an optical model analysis of spectroscopic ellipsometry. We found that the C12A7/C12A7:e(-) devices exhibited a bistable resistance switching effect with an on-to-off resistance ratio of similar to 10(2) and operated as a resistive random access memory. (C) 2008 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.mseb.2008.11.042

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  • Large domain growth of GaN epitaxial films on lattice-matched buffer layer ScAlMgO4

    Takayoshi Katase, Kenji Nomura, Hiromichi Ohta, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS   161 ( 1-3 )   66 - 70   2009年4月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    A homologous series compound ScAlO3(MgO) (SCAM) has a superior lattice matching as small as similar to 1.4% in a-axis with GaN. This paper reports an efficient fabrication process of a single-crystalline SCAM buffer layer on a (1 1 1) yttria-stabilized zirconia (YSZ) substrate using pulsed laser deposition (PLD). A 10-nm thick ZnO epitaxial layer was used to induce solid-phase epitaxial growth of an amorphous (a-) SCAM layer formed at room temperature on (1 1 1) YSZ. It was found that the addition of excess Sc2O3 and ZnO to a SCAM target used for PLD was needed to obtain single-crystalline SCAM films with atomically flat terraces-and-steps surfaces. The resulting single-crystalline SCAM films were examined as buffer layers to grow GaN by molecular beam epitaxy with a plasma nitrogen source. The GaN films were grown epitaxially on the SCAM/YSZ substrates with the epitaxial relationship of [0 0 0 1] GaN parallel to[0 0 0 1] SCAM parallel to[1 1 1] YSZ and [1 0 0] GaN parallel to [11-20] SCAM parallel to [1-10] YSZ. The SCAM buffer layers enhanced lateral growth of the GaN films owing to the good lattice matching. (C) 2009 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.mseb.2009.02.003

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  • Epitaxial film growth and optoelectrical properties of layered semiconductors, LaMnXO (X=P, As, and Sb)

    Kentaro Kayanuma, Hidenori Hiramatsu, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    JOURNAL OF APPLIED PHYSICS   105 ( 7 )   073903   2009年4月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Thin films of LaMnXO (X=P, As, and Sb), which are isostructural compounds of the newly discovered superconductor, LaFeAsO, were grown epitaxially on MgO(001) substrates at similar to 680 degrees C by pulsed laser deposition. Postdeposition thermal annealing at 1000 degrees C in evacuated silica glass ampoules improved the crystallinity and orientation for the LaMnPO and LaMnAsO films, but it led to the phase segregation of the LaMnSbO film. Thermopower and optical absorption measurements revealed that all the films are p-type semiconductors with indirect bandgaps from 1.0 to 1.4 eV, which are supported by density functional calculations with the GGA+U approximation. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3093685]

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  • Amorphous In-Ga-Zn-O coplanar homojunction thin-film transistor

    Ayumu Sato, Katsumi Abe, Ryo Hayashi, Hideya Kumomi, Kenji Nomura, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    APPLIED PHYSICS LETTERS   94 ( 13 )   133502   2009年3月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    A fabrication process of coplanar homojunction thin-film transistors (TFTs) is proposed for amorphous In-Ga-Zn-O (a-IGZO), which employs highly doped contact regions naturally formed by deposition of upper protection layers made of hydrogenated silicon nitride (SiNX:H). The direct deposition of SiNX:H reduced the resistivity of the semiconductive a-IGZO layer down to 6.2x10(-3) Omega cm and formed a nearly ideal Ohmic contact with a low parasitic source-to-drain resistance of 34 Omega cm. Simple evaluation of field-effect mobilities (mu(sat)) overestimated their values especially for short-channel TFTs, while the channel resistance method proved that mu(sat) was almost constant at 9.5 cm(2) V-1 s(-1).

    DOI: 10.1063/1.3112566

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  • Amorphous In窶敵a窶纏n窶徹 coplanar homojunction thin-film transistor

    Ayumu Sato, Katsumi Abe, Ryo Hayashi, Hideya Kumomi, Kenji Nomura, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Appl. Phys. Lett.   94 ( 13 )   133502   2009年3月

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  • Layered mixed-anion compounds: Epitaxial growth, active function exploration, and device application

    Hidenori Hiramatsu, Yoichi Kamihara, Hiroshi Yanagi, Kazushige Ueda, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Journal of the European Ceramic Society   29 ( 2 )   245 - 253   2009年1月

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    記述言語:英語  

    Optoelectronic properties and device applications of layered mixed-anion compounds such as oxychalcogenide LaCuOCh (Ch = chalcogen) and oxypnictide LaTMOPn (TM = 3d transition metal, Pn = pnicogen) are reviewed. Several distinctive functions have been found in these materials based on our original material exploration concept. Fabrication of high-quality epitaxial films of LaCuOCh leads to clarifying the excellent electrical and optical properties such as high hole mobility of 8 cm2/(V s) and heavy hole doping at &gt
    1021 cm-3 in LaCuOSe, and sharp and tunable-wavelength photoluminescence in the solid-solution systems in LaCuOCh. In addition, a room temperature operation of a light-emitting diode is demonstrated using LaCuOSe as a light-emitting layer. These results suggest that the layered oxychalcogenides have potential for light-emitting layers as well as transparent hole-injection layers in organic/inorganic light-emitting diodes. Furthermore, by extending the material system from the copper-based oxychalcogenides to isostructural compounds, transition metal-based oxypnictides LaTMOP (TM = Fe, Ni), we have found novel superconductors, LaFeOP and LaNiOP. © 2008 Elsevier Ltd. All rights reserved.

    DOI: 10.1016/j.jeurceramsoc.2008.03.016

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  • Layered mixed-anion compounds: Epitaxial growth, active function exploration, and device application

    Hidenori Hiramatsu, Yoichi Kamihara, Hiroshi Yanagi, Kazushige Ueda, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY   29 ( 2 )   245 - 253   2009年1月

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    記述言語:英語   出版者・発行元:ELSEVIER SCI LTD  

    Optoelectronic properties and device applications of layered mixed-anion compounds such as oxychalcogenide LaCuOCh (Ch = chalcogen) and oxypnictide LaT(M)OPn (T(M) = 3d transition metal, Pn = pnicogen) are reviewed. Several distinctive functions have been found in these materials based on our original material exploration concept. Fabrication of high-quality epitaxial films of LaCuOCh leads to clarifying the excellent electrical and optical properties such as high hole mobility of 8 cm(2)/(V s) and heavy hole doping at &gt;10(21) cm(-3) in LaCuOSe, and sharp and tunable-wavelength photoluminescence in the solid-solution systems in LaCuOCh. In addition, a room temperature operation of a light-emitting diode is demonstrated using LaCuOSe as a light-emitting layer. These results suggest that the layered oxychalcogenides have potential for light-emitting layers as well as transparent hole-injection layers in organic/inorganic light-emitting diodes. Furthermore, by extending the material system from the copper-based oxychalcogenides to isostructural compounds, transition metal-based oxypnictides LaT(M)OP (T(M) = Fe, Ni), we have found novel superconductors, LaFeOP and LaNiOP. (C) 2008 Elsevier Ltd. All rights reserved.

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  • Humidity-Sensitive Electrical Conductivity in Ca12Al14-xSixO32Cl2+x (0 &lt;= x &lt;= 3.4) Ceramics

    Katsuro Hayashi, Hiroki Muramatsu, Satoru Matsuishi, Toshio Kamiya, Hideo Hosono

    ELECTROCHEMICAL AND SOLID STATE LETTERS   12 ( 2 )   J11 - J13   2009年

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    記述言語:英語   出版者・発行元:ELECTROCHEMICAL SOC INC  

    The effect of humidity on the electrical conductivity in porous and dense ceramics of Ca12Al14-xSixO32Cl2+x (x=0, 1.7, 3.4) with a mayenite structure was examined at room temperature. Surface ionic conductivity was enhanced by increasing the humidity. The sample with x=3.4, which had a porosity of 30%, exhibited the largest conductivity change of about 4 orders of magnitude over the relative humidity range of 10-90% at 25 degrees C. The presence of Cl- ions on the surface most likely enhances the formation of hydronium ions which are responsible for proton transfer in physisorbed water layers.

    DOI: 10.1149/1.3032908

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  • Layered mixed-anion compounds: Epitaxial growth, active function exploration, and device application

    Hidenori Hiramatsu, Yoichi Kamihara, Hiroshi Yanagi, Kazushige Ueda, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    J. Euro. Ceram. Soc.   29 ( 2 )   245 - 253   2009年

  • Origins of High Mobility and Low Operation Voltage of Amorphous Oxide TFTs: Electronic Structure, Electron Transport, Defects and Doping

    Toshio Kamiya, Kenji Nomura, Hideo Hosono

    J. Displ. Technol.   5   273   2009年

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  • Two-Dimensional Spin Dynamics in the Itinerant Ferromagnet LaCoPO Revealed by Magnetization and 31P-NMR Measurements

    Hitoshi Sugawara, Kenji Ishida, Yusuke Nakai, Hiroshi Yanagi, Toshio Kamiya, Yoichi Kamihara, Masahiro Hirano, Hideo Hosono

    Journal of the Physical Society of Japan   78   113705 - 113708   2009年

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  • Low Threshold Voltage and Carrier Injection Properties of Inverted Organic Light-Emitting Diodes with [Ca24Al28O64]4+(4e-)Cathode and Cu2-xSe Anode

    Hiroshi Yanagi, Ki-Beom Kim, Ikue Koizumi, Maiko Kikuchi, Hidenori Hiramatsu, Masashi Miyakawa, Toshi Kamiya, Masahiro Hirano, Hideo Hosono

    J.Phys.Chem.C,   113 ( 42 )   18379 - 18384   2009年

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  • Tin monoxide as an s-orbital-based p-type semiconductor:Electronic structures and TFT application

    Yoichi Ogo, Hidenori Hiramatsu, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Mutsumi Kimura, Masahiro Hirano, Hideo Hosono

    Physics Status Solidi A   1 - 5   2009年

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  • Large domain growth of GaN epitaxial films on lattice-matched buffer layer ScAlMgO4

    Takayoshi Katase, Kenji Nomura, Hiromichi Ohta, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Mater. Sci. & Eng. B   161   66 - 70   2009年

  • Antiferromagnetic bipolar semiconductor LaMnPO with ZrCuSiAs-type structure

    Hiroshi Yanagi, Takumi Watanabe, Katsuaki Kodama, Satoshi Iikubo, Shin-ichi Shamoto, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    J. Appl. Phys   105 ( 9 )   093916   2009年

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  • Tin monoxide as an s-orbital-based p-type semiconductor:Electronic structures and TFT application

    Yoichi Ogo, Hidenori Hiramatsu, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Mutsumi Kimura, Masahiro Hirano, Hideo Hosono

    Physics Status Solidi A   1 - 5   2009年

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  • Humidity-sensitive electrical conductivity in Ca12 Al14-x Six O32 Cl2+x (0≤x≤3.4) ceramics

    Katsuro Hayashi, Hiroki Muramatsu, Satoru Matsuishi, Toshio Kamiya, Hideo Hosono

    Electrochemical and Solid-State Letters   12 ( 2 )   J11 - J13   2009年

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    記述言語:英語  

    The effect of humidity on the electrical conductivity in porous and dense ceramics of Ca12 Al14-x Six O32 Cl2+x (x=0, 1.7, 3.4) with a mayenite structure was examined at room temperature. Surface ionic conductivity was enhanced by increasing the humidity. The sample with x=3.4, which had a porosity of 30%, exhibited the largest conductivity change of about 4 orders of magnitude over the relative humidity range of 10-90% at 25°C. The presence of Cl- ions on the surface most likely enhances the formation of hydronium ions which are responsible for proton transfer in physisorbed water layers. © 2008 The Electrochemical Society.

    DOI: 10.1149/1.3032908

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  • Origins of High Mobility and Low Operation Voltage of Amorphous Oxide TFTs: Electronic Structure, Electron Transport, Defects and Doping

    Toshio Kamiya, Kenji Nomura, Hideo Hosono

    J. Displ. Technol.   5   273   2009年

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  • Pressure effects on T-c of Iron-based Layered Superconductor LaTMPO (TM = Fe, Ni)

    K. Igawa, K. Arii, Y. Takahashi, H. Okada, H. Takahashi, Y. Kamihara, M. Hirano, H. Hiramatsu, T. Watanabe, H. Yanagi, T. Kamiya, H. Hosono, K. Matsubayashi, Y. Uwatoko

    25TH INTERNATIONAL CONFERENCE ON LOW TEMPERATURE PHYSICS (LT25), PART 5   150   052075-052078   2009年

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    記述言語:英語   出版者・発行元:IOP PUBLISHING LTD  

    We report electrical and magnetic properties of LaTMPO (TM = Fe, Ni) under high pressures. From resistivity measurements, superconducting transition temperature T-c for LaFePO and LaNiPO increases steeply up to about 0.8 GPa, and the dT(c)/dP values are more than 4 K/GPa and 1 K/GPa, respectively. From the results of high-pressure x-ray diffraction measurements, the oxypnictide compounds show an anisotropic compression along a-axis and c-axis.

    DOI: 10.1088/1742-6596/150/5/052075

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  • Two-Dimensional Spin Dynamics in the Itinerant Ferromagnet LaCoPO Revealed by Magnetization and 31P-NMR Measurements

    Hitoshi Sugawara, Kenji Ishida, Yusuke Nakai, Hiroshi Yanagi, Toshio Kamiya, Yoichi Kamihara, Masahiro Hirano, Hideo Hosono

    Journal of the Physical Society of Japan   78   113705 - 113708   2009年

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  • Electromagnetic properties of undoped LaFePnO (Pn = P, As)

    Y. Kamihara, T. Watanabe, T. Nomura, S. W. Kim, T. Kamiya, M. Hirano, H. Hosono

    25TH INTERNATIONAL CONFERENCE ON LOW TEMPERATURE PHYSICS (LT25), PART 5   150   052090   2009年

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    記述言語:英語   出版者・発行元:IOP PUBLISHING LTD  

    Undoped LaFePnO (Pn = P, As) shows metallic resistivity and a tetragonal phase at room temperature. The electrical resistivity (rho) of undoped LaFeAsO exhibits a sudden decrease around T-anom similar to 160 K with decreasing the temperature and increases with decreasing the temperatures (T) below another threshold temperature (T-min). It makes a contrast to undoped LaFePO, which shows neither of T-anom nor T-min. The T-anom corresponds to a crystallographic phase transition: undoped LaFeAsO shows an orthorhombic phase at temperatures &lt; 160 K. A positive magnetoresistance (MR = (rho-rho(0)) / rho(0)) also appears below T-anom. DFT calculations indicate that spin moment of LaFeAsO is 1.56 mu(B) / Fe in an antiferromagnetic spin configuration in a tetragonal phase, while spin moment of LaFePO is almost quenched.

    DOI: 10.1088/1742-6596/150/5/052090

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  • Low Threshold Voltage and Carrier Injection Properties of Inverted Organic Light-Emitting Diodes with [Ca24Al28O64]4+(4e-)Cathode and Cu2-xSe Anode

    Hiroshi Yanagi, Ki-Beom Kim, Ikue Koizumi, Maiko Kikuchi, Hidenori Hiramatsu, Masashi Miyakawa, Toshi Kamiya, Masahiro Hirano, Hideo Hosono

    J.Phys.Chem.C,   113 ( 42 )   18379 - 18384   2009年

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  • アモルファス酸化物半導体の物性とデバイス開発の現状

    神谷利夫, 野村研二, 細野秀雄

    固体物理   44 ( 9 )   621 - 633   2009年

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    記述言語:日本語   出版者・発行元:アグネ技術センタ-  

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  • Characterization of copper selenide thin film hole-injection layers deposited at room temperature for use with p-type organic semiconductors

    Hidenori Hiramatsu, Ikue Koizumi, Ki-Beom Kim, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Noriaki Matsunami, Hideo Hosono

    JOURNAL OF APPLIED PHYSICS   104 ( 11 )   113723   2008年12月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Copper selenide, Cu(x)Se(x similar to 2), was examined as a hole-injection layer for low-temperature organic devices. Crystalline CuxSe films grown at room temperature with atomically flat surfaces exhibited metallic conduction with a high electrical conductivity of 4.5 x 10(3) S/cm, a hole concentration of 1.4 x 10(22) cm(-3), and a mobility of 2.0 cm(2)/(V s). Analysis of the free carrier absorption using the Drude model estimated the effective mass of a hole as 1.0m(e). Photoemission spectroscopy measurements of the interfaces between CuxSe and organic hole transport layers, N, N&apos;-bis(naphthalen-1-y1)-N,N&apos;]-bis(phenyl)benzidine (NPB) and copper phthalocyanine (CuPc), verified that the hole-injection barriers of these interfaces (0.4 eV for NPB and 0.3 eV for CuPc) are smaller than that of a conventional indium tin oxide (ITO) hole-injection electrode/NPB interface (0.6 eV) but are comparable to that of an ITO electrode/CuPc interface (0.3 eV). Hole-only devices using the CuxSe layer as a hole-injection anode exhibited very low threshold voltages (0.4-0.5 V) and nearly Ohmic characteristics. The NPB layer on the Cu(x)Se layer was found to be highly doped at 10(17)-10(19) cm(-3), probably due to copper diffusion, while the CuPc layer is nearly intrinsic with a doping concentration lower than 10(15) cm(-3). These results indicated that a CuxSe film combined with CuPc is a promising candidate for a low-voltage hole-injection anode or a buffer layer in low-temperature devices such as organic light-emitting diodes and thin film transistors. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.3039167]

    DOI: 10.1063/1.3039167

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  • Electronic and magnetic properties of layered LnFePO (Ln = La and Ce)

    Yoichi Kamihara, Hidenori Hiramatsu, Masahiro Hirano, Hiroshi Yanagi, Toshio Kamiya, Hideo Hosono

    JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS   69 ( 11 )   2916 - 2918   2008年11月

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    記述言語:英語   出版者・発行元:PERGAMON-ELSEVIER SCIENCE LTD  

    Effects of the replacement of La with Ce on the electronic and magnetic properties of a layered superconductor LaFePO (T(c) = similar to 5 K) were studied. Polycrystalline samples of CeFePO, prepared by a solid-state reaction, showed metallic conduction down to 2K without exhibiting superconducting transition, although the resistivity decreased largely at temperatures below 30 K. Further, they showed an apparent positive magnetoresistance (MR) below similar to 2 K, superposed on a negative MR. Temperature dependence of magnetic susceptibility is decomposed to a temperature-sensitive Curie-Weiss component presumably due to the Ce(3+) ions with a magnetic moment of 1.98 mu(B) and a less temperature-sensitive component attributable to itinerant electrons. The magnetic interaction between Ce(3+) ions and itinerant electrons in CeFePO likely suppresses the Superconducting transition observed in LaFePO. (C) 2008 Elsevier Ltd. All rights reserved.

    DOI: 10.1016/j.jpcs.2008.08.011

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  • ZnO-Based Semiconductors as Building Blocks for Active Devices

    Toshio Kamiya, Masashi Kawasaki

    MRS BULLETIN   33 ( 11 )   1061 - 1066   2008年11月

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    記述言語:英語   出版者・発行元:MATERIALS RESEARCH SOC  

    This article provides a review of materials and devices of wide-bandgap oxide semiconductors based on ZnO, highlighting the nature of the chemical bond. The electronic structures of these materials are very different from those of conventional covalently bonded semiconductors, owing to the ionic nature of the chemical bonds. Therefore, one needs to design and optimize fabrication processes and structures of active devices containing such materials, taking into account the peculiar defect formation mechanisms. A variety of active devices that have clear advantages over the conventional ones have been demonstrated, for example, ultraviolet light-emitting diodes, quantum Hall devices, and transparent and flexible thin-film transistors with high electron mobility, paving the way for future applications. The reasons behind the successes identify future challenges in research on oxide semiconductors.

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  • Epitaxial growth of high mobility Cu(2)O thin films and application to p-channel thin film transistor

    Kosuke Matsuzaki, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    APPLIED PHYSICS LETTERS   93 ( 20 )   202107   2008年11月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Cu(2)O epitaxial films were grown for high mobility p-channel oxide thin-film transistors (TFTs). The use of a (110) MgO surface and fine tuning of a growth condition produced single phase epitaxial films with hole Hall mobilities similar to 90 cm(2) V(-1) s(-1) comparable to those of single crystals (similar to 100 cm(2) V(-1) s(-1)). TFTs using the epitaxial film channels exhibited p-channel operation although the field-effect mobilities and the on-to-off current ratio were not yet satisfactory (similar to 0.26 cm(2) V(-1) s(-1) and similar to 6, respectively).

    DOI: 10.1063/1.3026539

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  • Defect passivation and homogenization of amorphous oxide thin-film transistor by wet O(2) annealing

    Kenji Nomura, Toshio Kamiya, Hiromichi Ohta, Masahiro Hirano, Hideo Hosono

    APPLIED PHYSICS LETTERS   93 ( 19 )   192107   2008年11月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Roles of H(2)O addition to an annealing atmosphere were investigated for amorphous In-Ga-Zn-O thin-film transistors fabricated at room temperature. Although dry O(2) annealing improved saturation mobility (mu(sat)) and subthreshold voltage swings (S), wet O(2) annealing further improved them to mu(sat)similar to 12 cm(2)(V s)(-1) and S &lt; 0.12 V decade(-1) along with improvement of their uniformity. Desorption of OH-related species caused conductivity increase during thermal annealing at &lt; 310 degrees C. Zn-O components started to desorb at similar to 300 degrees C for the unannealed and the dry O(2) annealed films, while these were suppressed remarkably by the wet O(2) annealing.

    DOI: 10.1063/1.3020714

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  • Heteroepitaxial growth and optoelectronic properties of layered iron oxyarsenide, LaFeAsO

    Hidenori Hiramatsu, Takayoshi Katase, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    APPLIED PHYSICS LETTERS   93 ( 16 )   162504   2008年10月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    The epitaxial thin films of LaFeAsO were fabricated on MgO(001) and mixed-perovskite (La,Sr)(Al,Ta)O(3)(001) single-crystal substrates by pulsed laser deposition using a Nd-doped yttrium aluminum garnet second harmonic source and a 10 at. % F-doped LaFeAsO disk target. Temperature dependences of the electrical resistivities showed no superconducting transition in the temperature range of 2-300 K and were similar to those of undoped polycrystalline bulk samples. The transmittance spectrum exhibited a clear peak at similar to 0.2 eV, which is explained by ab initio calculations. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.2996591]

    DOI: 10.1063/1.2996591

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  • Solid State Syntheses of 12SrO center dot 7Al(2)O(3) and Formation of High Density Oxygen Radical Anions, O- and O-2(-)

    Katsuro Hayashi, Naoto Ueda, Satoru Matsuishi, Masahiro Hirano, Toshio Kamiya, Hideo Hosono

    CHEMISTRY OF MATERIALS   20 ( 19 )   5987 - 5996   2008年10月

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    記述言語:英語   出版者・発行元:AMER CHEMICAL SOC  

    A new synthetic route via a solid-state reaction, the crystal Structure of 12SrO center dot 7Al(2)O(3) (S(12)A(7)) incorporated with OH- ions, and the formation of oxygen radical anions in S12A7 have been examined. Investigations using X-ray powder diffraction and thermogravimetric and evolved gas combined analyses demonstrate that homogenization promoted by molten Sr(OH)(2) hydrates and the presence of Sr-hydrogarnet precursors play crucial roles in the formation of S(12)A(7). Rietveld analyses confirm the lattice framework of S(12)A(7) has a structure identical to that of the nanoporous crystal 12CaO center dot 7Al(2)O(3) (C(12)A(7), a mayenite structure) and demonstrate that two Sr2+ ions (pole Sr2+ ions) on the S-4 axis of a cage displace toward the cage center owing to the accommodation of an OH- ion. An electron paramagnetic resonance study demonstrates that oxygen radical anions, O-2(-) and O-, are generated in the cages with concentrations on the order of 10(20) cm(-3) each by oxygen annealing. From the g-values observed at 77 K, the oxygen radical anions are interpreted as being sandwiched between the two pole Sr2+ ions rather than adsorbed on one side.

    DOI: 10.1021/cm800666p

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  • Solid State Syntheses of 12SrO・7Al2O3 and Formation of High Density Oxygen Radical Anions, O-and O2-

    Katsuro Hayashi, Naoto Ueda, Satoru Matsuishi, Masahiro Hirano, Toshio Kamiya, Hideo Hosono

    Chemstry of Materials,   20 ( 19 )   5987 - 5996   2008年10月

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  • Superconductivity in Epitaxial Thin Films of Co-Doped SrFe2As2 with Bilayered FeAs Structures and their Magnetic Anisotropy

    Hidenori Hiramatsu, Takayoshi Katase, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    APPLIED PHYSICS EXPRESS   1 ( 10 )   101702   2008年10月

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    記述言語:英語   出版者・発行元:JAPAN SOC APPLIED PHYSICS  

    Superconducting epitaxial films of Fe-based layered arsenide, Co-doped SrFe2As2, were grown at 700 degrees C on mixed perovskite (La,Sr)(Al,Ta)O-3(001) single-crystal substrates by pulsed-laser deposition. Both the epitaxial film and an (001)-oriented film grown at 600 degrees C exhibited superconducting transitions at similar to 20 K. The zero-resistance states of the epitaxial film were sustained under a magnetic field (H) of 9 T at 9 K when H was parallel to the c-axis, while they were sustained at higher temperatures up to 10 K for H parallel to the a-axis. This is the first demonstration of superconducting thin films of FeAs-based new superconductors. (c) 2008 The Japan Society of Applied Physics

    DOI: 10.1143/APEX.1.101702

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  • Low and small resistance hole-injection barrier for NPB realized by wide-gap p-type degenerate semiconductor, LaCuOSe : Mg

    Hiroshi Yanagi, Maiko Kikuchi, Ki-Beom Kim, Hidenori Hiramatsu, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    ORGANIC ELECTRONICS   9 ( 5 )   890 - 894   2008年10月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    LaCuOSe:Mg is a wide-gap p-type semiconductor with a high concluctivity and a large work function. Potential of LaCuOSe:Mg as a transparent hole-injection electrode of organic light-emitting diodes (OLEDs) was examined by employing N,N'-diphenyl-N,N'-bis (1,1'-biphenyl)-4,4'-diamine (NPB) for a hole transport layer. Photoemission spectroscopy revealed that an oxygen plasma treated surface of LaCuOSe:Mg formed a hole-injection barrier as low as 0.3 eV, which is approximately a half of a conventional ITO/NPB interface. Hole-only devices composed of a LaCuOSe:Mg/NPB/Al structure showed a low threshold voltage similar to 0.2 V and high-density current drivability of 250 mA cm(-2) at 2 V, which is larger by two orders of magnitude than that of ITO/NPB/Al devices. These results demonstrate that LaCuOSe:Mg has great potential as an efficient transparent anode for OLEDs and other organic electronic devices. (C) 2008 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.orgel.2008.03.004

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  • Fabrication and transport properties of 12CaO center dot 7Al(2)O(3) (C12A7) electride nanowire

    Y. Nishio, K. Nomura, M. Miyakawa, K. Hayashi, H. Yanagi, T. Kamiya, M. Hirano, H. Hosono

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   205 ( 8 )   2047 - 2051   2008年8月

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    記述言語:英語   出版者・発行元:WILEY-V C H VERLAG GMBH  

    Electron-doped 12CaO center dot 7Al(2)O(3) (C12A7) nanowires (NWs) were fabricated by two approaches. First, spatially selective electron doping of C12A7 films was examined by using a chemical method specific to C12A7. However, the conductive NW was not formed due to diffusion of oxygen in the C12A7 films to the conductive area. Secondly, a combination of dry etching and electron doping was examined. NWs with conductivities similar to 6 S/cm at 300 K were successfully fabricated by this method. The temperature dependence of the conductivity in the NWs exhibited almost degenerated conduction down to 5 K. (c) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

    DOI: 10.1002/pssa.200778901

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  • Nickel-based layered superconductor, LaNiOAs

    Takumi Watanabe, Hiroshi Yanagi, Yoichi Kamihara, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    JOURNAL OF SOLID STATE CHEMISTRY   181 ( 8 )   2117 - 2120   2008年8月

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    記述言語:英語   出版者・発行元:ACADEMIC PRESS INC ELSEVIER SCIENCE  

    Rietveld analysis of the powder X-ray diffraction of a new layered oxyarsenide, LaNiOAs, which was synthesized by solid-state reactions, revealed that LaNiOAs belongs to the tetragonal ZrCuSiAs-type structure (P4/nmm) and is composed of alternating stacks of La-O and Ni-As layers. The electrical and magnetic measurements demonstrated that LaNiOAs exhibits a superconducting transition at 2.4 K, and above this, LaNiOAs shows metallic conduction and Pauli paramagnetism. The diamagnetic susceptibility measured at 1.8 K corresponded to similar to 20% of perfect diamagnetic susceptibility, substantiating that LaNiOAs is a bulk superconductor. (C) 2008 Elsevier Inc. All rights reserved.

    DOI: 10.1016/j.jssc.2008.04.033

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  • Fabrication and Transport Properties of 12CaO窶「7Al2O3 (C12A7) Electride Nanowire

    Yoshimasa Nishio, Kenji Nomura, Masashi Miyakawa, Katsuro Hayashi, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    phys. stat. solidi (a)   205 ( 8 )   2047 - 2051   2008年8月

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  • Amorphous Sn-Ga-Zn-O channel thin-film transistors

    Youichi Ogo, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   205 ( 8 )   1920 - 1924   2008年8月

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    記述言語:英語   出版者・発行元:WILEY-V C H VERLAG GMBH  

    Transparent amorphous oxide semiconductors (TAOS) such as a-InGaZnO4 are expected to be applied for channels of low-temperature high-mobility thin-film transistors (TFTs). This paper presents the fabrication and characteristics of amorphous Sn-Ga-Zn-O (a-SGZO) channel TFTs. Bottom-gate TFTs were fabricated using as-deposited and annealed a-SGZO channels on a-SiO2/n(+)-Si wafers. Contrary to a-InGaZnO4 channel TFTs, the device performances of the as-deposited channel TFTs were very poor, e.g., on-currents (4.) were &lt; 10(-7) A and on/off current ratios (R-on/off) were &lt; 10(1). The TFTs using channels annealed at 500 degrees C showed good performances such as mu sat 1.8 cm(2) V-1 s(-1). Optical measurements indicate that the improvement is accompanied by a reduction ofthe density of subgap states. (c) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

    DOI: 10.1002/pssa.200778908

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  • Relationship between non-localized tail states and carrier transport in amorphous oxide semiconductor, In-Ga-Zn-O

    K. Nomura, T. Kamiya, H. Ohta, K. Shimizu, M. Hirano, H. Hosono

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   205 ( 8 )   1910 - 1914   2008年8月

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    記述言語:英語   出版者・発行元:WILEY-V C H VERLAG GMBH  

    DOI: 10.1002/pssa.200778936

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  • Zn-ln-O based thin-film transistors: Compositional dependence

    N. Itagaki, T. Iwasaki, H. Kumomi, T. Den, K. Nomura, T. Kamiya, H. Hosono

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   205 ( 8 )   1915 - 1919   2008年8月

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    記述言語:英語   出版者・発行元:WILEY-V C H VERLAG GMBH  

    The compositional dependence of sputter-deposited Zn-In-O (ZIO) film properties and the TFT performance were studied by means of a combinatorial technique. Both the characteristics of ZIO TFTs and the ZIO film properties are very sensitive to the Zn:In ratio. The best TFT performances are obtained at Zn:In similar to 60:40 at%, where the saturation mobility (mu(sat)), subthreshold swing (S.S.), on-off current ratio (I-on/I-off), and threshold voltage (V-th) are 26.5 cm(2)/Vs, 0.24 V/dec., 10(10), and +2 V, respectively. The TFT characteristics speak at this compositional ratio. Specifically, mu(sat), I-on/I-off and V-th reach maximum, while S.S. reaches minimum at this ratio. The air stability of ZIO-TFTs was also examined for active channel layers with different Zn:In ratios, which clarified that the TFTs with high stability are obtained around the same composition ration where the best characteristics are obtained. It was confirmed by X-ray diffraction and transmission electron microscopy that the ZIO films with this composition ratio have amorphous structure. (c) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

    DOI: 10.1002/pssa.200778909

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  • Interface electronic structures of zinc oxide and metals: First-principle study

    T. Kamiya, K. Tajima, K. Nomura, Hiroshi Yanagi, H. Hosono

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   205 ( 8 )   1929 - 1933   2008年8月

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    記述言語:英語   出版者・発行元:WILEY-V C H VERLAG GMBH  

    Electronic structures and carrier transport properties were studied based oil ab-initio calculations for Au/ZnO/Au and Mg/ZnO/Mg two-probe models, Quantum-mechanically stable structures were obtained by density functional calculations. Electron transmission spectra and current-voltage characteristics were calculated based on a non-equilibrium Green function method with the relaxed structures. It was found that the electronic structures of the idealized models were a Schottky contact for the Au/ZnO/Au interface and an ohmic contact for the Mg/ZnO/Mg interface. (c) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

    DOI: 10.1002/pssa.200778850

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  • Electrical and optical properties of copper-based chalcogenide thin films deposited by pulsed laser deposition at room temperature: Toward p-channel thin film transistor fabricable at room temperature

    Hidenori Hiramatsu, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Noriaki Matsunami, Ken-ichi Shimizu, Hideo Hosono

    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE   205 ( 8 )   2007 - 2012   2008年8月

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    記述言語:英語   出版者・発行元:WILEY-V C H VERLAG GMBH  

    Copper-based chalcogenide thin films deposited at room temperature were examined for exploring an active layer material for a p-channel thin film transistor (TFT) fabricable at room temperature. The electrical conductivities of chalcopyrite and simple copper chalcogenide thin films were controlled by introducing hydrogen sulfide and oxygen gases, respectively, during the film deposition. However, no current modulation by gate bias was observed in fabricated TFTs. Optical absorption spectra showed intense subgap absorptions, and these subgap states are thought to pin the Fermi levels. Although these copper-based chalcogenides did not work as TFT channels, we found that simple copper chalcogenides deposited under a high vacuum showed p-type degenerate conduction with a high conductivity up to 7.3 x 10(3) S/cm and a reasonably large work function of similar to 4.7 eV. These properties are rather favorable for a hole injection layer of flexible electronic devices and suggest a promising application as an anode layer in organic light emitting devices. 0 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

    DOI: 10.1002/pssa.200778906

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  • Specific contact resistances between amorphous oxide semiconductor In-Ga-Zn-O and metallic electrodes

    Yasuhiro Shimura, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    THIN SOLID FILMS   516 ( 17 )   5899 - 5902   2008年7月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Specific contact resistances between an amorphous oxide semiconductor, In-Ga-Zn-O, and various metallic electrodes, Ag, Au, In, Pt, Ti, polycrystalline indium tin oxide (ITO) and amorphous indium zinc oxide (a-IZO), were examined. All the contacts except for An and Pt showed linear current-voltage characteristics, while Au and Pt did Schottky contacts. Low contact resistances &lt; 10(-4) Omega cm(2) were obtained for the Ag, In, Ti, ITO and a-IZO contacts, and there is a trend that the contact resistance decreases with decreasing the work function of the metallic electrode. The performances of thin film transistors using ITO and Ti for source and drain contacts were better than that using the Schottky Au contacts. It was also found that the Ti contacts have a large distribution in the contact resistance, suggesting that a higher reproducibility process should be employed when reactive metals are used for an electrical contact to an oxide semiconductor. (C) 2007 Published by Elsevier B.V.

    DOI: 10.1016/j.tsf.2007.10.051

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  • p-channel thin-film transistor using p-type oxide semiconductor, SnO

    Yoichi Ogo, Hidenori Hiramatsu, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    APPLIED PHYSICS LETTERS   93 ( 3 )   032113   2008年7月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    This paper reports that among known p-type oxide semiconductors, tin monoxide (SnO) has a high hole mobility and produces good p-type oxide thin-film transistors (TFTs). Device-quality SnO films were grown epitaxially on (001) yttria-stabilized zirconia substrates at 575 degrees C by pulsed laser deposition. These exhibited a Hall mobility of 2.4 cm(2) V(-1) s(-1) at room temperature. Top-gated TFTs, using epitaxial SnO channels, exhibited field-effect mobilities of 1.3 cm(2) V(-1) s(-1), on/off current ratios of similar to 10(2), and threshold voltages of 4.8 V.

    DOI: 10.1063/1.2964197

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  • Fabrication of ScAlMgO4 epitaxial thin films using ScGaO3(ZnO)(m) buffer layers and its application to lattice-matched buffer layer for ZnO epitaxial growth

    Takayoshi Katase, Kenji Noinura, Hirornichi Ohta, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    THIN SOLID FILMS   516 ( 17 )   5842 - 5846   2008年7月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Single-crystalline thin films of ScAlMgO4 (SCAM) were fabricated on YSZ (I 11) substrates by reactive solid-phase epitaxy (R-SPE) using ScGaO3(ZnO)(m) (SGZO) single-crystalline buffer layers, which suppress interface reactions between the SCAM layers and the YSZ substrates. First, post-annealing of the SCAM layers fabricated by the R-SPE process was examined. When annealing temperature was raised to &gt; 1200 degrees C, the formation of a spinel MgAl2O4 phase was observed. This is due probably to out-diffusion of Sc ions from the SCAM layers to the YSZ substrates. By introducing an SGZO buffer layer, a single-phase SCAM layer with a step-and-terrace surface was obtained by annealing at 1450 degrees C without the spinel formation. The SCAM layer was grown heteroepitaxially with an epitaxial relationship of (000 1)SCAM // (111)ysz and 010)(SCAM) // (110)ysz. Atomically flat surfaces were eventually formed by chemical-mechanical polishing. The SCAM layer was applied to a lattice-matched buffer layer for the growth of ZnO film, leading to marked lateral growth of ZnO domains. (C) 2007 Published by Elsevier B.V.

    DOI: 10.1016/j.tsf.2007.10.049

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  • Nickel-based phosphide superconductor with infinite-layer structure, BaNi2P2

    Takashi Mine, Hiroshi Yanagi, Toshio Kamiya, Yoichi Karnihara, Masahiro Hirano, Hideo Hosono

    SOLID STATE COMMUNICATIONS   147 ( 3-4 )   111 - 113   2008年7月

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    記述言語:英語   出版者・発行元:PERGAMON-ELSEVIER SCIENCE LTD  

    Analogous to cuprate high-T-c superconductors, a NiP-based compound system has several crystals in which the Ni-P layers have different stacking structures. Herein, the properties of BaNi2P2 are reported. BaNi2P2 has an infinite-layer structure, and shows a superconducting transition at similar to 3 K. Moreover, it exhibits metallic conduction and Pauli paramagnetism in the temperature range of 4-300 K. Below 3 K, the resistivity sharply drops to zero, and the magnetic susceptibility becomes negative, while the volume fraction of the superconducting phase estimated from the diamagnetic susceptibility reaches similar to 100 vol.% at 1.9 K. These observations substantiate that BaNi2P2 is a bulk superconductor. (C) 2008 Elsevier Ltd. All rights reserved.

    DOI: 10.1016/j.ssc.2008.05.010

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  • Specific contact resistances between amorphous oxide semiconductor In窶敵a窶纏n窶徹 and metallic electrodes

    Yasuhiro Shimura, Kenji Nomura, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Thin Solid Films   516 ( 17 )   5899 - 5902   2008年7月

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  • Control of carrier concentration and surface flattening of CuGaO2 epitaxial films for a p-channel transparent transistor

    Takashi Mine, Hiroshi Yanagi, Kenji Nomura, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    THIN SOLID FILMS   516 ( 17 )   5790 - 5794   2008年7月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    A p-type transparent oxide semiconductor, CuGaO2, was grown epitaxially on (111) single-crystalline yttria-stabilized zirconia (YSZ) substrates by pulsed laser deposition (PLD). Single-phase epitaxial films were obtained in narrow conditions: i.e. 725 &lt;= T-s &lt;= 780 degrees C at PO2 = 6 Pa, and 3 Pa &lt;= PO2 &lt;= 6 Pa at T-s =750 degrees C. The electrical conductivity of the as-deposited films was controlled from 3.3x 10(-5) S.cm(-1) to 1.7 x 10(-2) S center dot cm(-1) by increasing the oxygen partial pressure from 3 to 6.5 Pa. The hole concentration and Hall mobility of the most conductive film were 5x10(17) cm(-3) and 0.2 cm(2).V-1-s(-1), respectively. Estimated from the conductivity, the hole concentration was controlled from similar to 10(14) cm(-3) to similar to 10(17) cm(-3) by the oxygen partial pressure. Post-annealing at 1215 degrees C smoothed the films surface to 0.56 nm in the root-mean-squares roughness and increased the Hall mobility to 0.8 cm(2) V-1 center dot s(-1), which is the largest value among CuGaO2 films reported to date. (C) 2007 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2007.10.072

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  • Heteroepitaxial growth of layered semiconductors, LaZnOPn (Pn = P and As)

    Kentaro Kayanuma, Ryuto Kawamura, Hidenori Hiramatsu, Hiroshi Yanagi, Masahiro Hirano, Toshio Kamiya, Hideo Hosono

    THIN SOLID FILMS   516 ( 17 )   5800 - 5804   2008年7月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    LaZnOPn (Pn=P and As) thin films were successfully grown on MgO (001) substrates with an epitaxial relationship of (001) LaZnOPn 11 (001) MgO and [110] LaZnOPn 11 [110] MgO. The electrical conductivity of undoped LaZnOP epitaxial film was so low, 3.1 x 10(-6) S/cm at room temperature, that reliable Seebeck and Hall measurement results were not obtained. On the other hand, the electrical conductivities of the Cu-doped LaZnOP and undoped LaZnOAs epitaxial films were 2.7 x 10(-2) and 2.0 x 10(-1) S/cm at room temperature, respectively. The Seebeck coefficients of both the epitaxial films were positive, indicating p-type semiconductors. The optical bandgaps of LaZnOP and LaZnOAs were estimated to be similar to 1.7 eV and similar to 1.5 eV, respectively. (C) 2007 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2007.10.035

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  • Electromagnetic properties and electronic structure of the iron-based layered superconductor LaFePO

    Yoichi Kamihara, Masahiro Hirano, Hiroshi Yanagi, Toshio Kamiya, Yuji Saitoh, Eiji Ikenaga, Keisuke Kobayashi, Hideo Hosono

    PHYSICAL REVIEW B   77 ( 21 )   214515   2008年6月

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    記述言語:英語   出版者・発行元:AMER PHYSICAL SOC  

    Structural, electronic, and magnetic properties of undoped and aliovalent-ion (Ca, F)-doped LaFePO, which undergo superconducting transitions at transition temperatures (T-c) 4-7 K [Y. Kamihara , J. Am. Chem. Soc. 128, 10012 (2006)], were investigated. T-c of the samples varied from 2.4 to 5.5 K in the undoped samples and was increased up to similar to 7 K by Ca and F doping. The T-c increases are correlated with a decrease in the lattice volume. LaFePO exhibits paramagnetism in the normal conducting state. Photoemission spectroscopy combined with first-principle band calculations clarified that Fe Fe 3d (d(z2)+(d(xz),d(yz))) orbitals hybridized with P 3p to form a Fermi surface. The band calculations also suggest that the 3d electron of the Fe in LaFePO is basically in the low-spin configuration, and that the spin moment of LaFePO is almost quenched, leading to the paramagnetism of the itinerant electrons.

    DOI: 10.1103/PhysRevB.77.214515

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  • Itinerant ferromagnetism in the layered crystals LaCoOX (X=P,As)

    Hiroshi Yanagi, Ryuto Kawamura, Toshio Kamiya, Yoichi Kamihara, Masahiro Hirano, Tetsuya Nakamura, Hitoshi Osawa, Hideo Hosono

    PHYSICAL REVIEW B   77 ( 22 )   224431   2008年6月

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    記述言語:英語   出版者・発行元:AMER PHYSICAL SOC  

    The electronic and magnetic properties of cobalt-based layered oxypnictides, LaCoOX(X=P,As), are investigated. LaCoOP and LaCoOAs show metallic type conduction with room-temperature resistivities of similar to 2x10(-4) Omega cm, and the Fermi edge is observed by hard x-ray photoelectron spectroscopy. Ferromagnetic transitions occur at 43 K for LaCoOP and 66 K for LaCoOAs with spontaneous magnetic moments of 0.33 mu(B) and 0.39 mu(B) extrapolated to 0 K, respectively. Above the transition temperatures, the magnetic susceptibility exhibits a large temperature dependence. Provided that this temperature dependence follows the Curie-Weiss law, enhanced magnetic-moment values of similar to 2.9 mu(B) for LaCoOP and similar to 1.3 mu(B) for LaCoOAs are obtained. X-ray magnetic circular dichroism (XMCD) is observed at the Co L(2,3) edge, but not at the other edges. The calculated electronic structure shows a spin-polarized ground state with a magnetic moment of 0.52 mu(B), similar to 95% of which is localized on the Co ions. These results indicate that LaCoOX are itinerant ferromagnets and suggest that their magnetic properties are governed by spin fluctuation.

    DOI: 10.1103/PhysRevB.77.224431

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  • Subgap states in transparent amorphous oxide semiconductor, In-Ga-Zn-O, observed by bulk sensitive x-ray photoelectron spectroscopy

    Kenji Nomura, Toshio Kamiya, Hiroshi Yanagi, Eiji Ikenaga, Ke Yang, Keisuke Kobayashi, Masahiro Hirano, Hideo Hosono

    APPLIED PHYSICS LETTERS   92 ( 20 )   202117   2008年5月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    We investigated the electronic states in amorphous In-Ga-Zn-O films with high carrier concentrations by optical absorption and hard x-ray photoelectron spectroscopy (HX-PES). Films having different Hall mobilities were prepared and their annealing effects were examined. All HX-PES spectra showed Fermi edge structures and extra subgap densities of states (DOSs). Tail-like structures observed in the optical spectra originate from subgap DOSs (&gt;&gt; 10(20) cm(-3)) near valence band maximas (VBMs). Subgap DOSs near VBMs provide a reason why In-Ga-Zn-O thin film transistors show hard saturation in off states and are difficult to operate in an inversion p-channel mode. (C) 2008 American Institute of Physics.

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  • Subgap states in transparent amorphous oxide semiconductor, In窶敵a窶纏n窶徹, observed by bulk sensitive x-ray photoelectron spectroscopy

    Kenji Nomura, Toshio Kamiya, Hiroshi Yanagi, Eiji Ikenaga, Ke Yang, Keisuke Kobayashi, Masahiro Hirano, Hideo Hosono

    Appl. Phys. Lett.   92 ( 20 )   202117   2008年5月

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  • Trap densities in amorphous-InGaZnO(4) thin-film transistors

    Mutsumi Kimura, Takashi Nakanishi, Kenji Nomura, Toshio Kamiya, Hideo Hosono

    APPLIED PHYSICS LETTERS   92 ( 13 )   133512   2008年3月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Trap densities in amorphous-InGaZnO(4) (alpha-IGZO) are extracted directly from the capacitance-voltage characteristics of thin-film transistors at low frequencies. It is found that the trap densities are flat in the energy gap, and are 1.7x10(16) cm(-3) eV(-1) in the deep energy far from the conduction band edge (E(c)), but become larger near E(c). Moreover, postannealing reduces the trap density near E(c), which is associated with the reduction of the hysteresis in the current-voltage characteristics. The annealed alpha-IGZO does not have a Gaussian-type state and has fewer tail states than amorphous Si. (C) 2008 American Institute of Physics.

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  • Localized and delocalized electrons in room-temperature stable electride [Ca24Al28O64](4+)(O2-)(2-x)(e(-))(2x): Analysis of optical reflectance spectra

    Satoru Matsuishi, Sung Wng Kim, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    JOURNAL OF PHYSICAL CHEMISTRY C   112 ( 12 )   4753 - 4760   2008年3月

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    記述言語:英語   出版者・発行元:AMER CHEMICAL SOC  

    [Ca24Al28O64](4+)(O2-)(2-x)(e(-))(2x) (O &lt;= x &lt;= 2, C12A7:e(-)) crystal shows a metal-insulator transition at x similar to 1. Varied concentrations of electrons (N-e) are introduced in the subnanometer- sized crystallographic cages of [Ca24Al28O64](4+)(O2-)(2) (12CaO center dot 7Al(2)O(3), C12A7) in place of the O2- ions accommodated in the cages. The optical reflectance spectra of C12A7:e(-) crystals were analyzed using the Drude-Lorentz model to examine the electronic states and carrier transport mechanisms experimentally. The concentrations of localized electrons trapped in the cages were estimated from Lorentz-type optical responses around 0.4 and 2.8 eV, and those of delocalized electrons from a Drude-type response. C12A7:e(-) with N-e lower than 5 x 10(20) cm(-3) (x similar to 0.5) shows polaronic hopping conduction and its reflectance spectrum shows only the Lorentz-type responses. The Drude-type response starts to appear when N-e exceeds 5 x 10(20), and coexists with the Lorentz-type responses at Ne between 5 x 10(20) and 2 x 10(21) cm(-3) (x similar to 2), which indicates that the localized electrons coexist with the delocalized electrons even in the metallic samples. These results support previous theoretical studies proposing that a strong electron -l attice interaction deforms the soft cage structure of C12A7, and forming an insulating state at the low N-e limit, while the cage deformation is reduced at the high N-e limit, leading to the insulator-metal transition.

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  • Optical and electrical properties of amorphous zinc tin oxide thin films examined for thin film transistor application

    Madambi K. Jayaraj, Kachirayil J. Saji, Kenji Nomura, Toshio Kamiya, Hideo Hosono

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   26 ( 2 )   495 - 501   2008年3月

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    記述言語:英語   出版者・発行元:A V S AMER INST PHYSICS  

    Structural, electronic, and optical properties of amorphous and transparent zinc tin oxide films deposited on glass substrates by pulsed laser deposition (PLD) were examined for two chemical compositions of Zn: Sn= 1: 1 and 2: 1 as a function of oxygen partial pressure (Po-2) used for the film deposition and annealing temperature. Different from a previous report on sputter-deposited films [Chiang et al., Appl. Phys. Lett. 86, 013503 (2005)], the PLD-deposited films crystallized at a lower temperature &lt; 450 degrees C to give crystalline ZnO and SnO2 phases. The optical band gaps (Tauc gaps) were 2.80-2.85 eV and almost independent of oxygen PO2, which are smaller than those of the corresponding crystals (3.35-3.89 eV). Films deposited at low PO2 showed significant subgap absorptions, which were reduced by postthermal annealing. Hall mobility showed steep increases when carrier concentration exceeded threshold values and the threshold value depended on the film chemical composition. The films deposited at low Po-2 &lt; 2 Pa had low carrier concentrations. It is thought that the low Po-2 produced high-density oxygen deficiencies and generated electrons, but these electrons were trapped in localized states, which would be observed as the subgap absorptions. Similar effects were observed for 600 degrees C crystallized films and their resistivities were increased by formation of subgap states due to the reducing high-temperature condition. High carrier concentrations and large mobilities were obtained in an intermediate Po-2 region for the as-deposited films. (C) 2008 American Vacuum Society.

    DOI: 10.1116/1.2839860

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  • Modeling of amorphous InGaZnO(4) thin film transistors and their subgap density of states

    Hsing-Hung Hsieh, Toshio Kamiya, Kenji Nomura, Hideo Hosono, Chung-Chih Wu

    APPLIED PHYSICS LETTERS   92 ( 13 )   133503   2008年3月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    We report a model of the carrier transport and the subgap density of states in amorphous InGaZnO(4) (a-IGZO) for device simulation of a-IGZO thin-film transistors (TFTs) operated in both the depletion mode and the enhancement mode. A simple model using a constant mobility and two-step subgap density of states reproduced well the characteristics of the a-IGZO TFTs. a-IGZO exhibits low densities of tail states and deep gap states, leading to small subthreshold swings and high mobilities. (C) 2008 American Institute of Physics.

    DOI: 10.1063/1.2857463

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  • Amorphous oxide channel TFTs

    Hideya Kumomi, Kenji Nomura, Toshio Kamiya, Hideo Hosono

    THIN SOLID FILMS   516 ( 7 )   1516 - 1522   2008年2月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Thin film transistors (TFTs) using amorphous oxides of post-transition metals: indium, gallium, and zinc for the channel materials are fabricated with radio-frequency magnetron sputtering methods for the deposition of the channel and the gate insulator layers, at room temperature with no high-temperature post-deposition annealing process. The TFTs operate as n-channel field-effect transistors with various structures of top/ bottom gate and top/bottom source-and-drain contact including the inverse-stagger types, and with various materials for the gate insulators, the electrodes, and the substrates. The TFTs having smoother channel interfaces show the better performance at the saturation mobility beyond 10 cm(2) V-1 s(-1) and the on-to-off current ratio over 10(8) than the rough channel interfaces. The ring oscillator circuits operate with five-stage inverters of the top-gate TFTs or the inverse-stagger TFTs. Organic light-emission diode cells are driven by a simple circuit of the TFTs. It is also found by a combinatorial approach to the material exploration that the TFT characteristics can be controlled by the composition ratio of the metals in the channel layers. The amorphous oxide channel TFTs fabricated with sputtering deposition at low temperature could be a candidate for key devices of large-area flexible electronics. (C) 2007 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2007.03.161

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  • Crystal structures, optoelectronic properties, and electronic structures of layered oxychalcogenides MCuOCh (M = Bi, La; Ch = S, Se, Te): Effects of electronic configurations of M3+ ions

    Hidenori Hiramatsu, Hiroshi Yanagi, Toshio Kamiya, Kazushige Ueda, Masahiro Hirano, Hideo Hosono

    CHEMISTRY OF MATERIALS   20 ( 1 )   326 - 334   2008年1月

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    記述言語:英語   出版者・発行元:AMER CHEMICAL SOC  

    Crystal structures, optoelectronic properties, and electronic structures of layered oxychalcogenides BiCuOCh (Ch = S, Se, Te) have been compared to those of LaCuOCh, with an emphasis on the electronic configurations of Bi3+ (5d(10)6S(2)) and La3+ (5d(0)6s(0)). The BiCuOCh series were expected to exhibit better hole-transport properties than the LaCuOCh series because the pseudo-closed-shell 6S(2) electronic configuration of the Bi3+ cation was expected to form valence band maxima (VBM) by admixing with the p orbitals of the Ch anions. However, the two series of compounds exhibited similar electrical properties, suggesting that the contribution of the Bi 6s orbitals to the VBM is small in BiCuOCh. The crystal structures and optical properties showed distinct differences; for example, the band gaps of BiCuOCh were smaller than those of LaCuOCh. These findings can be understood on the basis of the electronic structures obtained by photoelectron spectroscopy and density functional theory calculations. The Bi 6s orbitals form stronger and deeper chemical bonds with the O 2p orbitals than with Ch p orbitals and are located similar to 2 eV below the VBM, which is mainly formed from the Cu 3d and Ch p orbitals. Thus, the Bi 6s(2) configuration contributes little to the VBM, and BiCuOCh and LaCuOCh have similar hole-transport properties. Also, the smaller band gaps of BiCuOCh result from the deepening of the conduction-band-minima levels, which are composed of unoccupied Bi 6p orbitals.

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  • Interface electronic structures of zin oxide and metals: First-principle study

    T. Kamiya, K. Tajima, K. Nomura, Hiroshi Yanagi, H. Hosono

    phys. stat. solidi (a)   205   1929   2008年

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  • 酸化物が電気を流す!

    神谷利夫

    化学と教育   56 ( 12 )   598 - 601   2008年

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    記述言語:日本語   出版者・発行元:公益社団法人 日本化学会  

    私たちの周りには,窓ガラス,コンクリート,茶碗など,酸化物があふれている。多くの人がこれらから受ける酸化物の印象は,「透明(白い)」「硬い」「電気を流さない」ではないだろうか。酸化物はコンピュータなどの電子機器にも使われているが,特に最後の「電気的に面白い特性をもたない」という性質のため,機器の構造を支えたり電気的な絶縁をしたりするための脇役でしかなかった。酸化物に電気を流せないのは,それらがイオン性物質であるからでも透明であるからでもなく,電子を余計に加えたり,抜いたりすることがうまくいかなかったからなのである。材料の構成元素をうまく選び,作り方や微量不純物の加え方を工夫することで,酸化物でも高い電気伝導性を得ることができる。このような材料は「透明導電性酸化物」と呼ばれ,平面テレビや太陽電池に不可欠な材料であるだけでなく,次世代有機ELテレビの電子素子としても開発が進められている。

    DOI: 10.20665/kakyoshi.56.12_598

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  • バンド構造を用いた材料開発(実践編)

    神谷利夫

    第14回結晶工学スクールテキスト   2008年

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  • Factors controlling electron transport properties in transparent amorphous oxide semiconductors

    Hosono, Hideo, Nomura, Kenji, Ogo, Youichi, Uruga, Tomoya, Kamiya, Toshio

    Journal of Non-Crystalline Solids   354 ( 19-25 )   2796 - 2800   2008年

  • Electronic structure of oxygen deficient amorphous oxide semiconductor a-InGaZnO4-x: Optical analyses and first-principle calculations

    Toshio Kamiya, Kenji Nomura, Masahiro Hirano, Hideo Hosono

    PHYSICA STATUS SOLIDI C - CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 5, NO 9   5 ( 9 )   3098 - +   2008年

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    記述言語:英語   出版者・発行元:WILEY-V C H VERLAG GMBH  

    Defect states in a representative amorphous oxide semiconductor, a-InGaZnO4, were studied by optical analyses and first-principle calculations. The optical analyses suggested that the as-deposited a-IGZO film have weak subgap absorptions around 0.6 and 2 eV. Local density approximation calculations showed that an oxygen defect works as an electron trap as well as a shallow donor depending on its local structure. It suggests that a large vacancy space remained in an oxygen deficient structure forms a deep levels in the band gap and traps electrons, while if such a large space is annihilated e.g. by a film growth process and post thermal annealing, oxygen deficiency may form a shallow donor level. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

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  • Thin film and bulk fabrication of room-tenperature-stable electride C12A7:e- utilizing reduced amorphous 12CaO・7Al2O3(C12A7)

    Hideo Hosono, SungWng Kim, Masashi Miyakawa, Satoru Matsuishi, Toshio Kamiya

    J. Non-Cryst. Sol.   354 ( 19-25 )   2772 - 2776   2008年

  • Pressure effects on superconducting and structural properties for nickel-based superconductors LaNiXO (X = P and As)

    Hironari OKADA, Yuki TAKAHASHI, Kazumi IGAWA, Kazunobu ARII, Hiroki TAKAHASHI, Takumi WATANABE, Hiroshi YANAGI, Yoichi KAMIHARA, Toshio KAMIYA, Masahiro HIRANO, Hideo HOSONO, Satoshi NAKANO, Takumi KIKEGAWA

    J. Phys. Soc. Jpn. Suppl. C   77   119 - 120   2008年

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  • 酸化物半導体の薄膜トランジスタへの応用

    野村研二, 神谷利夫, 太田裕道, 平野正浩, 細野秀雄

    機能材料   28 ( 3月号 )   42 - 53   2008年

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  • ワイドギャップp型半導体LaCuOSeの高濃度正孔ドーピングと発光デバイス応用

    平松秀典, 神谷利夫, 平野正浩, 細野秀雄

    機能材料   28 ( 3月号 )   34 - 41   2008年

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    記述言語:日本語   出版者・発行元:シーエムシー出版  

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  • ナノ構造を利用したセメント鉱物C12A7の金属化: 高透光性導電体薄膜の作製と停止後と関数を利用した電子注入電極への応用

    宮川仁, 金起範, 神谷利夫, 平野正浩, 細野秀雄

    表面科学   29 ( 1 )   2 - 9   2008年

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    記述言語:日本語   出版者・発行元:日本表面科学会  

    DOI: 10.1380/jsssj.29.2

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  • Electronic structure of oxygen deficient amorphous oxide semiconductor a-InGaZnO4-x: Optical analyses and first-principle calculations

    Toshio Kamiya, Kenji Nomura, Masahiro Hirano, Hideo Hosono

    Physica Status Solidi (C) Current Topics in Solid State Physics   5 ( 9 )   3098 - 3100   2008年

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    記述言語:英語  

    Defect states in a representative amorphous oxide semiconductor, a-InGaZnO4, were studied by optical analyses and first-principle calculations. The optical analyses suggested that the as-deposited a-IGZO film have weak subgap absorptions around 0.6 and 2 eV. Local density approximation calculations showed that an oxygen defect works as an electron trap as well as a shallow donor depending on its local structure. It suggests that a large vacancy space remained in an oxygen deficient structure forms a deep levels in the band gap and traps electrons, while if such a large space is annihilated e.g. by a film growth process and post thermal annealing, oxygen deficiency may form a shallow donor level. © 2008 Wiley-VCH Verlag GmbH &amp
    Co. KGaA.

    DOI: 10.1002/pssc.200779300

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  • ZnO-Based Semiconductors as Building Blocks for Active Devices

    Kamiya, Toshio, Kawasaki, Masashi

    Mrs Bulletin   33 ( 11 )   1061 - 1066   2008年

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  • Thin film and bulk fabrication of room-temperature-stable electride C12A7 : e(-) utilizing reduced amorphous 12CaO center dot 7Al(2)O(3)(C12A7)

    Hosono, Hideo, Kim, Sung Wang, Miyakawa, Masashi, Matsuishi, Satoru, Kamiya, Toshio

    Journal of Non-Crystalline Solids   354 ( 19-25 )   2772 - 2776   2008年

  • Localized and Delocalized Electrons in Room-Temperature Stable Electride [Ca24Al28O64]4+(O2-)2-x(e-)2x: Analysis of Optical Reflectance Spectra

    Satoru Matsuishi, Sung Wng Kim, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Journal of Physical Chemistry C   112 ( 12 )   4753 - 4760   2008年

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  • Pressure effects on superconducting and structural properties for nickel-based superconductors LaNiXO (X = P and As)

    Hironari OKADA, Yuki TAKAHASHI, Kazumi IGAWA, Kazunobu ARII, Hiroki TAKAHASHI, Takumi WATANABE, Hiroshi YANAGI, Yoichi KAMIHARA, Toshio KAMIYA, Masahiro HIRANO, Hideo HOSONO, Satoshi NAKANO, Takumi KIKEGAWA

    J. Phys. Soc. Jpn. Suppl. C   77   119 - 120   2008年

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  • Defect passivation and homogenization of amorphous oxide thin-film transistor by wet O2 annealing

    Kenji Nomura, Toshio Kamiya, Hiromichi Ohta, Masahiro Hirano, Hideo Hosono

    Appl. Phys. Lett.   93 ( 19 )   192107   2008年

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  • Itinerant ferromagnetism in the layered crystals LaCoOX (X = P,As)

    Hiroshi Yanagi, Ryuto Kawamura, Toshio Kamiya, Yoichi Kamihara, Masahiro Hirano, Tetsuya Nakamura, Hitoshi Osawa, Hideo Hosono

    Physical Review B   77 ( 22 )   224431   2008年

  • Electromagnetic properties and electronic structure of the iron-based layered superconductor LaFePO

    Yoichi Kamihara, Masahiro Hirano, Hiroshi Yanagi, Toshio Kamiya, Yuji Saitoh, Eiji Ikenaga, Keisuke Kobayashi, Hideo Hosono

    Phys. Rev. B   77 ( 21 )   214515   2008年

  • Optical and Carrier Transport Properties of Cosputtered Zn窶的n窶鉄n窶徹 Films and Their Applications to TFTs

    Kachirayil J. Saji, Madambi K. Jayaraj, Kenji Nomura, Toshio Kamiya, Hideo Hosono

    J. Electrochem. Soc.   155 ( 6 )   H390 - H395   2008年

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  • Nickel-based oxyphosphide superconductor with a layered crystal structure, LaNiOP

    Takumi Watanabe, Hiroshi Yanagi, Toshio Kamiya, Yoichi Kamihara, Hidenori Hiramatsu, Masahiro Hirano, Hideo Hosono

    INORGANIC CHEMISTRY   46 ( 19 )   7719 - 7721   2007年9月

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    記述言語:英語   出版者・発行元:AMER CHEMICAL SOC  

    A layered oxyphosphide, LaNiOP, was synthesized by solid-state reactions. This crystal was confirmed to have a layered structure composed of an alternating stack of (La3+O2-)(+) and (Ni2+P3-)(-). We found that the resulting LaNiOP shows a superconducting transition at similar to 3 K. This material exhibited metallic conduction and Pauli paramagnetism in the temperature range of 4-300 K. The resistivity sharply dropped to Zero, and the magnetic susceptibility became negative at &lt;4 K, indicating that a superconducting transition occurs. The volume fraction of the superconducting phase estimated from the diamagnetic susceptibility reached similar to 40 vol % at 1.8 K, substantiating that LaNiOP is a bulk superconductor.

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  • Heavy hole doping of epitaxial thin films of a wide gap p-type semiconductor, LaCuOSe, and analysis of the effective mass

    Hidenori Hiramatsu, Kazushige Ueda, Hiromichi Ohta, Masahiro Hirano, Maiko Kikuchi, Hiroshi Yanagi, Toshio Kamiya, Hideo Hosono

    APPLIED PHYSICS LETTERS   91 ( 1 )   012104   2007年7月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    The high density hole doping (1.7x10(21) cm(-3)) for a wide gap (E-g=similar to 2.8 eV) p-type semiconductor was achieved on 40 nm thick Mg-doped LaCuOSe epitaxial films. These films exhibited distinct free carrier absorption, and the effective mass and momentum relaxation time were analyzed. Its small hole mobility [similar to 3.5 cm(2)/(V s)] compared to the electron mobilities of wide gap n-type semiconductors is attributed to a heavy effective mass of 1.6 +/- 0.2m(e). Regardless of the heavy hole doping, a band filling effect was not observed. These results are discussed with a rigid band model and an acceptor band model. (c) 2007 American Institute of Physics.

    DOI: 10.1063/1.2753546

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  • Photoelectron spectroscopic study of C12A7 : e(-) and Alq(3) interface: The formation of a low electron-injection barrier

    Ki-Beom Kim, Maiko Kikuchi, Masashi Miyakawa, Hiroshi Yanagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    JOURNAL OF PHYSICAL CHEMISTRY C   111 ( 24 )   8403 - 8406   2007年6月

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    記述言語:英語   出版者・発行元:AMER CHEMICAL SOC  

    12CaO center dot 7Al(2)O(3) electride (C12A7:e(-)) is a promising material for the cathode of organic light-emitting diodes (OLEDs), because it has a low work function (phi(WF) = 2.4 eV), comparable to metal potassium, and good chemical/thermal stability in an ambient atmosphere. This study examines interfacial electronic structures between C12A7:e(-) and tris-8-hydroxyquinoline aluminum (Alq(3)) by ultraviolet photoelectron spectroscopy, finding that a low electron-injection barrier of 0.6 eV, which is approximately half of the value for the Al/LiF/Alq(3) interface with the lowest injection barrier, is achieved when the interface is formed on the C12A7:e(-) film surface obtained by using vacuum annealing and subsequent He plasma treatment. This treatment yields little change in the surface chemical composition and retains a low phi(WF) value (3.1 eV) of C12A7:e(-). These results suggest that C12A7:e(-) has high potential as an efficient electron-injection electrode for OLEDs.

    DOI: 10.1021/jp072635r

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  • Metallic state in a lime-alumina compound with nanoporous structure

    Sung Wng Kim, Satoru Matsuishi, Takatoshi Nomura, Yoshiki Kubota, Masaki Takata, Katsuro Hayashi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Nano Letters   7 ( 5 )   1138 - 1143   2007年5月

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    記述言語:英語  

    We report a metallic state in a nanostructured porous crystal 12CaO-7Al2O3 by incorporating electrons in the inherent subnanometer-sized cages, in which a three-dimensionally closely packed cage structure acts as an electronic conduction path. High-density electron doping (∼2 x 1021 cm-3), which was achieved by a thermal treatment in Ti metal vapor at ∼1100 °C, induces homogenization of the cage geometry to a symmetric state, resulting in an insulator-metal transition with a sharp enhancement of the electron drift mobility from ∼0.1 to 4 cm2 V-1 s-1. The results provide an approach for the realization of electroactive functions in materials composed only of environmentally benign elements by utilizing the appropriate nanostructures. © 2007 American Chemical Society.

    DOI: 10.1021/nl062717b

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  • Metallic state in a lime-alumina compound with nanoporous structure

    Sung Wng Kim, Satoru Matsuishi, Takatoshi Nomura, Yoshiki Kubota, Masaki Takata, Katsuro Hayashi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    NANO LETTERS   7 ( 5 )   1138 - 1143   2007年5月

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    記述言語:英語   出版者・発行元:AMER CHEMICAL SOC  

    We report a metallic state in a nanostructured porous crystal 12CaO center dot 7Al(2)O(3) by incorporating electrons in the inherent subnanometer-sized cages, in which a three-dimensionally closely packed cage structure acts as an electronic conduction path. High-density electron doping (similar to 2 x 10(21) cm(-3)), which was achieved by a thermal treatment in Ti metal vapor at similar to 1100 degrees C, induces homogenization of the cage geometry to a symmetric state, resulting in an insulator-metal transition with a sharp enhancement of the electron drift mobility from similar to 0.1 to 4 cm(2) V(-1) s(-1). The results provide an approach for the realization of electroactive functions in materials composed only of environmentally benign elements by utilizing the appropriate nanostructures.

    DOI: 10.1021/nl062717b

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  • Epitaxial film growth, optical, electrical, and magnetic properties of layered oxide In3FeTi2O10

    Youichi Ogo, Hiroshi Yanagi, Toshio Kamiya, Kenji Nomura, Masahiro Hirano, Hideo Hosono

    JOURNAL OF APPLIED PHYSICS   101 ( 10 )   103714   2007年5月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    InFe1-xTixO3+x/2 (0.5 &lt;= x &lt;= 0.75) has an interesting crystal structure for a magnetic semiconductor because it is composed of In-O layers and (Fe,Ti)-O layers in which the former may work as the electron transport layers, while the latter may work as the magnetic layers. Herein we report epitaxial film growth of InFe0.33Ti0.67O3.33 (IFTO) using pulsed laser deposition and post-annealing. High-quality epitaxial IFTO films with an atomically flat terrace-and-step structure are fabricated on (0001) sapphire substrates. IFTO is an indirect transition-type semiconductor with an optical band gap of similar to 2.9 eV. The room-temperature electrical conductivity is less than 10(-8) S cm(-1). Carrier doping by aliovalent ion addition, hydrogen reduction, and so on did not generate more free carriers, which may be due to the localized nature of the unoccupied states in IFTO. The Fe ions have the high-spin configuration of Fe3+ and an antiferromagnetic interaction is observed between the Fe3+ ions. A spin-glass state is observed at &lt;= 5 K. (c) 2007 American Institute of Physics.

    DOI: 10.1063/1.2734953

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  • Development of latent images due to transient free carrier electrons by femtosecond laser pulses and its application to grating shape trimming

    Ken-ichi Kawamura, Takukazu Otsuka, Masahiro Hirano, Toshio Kamiya, Hideo Hosono

    APPLIED PHYSICS LETTERS   90 ( 1 )   011107   2007年1月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    The effects of prepulse exposure on the threshold energy to encode a micrograting structure on a SiO2 glass surface by a prepulse-postpulse exposure technique using femtosecond (similar to 150 fs pulse duration) laser pulse irradiation were examined by measuring the laser intensity diffracted by the microgratings. It was revealed that prepulse exposure reduces the threshold energy of the postpulse from similar to 0.4 to similar to 0.2 J cm(-2), which enables to develop a latent image of the free carriers generated by the prepulse with the postpulse. This technique was applied to trim the shape of the micrograting pattern with the prepulse pattern. The role of the prepulse was investigated by comparing the dynamics of the photoexcited carriers in two dielectrics (SiO2 glass and MgO single crystal) that have largely different lifetimes of photoexcited carriers. It was determined that the ultrashort relaxation time of the photoexcited carriers in SiO2 glass limits the time delay of the postpulse to develop a latent image.

    DOI: 10.1063/1.2426963

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  • Local coordination structure and electronic structure of the large electron mobility amorphous oxide semiconductor In-Ga-Zn-O: Experiment and ab initio calculations

    Nomura, Kenji, Kamiya, Toshio, Ohta, Hiromichi, Uruga, Tomoya, Hirano, Masahiro, Hosono, Hideo

    Physical Review B   75 ( 3 )   035212   2007年

  • Structural and photo-induced properties of Eu2+-doped Ca2ZnSi2O7: A red phosphor for white light generation by blue ray excitation

    Hayato Kamioka, Takashi Yamaguchi Masahiro Hirano, Toshio Kamiya, Hideo Hosono

    J. Luminescence   122-123   355   2007年

  • Optoelectronic properties and electronic structure of YCuOSe

    Ueda, Kazushige, Takafuji, Kouhei, Yanagi, Hiroshi, Kamiya, Toshio, Hosono, Hideo, Hiramatsu, Hidenori, Hirano, Masahiro, Hamada, Noriaki

    Journal of Applied Physics   102 ( 11 )   113714   2007年

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  • Novel room temperature stable electride 12SrO center dot 7Al(2)O(3) thin films: Fabrication, optical and electron transport properties

    Miyakawa, Masashi, Ueda, Naoto, Kamiya, Toshio, Hirano, Masahiro, Hosono, Hideo

    Journal of the Ceramic Society of Japan   115 ( 1345 )   567 - 570   2007年

  • Combinatorial approach to thin-film transistors using multicomponent semiconductor channels: An application to amorphous oxide semiconductors in In-Ga-Zn-O system

    Iwasaki, Tatsuya, Itagaki, Naho, Den, Tohru, Kumomi, Hideya, Nomura, Kenji, Kamiya, Toshio, Hosono, Hideo

    Applied Physics Letters   90 ( 24 )   242114   2007年

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  • High electron doping to a wide band gap semiconductor 12CaO center dot 7Al(2)O(3) thin film

    Miyakawa, Masashi, Hirano, Masahiro, Kamiya, Toshio, Hosono, Hideo

    Applied Physics Letters   90 ( 18 )   182105   2007年

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  • Fast thin-film transistor circuits based on amorphous oxide semiconductor

    Ofuji, Masato, Abe, Katsumi, Shimizu, Hisae, Kaji, Nobuyuki, Hayashi, Ryo, Sano, Masafumi, Kumomi, Hideya, Nomura, Kenji, Kamiya, Toshio, Hosono, Hideo

    Ieee Electron Device Letters   28 ( 4 )   273 - 275   2007年

  • Work function of a room- temperature stable electride [Ca24Al28O64]4+(e-)4: a low intrinsic value (2.4 eV) and bias-induced negative work function

    Yoshitake Toda, Hiroshi Yanagi, Eiji Ikenaga, Jung Jin Kim, Masaaki Kobata, Sigenori Ueda, Toshio Kamiya, Masahiro Hirano, Keisuke Kobayashi, Hideo Hosono

    Adv. Mater.   19 ( 21 )   3564 - 3569   2007年

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  • Work function of a room- temperature stable electride [Ca24Al28O64]4+(e-)4: a low intrinsic value (2.4 eV) and bias-induced negative work function

    Yoshitake Toda, Hiroshi Yanagi, Eiji Ikenaga, Jung Jin Kim, Masaaki Kobata, Sigenori Ueda, Toshio Kamiya, Masahiro Hirano, Keisuke Kobayashi, Hideo Hosono

    Adv. Mater.   19 ( 21 )   3564 - 3569   2007年

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  • Structural and photo-induced properties of Eu2+-doped Ca2ZnSi2O7: A red phosphor for white light generation by blue ray excitation

    Hayato Kamioka, Takashi Yamaguchi Masahiro Hirano, Toshio Kamiya, Hideo Hosono

    J. Luminescence   122-123   355   2007年

  • n型透明導電性酸化物の特徴と進展

    柳博 神谷利夫

    セラミックス   42   37   2007年

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  • Self-adjusted, three-dimensional lattice-matched buffer layer for growing ZnO epitaxial film: Homologous series layered oxide, InGaO3(ZnO)(5)

    Toshio Kamiya, Yujiro Takeda, Kenji Nomura, Hiromichi Ohta, Hiroshi Yanagi, Masahiro Hirano, Hideo Hosono

    CRYSTAL GROWTH & DESIGN   6 ( 11 )   2451 - 2456   2006年11月

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    記述言語:英語   出版者・発行元:AMER CHEMICAL SOC  

    Effects of a lattice-matched buffer layer on growth, structure, and transport properties of ZnO thin films were examined using a homologous series layered compound, InGaO3(ZnO)(5) (IGZO5). High-quality single-crystalline IGZO5 layers were fabricated on yttria-stabilized zirconia (YSZ) (111) substrates by reactive solid-phase epitaxy. ZnO layers deposited on the IGZO5 buffer layers showed smooth and uniform surface morphologies compared to those deposited on YSZ (111) without the IGZO5 buffer layer. Then postgrowth annealing was examined to convert the ZnO surface to an atomically flat surface. When the IGZO5 buffer layer was used, the annealing temperature was reduced from 1000 to 700 degrees C, which was attributable to the smooth surface morphology and good lattice matching of the buffer layer. The annealed films exhibited rather large Hall mobilities 73-82 cm(2) (Vs)(-1), which are larger than those reported for epitaxial ZnO films fabricated at similar temperatures with similar thicknesses. Cross-sectional high-resolution transmission electron microscopy revealed that the step height of the IGZO5 buffer layer is automatically adjusted to the c-axis period of the ZnO crystal lattice. The present findings demonstrate the IGZO5 layer works as a three-dimensional lattice-matching substrate for ZnO.

    DOI: 10.1021/cg050478k

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  • Photoluminescence of Au- formed in 12CaO center dot 7Al(2)O(3) single crystal by Au+-implantation

    A. Miyakawa, H. Kamioka, A. Hirano, T. Kamiya, H. Hosono

    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   250   368 - 371   2006年9月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Au+ ion implantation with fluences from 1 x 10(14) to 3 x 10(16) cm(-2) into 12CaO (.) 7Al(2)O(3) (Cl2A7) single crystals was carried out at a sample temperature of 600 degrees C. The implanted sample with the fluence of 1 x 10(15) cm(-2) exhibited photoluminescence (PL) bands peaking at similar to 3.1 and similar to 2.3 eV at &lt;= 150 K when excited by He-Cd laser (325 nm). This was the first observation of PL from C12A7. These two PL bands are possibly due to intra-ionic transitions of an Au- ion having the electronic configuration of 6s(2), judged from their similarities to those reported on Au- ions in alkali halides. However, when the concentration of the implanted An ions exceeded the theoretical maximum value of anions encaged in C12A7 (similar to 2.3 x 10(21) cm(-3)), surface plasmon absorption appeared in the optical absorption spectrum, suggesting Au colloids were formed at such high fluences. These observations indicate that negative gold ions are formed in the cages of C12A7 by the Au+ implantation if an appropriate fluence is chosen. (c) 2006 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.nimb.2006.04.139

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  • Large conductivity enhancement in polycrystalline 12CaO・7Al2O3 thin films induced by extrusion of clathrated O2 ions by hot Au+ implantation and ultraviolet light illumination

    M. Miyakawa, M. Hirano, T. Kamiya, H. Hosono

    Nuclear Instruments and Methods in Physics Research B   250   155 - 158   2006年9月

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  • Photoluminescence of Au+ formed in 12CaO・7Al2O3 single crystal by Au+-implantation

    M. Miyakawa, H. Kamioka, M. Hirano, T. Kamiya, H. Hosono

    Nuclear Instruments and Methods in Physics Research B   250   368 - 371   2006年9月

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  • High-mobility thin-film transistor with amorphous InGaZnO4 channel fabricated by room temperature rf-magnetron sputtering

    Hisato Yabuta, Masafumi Sano, Katsumi Abe, Toshiaki Aiba, Tohru Den, Hideya Kumomi, Kenji Nomura, Toshio Kamiya, Hideo Hosono

    APPLIED PHYSICS LETTERS   89 ( 11 )   112123-1 - 3   2006年9月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Thin-film transistors (TFTs) were fabricated using amorphous indium gallium zinc oxide (a-IGZO) channels by rf-magnetron sputtering at room temperature. The conductivity of the a-IGZO films was controlled from similar to 10(-3) to 10(-6) S cm(-1) by varying the mixing ratio of sputtering gases, O-2/(O-2+Ar), from similar to 3.1% to 3.7%. The top-gate-type TFTs operated in n-type enhancement mode with a field-effect mobility of 12 cm(2) V-1 s(-1), an on-off current ratio of similar to 10(8), and a subthreshold gate voltage swing of 0.2 V decade(-1). It is demonstrated that a-IGZO is an appropriate semiconductor material to produce high-mobility TFTs at low temperatures applicable to flexible substrates by a production-compatible means. (c) 2006 American Institute of Physics.

    DOI: 10.1063/1.2353811

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  • Magnetic and carrier transport properties of Mn-doped p-type semiconductor LaCuOSe: An investigation of the origin of ferromagnetism

    Hiroshi Yanagi, Shuichi Ohno, Toshio Kamiya, Hidenori Hiramatsu, Masahiro Hirano, Hideo Hosono

    JOURNAL OF APPLIED PHYSICS   100 ( 3 )   033717-1 - 5   2006年8月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    LaCuOSe is a wide band gap p-type semiconductor in which high density positive holes can be doped to exhibit degenerate conduction. These features should allow room-temperature ferromagnetism in a dilute magnetic semiconductor (DMS), which follows a theoretical prediction [T. Dietl et al., Science 287, 1019 (2000)], yet to be realized. A weak ferromagnetic response is observed in both bulk and thin epitaxial film samples of Mn-doped LaCuOSe with hole concentrations of similar to 10(20) cm(-3). However, the observed small magnetization (mu(B) per Mn ion of less than unity) is reasonably explained by the inclusion of 0.2 mol % of LaMnO3 and 0.1 mol % of Mn3O4, which were quantitatively analyzed in the bulk sample using highly sensitive x-ray diffractometry, i.e., Mn-doped LaCuOSe did not exhibit ferromagnetism due to the low solubility limit of Mn in LaCuOSe (&lt; 0.5 mol %). This result demonstrates the importance of complementary characterization using both thin film and bulk samples for studying DMSs. (c) 2006 American Institute of Physics.

    DOI: 10.1063/1.2219693

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  • Femtosecond-laser-encoded distributed-feedback color center laser in lithium fluoride single crystal

    Ken-ich Kawamura, Masahiro Hirano, Toshio Kamiya, Heido Hosono

    JOURNAL OF NON-CRYSTALLINE SOLIDS   352 ( 23-25 )   2347 - 2350   2006年7月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Focused infrared femtosecond laser pulses (wavelength similar to 800 nm, emission pulse duration 100 fs) were employed to fabricate opto-electronic devices such as waveguides, micro-gratings and laser active centers in LiF crystals. F-2 color centers of about 2 x 10(18) cm(-3) and refractive index change of about 1% at 633 nm were induced by the fs-laser irradiation. This technique was applied to fabricate a distributed-feedback (DFB) F-2 color center laser structure inside LiF single crystal. The LiF DFB laser exhibited laser oscillation at 707 nm at room temperature. The slope efficiency of similar to 10% and beam divergence of similar to 20 mrad were achieved. (c) 2006 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.jnoncrysol.2006.01.087

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  • Photoluminescence from Au ion-implanted nanoporous single-crystal 12CaO center dot 7Al(2)O(3)

    Masashi Miyakawa, Hayato Kamioka, Masahiro Hirano, Toshio Kamiya, Peter V. Sushko, Alexander L. Shluger, Noriaki Matsunami, Hideo Hosono

    PHYSICAL REVIEW B   73 ( 20 )   205108   2006年5月

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    記述言語:英語   出版者・発行元:AMER PHYSICAL SOC  

    Implantation of Au+ ions into a single crystalline 12CaO center dot 7Al(2)O(3) (C12A7) was performed at high temperatures with fluences from 1x10(14) to 3x10(16) cm(-2). This material is composed of positively charged sub-nanometer-sized cages compensated by extra-framework negatively charged species. The depth profile of concentrations of Au species was analyzed using Rutherford backscattering spectrometry. The measured optical spectra and ab initio embedded cluster calculations show that the implanted Au species are stabilized in the form of negative Au- ions below the fluences of similar to 1x10(16) cm(-2) (Au volume concentration of similar to 2x10(21)cm(-3)). These ions are trapped in the cages and exhibit photoluminescence (PL) bands peaking at 3.05 and 2.34 eV at temperatures below 150 K. At fluences exceeding similar to 3x10(16) cm(-2), the implanted Au atoms form nano-sized clusters. This is manifested in quenching of the PL bands and creation of an optical absorption band at 2.43 eV due to the surface plasmon of free carriers in the cluster. The PL bands are attributed to the charge transfer transitions(Au-0+e(-)-&gt; Au-) due to recombination of photo-excited electrons (e(-)), transiently transferred by ultraviolet excitation into a nearby cages, with Au-0 atoms.

    DOI: 10.1103/PhysRevB.73.205108

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  • Amorphous oxide semiconductors for high-performance flexible thin-film transistors

    K Nomura, A Takagi, T Kamiya, H Ohta, M Hirano, H Hosono

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   45 ( 5B )   4303 - 4308   2006年5月

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    記述言語:英語   出版者・発行元:INST PURE APPLIED PHYSICS  

    DOI: 10.1143/JJAP.45.4303

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  • Growth and structure of heteroepitaxial thin films of homologous compounds RAO3(MO)m by reactive solid-phase epitaxy: Applicability to a variety of materials and epitaxial template layers

    Youichi Ogo, Kenji Nomura, Hiroshi Yanagi, Hiromichi Ohta, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Thin Solid Films   496 ( 1 )   64 - 69   2006年2月

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    記述言語:英語  

    A reactive solid-phase epitaxy (R-SPE) method combines deposition of a thick amorphous or polycrystalline layer with a desired chemical composition and post-deposition solid-phase epitaxial growth. The solid-phase epitaxial growth is invoked by thermal annealing with an assistance of a sacrificial layer working as an epitaxial template. Thereby it enables us to grow high-quality epitaxial films of complex oxides whose epitaxial films are not grown by conventional high-temperature growth techniques. It was reported that 2-nm-thick ZnO layers worked as template for growing InGaO3(ZnO) m (m = integer) epitaxial films. The present study extended the R-SPE technique to growth of various complex oxides with chemical compositions of RAO3(MO)m and to use of various epitaxial template layers. We found that mono oxide epitaxial layers such as In2O 3 and Ga2O3 work as template layers as well. Alternatively, a ZnO epitaxial layer is also applicable to ZnO-free compounds. The films obtained were grown heteroepitaxially on YSZ(111) and single-crystalline when the fabrication conditions are optimized. © 2005 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2005.08.201

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  • Growth, structure and carrier transport properties of Ga2O3 epitaxial film examined for transparent field-effect transistor

    K Matsuzaki, H Hiramatsu, K Nomura, H Yanagi, T Kamiya, M Hirano, H Hosono

    THIN SOLID FILMS   496 ( 1 )   37 - 41   2006年2月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Growth conditions of heteroepitaxial thin films of tin-doped Ga2O3 were surveyed from the viewpoint of visible application to field-effect transistors (FETs). Films were deposited by pulsed laser deposition, and post-annealing was examined to improve film structures. Atomically flat surfaces were obtained for films grown oil yttria-stabilized zirconia (III) plane and post-annealed at 1400 degrees C, but they were insulating. Conductive heteroepitaxial films applicable to FETs were obtained on alpha-Al2O3 (0001) at specific deposition conditions, i.e. substrate temperatures from 500 to 550 degrees C and oxygen pressures from 5 x 10(-4) to 1 x 10(-3) Pa. It was found that the resulting epitaxial films have a crystal structure different frorn that of beta-Ga2O3. The crystal lattice for the films is determined to be orthorhombic with a large possibility of a higher-symmetry hexagonal or rhombohedral system. The films exhibited high transparency in the near infrared-deep ultraviolet region and had bandgap of similar to 4.9 eV The operation of top-gate MISFETs using the Ga2O3 film for the n channel was demonstrated. (c) 2005 Published by Elsevier B.V.

    DOI: 10.1016/j.tsf.2005.08.187

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  • Wide-gap layered oxychalcogenide semiconductors: Materials, electronic structures and optoelectronic properties

    K Ueda, H Hiramatsu, M Hirano, T Kamiya, H Hosono

    THIN SOLID FILMS   496 ( 1 )   8 - 15   2006年2月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Applying the concept of materials design for transparent conductive oxides to layered oxychalcogen ides, several p-type and n-type layered oxychalcogen ides were proposed as wide-gap semiconductors and their basic optical and electrical properties were examined. The layered oxychalcogen ides are composed of ionic oxide layers and covalent chalcogenide layers, which bring wide-gap and conductive properties to these materials, respectively. The electronic structures of the materials were examined by normal/inverse photoeinission spectroscopy and energy band calculations. The results of the examinations suggested that these materials possess unique features more than simple wide-gap semiconductors. Namely, the layered oxychalcogen ides are considered to be extremely thin quantum wells composed of the oxide and chalcogenide layers or 2D chalcogenide crystals/molecules embedded in an oxide matrix. Observation of step-like absorption edges, large band gap energy and large exciton binding energy demonstrated these features originating from 2D density of states and quantum size effects in these layered materials. (c) 2005 Elsevier B.V All rights reserved.

    DOI: 10.1016/j.tsf.2005.08.268

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  • Field-induced current modulation in epitaxial film of deep-ultraviolet transparent oxide semiconductor Ga2O3

    K Matsuzaki, H Yanagi, T Kamiya, H Hiramatsu, K Nomura, M Hirano, H Hosono

    APPLIED PHYSICS LETTERS   88 ( 9 )   092106-1 - 3   2006年2月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Epitaxial films of a deep-ultraviolet transparent oxide semiconductor, Ga2O3, were fabricated on alpha-Al2O3 (0001) substrates by pulsed laser deposition. Four-axes x-ray diffraction measurements revealed that the tin-doped Ga2O3 films have a crystal structure different from any known polymorphs of Ga2O3. Its crystal lattice was determined to be an orthorhombic. Top gate field-effect transistor structures were fabricated using the Ga2O3 epitaxial films for n-channels. The channel conductance was modulated by an order of magnitude by gate voltage at room temperature with an estimated field-effect mobility of 5x10(-2) cm(2)(V s)(-1). (c) 2006 American Institute of Physics.

    DOI: 10.1063/1.2179373

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  • Growth and structure of heteroepitaxial thin films of homologous compounds RAO(3)(MO)(m) by reactive solid-phase epitaxy: Applicability to a variety of materials and epitaxial template layers

    Y Ogo, K Nomura, H Yanagi, H Ohta, T Kamiya, M Hirano, H Hosono

    THIN SOLID FILMS   496 ( 1 )   64 - 69   2006年2月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    A reactive solid-phase epitaxy (R-SPE) method combines deposition of a thick amorphous or polycrystalline layer with a desired chemical composition and post-deposition solid-phase epitaxial growth. The solid-phase epitaxial growth is invoked by thermal annealing with all assistance of a sacrificial layer working as an epitaxial template. Thereby it enables Lis to grow high-quality epitaxial films of complex oxides whose epitaxial films are not grown by conventional high-temperature growth techniques. It was reported that 2-nm-thick ZnO layers worked as template for growing InGaO3(ZnO)(m) (m = integer) epitaxial films. The present study extended the R-SPE technique to growth of various complex oxides with chemical compositions of RAO(3)(MO)(m) and to use of various epitaxial template layers. We found that mono oxide epitaxial layers such as In2O3 and Ga2O3 work as template layers as well. Alternatively, a ZnO epitaxial layer is also applicable to ZnO-free compounds. The films obtained were grown heteroepitaxially on YSZ(111) and single-crystalline when the fabrication conditions are optimized. (c) 2005 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2005.08.201

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  • Function cultivation of transparent oxides utilizing built-in nanostructure

    H Hosono, T Kamiya, M Hirano

    BULLETIN OF THE CHEMICAL SOCIETY OF JAPAN   79 ( 1 )   1 - 24   2006年1月

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    記述言語:英語   掲載種別:書評論文,書評,文献紹介等   出版者・発行元:CHEMICAL SOC JAPAN  

    This review article describes recent progress in our research on cultivation of functionality in crystalline and amorphous transparent oxides utilizing nanostructures embedded in the material itself. It includes the background of our research and approach. Subjects included are material exploration and device application of transparent oxide semiconductors for transparent electronics, function emergence in nano-porous crystal 12CaO center dot 7Al(2)O(3) utilizing active anion species stabilized by sub-nanometer-sized cages, and modified silica glass for vacuum/deep ultraviolet lasers. Our description of each subject include: background and approach, material design concept, fabrication or modification method, properties, and device fabrication. Emphasis is placed on the importance of a variety of built-in nanostructures in transparent oxides for novel function realization and the high potential of transparent oxides as ingredients for an ubiquitous element strategy of material research in this century.

    DOI: 10.1246/bcsj.79.1

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  • Opto-electronic properties and light-emitting device application of widegap layered oxychalcogenides: LaCuOCh (Ch = chalcogen) and La2CdO2Se2

    Hidenori Hiramatsu, Hayato Kamioka, Kazushige Ueda, Hiromichi Ohta, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    phys. stat. sol. (a)   203 ( 11 )   2800 - 2811   2006年

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  • Recent progress in device applications of transparent oxide semiconductors

    T. Kamiya, H. Hosono

    Proceedings of International Conference on Optoelectronic Materials and Thin Films for Advanced Technology (OMTAT 2005) (24-27, Oct., 2005, Kochi, India)   217 - 234   2006年

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  • Integrated circuits based on amorphous indium-gallium-zinc-oxide-channel thin-film transistors

    M. Ofuji, K. Abe, N. Kaji, R. Hayashi, M. Sano, H. Kumomi, K. Nomura, T. Kamiya, H. Hosono

    ECS Transactions   3 ( 8 )   293 - 300   2006年

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    記述言語:英語  

    Five-stage ring oscillators (ROs) coposed of amorphous In-Ga-Zn-O (a-IGZO) channel TFTs were fabricated at room temperature with no post-deposition annealing. We observed oscillation of ROs with a variety of channel lengths and channel widths. A RO with channel lengths of 10 μm operated at 21.5 kHz (propagation delay of 4.7 μs / stage), when the external voltage of +18 V was supplied. A circuit simulation reproduced the measured output characteristics of ROs qualitatively, and also the simulated propagation delays agreed with the measured ones approximately. copyright The Electrochemical Society.

    DOI: 10.1149/1.2356366

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  • Electron field emission from TiO2 nanotube arrays synthesized by hydrothermal reaction

    Masahiro Miyauchi Hiromasa Tokudome, Yoshitake Toda, Toshio Kamiya, Hideo Hosono

    Appl. Phys. Lett.   88   043114-1 - 3   2006年

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  • Opto-electronic properties and light-emitting device application of widegap layered oxychalcogenides: LaCuOCh (Ch = chalcogen) and La2CdO2Se2

    Hidenori Hiramatsu, Hayato Kamioka, Kazushige Ueda, Hiromichi Ohta, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    phys. stat. sol. (a)   203 ( 11 )   2800 - 2811   2006年

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  • Photoluminescence from Au ion-implanted nanoporous single-crystal 12CaO・7Al2O3

    Masashi Miyakawa Hayato, Kamioka Masahiro Hirano, Toshio Kamiya, Peter V. Sushko Alexander L. Shluger Noriaki, Matsunami, Hideo Hosono

    Phys. Rev. B   73 ( 20 )   205108   2006年

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  • Function Cultivation of Transparent Oxides Utilizing Built-In Nanostructure

    Hosono Hideo, Kamiya Toshio, Hirano Masahiro

    Bulletin of the Chemical Society of Japan   79 ( 1 )   1 - 24   2006年

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    記述言語:英語   出版者・発行元:Chemical Society of Japan  

    DOI: 10.1246/bcsj.79.1

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  • Recent progress in device applications of transparent oxide semiconductors

    T. Kamiya, H. Hosono

    Proceedings of International Conference on Optoelectronic Materials and Thin Films for Advanced Technology (OMTAT 2005) (24-27, Oct., 2005, Kochi, India)   217 - 234   2006年

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  • Electron field emission from TiO2 nanotube arrays synthesized by hydrothermal reaction

    Masahiro Miyauchi Hiromasa Tokudome, Yoshitake Toda, Toshio Kamiya, Hideo Hosono

    Appl. Phys. Lett.   88   043114-1 - 3   2006年

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  • Large conductivity enhancement in polycrystalline 12CaO・7Al2O3 thin films induced by extrusion of clathrated O2 ions by hot Au+ implantation and ultraviolet light illumination

    M. Miyakawa, M. Hirano, T. Kamiya, H. Hosono

    Nuclear Instruments and Methods in Physics Research B   250   155 - 158   2006年

  • Field-induced current modulation in nanoporous semiconductor, electron-doped 12CaO·7Al2O3

    Toshio Kamiya, Shouzou Aiba, Masashi Miyakawa, Kenji Nomura, Satoru Matsuishi, Katsuro Hayashi, Kazushige Ueda, Masahiro Hirano, Hideo Hosono

    Chemistry of Materials   17 ( 25 )   6311 - 6316   2005年12月

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    記述言語:英語  

    12CaO·Al2O3 (C12A7) has a unique crystal structure composed of positively charged cages ∼0.4 nm in inner diameter and a free oxygen ion (O2-) clathrated in one-sixth of the cages. C12A7 can be converted to inorganic electride by replacing the clathrated oxygen ions with electrons, and the electride exhibits degenerate-type conduction with room-temperature conductivities &gt
    100 S cm-1. In intermediate states, semiconductive C12A7 can be obtained by controlling electron density. In this study, we examined effects of electric field on carrier transport properties of the semiconductive C12A7 using a field-effect transistor (FET) structure targeted for future mesoscopic devices and electrochemical devices that will utilize the quantum-dot-like cage structures and chemically active clathrated anions in C12A7. FETs were fabricated using two types of samples, (i) single-crystalline bulk and (ii) polycrystalline thin films, for channels. First, conditions to form good contacts for source and drain electrodes were examined because the semiconductive C12A7 has a small work function, and it was difficult to form good electrical contacts with metals. It was found that Pt was the best metal with the lowest contact resistance to C12A7, and thermal annealing at ≥300 °C improved its non-ohmic characteristics. Electrical conductivity was modulated by 1-2 orders of magnitude by applying gate voltage. Apparent field-effect mobilities were 0.02-0.08 cm2 (V s) -1, which were comparable with the drift mobilities of the semiconductive C12A7. This is the first demonstration of a semiconductor device using an electride. © 2005 American Chemical Society.

    DOI: 10.1021/cm051904s

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  • Field-induced current modulation in nanoporous semiconductor, electron-doped 12CaO center dot 7Al(2)O(3)

    T Kamiya, S Aiba, M Miyakawa, K Nomura, S Matsuishi, K Hayashi, K Ueda, M Hirano, H Hosono

    CHEMISTRY OF MATERIALS   17 ( 25 )   6311 - 6316   2005年12月

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    記述言語:英語   出版者・発行元:AMER CHEMICAL SOC  

    12CaO(.)7Al(2)O(3) (C 12A7) has a unique crystal structure composed of positively charged cages similar to 0.4 nm in inner diameter and a free oxygen ion (O2-) clathrated in one-sixth of the cages. C12A7 can be converted to inorganic electride by replacing the clathrated oxygen ions with electrons, and the electride exhibits degenerate-type conduction with room-temperature conductivities &gt; 100 S cm(-1). In intermediate states, semiconductive C12A7 can be obtained by controlling electron density. In this study, we examined effects of electric field on carrier transport properties of the semiconductive C12A7 using a field-effect transistor (FET) structure targeted for future mesoscopic devices and electrochemical devices that will utilize the quantum-dot-like cage structures and chemically active clathrated anions in C12A7. FETs were fabricated using two types of samples, (i) single-crystal line bulk and (ii) polycrystalline thin films, for channels. First, conditions to form good contacts for source and drain electrodes were examined because the semiconductive C12A7 has a small work function, and it was difficult to form good electrical contacts with metals. It was found that Pt was the best metal with the lowest contact resistance to C12A7, and thermal annealing at &gt;= 300 degrees C improved its non-ohmic characteristics. Electrical conductivity was modulated by 1-2 orders of magnitude by applying gate voltage. Apparent field-effect mobilities were 0.02-0.08 cm(2) (V S)(-1), which were comparable with the drift mobilities of the semiconductive C12A7. This is the first demonstration of a semiconductor device using an electride.

    DOI: 10.1021/cm051904s

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  • Intense thermal field electron emission from room-temperature stable electride

    Y Toda, SW Kim, K Hayashi, M Hirano, T Kamiya, H Hosono, T Haraguchi, H Yasuda

    APPLIED PHYSICS LETTERS   87 ( 25 )   254103   2005年12月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Thermal field emission (TFE) from a flat surface of 12CaO center dot 7Al(2)O(3) (C12A7) electride was examined at temperatures up to 900 degrees C and applied external voltages of 0-6 kV in a 10(-5) Pa vacuum. TFE started to occur at similar to 650 degrees C and steeply increased at similar to 900 degrees C to reach similar to 80 mu A (similar to 1.5 A cm(-2)) when an extraction field of 10(5) V cm(-1) (an extraction voltage of 6 kV) was applied. The work function estimated from the Richardson-Dushman equation was similar to 2.1 eV, which is rather smaller than that of LaB6 (similar to 2.7 eV). It is experimentally confirmed that the emission with a current of similar to 50 mu A (from a 80 mu m diameter area) was stably sustained for more than 90 h. The efficient and stable emission at relatively low temperature in a moderate vacuum atmosphere strongly suggests that the C12A7 electride has high potential for TFE applications.

    DOI: 10.1063/1.2149989

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  • Excitonic blue luminescence from p-LaCuOSe/n-InGaZn5O8 light-emitting diode at room temperature

    H Hiramatsu, K Ueda, H Ohta, T Kamiya, M Hirano, H Hosono

    APPLIED PHYSICS LETTERS   87 ( 21 )   211107   2005年11月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    A hetero p/n junction diode was fabricated by laminating an amorphous n-type InGaZn5O8 layer to a p-type LaCuOSe film epitaxially grown on a MgO (001) substrate. It exhibited a relatively sharp blue electroluminescence (EL) that peaked at similar to 430 nm at room temperature when a forward bias voltage above 8 V was applied. The wavelength and bandwidth of the EL band agreed well with those of the excitonic photoluminescence band in LaCuOSe, which indicates that the EL band originates from the exciton in LaCuOSe. This experiment strongly suggests that layered compounds, LnCuOCh (Ln=lanthanide, Ch=chalcogen), are promising as the light-emitting layer in optoelectronic devices that operate in the blue-ultraviolet region. (c) 2005 American Institute of Physics.

    DOI: 10.1063/1.2133907

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  • Two-dimensional electronic structure and multiple excitonic states in layered oxychalcogenide semiconductors, LaCuOCh (Ch=S, Se, Te): Optical properties and relativistic ab initio study

    T Kamiya, K Ueda, H Hiramatsu, H Kamioka, H Ohta, M Hirano, H Hosono

    THIN SOLID FILMS   486 ( 1-2 )   98 - 103   2005年8月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Electronic structures of layered oxychalcogenides LaCuOCh (Ch-S, Se, Te) were studied using relativistic ab initio band calculations to understand their optical and electronic properties. Step-like structures terminated with one or two sharp peaks were observed in low-temperature (10 K) optical absorption spectra. Third optical nonlinearity measurements supported that the sharp peaks came from split excitonic levels. The ab initio calculations reproduced well these characteristic structures in the spectra and proved that the step-like optical absorption structures originated from two-dimensional nature of the electronic structures associated with the layered crystal structure of LaCuOCh. The split energies of the excitonic levels were quantitatively explained by spin-orbit interaction in the chalcogen ions. (c) 2004 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.tsf.2004.11.235

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  • Growth of epitaxial ZnO thin films on lattice-matched buffer layer: Application of InGaO3(ZnO)(6) single-crystalline thin film

    Y Takeda, K Nomura, H Ohta, H Yanagi, T Kamiya, M Hirano, H Hosono

    THIN SOLID FILMS   486 ( 1-2 )   28 - 32   2005年8月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Effects of lattice-matched substrates on growth of ZnO epitaxial films were studied. ZnO thin films were grown on single-crystalline InGaO3(ZnO)(6) (IGZO) layers, which have small lattice mismatches of similar to 0.8% and similar to 2.2% in a- and c-axes, respectively. Epitaxial ZnO films were grown with the epitaxial relationship between the ZnO film and the single-crystalline IGZO of [0001](ZnO)//[111](IGZO)//[111](YSZ) and [1120](ZnO)//[1201](IGZO)//[110](YSZ). The use of the lattice-matched substrate and optimization of film microstructure and post-annealing condition led to atomically flat surfaces at maximum process temperatures as low as 700 degrees C. A large Hall electron mobility -80 cm(2) (V s)(-1) (N-e: similar to 2.8 X 10(18) cm(-3)) was obtained even if the film thickness was only 150 nm although comparable mobilities have been reported on films having much larger thicknesses (similar to 1000 nm) fabricated at higher temperatures similar to 1000 degrees C. (c) 2004 Published by Elsevier B.V.

    DOI: 10.1016/j.tsf.2004.12.045

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  • Carrier transport and electronic structure in amorphous oxide semiconductor, a-InGaZnO4

    A Takagi, K Nomura, H Ohta, H Yanagi, T Kamiya, M Hirano, H Hosono

    THIN SOLID FILMS   486 ( 1-2 )   38 - 41   2005年8月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Carrier transport properties in amorphous oxide semiconductor InGaZnO4 (a-IGZO) thin films were investigated in detail using temperature dependence of Hall measurements. It was found that Hall mobility increased distinctly as carrier concentration increased. Unlikely conventional amorphous semiconductors such as a-Si/H, definite normal Hall voltage signals were observed on the films with carrier concentrations (Nc)&gt; 10(16) cm(-3), and Hall mobilities as large as 15 cm(2) (Vs)(-1) were attained in the films with Ne &gt; 10(20) cm(-3). When N, was less than 10 19 cm(-3), the temperature dependence of Hall mobility showed thermally-activated behavior in spite that carrier concentration was independent of temperature. While, it changed to almost degenerate conduction at N-c &gt; 10(18) cm(-3). These behaviors are similar to those observed in single-crystal line IGZO, and are explained by percolation conduction through distributed potential barriers which are formed in the vicinity of the conduction band bottom due to the randomness of the amorphous structure. The effective mass of a-IGZO was estimated to be similar to 0.34 m(e) (m(e) is the mass of free electron) from optical data, which is almost the same as that of crystalline IGZO (-0.32 m(c)). (c) 2004 Published by Elsevier B.V.

    DOI: 10.1016/j.tsf.2004.11.223

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  • Electrical properties and structure of p-type amorphous oxide semiconductor xZnO center dot Rh2O3

    T Kamiya, S Narushima, H Mizoguchi, K Shimizu, K Ueda, H Ohta, M Hirano, H Hosono

    ADVANCED FUNCTIONAL MATERIALS   15 ( 6 )   968 - 974   2005年6月

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    記述言語:英語   出版者・発行元:WILEY-V C H VERLAG GMBH  

    p-Type conduction in amorphous oxide was firstly found in zinc rhodium oxide (ZnO-Rh2O3) (Adv. Mater 2003,15,1409), and it is still the only p-type amorphous oxide to date. It was reported that an ordered structure at the nanometer scale was contained and its electronic structure is not clear yet. In this paper, optoelectronic and structural properties are reported in detail for xZnO center dot Rh2O3 thin films (x = 0.5-2.0) in relation to the chemical composition x. All the films exhibit positive Seebeck coefficients, confirming p-type conduction. Local network structure strongly depends on the chemical composition. Transmission electron microscopic observations reveal that lattice-like structures made of edge-sharing RhO6 network exist in 2-3 nm sized grains for rhodium-rich films (x = 0.5 and 1.0), while the zinc-rich film (x = 2) is completely amorphous. This result indicates that excess Zn assists to form an amorphous network in the ZnO-Rh2O3 system since Zn ions tend to form corner-sharing networks. The electronic structure of an all-amorphous oxide p-ZnO center dot Rh2O3/n-InGaZnO4 junction is discussed with reference to electrical characteristics and results of photoelectron emission measurements, suggesting that the p/n junction has large band offsets at the conduction and valence bands, respectively.

    DOI: 10.1002/adfm.200400046

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  • Electrical properties and structure of p-type amorphous oxide semiconductor xZnO・Rh2O3

    T. Kamiya, S. Narushima, H. Mizoguchi, K. Shimizu, K. Ueda, H. Ohta, M. Hirano, H. Hosono

    Adv. Funct. Mater.   15 ( 6 )   968 - 974   2005年6月

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  • Excitonic properties related to valence band levels split by spin-orbit interaction in layered oxychalcogenide LaCuOCh(Ch = S,Se)

    H Kamioka, H Hiramatsu, M Hirano, K Ueda, T Kamiya, H Hosono

    JOURNAL OF LUMINESCENCE   112 ( 1-4 )   66 - 70   2005年4月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    The energy splitting of valence band in oxychalcogenides LaCuOCh (Ch = S, Se) was studied through degenerative four-wave mixing (DFWM) signals excited by femtosecond laser pulses and high-resolution absorption spectra at 4 K. The DFWM signals for LaCuOS exhibited a beat structure with a period of 480 fs just at the exciton peak energy, indicating that the lowest exciton states were split by 9 meV, while the corresponding splitting in LaCuOSe was 125 meV. The spin-orbit interaction of Ch ion accompanied by the hybridization of Cu 3d orbital causes the splitting of the exciton levels. (c) 2004 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.jlumin.2004.09.085

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  • Creation of new functions in transparent oxides utilizing nanostructures embedded in crystal and artificially encoded by laser pulses

    T Kamiya, H Hosono

    SEMICONDUCTOR SCIENCE AND TECHNOLOGY   20 ( 4 )   S92 - S102   2005年4月

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    記述言語:英語   出版者・発行元:IOP PUBLISHING LTD  

    The main objective of this review is to provide an idea to develop new functions by utilizing exotic nanostructures and electronic structures embedded in materials. First, our materials design concept is introduced in relation to electronic structures of oxides. Then optoelectronic properties, electronic structures and device applications are reviewed for (i) layered oxychalcogenides LnCuOCh (Ln = lanthanide, Ch = chalcogen) and (ii) nano-porous crystal 12CaO(7)(.)Al(2)O(3) (C12A7). Sharp blue-to-UV light emission was observed in LnCuOCh originating from room-temperature stable exciton and the high stability of exciton is discussed in terms of their two-dimensional electronic structures. C12A7 has free oxygen ions clathrated in its subnanometre-sized cages, and new functions may be rendered to C12A7 by replacing the free oxygen ions with active anionic species. Quantum calculations indicate that cages trapping electrons in C12A7:e(-) can be regarded as quantum dots. We also introduce micro/nano-processing techniques by interfered pulses from a femtosecond laser as another approach to add new functions to transparent material. This method enables us to write three-dimensional integrated optical circuits inside transparent materials. A miniatured distributed feedback colour centre laser structure was written inside LiF solely by laser pulses and its oscillation at room temperature was demonstrated.

    DOI: 10.1088/0268-1242/20/4/011

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  • Formation of inorganic electride thin films via site-selective extrusion by energetic inert gas ions

    Masashi Miyakawa, Yoshitake Toda, Katsuro Hayashi, Masahiro Hirano, Toshio Kamiya, Noriaki Matsunami, Hideo Hosono

    Journal of Applied Physics   97 ( 2 )   023510   2005年1月

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    記述言語:英語  

    Inert gas ion implantation (acceleration voltage 300 kV) into polycrystalline 12CaO·7 Al2 O3 (C12A7) films was investigated with fluences from 1× 1016 to 1× 1017 cm-2 at elevated temperatures. Upon hot implantation at 600 °C with fluences greater than 1× 1017 cm-2, the obtained films were colored and exhibited high electrical conductivity in the as-implanted state. The extrusion of O2- ions encaged in the crystallographic cages of C12A7 crystal, which leaves electrons in the cages at concentrations up to ~1.4× 1021 cm-3, may cause the high electrical conductivity. On the other hand, when the fluence is less than 1× 1017 cm-2, the as-implanted films are optically transparent and electrically insulating. The conductivity is enhanced and the films become colored by irradiating with ultraviolet light due to the formation of F+ -like centers. The electrons forming the F+ -like centers are photo released from the encaged H- ions, which are presumably derived from the preexisting OH- groups. The induced electron concentration is proportional to the calculated displacements per atom, which suggests that nuclear collision effects of the implanted ions play a dominant role in forming the electron and H- ion in the films. The hot ion implantation technique provides a nonchemical process for preparing electronic conductive C12A7 films. © 2005 American Institute of Physics.

    DOI: 10.1063/1.1829151

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  • Formation of inorganic electride thin films via site-selective extrusion by energetic inert gas ions

    M Miyakawa, Y Toda, K Hayashi, M Hirano, T Kamiya, N Matsunami, H Hosono

    JOURNAL OF APPLIED PHYSICS   97 ( 2 )   023510   2005年1月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Inert gas ion implantation (acceleration voltage 300 kV) into polycrystalline 12CaO.7Al(2)O(3) (C12A7) films was investigated with fluences from 1x10(16) to 1x10(17) cm(-2) at elevated temperatures. Upon hot implantation at 600 degreesC with fluences greater than 1x10(17) cm(-2), the obtained films were colored and exhibited high electrical conductivity in the as-implanted state. The extrusion of O2- ions encaged in the crystallographic cages of C12A7 crystal, which leaves electrons in the cages at concentrations up to similar to1.4x10(21) cm(-3), may cause the high electrical conductivity. On the other hand, when the fluence is less than 1x10(17) cm(-2), the as-implanted films are optically transparent and electrically insulating. The conductivity is enhanced and the films become colored by irradiating with ultraviolet light due to the formation of F+-like centers. The electrons forming the F+-like centers are photo released from the encaged H- ions, which are presumably derived from the preexisting OH- groups. The induced electron concentration is proportional to the calculated displacements per atom, which suggests that nuclear collision effects of the implanted ions play a dominant role in forming the electron and H- ion in the films. The hot ion implantation technique provides a nonchemical process for preparing electronic conductive C12A7 films. (C) 2005 American Institute of Physics.

    DOI: 10.1063/1.1829151

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  • Electronic Insulator-Conductor Conversion in Hydride Ion-Doped 12CaO・7Al2O3 by Electron-Beam Irradiation

    K. Hayashi, Y. Toda, T. Kamiya, M. Hirano M, Yamanaka I, Tanaka, T, Yamamoto, H. Hosono

    Appl. Phys. Lett.   86 ( 2 )   022109   2005年1月

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  • Built-in Quantum Dots in Nano-Porous Crystal 12CaO・7Al2O3: Simplified Views for Electronic Structure and Carrier Transport

    Toshio Kamiya, Hideo Hosono

    Jpn. J. Appl. Phys.   44 ( 1B )   774 - 782   2005年1月

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  • Electronic insulator-conductor conversion in hydride ion-doped 12CaO center dot 7Al(2)O(3) by electron-beam irradiation

    K Hayashi, Y Toda, T Kamiya, M Hirano, M Yamanaka, Tanaka, I, T Yamamoto, H Hosono

    APPLIED PHYSICS LETTERS   86 ( 2 )   022109   2005年1月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    We report formation of persistent carrier electrons in hydride ion (H-)-incorporated 12CaO.7Al(2)O(3) (C12A7) by electron-beam irradiation. The electrical conductivity of H--doped C12A7 single crystals increases with the electron-beam irradiation dose, accompanied with a green coloration attributable to a carrier electron formation. A 25 keV electron beam with a dose of similar to500 muC cm(-2) fully converts the conductivity in surface layers to the depth of similar to4 mum. Carrier electron formation is most likely due to electron-hole pairs generated in the electron excitation volume and subsequent energy transfer to the H- ions. The estimated carrier formation yield per an incident electron is similar to30. These findings may enable a fine patterning of the conductive area without photomasks and photoresists. (C) 2005 American Institute of Physics.

    DOI: 10.1063/1.1852723

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  • Transparent High Performance FET using Amorphous Oxide Semiconductors

    Hideo Hosono, Toshiob Kamiya, Kenji Nomura

    Digest of Technical papers of AM-LCD   83   2005年

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  • Built-in Quantum Dots in Nano-Porous Crystal 12CaO・7Al2O3: Simplified Views for Electronic Structure and Carrier Transport

    Toshio Kamiya, Hideo Hosono

    Jpn. J. Appl. Phys.   44 ( 1B )   774 - 782   2005年

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  • アモルファス酸化物半導体を能動層とする透明フレキシブルトランジスタ

    細野秀雄, 神谷利夫, 野村研二

    応用物理   74 ( 7 )   910 - 916   2005年

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    記述言語:日本語   出版者・発行元:応用物理学会  

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  • Formation of inorganic electride thin films via site-selective extrusion by energetic inert gas ions

    Masashi Miyakawa, Yoshitake Toda, Katsuro, Hayashi Masahiro Hirano, Toshio Kamiya, Noriaki, Matsunami, Hideo Hosono

    J. Appl. Phys.   79   023510   2005年

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  • ZnO基半導体を使った透明トランジスタ

    細野秀雄, 神谷利夫, 野村研二

    応用物理学会応用電子物性分科会誌   11   16   2005年

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  • 高性能フレキシブルTFT用材料としてのアモルファス酸化物半導体の材料探索とTFT特性

    野村研二, 神谷利夫, 細野秀雄

    第32回アモルファスセミナー テキスト   17   2005年

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  • Interaction of femto/UV lasers with transparent dielectrics

    Ken-ichi Kawamura, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Materials Processing for Properties and Performance (MP3) (Ed. K.A. Khor, K. Hanada, T. Sano, A. Matsumuro and T. Eiju)   4   285   2005年

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  • Field-Induced Current Modulation in Nanoporous Semiconductor, Electron-Doped 12CaO・7Al2O3

    T. Kamiya, S. Aiba, M. Miyakawa, K. Nomura, S. Matsuishi K, Hayashi K, Ueda, M. Hirano, H. Hosono

    Chem. Mater.   17 ( 25 )   6311 - 6316   2005年

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  • 高性能フレキシブルTFT実現に向けたアモルファス酸化物半導体の材料探索とフレキシブルTFT特性

    野村研二, 神谷利夫, 細野秀雄

    成形加工(プラスチック成形加工学会誌)   17 ( 9 )   588 - 592   2005年

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    記述言語:日本語   出版者・発行元:プラスチック成形加工学会  

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  • 透明酸化物半導体:透明導電性酸化物から拓けた新しいフロンティア

    神谷利夫

    機能材料   10   2005年

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  • アモルファス透明酸化物半導体を用いた高性能フレキシブル薄膜トランジスタの室温形成

    神谷利夫, 野村研二, 細野秀雄

    マテリアルステージ   85   2005年

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  • 透明酸化物半導体を使った高性能な薄膜トランジスタ

    神谷利夫, 野村研二, 細野秀雄

    電子ペーパー実用化最前線   267 - 280   2005年

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  • Electronic structures and device applications of transparent oxide semiconductors: What is the real merit of oxide semiconductors?

    T Kamiya, H Hosono, T Kamiya, H Hosono, H Hosono

    INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY   2 ( 4 )   285 - 294   2005年

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    記述言語:英語   出版者・発行元:WILEY-BLACKWELL  

    The main objective of this review is to provide an idea how to create new functions in oxides and how to find suitable applications only oxides can realize. Oxides have crystal and electronic structures largely different from those of conventional semiconductors such as Si and GaAs. Therefore, we should design suitable applications according to the inherent properties of oxide semiconductors if we intend to develop practical optoelectronic devices using oxides. In this review, we first briefly describe the characteristic features of oxide semiconductors from the viewpoints of crystal and electronic structures. Then three materials and related device applications are shown as examples. N-type amorphous oxide semiconductors (AOSs) can have electron transport properties superior even to silicon if they are in amorphous states. We propose that AOSs are favorable materials for active layers in low-temperature thin film device technology and demonstrate high-performance thin film transistors fabricated at room temperature on flexible plastic sheets. The second example is transparent p-uype semiconductors. Employing chalcogen orbitals and layered crystal structures, large hole mobilities, degenerate p-type conduction, and room-temperature stable excitions are rendered in wide bangap materials. Room-temperature operation of excitonic blue light-emitting diodes was thereby demonstrated. The last is 12CaO center dot 7Al(2)O(3) in which the use of subnanometer-sized cages and anions clathrated in the cages creates many chemical, optical, and electronic functions.

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  • 透明酸化物半導体を用いた透明電界効果トランジスタ

    野村研二, 太田裕道, 神谷利夫, 平野正浩, 細野秀雄

    マテリアルインテグレーション   18   3   2005年

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  • Transparent High Performance FET using Amorphous Oxide Semiconductors

    Hideo Hosono, Toshiob Kamiya, Kenji Nomura

    Digest of Technical papers of AM-LCD   83   2005年

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  • Formation of inorganic electride thin films via site-selective extrusion by energetic inert gas ions

    Masashi Miyakawa, Yoshitake Toda, Katsuro, Hayashi Masahiro Hirano, Toshio Kamiya, Noriaki, Matsunami, Hideo Hosono

    J. Appl. Phys.   79   023510   2005年

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  • Interaction of femto/UV lasers with transparent dielectrics

    Ken-ichi Kawamura, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Materials Processing for Properties and Performance (MP3) (Ed. K.A. Khor, K. Hanada, T. Sano, A. Matsumuro and T. Eiju)   4   285   2005年

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  • Intense Thermal Field Electron Emission From Room Temperature Stable Electride

    Y. Toda, S.W. Kim, K, Hayashi M. Hirano, T. Kamiya, H, Hosono T, Haraguchi H. Yasuda

    Appl. Phys. Lett.   87   254103   2005年

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  • Optical properties and two-dimensional electronic structure in wide-gap layered oxychalcogenide: La2CdO2Se2

    H Hiramatsu, K Ueda, T Kamiya, H Ohta, M Hirano, H Hosono

    JOURNAL OF PHYSICAL CHEMISTRY B   108 ( 45 )   17344 - 17351   2004年11月

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    記述言語:英語   出版者・発行元:AMER CHEMICAL SOC  

    The optical and electronic properties of a wide-gap (similar to3.3 eV) layered oxychalcogenide, La2CdO2Se2, were examined using epitaxial thin films prepared by a reactive solid-phase epitaxy. Two optical absorption peaks due to exciton split by the spin-orbit interaction were observed at 3.43 and 3.61 eV at 10 K near the absorption edge. A sharp ultraviolet photoluminescence was observed even at room temperature, indicating that the free exciton had a large binding energy (estimated value = similar to40 meV) similar to Cu-based, layered oxychalcogenides LnCuOCh (Ln = lanthanide, Ch = chalcogen). The optical properties were compared to those of the Cu-based oxychalcogenides and low-dimensional CdSe-based materials. It is concluded that the two-dimensional crystal structure, which remarkably reduces the bandwidth of the conduction band, is a major origin for the wide band gap. Energy band calculations indicate that the holes are confined in the two-dimensional (CdSe2)(2-) layer, which is most likely responsible for the large binding energy of the exciton.

    DOI: 10.1021/jp048722q

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  • Carrier transport in transparent oxide semiconductor with intrinsic structural randomness probed using single-crystalline InGaO3(ZnO)(5) films

    K Nomura, T Kamiya, H Ohta, K Ueda, M Hirano, H Hosono

    APPLIED PHYSICS LETTERS   85 ( 11 )   1993 - 1995   2004年9月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    We have investigated carrier transport in a crystalline oxide semiconductor InGaO3(ZnO)(5) using single-crystalline thin films. When carrier concentration is less than 2x10(18) cm(-3), logarithm of electrical conductivity decreases in proportion to T (-1/4) and room-temperature Hall mobility was as low as similar to1 cm(2)(V s)(-1). When carrier concentration was increased to 4x10(18) cm(-3), the conduction mechanism changed to degenerate conduction and room-temperature Hall mobility was steeply increased to &gt;10 cm(2)(Vs)(-1), showing metal-insulator transition behavior. These results are explained by percolation conduction over distribution of potential barriers formed around conduction band edge. The potential distribution is a consequence of potential modulation originating from random distribution of Ga3+ and Zn2+ ions in the crystal structure of InGaO3(ZnO)(5). (C) 2004 American Institute of Physics.

    DOI: 10.1063/1.1788897

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  • Fabrication of heteroepitaxial thin films of layered oxychalcogenides LnCuOCh (Ln = La-Nd; Ch = S-Te) by reactive solid-phase epitaxy

    H Hiramatsu, K Ueda, K Takafuji, H Ohta, M Hirano, T Kamiya, H Hosono

    JOURNAL OF MATERIALS RESEARCH   19 ( 7 )   2137 - 2143   2004年7月

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    記述言語:英語   出版者・発行元:CAMBRIDGE UNIV PRESS  

    Processes and preparation conditions for growing epitaxial thin films of Cu-based, layered oxychalcogenides LnCuOCh (Ln = La, Ce, Pr or Nd; Ch = S,,Se, or Se1-yTey) are reported. Epitaxial thin films on MgO (001) substrates were prepared by a reactive solid-phase epitaxy method. Four-axes high-resolution x-ray diffraction measurements revealed that the crystallographic orientation is (001)[110] LnCuOCh parallel to (001)[110] MgO and the internal stress of the crystalline lattices in the films are relaxed during thermal-annealing process of the reactive solid-phase epitaxy. Furthermore, except for CeCuOS, systematic variations in the lattice constant by chalcogen or lanthanide ion substitutions were observed. These results demonstrated that the reactive solid-phase epitaxy is an efficient technique for fabricating LnCuOCh epitaxial films.

    DOI: 10.1557/JMR.2004.0273

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  • Nano-fabrication of optical devices in transparent dielectrics: volume gratings in SiO2 and DFB color center laser in LiF

    KI Kawamura, D Takamizu, T Kurobori, T Kamiya, M Hirano, H Hosono

    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS   218   332 - 336   2004年6月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Refractive index-modulated volume-type gratings were holographically encoded inside pure SiO2 glass and lithium fluoride crystals by a single chirped laser pulse generated from a mode-locked Ti:sapphire laser (wavelength similar to800 nm, emission pulse duration similar to100 fs), The present technique provides a fast method applicable for encoding volume-type gratings inside any non-photosensitive transparent dielectric materials such as SiO2 glass and sapphire. As an application of the holographic encoding method, distributed feedback laser structure was fabricated in a LiF single-crystal using the gratings thus encoded, which demonstrated room-temperature F-2-color center lasing. (C) 2003 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.nimb.2003.12.035

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  • Natural nanostructures in ionic semiconductors

    T Kamiya, H Ohta, H Hiramatsu, K Hayashi, K Nomura, S Matsuishi, K Ueda, M Hirano, H Hosono

    MICROELECTRONIC ENGINEERING   73-4   620 - 626   2004年6月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Nanostructures naturally formed in oxide semiconductor crystals are discussed in relation to their electronic structure and properties. Three different crystals are studied: (i) layered oxychalcogenides LnCuOCh (Ln = lanthanide, Ch = chalcogen), (ii) homologous series layered oxides RMO3(ZnO)(m) (R = In, Lu etc., M = In, Ga etc., m = integer), and (iii) nanoporous crystal 12CaO7 . Al2O3 (C12A7). Coexistence of moderately large mobility, intense photoluminescence arising from room-temperature exciton and high-density hole is explained by a natural modulation doping structure in LnCuOCh. C12A7 exhibits different properties by replacing free O2- ions anions clathrated in its subnanometer-sized cages with O-, H-, and electron. The electronic structures of the clathrated anions were investigated by ab initio calculations and discussed in terms of possible quantum structures and applications. (C) 2004 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.mee.2004.03.003

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  • High electric field response of wide bandgap a-Si : H photodiodes probed by transient current measurements

    T Sugawara, W Futako, T Kamiya, Shimizu, I

    JOURNAL OF NON-CRYSTALLINE SOLIDS   338   802 - 805   2004年6月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Diode devices n/i/Pt and n/i/p(Sb2S3) were fabricated using high-quality wide bandgap a-Si:H (bandgap similar to1.85 eV) for the intrinsic photoactive layers to investigate high electric field transport of photoexcited carriers. Time-resolved photoresponse was examined by a transient current method. It was shown that primary and secondary photocurrents were distinguished by the transient photocurrent method. The n/i/Pt diode device showed a photocurrent gain as large as 10(3) but its response was slow, 5 ins, which is associated with secondary pbotocurrent. The use of p-type Sb2S3 for electron blocking layer instead of Pt successfully suppressed the secondary photocurrent. Fast photoresponse with a response time &lt;50 mus was observed in this device. The mechanism of the dark current leak was associated with shallow defect states at the i/p(Sb2S3) interface through a thermally-excited process. (C) 2004 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.jnoncrysol.2004.03.095

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  • Growth mechanism for single-crystalline thin film of InGaO3(ZnO)(5) by reactive solid-phase epitaxy

    K Nomura, H Ohta, K Ueda, T Kamiya, M Orita, M Hirano, T Suzuki, C Honjyo, Y Ikuhara, H Hosono

    JOURNAL OF APPLIED PHYSICS   95 ( 10 )   5532 - 5539   2004年5月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    The growth mechanism for a single-crystalline film of InGaO3(ZnO)(5) (IGZO) on a (111)-oriented yttria-stabilized-zirconia substrate by reactive solid-phase epitaxy was studied by high-resolution x-ray diffraction, transmission electron microscopy, and atomic force microscopy. We focused on the role of the 2-nm-thick ZnO epitaxial layer during the structural evolution of the 200-nm-thick polycrystalline- (poly-) IGZO layer while thermal annealing. When a thin ZnO epitaxial layer was formed before depositing the poly-IGZO layer, thin single-crystalline epitaxial IGZO seeds were initially formed only on the substrate surface or on the thin ZnO epitaxial layer through a solid-phase reaction between the ZnO epitaxial layer and the poly-IGZO layer. A single-crystalline IGZO layer grew from the IGZO seeds toward the top surface of the film along with a much faster lateral grain growth, which formed a large-area single-crystalline IGZO film with an atomically flat terraced and stepped surface. On the other hand, an epitaxial film was not obtained unless a ZnO epitaxial layer was used, demonstrating that the ZnO epitaxial layer plays a crucial role as the seed for subsequent crystallite growth and a template for determining the crystallographic orientation. (C) 2004 American Institute of Physics.

    DOI: 10.1063/1.1712010

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  • All oxide transparent MISFET using high-k dielectrics gates

    K Nomura, H Ohta, HA Masahiro, K Ueda, T Kamiya, M Hirano, H Hosono

    MICROELECTRONIC ENGINEERING   72 ( 1-4 )   294 - 298   2004年4月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Metal-insulator-semiconductor field-effect transistors (MISFETs) were fabricated using a n-type transparent oxide semiconductor, InGaO3(ZnO)(5), single-crystalline layer as n-channel. High-k dielectric materials, amorphous Al2Ox and HfOx, were examined for gate insulators. The deposition and post-annealing conditions of the gate insulators were optimized for leakage current and MISFET performances. The MISFETs exhibited good performances such as normally off characteristics, an on/off current ratio as large as 10(5) and insensitivity to visible light. A field-effect mobility for oxide MISFETs (similar to80 cm(2) V-1 s(-1)) was obtained when amorphous HfOx was used for gate insulator. (C) 2004 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.mee.2004.01.007

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  • Nanosilicon for single-electron devices

    H Mizuta, Y Furuta, T Kamiya, YT Tan, ZAK Durrani, S Amakawa, K Nakazato, H Ahmed

    CURRENT APPLIED PHYSICS   4 ( 2-4 )   98 - 101   2004年4月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    This paper presents a brief overview of the physics of nanosilicon materials for single-electron device applications. We study how a nanosilicon grain and a discrete grain boundary work as a charging island and a tunnel barrier by using a point-contact transistor, which features an extremely short and narrow channel. Single-electron charging phenomena are investigated by comparing as-prepared devices and various oxidized devices. The optimization of grain and grain-boundary structural parameters is discussed for improving the Coulomb blockade characteristics and realizing room temperature device operation. (C) 2003 Published by Elsevier B.V.

    DOI: 10.1016/j.cap.2003.10.005

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  • Field emission of electron anions clathrated in subnanometer-sized cages in [Ca24Al28O64](4+)(4e(-))

    Y Toda, S Matsuishi, K Hayashi, K Ueda, T Kamiya, M Hirano, H Hosono

    ADVANCED MATERIALS   16 ( 8 )   685 - +   2004年4月

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    記述言語:英語   出版者・発行元:WILEY-V C H VERLAG GMBH  

    [Ca24Al28O64](4+) (4e(-)) is a new inorganic electride, which is air-stable even at similar to 300 degreesC. Its electron field-emission properties originate from electron anions encaged in subnanometer-sized cages embedded in its crystal structure, and the emission current is controlled by Fowler-Nordheim field emission at high electric fields (see Figure). Field-emission display devices demonstrate bright light emission clearly visible under ambient light (inset).

    DOI: 10.1002/adma.200306484

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  • Single-atomic-layered quantum wells built in wide-gap semiconductors LnCuOCh (Ln=lanthanide, Ch=chalcogen)

    K Ueda, H Hiramatsu, H Ohta, M Hirano, T Kamiya, H Hosono

    PHYSICAL REVIEW B   69 ( 15 )   155305   2004年4月

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    記述言語:英語   出版者・発行元:AMERICAN PHYSICAL SOC  

    LnCuOCh (Ln=lanthanide, Ch=chalcogen) layered oxychalcogenides are wide-gap p-type semiconductors composed of alternately stacked (Ln(2)O(2))(2+) oxide layers and (Cu(2)Ch(2))(2-) chalcogenide layers. Energy band calculations revealed that Cu-Ch hybridized bands only spread in the (Cu(2)Ch(2))(2-) layers, which suggests that hole carriers in these bands are confined by the potential barriers formed by the (Ln(2)O(2))(2+) layers. Stepwise absorption spectra of a series of LnCuOCh experimentally verified that an exciton in the (Cu(2)Ch(2))(2-) layers shows a two-dimensional behavior. These theoretical and experimental results indicate that LnCuOCh has "natural multiple quantum wells" built into its layered structure.

    DOI: 10.1103/PhysRevB.69.155305

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  • Mechanism for heteroepitaxial growth of transparent P-type semiconductor: LaCuOS by reactive solid-phase epitaxy

    H Hiramatsu, H Ohta, T Suzuki, C Honjo, Y Ikuhara, K Ueda, T Kamiya, M Hirano, H Hosono

    CRYSTAL GROWTH & DESIGN   4 ( 2 )   301 - 307   2004年3月

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    記述言語:英語   出版者・発行元:AMER CHEMICAL SOC  

    A unique epitaxial growth method, reactive solid-phase epitaxy, was used to fabricate heteroepitaxial thin films of LaCuOS, a transparent p-type semiconductor with layered structure. The epitaxial growth mechanism is examined through microscopic observations. A thin metallic Cu layer deposited between the amorphous LaCuOS (a-LaCuOS) and the yttria-stabilized zirconia (YSZ) single-crystal substrate before thermally annealing is a key to realizing the epitaxial LaCuOS films in this process. To grow the epitaxial films, it is critical for the Cu layer to have a discontinuous structure with triple junctions among the Cu, a-LaCuOS layer, and the YSZ substrate. The Cu layer is needed to create seed grains for the epitaxial LaCuOS at the junctions. The resulting seed grains work as an epitaxy template for subsequent epitaxial growth from the substrate to the film's top surface, and high temperatures such as 1000 degreesC are necessary to completely convert the a-LaCuOS layer to an epitaxial layer.

    DOI: 10.1021/cg0341631

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  • Li-doped NiO epitaxial thin film with atomically flat surface

    T Kamiya, H Ohta, M Kamiya, K Nomura, K Ueda, M Hirano, H Hosono

    JOURNAL OF MATERIALS RESEARCH   19 ( 3 )   913 - 920   2004年3月

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    記述言語:英語   出版者・発行元:MATERIALS RESEARCH SOCIETY  

    Li-doped NiO epitaxial films with high electrical conductivity and atomically flat stepped surfaces were fabricated by a combined technique of pulsed laser deposition and subsequent annealing. It was determined that subsequently annealing at temperatures as low as 600degreesC significantly decreased electrical conductivity due to Li evaporation when the film surface was not protected from Li evaporation. To suppress Li evaporation, a yttria-stabilized-zironia plate was used to cover the film surface, which raised the annealing temperature up to 1300degreesC while maintaining a high Li concentration and electrical conductivity. Thermally annealing at this temperature also improved crystal quality and formed epitaxial films with atomically flat stepped surfaces. The films were single crystalline at least in observation areas, 10 Pm x 10 mum. A reasonably large Hall mobility approximately 0.05 cm(2)/Vs similar to that reported for bulk single-crystal NiO and a visible-light transmission in excess of 75% were obtained on 120-nm-thick films. Although annealing at higher temperatures such as 1400degreesC can further improve the structural and optical properties, the Li concentration in the films was decreased to &lt; 3% of the as-deposited film.

    DOI: 10.1557/jmr.2004.19.3.913

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  • Femtosecond-laser-encoded distributed-feedback color center laser in lithium fluoride single crystals

    K Kawamura, M Hirano, T Kurobori, D Takamizu, T Kamiya, H Hosono

    APPLIED PHYSICS LETTERS   84 ( 3 )   311 - 313   2004年1月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Laser-active F-2 centers were produced in lithium fluoride (LiF) at a concentration of 2x10(18) cm(-3) by irradiating focused femtosecond (fs) laser pulses from a mode-locked titanium sapphire laser (wavelength similar to800 nm, emission pulse duration similar to100 fs). This technique was used to write waveguides embedded in LiF crystals. A refractive index change estimated from a guide propagation method was approximately +1% at a wavelength of 633 nm. Refractive index-modulated volume-type gratings were also encoded inside LiF crystals by a single interfered fs laser pulse. The distributed feedback laser structure was fabricated using the gratings thus encoded, which exhibited a room-temperature F-2-color center laser oscillation at 707 nm. This demonstrates a DFB color center laser operating at room temperature utilizing photon written, permanent Bragg gratings. (C) 2004 American Institute of Physics.

    DOI: 10.1063/1.1640784

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  • Design of highly conductive n-type amorphous chalcogenide: large mobility and carrier generation in a-In_2_S_3-x_

    Satoru Narushima, Masanori Hiroki Kazushige Ueda Ken-ichi Shimizu Toshio Kamiya Masahiro Hirano, Hideo Hosono

    Phil. Mag. Lett. accepted   84   665   2004年

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  • 高移動度(>10cm^2^(Vs)^-1^)を有するアモルファス酸化物半導体と薄膜トランジスタの室温形成

    神谷利夫, 野村研二, 細野秀雄

    第31回アモルファス物質の物性と応用セミナ―テキスト   1   2004年

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  • フェムト秒レーザーのシングルパルス干渉による透明物質のナノ加工

    河村賢一, 平野正浩, 神谷利夫, 細野秀雄

    光アライアンス   15   41   2004年

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  • 自然ナノ構造を利用した新機能開拓―安定なエレクトライドの合成と冷電子源としての応用―

    神谷利夫, 戸田喜丈, 細野秀雄

    ファインケミカル   33   22   2004年

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  • 一枚の写真:セメントからつくる電界電子放射発光デバイス

    細野秀雄, 神谷利夫

    26   367   2004年

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  • Room-Temperature Fabrication of Transparent Flexible Thin Film Transistors Using Amorphous Oxide Semiconductor

    Kenji Nomura, Hiromichi Ohta Akihiro, Takagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Nature   488   432   2004年

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  • Heteroepitaxial growth of wide gap p-type semiconductors: LnCuOCh (Lr=La, Pr and Nd; Ch=S or Se) by reactive solid-phase epitaxy

    H. Hiramatsu, K. Ueda, K. Takafuji, H. Ohta, M. Hirano, T. Kamiya, H. Hosono

    Appl. Phys. A   79   1517   2004年

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  • Degenerate electrical conductive and excitonic photoluminescence properties of epitaxial films of wide gap p-type layered oxychalcogenides, LnCuOCh (Ln = La, Pr and Nd; Ch = S or Se)

    H. Hiramatsu, K. Ueda, K. Takafuji, H. Ohta, M. Hirano, T. Kamiya, H. Hosono

    Appl. Phys. A   79   1521   2004年

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  • Synthesis of single-phase layered oxychalcogenide La2CdO2Se2: crystal structure, optical and electrical properties

    H Hiramatsu, K Ueda, T Kamiya, H Ohta, M Hirano, H Hosono

    JOURNAL OF MATERIALS CHEMISTRY   14 ( 19 )   2946 - 2950   2004年

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    記述言語:英語   出版者・発行元:ROYAL SOC CHEMISTRY  

    A single-phase La2CdO2Se2 powder was successfully synthesized and its optical and electrical properties were examined. Single-phase La2CdO2Se2 was obtained by preserving the stoichiometric composition of the initial ingredients, especially Cd and Se, during the sintering process. Exhibiting a yellowish white color, the synthesized sample has a large optical bandgap of similar to3.3 eV. The crystal structure, refined by a Rietveld method taking into account the site occupancies and isotropic thermal vibration parameters of Cd and Se, indicates that La2CdO2Se2 belongs to space group P4(2)/nmc. Instability against Cd or Se vacancy formation makes it difficult to generate carriers through vacancies or allo-valent ions doping, leading to electrical insulating properties both in as-prepared and intentionally doped La2CdO2Se2 form.

    DOI: 10.1039/b407852g

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  • Carrier transport of extended and localized states in InGaO_3_(ZnO)_5_

    Kenji Nomura, Hiromichi Ohta, Kazushige Ueda, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Mater. Res. Soc. Symp. Proc.   811   E2.9   2004年

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  • Persistent electronic conduction in 12CaO 7Al2O3 thin films produced by Ar ion implantation: Selective kick-out effect leads to electride thin films

    Masashi Miyakawa, Katsuro Hayashi, Yoshitake Toda, Toshio Kamiya, Masahiro Hiirano, Hideo Hosono

    Mater. Res. Soc. Symp. Proc.   811   E2.7   2004年

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  • Two-Dimensional Electronic Structures in Layered Oxychalcogenide Semiconductors, LaCuOCh (Ch=S, Se, Te) and La2CdO2Se2

    Toshio Kamiya, Kazushige Ueda, Hidenori Hiramatsu, Hiromichi Ohta Masahiro Hirano, Hideo Hosono

    Mater. Res. Soc. Symp. Proc.   811   E4.10   2004年

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  • High-quality epitaxial film growth of transparent oxide semiconductors

    H. Ohta, K. Nomura, H. Hiramatsu, T, Suzuki K, Ueda T. Kamiya, M. Hirano, Y. Ikuhara, H. Hosono

    J. Ceram. Soc. Jpn. Suppl.   112   S602   2004年

  • Quantum beat between two excitonic levels split by spin-orbit interaction in oxychalcogenide LaCuOS

    Hayato Kamioka, Hidenori Hiramatsu Masahiro Hirano, Kazushige Ueda, Toshio Kamiya, Hideo Hosono

    Opt. Lett.   29 ( 14 )   1659 - 1661   2004年

  • Enhancement of third-order optical nonlinearity due to room temperature exciton in layered compounds LaCuOS/Se

    H. Kamioka, H. Hiramatsu, H. Ohta, H. Hirano, K, Ueda, T. Kamiya, H. Hosono

    Appl. Phys. Lett.   84 ( 6 )   879 - 881   2004年

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  • Design of highly conductive n-type amorphous chalcogenide: large mobility and carrier generation in a-In_2_S_3-x_

    Satoru Narushima, Masanori Hiroki Kazushige Ueda Ken-ichi Shimizu Toshio Kamiya Masahiro Hirano, Hideo Hosono

    Phil. Mag. Lett. accepted   84   665   2004年

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  • Room-Temperature Fabrication of Transparent Flexible Thin Film Transistors Using Amorphous Oxide Semiconductor

    Kenji Nomura, Hiromichi Ohta Akihiro, Takagi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Nature   488   432   2004年

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  • Heteroepitaxial growth of wide gap p-type semiconductors: LnCuOCh (Lr=La, Pr and Nd; Ch=S or Se) by reactive solid-phase epitaxy

    H. Hiramatsu, K. Ueda, K. Takafuji, H. Ohta, M. Hirano, T. Kamiya, H. Hosono

    Appl. Phys. A   79   1517   2004年

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  • Degenerate electrical conductive and excitonic photoluminescence properties of epitaxial films of wide gap p-type layered oxychalcogenides, LnCuOCh (Ln = La, Pr and Nd; Ch = S or Se)

    H. Hiramatsu, K. Ueda, K. Takafuji, H. Ohta, M. Hirano, T. Kamiya, H. Hosono

    Appl. Phys. A   79   1521   2004年

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  • Carrier transport of extended and localized states in InGaO_3_(ZnO)_5_

    Kenji Nomura, Hiromichi Ohta, Kazushige Ueda, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Mater. Res. Soc. Symp. Proc.   811   E2.9   2004年

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  • Persistent electronic conduction in 12CaO 7Al2O3 thin films produced by Ar ion implantation: Selective kick-out effect leads to electride thin films

    Masashi Miyakawa, Katsuro Hayashi, Yoshitake Toda, Toshio Kamiya, Masahiro Hiirano, Hideo Hosono

    Mater. Res. Soc. Symp. Proc.   811   E2.7   2004年

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  • Two-Dimensional Electronic Structures in Layered Oxychalcogenide Semiconductors, LaCuOCh (Ch=S, Se, Te) and La2CdO2Se2

    Toshio Kamiya, Kazushige Ueda, Hidenori Hiramatsu, Hiromichi Ohta Masahiro Hirano, Hideo Hosono

    Mater. Res. Soc. Symp. Proc.   811   E4.10   2004年

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  • High-quality epitaxial film growth of transparent oxide semiconductors

    H. Ohta, K. Nomura, H. Hiramatsu, T, Suzuki K, Ueda T. Kamiya, M. Hirano, Y. Ikuhara, H. Hosono

    J. Ceram. Soc. Jpn. Suppl.   112   S602   2004年

  • Quantum beat between two excitonic levels split by spin-orbit interaction in oxychalcogenide LaCuOS

    Hayato Kamioka, Hidenori Hiramatsu Masahiro Hirano, Kazushige Ueda, Toshio Kamiya, Hideo Hosono

    Opt. Lett.   29 ( 14 )   1659 - 1661   2004年

  • Enhancement of third-order optical nonlinearity due to room temperature exciton in layered compounds LaCuOS/Se

    H. Kamioka, H. Hiramatsu, H. Ohta, H. Hirano, K, Ueda, T. Kamiya, H. Hosono

    Appl. Phys. Lett.   84 ( 6 )   879 - 881   2004年

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  • Wide gap p-type degenerate semiconductor: Mg-doped LaCuOSe

    Hidenori Hiramatsu, Kazushige Ueda, Hiromichi Ohta, Masahiro Hirano, Toshio Kamiya, Hideo Hosono

    Thin Solid Films   445 ( 2 )   304 - 308   2003年12月

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    記述言語:英語  

    Hole transport and optical properties were investigated on undoped and Mg-doped LaCuOS1-xSex (x=0-1) epitaxial films. Both electrical conductivity and Hall mobility were found to increase monotonously with increasing Se content in the films. The increase in Hall mobility is considered to be associated with the increase in valence band dispersion. Mg ion doping increased hole concentrations in the undoped films by an order of magnitude to ∼2×1020 cm-3, while Mg doping reduced mobility to merely half that of undoped films. The results suggest that hole scattering due to Mg impurity ions is suppressed by natural modulation doping originating from the layered structure of LaCuOS1-xSe x. Hole concentrations showed no temperature dependence, indicating degenerate conduction. The largest value for conductivity, 140 S cm -1, was obtained with Mg-doped LaCuOSe epitaxial film. Accompanying characteristics included moderately high optical transparency in the visible region and blue photoluminescence. © 2003 Elsevier B.V. All rights reserved.

    DOI: 10.1016/S0040-6090(03)01173-8

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  • Wide gap p-type degenerate semiconductor: Mg-doped LaCuOSe

    H Hiramatsu, K Ueda, H Ohta, M Hirano, T Kamiya, H Hosono

    THIN SOLID FILMS   445 ( 2 )   304 - 308   2003年12月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Hole transport and optical properties were investigated on undoped and Mg-doped LaCuOS1-xSex (x = 0-1) epitaxial films. Both electrical conductivity and Hall mobility were found to increase monotonously with increasing Se content in the films. The increase in Hall mobility is considered to be associated with the increase in valence band dispersion. Mg ion doping increased hole concentrations in the undoped films by an order of magnitude to similar to2 x 10(20) cm(-3), while Mg doping reduced mobility to merely half that of undoped films. The,results suggest that hole scattering due to Mg impurity ions is suppressed by natural modulation doping originating from the layered structure of LaCuOS1-xSex. Hole concentrations showed no temperature dependence, indicating degenerate conduction. The largest value for conductivity, 140 S cm(-1), was obtained with Mg-doped LaCuOSe epitaxial film. Accompanying characteristics included moderately high optical transparency in the visible region and blue photoluminescence. (C) 2003 Elsevier B.V. All rights reserved.

    DOI: 10.1016/S0040-6090(03)01173-8

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  • Frontier of transparent oxide semiconductors

    H Ohta, K Nomura, H Hiramatsu, K Ueda, T Kamiya, M Hirano, H Hosono

    SOLID-STATE ELECTRONICS   47 ( 12 )   2261 - 2267   2003年12月

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    記述言語:英語   出版者・発行元:PERGAMON-ELSEVIER SCIENCE LTD  

    Recent advancements of transparent oxide semiconductors (TOS) toward new frontiers of "oxide electronics" are reviewed based on our efforts, categorized as "novel functional materials", "heteroepitaxial growth techniques", and "device fabrications". Topics focused in this paper are: (1) highly conductive ITO thin film with atomically flat surface, (2) p-type TOS material ZnRh2O4, (3) deep-ultraviolet (DUV) transparent conductive oxide beta-Ga2O3 thin film, (4) electrochromic oxyfuolide NbO2F, (5) single-crystalline films of InGaO3(ZnO)(m) grown by reactive solid-phase epitaxy, (6) p-type semiconductor LaCuOS/Se epitaxial films capable of emitting UV- and purple-light, (7) p-n homojunction based on bipolar CuInO2, (8) transparent FET based on single-crystalline InGaO3(ZnO)(5) films, and (9) UV-light emitting diode based on p-n heterojunction. (C) 2003 Elsevier Ltd. All rights reserved.

    DOI: 10.1016/S0038-1101(03)00208-9

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  • UV-detector based on pn-heteroj unction diode composed of transparent oxide semiconductors, p-NiO/n-ZnO

    H Ohta, M Kamiya, T Kamaiya, M Hirano, H Hosono

    THIN SOLID FILMS   445 ( 2 )   317 - 321   2003年12月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    A transparent ultraviolet (UV)-detector was fabricated using a high-quality pn-heterojunction diode composed of transparent oxide semiconductors, p-type NiO and n-type ZnO, and its UV-response was measured at room temperature. Transparent tri-layered oxide films of ZnO/NiO/ITO were heteroepitaxially grown on an YSZ (1 1 1) substrate by a pulsed-laser-deposition combined with a solid-phase-epitaxy technique and they were processed to fabricate a p-NiO/n-ZnO diode. The diodes exhibited a clear rectifying I-V characteristic with an ideality factor of similar to2 and a forward threshold voltage of similar to1 V. Although the photoresponsivity was fairly weak at the zero bias voltage, it was enhanced up to similar to0.3 AW(-1) by applying a reverse bias of -6 V under an irradiation of 360-nm light, which is comparable to that of commercial devices. (C) 2003 Elsevier B.V. All rights reserved.

    DOI: 10.1016/S0040-6090(03)01178-7

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  • Intrinsic excitonic photoluminescence and band-gap engineering of wide-gap p-type oxychalcogenide epitaxial films of LnCuOCh (Ln=La, Pr, and Nd; Ch=S or Se) semiconductor alloys

    H Hiramatsu, K Ueda, K Takafuji, H Ohta, M Hirano, T Kamiya, H Hosono

    JOURNAL OF APPLIED PHYSICS   94 ( 9 )   5805 - 5808   2003年11月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    The optical spectroscopic properties of layered oxychalcogenide semiconductors LnCuOCh (Ln=La, Pr, and Nd; Ch=S or Se) on epitaxial films were thoroughly investigated near the fundamental energy band edges. Free exciton emissions were observed for all the films between 300 and similar to30 K. In addition, a sharp emission line, which was attributed to bound excitons, appeared below similar to80 K. The free exciton energy showed a nonmonotonic relationship with lattice constant and was dependent on lanthanide and chalcogen ion substitutions. These results imply that the exciton was confined to the (Cu(2)Ch(2))(2-) layer. Anionic and cationic substitutions tune the emission energy at 300 K from 3.21 to 2.89 eV and provide a way to engineer the electronic structure in light-emitting devices. (C) 2003 American Institute of Physics.

    DOI: 10.1063/1.1618932

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  • Electrical and optical properties and electronic structures of LnCuOS (Ln = La similar to Nd)

    K Ueda, K Takafuji, H Hiramatsu, H Ohta, T Kamiya, M Hirano, H Hosono

    CHEMISTRY OF MATERIALS   15 ( 19 )   3692 - 3695   2003年9月

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    記述言語:英語   出版者・発行元:AMER CHEMICAL SOC  

    A series of layered oxysulfides, LnCuOS (Ln = Lasimilar toNd), was studied to examine the influence of these lanthanide ions on their optical and electrical transport properties. PrCuOS and NdCuOS showed wide-gap p-type semiconducting properties similar to LaCuOS, which is a p-type semiconductor with an energy gap of 3.1 eV. A sharp photoluminescence peak near the absorption edge, which originates from excitons, was observed in LnCuOS (Ln = La, Pr, and Nd), indicating that these lanthanide ions do not influence the fundamental optical properties and excitons are confined in (Cu2S2)(2-) sulfide layers sandwiched between (Ln(2)O(2))(2+) oxide layers. On the other hand, CeCuOS showed p-type degenerate semiconducting behavior and its color was black. The electronic structures of LnCuOS (Ln = Lasimilar toNd) were investigated by ultraviolet photoemission spectroscopy and inverse photoemission spectroscopy to understand these differences derived from the lanthanide ions. Although no remarkable difference in the electronic structures was found among LnCuOS (Ln = Lasimilar toNd), only an inverse photoemission spectrum of CeCuOS clearly showed an unoccupied band near the Fermi level in the conduction band. It is considered that the formation of this unoccupied band at the conduction band minimum is responsible for the unique electrical and optical features of CeCuOS.

    DOI: 10.1021/cm030175i

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  • A p-type amorphous oxide semiconductor and room temperature fabrication of amorphous oxide p-n heterojunction diodes

    S Narushima, H Mizoguchi, K Shimizu, K Ueda, H Ohta, M Hirano, T Kamiya, H Hosono

    ADVANCED MATERIALS   15 ( 17 )   1409 - 1413   2003年9月

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    記述言語:英語   出版者・発行元:WILEY-V C H VERLAG GMBH  

    DOI: 10.1002/adma.200304947

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  • High-density electron anions in a nanoporous single crystal: [Ca24Al28O64]4+ (4e-)

    Satoru Matsuishi, Yoshitake Toda, Masashi Miyakawa, Katsuro Hayashi, Toshio Kamiya, Masahiro Hirano, Isao Tanaka, Hideo Hosono

    Science   301 ( 5633 )   626 - 629   2003年8月

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    記述言語:英語  

    We removed ∼100% of clathrated oxygen ions from the crystallographic cages in a single crystal of 12CaO·7Al2O3, leading to the formation of high-density (∼2 x 1021 cm-3) electrons highly localized in the cages. The resulting electron forms a structure that we interpret as an F+ center and migrates throughout the crystal by hopping to a neighboring cage with conductivity ∼100 siemens per centimeter, demonstrating that the encaged electron behaves as an anion. The electron anions couple antiferromagnetically with each other, forming a diamagnetic pair or singlet bipolaron. The resulting [Ca24Al28O64]4+(4e-) may be regarded as a thermally and chemically stable single crystalline "electride".

    DOI: 10.1126/science.1083842

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  • Fabrication and photoresponse of a pn-heterojunction diode composed of transparent oxide semiconductors, p-NiO and n-ZnO

    H Ohta, M Hirano, K Nakahara, H Maruta, T Tanabe, M Kamiya, T Kamiya, H Hosono

    APPLIED PHYSICS LETTERS   83 ( 5 )   1029 - 1031   2003年8月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Transparent trilayered oxide films of ZnO/NiO/indium tin oxide were heteroepitaxially grown on a YSZ (111) substrate by pulsed-laser deposition combined with a solid-phase-epitaxy technique, and were processed to fabricate a p-NiO/n-ZnO diode. The diode exhibited a clear rectifying I-V characteristic with an ideality factor of similar to2 and a forward threshold voltage of similar to1 V. Although the photoresponsivity was fairly weak at the zero-bias voltage, it was enhanced up to similar to0.3 A W-1 through the application of a reverse bias of -6 V under the irradiation of 360 nm light, a value comparable to that of commercial devices. (C) 2003 American Institute of Physics.

    DOI: 10.1063/1.1598624

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  • Room temperature nanocrystalline silicon single-electron transistors

    YT Tan, T Kamiya, ZAK Durrani, H Ahmed

    JOURNAL OF APPLIED PHYSICS   94 ( 1 )   633 - 637   2003年7月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Single-electron transistors operating at room temperature have been fabricated in 20-nm-thick nanocrystalline silicon thin films. These films contain crystalline silicon grains 4 - 8 nm in size, embedded in an amorphous silicon matrix. Our single-electron transistor consists of a side-gated 20 nmx20 nm point contact between source and drain electrodes. By selectively oxidizing the grain boundaries using a low-temperature oxidation and high-temperature argon annealing process, we are able to engineer tunnel barriers and increase the potential energy of these barriers. This forms a "natural" system of tunnel barriers consisting of silicon oxide tissues that encapsulate sub-10 nm size grains, which are small enough to observe room-temperature single-electron charging effects. The device characteristics are dominated by the grains at the point contact. The material growth and device fabrication process are compatible with silicon technology, raising the possibility of large-scale integrated nanoelectronic systems. (C) 2003 American Institute of Physics.

    DOI: 10.1063/1.1569994

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  • Reduction of grain-boundary potential barrier height in polycrystalline silicon with hot H2O-vapor annealing probed using point-contact devices

    T Kamiya, ZAK Durrani, H Ahmed, T Sameshima, Y Furuta, H Mizuta, N Lloyd

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   21 ( 3 )   1000 - 1003   2003年5月

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    記述言語:英語   出版者・発行元:A V S AMER INST PHYSICS  

    The effects of hot H2O-vapor annealing were investigated on local carrier transport properties over a few grain boundaries in polycrystalline silicon. It shows that hot H2O-vapor annealing effectively reduces grain-boundary dangling bonds and the potential barrier height. In addition, it narrows the distribution of the barrier height value significantly. These effects are thought to originate from oxidation in the vicinity of the film surface, and from hydrogenation in the deeper region. Our results suggest that H2O annealing can improve the carrier transport properties by opening up shorter percolation paths and by increasing the effective carrier mobility and density. (C) 2003 American Vacuum Society.

    DOI: 10.1116/1.1570849

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  • Thin-film transistor fabricated in single-crystalline transparent oxide semiconductor

    K Nomura, H Ohta, K Ueda, T Kamiya, M Hirano, H Hosono

    SCIENCE   300 ( 5623 )   1269 - 1272   2003年5月

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    記述言語:英語   出版者・発行元:AMER ASSOC ADVANCEMENT SCIENCE  

    We report the fabrication of transparent field-effect transistors using a single-crystalline thin-film transparent oxide semiconductor, InGaO3(ZnO)(5), as an electron channel and amorphous hafnium oxide as a gate insulator. The device exhibits an on-to-off current ratio of similar to10(6) and a field-effect mobility of similar to80 square centimeters per volt per second at room temperature, with operation insensitive to visible light irradiation. The result provides a step toward the realization of transparent electronics for next-generation optoelectronics.

    DOI: 10.1126/science.1083212

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  • Degenerate p-type conductivity in wide-gap LaCuOS1-xSex (x=0-1) epitaxial films

    H Hiramatsu, K Ueda, H Ohta, M Hirano, T Kamiya, H Hosono

    APPLIED PHYSICS LETTERS   82 ( 7 )   1048 - 1050   2003年2月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Epitaxial films of LaCuOS1-xSex (x=0-1) solid solution were grown on MgO (001) substrates and their electrical and optical properties were examined. Sharp emission due to room-temperature exciton with binding energy of similar to50 meV is observed for all x values. Hall mobility becomes large with an increase in the Se content and it reaches 8.0 cm(2)V(-1)s(-1) in LaCuOSe, a comparable value to that of p-type GaN:Mg. Doping of Mg2+ ions at La3+ sites enhances a hole concentration up to 2.2x10(20) cm(-3), while maintaining the Hall mobility as large as 4.0 cm(2)V(-1)s(-1). Consequently, a degenerate p-type electrical conduction with a conductivity of 140 S cm(-1) was achieved. (C) 2003 American Institute of Physics.

    DOI: 10.1063/1.1544643

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  • Fabrication and characterization of heteroepitaxial p-n junction diode composed of wide-gap oxide semiconductors p-ZnRh2O4/n-ZnO

    H Ohta, H Mizoguchi, M Hirano, S Narushima, T Kamiya, H Hosono

    APPLIED PHYSICS LETTERS   82 ( 5 )   823 - 825   2003年2月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    A reactive solid-phase epitaxy technique was applied to fabricate all-oxide transparent p-n heterojunctions composed of p-ZnRh2O4 and n-ZnO thin layers. Polycrystalline ZnRh2O4 was deposited on a ZnO epitaxial layer at room temperature. Thermal annealing of the bilayer sample at 950 degreesC in air converts the polycrystalline ZnRh2O4 layer to an epitaxial single-crystalline layer. The resultant p-n heterojunctions have an abrupt interface and exhibit a distinct rectifying I-V characteristic. The threshold voltage is similar to2 V, agreeing well with the band-gap energy of ZnRh2O4. It also exhibits photovoltage with UV-light illumination, which originates mainly from the n-ZnO layer. (C) 2003 American Institute of Physics.

    DOI: 10.1063/1.1544436

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  • Fabrication of MISFET exhibiting normally-off characteristics using a single-crystalline InGaO3(ZnO)(5) thin film

    Nomura, K., Ohta, H., Ueda, K., Kamiya, T., Hirano, M., Hosono, H., Ginley, D., Guha, S., Carter, S., Chambers, SA, Droopad, R., Paine, DC, Schlom, DG, Tate, J.

    Crystalline Oxide-Silicon Heterostructures and Oxide Optoelectronics   747   267   2003年

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  • Eelctronic structure of oxygen dangling bond in glassy SiO2: The role of hyperconjugation

    Takenobu Suzuki Linards Skuja Koichi Kajihara Masahiro Hirano, Toshio Kamiya, Hideo Hosono

    Phys. Rev. Lett.   90   186404   2003年

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  • Single-electron charging phenomena in nano/polycrystalline silicon point contact transistors

    H. Mizuta, Y. Furuta, T. Kamiya, Y. T. Ta, Z.A.K. Durrani, K. Nakazato, H. Ahmed

    Solid State Phenomena   93   419   2003年

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  • Effects of Oxidation and Annealing Temperature on Grain Boundary Properties in Polycrystalline Silicon Probed Using Nanometre-Scale Point-Contact Devices

    Toshio Kamiya, Yoshikazu Furuta Yong-Tsong Tan, Z.A.K. Durrani, Hiroshi Mizuta, Haroon Ahmed

    Solid State Phenomena   93   4192   2003年

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  • Fabrication of transparent MISFET using InGaO3(ZnO)5 single crystalline thin film with normally insulating nature

    Kenji Nomura, Hiromichi Ohta, Kazushige Ueda, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Mater. Res. Soc. Symp. Proc.   747   267   2003年

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  • Photo-Induced Insulator-Semiconductor Transition in 12CaO・7Al2O3 (C12A7)

    Katsuro Hayashi, Satoru Matsuishi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    MSR Symposium Proceedings   747   247 - 256   2003年

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  • The fabrication of highly conductive 12CaO・7Al_2_O_3_ thin films containing hydride ions by proton implantation

    M. Miyakawa, K, Hayashi M. Hirano, Y. Toda, T. Kamiya, H. Hosono

    Adv. Mater.   15 ( 13 )   1100 - 1103   2003年

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  • X-ray Amorphous P-type Conductive Oxide; ZnRh_2_O_4_

    Satoru Narushima, Hiroshi Mizoguchi Hiromichi Ohta Masahiro Hirano, Ken-ichi Shimizu Kazushige Ueda, Toshio Kamiya, Hideo Hosono

    Mater. Res. Soc. Symp. Proc.   747   235   2003年

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  • Thin film fabrication of 12CaO・7Al2O3 with zeolitic structure

    Y. Toda, M, Miyakawa K, Hayashi T. Kamiya, M. Hirano, H. Hosono

    Thin Solid Films   445   309 - 312   2003年

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  • High-Density Electron Anions in a Nanoporous Single Crystal: [Ca24Al28O64]4+(e-)4

    Satoru Matsuishi, yoshitake toda, masashi miyakawa, KATSURO HAYASHI, TOSHIO KAMIYA, Masahiro Hirano, Isao Tanaka, HIDEO HOSONO

    Science   301 ( 5633 )   626 - 629   2003年

  • Photo-induced insulator-semiconductor transition in 12CaO center dot 7Al(2)O(3) (C12A7)

    K Hayashi, S Matsuishi, T Kamiya, M Hirano, H Hosono

    CRYSTALLINE OXIDE-SILICON HETEROSTRUCTURES AND OXIDE OPTOELECTRONICS   747   247 - 255   2003年

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    記述言語:英語   出版者・発行元:MATERIALS RESEARCH SOCIETY  

    We report the first electronic conduction in main group metal oxides (MGOs) or light-metal oxides, which are represented by alkaline-earth oxides, alumina, and silica. They are believed to be never converted to an electronic conductor. One of the MGOs, 12CaO.7Al(2)O(3) (C12A7), has optical transparency, but electrical insulation limits intrinsic form. It is characterized by sub-nanometer sized cages in the lattice framework. Hydride ion, H- was incorporated into the cage by a thermal treatment of C12A7 single crystals or ceramics in hydrogen atmosphere. The product, C12A7:H, was colorless, transparent and a good insulator having electronic conductivity less than 10(-10) S.cm(-1). We found that the C12A7:H exhibits a coloration of yellowish green corresponding to optical absorptions at 2.8 and 0.4 eV with simultaneous conversion into an electronic conductor with 0.3 S.cm(-1) at 300 K upon a irradiation of ultraviolet light. The conductive state continued even after the irradiation was stopped. Inversion to the insulator occurred when heated more than similar to320degreesC accompanying with rapid decay of the optical absorptions. When temperature rose above 550degreesC, H-2 gas was released from the sample and the photosensitivity was lost. We consider that high concentration of F+-like centers are created by photo-released electrons from the IF anions being captured by empty cages. Further, a migration of the electrons at the F+-like centers may be responsible for the conduction. The visible light absorption loss is estimated to be only 1% for a 200 nm thick conductive C12A7:H films. The present properties provides novel applications such as direct optical writing of conducting wires on insulating transparent media.

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  • Transparent MISFETs using homologous compounds, RMO3(ZnO)m (R=In, Lu; M= In, Ga; m=integer) single crystalline thin films

    K. Nomura, H. Ohta, K, Ueda, T. Kamiya, M. Hirano, H. Hosono

    Thin Solid Films   445   322 - 326   2003年

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  • Thin film fabrication of 12CaO・7Al2O3 with zeolitic structure

    Y. Toda, M, Miyakawa K, Hayashi T. Kamiya, M. Hirano, H. Hosono

    Thin Solid Films   445   309 - 312   2003年

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  • High Density Electron Anion in a Nano-porous Single Crystal: [Ca_24_Al_28_O_64_]^4+^(4e^-^)

    Satoru Matsuishi, Yoshitake Toda, Masashi Miyakawa Katsuro, Hayashi Toshio Kamiya Masahiro Hirano Isao Tanaka, Hideo Hosono

    Science   301 ( 5633 )   626 - 629   2003年

  • The fabrication of highly conductive 12CaO・7Al_2_O_3_ thin films containing hydride ions by proton implantation

    M. Miyakawa, K, Hayashi M. Hirano, Y. Toda, T. Kamiya, H. Hosono

    Adv. Mater.   15 ( 13 )   1100 - 1103   2003年

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  • X-ray Amorphous P-type Conductive Oxide; ZnRh_2_O_4_

    Satoru Narushima, Hiroshi Mizoguchi Hiromichi Ohta Masahiro Hirano, Ken-ichi Shimizu Kazushige Ueda, Toshio Kamiya, Hideo Hosono

    Mater. Res. Soc. Symp. Proc.   747   235   2003年

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  • Fabrication of transparent MISFET using InGaO3(ZnO)5 single crystalline thin film with normally insulating nature

    Kenji Nomura, Hiromichi Ohta, Kazushige Ueda, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    Mater. Res. Soc. Symp. Proc.   747   267   2003年

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  • Eelctronic structure of oxygen dangling bond in glassy SiO2: The role of hyperconjugation

    Takenobu Suzuki Linards Skuja Koichi Kajihara Masahiro Hirano, Toshio Kamiya, Hideo Hosono

    Phys. Rev. Lett.   90   186404   2003年

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  • Single-electron charging phenomena in nano/polycrystalline silicon point contact transistors

    H. Mizuta, Y. Furuta, T. Kamiya, Y. T. Ta, Z.A.K. Durrani, K. Nakazato, H. Ahmed

    Solid State Phenomena   93   419   2003年

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  • Effects of Oxidation and Annealing Temperature on Grain Boundary Properties in Polycrystalline Silicon Probed Using Nanometre-Scale Point-Contact Devices

    Toshio Kamiya, Yoshikazu Furuta Yong-Tsong Tan, Z.A.K. Durrani, Hiroshi Mizuta, Haroon Ahmed

    Solid State Phenomena   93   4192   2003年

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  • Photo-Induced Insulator-Semiconductor Transition in 12CaO・7Al2O3 (C12A7)

    Katsuro Hayashi, Satoru Matsuishi, Toshio Kamiya, Masahiro Hirano, Hideo Hosono

    MSR Symposium Proceedings   747   247 - 256   2003年

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  • High-density electron anions in a nanoporous single crystal: [Ca24Al28O64](4+)(4e(-))

    Matsuishi, S., Toda, Y., Miyakawa, M., Hayashi, K., Kamiya, T., Hirano, M., Tanaka, I., Hosono, H.

    Science   301 ( 5633 )   626 - 629   2003年

  • Photo-induced insulator-semiconductor transition in 12CaO.7Al2O3 (C12A7)

    Katsuro Hayashi Satoru Matsuishi Tohsio Kamiya Masahiro Hirano, Hideo Hosono

    Mater. Res. Soc. Symp. Proc.   747   247   2003年

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  • Transparent MISFETs using homologous compounds, RMO3(ZnO)m (R=In, Lu; M= In, Ga; m=integer) single crystalline thin films

    K. Nomura, H. Ohta, K, Ueda, T. Kamiya, M. Hirano, H. Hosono

    Thin Solid Films   445   322 - 326   2003年

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  • Light-induced conversion of an insulating refractory oxide into a persistent electronic conductor

    K Hayashi, S Matsuishi, T Kamiya, M Hirano, H Hosono

    NATURE   419 ( 6906 )   462 - 465   2002年10月

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    記述言語:英語   出版者・発行元:NATURE PUBLISHING GROUP  

    Materials that are good electrical conductors are not in general optically transparent, yet a combination of high conductivity and transparency is desirable for many emerging opto-electronic applications(1-6). To this end, various transparent oxides composed of transition or post-transition metals (such as indium tin oxide) are rendered electrically conducting by ion doping(1-6). But such an approach does not work for the abundant transparent oxides of the main-group metals. Here we demonstrate process by which the transparent insulating oxide 12CaO.7Al(2)O(3) (refs 7-13) can be converted into an electrical conductor. H- ions are incorporated into the subnanometre-sized cages of the oxide by a thermal treatment in a hydrogen atmosphere; subsequent irradiation of the material with ultraviolet light results in a conductive state that persists after irradiation ceases. The photo-activated material exhibits moderate electrical conductivity (similar to0.3 S cm(-1)) at room temperature, with visible light absorption losses of only one per cent for 200-nm-thick films. We suggest that this concept can be applied to other main-group metal oxides, for the direct optical writing of conducting wires in insulating transparent media and the formation of a high-density optical memory.

    DOI: 10.1038/nature01053

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  • Control of grain-boundary tunneling barriers in polycrystalline silicon

    T Kamiya, ZAK Durrani, H Ahmed

    APPLIED PHYSICS LETTERS   81 ( 13 )   2388 - 2390   2002年9月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    The effect of oxidation and annealing on the electrical properties of grain boundaries (GBs) in heavily doped polycrystalline silicon is characterized using bulk films and 30-nm-wide nanowires. Oxidation at 650-750 degreesC selectively oxidizes the GBs. Subsequent annealing at 1000 degreesC increases the associated potential barrier height and resistance. These observations can be explained by structural changes in the Si-O network at the GBs and the competition between surface oxygen diffusion and oxidation from the GBs in the crystalline grains. A combination of oxidation and annealing may provide a method that can better control the GB potential barriers. (C) 2002 American Institute of Physics.

    DOI: 10.1063/1.1509853

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  • Single-electron charging in nanocrystalline silicon point-contacts

    ZAK Durrani, T Kamiya, YT Tan, H Ahmed, N Lloyd

    MICROELECTRONIC ENGINEERING   63 ( 1-3 )   267 - 275   2002年8月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Room-temperature single-electron effects are observed in 20 nm x 20 nm point-contact transistors fabricated in nanocrystalline silicon thin films. The films are deposited using low-temperature plasma enhanced chemical vapour deposition and contain grains typically 4-8 nm in size. Low-temperature oxidation and high-temperature annealing is used to oxidise selectively the grain boundaries. Single-electron effects occur in crystalline silicon grains isolated by tunnel barriers at the grain boundaries. The thermal processing improves the grain-boundary tunnel barrier and increases the maximum temperature for single-electron effects. Similar effects are also observed in devices fabricated in low-pressure chemical vapour deposited polysilicon films. (C) 2002 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0167-9317(02)00602-0

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  • Holographic writing of volume-type microgratings in silica glass by a single chirped laser pulse

    K Kawamura, M Hirano, T Kamiya, H Hosono

    APPLIED PHYSICS LETTERS   81 ( 6 )   1137 - 1139   2002年8月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Refractive-index-modulated volume-type gratings were holographically encoded inside pure SiO2 glass plates by a single chirped (0.5-5 ps duration) laser pulse generated from a mode-locked Ti:sapphire laser (wavelength similar to800 nm, emission pulse duration similar to100 fs). Scanning-electron- and confocal-optical-microscopic observations revealed that microgratings were formed inside the sample at a depth of similar to5 mm from the top surface. Also, inside the SiO2 glass, three-dimensional periodic arrays of the grating and crossed-grating structures were fabricated. The present technique is a fast method that is applicable not only for encoding volume-type gratings inside all nonphotosensitive transparent dielectric materials, but also for fabricating optical devices such as distributed-feedback lasers and multilayered memories. (C) 2002 American Institute of Physics.

    DOI: 10.1063/1.1497997

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  • Characterization of tunnel barriers in polycrystalline silicon point-contact single-electron transistors

    Y Furuta, H Mizuta, K Nakazato, T Kamiya, YT Tan, ZAK Durrani, K Taniguchi

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   41 ( 4B )   2675 - 2678   2002年4月

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    記述言語:英語   出版者・発行元:JAPAN SOC APPLIED PHYSICS  

    Potential barrier properties of grain boundaries in polycrystalline silicon have been studied using nanometer-scale point-contact transistors. The devices, with channel length and width ranging from 30 nm to 50 nm, were fabricated in a 50-nm-thick film. We found that grain boundaries oxidized at 100degreesC acted as tunneling barriers, resulting in the appearance of single-electron charging effects. However, potential barrier heights estimated for oxidized grain boundaries are still low, less than 90 meV, and barrier thickness is as large as similar to 4 nm. The grain boundary oxides appear to be silicon sub-oxides which are formed by oxygen diffusion into grain boundaries.

    DOI: 10.1143/JJAP.41.2675

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  • Modification of the tunneling barrier in a nanocrystalline silicon single-electron transistor

    T. Kamiya, Y.T. Ta, Z.A.K. Durrani, H. Ahmed

    J. Non-Cryst. Solids   299/302 ( Pt.A )   405 - 410   2002年

  • P型アモルファス酸化物の発見とアモルファス酸化物PN接合の形成

    鳴島暁, 溝口拓, 折田政寛, 太田裕道, 平野正浩, 神谷利夫, 清水健一, 細野秀雄

    第29回アモルファス物質の物性と応用セミナーテキスト   2002年

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  • 英国ケンブリッジ大学における協同研究

    神谷利夫

    プラズマエレクトロニクス分科会会報   36   14   2002年

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  • 孤独な(?)材料屋の英国ケンブリッジ留学記

    神谷利夫

    現代化学   376   47   2002年

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  • 英国ケンブリッジ滞在記

    神谷利夫

    東工大クロニクル   366   11   2002年

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  • 英国ケンブリッジ滞在記

    神谷利夫

    セラミックス   37   120   2002年

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  • Modification of the tunneling barrier in a nanocrystalline silicon single-electron transistor

    T. Kamiya, Y.T. Ta, Z.A.K. Durrani, H. Ahmed

    J. Non-Cryst. Solids   299/302 ( Pt.A )   405 - 410   2002年

  • Structure and transport properties of p-type polycrystalline silicon fabricated from fluorinated source gas

    T Kamiya, K Nakahata, K Ro, Shimizu, I

    THIN SOLID FILMS   394 ( 1-2 )   230 - 236   2001年8月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    P-type polycrystalline silicon (poly-Si) thin films are fabricated from SiF4, H-2 and SiH4 gas mixtures by plasma-enhanced chemical vapor deposition using in situ doping of B2H6 or BF3. Relationships between deposition condition, film structure and transport properties are focused on. In addition, ionization efficiency is discussed in connection with deposition condition and with B and F concentrations. When poly-Si is doped with B, crystal fractions are lower for 300 degreesC-grown films than for 200 degreesC-grown films. High B doping results in (220) preferential orientation even when no fluorinated gas is used in the gas source. These trends are very similar among films prepared using different doping sources, i.e. B2H6 and BF3. When SiF4 is used, the B ionization efficiency is very low, similar to 10%. It is improved to similar to 50% by removing SiF4 from the gas source. This low ionization efficiency shows good correlation with atomic concentration ratio of B/F in the poly-Si films, suggesting that some high. incorporation of F compared to B inhibits the ionization of B. Using SiH4, H-2 and BF3 without SiF4, highly (220) oriented, large grain poly-Si is obtained and it exhibits large mobility of 3.7 cm(2)/Vs. (C) 2001 Elsevier Science B.V. All rights reserved.

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  • Growth, structure, and transport properties of thin (&gt; 10 nm) n-type microcrystalline silicon prepared on silicon oxide and its application to single-electron transistor

    T Kamiya, K Nakahata, YT Tan, ZAK Durrani, Shimizu, I

    JOURNAL OF APPLIED PHYSICS   89 ( 11 )   6265 - 6271   2001年6月

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    記述言語:英語   出版者・発行元:AMER INST PHYSICS  

    Microcrystalline silicon (muc-Si:H) thin films were prepared at 300 degreesC on glass. Their structure and transport properties were studied in a wide range of film thickness ranging from 10 nm to 1 mum. The crystal fraction increases monotonously from similar to 64% to similar to 100% as film thickness increases. Electron mobility first increases with increasing film thickness at thicknesses smaller than 50 nm but saturates at larger thickness. This mobility behavior is explained by percolation transport through crystalline grains. These results are different from those obtained with preferentially oriented polycrystalline silicon films. It is related to the difference in the microstructure evolution in which subsequent film growth is influenced by the growth surface structure. A single-electron transistor fabricated in 30-nm-thick muc-Si:H exhibits Coulomb blockade effects at 4.2 K. This result indicates that amorphous phases which exist between crystalline grains behave as tunnel barrier for electrons. (C) 2001 American Institute of Physics.

    DOI: 10.1063/1.1368164

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  • Microstructure control of very thin polycrystalline silicon layers on glass substrate by plasma enhanced CVD

    D Matsuura, T Kamiya, CM Fortmann, Simizu, I

    SOLAR ENERGY MATERIALS AND SOLAR CELLS   66 ( 1-4 )   305 - 311   2001年2月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Very thin ( &lt; 100 nm) polycrystalline silicon (poly-Si) thin films were deposited on glass by plasma enhanced chemical vapor deposition (PECVD) using SiF4 and H-2 gas mixtures. Film structures, i.e. crystal fraction, nucleus density and/or grain size, were controlled by an alternating deposition and etching technique. By this technique, an improved crystal fraction of 52% was successfully obtained for a 50 nm-thick him with a grain diameter of &lt;similar to&gt; 37 nm. By adopting a two-step-growth (TSG) technique in which these thin layers are used as seeds, larger size grains (220 nm in diameter) were obtained in 290 nm-thick films. Also, preferential orientation was observed in the RHEED pattern of films grown by the TSG. (C) 2001 Published by Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0927-0248(00)00188-4

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  • In situ hydrogen plasma treatment for improved transport of (400) oriented polycrystalline silicon films

    A Suemasu, K Nakahata, K Ro, T Kamiya, CM Fortmann, Shimizu, I

    SOLAR ENERGY MATERIALS AND SOLAR CELLS   66 ( 1-4 )   313 - 320   2001年2月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Polycrystalline silicon (poly-Si) films were deposited on glass by very high-frequency (100 MHz) plasma enhanced chemical vapor deposition from a gaseous mixture of SiF4 and H-2 with small amounts of SiH4. (220) oriented films prepared at small SiF4/H-2 ratios ( &lt; 30/40 seem) showed intrinsic transport properties of poly-Si. However, the room temperature dark conductivity (&lt;sigma&gt;(d)) of the (400) oriented film was very high for intrinsic poly-Si, 7.2 x 10(-4) S/cm. This conductivity exhibited a T-1/4 behavior, suggesting a high defect density at the grain boundaries. It was found that in situ hydrogen plasma treatment successfully produced (400) oriented poly-Si with a reasonably low sigma (d) of 4.5 x 10(-7) S/cm and a good photoconductivity of 1.3 x 10(-4)S/cm. (C) 2001 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0927-0248(00)00189-6

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  • Improved p-i-n solar cells structure for narrow bandgap a-Si : H prepared by Ar* chemical annealing at high temperatures

    T Komaru, H Sato, W Futako, T Kamiya, CM Fortmann, Shimizu, I

    SOLAR ENERGY MATERIALS AND SOLAR CELLS   66 ( 1-4 )   329 - 335   2001年2月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Improved device structures including transparent conductive oxide (TCO) and p-layers were studied for better photovoltaic performance with narrow bandgap a-Si:H solar cells prepared in p-I-n sequence on TCO-coated glass. The narrow bandgap (E-g less than or equal to 1.58 eV) a-Si:H i-layers used here were prepared by an Ar* chemical annealing technique at temperatures over 280 degreesC. Ga-doped ZnO (GZO) deposited at high substrate temperatures (250 degreesC) and microcrystalline F-layers (muc-Si:H(B)) showed improved resistance to high temperatures and Ar* bombardment-induced degradation. By employing p/i buffer layer along with these TCO and p-layers, the open-circuit voltage was increased from 0.36 to 0.56 V and the fill factor increased from 24 to 60%. In addition, enhanced red-response was observed on the narrow bandgap (E-g = 1.52 eV) a-Si:H solar cells. (C) 2001 Elsevier Science B,V. All rights reserved.

    DOI: 10.1016/S0927-0248(00)00191-4

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  • Free carrier optical absorption used to analyze the electrical properties of polycrystalline silicon films formed by plasma enhanced chemical vapor deposition

    T Watanabe, T Sameshima, K Nakahata, T Kamiya, Shimizu, I

    THIN SOLID FILMS   383 ( 1-2 )   248 - 250   2001年2月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    The electrical properties of (400) oriented polycrystalline silicon films fabricated at 300 degreesC by 100-MHz plasma enhanced chemical vapor deposition from gaseous mixture of SiF4/H-2/SiH4 are reported. A double layered structure of phosphorus-doped poly-Si/H/F film (200 nm)/undoped poly-Si/H/F film was adopted to research the changes in electrical properties in the doped layer induced by the undoped layer thickness. The carrier mobility in the crystalline grain of the doped layer, analyzed by free carrier optical absorption, increased from 10 to 35 cm(2)/Vs as the undoped film thickness increased from 0 to 1000 nm. The carrier density in the crystalline grain was 2.5 X 10(20) cm(-3) for each sample. The grain properties in the doped layer improved as the undoped film thickness increased. (C) 2001 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0040-6090(00)01793-4

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  • High-quality narrow gap (similar to 1.52 eV) a-Si : H with improved stability fabricated by excited inert gas treatment

    H Sato, K Fukutani, W Futako, T Kamiya, CM Fortmann, Shimizu, I

    SOLAR ENERGY MATERIALS AND SOLAR CELLS   66 ( 1-4 )   321 - 327   2001年2月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Narrow band gap (similar to 1.5 eV) hydrogenated amorphous silicon (a-Si:H) were fabricated by a chemical annealing technique using noble gases (Ar, He, Ne). Although hydrogen content in the film was reduced to similar to 1 atm% and band gap was decreased to 1.52 eV, high photoconductivity and large mobility-lifetime products were maintained and no marked changes in the short-range structure was found. Using these narrow band gap a-Si:H for photoactive layer in n-i-p solar cells, reasonable photovoltaic performances were obtained, i.e., open-circuit voltage of 0.71 V and fill factor of 57%. Also enhanced red response was observed with the 1.58 eV band gap i-layer solar cell prepared on textured substrate. (C) 2001 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0927-0248(00)00190-2

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  • Stability of a-Si : H solar cells deposited by Ar-treatment or by ECR techniques

    K Ohkawa, S Shimizu, H Sato, T Komaru, W Futako, T Kamiya, CM Fortmann, Shimizu, I

    SOLAR ENERGY MATERIALS AND SOLAR CELLS   66 ( 1-4 )   297 - 303   2001年2月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Stability against light soaking was studied for amorphous silicon (a-Si:H) solar cells using three different i-layers; (a) device-quality a-Si:H (standard a-Si:H) with bandgap of 1.75 eV, (b) narrow bandgap (1.55eV) a-Si:H fabricated by Ar* chemical annealing and (c) a-Si:H(Cl) fabricated from SiH2Cl2. Both the narrow bandgap a-Si:H and the a-Si:H(Cl) solar cells showed much improved stability than that of the standard a-Si:H solar cells: e.g., fill factor of the narrow bandgap a-Si:H cell only slightly decreased from 56% to 53%, while that of the standard a-Si:H cell degraded from 62% to 51%. In addition, mobility-lifetime products of the a-Si:H(Cl) cell also exhibited improved stability than that of the standard a-Si:H solar cell. (C) 2001 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0927-0248(00)00187-2

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  • Properties of amorphous silicon solar cells fabricated from SiH_2_Cl_2_

    Satoshi Shimizu, Kojiro Okawa, Toshio Kamiya, C.M. Fortman, Isamu Shimizu

    Solar Energy Materials and Solar Cells   66 ( 1/4 )   289 - 295   2001年

  • ナノ結晶シリコン単電子トランジスタ

    神谷利夫, Y.T.Tan, Z.A.K.Durrani, H.Ahmed

    第28回アモルファス物質の物性と応用セミナーテキスト   31   2001年

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  • Single-electron devices and nanostructures in silicon

    T. Kamiya, Y.T. Ta, Z.A.K. Durrani, H. Ahmed

    Proc. 7th Internaational Symposium on Advanced Physical Fields   16   2001年

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  • Carrier transport in ultra-thin nano/polycrystalline silicon films and nanowires

    T. Kamiya, Y.T. Ta, Y. Furuta, H.Mizuta, Z.A.K. Durrani, H. Ahmed

    Mater. Res. Soc. Symp. Proc.   664   A16.2.1   2001年

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  • Carrier transport across a few grain boundaries in highly doped polycrystalline silicon

    Yoshikazu Furuta, Hiroshi Mizuta Kazuo Nakazato Yong, Tsong Tan, Toshio Kamiya Zahid, A.K. Durrani, Haroon Ahmed, Kenji Taniguchi

    Jpn. J. Appl. Phys.   40 ( 6B )   L615 - L617   2001年

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  • Single-electron effects in side-gated point contacts fabricated in low-temperature deposited nanocrystalline silicon films

    Y.T. Ta, T. Kamiya, Z.A.K. Durrani, H. Ahmed

    Appl. Phys. Lett.   78 ( 8 )   1083 - 1085   2001年

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  • Improvement of transport properties for polycrystalline silicon prepared by plasma enhanced chemical vapor deposition

    Toshio Kamiya, Atsushi, Suemasu Tadashi Watanabe Toshiyuki Sameshima, Isamu Shimizu

    Appl. Phys. A   73   151   2001年

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  • Properties of amorphous silicon solar cells fabricated from SiH_2_Cl_2_

    Satoshi Shimizu, Kojiro Okawa, Toshio Kamiya, C.M. Fortman, Isamu Shimizu

    Solar Energy Materials and Solar Cells   66 ( 1/4 )   289 - 295   2001年

  • Single-electron devices and nanostructures in silicon

    T. Kamiya, Y.T. Ta, Z.A.K. Durrani, H. Ahmed

    Proc. 7th Internaational Symposium on Advanced Physical Fields   16   2001年

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  • Carrier transport in ultra-thin nano/polycrystalline silicon films and nanowires

    T. Kamiya, Y.T. Ta, Y. Furuta, H.Mizuta, Z.A.K. Durrani, H. Ahmed

    Mater. Res. Soc. Symp. Proc.   664   A16.2.1   2001年

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  • Carrier transport across a few grain boundaries in highly doped polycrystalline silicon

    Yoshikazu Furuta, Hiroshi Mizuta Kazuo Nakazato Yong, Tsong Tan, Toshio Kamiya Zahid, A.K. Durrani, Haroon Ahmed, Kenji Taniguchi

    Jpn. J. Appl. Phys.   40 ( 6B )   L615 - L617   2001年

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  • Single-electron effects in side-gated point contacts fabricated in low-temperature deposited nanocrystalline silicon films

    Y.T. Ta, T. Kamiya, Z.A.K. Durrani, H. Ahmed

    Appl. Phys. Lett.   78 ( 8 )   1083 - 1085   2001年

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  • Improvement of transport properties for polycrystalline silicon prepared by plasma enhanced chemical vapor deposition

    Toshio Kamiya, Atsushi, Suemasu Tadashi Watanabe Toshiyuki Sameshima, Isamu Shimizu

    Appl. Phys. A   73   151   2001年

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  • High electric field photocurrent of Vidicon and diode devices using wide band gap a-Si : H prepared with intentional control of silicon network by chemical annealing

    W Futako, T Sugawara, T Kamiya, Shimizu, I

    JOURNAL OF ORGANOMETALLIC CHEMISTRY   611 ( 1-2 )   525 - 530   2000年10月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Wide band gap amorphous silicon (a-Si:H) were prepared by a chemical annealing (CA) technique, in which intermittent hydrogen plasma treatment was repeated during the deposition of a-Si:H. Electronic transport in the wide band gap a-Si:H at high electric field was investigated systematically using devices with Vidicon-type or n-i-p diode structures. The Vidicon-type image pick-up tube exhibited the potential to produce high resolution images, demonstrating that the wide-gap a-Si:H prepared by the CA had superior properties suitable for imaging devices. The electric fields as high as &gt; 8 x 10(5) V cm(-1) were applied successfully on the n-i-p devices using a-SiN:H for electron blocking contact. However, this electric field was not sufficient to invoke avalanche multiplication. (C) 2000 Elsevier Science S.A. All nights reserved.

    DOI: 10.1016/S0022-328X(00)00399-5

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  • Structural properties of polycrystalline silicon films having varied textures fabricated with intentional control of surface reactions using SiF4/H-2/SiH4 mixing gas

    T Kamiya, K Nakahata, CM Fortmann, Shimizu, I

    JOURNAL OF NON-CRYSTALLINE SOLIDS   266 ( Pt.A )   120 - 124   2000年5月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Polycrystalline silicon (poly-Si) films were fabricated from SiF4 and H-2 gas mixtures by very high frequency (100 MHz) plasma enhanced chemical vapor deposition. The relationship between the deposition condition and film orientation was studied over a wide range of growth temperatures and SiF4/H-2 gas flows. We found that (400) oriented films were obtained at the larger SiF4/H-2 ratios and at temperatures higher than 150 degrees C while (220) oriented films were obtained at other SiF4/H-2 flow ratios. The optimized SiF4/H-2 ratio far (400) oriented growth shifts to smaller ratios as the growth temperature decreases. (220) preferential growth is observed at high temperatures independent of the SiF4/H-2 flow ratio. A phenomenological explanation is proposed for these preferential growths. We conclude that (220) growth requires larger thermal energy compared to those of (400) and randomly oriented growths. also, the larger high Hz mixing inhibits the (400) growth. (C) 2000 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0022-3093(99)00765-6

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  • The structure of 1.5-2.0 eV band gap amorphous silicon films prepared by chemical annealing

    W Futako, T Kamiya, CM Fortmann, Shimizu, I

    JOURNAL OF NON-CRYSTALLINE SOLIDS   266 ( Pt.A )   630 - 634   2000年5月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Structural properties of band gap tuned (1.5-2.0 eV) hydrogenated amorphous silicon were investigated. The short range order associated with the local silicon-silicon bonding was measured by X-ray, Raman spectroscopy, optical absorption spectrum and weight density analysis. The atomic size and/or the distance between nearest neighbor silicon atoms did not appear to change as a function of the hydrogen content or the band gap. The short range order, the silicon bond length and bond angle distributions, were invariant as the band gap varies from 1.5-2.0 eV. Other structural properties were also investigated. The hydrogen thermal desorption spectrum and the infra-red absorption spectrum were also measured. While, the hydrogen evolves from largest amount of hydrogen and/or high Si-PI, content materials at lower temperatures, this feature is not correlated with the band gap. The band gap was strongly correlated to the Si-H-2 density determined by the infra-red absorption analysis (correlation coefficient &gt; 0.92). (C) 2000 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0022-3093(99)00756-5

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  • Microstructure and photovoltaic properties of low temperature polycrystalline silicon solar cells fabricated by VHF-GD CVD using fluorinated gas

    K Ro, K Nakahata, T Kamiya, CM Fortmann, Shimizu, I

    JOURNAL OF NON-CRYSTALLINE SOLIDS   266 ( Pt.B )   1088 - 1093   2000年5月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Polycrystalline silicon (poly Si) photovoltaic devices were fabricated from SiF4, H-2 and SiH4 gas mixtures using very high frequency (100 MHz) chemical vapor deposition (VHF CVD). The gas flow rate and the SiF4/H-2/SiH4 ratio were optimized for low temperature, device quality poly-Si growth. The n-layers used for the n/i/Pt Schottky diodes and n/i/p solar cells were deposited at 300 degrees C and i-layers at 100-300 degrees C to provide a seed layer for subsequent i-layer growth. The open circuit voltage increased with i-layer growth temperature in the n/i/Pt Schottky diodes. However, the optimal fill factor (FF) occurred at a similar to 200 degrees C i-layer growth temperature. The FF decreased at temperatures &gt;250 degrees C. The best solar cells had short circuit: current of 24 mA/cm(2) and energy conversion efficiency of 6.22%. Also, it was possible to prepare high efficiency solar cells at relatively high growth rates, 0.5 nm/s, by optimizing the SiH4 flow rate. (C) 2000 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0022-3093(99)00908-4

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  • Anisotropic carrier transport in preferentially oriented polycrystalline silicon films fabricated by very-high-frequency plasma enhanced chemical vapor deposition using fluorinated source gas

    K Nakahata, T Kamiya, CM Fortmann, Shimizu, I, H Stuchlikova, A Fejfar, J Kocka

    JOURNAL OF NON-CRYSTALLINE SOLIDS   266 ( Pt.A )   341 - 346   2000年5月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Structural and transport anisotropy of low temperature polycrystalline silicon (poly-Si) were studied. Poly-Si films with (220) preferential orientation were fabricated by very-high-frequency chemical vapor deposition from SiF4 and H-2 mixtures. The crystallite size perpendicular to the film surface increased and orientation fluctuation decreased with increasing growth temperature (T-s) as inferred using X-ray diffraction. This indicated that a columnar structure was developed with increasing T-s. The 150 degrees C T-s films had smaller grain sizes perpendicular to the film surface and no transport anisotropy was observed. The films fabricated at T-s, &gt; 200 degrees C had larger grains perpendicular to the film surface. The conductivity perpendicular to the film surface was five times larger than parallel. This transport anisotropy originates from an anisotropic grain structure. In addition, ac conductivity analysis detected the presence of a thin conductive layer on the film surface resulting from impurity in-diffusion. (C) 2000 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0022-3093(99)00722-X

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  • Growth and Transport Property of Polycrystalline Silicon Fabricated with Intentional Orientation Control on Glass

    Toshio Kamiya, Kouichi Nakahata Toshiyuki Sameshima Kazuyoshi Ro Atsushi, Suemasu Charles M. Fortmann, Isamu Shimi

    Key Engineering Materials   181   125   2000年

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  • Transport properties of polycrystalline silicon with various textures and microstructures

    Toshio Kamiya, Kouichi Nakahata Atsushi, Suemasu Kazuyoshi Ro Charles M. Fortmann, Isamu Shimizu

    Mater. Res. Soc. Symp. Proc.   609   A27.1   2000年

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  • Fabrication of Polycrystalline Silicon Films from SiF_4_/H_2_/SiH_4_ Mixture Gases Using Very High Frequency Plasma Enhanced Chemical Vapor Deposition with In Situ Plasma Diagnostics and Their Structural Properties

    K. Nakahata, K.Ro, A.Suemasu, T. Kamiya, C.M.Fortmann, I. Shimizu

    Jpn. J. Appl. Phys.   39 ( 6A )   3294 - 3301   2000年

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  • Optical absorption and Hall effect in (220) and (400) oriented polycrystalline silicon films

    T. Kamiya, K, Nakahata T, Sameshima T, Watanabe, T, Mouri, I. Shimizu

    J. Appl. Phys.   88 ( 6 )   3310 - 3315   2000年

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  • Transparent Conductive Oxide for Solar Cells Having Resistance to High Density Hydrogen Plasma and/or High Temperature

    Toshio Kamiya, Takashi Komaru, Satoshi Shimizu Mika Kanbe Charles M. Fortmann, Isamu Shimizu

    Key Engineering Materials   181   125   2000年

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  • Growth and Transport Property of Polycrystalline Silicon Fabricated with Intentional Orientation Control on Glass

    Toshio Kamiya, Kouichi Nakahata Toshiyuki Sameshima Kazuyoshi Ro Atsushi, Suemasu Charles M. Fortmann, Isamu Shimi

    Key Engineering Materials   181   125   2000年

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  • Transport properties of polycrystalline silicon with various textures and microstructures

    Toshio Kamiya, Kouichi Nakahata Atsushi, Suemasu Kazuyoshi Ro Charles M. Fortmann, Isamu Shimizu

    Mater. Res. Soc. Symp. Proc.   609   A27.1   2000年

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  • Fabrication of Polycrystalline Silicon Films from SiF_4_/H_2_/SiH_4_ Mixture Gases Using Very High Frequency Plasma Enhanced Chemical Vapor Deposition with In Situ Plasma Diagnostics and Their Structural Properties

    K. Nakahata, K.Ro, A.Suemasu, T. Kamiya, C.M.Fortmann, I. Shimizu

    Jpn. J. Appl. Phys.   39 ( 6A )   3294 - 3301   2000年

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  • Optical absorption and Hall effect in (220) and (400) oriented polycrystalline silicon films

    T. Kamiya, K, Nakahata T, Sameshima T, Watanabe, T, Mouri, I. Shimizu

    J. Appl. Phys.   88 ( 6 )   3310 - 3315   2000年

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  • Transparent Conductive Oxide for Solar Cells Having Resistance to High Density Hydrogen Plasma and/or High Temperature

    Toshio Kamiya, Takashi Komaru, Satoshi Shimizu Mika Kanbe Charles M. Fortmann, Isamu Shimizu

    Key Engineering Materials   181   125   2000年

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  • Carrier transport, structure and orientation in polycrystalline silicon on glass

    K Nakahata, A Miida, T Kamiya, CM Fortmann, Shimizu, I

    THIN SOLID FILMS   337 ( 1-2 )   45 - 50   1999年1月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE SA  

    Polycrystalline silicon films exhibiting (220) and (400) preferential orientation in X-ray diffraction (XRD) were grown on glass substrate from gaseous mixture of SiF4 and H-2, respectively, using a remote type plasma enhanced chemical vapor deposition (PECVD). In particular, the grains of (400) oriented texture showed smooth surface resulting from its highly selective sticking of deposition precursor on a certain site of (100) surface. Hall mobility at room temperature of (220) and (400) oriented films rose by 12 and 7 cm(2)/Vs, respectively, with increasing the grain size and decreasing the structure fluctuation. In addition, the Hall mobility observed in these films is characterized by a thermally activated process given by the equation, mu = mu(0)exp(-E mu/kT) where mu(0), E mu, k and T are the extended mobility, activation energy, Boltzmann constant and temperature, respectively. The mu(0) increased with increasing the grain size up to 40 cm(2)/Vs at the grain size of 250 nm diameter, whereas E mu was kept constant at around 35 meV being independent of grain size, where a part of the free electrons is considered to be localized in the shallow traps being in 'thermal contact' with the conduction band. (C) 1999 Elsevier Science S.A. All rights reserved.

    DOI: 10.1016/S0040-6090(98)01182-1

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  • Structure control of polycrystalline silicon films on glass substrates and their properties

    Kamiya, T., Nakahata, K., Ro, K., Tohti, J., Fortmann, C.M., Shimizu, I.

    Key Engineering Materials   169   171   1999年

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  • High rates and very low temperature fabrication of polycrystalline silicon from fluorinated source gas

    T. Kamiya, K. Nakahata, K. Ro, C, M. Fortman, I. Shimizu

    Mater. Res. Soc. Symp. Proc.   557   513   1999年

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  • Amorphous silicon solar cells techniques for reactive conditions

    Satoshi Shimizu, Kojiro Okawa, Toshio Kamiya, C.M.Fortmann, Isamu Shimizu

    Mater. Res. Soc. Symp. Proc.   557   791   1999年

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  • Amorphous Silicon Solar Cell Techniques for High Temperature and/or Reactive Deposition Conditions

    M. Kanbe, T. Komaru, K. Fukutani, T. Kamiya, C.M. Fortmann, I. Shimizu

    Mater. Res. Soc. Symp. Proc.   557   767   1999年

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  • Fabrication of Solar Cells Having SiH_2_Cl_2_ Based I-layer Materials

    Satoshi Shimizu, Takashi Komaru, Kojiro Okawa, Toshio Kamiya, C.M.Fortmann, Isamu Shimizu

    Jpn. J. Appl. Phys.   38 ( 12A )   6617 - 6623   1999年

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  • Comparison of Microstructure and Crystal Structure of Polycrystalline Silicon Exhibiting Varied Textures Fabricated by Microwave and Very High Frequency Plasma Enhanced Chemical Vapor Deposition and their transport properties

    Toshio KAMIYA, Kouichi, NAKAHATA Kazuyoshi RO Charles Michael FORTMANN, Isamu SHIMIZU

    Jpn. J. Appl. Phys.   38 ( 10 )   5750 - 5756   1999年

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  • Role of Seed Crystal Layer in Two-Step-Growth Procedure for Low Temperature Growth of Polycrystalline Silicon Thin Film from SiF4 by a Remote-Type Microwave Plasma Enhanced Chemical Vapor Deposition

    Toshio KAMIYA, Kazuyoshi RO Charles Michael FORTMANN, Isamu SHIMIZU

    Jpn. J. Appl. Phys   38 ( 10 )   5762 - 5767   1999年

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  • Optimization of Transparent Conductive Oxide for Improved Resistance to Reactive and/or High Temperature Optoelectronic Device Processing

    Takashi KOMARU, Satoshi SHIMIZU Mika KANBE Yoshiteru, MAEDA Toshio, KAMIYA Charles Michael FORTMANN I. SHIMIZU

    Jpn. J. Appl. Phys.   38 ( 10 )   5796 - 5804   1999年

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  • Control of orientation from randome to(220) or (400) orientation in polycrystalline silicon films

    T. Kamiya, K. Nakahata, A. Miida, C. M. Fortmann, I.Shimizu

    Thin Solid Films   337 ( 1/2 )   18 - 22   1999年

  • ガラス基板上に低温成長させた多結晶シリコン薄膜の構造に与えるハロゲンの影響

    神谷利夫, 前田佳輝, 中畑浩一, 小丸貴史, C.M.Fortmann 清水勇

    日本セラミックス協会学術論文誌   107 ( 1251 )   1099 - 1104   1999年

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    記述言語:日本語   出版者・発行元:公益社団法人日本セラミックス協会  

    Polycrystalline silicon thin films were fabricated by VHF(100-144 MHz)plasma enhanced chemical vapor deposition. Three different source materials were used to grow the films on glass substrates : (1)SiH_2Cl_2/H_2, (2)SiF_4/H_2 and(3)SiH_4/H_2 mixing gases. It was found that the gas mixing ratio where crystal silicon grows strongly depends on the selection of source gas : i.e., crystal growth occurred at mixing ratios(SiF_4/H_2)smaller than 30/10 sccm while the crystal growth in SiH_4/H_2 system required much smaller mixing ratios, such as =1/50 sccm. Microstructures of the films were also strongly influenced by the source material. (220)orientation structures were easily obtained when SiF_4, SiH_2Cl_2 or B_2H_6 were used, compared to SiH_4. In addition, (400)preferentially oriented film grew on glass when the film was grown at a gas mixing ratio of SiF_4/H_2=30/10 sccm and a substrate temperature of 200°C. Chlorinated source gases including SiH_nCl_m(n+m=4)are also expected to produce(400)oriented growth.

    DOI: 10.2109/jcersj.107.1099

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  • Structure Control of Polycrystalline Silicon Films on Glass Substrates and their properties

    Toshio KAMIYA, Kouichi, NAKAHATA Kazuyoshi, RO Jurat, TOHTI Charles Michael FORTMANN, Isamu SHIMIZU

    Key Engineering Materials   169-170   171   1999年

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  • High rates and very low temperature fabrication of polycrystalline silicon from fluorinated source gas

    T. Kamiya, K. Nakahata, K. Ro, C, M. Fortman, I. Shimizu

    Mater. Res. Soc. Symp. Proc.   557   513   1999年

     詳細を見る

  • Amorphous silicon solar cells techniques for reactive conditions

    Satoshi Shimizu, Kojiro Okawa, Toshio Kamiya, C.M.Fortmann, Isamu Shimizu

    Mater. Res. Soc. Symp. Proc.   557   791   1999年

     詳細を見る

  • Amorphous Silicon Solar Cell Techniques for High Temperature and/or Reactive Deposition Conditions

    M. Kanbe, T. Komaru, K. Fukutani, T. Kamiya, C.M. Fortmann, I. Shimizu

    Mater. Res. Soc. Symp. Proc.   557   767   1999年

     詳細を見る

  • Fabrication of Solar Cells Having SiH_2_Cl_2_ Based I-layer Materials

    Satoshi Shimizu, Takashi Komaru, Kojiro Okawa, Toshio Kamiya, C.M.Fortmann, Isamu Shimizu

    Jpn. J. Appl. Phys.   38 ( 12A )   6617 - 6623   1999年

     詳細を見る

  • Comparison of Microstructure and Crystal Structure of Polycrystalline Silicon Exhibiting Varied Textures Fabricated by Microwave and Very High Frequency Plasma Enhanced Chemical Vapor Deposition and their transport properties

    Toshio KAMIYA, Kouichi, NAKAHATA Kazuyoshi RO Charles Michael FORTMANN, Isamu SHIMIZU

    Jpn. J. Appl. Phys.   38 ( 10 )   5750 - 5756   1999年

     詳細を見る

  • Role of Seed Crystal Layer in Two-Step-Growth Procedure for Low Temperature Growth of Polycrystalline Silicon Thin Film from SiF4 by a Remote-Type Microwave Plasma Enhanced Chemical Vapor Deposition

    Toshio KAMIYA, Kazuyoshi RO Charles Michael FORTMANN, Isamu SHIMIZU

    Jpn. J. Appl. Phys   38 ( 10 )   5762 - 5767   1999年

     詳細を見る

  • Optimization of Transparent Conductive Oxide for Improved Resistance to Reactive and/or High Temperature Optoelectronic Device Processing

    Takashi KOMARU, Satoshi SHIMIZU Mika KANBE Yoshiteru, MAEDA Toshio, KAMIYA Charles Michael FORTMANN I. SHIMIZU

    Jpn. J. Appl. Phys.   38 ( 10 )   5796 - 5804   1999年

     詳細を見る

  • Control of orientation from randome to(220) or (400) orientation in polycrystalline silicon films

    T. Kamiya, K. Nakahata, A. Miida, C. M. Fortmann, I.Shimizu

    Thin Solid Films   337 ( 1/2 )   18 - 22   1999年

  • Band gap tuning of a-Si : H from 1.55 eV to 2.10 eV by intentionally promoting structural relaxation

    K Fukutani, M Kanbe, W Futako, B Kaplan, T Kamiya, CM Fortmann, Shimizu, I

    JOURNAL OF NON-CRYSTALLINE SOLIDS   227 ( Pt.A )   63 - 67   1998年5月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Substrate temperature and sequential treatments are used to prepare a-Si:H films with band gaps ranging from 1.55 to similar to 2.1 eV. Low band gap materials were prepared at higher substrate temperature using a sequential process involving the deposition of thin (less than or similar to 5 nm) a-Si:H layers followed by an Argon radical (and/or ion) treatment. Larger band gap materials were prepared at lower substrate temperatures using a hydrogen chemical annealing process. The series was used to determine the relationship among the deposition conditions, the opto-electronic characteristics, and the atomic bonding structures in a-Si:H. The band gap is correlated to the total di-hydride content. The local silicon-silicon bonding environments, the hydrogen, and mono-hydride content and the mono-to di-hydride ratio are not well correlated to the band gap. Electronic transport is correlated with the local silicon-silicon bonding environment, but not the di-hydride content. (C) 1998 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0022-3093(98)00022-2

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  • Photoconductivity gain over 10 at a large electric field in wide gap a-Si : H

    W Futako, T Kamiya, CM Fortmann, Shimizu, I

    JOURNAL OF NON-CRYSTALLINE SOLIDS   227 ( Pt.A )   220 - 224   1998年5月

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    記述言語:英語   出版者・発行元:ELSEVIER SCIENCE BV  

    Wide band gap amorphous silicon films and p-i-n diodes were prepared by a chemical annealing method. Films had dark conductivities consistent with the large band gaps, low impurity levels, intrinsic conduction, and corresponding low thermal generation rates. Primary photo current measurements of these films was consistent with an electron mu tau Of 10(-8) cm(2)/V. To provide blocking at large electric fields, p and n-layers were optimized. Since it is known that at electric fields greater than 10(6) V/cm other amorphous materials such as a-Se exhibit avalanche multiplication, the wide band gap amorphous silicon p-i-n diodes were used to probe the prospect of avalanche multiplication in the amorphous silicon system. (C) 1998 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0022-3093(98)00224-5

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  • Control of Orientation for Polycrystalline Silicon Thin Films Fabricated from Fluorinated Source Gas

    Kouichi NAKAHATA, Atsushi MIIDA Toshio, KAMIYA Yoshiteru, MAEDA Charles Michael FORTMANN, Isamu SHIMIZU

    Jpn. J. Appl. Phys. Lett.,   37 ( 9A/B )   L1026 - L1029   1998年

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  • Stable Solar Cells Prepared from Dichlorosilane

    Y.Yamamoto, W. Futako, K.Fukutani, M.Hagino, T. Sugawara, T.Kamiya, C.M.Fortmann, I. Shimizu

    Mater. Res. Soc. Symp. Proc.   507   199   1998年

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  • Wide Band Gap a-Si:H-Based High Gain Visicon Devices Prepared by Chemical Annealing

    Wataru FUTAKO Tatsuya, SUGAWARA Toshio, KAMIYA Charles Michael FORTMANN, Isamu SHIMIZU

    Mater. Res. Soc. Symp. Proc.   507   357   1998年

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  • Extremely Narrow Band Gap, ~1.50eV, Amorphous Silicon

    Kazuhiko FUKUTANI Tatsuya, SUGAWARA Wataru FUTAKO Toshio, KAMIYA Charles Michael FORTMANN, Isamu SHIMIZU

    Mater. Res. Soc. Symp. Proc.   507   211   1998年

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  • Narrow Bandgap Amorphous Silicon-Based Solar Cells Prepared by High-Temperature Processing

    M. Kambe, Y.Yamamoto, K.Fukutani, T.Kamiya, C.M.Fortmann, I. Shimizu

    Mater. Res. Soc. Symp. Proc.   507   205   1998年

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  • Control of Orientation for Polycrystalline Silicon Thin Films Fabricated from Fluorinated Source Gas

    Kouichi NAKAHATA, Atsushi MIIDA Toshio, KAMIYA Yoshiteru, MAEDA Charles Michael FORTMANN, Isamu SHIMIZU

    Jpn. J. Appl. Phys. Lett.,   37 ( 9A/B )   L1026 - L1029   1998年

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  • Stable Solar Cells Prepared from Dichlorosilane

    Y.Yamamoto, W. Futako, K.Fukutani, M.Hagino, T. Sugawara, T.Kamiya, C.M.Fortmann, I. Shimizu

    Mater. Res. Soc. Symp. Proc.   507   199   1998年

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  • Wide Band Gap a-Si:H-Based High Gain Visicon Devices Prepared by Chemical Annealing

    Wataru FUTAKO Tatsuya, SUGAWARA Toshio, KAMIYA Charles Michael FORTMANN, Isamu SHIMIZU

    Mater. Res. Soc. Symp. Proc.   507   357   1998年

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  • Extremely Narrow Band Gap, ~1.50eV, Amorphous Silicon

    Kazuhiko FUKUTANI Tatsuya, SUGAWARA Wataru FUTAKO Toshio, KAMIYA Charles Michael FORTMANN, Isamu SHIMIZU

    Mater. Res. Soc. Symp. Proc.   507   211   1998年

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  • Narrow Bandgap Amorphous Silicon-Based Solar Cells Prepared by High-Temperature Processing

    M. Kambe, Y.Yamamoto, K.Fukutani, T.Kamiya, C.M.Fortmann, I. Shimizu

    Mater. Res. Soc. Symp. Proc.   507   205   1998年

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  • Progress in Growth of High Quality Amorphous Silicon Materials

    W.Futako, K, Fukutani M, Kannbe, T. Kamiya, C.M.Fortmann, I. Shimizu

    Proc. IEEE 26th PVSC   581   1997年

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  • Progress in Growth of High Quality Amorphous Silicon Materials

    W.Futako, K, Fukutani M, Kannbe, T. Kamiya, C.M.Fortmann, I. Shimizu

    Proc. IEEE 26th PVSC   581   1997年

     詳細を見る

  • Frequency, electric field and temperature dependence of piezoelectric constant of Pb(Zr,Ti)O3 based ceramics under high electric field

    Toshio KAMIYA, Takaaki TSURUMI, Ryuichi MISHIMA Etsuo, SAKAI Masaki DAIMON

    Ferroelectrics   196   277   1997年

     詳細を見る

  • Frequency, electric field and temperature dependence of piezoelectric constant of Pb(Zr,Ti)O3 based ceramics under high electric field

    Toshio KAMIYA, Takaaki TSURUMI, Ryuichi MISHIMA Etsuo, SAKAI Masaki DAIMON

    Ferroelectrics   196   277   1997年

     詳細を見る

  • Determination of Interatomic Potential by Ab-Initio Periodic Calculation for MgO

    T. KAMIYA

    Jpn. J. Appl. Phys.   35 ( 6A )   3688 - 3694   1996年

     詳細を見る

  • Detection of 90degrees Domain Rotation in PZT Ceramics by X-ray Diffraction Method

    Yutaka Kumano, Takaaki Tsurumi, Toshio Kamiya

    Trans. Mater. Res Soc. Jpn.   20   656   1996年

     詳細を見る

  • 分子系分散剤によるエーライトの分散

    坂井悦郎, 田中丈士, 神谷利夫, 大門正機

    セメント・コンクリート論文集   886   1996年

     詳細を見る

  • 無機粉体の特性とセメントペーストの流動性

    坂井悦郎, 星野清一, 大場陽子, 神谷利夫, 大門正機

    第23回セメント・コンクリート研究討論会論文報告集   104   1996年

     詳細を見る

  • Calculation of Crystal Structure, Dielectric and Piezoelectric Properties of Wurtzite-Type Crystals Using Ab-initio Periodic Hartree-Fock Method

    T.KAMIYA

    Jpn. J. Appl. Phys.   35 ( 8 )   4421 - 4426   1996年

     詳細を見る

  • Determination of Interatomic Potential by Ab-Initio Periodic Calculation for MgO

    T. KAMIYA

    Jpn. J. Appl. Phys.   35 ( 6A )   3688 - 3694   1996年

     詳細を見る

  • Detection of 90degrees Domain Rotation in PZT Ceramics by X-ray Diffraction Method

    Yutaka Kumano, Takaaki Tsurumi, Toshio Kamiya

    Trans. Mater. Res Soc. Jpn.   20   656   1996年

     詳細を見る

  • Calculation of Crystal Structure, Dielectric and Piezoelectric Properties of Wurtzite-Type Crystals Using Ab-initio Periodic Hartree-Fock Method

    T.KAMIYA

    Jpn. J. Appl. Phys.   35 ( 8 )   4421 - 4426   1996年

     詳細を見る

  • 石灰石微粉末の反応性と流動性

    坂井悦郎, 大門正機, 大場陽子, 神谷利夫

    第22回セメント・コンクリート研究討論会論文報告集   73   1995年

     詳細を見る

  • Calculation of Band Structures for Perovskite-Type Crystals Using Discrete variational Xa Method;

    T. KAMIYA, T, TANAKA T. TSURUMI, M. DAIMON

    Jpn. J. Appl. Phys.   33 ( 7A )   3965 - 3970   1994年

     詳細を見る

  • Dielectric Dispersion of Relaxor Ferroelectrics

    Takaaki Tsurumi, Kouji Soejima, Toshio Kamiya, Masaki Daimon

    Trans. Mater. Res. Soc. Jpn.   14B   1694   1994年

     詳細を見る

  • 高炉スラグ微粉末を混合したセメント硬化体の炭酸化反応

    大門正機, 坂井悦郎, 大場陽子, 神谷利夫, 金尚杢

    第21回セメント・コンクリート研究討論会論文報告集   29   1994年

     詳細を見る

  • Crystal Structure and Hydration of Belite

    Takaaki Tsurumi, Masaki Daimon, Toshio Kamiya, Yoshinobu Hirano

    Ceramic Transaction   40   19   1994年

     詳細を見る

  • Growth of Bismuth Silicate Thin Film on Si and Its Dielectric Properties

    Jong Hee, Kim, Takaaki, Tsurumi, Toshio Kamiya, Masaki Daimon

    J. Appl. Phys.   75 ( 6 )   2924 - 2928   1994年

     詳細を見る

  • Dielectric Dispersion of Relaxor Ferroelectrics

    Takaaki Tsurumi, Kouji Soejima, Toshio Kamiya, Masaki Daimon

    Trans. Mater. Res. Soc. Jpn.   14   1691   1994年

     詳細を見る

  • Mechanism of Diffuse Phase Transition in Relaxor Ferroelectrics

    Takaaki Tsurumi, Kouji Soejima, Toshio Kamiya, Masaki Daimon

    Jpn. J. Appl. Phys.   33 ( 4A )   1959 - 1964   1994年

     詳細を見る

  • Calculation of Band Structures for Perovskite-Type Crystals Using Discrete variational Xa Method;

    T. KAMIYA, T, TANAKA T. TSURUMI, M. DAIMON

    Jpn. J. Appl. Phys.   33 ( 7A )   3965 - 3970   1994年

     詳細を見る

  • Dielectric Dispersion of Relaxor Ferroelectrics

    Takaaki Tsurumi, Kouji Soejima, Toshio Kamiya, Masaki Daimon

    Trans. Mater. Res. Soc. Jpn.   14B   1694   1994年

     詳細を見る

  • Crystal Structure and Hydration of Belite

    Takaaki Tsurumi, Masaki Daimon, Toshio Kamiya, Yoshinobu Hirano

    Ceramic Transaction   40   19   1994年

     詳細を見る

  • Growth of Bismuth Silicate Thin Film on Si and Its Dielectric Properties

    Jong Hee, Kim, Takaaki, Tsurumi, Toshio Kamiya, Masaki Daimon

    J. Appl. Phys.   75 ( 6 )   2924 - 2928   1994年

     詳細を見る

  • Dielectric Dispersion of Relaxor Ferroelectrics

    Takaaki Tsurumi, Kouji Soejima, Toshio Kamiya, Masaki Daimon

    Trans. Mater. Res. Soc. Jpn.   14   1691   1994年

     詳細を見る

  • Mechanism of Diffuse Phase Transition in Relaxor Ferroelectrics

    Takaaki Tsurumi, Kouji Soejima, Toshio Kamiya, Masaki Daimon

    Jpn. J. Appl. Phys.   33 ( 4A )   1959 - 1964   1994年

     詳細を見る

  • Quantum Calculation of molecular orbital for PZT solid Solutions

    TOSHIO KAMIYA

    Computer Aided Innovation of New Materials II   225   1993年

     詳細を見る

  • Mechanism of Temperature Dependence of Piezoelectric Properties for Pb(Zr, Ti)O3

    Toshio KAMIYA, Ryuuichi MISHIMA, Takaaki TSURUMI, Masaki DAIMON

    Jpn. J. Appl. Phys.   32 ( 9B )   4223   1993年

     詳細を見る

  • Diffuse Phase Transition of Pb(Mg1/3Nb2/3)O3

    Takaaki Tsurumi, Kouji Soejima, Toshio Kamiya, Masaki Daimon

    Ext. Abs. The 6th US-Jpn Seminar Dielectr. Piezo. Ceram.   215   1993年

     詳細を見る

  • Preparation of Bismuth Silicate Films on Si Wafer by Metalorganic Chemical Vapor Deposition

    Jong Hee, Kim, Takaaki Tsurumi, Hideyuki Hirano, Toshio Kamiya, Nobuyasu Mizutani, Masaki Daimon

    Jpn. J. Appl. Phys.   32   135   1993年

     詳細を見る

  • Quantum Calculation of molecular orbital for PZT solid Solutions

    TOSHIO KAMIYA

    Computer Aided Innovation of New Materials II   225   1993年

     詳細を見る

  • Mechanism of Temperature Dependence of Piezoelectric Properties for Pb(Zr, Ti)O3

    Toshio KAMIYA, Ryuuichi MISHIMA, Takaaki TSURUMI, Masaki DAIMON

    Jpn. J. Appl. Phys.   32 ( 9B )   4223   1993年

     詳細を見る

  • Diffuse Phase Transition of Pb(Mg1/3Nb2/3)O3

    Takaaki Tsurumi, Kouji Soejima, Toshio Kamiya, Masaki Daimon

    Ext. Abs. The 6th US-Jpn Seminar Dielectr. Piezo. Ceram.   215   1993年

     詳細を見る

  • Preparation of Bismuth Silicate Films on Si Wafer by Metalorganic Chemical Vapor Deposition

    Jong Hee, Kim, Takaaki Tsurumi, Hideyuki Hirano, Toshio Kamiya, Nobuyasu Mizutani, Masaki Daimon

    Jpn. J. Appl. Phys.   32   135   1993年

     詳細を見る

  • Effects of Manganese addition on piezoelectric properties of Pb(Zr_0.5_Ti_0.5_)O_3_

    TOSHIO KAMIYA

    Jpn. J. Appl. Phys.   31   3058   1992年

     詳細を見る

  • Effects of Manganese addition on piezoelectric properties of Pb(Zr_0.5_Ti_0.5_)O_3_

    TOSHIO KAMIYA

    Jpn. J. Appl. Phys.   31   3058   1992年

     詳細を見る

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講演・口頭発表等

  • Amorphous oxide semiconductor: Factors determining TFT performance and stability

    9th Int. Meeting on Inf. Display (IMID2009)  2009年 

     詳細を見る

  • What have been clarified for amorphous oxide semiconductors?

    IDMC窶「3DSA窶「Asia Display'09  2009年 

     詳細を見る

  • Low Temperature Oxidation of Si Using Novel Ceramic Atomic Oxygen Source

    The Third International Conference on the Science and Technology for Advanced Ceramics (STAC-3)  2009年 

     詳細を見る

    会議種別:ポスター発表  

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  • Interfacial electronic structure and electron injection property at C12A7:e- cathode/Alq3 interface.

    E-MRS 2007 Spring Meeting  2007年 

     詳細を見る

  • Interfacial electronic structure and electron injection property at C12A7:e- cathode/Alq3 interface.

    E-MRS 2007 Spring Meeting  2007年 

     詳細を見る

  • Photosensitivity of Amorphous IGZO TFTs for Active-Matrix Flat-Panel Displays

    SID '08 Proc.  2008年 

     詳細を見る

  • Photosensitivity of Amorphous IGZO TFTs for Active-Matrix Flat-Panel Displays

    SID '08 Proc.  2008年 

     詳細を見る

  • Impact of Subgap States on Peculiar Characteristics of Amorphous Oxide Thin-Film Transistor

    Proc. IDW'09  2009年 

     詳細を見る

  • Electronic structures of defects and impurities in layered mixed anion compounds

    Ext. Abstract of the 26th Int. Japan-Korea Seminar on Ceramics  2009年 

     詳細を見る

  • Defects and doping in amorphous oxide semiconductor studied by first-principles calculations

    Ext. Abstract of the 26th Int. Japan-Korea Seminar on Ceramics  2009年 

     詳細を見る

  • Amorphous oxide semiconductor: Factors determining TFT performance and stability

    9th Int. Meeting on Inf. Display (IMID2009)  2009年 

     詳細を見る

  • What have been clarified for amorphous oxide semiconductors?

    IDMC窶「3DSA窶「Asia Display'09  2009年 

     詳細を見る

  • 固体酸化物を放出源とした真空中への原子状酸素の発生とその照射効果

    応用物理学会2009年秋季 学術講演会  2009年 

     詳細を見る

    会議種別:ポスター発表  

    researchmap

  • Low Temperature Oxidation of Si Using Novel Ceramic Atomic Oxygen Source

    The Third International Conference on the Science and Technology for Advanced Ceramics (STAC-3)  2009年 

     詳細を見る

    会議種別:ポスター発表  

    researchmap

  • Impact of Subgap States on Peculiar Characteristics of Amorphous Oxide Thin-Film Transistor

    Proc. IDW'09  2009年 

     詳細を見る

  • Electronic structures of defects and impurities in layered mixed anion compounds

    Ext. Abstract of the 26th Int. Japan-Korea Seminar on Ceramics  2009年 

     詳細を見る

  • Defects and doping in amorphous oxide semiconductor studied by first-principles calculations

    Ext. Abstract of the 26th Int. Japan-Korea Seminar on Ceramics  2009年 

     詳細を見る

▼全件表示

Works(作品等)

  • CREST, "Neosilicon: A Novel Functional Material for Future Electronics"

    1999年 - 2002年

     詳細を見る

    作品分類:芸術活動  

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  • CREST, 「ネオシリコン創製に向けた構造制御と機能探索」

    1999年 - 2002年

     詳細を見る

    作品分類:芸術活動  

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  • 物質・材料の自己組織化機構の解析と制御に関する研究

    1996年 - 2000年

     詳細を見る

    作品分類:芸術活動  

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受賞

  • H19年度 科学技術分野の文部科学大臣表彰 若手科学者賞

    2007年  

     詳細を見る

    受賞国:日本国

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  • The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology, The Young Scientists' Prize

    2007年  

     詳細を見る

  • 第19回(2005年度)独創性を拓く 先端技術大賞 企業・産学部門 特別賞

    2005年  

     詳細を見る

    受賞国:日本国

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  • 薄膜材料デバイス研究会ベストペーパーアワード

    2005年  

     詳細を見る

    受賞国:日本国

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  • DV-Xα研究協会 研究奨励賞

    1998年  

     詳細を見る

    受賞国:日本国

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共同研究・競争的資金等の研究課題

  • nanodevice

    2004年

      詳細を見る

    資金種別:競争的資金

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  • ナノデバイス

    2004年

      詳細を見る

    資金種別:競争的資金

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  • semiconductor

    2002年

      詳細を見る

    資金種別:競争的資金

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  • 半導体

    2002年

      詳細を見る

    資金種別:競争的資金

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  • 第一原理計算による材料物性評価

      詳細を見る

    資金種別:競争的資金

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  • Calculation of Properties by ab-initio method

      詳細を見る

    資金種別:競争的資金

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