Updated on 2026/03/05

写真a

 
YOSHIDA KAZUHIRO
 
Organization
Institute of Integrated Research Laboratory for Future Interdisciplinary Research of Science and Technology Professor
Title
Professor
External link

Degree

  • Doctor of Engineering ( Tokyo Institute of Technology )

Research Interests

  • Microrobots

  • Functional fluids

  • Actuators

  • Microactuators

  • Soft actuators

Research Areas

  • Informatics / Mechanics and mechatronics

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Machine elements and tribology

  • Informatics / Robotics and intelligent system

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Design engineering

Education

  • Tokyo Institute of Technology   Graduate School of Science and Engineering   Department of Control Engineering (Doctoral Program)

    1986.4 - 1989.3

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  • Tokyo Institute of Technology   Graduate School of Science and Engineering   Department of Control Engineering (Master's Degree Program)

    1984.4 - 1986.3

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    Country: Japan

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  • Yokohama National University   Faculty of Engineering   Department of Electrical Engineering

    1980.4 - 1984.3

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    Country: Japan

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Research History

  • Institute of Science Tokyo   Professor

    2024.10

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  • Tokyo Institute of Technology   Institute of Innovative Research   Professor

    2016.4 - 2024.9

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  • Massachusetts Institute of Technology   Visiting Scientist

    2015.7 - 2015.9

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  • Tokyo Institute of Technology   Precision and Intelligence laboratory   Professor

    2015.4 - 2016.3

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  • University of California, Santa Barbara   Visiting Researcher

    2008.10 - 2009.3

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  • Tokyo Institute of Technology   Precision and Intelligence laboratory   Associate Professor

    1996.11 - 2015.3

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  • Tokyo Institute of Technology   Precision and Intelligence laboratory   Research Associate

    1989.4 - 1996.11

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Professional Memberships

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Papers

  • Study on a Pumping Mechanism by Compressing the Flexible Membranes in Sequence with the Pressure of Electro Conjugate Fluid (ECF) Flow Reviewed International coauthorship

    Kenji YAMAMOTO, Tatsuya MATSUBARA, Kazuhiro YOSHIDA, Joon-wan KIM

    Proc. of the 12th JFPS Int. Symp. on Fluid Power HIROSHIMA 2024   2D1-02   2025.2

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    Language:English  

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  • A Study on an Alternating Pressure System Using Electro-Rheological Clutches Reviewed

    Yuki MORI, Kazuhiro YOSHIDA, Joon-wan KIM

    Proc. of the 12th JFPS Int. Symp. on Fluid Power HIROSHIMA 2024   2D2-01   2025.2

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    Authorship:Corresponding author   Language:English  

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  • Fabrication of Biomimetic Cell Culture Membranes Using Robust and Reusable Nickel Micropillar Molds Reviewed International coauthorship

    Taiki Otomo, Hyunsoo Noh, Tatsuya Matsubara, Deok-Ho Kim, Masashi Ikeuchi, Kazuhiro Yoshida, Joon-wan Kim

    BioChip Journal   2024.12

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Springer Science and Business Media LLC  

    Abstract

    In the practical application of organ-on-a-chip, mass production technology for flexible porous membranes is an essential element for mimicking the basement membrane of the body. Porous PDMS membrane is a promising material due to its high optical transparency, flexibility, and biocompatibility. However, the fabrication process is complex and costly. Even with soft lithography, a relatively straightforward method, there is a risk that the negative resist pillars used as molds peeling off from the substrate in mass production. In this study, we propose a novel mass production method for fabricating porous PDMS membranes using high-strength nickel (Ni) micropillars as molds by combining photolithography and electroforming technologies. The unibody structure of Ni micropillars ensures high reliability and provides a semi-permanent mold without degradation or detachment. We successfully fabricated two types of Ni micropillars and subsequently formed their corresponding porous PDMS membranes (D (diameter) = 8 μm, P (pitch) = 30 μm, and D = 10 μm, P = 20 μm). The porous PDMS membrane showed non-inferiority to the control group in terms of viability when cultured with human vascular endothelial cells. Furthermore, we showed that the porous PDMS membrane can be used to evaluate the vascular permeability of nanoparticles.

    DOI: 10.1007/s13206-024-00179-7

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    Other Link: https://link.springer.com/article/10.1007/s13206-024-00179-7/fulltext.html

  • Development of a soft microfinger having rigidity anisotropy Reviewed

    Kazuhiro Yoshihara, Kazuhiro Yoshida, Joon-wan Kim

    2024 27th Int. Conf. on Mechatronics Technology (ICMT)   Paper No. 5   2024.11

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  • Three-dimensional AC electroosmotic micropump with high power density Reviewed

    Maho Watanabe, Kazuhiro Yoshida, Joon-wan Kim, Sang In Eom, Shinichi Yokota

    Journal of Micromechanics and Microengineering   33   105008   2023.8

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  • Study on oil-in-oil droplet generation based on flow-focusing geometry using EHD micropumps Reviewed

    Taiki Otomo, Akihiro Yasuda, Siqi Peng, Kazuhiro Yoshida, Joon-wan Kim

    Proc. of Int. Conf. on Precision Engineering and Sustainable Manufacturing (PRESM2023)   PP5-052   2023.7

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  • A microfluidic device integrated with a stretchable microporous membrane controlled by electro-conjugate fluid Reviewed

    Taiki Otomo, Tatsuya Matsubara, Kazuhiro Yoshida, Deok-Ho Kim, Masashi Ikeuchi, Joon-wan Kim

    Sensors and Actuators A: Physical   356   114332 - 114332   2023.6

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Elsevier {BV}  

    DOI: 10.1016/j.sna.2023.114332

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  • Soft actuator with switchable stiffness using a micropump-activated jamming system Reviewed

    Huy Hoang Huynh, Dong Han, Kazuhiro Yoshida, Michael De Volder, Joon-wan Kim

    Sensors and Actuators A   338   113449   2022.2

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  • Study on a Low Pressure and Flowrate Driving of Micro Leg Joints for Soft Robots Reviewed

    Koji MICHISHITA, Kazuhiro YOSHIDA, Joon-wan KIM

    Proc. of 11th JFPS Int. Symp. on Fluid Power, Hakodate 2020 (Web. Proc.)   OS2-06   2021.10

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  • A Study on a Mathematical Model for AC Electroosmosis Micropump Reviewed

    Yo MAKITA, Kazuhiro YOSHIDA, Sang In EOM, Joon-wan KIM

    Proc. of 11th JFPS Int. Symp. on Fluid Power, Hakodate 2020 (Web. Proc.)   OS2-01   2021.10

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  • A multi-DOF soft microactuator integrated with flexible electro-rheological microvalves using an alternating pressure source Reviewed

    Thapanun Sudhawiyangkul, Kazuhiro Yoshida, Sang In Eom, Joon Wan Kim

    Smart Materials and Structures   30 ( 8 )   2021.8

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    Publishing type:Research paper (scientific journal)  

    DOI: 10.1088/1361-665X/ac0857

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  • A STUDY ON A MEMS ELECTRO-RHEOLOGICAL VALVE FOR HIGHER PRESSURE Reviewed

    Daichi Sugauchi, Kazuhiro Yoshida, Sang In Eom, Joon-wan Kim

    10th Int. Conf. on Fluid Power Transmission and Control (ICFP 2021) Conf. Proc. (Web Proc.)   2021.4

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  • Recent Developments of Micro Hydraulic System Technologies Invited Reviewed

    Kazuhiro Yoshida

    10th Int. Conf. on Fluid Power Transmission and Control (ICFP 2021) Final Program   29 - 30   2021.4

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  • Active microvalve driven by electro-conjugate fluid jet flow with a hydraulic power source on a chip Reviewed

    Tatsuya Matsubara, Kazuhiro Yoshida, Joon-wan Kim

    Journal of Micromechanics and Microengineering   30 ( 10 )   105013 - 105013   2020.10

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    Publishing type:Research paper (scientific journal)   Publisher:IOP Publishing  

    DOI: 10.1088/1361-6439/aba227

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    Other Link: https://iopscience.iop.org/article/10.1088/1361-6439/aba227/pdf

  • Effective and efficient removing method of micromolds in UV-LIGA using CO2 laser ablation followed by O2/CF4 plasma finishing for high-aspect-ratio metallic microstructures Reviewed

    Dong Han, Kazuhiro Yoshida, Joon-wan Kim

    The International Journal of Advanced Manufacturing Technology   110 ( 11-12 )   3391 - 3405   2020.10

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    Publishing type:Research paper (scientific journal)   Publisher:Springer Science and Business Media LLC  

    DOI: 10.1007/s00170-020-06065-4

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    Other Link: http://link.springer.com/article/10.1007/s00170-020-06065-4/fulltext.html

  • Fabrication, Experiment, and Simulation of a Flexible Microvalve-Integrated Microarm for Microgrippers Using Electrorheological Fluid Reviewed

    Joon-Wan Kim, Kazuhiro Yoshida, Toru Ide, Shinichi Yokota

    J. of Robotics and Mechatronics   32 ( 2 )   333 - 343   2020.4

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  • Active sorting of droplets by using an ECF (Electro-conjugate Fluid) micropump Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    Sensors and Actuators A: Physical   303   111702 - 111702   2020.3

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.sna.2019.111702

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  • Performance of ECF Micropumps-integrated O/O (oil-in-oil) Droplet Generators Reviewed

    Joon-wan KIM, Zebing MAO, Kazuhiro YOSHIDA

    Proc. of 16th Int. Conf. on Flow Dynamics (ICFD2019)   386 - 387   2019.11

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  • MEMS fabrication of a gap-controllable stencil mask for electrospray deposition Reviewed

    Nhat Dang NGUYEN, Kazuhiro Yoshida, Joon-wan KIM

    Proc. of 4th Int. Symp. on Biomedical Engineering   284 - 285   2019.11

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  • On-demand water-in-oil droplet generation using ECF (electro-conjugate fluid) micropump Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    Nanotechnology Materials and Devices Conference Technical Program   68   2019.10

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  • Droplet Sorter Using a Cantilever Actuated by Electro-conjugate Fluid Micropumps Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    23rd Int. Conf. on Mechatronics Technology (ICMT2019) Book of Abstracts   27   2019.10

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  • Proposal of a MEMS-based Cooling System Using an ECF Micropump Reviewed

    Huy Hoang Huynh, Kazuhiro Yoshida, Joon-Wan Kim

    Int. Symp. on PRecision Engineering and Sustainable Manufacturing (PRESM2019) Program & Proceedings   OP103   2019.7

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  • Controlling electrospray-deposited pattern by changing electrical field on a stencil mask Reviewed

    Nhat Dang, Khoa NGUYEN, Kazuhiro YOSHIDA, Joon-wan KIM

    Proc. of 8th Int. Conf. on Manufacturing, Machine Design and Tribology (ICMDT2019)   TH-D-1-4   2019.4

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  • A Study on an In-Pipe Mobile Micromachine Having a Fluid Inertia Micropump Reviewed

    Yuki Tamanoi, Ryota Horai, Kazuhiro Yoshida, Sang In Eom, d Joon-wan Kim

    Proc. of 8th Int. Conf. on Manufacturing, Machine Design and Tribology (ICMDT2019)   TH-D-1-3   2019.4

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  • A study on a hybrid structure flexible electro-rheological microvalve for soft microactuators Reviewed

    Thapanun Sudhawiyangkul, Kazuhiro Yoshida, Sang In Eom, Joon-wan Kim

    Microsystem Technologies   2019

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  • A Micro Vertically-allocated SU-8 Check Valve and its Characteristics Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    Microsystem Technologies   25 ( 1 )   245 - 255   2019

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1007/s00542-018-3958-3

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  • A droplet-generator-on-a-chip actuated by ECF (electro-conjugate fluid) micropumps Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    Microfluidics and Nanofluidics   23 ( 12 )   130   2019

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1007/s10404-019-2298-7

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  • A novel bending microactuator with integrated flexible electrorheological microvalves using an alternating pressure source for multi-actuator systems Reviewed

    Thapanun Sudhawiyangkul, Kazuhiro Yoshida, Sang In Eom, Joon-wan Kim

    Microsystem Technologies   2019

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  • Developing O/O (oil-in-oil) droplet generators on a chip by using ECF (electro-conjugate fluid) micropumps Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    Sensors and Actuators B   296 ( 1 )   126669   2019

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.snb.2019.126669

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  • Development of MEMS-fabricated Bidirectional ECF (Electro-Conjugate Fluid) micropumps Reviewed

    Tatsuya Matsubara, Huy Hoang Huynh, Kazuhiro Yoshida, Joon-wan Kim

    Sensors and Actuators A   295   317 - 323   2019

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  • Releasing large-area SU-8 structures without using any sacrificial layers Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    Microelectronic Engineering   212   53 - 60   2019

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.mee.2019.04.006

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  • Fast packaging by a partially-crosslinked SU-8 adhesive tape formicrofluidic sensors and actuators Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    Sensors and Actuators A   289   77 - 86   2019

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.sna.2019.02.020

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  • Alleviation of the adhesive protrusion problem at the bonding interface of free-standing microstructures Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    J. of Mechanical Science and Technology   33 ( 2 )   749 - 757   2019

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1007/s12206-019-0129-0

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  • A Novel AC Electroosmotic Micropump Using T-Shaped Electrode Array Invited Reviewed

    Kazuhiro Yoshida, Kenta Asai, Sang In Eom, Joon-wan Kim

    Proc. of 15th Int. Conf. on Flow Dynamics (ICFD2018)   546 - 547   2018.11

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  • Proposal on manipulating droplets by a cantilever check valve operated by an ECF micropump Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    22nd Int. Conf. on Mechatronics Technology (ICMT2018) Conf. Program   Paper ID58   2018.10

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  • Development of Au-ITO composite wiring for the back UV-LIGA Reviewed

    M. Ogawa, K. Yoshida, J.-w. Kim

    22nd Int. Conf. on Mechatronics Technology (ICMT2018) Conf. Program   Paper ID62   2018.10

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  • Proposal on an effective removing method of micromolds in UV-LIGA by combining CO2 laser engraving with O2/CF4 plasma etching Reviewed

    Dong HAN, Kazuhiro Yoshida, d Joon-wan Kim

    22nd Int. Conf. on Mechatronics Technology (ICMT2018) Conf. Program   Paper ID60   2018.10

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  • Development of a UV-curable PEDOT:PSS based flexible electro-rheological microvalve (FERV) Reviewed

    Thapanun Sudhawiyangkul, Kazuhiro Yoshida, Sang In Eom, Joon-wan Kim

    22nd Int. Conf. on Mechatronics Technology (ICMT2018) Conf. Program   Paper ID07   2018.10

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  • Development of MEMS-fabricated Bidirectional ECF micropump Reviewed

    Tatsuya Matsubara, Kazuhiro Yoshida, Joon-wan Kim

    Proc. of Int. Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2018)   81   2018.9

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  • Fast bonding technology by using partially-crosslinked SU-8 for MEMS-fabricated actuators and sensors Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    Proc. of Int. Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2018)   54   2018.9

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  • Formation of Micropillars for Higher Performance of ECF Planar Micropumps Reviewed

    Huy Hoang Huynh, Kazuhiro Yoshida, Joon-wan Kim

    Int. Symp. on Precision Engineering and Sustainable Manufacturing (PRESM2018) Program & Proceedings   Op064   2018.7

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  • Research on the Protrusion Problem in the Bonding Process of Free-standing SU-8 Microstructure Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    Int. Symp. on Precision Engineering and Sustainable Manufacturing (PRESM2018) Program & Proceedings   Op010   2018.7

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  • A Novel Hybrid Removal Technology for High-Aspect-Ratio SU-8 Micromolds in ECF (Electro-Congugate Fluid) Micropumps Fabrication by UV-LIGA Reviewed

    Dong Han, Kazuhiro Yoshida, Joon-Wan Kim

    IEEE/ASME J. of Microelectromechanical Systems   27 ( 5 )   818 - 826   2018

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  • Study on the fabrication of a SU-8 cantilever vertically-allocated in a closed fluidic microchannel Reviewed

    Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim

    Microsystem Technologies   24 ( 5 )   2473 - 2483   2018

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1007/s00542-017-3611-6

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  • Elastic Inflatable Actuators for Soft Robotic Applications Reviewed

    Benjamin Gorissen, Dominiek Reynaerts, Satoshi Konishi, Kazuhiro Yoshida, Joon-Wan Kim, Michael De Volder

    ADVANCED MATERIALS   29 ( 43 )   1604977   2017.11

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  • A study on an AC electroosmotic micropump using a square pole - Slit electrode array Reviewed

    Kazuhiro Yoshida, Tomoyuki Sato, Sang In Eom, Joon-wan Kim, Shinichi Yokota

    SENSORS AND ACTUATORS A-PHYSICAL   265   152 - 160   2017.10

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.sna.2017.08.026

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  • Proposal of a peristaltic micropump using dielectric elastomer actuators fabricated by MEMS technology Reviewed

    S. I. Eom, K. Miyata, K. Asai, J-W. Kim, K. Yoshida

    ELECTROACTIVE POLYMER ACTUATORS AND DEVICES (EAPAD) 2017   10163   101631L-1 - 1016311-6   2017

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    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1117/12.2258575

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  • DEVELOPMENRT OF A MEMS-BASED TWO-DOF ER BENDING ACTUATOR SYSTEM USING AN ALTERNATING PRESSURE SOURCE Reviewed

    Tomoya Miyoshi, Kazuhiro Yoshida, Joon-wan Kim, Sang In Eom

    Proc. of 10th JFPS Int. Symp. on Fluid Power, Fukuoka 2017   1B16 (3pp)   2017

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  • Development of a High Power Piezoelectric Micropump Using Fluid Inertia Reviewed

    K. Yoshida, R. Horai, S. I. Eom, T. Nagata, K. Asai

    Proc. 7th Int. Conf. on Manufacturing, Machine Design and Tribology (ICMDT2017)   16   2017

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  • Novel AC Electroosmotic Micropump Using Slit Electrode , Multiple Electrodes Reviewed

    K. Asai, K. Yoshida, S. I. Eom, J.-w. Kim

    The 21st Int. Conf. on Mechatronics Technology (ICMT2017)   111 - 114   2017

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  • Thumbnail-sized Powerful Piezoelectric Micropumps as a Fluid Power Source Reviewed

    Jung-Ho Park, Young-Bog Ham, So-Nam Yun, Kazuhiro Yoshida, Shinichi Yokota

    Conf. Proc. of BIT's 3rd Annual World Congress of Smart Materials (WCSM-2017)   160   2017

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  • An ECF-jet driven mini hydraulic piston actuator Reviewed

    Sang In Eom, Hiroki Masuda, Shinichi Yokota, Kazuhiro Yoshida, Kazuya Edamura

    SENSORS AND ACTUATORS A-PHYSICAL   247   164 - 171   2016.8

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.sna.2016.05.030

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  • An MEMS-based multiple electro-rheological bending actuator system with an alternating pressure source Reviewed

    Tomoya Miyoshi, Kazuhiro Yoshida, Joon-wan Kim, Sang In Eom, Shinichi Yokota

    SENSORS AND ACTUATORS A-PHYSICAL   245   68 - 75   2016.7

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.sna.2016.04.041

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  • A Study on a High Pressure Piezoelectric Micropump Using Fluid Inertia for Fluid Power Sources Reviewed

    K. Yoshida, R. Horai, S. I. Eom, T. Nagata, K. Asai

    Proc. of 20th Int. Conf. on Mechatronics Technology   82 - 83   2016

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  • A MEMS-based two-DOF PDMS bending actuator for mupltiple ER microactuator systems Reviewed

    T. Miyoshi, K. Yoshida, J.-w. Kim, S. I. Eom

    Proc. of 20th Int. Conf. on Mechatronics Technology   86 - 87   2016

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  • A Study on a Micropump Using Stacked Diaphragm-Type Dieelctric Elastomer Actuators - Development of Novel Fabrication Method Reviewed

    S. I. Eom, K. Asai, K. Yoshida

    Proc. of 20th Int. Conf. on Mechatronics Technology   118 - 119   2016

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  • Ingestible, Controllable, and Degradable Origami Robot for Patching Stomach Wounds Reviewed

    Shuhei Miyashita, Steven Guitron, Kazuhiro Yoshida, Shuguang Li, Dana D. Damian, Daniela Rus

    2016 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA)   909 - 916   2016

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    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/ICRA.2016.7487222

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  • Study on Fabrication of High Aspect Ratio TPSE by using DRIE Reviewed

    M. Shimizu, K. Nishioka, A. Matsutani, K. Yoshida, J. W. Kim

    Proc. of 20th Int. Conf. on Mechatronics Technology   32 - 33   2016

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  • An MEMS-based 2-DOF soft actuator for alternating pressure systems

    Tomoya MIYOSHI, Kazuhiro YOSHIDA, Joon-wan KIM, Sang In EOM

    The Proceedings of the Machine Design and Tribology Division meeting in JSME   2016.16   C1 - 1   2016

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    Publishing type:Research paper (scientific journal)   Publisher:Japan Society of Mechanical Engineers  

    DOI: 10.1299/jsmemdt.2016.16.c1-1

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  • Study on an MEMS-based 2-DOF ER actuator system integrated with a micro alternating pressure source

    Tomoya MIYOSHI, Kazuhiro YOSHIDA, Joon-wan KIM, Sang In EOM

    The Proceedings of Mechanical Engineering Congress, Japan   2016   J1110106 - J1110106   2016

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    Publishing type:Research paper (scientific journal)   Publisher:Japan Society of Mechanical Engineers  

    DOI: 10.1299/jsmemecj.2016.j1110106

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  • A study on a soft microgripper using MEMS-based divided electrode type flexible electro-rheological valves Reviewed

    Kazuhiro Yoshida, Noboru Tsukamoto, Joon-wan Kim, Shinichi Yokota

    MECHATRONICS   29   103 - 109   2015.8

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    DOI: 10.1016/j.mechatronics.2014.07.007

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  • Proposal of a multiple ER microactuator system using an alternating pressure source Reviewed

    Tomoya Miyoshi, Kazuhiro Yoshida, Sang In Eom, Shinichi Yokota

    SENSORS AND ACTUATORS A-PHYSICAL   222   167 - 175   2015.2

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    DOI: 10.1016/j.sna.2014.12.002

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  • DEVELOPMENT OF A MEMS-BASED ELECTRO-RHEOLOGICAL MICROFINGER SYSTEM WITH AN ALTERNATING PRESSURE SOURCE Reviewed

    T. Miyoshi, K. Yoshida, J. -W. Kim, S. I. Eom, S. Yokota

    2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)   823 - 826   2015

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    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/TRANSDUCERS.2015.7181050

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  • Development of a Soft Microgripper Using Divided-Electrode Type Flexible ER Valves Reviewed

    K. Yoshida, S. Hara, S. I. Eom, S. Yokota

    Proc. of 6th Int. Conf. on Manufacturing, Machine Design and Tribology (ICMDT2015)   464 - 465   2015

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  • A Multiple-Microactuator System Using a High-Frequency Pressure Source Reviewed

    Kazuhiro Yoshida, Satoshi Yamamoto, Sang In Eom, Shinichi Yokota

    SENSORS AND MATERIALS   27 ( 4 )   317 - 328   2015

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.18494/SAM.2015.1070

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  • A novel soft microgripper using divided-electrode type flexible ER valves Reviewed

    Kazuhiro YOSHIDA, Souta HARA, Sang In EOM, Shinichi YOKOTA

    Bulletin of the JSME, Mechanical Engineering J.   2 ( 6 )   Paper No. 15-00340   2015

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    Language:English   Publisher:The Japan Society of Mechanical Engineers  

    For maintenance microrobots for small diameter pipes in power plants and so on, a novel microgripper using divided-electrode type flexible electro-rheological valves (DE-FERVs) was proposed and developed. Each bendable finger consisted of the DE-FERV and a hydraulic rubber actuator and was several millimeters long. The DE-FERV had an axially divided parallel plate electrode pairs in a flexible tube. Each parallel plate electrode pair controlled the electro-rheological fluid (ERF) flow by changing the viscosity with the electric field. The DE-FERV had both high flexibility and sufficient pressure control range. The hydraulic rubber actuator had plural integrated walls inside to restrict its radial expansion and axially extended by the inner pressure controlled by the DE-FERV. A finger large model was fabricated and experimentally characterized. Then, a gripper having two fingers was constructed and the object handling was demonstrated.

    DOI: 10.1299/mej.15-00340

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  • Characterization of an AC Electroosmotic Micropump Using Plate-Cylinder Electrode Array Reviewed

    K. Yoshida, M. Watanabe, J.-W. Kim, S. I. Eom, S. Yokota

    Proc. of the 19th Int. Conf. on Mechatronics Technology (ICMT2015)   C10   2015

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  • A Study on a Micropump Using Stacked Diaphragm -Type Dielectric Elastomer Actuators - Concept , Basic Investigations - Reviewed

    S. I. Eom, R. Hourai, K. Yoshida, S. Yokota

    Proc. of the 19th Int. Conf. on Mechatronics Technology (ICMT2015)   C13   2015

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  • Fabrication of a MEMS-Based Electro-Rheological Microfinger System with an Alternating Pressure Source Reviewed

    T. Miyoshi, K. Yoshida, J.-W. Kim, S. I. Eom, S. Yokota

    Proc. of 6th Int. Conf. on Manufacturing, Machine Design and Tribology (ICMDT2015)   476 - 477   2015

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  • Development of a MEMS-Based ER Microgripper Using Alternating-Pressure Source Reviewed

    T. Miyoshi, K. Yoshida, J.-W. Kim, S. I. Eom, S. Yokota

    Conf. Proc. of 14th Int. Conf. on New Actuators & 8th Int. Exhibition on Smart Actuators and Drive Systems (ACTUATOR14)   394 - 397   2014

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  • Characteristics of MEMS-Based Divided Electrode Type Flexible Electro-Rheological Valve Invited Reviewed

    K. Yoshida, N. Tsukamoto, J.-W. Kim, S. I. Eom, S. Yokota

    Proc. of 9th JFPS Int. Symp. on Fluid Power, Matsue 2014   435 - 437   2014

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  • Fabrication of a MEMS-Based ER Microgripper with Alternating-Pressure Source Reviewed

    T. Miyoshi, K. Yoshida, J.-W. Kim, S. I. Eom, S. Yokota

    Proc. of 9th JFPS Int. Symp. on Fluid Power, Matsue 2014   438 - 441   2014

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  • Development of a Novel AC Electroosmosis Micropump Using Plate-Cylinder Electrode Pair Reviewed

    K. Yoshida, M. Watanabe, J.-W. Kim, S. I. Eom, S. Yokota

    Proc. of 18th Int. Conf. on Mechatronics Technology (ICMT2014)   Paper ID: 45   2014

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  • Proposal of a Multiple Microactuators System Using High Frequency Alternating-Pressure Source Reviewed

    K. Yoshida, S. Yamamoto, S. I. Eom, S. Yokota

    Proc. of 18th Int. Conf. on Mechatronics Technology (ICMT2014)   Paper ID: 69   2014

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  • A silicone rubber bimorph actuator driven by bidirectional ECF jet generator Reviewed

    S. I. Eom, S. Yokota, J. W. Kim, K. Yoshida, K. Edamura

    Proc. of 17th Int. Conf. on Mechatronics Technology (ICMT2013)   149 - 151   2013

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  • A Study on Multi-DOF Electro-Rheological Actuator with Shape Adaptation Capability Reviewed

    K. Yoshida, S. Hakoda, S. I. Eom, S. Yokota

    Proc. of 8th Int. Conf. on Fluid Power Transmission and Control (ICFP2013)   542 - 545   2013

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  • Development of a multi-DOF ER microactuator system with alternating-pressure source Reviewed

    K. Yoshida, T. Miyoshi, S. I. Eom, S. Yokota

    Proc. of 5th Int. Conf. on Manufacturing, Machine Design and Tribology (ICMDT2013)   78   2013

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  • A Microgripper Using MEMS-Based Divided Electrode Type Flexible Electro-Rheological Valves Reviewed

    K. Yoshida, N. Tsukamoto, J. W. Kim, S. Yokota

    Proc. of 17th Int. Conf. on Mechatronics Technology (ICMT2013)   107 - 109   2013

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  • Development of Multi-DOF Electro-Rheological Actuator with Shape Adaptation Capability - Fundamental Experiments of Basic Unit Large Model - Reviewed

    K. Yoshida, S. Hakoda, S. I. Eom, S. Yokota

    Proc. of 5th Int. Conf. on Manufacturing, Machine Design and Tribology (ICMDT2013)   85   2013

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  • An AC Electroosmotic Micropump Using Square Pole-Slit Electrodes Reviewed

    K. Yoshida, T. Sato, S. I. Eom, J. W. Kim, S. Yokota

    Proc. of 5th Int. Conf. on Manufacturing, Machine Design and Tribology (ICMDT2013)   141   2013

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  • A Divided Electrode Type Flexible Electro-Rheological Valve Fabricated by MEMS Technologies Reviewed

    K. Yoshida, N. Tsukamoto, J. W. Kim, S. Yokota

    Proc. of 12th Int. Conf. on Fluid Control, Measurements and Visualization (FLUCOME2013)   OS5-01-1(6pp)   2013

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  • Development of an AC Electroosmotic Micropump Using Square Pole - Slit Electrodes Reviewed

    K. Yoshida, T. Sato, S. I. Eom, J. W. Kim, S. Yokota

    Proc. of 17th Int. Conf. on Mechatronics Technology (ICMT2013)   146 - 148   2013

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  • An intelligent microactuator robust against disturbance using electro-rheological fluid Reviewed

    Kazuhiro Yoshida, Kazuhito Kamiyama, Joon-wan Kim, Shinichi Yokota

    SENSORS AND ACTUATORS A-PHYSICAL   175   101 - 107   2012.3

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    DOI: 10.1016/j.sna.2011.12.049

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  • A Novel Microgripper Using Flexible Electro-Rheological Valves Reviewed

    K. Yoshida, S. Hara, S. I. Eom, S. Yokota

    Proc. of 13th Mechatronics Forum Int. Conf. (Mechatronics 2012)   3   834 - 839   2012

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  • A Multi-DOF ER Microactuator System Using Alternating-Pressure Source Reviewed

    K. Yoshida, T. Miyoshi, S. I. Eom, S. Yokota

    Proc. of 16th Int. Conf. on Mechatronics Technology (ICMT2012)   1 - 5   2012

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  • An ER microactuator with built-in pump and valve Reviewed

    Kazuhiro Yoshida, Tomohisa Muto, Joon-Wan Kim, Shinichi Yokota

    International Journal of Automation Technology   6 ( 4 )   468 - 475   2012

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    DOI: 10.20965/ijat.2012.p0468

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  • Study about Micro Cylinder for Bidirectional Rolling Diaphragm Actuator Using ECF Jet Reviewed

    S. I. Eom, H. Masuda, S. Yokota, K. Yoshida, K. Edamura

    Proc. of 15th Int. Conf. on Mechatronics Technology (ICMT 2011)   461 - 464   2011

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  • A Micro Mobile Hydraulic System Using Electro-Rheological Fluid Reviewed

    K. Yoshida, T. Anzai, J. W. Kim, S. Yokota

    Proc. of 8th JFPS Int. Symp. on Fluid Power   471 - 476   2011

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  • An ER Microvalve Having Two-DOF Flexibility Reviewed

    K. Yoshida, S. Hakoda, S. I. Eom, S. Yokota

    Proc. of 15th Int. Conf. on Mechatronics Technology (ICMT 2011)   46 - 49   2011

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  • A Study on Micro Flow Generator Using AC Electroosmosis Reviewed

    K. Yoshida, K. Muramatsu, J. W. Kim, S. I. Eom, S. Yokota

    Proc. of 4th Int. Conf. on Manufacturing, Machine Design and Tribology (ICMDT 2011)   67 - 68   2011

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  • A Micro Rolling Diaphragm Actuator Equipped with an ER Valve Reviewed

    K. Yoshida, T. Anzai, J. W. Kim, S. Yokota

    Proc. of 14th International Conference on Mechatronics Technology (ICMT 2010)   147 - 151   2010

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  • A Microgripper Using Flexible Electro-Rheological Valves Reviewed

    K. Yoshida, T. Ide, J. W. Kim, S. Yokota

    WAC2010 CD-ROM Proc.   2010

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  • High-Power Piezoelectric Micropumps Using Resonance Drive and/or Fluid Inertia Effect Reviewed

    J.-H. Park, Y.-B. Ham, S.-N. Yun, M.-Y. Seo, K. Yoshida, S. Yokota

    Proc. 7th Int. Workshop on Microfactories   464 - 469   2010

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  • An ER Microactuator with Built-in Pump and Valve Reviewed

    K. Yoshida, T. Muto, J. W. Kim, S. Yokota

    ACTUATOR 10, CONFERENCE PROCEEDINGS   556 - 559   2010

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  • New microactuators using functional fluids

    Shinichi Yokota, Kazuhiro Yoshida, Kenjiro Takemura, Joon-Wan Kim

    Next-Generation Actuators Leading Breakthroughs   91 - 103   2010

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    DOI: 10.1007/978-1-84882-991-6_9

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  • Magneto-rheological valve-integrated cylinder and its application Reviewed

    K. Yoshida, T. Soga, M. Kawachi, K. Edamura, S. Yokota

    PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART I-JOURNAL OF SYSTEMS AND CONTROL ENGINEERING   224 ( I1 )   31 - 40   2010

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    DOI: 10.1243/09596518JSCE740

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  • A flexible electro-rheological microvalve (FERV) based on SU-8 cantilever structures and its application to microactuators Reviewed

    Joon-Wan Kim, Kazuhiro Yoshida, Kumiko Kouda, Shinichi Yokota

    SENSORS AND ACTUATORS A-PHYSICAL   156 ( 2 )   366 - 372   2009.12

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    DOI: 10.1016/j.sna.2009.10.013

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  • A Microgripper Using Electro-Rheological Fluid Reviewed

    K. Yoshida, T. Ide, J. W. Kim, S. Yokota

    ICROS-SICE Int. Joint Conf. 2009 (ICCAS-SICE 2009)   2009

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  • Forced Liquid Cooling System Using Thin Planar ECF Pump for High Power Electronic Chips Reviewed

    S. Yokota, K. Yoshida, W. -S. Seo, K. Koizumi, J. W. Kim, K. Edamura

    ACTUATOR 08, CONFERENCE PROCEEDINGS   226 - +   2008

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  • 3204 An ECF jet actuator by using MEMS technology

    KIM Joon-wan, OGAWA Yoshitsugu, YOKOTA Shinichi, YOSHIDA Kazuhiro, EDAMURA Kazuya

    The proceedings of the JSME annual meeting   2008   153 - 154   2008

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    We are studying microactuators using an electrode-conjugate fluid (ECF). ECF is a functional fluid that produces a powerful flow (ECF jet) between an electrode pair which is subjected to high DC voltage. In our past experiments, we realized that pressure generated by this ECF jet increases with downsizing of the electrode pair. Therefore it is considered that the pressure due to ECF jet is useful as a driving source of the microactuator. We confirmed that high pressure was obtained by a needle-ring electrode pair composed of a needle-shaped electrode and a ring-shaped electrode, but there were the problems in the reproducibility and downsizing of the electrode pair in a current method. In order to solve those problems, we propose a MEMS fabrication method for a unified needle-ring electrode pair and prove the feasibility of the method.

    DOI: 10.1299/jsmemecjo.2008.7.0_153

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  • Proposition of an ER Microactuator with Inherent Position Feedback Mechanism Reviewed

    K. Yoshida, K. Kamiyama, J. W. Kim, S. Yokota

    The Seventh JFPS International Symposium on Fluid Power "JFPS Toyama 2008"   2008 ( 7 )   551 - 554   2008

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    The paper proposes and develops a novel smart ER microactuator with inherent position feedback mechanism. The microactuator consists of a pair of movable and fixed parallel plate electrodes with variable gap length and an upstream restrictor, and ERF (electro-rheological fluid) is supplied as a working fluid. By applying voltage to the electrodes, with the increased pressure drop due to ERF viscosity increase, the electrode gap length i.e. the output displacement increases. Also the microactuator can suppress the displacement due to external force by the inherent position feedback mechanism. The mechanism utilizes increase of the flow resistance between the electrodes for decrease of the electrode gap length. In this paper, the structure and working principle are revealed and the mathematical model is derived. Then, a microactuator is fabricated and the characteristics are experimentally clarified. Furthermore, a mechanism to magnify the output displacement is proposed and the validity is confirmed through experiments.

    DOI: 10.5739/isfp.2008.551

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  • ECF Microactuator with Needle-Ring Electrodes by MEMS Technology Reviewed

    J. W. Kim, Y. Ogawa, S. Yokota, K. Yoshida, K. Edamura

    12th International Conference on Mechatronics Technology (ICMT 2008)   2008

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  • 3205 A Position Feedback Type ER Microactuator with Displacement Magnification Mechanism

    YOSHIDA Kazuhiro, KAMIYAMA Kazuhito, KIM Joon-wan, YOKOTA Shinichi

    The proceedings of the JSME annual meeting   2008   155 - 156   2008

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    The paper presents a novel position feedback type ER microactuator with displacement magnification unit. We have proposed and developed a position feedback type ER microactuator that can not only control the output displacement by the applied voltage but also suppress the displacement due to external force using the inherent position feedback mechanism. However, the output displacement range has been required to enlarge to extend the application fields. In this paper, a displacement magnification unit utilizing the control pressure in the actuator is proposed and developed. The structure and working principle of the displacement magnification unit is clarified; then a micoactuator using the unit is fabricated and experimentally characterized.

    DOI: 10.1299/jsmemecjo.2008.7.0_155

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  • A high performance planar pump using electro-conjugate fluid with improved electrode patterns Reviewed

    Woo-Suk Seo, Kazuhiro Yoshida, Shinichi Yokota, Kazuya Edamura

    SENSORS AND ACTUATORS A-PHYSICAL   134 ( 2 )   606 - 614   2007.3

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    DOI: 10.1016/j.sna.2006.05.021

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  • New Microactuators Using Functional Fluids

    S. Yokota, K. Yoshida, K. Takemura, J-W Kim

    Proc. the 4th Public Symposium on Next-Generation Actuators Leading Breakthroughs   41 - 44   2007

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  • Flexible Electro-rheological Microvalve (FERV) Based on SU-8 Cantilever Structures and its Application to Microactuators Reviewed

    J. W. Kim, K. Yoshida, K. Kouda, S. Yokota

    LDIA2007   2007

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  • A Flexible ER Microactuator Using Homogeneous Electro-Rheological Fluid Reviewed

    YOSHIDA Kazuhiro, OGISO Taro, YOKOTA Shinichi

    Transactions of the Japan Society of Mechanical Engineers. C   73 ( 733 )   2508 - 2513   2007

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    The paper proposed and developed a flexible ER microactuator called FERMA for in-pipe working micromachines, medical micro robots, and so on. An ER microvalve has a narrow flow channel with electrodes and controls flow of homogeneous electro-rheological (ER) fluid using the apparent viscosity change in an electric field. A conventional ER microactuator that consists of the ER microvalve and a fluid microactuator features simple structure, however, it is difficult to realize a flexible actuator due to the rigidity of the ER microvalve having sufficient channel length for pressure drop. To overcome the problem, we proposed an FERMA having a flexible ER valve called FERV inside a flexible tube. In the proposed FERV, an insulating thin flexible spacer with a slit was sandwiched by a pair of thin electrode sheets and they were wrapped by rubber. The slit in the spacer and two electrode sheets formed a flow channel for an ER valve. In this paper, we fabricated a two-port FERV with 4×3×9mm^3 in size and confirmed the low flexural rigidity and the static characteristics experimentally. Then, we fabricated a three-port FERV and clarified the static and dynamic characteristics experimentally. Finally, we fabricated an FERMA with the three-port FERV and a bellows type flexible tube with 8mm outside diameter and 8mm length and investigated experimentally the static and dynamic characteristics in linear and bending motions. The feasibility of the proposed FERMA was demonstrated.

    DOI: 10.1299/kikaic.73.2508

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  • A Micro Fluid Power Source Using Fluid Inertia Effect in a Pipe for High Viscosity Fluids Reviewed

    K. Yoshida, Y. Osanai, T. Seto, K. Takagi, S. Yokota

    2nd JSME-KSME Joint International Conference on Manufacturing, Machine Design and Tribology (ICMDT 2007)   2007

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  • ECF Micromotor Using MEMS Technology Reviewed

    J. W. Kim, Y. Nishida, S. Yokota, K. Yoshida, K. Edamura

    11th Int. Conf. on Mechatronoics Technology (ICMT2007)   2007

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  • Forced Liquid Cooling System Using Planar ECF Pump for VLSI Chips Reviewed

    W.-S. Seo, K. Yoshida, S. Yokota, K. Edamura, Y.-B. Ham

    11th Int. Conf. on Mechatronoics Technology (ICMT2007)   2007

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  • Proposition of a 3-DOF ER Microactuator with Built-in Pump and Valve Reviewed

    K. Yoshida, Y. Osanai, S. Yokota

    2nd Int. Forum on Systems and Mechatronics (ISFM 2007)   2007

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  • The use of liquid crystals as electrorheological fluids in microsystems: model and measurements Reviewed

    M De Volder, K Yoshida, S Yokota, D Reynaerts

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   16 ( 3 )   612 - 619   2006.3

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    DOI: 10.1088/0960-1317/16/3/017

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  • 5620 MEMS-based ECF Micromotor

    KIM Joon-wan, NISHIDA Yoshito, YOKOTA Shinichi, YOSHIDA Kazuhiro, EDAMURA Kazuya

    The proceedings of the JSME annual meeting   2006   337 - 338   2006

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    We propose the new advanced micromotor integrated with Electro-conjugated Fluid (ECF) jet and MEMS fabrication technology. To realize three-dimensional complex structures of ECF micromotor, we present the fabrication method of multilayer combined with two different kinds of thick photoresists: one is for microstructure, while the other is used sacrificially. Electrodes for ECF jet and the first layer were successfully fabricated. As a result of ECF jet observed in the stator whose inner diameter was 500μm, we showed that improvement of surface flatness for the following layer could realize MEMS-based ECF micromotor.

    DOI: 10.1299/jsmemecjo.2006.7.0_337

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  • A Full-Wave Rectifying Piezoelectric Micro Fluid Power Source Using Fluid Inertia Effect In Pipes Reviewed

    K. Yoshida, K. Sugiura, S. Yokota

    10th Int. Conf. in Mechatronics Technology (ICMT2006)   2006

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  • Flexible Electro-rheological (ER) Microvalve Based on Flexible SU-8 Cantilever Structures Reviewed

    J. W. Kim, K. Yoshida, K. Kohda, S. Yokota

    10th International Conference on Mechatronics Technology   2006

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  • Fabrication of Flexible Electro-Rheological (ER) Microvalve Based on Flexible SU-8 Cantilever Structures Reviewed

    K. Yoshida, J. W. Kim, K. Kohda, S. Yokota

    10th Int. Conf. on New Actuators (ACTUATOR 2006)   2006

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  • Electrorheological Liquid Crystals: A New Rheologic Fluid for Microsystmes Reviewed

    M. De Volder, K. Yoshida, S. Yokota, D. Reynaerts

    10th Int. Conf. on New Actuators (ACTUATOR 2006)   2006

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  • New microactuators using functional fluids

    S. Yokota, K. Yoshida, K. Takemura, J. W. Kim

    The 1st International Symposium on Next-Generation Actuators Leading Breakthroughs   35 - 38   2006

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  • Electrorheologic liquid crystals in microsystems: model and measurements

    Michaël De Volder, Kazuhiro Yoshida, Shinichi Yokota, Dominiek Reynaerts

    Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS   236 - 241   2006

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    DOI: 10.1109/NEMS.2006.334694

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  • A Control Valve Using Ferrite Particle-Dispersed Magneto-Rheological Fluid Reviewed

    YOSHIDA Kazuhiro, TAKAHASHI Hiroyuki, PARK Jung-Ho, YOKOTA Shinichi, KAWACHI Masashi, EDAMURA Kazuya

    Transactions of the Japan Society of Mechanical Engineers C   72 ( 714 )   457 - 463   2006

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    A simple control valve using a magneto-rheological (MR) fluid was proposed and called the MR valve. The MR valve utilizes the apparent viscosity controllability of the MR fluid in magnetic field and controls high-level fluid power without moving parts. However, conventional MR fluids have high base viscosities to disperse heavy soft iron particles and lose fluid power in pipes. In this study, low base viscosity MR fluid using lightweight ferrite particles was proposed, developed and applied to an MR valve. First, four MR fluids were fabricated with different compositions and the MR fluid to minimize the MR valve was experimentally selected. Second, a small-sized three-port MR valve using a permanent magnet was proposed and the design procedure was theoretically derived. Third, a three-port MR valve was fabricated and the characteristics were experimentally clarified. Also, as an application of the MR valve, a bellows-driven one-link manipulator was fabricated and tested.

    DOI: 10.1299/kikaic.72.457

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  • 4105 Development of a full-wave rectifying piezoelecteic micropump using fluid inertia effect in pipes

    YOSHIDA Kazuhiro, SUGIURA Keita, SETO Takeshi, TAKAGI Kunihiko, YOKOTA Shinichi

    The proceedings of the JSME annual meeting   2006   117 - 118   2006

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    A full-wave rectifying piezoelectric micropump using fluid inertia effect in pipes was proposed and developed for millimeter-sized micromachines using high density fluid power. The proposed pump has pump chambers upper and lower sides of a piston driven by a piezoelectric element, each of which has an inlet check valve and an outlet pipe in place of a check valve and produces outflow alternately not only in pumping period but also in suction one by using fluid inertia effect in the outlet pipe and liquid column separation. The fabricated pump showed higher no-load flow rate and realized a linear aquadrive system.

    DOI: 10.1299/jsmemecjo.2006.4.0_117

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  • A Thin-Planar Pump for Liquid Cooling System Using ECF-Jet Reviewed

    W.-S. Seo, S. Yokota, K. Yoshida, K. Edamura

    Proc. 1st Int. Conf. on Manufacturing, Machine Design and Tribology (ICMDT2005)   1 - 4   2005

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  • 2308 Forced Liquid Cooling System for High Power Electronic Chips Using ECF

    SEO Woo-Suk, YOSHIDA Kazuhiro, YOKOTA Shinichi, EDAMURA Kazuya

    The proceedings of the JSME annual meeting   2005   103 - 104   2005

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    This paper presents a liquid cooling concept for heat rejection of high power electronic chips existing in notebook computers etc. The design, fabrication, and performance of the thin-planar ECF pump and forced-liquid cooling system are summarized. The thin-planar ECF pump consists of a pump housing and electrode substrate with overall dimension of 280mm×190mm×1mm, and achieves maximum flow rate and output pressure of 5.5cm^3/s and 7.1 kPa, respectively, at an applied voltage of 2.0 kV. The forced-liquid cooling system constructed with the thin-planar ECF pump, liquid-cooled heat sink, and thermal test chip removes input power up to 80 W keeping the chip surface temperature below 70℃. The experimental results demonstrate that the feasibility of forced-liquid cooling system using ECF is confirmed as an advanced cooling solution on next-generation notebook computers.

    DOI: 10.1299/jsmemecjo.2005.7.0_103

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  • 2902 Basic Characteristics of a Flexible ER Microactuator

    YOSHIDA Kazuhiro, OGISO Taro, YOKOTA Shinichi

    The proceedings of the JSME annual meeting   2005   265 - 266   2005

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    The paper describes a FERMA (Flexible ER Micro Actuator) for in-pipe working micromachines, medical microrobots, and so on. The FERMA consists of a FERV (Flexible ER Valve) and a flexible tube. The FERV is a rubber-molded two electrode sheets with an insulating flexible slit spacer. By the applied voltage, the FERV controls the pressure and flow rate of the homogeneous ER fluid utilizing the viscosity change. In this paper, a two-port FERV was fabricated with 4mm×3mm×9mm in size and the flexural rigidity and the static characteristics were experimentally clarified. Then, an FERMA was fabricated with a three-port FERV and a bellows type flexible tube. Through experimental investigations, basic effectiveness of the FERMA was confirmed.

    DOI: 10.1299/jsmemecjo.2005.4.0_265

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  • A Piezoelectric Micropump Using Fluid Inertia in Pipe and Its Application Reviewed

    K. Yoshida, Y.-O. Juneg, T. Seto, K. Takagi, J.-H. Park, S. Yokota

    6th JFPS Int. Symp. on Fluid Power, Tsukuba 2005   2005 ( 6 )   688 - 693   2005

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    For millimeter-sized fluid-driven micromachines performing power-needed tasks, we proposed a novel micropump using fluid inertia in an outlet pipe. The paper describes the pump structure for higher output power and an application of the micropump to a micro fluid power system. First, a simple nonlinear mathematical model with lumped parameters was proposed and the validity was confirmed comparing the simulation and experimental results. Second, based on the simulations varying the sizes of the outlet pipe and the diaphragm, the pump structure for higher output power was obtained and the validity was verified through experiments. Finally, as an application of the micropump, a position control microsystem was fabricated using the micropump, a microvalve using magneto-rheological fluid valve-body, and a bellows microactuator. The characteristics were experimentally clarified and the validity was confirmed.

    DOI: 10.5739/isfp.2005.688

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  • Flexible ER Microactuator Using Electro-Rheological Fluid Reviewed

    K. Yoshida, T. Ogiso, S. Yokota

    9th Int. Conf. on Mechatronics Technology (ICMT2005)   2005

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  • Study of valve-integrated microactuator using homogeneous electro-rheological fluid Reviewed

    K Yoshida, JH Park, H Yano, S Yokota, S Yun

    SENSORS AND MATERIALS   17 ( 3 )   97 - 112   2005

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  • A Magneto-Rheological Valve-Integrated Cylinder and Its Application Reviewed

    K. Yoshida, T. Soga, S. Yokota, M. Kawachi, K. Edamura

    Power Transmission and Motion Control (PTMC2005)   2005

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  • Micro actuators using functional fluids and the systems Reviewed

    S. Yokota, K. Yoshida, K. Edamura

    Proceedings of the Sixth International Conference on Fluid Power Transmission and Control   A71 - A76   2005

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  • A high output-power piezoelectric micropump using inertia of pipe Reviewed

    K Yoshida, YO Jung, T Seto, K Takagi, JH Park, S Yokota

    Proceedings of the Sixth International Conference on Fluid Power Transmission and Control   394 - 397   2005

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  • A high performance planar ECF pump for liquid cooling of high power electronic chips Reviewed

    S Yokota, WS Seo, K Yoshida, K Edamura

    Proceedings of the Sixth International Conference on Fluid Power Transmission and Control   234 - 237   2005

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  • A Micro Fluid Power System Using Magneto-Rheological Fluid Valve-Body Reviewed

    K. Yoshida, Y.-O. Jung, S. Yokota

    Proc. 1st Int. Conf. on Manufacuring, Machine Design and Tribology (ICMDT2005)   1 - 4   2005

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  • A Microvalve Using Magneto-Rheological Fluid Reviewed

    YOSHIDA Kazuhiro, TAKAMATSU Tamaki, YONEDA Yuichi, YOKOTA Shinichi

    Transactions of the Japan Society of Mechanical Engineers. Series C.   71 ( 704 )   1355 - 1360   2005

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    For millimeter-sized working micromachines using fluid power with high density, a novel microvalve with simple structure using magneto-rheological (MR) fluid is proposed and called the micro MR valve. The micro MR valve utilizes the apparent viscosity controllability of the MR fluid in the magnetic field. To control sufficiently high magnetic flux density in the microvalve, a magnetic circuit using a permanent magnet, a thermosensitive ferrite, and Peltier elements called the thermo-control magnetic circuit is introduced. First, the micro MR valve is proposed and the basic characteristics are theoretically investigated. Second, the thermo-control magnetic circuit is fabricated and the static and dynamic characteristics are experimentally investigated and improved. Finally, a 3-port micro MR valve is fabricated and the characteristics are experimentally clarified and improved.

    DOI: 10.1299/kikaic.71.1355

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  • A Thin-Planar Pump Using Electro-Conjugate Fluid (ECF) for Liquid Cooling of Electronic Chips Reviewed

    YOKOTA S., SEO Woo-Suk, YOSHIDA Kazuhiro, EDAMURA Kazuya

    Transactions of the Japan Society of Mechanical Engineers. Series C.   71 ( 709 )   2798 - 2804   2005

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    This paper presents a novel liquid cooling concept for heat rejection of high power electronic chips existing in notebook computers etc. In order to realize a liquid cooling system for the electronic chips, such as advanced notebook CPUs, a simple thin-planar pump using electro-conjugate fluid (ECF) is proposed, fabricated, and experimentally investigated. The ECF is a kind of dielectric and functional fluids,which generates jet flows (ECF-jets) by applying static electric field through a pair of rod-like electrodes. The ECF-jet directly acts on the working fluid, so the proposed planar ECF pump needs no moving part, produces no vibration and noise. The experiments of the fabricated thin-planar ECF pump with A 4 size were performed with four different flow channel heights and seven different electrode patterns. The no-load flow rate of 5.5 cm^3/s, maximum output pressure of 7.1 kPa, and maximum output power of 11.6 mW are obtained at an applied voltage of 2.0 kV. Through the experimental results, the fesibility of the thin-planar ECF pump is confirmed as a power source of the liquid cooling system on advanced notebook computers.

    DOI: 10.1299/kikaic.71.2798

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  • A Planar Pump Using Electro-Conjugate Fluids (ECF),for Liquid Cooling of Electronic Chips

    YOKOTA Shinichi, SEO Woo-Suk, YOSHIDA Kazuhiro, EDAMURA Kazuya

    The proceedings of the JSME annual meeting   2004   365 - 366   2004

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    This paper presents a liquid cooling concept for heat rejection of high power electronic chips existing in notebook computers etc. In order to realize, a liquid cooling system for the electronic chips such as notebook CPUs, a planar pump using the electro-conjugate fluid (ECF) is proposed and developed as a power source of the liquid cooling system. The ECF is a kind of dielectric and functional fluids, which generates jet flows (ECF-jets) by applying static electric field through a pair of rod-like electrodes. The ECF-jet directly interacts on the working fluid, so the proposed planar ECF pump needs no moving part, produces no vibration and noise. The ECF-jet intensity depends on the applied electric field, and electric field strength is related to the electrode dimensions. In the present investigation, we compared the pumping performance of various electrode dimensions and flow channel heights in order to establish the electrode design rules for improving the pumping performance of the planar ECF pump.

    DOI: 10.1299/jsmemecjo.2004.7.0_365

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  • Resonantly-Driven Piezoelectric Micropumps Using Active Check Valves Reviewed

    J.-H. Park, K. Yoshida, S. Yokota, T. Seto, K. Takagi, Y.-B. Ham, S. N. Yun

    Proc. 9th Int. Conf. on New Actuators (ACTUATOR 2004)   557 - 560   2004

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  • A Study on High-Output Resonace-Driven Piezoelectric Micropumps Using Active Check Valves Reviewed

    J.-H. Park, K. Yoshida, C. Ishikawa, S. Yokota, T. Seto, K. Takagi

    J. of Robotics and Mechatronics   16 ( 2 )   171 - 177   2004

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  • A Valve-Integrated MR Cylinder Using Magneto-Rheological Fluid Reviewed

    K. Yoshida, T. Soga, S. Yokota, M. Kawachi, K. Edamura

    Proc. 9th Int. Conf. on New Actuators (ACTUATOR 2004)   609 - 612   2004

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  • A Planar Pump Using Electro-Conjugate Fluid (ECF) for Liquid Cooling of Electronic Chips Reviewed

    S. Yokota, W.-S. Seo, K. Yoshida, K. Edamura

    Proc. 8th Int. Conf. on Mechatronics Technology (ICMT 2004)   127 - 131   2004

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  • Optimal Structure of a Micropump Using Inertia Effect of Pipeline Element Reviewed

    YOSHIDA K., JUNG Yeon-Oh, SETO Takeshi, TAKAGI Kunihiko, PARK Jung-Ho, YOKOTA Shinichi

    Trans. of JSME, Ser. C   70 ( 697 )   2668 - 2673   2004

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    For fluid microactuators and micro factory, the authors have proposed a novel high output micropump using inertia effect of pipeline element which has a pipeline element in place of an outlet check valve and verified the effectiveness with a fabricated micropump. To increase the output power and to miniaturize the size, this paper establishes a simple nonlinear mathematical model with lumped parameters and verifies the effectiveness comparing the simulation results with the experimental results. Then, the optimal structure of the micropump is investigated through the simulation with different sizes of the pipeline element and so on. Lastly, a micropump is fabricated and the load characteristics are experimentally investigated.

    DOI: 10.1299/kikaic.70.2668

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  • A Manipulator Using MR Cylinders

    YOSHIDA Kazuhiro, SOGA Tsutomu, YOKOTA Shinichi, KAWACHI Masashi, EDAMURA Kazuya, NAGAMINE Yasuyuki

    The proceedings of the JSME annual meeting   2004   253 - 254   2004

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    A manipulator using novel hydraulic actuators named the MR (Magneto-Rheological) cylinders is developed. The MR cylinder is composed of a piston with electromagnets and a cylinder. MR fluid that is a functional fluid whose apparent viscosity can be controlled through the applied magentic field flows in the gap between the piston and cylinder and the differential pressure is controlled by the current applied for the electromagnets. The MR cylinder features compactness and large stroke. In this paper, a 2-link manipulaor using the MR cylinders is fabricated and the static and dynamic characteristics are experimentally investigated.

    DOI: 10.1299/jsmemecjo.2004.4.0_253

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  • An MR Cylinder-Driven Manipulator Using Magneto-Rheological Fluid Reviewed

    K. Yoshida, T. Soga, S. Yokota, M. Kawachi, K. Edamura

    Proc. 8th Int.Conf. on Mechatronics Technology (ICMT 2004)   189 - 194   2004

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  • Actuators Using Functional Fluids

    YOKOTA Shinichi, YOSHIDA Kazuhiro

    JRSJ   21 ( 7 )   717 - 721   2003.10

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    DOI: 10.7210/jrsj.21.717

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  • A Simulation on a Micropump Using Inertia Effect of the Fluid

    YOSHIDA Kazuhiro, JUNG Yeon Oh, SETO Takeshi, TAKAGI Kunihiko, PARK Jung Ho, YOKOTA Shinichi

    The proceedings of the JSME annual meeting   2003   229 - 230   2003

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    For fluid microactuators and microfactory, the authors have proposed a novel high output micropump using inertia effect of fluid which has a pipeline element in place of an outlet check valve and verified the effectiveness with a fabricated micropump. To increase the output power and to miniaturize the size, the paper establishes a simple mathematical model with lumped parameters and verifies the effectiveness comparing the simulation and experimental results. Also, the optimal pump structure is investigated through simulations.

    DOI: 10.1299/jsmemecjo.2003.7.0_229

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  • A Valve-Integrated Microactuator Using Homogeneous ER Fluid Reviewed

    K. Yoshida, H. Yano, J.-H. Park, S. Yokota

    J. of Robotics and Mechatronics   15 ( 2 )   244 - 250   2003

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  • Development of High-Power Micropump Using Inertia Effect of Fluid for Small-Sized Fluid Actuators Reviewed

    T. Seto, K. Takagi, K. Yoshida, J.-H. Park, S. Yokota

    J. of Robotics and Mechatronics   15 ( 2 )   128 - 135   2003

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  • Development of Micromachines Using Improved Resonantly-Driven Piezoelectric Micropumps Reviewed

    J.-H. Park, K. Yoshida, S. Yokota, T. Seto, K. Takagi

    Proc. 4th Int. Symp. on Fluid Power Transmission and Control (ISFP2003)   536 - 541   2003

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  • A Microvalve Using MR Fluid Valve-Body Reviewed

    YOSHIDA Kazuhiro, JUNG Yeon-Oh, YOKOTA Shinichi

    Transactions of the Japan Society of Mechanical Engineers. Series C.   69 ( 682 )   1633 - 1639   2003

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    To realize a practical micromachine using fluid power with high power density, a novel microvalve (MLV (Magnetizable Liquid Valve-body) valve) using MR (magneto-rheological) fluid as a valve-body is proposed and investigated. Column of MR fluid is supported as a valve-body by a permanent magnet and is deformed by an electromagnet to control the opening. The proposed MLV valve solves leakage problem caused by the large machining errors compared with its small size. A MLV valve is fabricated with 10×10×7 mm^3 in size and the magnetic control and the flow control characteristics are experimentally investigated. Next, to expand the pressure control range, the magnetic poles are fabricated with different shapes and the suitable shape is selected based on the deformation of the MR fluid valve-body due to the applied current. Also, the effect of dither is investigated to decrease the hystereses. Then, the static and dynamic characteristics of the flow control of the improved MLV valve are experimentally investigated. As a result, flow rate control range of 30 mm^3/s is realized with supply pressure of 35 kPa.

    DOI: 10.1299/kikaic.69.1633

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  • A Bellows-Driven Manipulator Using a New Magneto-Rheological Fluid Reviewed

    K. Yoshida, J.-H. Park, S. Yokota, M. Kawachi, K. Edamura

    Proc. 4th Int. Symp. on Fluid Power Transmission and Control (ISFP2003)   542 - 547   2003

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  • A piezoelectric micropump using resonance drive with high power density Reviewed

    JH Park, S Yokota, K Yoshida

    JSME INTERNATIONAL JOURNAL SERIES C-MECHANICAL SYSTEMS MACHINE ELEMENTS AND MANUFACTURING   45 ( 2 )   502 - 509   2002.6

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  • Fabrication of micro electro-rheological valves (ER valves) by micromachining and experiments Reviewed

    K Yoshida, M Kikuchi, JH Park, S Yokota

    SENSORS AND ACTUATORS A-PHYSICAL   95 ( 2-3 )   227 - 233   2002.1

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    DOI: 10.1016/S0924-4247(01)00730-0

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  • A Bellows-Driven Motion Control System Using a Magneto-Rheological FLuid Reviewed

    K. Yoshida, H. Takahashi, S. Yokota, M. Kawachi, K. Edamura

    Proc. 5th JFPS Int. Symp. on Fluid Power, Nara 2002   2 ( 5 )   403 - 408   2002

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    A simple control valve using a magneto-rheological (MR) fluid has been proposed and called the MR valve. The MR valve utilizes the apparent viscosity controllability of the MR fluid in the magnetic field and controls high-level fluid power without moving parts. However, conventional MR fluids have high base viscosities to disperse heavy soft iron particles and lose fluid power in pipes. In this study, low base viscosity MR fluids aredeveloped using lightweight ferrite particles and applied to a bellows-driven motion control system. First, four MR fluids are fabricated with different compositions and the basic characteristics are experimentally investigated. Second, a small-sized three-port MR valve using a permanent magnet is proposed and the most suitable MR fluid is selected through theoretical evaluation to minimize the valve size. Third, the three-port MR valve is fabricated and applied to a bellows-driven motion control system.

    DOI: 10.5739/isfp.2002.403

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  • A Microvalve Using MR Fluid Valve-Body Reviewed

    K. Yoshida, Y.-O. Jung, S. Yokota

    Proc. 6th Int. Conf. Mechatronics Technology (ICMT 2002)   423 - 428   2002

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  • A Microvalve Using an MRF Drop : Expansion of Pressure Control Range

    YOSHIDA Kazuhiro, JUNG Yeon Oh, YOKOTA Shinichi

    The proceedings of the JSME annual meeting   2002   251 - 252   2002

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    To realize a practical micromachine using fluid power with high power density, a novel microvalve using an MRF (magneto-rheological fluid) drop has been proposed and investigated. MRF is supported as a valve-body by a permanent magnet and is deformed by an electromagnet to control the opening. The proposed microvalve solves leakage problem caused by the large machining errors compared with its small size. To expand the pressure control range, in this paper, the magnetic poles are fabricated with different shapes and the optimal shape is selected based on the displacement of MRF valve-body due to the applied current. Then, the flow control characteristics are experimentally investigated with tap water as a working fluid.

    DOI: 10.1299/jsmemecjo.2002.7.0_251

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  • A Resonantly-Driven Piezoelectric Micropump Using Active-Type Check Valves

    PARK Jung Ho, YOSHIDA Kazuhiro, IGARASHI Koichi, YOKOTA Shinichi, SETO Takeshi, TAKAGI Kunihiko

    The proceedings of the JSME annual meeting   2002   253 - 254   2002

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    In this paper, to obtain further performance of the resonantly-driven piezoelectric micropump developed as a micro fluid power source applicable to microfactory or micromachines using fluid power, a novel check valve that actively controls valve open/close motion using piezoelectric actuator is proposed and static characteristics between flow rates across the developed check valve and applied pressures are investigated. Employing the active-type check valve instead of conventional passive-type is expected to realize some advantages such as an increased valve-opening area and response, a low damping ratio and a bi-directional flow using an adequate timing control for closing motion. A prototype micropump using two active-type check valves for inlet and outlet is fabricated with the effective size of 17×18×11(mm)^3. Through experiments on frequency characteristics of flow rate without load pressure, the validity of the proposed active-type check valves is verified.

    DOI: 10.1299/jsmemecjo.2002.7.0_253

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  • Development of Resonantly-Driven Piezoelectric Micropump and Its Application to Micro Press Reviewed

    J.-H. Park, K. Yoshida, Y. Nakasu, S. Yokota, T. Seto, K. Takagi

    Proc. 8th Int. Conf. New Actuators (ACTUATOR 2002)   240 - 243   2002

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  • A Resonantly-Driven Piezoelectric Micropump for Microfactory Reviewed

    J.-H. Park, K. Yoshida, Y. Nakasu, S. Yokota, T. Seto, K. Takagi

    Proc. 6th Int. Conf. Mechatronics Technology (ICMT 2002)   417 - 422   2002

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  • A Valve-Integrated Microactuator Using Homogeneous Electro-Rheological Fluid Reviewed

    K. Yoshida, H. Yano, J.-H. Park, S. Yokota

    Proc. 8th Mechatronics Forum Int. Conf. (Mechatronics 2002)   725 - 734   2002

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  • Development of an In-Pipe Mobile Micromachine Using Homogeneous ER Fluid Reviewed

    K. Yoshida, J.-H, Park T, Shimizu, S. Yokota

    Proc. 1st Taiwan-Japan Workshop on Mechanical and Aerospace Engineering   3   2001

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  • A micro ER valve fabricated by micromachining Reviewed

    K Yoshida, M Kikuchi, JH Park, S Yokota

    14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST   467 - 470   2001

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  • A Real-Time Motion Stereo Vision Based on Brightness Gradient Reviewed

    Kazuhiro Yoshida, Isao Watabe, Shinichi Yokota

    Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C   67 ( 653 )   178 - 184   2001

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    DOI: 10.1299/kikaic.67.178

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  • F-1329 A Real-Time Motion Stereo Vision Based on Brightness Gradient : An Application to Manipulator Control

    YOSHIDA Kazuhiro, TOMITA Takahiro, YOKOTA Shinichi

    The proceedings of the JSME annual meeting   1   281 - 282   2001

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    To realize autonomous manipulators which work outdoors, 3-D vision sensors are required to measure objects and environments under severe conditions. The authors have proposed a real-time motion stereo vision which measures 3-D coordinates of objects with simple calculations based on brightness gradient of images captured by a motion camera. In this paper, to improve the measuring accuracy, optimal parameters are derived experimentally and, based on the results, a downsized motion camera mechanism is fabricated. Then, the vision sensor is applied to 6-DOF electro-hydraulic manipulator control to grasp a column.

    DOI: 10.1299/jsmemecjo.VI.01.1.0_281

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  • A Micropump-Mounted In-Pipe Mobile Micromachine Using Homogeneous Electro-Rheological Fluid Reviewed

    K. Yoshida, J.-H. Park T, Shimizu, S. Yokota

    Proc. 3rd IFToMM Int. Micromechanism Symposium   2   2 - 7   2001

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  • An in-pipe mobile micromachine using fluid power (A mechanism adaptable to pipe diameters) Reviewed

    K Yoshida, K Takahashi, S Yokota

    JSME INTERNATIONAL JOURNAL SERIES B-FLUIDS AND THERMAL ENGINEERING   43 ( 1 )   29 - 35   2000.2

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    DOI: 10.1299/jsmeb.43.29

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  • A Micro Fluid Control System Using Homogeneous ER Fluid Reviewed

    Jung-Ho Park, Kazuhiro Yoshida, Shinichi Yokota

    Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C   66 ( 648 )   2700 - 2706   2000

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    DOI: 10.1299/kikaic.66.2700

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  • An SMA-Driven Micropump Using ECF Jet Cooling Reviewed

    Shinichi Yokota, Kazuhiro Yoshida, Takeshi Okayasu, Tomohide Kawaue, Yasufumi Otsubo, Kazuya Edamura

    Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C   66 ( 650 )   3516 - 3522   2000

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    DOI: 10.1299/kikaic.66.3516

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  • A Microvalve Using Homogeneous ER Fluids Reviewed

    Kazuhiro Yoshida, Jung-Ho Park, Hiroki Takatori, Shinichi Yokota

    Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C   66 ( 649 )   3093 - 3099   2000

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    DOI: 10.1299/kikaic.66.3093

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  • Micro ER valve using homogeneous ER fluids and its application to micro fluid control system Reviewed

    JH Park, K Yoshida, S Yokota

    IECON 2000: 26TH ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY, VOLS 1-4   1809 - 1814   2000

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    DOI: 10.1109/IECON.2000.972550

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  • Micro Fluid Control System for Micromachines Reviewed

    Jung-Ho PARK, Kazuhiro YOSHIDA, Shinichi YOKOTA

    Sixth Triennial International Symposium on Fluid Control, Meausrement and Visualization (FLUCOME-2000) (FLUCOME-2000)   CD-ROM   2000

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  • Basic Characteristics of Microvalve Using MR Fluid

    YOSHIDA Kazuhiro, TAKAMATSU Tamaki, YOKOTA Shinichi

    The proceedings of the JSME annual meeting   2000   223 - 224   2000

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    By using MR fluid whose apparent viscosity is controlled by the applied magnetic field intensity, a simple microvalve called micro MR valve has been proposed by the authors for micromachines using high density fluid power. To increase the controllable magnetic field intensity, the micro MR valve utilizes a thermally-controlled magnetic circuit composed of a permanent magnet, a thermosensitive ferrite, and Peltier elements. In this paper, a micro MR valve with 8.8×7×5(mm)^3 in size is fabricated and the basic characteristics are experimentally investigated. The static and dynamic characteristics of the thermally-controlled magnetic circuit are clarified and the valve control performance is verified.

    DOI: 10.1299/jsmemecjo.2000.1.0_223

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  • A Micro ER Valve Fabricated by Micromachining : Fabrication of a 3-port micro ER valve and experiments

    YOSHIDA Kazuhiro, KIKUCHI Masaaki, PARK Jung Ho, YOKOTA Shinichi

    The proceedings of the JSME annual meeting   2000   225 - 226   2000

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    As an advanced control component for realization of high power micromachines using fluid power in millimeter size, the authors have proposed a simple micro ER valve using homogeneous ER fluids and fabricated several micro ER valves by conventional machining. Besides, to control micro grippers mounted on micromachines, further miniaturized 2-port micro ER valves have been fabricated by micromachining using anisotropic etching, sputter and anodic bonding. In this study, a 3-port micro ER valve composed of two 2-port micro ER valves is fabricated. Each 2-port micro ER valve has electrode dimensions of 1.2mm in width, 5mm in length and 0.08mm in gap length. Firstly, the static and dynamic characteristics are experimentally investigated with the blocked control port. From the results, it is ascertained that the controllable pressure change rate is about 60% of supply pressure and the rise time is about 0.2s. Next, an application to position control of a bellows microactuator is performed. With supply pressure of 0.17MPa and electric field strength change of 4.0kV/mm, the output displacement of 0.09mm and the generation force of 0.47N are realized.

    DOI: 10.1299/jsmemecjo.2000.1.0_225

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  • In-pipe Mobile Micromachine Using Fluid Power Adaptable to Pipe Diameters Reviewed

    Kazuhiro YOSHIDA, Ken TAKAHASHI, Shinichi, YOKOTA

    Journal of Robotics and Mechatronics   11 ( 5 )   417   2000

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  • Resonantly driven piezoelectric micropump - Fabrication of a micropump having high power density Reviewed

    JH Park, K Yoshida, S Yokota

    MECHATRONICS   9 ( 7 )   687 - 702   1999.10

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    DOI: 10.1016/S0957-4158(99)00028-8

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  • A Piezoelectric Micropump Using Resonance Drive with High Power Density Reviewed

    Jung-Ho PARK, Shinichi YOKOTA, Kazuhiro YOSHIDA

    Transactions of the Japan Society of Mechanical Engineers   65 ( 631 )   1071 - 1077   1999

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    As a power source for practical micromachines such as in-pipe mobile micromachines using fluid power, micropumps having high power density are required. In this paper, a piezoelectric micropump using resonance drive is proposed and developed. It basically consists of a bellows as a flexible pump chamber with an additional mass, a piezoelectric actuator for oscillating the bellows and cantilever type of two check valves. Firs fly, an effectiveness of the proposed micropump is confirmed through a fabrication of the large model and basic experiments. Secondly, a micropump with the size of φ9x10 mm for practical application is fabricated. Next, frequency characteristics and load characteristics of pressure-dependent flow rate are experimentally investigated with various structural parameters for optimal design. Through those experiments, the optimal amounts of additional mass and valve thickness are experimentally obtained for stable and high performance of the micropump. The maximum flow rate of 80 mm^3/s, maximum pumping pressure of 0.32 MPa and maximum power of 8.7 mW are obtained at the driving frequency of 2.0 kHz. Also the feasibility of the piezoelectric micropump using resonance drive is confirmed through a comparison with conventional micropumps on maximum power density.

    DOI: 10.1299/kikaic.65.1071

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  • A 1cm-cubic-size SMA-driven micropump using ECF jet cooling Reviewed

    K Yoshida, S Yokota, T Okayasu, Y Otsubo, K Edamura

    PROCEEDINGS OF THE 3RD INTERNATIONAL SYMPOSIUM ON FLUID POWER TRANSMISSION AND CONTROL   154 - 159   1999

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  • A Pressure Control Valve Using MR Fluid Reviewed

    S. Yokota, K. Yoshida, Y. Kondoh

    Proc. 4th JHPS Int. Symp. Fluid Power   377 - 380   1999

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  • Micro Fluid Control System Using Homogeneous ER Fluids (Proposition of Micro ER Valve and Basic Experiments) Reviewed

    J. H. Park, K. Yoshida, S. Yokota

    Proc. IEEE/RSJ Int. Conf. on Intelligent Robots and Systems (IROS’99)   2   1063 - 1068   1999

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  • A Real-Time Motion Stereo Vision Based on Brightness Difference Reviewed

    K. Yoshida, S. Yokota, I. Watabe

    Proc. IEEE/RSJ Int. Conf. on Intelligent Robots and Systems (IROS’99)   1   77   1999

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  • An In-Pipe Mobile Micromachine Using Fluid Power (A Mechanism Adaptable to Pipe Diameters) Reviewed

    Kazuhiro YOSHIDA, Ken TAKAHASHI, Shinichi YOKOTA

    Transactions of the Japan Society of Mechanical Engineers   65 ( 629 )   217 - 222   1999

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    Language:Japanese   Publisher:The Japan Society of Mechanical Engineers  

    To realize micro maintenance robots for small diameter pipes of nuclear reactors and so on, high power in-pipe mobile micromachines have been required. The authors have proposed the bellows microactuator using fluid power and have tried to apply the actuators to in-pipe mobile micromachines. In the previous papers, some inchworm mobile machine prototypes with 25 mm in diameter are fabricated and the traveling performances are experimentally investigated. In this paper, to miniaturize the in pipe mobile machine and to make it adaptable to pipe diameters, firstly, a simple rubber tube actuator constrained with a coil-spring is proposed and the static characteristics are investigated. Secondly, a supporting mechanism which utilizes a toggle mechanism and is adaptable to pipe diameters is proposed and the supporting forces are investigated. Finally, an in pipe mobile micromachine for pipes with 4-5 mm in diameter is fabricated and the maximum traveling velocity of 7 mm/s in both ahead and astern movements is experimentally verified.

    DOI: 10.1299/kikaib.65.217

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  • Dynamic Characteristics of Proportional Control Valve with Damping Chokes Reviewed

    増田健二, 田辺実, 吉田和弘, 横田眞一

    Transactions of The Japan Hydraulics & Pneumatics Society   30 ( 6 )   152 - 157   1999

  • Resonantly driven piezoelectric micropump Reviewed

    JH Park, K Yoshida, S Yokota

    MECHATRONICS '98   441 - 446   1998

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  • An In-Pipe Mobile Micromachine Using Fluid Power Adaptable to Pipe Diameters Reviewed

    K. Yoshida, K. Takahashi, S. Yokota

    Proc. 3rd Int. Conf. Advanced Mechatronics (ICAM’98)   1   306   1998

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  • An SMA-driven micropump using electro-conjugate fluid jet cooling Reviewed

    S Yokota, K Yoshida, T Kawaue, Y Otsubo, K Edamura

    MECHATRONICS '98   453 - 458   1998

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  • A Control Valve by Making Use of an Electro-rheological Fluid (Fundamental Characteristics and Application to a Pressure Control Valve) Reviewed

    Y. Kondoh, S. Yokota, K. Yoshida

    Proc. 4th Int. Conf. on Fluid Power Transmission and Control ('97 ICFP)   71   1997

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  • Piezoelectric Micropump Using Resonance Drive Reviewed

    J. H. Park, S. Yokota, K. Yoshida

    Proc. 5th Triennial Int. Symp. on Fluid Control, Measurement and Visualization (FLUCOME'97)   319   1997

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  • A Piezoelectric Micropump Using Resonance Drive: Proposal of Resonance Drive and Basic Experiments on Pump Characteristics Reviewed

    J. H. Park, K. Yoshida, S. Yokota

    Fluid Power Systems and Technology: Corrected Paper ASME 1997   FPST-Vol.4; DSC-Vol.   77 - 82   1997

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  • A Mini Valve in Application of Electro-Rheological Fluids Reviewed

    Y. Kondoh, S. Yokota, K. Yoshida

    Preprints of 13th World Congress of IFAC   A   493   1996

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  • A Small-Size Proportional Valve Using a Shape-Memory-Alloy Array Actuator Reviewed

    Shinichi YOKOTA, Kazuhiro YOSHIDA, Kenichi BANDOH, Masaaki SUHARA

    Transactions of the Japan Society of Mechanical Engineers   62 ( 593 )   224 - 229   1996

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    Language:Japanese   Publisher:The Japan Society of Mechanical Engineers  

    To realize a small-size proportional valve, a small-size and sufficiently high-stiffness actuator is required to drive the spool. However, with conventional actuators, such as solenoid actuators, it was difficult to realize such performance. In this study, an actuator using shape-memory-alloy (SMA) fine wires in arrayed arrangement is proposed and experimentally examined; it is expected to realize both suffciently high stiffness and response. First, the basic characteristics are examined, and the high stiffiness of a differential actuator using a pair of nine SMA wires and effectiveness of forced oil-cooling are shown. Secondly, to further improve the response, both of a simple method to increase the cooling oil flow and PI control are attempted. The former method is proved to be effective, although it has limitations. The latter method is proved to improve the response sufficiently and also to eliminate the hysteresis. Finally, based on these results, a proportional valve is constructed. The experimental results show that the spool is able to respond practically up to 40 Hz, with amplitude of 25μm.

    DOI: 10.1299/kikaib.62.224

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  • An In-Pipe Mobile Micromachine Using Fluid Power Traversable Branched Pipes Reviewed

    K. Yoshida, H. Mawatari, S. Yokota

    Proc. the Third JHPS Int. Symp. on Fluid Power Yokohama '96   229   1996

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  • In-Pipe Mobile Micromachine Using Fluid Power (Fabrication of a Small In-Pipe Mobile Mechanism Traversable Branched Pipes) Reviewed

    Kazuhiro YOSHIDA, Hideki MAWATARI, Shinichi YOKOTA

    Transactions of the Japan Society of Mechanical Engineers   62 ( 601 )   3341 - 3346   1996

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    Language:Japanese   Publisher:The Japan Society of Mechanical Engineers  

    In-pipe mobile micromachines have many applications including micro-maintenance robots for nuclear reactors and are expected to be realized in the near future. To realize practical in-pipe mobile micromachines, microactuators with sufficiently high output power are necessary and we have proposed the bellows microactuator which utilizes fluid power. In this study, an inchworm in-pipe mobile micromachine which can traverse branched pipes is fabricated using the bellows microactuators and its performance is examined. First, the performance of displacement magnification mechanisms useful in micromachines is theoretically investigated and the effectiveness of a pulley mechanism is proved. Secondly, the structure of the in-pipe mobile micromechanism is investigated. A bending and propelling mechanism using pulley mechanisms with 1 bending DOF is proposed and the structures of the front and rear supporting mechanisms are devised. Also the traveling sequence in branched pipes is theoretically investigated. Finally, an in-pipe mobile mechanism 25mm in diameter is fabricated and traveling experiments in straight and Y-shaped pipes are conducted. It is clarified that the traveling velocity in a straight pipe is increased from the output velocity of an actuator and the fabricated mechanism is able to traverse a Y-shaped pipe.

    DOI: 10.1299/kikaib.62.3341

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  • Response of Proportional Valve Using Shape-Memory-Alloy Array Actuators Reviewed

    S. Yokota, K, Yoshida K, Bandoh, M. Suhara

    Preprints of 13th World Congress of IFAC   A   505   1996

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  • A micromotor using a kind of dielectric fluids Reviewed

    S Yokota, K Yoshida, Y Otsubo, K Edamura

    IAS '96 - CONFERENCE RECORD OF THE 1996 IEEE INDUSTRY APPLICATIONS CONFERENCE, THIRTY-FIRST IAS ANNUAL MEETING, VOLS 1-4   3   1749 - 1754   1996

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  • A Pressure Control Valve in Application of an Electro-rheological Fluid (Application to Drive a One-link Manipulator) Reviewed

    S. Yokota, Y. Kondoh, K. Yoshida

    Proc. 9th Bath Int. Fluid Power Workshop   1   1996

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  • A Fluid Control Valve Making Use Of Electro-Rheological Fluid Reviewed

    Y. Kondoh, S. Yokota, K.Yoshida, K. Edamura

    Proc.the 4th Scandinavian Int. Conf.on Fluid Power   2   830   1995

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  • Development of a Small-Size Proportional Valve Using a Shape-Memory-Alloy Array Actuator Reviewed

    K. Yoshida, S. Yokota, K. Bandoh, M. Suhara

    Proc.of the 2th Int.Symp.on Fluid Power Transmission and Control(ISFP'95)   77   1995

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  • A Study on a Micro-Actuator Using Fluid Power (An Application to an In-Pipe Mobile Machine) Reviewed

    K. Yoshida, J. Shinohara, S. Yokota

    Proc. IFAC International Workshop on Trends in Hydraulic and Pneumatic Components and Systems   2   1994

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  • A Study on a Micro-Actuator Using Fluid Power (1st Report, Research on an Actuator Type Suitable for Micro-Mechanisms and Its Application to an In-Pipe Mobile Machine) Reviewed

    Kazuhiro YOSHIDA, Shinichi YOKOTA

    Journal of the Japan Hydraulics & Pneumatics Society   25 ( 2 )   281 - 288   1994

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    Language:Japanese   Publisher:The Japan Fluid Power System Society  

    For realizing practical actuators for micro-mechanisms, actuators using fluid power (called the "fluid actuators", hereafter) are investigated. First, the miniaturization characteristics of three kinds of fluid actuators are analyzed and the results are compared with those of five typical actuators such as an electro-static actuator and so on. The calculated maximum output power densities show the utility of the positive-displacement type fluid actuator at a size of 10 [μm] -10 [mm]. Next, to realize an actuator small in size, an actuator using bellows called the "bellows actuator" is proposed and an actuator with a diameter of 8.3 [mm] and length of 13 [mm] is constructed. The measured output power and density are 1 [W] and 1 [W/cm3], respectively. Then, by using the bellows actuators, an in-pipe mobile machine moving like an inchworm is constructed. The machine has a diameter of 23 [mm], length of 70 [mm] and simple structure suitable for miniaturization. The results of the mobile experiments show that the machine can lift a weight of 1 [kg] at a speed of 1 [mm/s].

    DOI: 10.5739/jfps1970.25.281

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  • A Study on a Micro-Actuator Using Fluid Power (2nd Report, Application for Small-Size In-Pipe Mobile Machines with a Single Power Supply Tube) Reviewed

    Kazuhiro YOSHIDA, Jun SHINOHARA, Shinichi YOKOTA

    Journal of the Japan Hydraulics & Pneumatics Society   25 ( 7 )   857 - 863   1994

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    Language:Japanese   Publisher:The Japan Fluid Power System Society  

    For more efficient use of micro-machines, micro-actuators using fluid power were investigated. An in-pipe mobile machine is one of practical micro-mechanisms and a simple machine using the bellows actuators was constructed previously. The machine is able to move like an inchworm due to the three actuators, however, it has to pull three power supply tubes using a large load force.<BR>To overcome this problem, this report attempted to reduce the number of tubes. After examining the performances of the bellows actuators, based on the analysis of the inchworm motion, the required characteristics were derived and a new supporting mechanism and small-size sequence valves were constructed. The newly constructed in-pipe mobile machine with a diameter of 25mm uses phosphor bronze bellows with a diameter of 8.3mm and length of 13mm. The mobile experiments show that the machine is able to lift a load of 5.9N at a speed of 1.5mm/s with an output power of 9.0mW. Also, a theoretical analysis of the mobile performance shows that the machine is able to produce a maximum output power of 120mW due to the improved conditions.

    DOI: 10.5739/jfps1970.25.857

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  • Study on High Power Micro-Actuator Using Fluid Power Reviewed

    K. Yoshida, S. Yokota

    Preprints of The 6th Int. Conf. on Flow Measurement(FLOMEKO'93)   1   122 - 130   1993

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  • High-Absorptive Electrolytic Polymer-Gel Actuator Reviewed

    T. Hayashi, K. Yoshida, Y. Terashima, Y. Ono

    Proc. 1st IFTOMM Int. Micromechanism Symp.   70   1993

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  • TRAVELING MICROMECHANISM ON CEILING Reviewed

    S SHIBAGAKI, T HAYASHI, K YOSHIDA

    INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING   26 ( 2 )   158 - 159   1992.6

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  • Study on Flexible Hardness Sensor for Cancer Palpation in Human Body -Proposition of Balloon-type Sensor and Its Experiments- Reviewed

    Kazuhiro YOSHIDA, Teru HAYASHI

    Journal of the Japan Society for Precision Engineering   58 ( 11 )   1893 - 1898   1992

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    The early detection of minute cancer is very important, but that is difficult when using X-ray, ultrasonic, or an endoscope because of the small size and the disturbance by mucus. However that is said to be easy with direct palpation if possible. Then the paper proposes a new hardness sensor for cancer palpation, which is inserted into a human body with an endoscope, presses the object surface uniformly by a balloon through elastic beams, and detects the hard part based on the deflection of the beams. The sensor features : 1)no-damaging property with its flexibility, 2)independence from the existence of mucus and the object shape, and 3)simple structure, etc. The paper also introduces the conductive rubber for plural strain gauges. The results of measuring experiments with the constructed sensor showed the availability in a straight and an uneven pipes and the possibility of 2-dimensional measurement.

    DOI: 10.2493/jjspe.58.1893

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    Other Link: https://jlc.jst.go.jp/DN/JALC/00079107709?from=CiNii

  • REAL-TIME STEREO VISION WITH MULTIPLE ARRAYED CAMERA Reviewed

    K YOSHIDA, S HIROSE

    1992 IEEE INTERNATIONAL CONF ON ROBOTICS AND AUTOMATION : PROCEEDINGS, VOLS 1-3   2   1765 - 1770   1992

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  • Reseach on Adhesive Mechanism to Flexible Surface -Development of Superior Adhesive Electrode for Electrocardiograph- Reviewed

    Noriaki TODOKORO, Teru HAYASHI, Kazuhiro YOSHIDA

    Journal of the Japan Society for Precision Engineering   58 ( 9 )   1527 - 1532   1992

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    The adhesive mechanism to flexible surface is more and more important for a medical electrode, the future minute medical machine which moves and inspects in stomach, and so on. In order to investigate the superior adhesive mechanism, the authors take up the suction electrode for electrocardiograph which is now desired to improve and also can be the base of mechanism with its simple structure. The chest suction electrode is constructed with a steel cup and a rubber sphere and can adhere to skin with the suction pressure. But there are many different types of skin, so the suction time varies. If the electrode is fallen off while electrocardiogram running, the inspection becomes impossible. Moreover it is a problem that the skin is engorged and damaged by the suction pressure. To overcome such problems, the paper makes experimental investigations on the influence of the shape and rubber elasticity of the electrode and the elastic characteristics of skin. Based on the results, the authors propose the "flexible over-hemisphere electrode", and confirm the validity with experiments. The newly proposed electrode could adhere to skin for far longer time than present ones with less suction pressure. Also, the paper tries to analyze the performance with a simple model.

    DOI: 10.2493/jjspe.58.1527

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    Other Link: https://jlc.jst.go.jp/DN/JALC/00078950665?from=CiNii

  • Oversampling FFT and Its Application for Analyzing of Signals Reviewed

    Iwao HAYASHI, Kazuhiro YOSHIDA, Sei'ichi KITAGAWA

    Transactions ofthe Japan Society of Mechanical Engineers   57 ( 541 )   2839 - 2845   1991

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    Language:Japanese   Publisher:The Japan Society of Mechanical Engineers  

    The fast Fourier transform is very often used when time or spatial signals must be decomposed into their components. Zoom-FFT can be used if the resolving power of frequency should be increased to precisely determine the time or spatial frequencies and the phase angles of the components. However, the zoom-FFT requires many periods of the signals for that purpose. Nevertheless, there are many cases in which the resolving power of frequency must be increased even when only one period of the signals is on hand or can be obtained from the property of the measurement. This paper describes the equation and the calculation procedure of oversampling fast Fourier transform, which is useful in these cases, and confirms that the derived oversampling FFT is effective through applying it as an example to precisely determine the spatial frequencies and the phase angles of interference fringes in a speckle detected in an experiment on in-plane vibration measurement.

    DOI: 10.1299/kikaic.57.2839

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  • Development of Real-Time Stereo Vision with Multi-Arrayed Camera Reviewed

    吉田和弘, 広瀬茂男

    Transactions of the Society of Instrument and Control Engineers   27 ( 4 )   436 - 443   1991

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  • Position Identification of Mobile Robot by Range Information Reviewed

    Shigeo HIROSE, Tadaaki HASEGAWA, Kazuhiro YOSHIDA

    Journal of the Robotics Society of Japan.   9 ( 6 )   685 - 691   1991

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    Language:Japanese   Publisher:The Robotics Society of Japan  

    A new position identification method for mobile robot is proposed. The method is to find out own position and orientation of the robot in wide unknown environment by means of horizontal cross section information measured by the range finder and compare it with pre-registered map information. The map information is expressed by five geometrical characteristics of the pair of segments which simplifies the contour of the local environments and the map is registered in the form of binary tree. On-line searching of the position and orientation is then executed on the binary tree. Position identification experiment is performed in a corridor of 50m in length resulted with 57% and 79% correct answer rates both in the condition of single point measurement and double points measurement, respectively. The required times are proved to be 10 second for range measurement by the range finder and 3 second for position identification calculation.

    DOI: 10.7210/jrsj.9.685

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  • The study of a map realization system: Consideration of real-time map generation Reviewed

    Shigeo Hirose, Kazuhiro Yoshida, Yasumasa Toratani

    Advanced Robotics   4 ( 3 )   223 - 242   1990

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1163/156855390X00279

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  • The Study of Map Realization System(Consideration on Real-Time Map Generation) Reviewed

    Shigeo HIROSE, Kazuhiro YOSHIDA, Yasumasa TORATANI

    Journal of the Robotics Society of Japan   6 ( 1 )   14 - 25   1988

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    Language:Japanese   Publisher:The Robotics Society of Japan  

    The basic problem to generate terrain map using the range finder's 3D information for mobile robot is considered. The representation of terrain map is investigated in the first place and a method called torus memory representation is introduced. The method to generate terrain map is divided into visible and invisible regions and discussed separately. As to the visible region, a method based on the sequential calculation of mean and mean deviation is proposed. As to the invisible region an associative processing of the memorized information (abbreviated A-interpolation method) which has been proposed by the authors for interpolation of invisible terrain is improved to bestow higher versatility and real time computation capability. Two experiments are made. One experiment is to measure and reproduce visible area map of the model terrain by using the MARS range finder mounted on the quadruped walking vehicle TITAN III. The other is the computer simulation experiment to compare the conventional method with proposed modified A-interpolation. The validity of the proposed methods are verified by these experiments.

    DOI: 10.7210/jrsj.6.14

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  • Laser Triangulation Range Finder Available under Direct Sunlight Reviewed

    K. Yoshida, S. Hirose

    Proc. IEEE International Conference on Robotics and Automation   3 ( 5 )   1702 - 451   1988

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    Publisher:The Society of Instrument and Control Engineers  

    The authors have developed a new type laser range finder, which enables a mobile robot to measure the distance to a natural object located one to five meters ahead with an error less than two percents. The system uses laser as weak as 1[mW], a safe level for human eyes, and is workable under bright daytime sunlight of about 100, 000[lx]. This laser range finder can quickly process data while compensating the motional error induced by the robot on which it is mounted and makes real time measurements of objects located ahead.<br>This laser range finder is featured by plural redundant range measuring systems and a newly introduced real time signal processing technique of the redundant signals. The laser range finder shows strong noise reduction characteristic by acting together with two conventional methods, namely, conventional optical filtering which preliminarily eliminates noise and the DDD signal processing proposed by the authors for separating reflected pulseform signals from ambient light on video signals.<br>The effectiveness of the proposed laser range finder system was demonstrated under direct sunlight by an experimental model mounted with two CCD cameras and a semiconductor laser projector of 1[mW] output power with 830[nm] wave length.

    DOI: 10.9746/sicetr1965.24.445

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  • The study of a map realization system (cancellation of ambient light and swaying motion of a robot) Reviewed

    Shigeo Hirose, Kazuhiro Yoshida, Kan Taguchi

    Advanced Robotics   2 ( 3 )   259 - 276   1987

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1163/156855387X00219

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  • The Study of Map Realization System(Canceling of ambient light and swaying motion) Reviewed

    Shigeo HIROSE, Kazuhiro YOSHIDA, Kan TAGUCHI

    Journal of the Robotics Society of Japan   4 ( 3 )   241 - 252   1986

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    Language:Japanese   Publisher:The Robotics Society of Japan  

    In order to increase the terrain adaptability, the walking robot has to install visual sensor. The paper defines the visual sensor for walking robot as a MAp Realization System, abbreviated as MARS, and investigates the way to realize practical 3 D range finding device which forms the major part of the MARS.<BR>Firstly the improvement of the range finder's performance to separate and extract projected laser slit light in ambient light is investigated. A video signal processing procedure named DDD (Dual signal extraction with Delay and Difference) method, which extracts the pulse signal by making use of the dual pattern of positive and negative pulse in differenced video signal, is proposed. The specific method of DDD, that extracts only the maximum pulse, is shown more effective and is called MaxDDD.<BR>A range finder with the signal processing system having optical interference filter, MaxDDD video signal processor and noise reduction software applies for the signals of adjacent scanning lines is constructed and shown its high S/N ratio.<BR>Secondly the structual and algorithmic consideration to realize real time compensation of the swinging motion of the walking robot and to generate the terrain map while walking is made. As a result it is shown that the position measurement of one point is executed within 240 micro second and thus enabled to generate a map in real time. The constructed MARS range finder device weighs 1. 8 kg and is designed compact.<BR>By these considerations the paper shows the feasibility to realize a practical visual system for walking robot.

    DOI: 10.7210/jrsj.4.241

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Books

  • ロボット工学ハンドブック(第3版)

    吉田和弘( Role: ContributorⅡ編8.3)

    2023.2 

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  • Distinguished Figures in Mechanism and Machine Science (Legacy and Contribution of the IFToMM Community, Part 5)

    N. Iwatsuki, K. Yoshida( Role: ContributorTeru Hayashi)

    Springer  2022.12 

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  • 機能性流体入門-基礎と応用-

    ( Role: Joint author)

    日本工業出版㈱  2021.7 

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  • アクチュエータの新材料,駆動制御,最新応用技術

    ( Role: Joint author)

    (株)技術情報協会  2017.3 

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  • アクチュエータ 研究開発の最前線

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    (株)エヌ・ティー・エス  2011.8 

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  • Next-Generation Actuators Leading Breakthrough

    ( Role: Joint author)

    Springer  2010  ( ISBN:9781848829909

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  • 実用精密位置決め技術事典

    ( Role: Joint author)

    (株)産業技術サービスセンター  2008.12 

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  • 最新機械機器要素技術

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    NGTコーポレーション  2008.6 

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  • アクチュエータ工学

    ( Role: Joint author)

    (株)養賢堂  2004.12 

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  • 2004年版フルードパワー工業総覧

    ( Role: Joint author)

    (株)重化学工業通信社  2003.10 

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  • マイクロマシンの工学的実現 マイクロ知能化運動システム

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    (株)日刊工業新聞社  1991.8 

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MISC

  • JFPS2024広島における機能性流体分野の研究動向

    吉田和弘

    フルードパワーシステム   56 ( 2 )   62 - 63   2025.3

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    Authorship:Lead author, Corresponding author   Language:Japanese   Publishing type:Meeting report  

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  • 第23回機素潤滑設計部門講演会(MDT2024)報告

    吉田和弘

    MACHINE DESIGN & TRIBOLOGY(機素潤滑設計部門ニュースレター)   43   12   2024.7

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    Authorship:Lead author, Corresponding author   Language:Japanese   Publishing type:Meeting report  

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  • 機能性流体の現状と将来像(その3)ECF及びEHD

    吉田和弘

    フルードパワー   37 ( 4 )   8 - 11   2023.10

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    Authorship:Lead author   Language:Japanese   Publishing type:Article, review, commentary, editorial, etc. (trade magazine, newspaper, online media)  

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  • 機能性流体の現状と将来像(その2)MRF, 磁性流体及びMCF

    吉田和弘

    フルードパワー   37 ( 3 )   8 - 12   2023.7

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    Authorship:Lead author   Language:Japanese   Publishing type:Article, review, commentary, editorial, etc. (trade magazine, newspaper, online media)  

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  • 機能性流体の現状と将来像(その1)機能性流体の概要とERFの応用

    吉田和弘

    フルードパワー   37 ( 2 )   7 - 11   2023.4

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  • 山梨講演会2022におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   54 ( 2 )   83 - 84   2023.3

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  • フレキシブルERマイクロバルブとその応用

    T. Sudhawiyangkul, 吉田和弘, 嚴祥仁, 金俊完

    日本フルードパワーシステム学会機能性流体フルードパワーシステムに関する研究委委員会研究成果報告書   17 - 20   2022.9

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  • 交流電気浸透とその応用

    吉田和弘, 浅井健太, 牧田耀, 嚴祥仁, 金俊完

    日本フルードパワーシステム学会機能性流体フルードパワーシステムに関する研究委委員会研究成果報告書   98 - 101   2022.9

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  • Preface to the Special Issue: Selected Papers from the 11th JFPS International Symposium on Fluid Power Hakodate 2020 (HAKODATE 2020)

    JFPS International Journal of Fluid Power System   1   1   2022.6

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  • 交流圧力源を用いた複数ERマイクロアクチュエータシステム

    三好智也, 吉田和弘, 嚴祥仁, 金俊完

    日本フルードパワーシステム学会機能性流体テクノロジーの次世代FPSへの展開に関する研究委員会研究成果報告書   40 - 44   2022.5

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  • 山梨講演会2021におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   53 ( 3 )   129 - 130   2022.5

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  • UV-LIGAによる電界共役流体マイクロ液圧源の開発とその応用

    韓冬, 吉田和弘, 金俊完

    日本フルードパワーシステム学会機能性流体テクノロジーの次世代FPSへの展開に関する研究委員会研究成果報告書   11 - 14   2022.5

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  • 交流電気浸透を応用したマイクロポンプ

    吉田和弘, 金俊完, 嚴祥仁, 横田眞一

    日本フルードパワーシステム学会機能性流体との融合化によるフルードパワーシステムの新展開に関する研究委員会研究成果報告書   83 - 86   2022.4

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  • ERFを用いたマイクロアクチュエータシステム

    吉田和弘, 金俊完, 嚴祥仁, 横田眞一

    日本フルードパワーシステム学会機能性流体との融合化によるフルードパワーシステムの新展開に関する研究委員会研究成果報告書   11 - 14   2022.4

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  • JFPS2020函館における講演論文の管理について

    吉田和弘

    フルードパワーシステム   53 ( 2 )   64 - 66   2022.3

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  • 機能性流体アクチュエータとその応用

    吉田和弘

    機械設計   66 ( 3 )   32 - 36   2022.3

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  • The 10th International Conference on Fluid Power Transmission and Control (ICFP 2021)におけるフルードパワー技術の研究動向

    吉田和弘

    フルードパワーシステム   52 ( 5 )   211 - 212   2021.9

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  • 山梨講演会2020におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   52 ( 3 )   117 - 118   2021.5

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  • 日本機械学会2020年度年次大会におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   52 ( 2 )   29 - 30   2021.3

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  • 2019年度の機能性流体分野の研究活動の動向

    吉田和弘

    フルードパワーシステム   51 ( E1 )   E16 - E18   2020.9

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  • 日本機械学会2019年度年次大会におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   51 ( 1 )   35 - 36   2020.1

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  • 第31回「電磁力関連のダイナミクス」シンポジウムにおけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   50 ( 6 )   276 - 277   2019.11

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  • ICMT2018におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   50 ( 3 )   21 - 23   2019.5

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  • 山梨講演会2018におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   50 ( 2 )   86 - 87   2019.3

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  • 機能性流体を用いたマイクロアクチュエータ

    吉田和弘

    油空圧技術   58 ( 2 )   1 - 6   2019.2

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  • マイクロ流体制御バルブ

    吉田和弘

    フルードパワーシステム   49 ( 6 )   287 - 289   2018.11

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  • 東京工業大学 横田・吉田・金研究室のフルードパワー研究

    吉田和弘, 金俊完

    油空圧技術2018年10月増刊号   104 - 109   2018.10

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  • 山梨講演会2017におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   49 ( 3 )   139 - 140   2018.5

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  • 山梨講演会2016におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   48 ( 3 )   153 - 154   2017

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  • 平成28年度の機能性流体分野の研究活動の動向

    吉田和弘

    フルードパワーシステム   48 ( E1 )   E14 - E16   2017

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  • Yoshida Laboratory, Tokyo Institute of Technology

    56 ( 12 )   26 - 30   2017

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  • 小特集「日本フルードパワーシステム学会賞受賞者および研究委員会の紹介」

    吉田和弘

    フルードパワーシステム   47 ( E1 )   E24 - E25   2016.8

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  • Overseas Research in Boston, USA

    47 ( 1 )   36 - 38   2016

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  • Yoshida Group, P & I Laboratory, Tokyo Institute of Technology

    55 ( 2 )   59 - 63   2016

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  • 平成27年度学会誌のレビュー

    吉田和弘

    フルードパワーシステム   47 ( E1 )   E6 - E7   2016

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  • Fundamental study on a micropump using stacked diaphragm-type DE actuator

    33 - 35   2016

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  • 354 Study on miniaturization of multiple actuator system using fluid resonance circuits

    YOSHIDA Kazuhiro, SASAYAMA Hiroki, EOM Sang In, YOKOTA Shinichi

    Yamanashi district conference   2015   86 - 87   2015.10

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  • 小特集「日本フルードパワーシステム学会賞受賞者および研究委員会の紹介」

    吉田和弘

    フルードパワーシステム   46 ( E1 )   E22 - E23   2015.8

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  • On the JFPS Best Conference Paper Award and the JFPS Best Student Paper Award

    46 ( 3 )   127 - 129   2015

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  • 平成26年度学会誌のレビュー

    吉田和弘

    フルードパワーシステム   46 ( E1 )   E2 - E3   2015

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  • 155 Characterization of an AC Electroosmotic Micropump Using Plate-Cylinder Electrode pair

    YOSHIDA Kazuhiro, WATANABE Maho, KIM Joon-wan, EOM Sang In, YOKOTA Shinichi

    Yamanashi district conference   2014   21 - 22   2014.10

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  • J1130103 Proposal of an AC Electroosmotic Micropump Using Plate-Cylinder Electrodes

    YOSHIDA Kazuhiro, WATANABE Maho, KIM Joon-wan, EOM Sang In, YOKOTA Shinichi

    Mechanical Engineering Congress, Japan   2014   "J1130103 - 1"-"J1130103-4"   2014.9

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    Alternative Current Electroosmosis(ACEO) is suitable for micro actuation systems, because the ACEO flow can be stably generated without electrolysis with simple structure having no moving parts and is caused by electrostatic force which is effective in micro area. For that reasons, ACEO is widely used in analytical devices for fluid and particle manipulation. However, existing ACEO micropumps can only realize low pressure and low flow rate, which becomes obstacles for further application such as microhydraulics. This paper presents new design of ACEO micropump using Plate-Cylinder electrodes called PC-ACEO-MP(Plate-Cylinder electrodes ACEO micropump) to enhance its performance. Using FEM simulation, we indicate its possibility of realizing high pressure(>10kPa) and high flow rate(>1mm^3/s) with less than 1cm^3 effective pump volume by using electrode plate having many hundreds of thousands of holes(smaller than 1cm^3 in diameter). We also propose a novel MEMS fabrication process for the PC-ACEO-MP electrode and realize it as a large model with 36100 holes of 10μm in diameter).

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  • 1108 Study on a MEMS-based ER microgripper using alternating-pressure source

    MIYOSHI Tomoya, YOSHIDA Kazuhiro, KIM Joon-wan, EOM Sang In, YOKOTA Shinichi

    The Machine Design and Tribology Division meeting in JSME   2014 ( 14 )   35 - 36   2014.4

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    We propose and develop a multi-DOF MEMS-based ER microgripper system using an alternating-pressure source,which is high power density and space-saving for in-pipe working micromachines,medical microrobots,and so on. Proposed system utilizes an ERF flow induced by synchronizing ER microvalves and the pressure source. The ER microvalve controls the electro-rheological fluid (ERF) flow through its apparent viscosity change due to the applied electric field. Each ER microfinger has only one pipe for supply and return with small diameter by transmitting pressure with low viscosity water. An ER microfinger having l mm long PDMS finger part with high-aspect ratio is fabricated by newly developed MEMS process,then the ER microgripper is experimentally characterized.

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  • 2203 Development of a Multi-DOF Microactuator System Using High Frequency Alternating-Pressure Source

    YOSHIDA Kazuhiro, YAMAMOTO Satoshi, EOM Sang In, YOKOTA Shinichi

    The Machine Design and Tribology Division meeting in JSME   2014 ( 14 )   135 - 136   2014.4

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    This paper presents a multi-DOF (degrees of freedom) microactuator system using a high frequency alternating-pressure source. The alternating flow from the pressure source is rectified by the synchronized active valves to drive plural hydraulic microactuators. To increase the position resolution and downsize the pressure source, the driving frequency was increased using high response piezoelectric elements. Thin piezoelectric valves and an alternating-pressure source were proposed and developed using piezoelectric bimorph disks. In addition, a 10 mm long bending rubber actuator with two chambers was fabricated and a system was constructed. The bending motion of the actuator was experimentally clarified.

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  • 機能性流体の応用事例:次世代フルードパワーシステムを目指して

    吉田和弘

    フルードパワーシステム   45 ( 4 )   168 - 172   2014

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  • ACTUATOR14におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   45 ( 6 )   278 - 279   2014

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  • 編集委員会の活動報告

    吉田和弘

    フルードパワーシステム   45 ( E1 )   E22 - E23   2014

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  • IFPEX2014〜カレッジコーナーに見る最新技術~ 東京工業大学 横田・吉田・金研究室

    吉田和弘, 金俊完, 横田眞一

    油空圧技術   53 ( 12 )   19 - 23   2014

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  • 小特集「日本フルードパワーシステム学会活動の紹介」

    吉田和弘

    フルードパワーシステム   45 ( E1 )   E20 - E21   2014

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  • 157 A MEMS-Based ER Microfinger Using Alternating-Pressure Source

    YOSHIDA Kazuhiro, MIYOSHI Tomoya, EOM Sang In, YOKOTA Shinichi

    Yamanashi district conference   2013   24 - 25   2013.10

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  • 156 A MEMS-Based Divided Electrode Type Flexible Electro-Rheological Valve

    YOSHIDA Kazuhiro, TSUKAMOTO Noboru, KIN Joon-wan, YOKOTA Shinichi

    Yamanashi district conference   2013   22 - 23   2013.10

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  • 159 A Multi-DOF Microactuator System Using High Frequency Alternating Pressure Source

    YOSHIDA Kazuhiro, YAMAMOTO Satoshi, EOM Sabg In, YOKOTA Shinichi

    Yamanashi district conference   2013   28 - 29   2013.10

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  • J114025 A Multi-DOF Microactuator System Using Variable Frequency Alternating-Pressure Source

    YOSHIDA Kazuhiro, WATANABE Maho, EOM Sang In, YOKOTA Shinichi

    Mechanical Engineering Congress, Japan   2013   "J114025 - 1"-"J114025-5"   2013.9

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    This paper presents a multi degrees-of-freedom (DOF) microactuator system using variable frequency alternating-pressure fluid power source, which is space-saving and easy to control for in-pipe working micromachines, medical microrobots, and so on. Previous researches proved that fluid power actuator system is suitable for using in micro area. However, a conventional fluid actuator needs two pipes for supply and drain, which increases the system size for multi actuators, and also needs considerable signal wires for valves which makes the system complex. The proposed system is composed of an alternating-pressure source, fluid resonance circuits composed of narrow channels and diaphragm springs, orifices, check valves and actuators. In this system, we employs fluid resonance to control multi actuators. This system needs only one small pipe to supply and drain, which is suitable for small multi-DOF system. Moreover, this system does not need signal wires for each valve, so the system is simple. In this paper, for verification of the proposed system, we fabricated two large models for 10mm size actuators to confirm their motion. Through experiments, we confirmed the maximum displacement of490iim at pressure amplitude of 50kPa, and controlled motion of the actuators by changing the driving frequency. Then we composed two-DOF system using fabricated elements and confirmed the independent and multi-DOF motion.

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  • 2A1-D08 A Microgripper Using Divided Electrode Type Flexible ER Valves(Mechanism and Control for Actuator (1))

    YOSHIDA Kazuhiro, TSUKAMOTO Noboru, KIM Joon-wan, YOKOTA Shinichi

    2013   "2A1 - D08(1)"-"2A1-D08(2)"   2013.5

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    For maintenance microrobots for small diameter pipes in chemical plants and so on, we present a 3mm long microgripper using divided electrode type flexible electro-rheological valves (DE-FERVs) fabricated by MEMS technologies. Each arm of the microgripper consists of a DE-FERV and a rubber chamber. A flow channel of the DE-FERV sandwiched between a pair of parallel plate electrodes can control the electro-rheological fluid (ERF) flow by its apparent viscosity change due to the applied electric field. The DE-FERV is composed of a rubber tube and divided electrode pairs and is a series connection of plural short length ER valve units. It can control high pressure accumulating the pressure of the ER valve units and bend at the intervals between the ER valve units. In this paper, the FEM analysis is performed to design a 3mm long arm of the microgripper and MEMS fabrication process is proposed and investigated.

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  • 東京工業大学横田・吉田研究室

    横田眞一, 吉田和弘

    フルードパワーシステム   44 ( 1 )   54 - 56   2013

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  • 小特集「日本フルードパワーシステム学会賞受賞者および研究委員会の紹介」

    吉田和弘

    フルードパワーシステム   44 ( E1 )   E19 - E20   2013

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  • 〜滑らかな関節の動きを実現するマテリアル〜「ER流体,MR流体,電界共役流体」

    吉田和弘, 横田眞一

    Material Stage   13 ( 7 )   36 - 39   2013

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  • 平成24年度学会誌のレビュー

    吉田和弘

    フルードパワーシステム   44 ( E1 )   E2 - E3   2013

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  • Applications of Electro-Conjugate Fluids and Electro-Rheological Fluids

    YOKOTA Shinichi, YOSHIDA Kazuhiro

    JRSJ   31 ( 5 )   461 - 464   2013

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    Language:Japanese   Publisher:The Robotics Society of Japan  

    DOI: 10.7210/jrsj.31.461

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  • 2013年度精密工学会春季大会学術講演会におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   44 ( 4 )   231 - 232   2013

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  • Mechatronics2012におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   44 ( 2 )   94 - 95   2013

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  • 特集「ものづくり教育(企業編)」発行にあたって

    吉田和弘

    フルードパワーシステム   44 ( 3 )   142   2013

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  • 特集「ものづくり教育(大学編)」発行にあたって

    吉田和弘

    フルードパワーシステム   44 ( 1 )   7   2013

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  • 154 Characterization of AC ElectroosmoticMicropump Using SI it-Rectangular Parallelepiped Electrodes Pairs

    YOSHIDA Kazuhiro, SATO Tomoyuki, EOM Sang In, Kim Joonwan, YOKOTA Shinichi

    Yamanashi district conference   2012   18 - 19   2012.10

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  • 155 A Study on Multi-DOF ER Actuator with Shape Adaptation Capability : Development of Movable Electrode Type ER Valve

    YOSHIDA Kazuhiro, HAKODA Satoshi, EOM Sang In, YOKOTA Shinichi

    Yamanashi district conference   2012   20 - 21   2012.10

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  • 2P1-E10 ECF Jet-driven Micro Hydraulic Cylinder(Mechanism and Control for Actuator(3))

    EOM Sang In, MASUDA Hiroki, YOKOTA Shinichi, YOSHIDA Kazuhiro, EDAMURA Kazuya

    2012   "2P1 - E10(1)"-"2P1-E10(2)"   2012.5

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    In this study a micro hydraulic cylinder driven by ECF jet is developed and its performance characteristics are evaluated. ECF (Electro-conjugate fluid) is a kind of functional fluid which generates a powerful jet flow when a high DC voltage is applied, and the generated jet is called ECF jet. Developed micro hydraulic cylinder is composed of piston parts and ECF jet generators, etc. The inside of micro hydraulic cylinder is filled with ECF and enclosed by the rolling diaphragms and the ECF jet generators include electrodes to apply the high DC voltage. When a high DC voltage is applied to the ECF, the generated ECF jet drives the micro hydraulic cylinder. In this report, a prototype of micro hydraulic cylinder was fabricated and its driving test was successfully demonstrated.

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  • 2211 Proposition of a Multi-DOF ER Microactuator System Using Alternating-Pressure Source

    YOSHIDA Kazuhiro, MIYOSHI Tomoya, EOM Sang In, YOKOTA Shinichi

    The Machine Design and Tribology Division meeting in JSME   2012 ( 12 )   157 - 158   2012.4

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    As a multi-DOF (degrees of freedom) microactuator system for maintenance microrobots for small diameter pipes in power plants and so on, we proposed a novel multi-DOF ER microactuator system using an alternating-pressure source. In the system, the alternating-pressure of low viscosity fluid is transmitted to ERF (electro-rheological fluid); the induced flow is rectified through ER microvalves and applied to each fluid power microactuator. The pipe connecting the pressure source and each actuator is only one for both outflow and inflow and is applicable small diameter due to the low viscosity fluid, which can solve the piping problem of multi-DOF ER microactuator systems. In this paper, the system was proposed and the basic characteristics were analyzed.

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  • 2210 A Microgripper Using Valve Division Type Flexible ER Valves

    YOSHIDA Kazuhiro, HARA Souta, EOM Sang In, YOKOTA Shinichi

    The Machine Design and Tribology Division meeting in JSME   2012 ( 12 )   155 - 156   2012.4

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    For maintenance microrobots for small diameter pipes in power plants and so on, we proposed and developed a novel microgripper using valve division type flexible electro-rheological valves (FERVs). Each bendable arm consists of the FERV and a rubber chamber with several millimeters long. The FERV has plural short length ER valves in a rubber channel. Each ER valve controls the electro-rheological fluid (ERF) flow by changing the viscosity with the electric field. The FERV has high flexibility with sufficient pressure control range. The rubber chamber has plural walls inside to restrict the radial expansion and axially extends by the inner pressure controlled with the FERV. Arm large models and a gripper were fabricated and characterized.

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  • 第29回日本ロボット学会学術講演会におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   43 ( 1 )   38 - 39   2012

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  • 第12回日本機械学会機素潤滑設計部門講演会におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   43 ( 5 )   300 - 301   2012

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  • 機能性流体を応用したマイクロデバイス

    吉田和弘, 横田眞一

    油空圧技術   51 ( 11 )   99 - 103   2012

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  • 機能性流体ERFを用いた位置制御マイクロシステム

    吉田和弘, 横田眞一

    油空圧技術   51 ( 2 )   11 - 16   2012

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  • 特別招待講演の概要

    吉田和弘

    フルードパワーシステム   43 ( 2 )   82 - 86   2012

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  • 260 Prototyping and Characteristics of Micro Piston Cylinder driven by Pressure of ECF jet

    MASUDA Hiroki, EOM Sang In, YOKOTA Shinichi, YOSHIDA Kazuhiro, EDAMURA Kazuya

    2011   54 - 55   2011.10

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  • 259 A Microgripper Using Flexible ER Valve

    YOSHIDA Kazuhiro, HARA Souta, EOM Sang In, YOKOTA Shinichi

    2011   52 - 53   2011.10

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  • J112021 偏流板を用いた交流電気浸透マイクロポンプ([J11202]次世代アクチュエータシステム(2))

    吉田 和弘, 村松 恵治, 金 俊完, 嚴 祥仁, 横田 眞一

    年次大会 : Mechanical Engineering Congress, Japan   2011   "J112021 - 1"-"J112021-3"   2011.9

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    An AC Electroosmosis Micropump Using Flow Deflectors

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  • ICMT2010におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   42 ( 2 )   145 - 147   2011

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  • IFPEX2011 〜フルードパワーの可能性〜 東京工業大学 横田・吉田研究室

    横田眞一, 吉田和弘

    油空圧技術   50 ( 6 )   24 - 26   2011

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  • 液晶系ERFを用いたマイクロシステム

    吉田和弘, 横田眞一

    フルードパワーシステム   42 ( 1 )   16 - 19   2011

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  • ICMDT2011におけるフルードパワー技術研究

    吉田和弘

    フルードパワーシステム   42 ( 5 )   292 - 293   2011

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  • 均一系ER流体を用いたフレキシブルERマイクロアクチュエータ

    吉田和弘, 金俊完, 横田眞一

    日本フルードパワーシステム学会機能性流体を活用した次世代型フルードパワーシステムに関する研究委員会研究成果報告書   22 - 25   2010

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  • 1P1-B04 Miniaturization of bellofram actuator and its application to ER microactuators

    YOSHIDA Kazuhiro, KIM Joon-wan, ANZAI Takafumi, YOKOTA Shinichi

    2010   "1P1 - B04(1)"-"1P1-B04(2)"   2010

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    For in-pipe working micromachines using fluid power, we propose and develop a micro bellofram actuator (MBA) equipped with an ER valve. The MBA features larger displacement than metal bellows actuators and higher output force than rubber bellows actuators. Based on the consideration of various parameters of the micro bellofram, MBA was successfully fabricated. The fabricated MBA showed larger ratio (52%) of the displacement to the free length. ER valve-integrated MBA with 10mm in diameter was fabricated and the static characteristics were experimentally clarified.

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  • FPIC会議報告:日本機械学会第10回機素潤滑設計部門講演会におけるフルードパワー技術研究動向

    吉田和弘

    フルードパワーシステム   41 ( 5 )   315 - 317   2010

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  • ACTUATOR 2010におけるフルードパワー技術研究動向

    吉田和弘

    フルードパワーシステム   41 ( 6 )   405 - 407   2010

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  • フルードパワー研究 機能性流体10年間の動向

    吉田和弘

    フルードパワーシステム   41 ( 2 )   118 - 122   2010

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  • カリフォルニア滞在記

    吉田 和弘

    フルードパワーシステム   40 ( E1 )   E56-E61   2009

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  • 高出力圧電マイクロポンプ

    吉田 和弘, 横田 眞一

    設計工学   44 ( 9 )   6 - 10   2009

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  • 平成20年度の機能性流体分野の研究動向

    吉田 和弘

    フルードパワーシステム   40 ( E1 )   E17-E20   2009

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  • 759 A Study on ER Microgripper

    YOSHIDA Kazuhiro, IDE Toru, KIM Joon-wan, YOKOTA Shinichi

    2008   233 - 234   2008.10

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  • 1304 Development of an ER Microactuator with Inherent Position Feedback Mechanism

    YOSHIDA Kazuhiro, KAMIYAMA Kazuhito, KIM Joon-wan, YOKOTA Shinichi

    The Machine Design and Tribology Division meeting in JSME   2008 ( 8 )   119 - 120   2008.4

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    The paper proposes and develops a novel smart ER microactuator having an inherent position feedback mechanism. The proposed actuator consists of a pair of movable and fixed parallel plate electrodes with variable gap length and an upstream restrictor. The applied voltage increases the electrode gap length or the output displacement with pressure increase due to viscosity increase of the ERF (electro-rheological fluid). In addition, the actuator has position feedback function to suppress the displacement due to an external force with pressure change due to change of the flow resistance between the electrodes. In this paper, the mathematical model is derived and the feasibility is confirmed through simulations. Then, an actuator with 10 mm diameter is designed, fabricated and characterized.

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  • マイクロERバルブ

    横田眞一, 吉田和弘

    バルブ技報   23 ( 1 )   59 - 64   2008

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  • 電界共役流体(ECF)と応用した強制液冷用薄型平面ポンプ

    横田眞一, 吉田和弘

    日本フルードパワーシステム学会誌   39 ( 5 )   277 - 280   2008

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  • 754 A Micro Fluid High-Power Source Using Fluid Inertia Effect in Pipes

    YOSHIDA Kazuhiro, KITAZUME Tetsuya, SETO Takeshi, TAKAGI Kunihiko, KIM Joon-wan, YOKOTA Shinichi

    2007   197 - 198   2007.10

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  • 1A2-A03 A Flexible ER Microactuator Using MEMS Technology

    KIM Joon-wan, YOSHIDA Kazuhiro, KOUDA Kumiko, YOKOTA Shinichi

    2007   "1A2 - A03(1)"-"1A2-A03(4)"   2007.5

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    On purpose to realize flexible electro-rheological microactuators (FERMA), this paper presents a MEMS-based flexible ER microvalve (FERV) by integrating thin SU-8 cantilever structures and the SU-8-sandwiched micro fluidic channels for homogeneous ER fluid. The structure of the FERV is the fluidic channel-embedded cantilever and the combination of an upper structure and a lower one fabricated separately and respectively. The FERV is composed of thin flexible polymer (SU-8) cantilever-shaped structures and much thinner metal patterns for electrodes. The FERV is successfully fabricated and the bending of the FERV shows enough flexibility. The static and dynamic characteristics of the FERV are experimentally investigated and prove that the controllable pressure change rate of the FERV is about 70 % of the supply pressure and the response time at the step-up and the step-down is about 0.1 second. There is not such a difference of the static and dynamic performance between a straight FERV and a bent FERV, showing that bending does not affect the characteristics of the FERV. A bellows-type FERMA has the output displacement of 5 mm with supply pressure of 40 kPa and electric field strength of 2.5 kV/mm. The experimental results prove the feasibility of FERMA.

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  • Micro Actuator by Making Use of Functional Fluid

    YOKOTA Shinichi, YOSHIDA Kazuhiro

    IEEJ Transactions on Sensors and Micromachines   127 ( 5 )   282 - 284   2007

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    This article has no abstract.

    DOI: 10.1541/ieejjournal.127.282

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  • 第18回「電磁力関連のダイナミクス」シンポジウムにおけるフルードパワー技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   15 ( 1 )   11 - 13   2007

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  • フレキシブル電極を用いた多自由度ERマイクロアクチュエータの開発

    吉田和弘

    財団法人三豊科学技術振興協会平成16年度助成対象研究成果報告書   67 - 73   2007

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  • 創立110周年記念 機械工学年鑑 14・3 アクチュエータ

    吉田和弘

    日本機械学会誌   110 ( 1065 )   620 - 621   2007

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  • 10th International Conference on New Actuators (ACTUATOR 2006)におけるフルードパワー技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   15 ( 3 )   6 - 8   2007

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  • 総論:ニューアクチュエータ =最近の研究開発動向と機能性流体の応用事例=

    吉田和弘, 横田眞一

    油空圧技術   46 ( 10 )   1 - 6   2007

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  • 11.5 アクチュエータ・センサの展開

    吉田和弘

    日本機械学会 創立110周年記念 機械工学 最近10年のあゆみ   114 - 115   2007

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  • 日本機械学会2007年度年次大会におけるフルードパワー技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   15 ( 3 )   18 - 20   2007

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  • 760 A Cantilever-Type Flexible ER Microvalve

    KIM Joon-wan, KOUDA Kumiko, YOSHIDA Kazuhiro, YOKOTA Shinichi

    2006   201 - 202   2006.10

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  • 2314 Development and Characterization of a High Performance Ultra Thin-Planar ECF Pump

    SEO Woo-Suk, YOSHIDA Kazuhiro, YOKOTA Shinichi, EDAMURA Kazuya

    The Machine Design and Tribology Division meeting in JSME   2006 ( 6 )   291 - 294   2006.5

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    A high performance ultra thin-planar pump using electro-conjugate fluid (ECF) was developed and tested. The pump consists of a pump base, a top cover, and an electrode substrate. The overall dimensions of the fabricated ultra thin-planar ECF pump are 120mm×38mm×13mm and the flow channel height is 500μm. The ECF is a kind of dielectric and functional fluids, which generates a powerful jet flow (ECF-jet) by an applied static electric field through a pair of electrodes. The ECF-jet directly acts on the working fluids, thus, the ultra thin-planar ECF pump needs no moving parts and produces no vibration and noise. Various arrays of the electrodes, such as rectangular, saw-tooth, and arc-shape electrodes, were investigated for realization of a high performance ultra thin-planar ECF pump. The pumping experiments of the fabricated pump were performed with five different electrode patterns using FF-1_<EHA2> as the working fluid. Through experimental results, the no-load flow rate of 940mm^3/s, maximum output pressure of 11.6kPa, and maximum output power of 3.1mW were achieved at an applied voltage of 3.0kV.

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  • 均一系ER流体を用いたバルブ集積形マイクロアクチュエータ

    吉田和弘, 横田眞一

    日本フルードパワーシステム学会機能性流体を用いたスマートフルードパワーシステムに関する研究委員会研究成果報告書(Ⅰ)   49 - 54   2006

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  • 9th International Conference on Mechatronics Technology (ICMT2005)におけるフルードパワー技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   13 ( 4 )   9 - 11   2006

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  • 巻頭言 JFPSフルードパワー国際シンポジウムについて

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   13 ( 4 )   1   2006

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  • 電界共役流体ECFを応用したマイクロアクチュエータ

    横田眞一, 吉田和弘, 竹村研治郎, 枝村一弥

    日本フルードパワーシステム学会機能性流体を用いたスマートフルードパワーシステムに関する研究委員会研究成果報告書(Ⅰ)   121 - 126   2006

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  • The 1st International Conference on Manufacturing, Machine Design and Tribology (ICMDT2005)におけるフルードパワー技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   13 ( 4 )   12 - 14   2006

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  • 日本機械学会第6回機素潤滑設計部門講演会におけるフルードパワー技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   14 ( 3 )   12 - 14   2006

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  • 特集「フルードパワーシステムの省エネルギー化技術」発行にあたって

    吉田和弘

    フルードパワーシステム   37 ( 3 )   143 - 196   2006

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  • 1A1-C19 A High Performance Ultra Thin-Planar ECF Pump with Improved Electrode Geometry

    SEO Woo-Suk, YOSHIDA Kazuhiro, YOKOTA Shinichi, EDAMURA Kazuya

    2006   "1A1 - C19(1)"-"1A1-C19(4)"   2006

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    This paper presents the effect of electrode geometry for high performance of an ultra thin-planar pump using the electro-conjugate fluid (ECF). The ECF is a kind of dielectric and functional fluids, which generates a powerful jet flow (ECF-jet) by an applied static electric field through a pair of electrodes. The ECF-jet directly acts on the working fluids, therefore, the ultra thin-planar ECF pump needs no moving parts and produces no vibration and noise. The proposed pump consists of three parts: a pump base, a top cover, and an electrode substrate. The overall dimensions of the ultra thin-planar ECF pump are 120 mm×38 mm×13 mm and the flow channel height is 500 μm. Various arrays of the electrodes, such as rectangular, saw-tooth, and arc-shape electrodes, were investigated for high performance of the proposed ultra thin-planar ECF pump. The pumping experiments of the fabricated pump were performed with five different electrode patterns using FF-1_<EHA2> as the working fluid. Through experimental results, the no-load flow rate of 940 mm^3/s, maximum output pressure of 11.6 kPa, and maximum output power of 3.1 mW were achieved at an applied voltage of 3.0 kV.

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  • 東京工業大学 精密工学研究所 横田・吉田研究室 =機能性流体を応用したニューマイクロアクチュエータの実現と応用=

    横田眞一, 吉田和弘

    油空圧技術   45 ( 12 )   71 - 73   2006

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  • 762 Proposition of an ECF micromotor array using MEMS Technology

    KIM Joonwan, NISHIDA Yoshito, YOKOTA Shinichi, YOSHIDA Kazuhiro, EDAMURA Kazuya

    2005   229 - 230   2005.10

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  • 705 Full-wave rectifying piezoelectric micropump using fluid inertia effect in pipe

    YOSHIDA Kazuhiro, SUGIURA Keita, YOKOTA Shinich

    2005   197 - 198   2005.10

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  • 1P1-S-082 Characterization of a Planar ECF Pump for Liquid Cooling System of Electronic Chips(Mechanism and Control for Actuator 2,Mega-Integration in Robotics and Mechatronics to Assist Our Daily Lives)

    YOKOTA Shinichi, SEO Woo-Suk, YOSHIDA Kazuhiro, EDAMURA Kazuya

    2005   93 - 93   2005.6

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  • 1P1-S-080 Development of a Flexible ER Microactuator Using Homogeneous ER Fluid(Mechanism and Control for Actuator 2,Mega-Integration in Robotics and Mechatronics to Assist Our Daily Lives)

    Yoshida Kazuhiro, Ogiso Taro, Yokota Shinichi

    2005   93 - 93   2005.6

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  • 757 Development of a Forced-Liquid Cooling System for High Power Electronic Chips Using ECF

    SEO Woo-Suk, YOSHIDA Kazuhiro, YOKOTA Shinichi, EDAMURA Kazuya

    219 - 220   2005

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  • The 6th International Conference on Fluid Power Transmission and Control (ICFP'2005)におけるフルードパワー技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   13 ( 3 )   15 - 18   2005

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  • 806 A piezoelectric micropump using a resonantly-driven spool valve

    YOSHIDA Kazuhiro, WATANABE Koutaro, YOKOTA Shinichi

    2004   237 - 238   2004.10

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  • 807 Proposition of a Flexible ER Microactuator Using Homogeneous ER Fluids

    YOSHIDA Kazuhiro, OGISO Taro, YOKOTA Shinichi

    2004   239 - 240   2004.10

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  • 860 A Planar ECF Pump for Liquid Cooling of Electronic Chips

    YOKOTA Shinichi, SEO Woo-Suk, YOSHIDA Kazuhiro, EDAMURA Kazuya

    2004   261 - 262   2004.10

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  • 808 A Micro Fluid Power System Using MR Fluid

    YOSHIDA Kazuhiro, JUNG Yeon-Oh, YOKOTA Shinichi

    2004   241 - 242   2004.10

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  • A Micropump Using Inertia of Pipeline : Investigations on Optimal Structure

    YOSHIDA Kazuhiro, JUNG Yeon-Oh, SETO Takeshi, TAKAGI Kunihiko, PARK Jung-Ho, YOKOTA Shinichi

    The Machine Design and Tribology Division meeting in JSME   2004 ( 4 )   141 - 144   2004.4

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    For fluid microactuators and microfactory, the authors have proposed a novel high output micropump using inertia effect of fluid which has a pipeline element in place of an outlet check valve and verified the effectiveness with a fabricated micropump. To increase the output power and to miniaturize the size, this paper investigates the optimal structure through simulations based on the proposed simple mathematical model with lumped parameters and experiments using fabricated micropumps with different sizes of the pipeline element. Also, the optimal diameter of the diapharm is investigated through simulations.

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  • An MR Cylinder with a Built-In Valve and Its Application

    YOSHIDA Kazuhiro, SOGA Tsutomu, YOKOTA Shinichi, KAWACHI Masashi, EDAMURA Kazuya

    The Machine Design and Tribology Division meeting in JSME   2004 ( 4 )   153 - 154   2004.4

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    A novel hydraulic actuator named the "MR cylinder"' is proposed and developed. The actuator is composed of a piston with electromagnets and a cylinder. MR (Magneto-Rheological) fluid that is a functional fluid whose apparent viscosity can be controlled through the applied magentic field flows in the gap between the piston and cylinder and the differential pressure is controlled by the current applied for the electromagnets. The proposed actuator features compactness and large stroke. In this paper, the MR cylinder is proposed, fabricated and applied for a 2-link manipulator. The static and dynamic characteristics of the MR cylinder-driven manipulator is investigated experimentally.

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  • 特集「レスキューロボティクスにおけるフルードパワー技術」発行にあたって

    吉田和弘

    フルードパワーシステム   35 ( 4 )   220   2004

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  • 日本機械学会第4回機素潤滑設計部門講演会におけるフルードパワー技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   12 ( 3 )   18 - 21   2004

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  • 第9回ニューアクチュエータ国際会議(ACTUATOR2004)におけるフルードパワー技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   12 ( 3 )   8 - 12   2004

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  • The 8th International Conference on Mechatronics Technology (ICMT2004)におけるフルードパワー技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   12 ( 4 )   20 - 23   2004

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  • 平成16年秋季フルードパワーシステム講演会における機能性流体技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   12 ( 4 )   16 - 19   2004

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  • 機能性流体を応用したマイクロアクチュエータ(その2)

    吉田和弘

    フルードパワー   18 ( 3 )   56 - 60   2004

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  • 高出力圧電マイクロポンプ

    吉田和弘

    フルードパワーシステム   35 ( 6 )   375 - 379   2004

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  • 流体マイクロアクチュエータ -高出力マイクロマシンの実現を目指して-

    吉田和弘

    検査技術   9 ( 6 )   1 - 7   2004

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  • 機能性流体を応用したマイクロアクチュエータ

    吉田和弘

    フルードパワー   18 ( 2 )   58 - 62   2004

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  • 平成15年度の機能性流体分野の研究動向

    吉田和弘

    フルードパワーシステム   35 ( E1 )   E24-E27   2004

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  • Optimal Structure of Micropump Using Inertia of Pipeline

    YOSHIDA Kazuhiro, JUNG Yeon Oh, SETO Takeshi, TAKAGI Kunihiko, PARK Jung Ho, YOKOTA Shinichi

    2003   205 - 206   2003.10

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  • An MR cylinder with built-in valves

    YOSHIDA Kazuhiro, YOKOTA Shinichi, SOGA Tsutomu, KAWACHI Masashi, EDAMURA Kazuya

    2003   209 - 210   2003.10

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  • A High Response Microvalve Using MR Fluid

    YOSHIDA Kazuhiro, YONEDA Yuichi, YOKOTA Shinichi

    The Machine Design and Tribology Division meeting in JSME   2003 ( 3 )   81 - 84   2003.4

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    MR (Magneto-Rheological) fluid is a functional fluid whose apparent viscosity is controlled by the applied magnetic field intensity. A valve using MR fluid called the MR valve features simple structure without moving parts. This paper improves the response of the micro MR vale that applies magnetic field to the MR fluid through a thermo-control magnetic circuit composed of a permanent magnet, a thermosensitive ferrite and a Peltier element. First, a thermo-control magnetic circuit that concentrates the thermal input to the thermosensitive ferrite is proposed. The characteristics of the magnetic circuit between magnetic field intensity and temperature of the thermosensitive ferrite are experimentally investigated and the improvement of the response is confirmed. Second, a 3-port micro MR valve is designed and fubricated. The characteristics of the 3-port micro MR valve among load pressure, flow rate and temperature are experimentally clarified.

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  • A Resonantly-Driven Piezoelectric Micropump Using Active-Type Check Valves : Investigations on load characteristics and miniaturization

    PARK Jung Ho, YOSHIDA Kazuhiro, ISHIKAWA Chikara, YOKOTA Shinichi, SETO Takeshi, TAKAGI Kunihiko

    The Machine Design and Tribology Division meeting in JSME   2003 ( 3 )   77 - 80   2003.4

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    We have been developing a resonantly-driven piezoelectric micropump using active-type check valves in place of conventional passive-type. It actively controls open/close motion of check valves using piezoelectric actuator installed into inlet and outlet. In the previous paper, frequency characteristics of the flow rate without load pressure were investigated using a prototype micropump fabricated with the effective size of 17×8×11(mm)^3. In this paper, load characteristics and bi-directional flow characteristics are experimentally investigated using an adequate timing control for valve closing motion. Maximum flow rate of 65(mm)^3/s and maximum pressure of 0.2MPa are obtained at the driving frequency of 2.8kHz. Besides, it is ascertained that optimal values of phase shift against voltage for driving pump chamber are 15° for inlet check valve and 195° for outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed and a novel micropump with the effective size of 10×10×10(mm)^3 using the shuttle valve is fabricated and tested.

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  • 高出力液圧マイクロポンプ =マイクロマシンおよびマイクロファクトリへの応用を目指して=

    吉田和弘

    油空圧技術   42 ( 6 )   6 - 11   2003

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  • 機能性流体およびその他の分野のフルードパワーシーズ

    吉田和弘

    フルードパワーシステム   34 ( E1 )   E51-E54   2003

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  • 平成14年度の機能性流体分野の動向

    吉田和弘

    フルードパワーシステム   34 ( E1 )   E24-E29   2003

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  • 機能性流体を応用したアクチュエータ

    吉田和弘

    次世代アクチュエータ技術の予測調査研究(研究課題番号14605004)平成14年度科学研究費補助金(基盤研究(C)(1))研究成果報告書   8   45 - 63   2003

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  • Fluid Microactuators

    YOKOTA Shinichi, YOSHIDA Kazuhiro

    Journal of The Society of Instrument and Control Engineers   42 ( 12 )   992 - 997   2003

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    Language:Japanese   Publisher:The Society of Instrument and Control Engineers  

    DOI: 10.11499/sicejl1962.42.992

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  • Improvements of Micropump Using Inertia Effect of Fluid

    Takagi K., Seto T., Yoshida K., Park J., Yokota S.

    2003   77 - 77   2003

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  • A Resonantly-Driven Piezoelectric Micropump Using a Sheet-Type Active Shuttle Valve

    Park J. H., Yoshida K., Ishikawa C., Yokota S., Seto T., Takagi K.

    2003   10 - 10   2003

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  • A Real-Time Motion Stereo Vision Using Image Integration

    Yoshida K., Matsunami T., Yokota S.

    2003   92 - 92   2003

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  • フルードパワーを用いたマイクロアクチュエータとマイクロマシン =高出力マイクロマシンの実現を目指して=

    吉田和弘

    油空圧技術   42 ( 6 )   1 - 5   2003

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  • 日本機械学会第3回機素潤滑設計部門講演会におけるフルードパワー技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   11 ( 2 )   21 - 23   2003

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  • A Real-Time Motion Stereo Vision Based on Brightness Gradient : Improvements of Measuring Speed

    YOSHIDA Kazuhiro, MATSUNAMI Tomohiro, YOKOTA Shinichi

    2002   253 - 254   2002.9

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  • A Microvalve Using MR Fluid : Improvements of Response

    YOSHIDA Kazuhiro, YONEDA Yuichi, YOKOTA Shinichi, SUGIHARA Teruya

    2002   269 - 270   2002.9

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  • An ER Valve-Integrated Microactuator

    YOSHIDA Kazuhiro, YANO Hiroshi, PARK Jung Ho, YOKOTA Shinichi

    The Machine Design and Tribology Division meeting in JSME   2002 ( 2 )   151 - 154   2002.4

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    As an advanced control component for practical micromachines using fluid power in millimeter size, the authors have proposed and developed a microvalve using homogeneous electro-rheological (ER) fluid called micro ER valve. By using the homogeneous ER fluid whose viscosity is controlled by the applied electric field strength, a simple-structural control valve composed of fixed electrodes can be realized. In this paper, to mount on in-pipe working micromachines, a compact ER valve-integrated microactuator is proposed and fabricated. First, miniaturization characteristics of the micro ER valve fabricated by micromachining are examined experimentally. Second, a polyimide-diaphragm fluid microactuator is proposed, fabricated and tested. Finally, an ER valve-integrated microactuator is constructed by using above devices with 8mm width, 10mm length and 1.4mm height and the static characteristics are investigated experimentally. Also, as an application, a micro gripper driven by the actuator is demonstrated.

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  • 「機械工学年鑑」機能要素(分担)

    吉田和弘

    日本機械学会誌   105 ( 1005 )   547   2002

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  • Micro Fluid Motors and Micro Pumps(<Special Issue>Recent Technology of Micro-Actuator)

    YOKOTA Shinichi, YOSHIDA Kazuhiro

    Journal of the Japan Society of Precision Engineering   68 ( 5 )   653 - 656   2002

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    DOI: 10.2493/jjspe.68.653

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  • 日本機械学会第2回機素潤滑設計部門講演会におけるフルードパワー技術研究動向

    吉田和弘

    日本フルードパワーシステム学会FPICクオータリ   10 ( 4 )   16 - 19   2002

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  • 流体駆動形マイクロマシン

    吉田和弘, 横田眞一

    材料の科学と工学   39 ( 4 )   150 - 153   2002

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  • A Fluid Power Source with High Power Density for Microfactory

    PARK Jung Ho, YOSHIDA Kazuhiro, NAKASU Yoshihiro, YOKOTA Shinichi, SETO Takeshi, TAKAGI Kunihiko

    The Machine Design and Tribology Division meeting in JSME   155 - 158   2002

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    In this paper, to realize micro fluid power sources applicable to microfactory or micromachines using fluid power, a resonantly-driven piezoelectric micropump with newly devised check valve unit is developed and the pumping characteristics are experimentally investigated. Furthermore, a practical application to micro press is attempted. First, micro sheet valve having the floating valve-body to increase valve-opening and to decrease pressure loss is proposed and fabricated by micromachining such as etching and micro-EDM (electrical discharge machining). The validity is verified through experiments on static characteristics between flow rates across the check valve and applied pressures. Second, frequency characteristics of the micropump that employs two micro sheet valves for inlet/outlet are experimentally investigated. Finally, a micro press equipped with the developed micropump is fabricated with he effective size of 20×20×28(mm)^3. Blanking of a hole with 0.3mm diameter to aluminum sheet with 0.01mm thickness is realized.

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  • Development of High-Power Micropump for Small-Sized Fluid Actuators

    Seto T., Takagi K., Yoshida K., Park J., Yokota S.

    2002   94 - 94   2002

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  • Proposition of a Valve-Interated Microactuator Using Homogeneous ER Fluid

    Yoshida K., Yano H., Park J. H., Yokota S.

    2002   116 - 116   2002

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  • マイクロ流体アクチュエータ

    横田眞一, 吉田和弘

    フルードパワーシステム   33 ( 3 )   149 - 154   2002

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  • A Piezoelectric Micropump Using Resonance Drive : Proposition of a micro sheet valve and experiments

    13 ( 2 )   109 - 111   2001.11

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  • 1A1-D8 A Microvalve Using Homogeneous ER Fluids : Application to an in-pipe mobile micromachine

    Yoshida K., Park J.H., Shimizu T., Yokota S.

    2001   9 - 9   2001.6

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  • 127 A Micropump-Mounted In-Pipe Mobile Micromachine Using Homogeneous ER Fluids

    YOSHIDA Kazuhiro, PARK Jung-Ho, SHIMIZU Takayuki, YOKOTA Shinichi

    The Machine Design and Tribology Division meeting in JSME   2001 ( 1 )   117 - 120   2001.3

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    As an advanced control component and a fluid power source for practical and powerful micromachines using fluid power, the authors have proposed and developed a micro ER valve using homogeneous ER fluids and a resonantly-driven piezoelectric micropump, respectively. In this paper, the above elements-mounted in-pipe mobile micromachine is developed. Firstly, to select the most suitable homogeneous ER fluids for micromachines, basic characteristics of some kinds of liquid crystals are experimentally investigated with 2-port micro ER valves fabricated by micromachining. Secondly, output characteristics of the resonantly-driven piezoelectric micropump are investigated with some improvements for pumping the selected homogeneous ER fluids. Finally, through investigations on supporting and propelling mechanisms, an in-pipe mobile micromachine mounted with the above microvalve and micropump is fabricated with 9mm in diameter and 75mm in length and experiment for an inchworm type travelling is attempted.

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  • Development of Actuators for Microrobots-Examples oaf Fluid Microactuators

    YOSHIDA Kazuhiro, YOKOTA Shinnichi

    The Journal of the Institute of Electrical Engineers of Japan   121 ( 7 )   357 - 361   2001

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    DOI: 10.1541/ieejsmas.121.357

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  • 視覚センサ

    吉田和弘

    日本機械学会誌   104 ( 991 )   374 - 375   2001

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  • 若き油空圧研究者たち② 東京工業大学精密工学研究所 吉田研究室

    吉田和弘

    油空圧技術   40 ( 7 )   40 - 41   2001

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  • 532 A Bellows-Driven Manipulator Using MR Fluids

    YOSHIDA Kazuhiro, SASAKI Atsushi, PARK Jung-Ho, YOKOTA Shinichi, KAWACHI Masashi, EDAMURA Kazuya

    183 - 184   2001

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  • 529 A Valve-Integrated Microactuator Using Homogeneous ER Fluids

    YOSHIDA Kazuhiro, YANO Hiroshi, PARK Jung-Ho, YOKOTA Shinichi

    177 - 178   2001

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  • 日本機械学会第1回機素潤滑設計部門講演会における油空圧技術研究動向

    吉田和弘

    日本油空圧学会HPICクオータリ   9 ( 2 )   2 - 5   2001

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  • A Pressure Control Valve Using MR Fluids (Improvements of MR Fluids and Fabrication of 3-Port Valve)

    12 ( 2 )   114 - 116   2000.10

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  • 319 A Micropump-Mounted In-Pipe Mobile Micromachine Using Homogeneous ER Fluids : Experiments on the Valve and Pump

    YOSHIDA Kazuhiro, PARK Jung-Ho, SHIMIZU Takayuki, YOKOTA Shinichi

    2000 ( 40 )   132 - 133   2000.9

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    To realize practical high power micromachines, the authors have proposed a simple microvalve using homogeneous ER fluids and are developing a micropump-mounted in-pipe mobile micromachine with 9mm in diameter. In this paper, firstly, 2-port micro ER valves are fabricated by micro machining and some kinds of homogeneous ER fluids' characteristics are experimentally investigated. Secondly, for higher output of the resonantly-driven piezoelectric micropump, the check valves are improved and the pump characteristics are experimentally investigated. Finally, the structure of an in-pipe mobile micromachine using above-mentioned elements is discussed.

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  • 318 A Microvalve Using MRF Drop : Proposition and Basic Experiments

    YOSHIDA Kazuhiro, JUNG Yeon-Oh, YOKOTA Shinichi

    2000 ( 40 )   130 - 131   2000.9

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    For micromachines using fluid power with high power density, a novel microvalve using Magneto-Rheological Fluids (MRF) drop is proposed. The MRF drop is supported as a valve by a permanent magnet and is moved by electromagnets to control the opening. The proposed microvalve solves leakage problem caused by the large machining errors compared with its micro size. A microvalve is fabricated with 10 × 10 × 10mm^3 in size and the magnetic control and the flow control characteristics are experimentally investigated.

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  • 202 A Real-Time Motion Stereo Vision Based on Brightness Gradient : Improvements of Measuring Accuracy and Camera Velocity

    YOSHIDA Kazuhiro, TOMITA Takahiro, YOKOTA Shinichi

    2000 ( 40 )   54 - 55   2000.9

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    To realize autonomous manipulators which work outdoors, 3D vision sensors are required to measure objects and environments under severe conditions. The authors have proposed a real-time motion stereo vision which measures 3D coordinates of objects with simple calculations based on brightness gradient of images captured by a motion camera. In this paper, firstly, factors of the measuring errors are investigated in detail and improved. Secondly, the camera velocity is improved to reduce the effect of object movements. Finally, in consideration of installation in manipulators, a downsized motion stereo vision is fabricated and tested under measuring experiments.

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  • A Research Case on Functional Fluids: Fluid Micromachine

    YOSHIDA Kazuhiro, YOKOTA Shinichi

    Journal of the Japan Hydraulics & Pneumatics Society   31 ( 4 )   283 - 288   2000.7

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  • Fluid Power System Using MR Fluids

    12 ( 1 )   115 - 117   2000.5

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  • An Override Pressure-Compensated Direct Unloading Valve

    12 ( 1 )   61 - 63   2000.5

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  • 606 A Microvalve Using MR Fluid : Basic characteristics of fabricated micro MR valve)

    YOSHIDA Kazuhiro, TAKAMATSU Tamaki, YOKOTA Shinichi

    2000 ( 49 )   343 - 344   2000.3

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  • 1A1-49-060 半導体プロセスによる試作マイクロ ER バルブの基本特性

    吉田 和弘, 菊地 正晃, 朴 重濠, 横田 眞一

    ロボティクス・メカトロニクス講演会講演概要集   2000   37 - 38   2000

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    流体パワーを用いたマイクロマシンに搭載するマイクログリッパの制御のため, 著者らは印加電界で容易に圧力制御可能な均一系ER流体を作動流体としたマイクロERバルブを提案し, 機械加工による2ポートバルブの試作を通してその有効性を示している。本報では, マイクロERバルブのさらなるマイクロ化を図るため, 異方性エッチングおよび陽極接合技術を用いた2ポートバルブを試作し, 電極構造パラメータに対する静特性実験を通して, ER効果の詳細な検討をおこなう。

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  • フルイドパワーを構成する機器と制御技術:流体マイクロマシン

    吉田和弘, 横田眞一

    フルイドパワーシステム   31 ( 4 )   283   2000

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  • フルイドパワーシステム2010年の夢

    吉田和弘

    フルイドパワーシステム   31 ( 1 )   61   2000

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  • 巻頭言 油空圧情報センター(HPIC)への期待

    吉田和弘

    日本油空圧学会HPICクオータリ   8 ( 2 )   1   2000

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  • 日本機械学会東海支部第49期総会講演会における油空圧技術研究動向

    吉田和弘

    日本油空圧学会HPICクオータリ   8 ( 2 )   2   2000

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  • 共振駆動形圧電マイクロポンプ

    横田 眞一, 朴 重濠, 吉田 和弘

    フルイドパワーシステム : 日本油空圧学会誌 : journal of the Japan Hydraulics & Pneumatics Society   30 ( 7 )   502 - 507   1999.11

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  • 均一系ER流体を作動流体としたマイクロパルプの提案

    吉田 和弘, 高取 宏樹, 朴 重濠, 横田 眞一

    精密工学会大会学術講演会講演論文集   1999 ( 1 )   302 - 302   1999.3

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  • Proposition of a Pressure Control Valve Using MR Fluid

    10 ( 2 )   166 - 168   1998.11

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  • 新流体アクチュエ-タ(5)ベロ-ズによる管内走行マシン

    吉田 和弘, 横田 真一

    油空圧技術   37 ( 12 )   31 - 36   1998.11

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  • Basic Characteristics of a Micropump Using Magnetic Fluid Seals

    YOSHIDA Kazuhiro, SAITOH Kohki, YOKOTA Shinichi

    10   409 - 412   1998.10

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  • 形状記憶合金駆動サ-ボ弁--シンプルな小形サ-ボ弁の実現

    吉田 和弘, 横田 真一

    油空圧技術   37 ( 7 )   1 - 6   1998.7

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  • 管内走行用流体マイクロマシン

    吉田 和弘, 横田 眞一

    フルイドパワーシステム : 日本油空圧学会誌 : journal of the Japan Hydraulics & Pneumatics Society   29 ( 2 )   179 - 184   1998.3

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  • ダンピング絞りを有する比例制御弁の動特性

    増田 健二, 田辺 実, 吉田 和弘, 横田 眞一

    精密工学会大会学術講演会講演論文集   1998 ( 1 )   148 - 148   1998.3

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  • ダンピング絞りを有する比例制御弁の動特性 (キャビテーションが生じる場合)

    増田 健二, 田辺 実, 吉田 和弘, 横田 眞一

    油空圧講演論文集   9 ( 1 )   25 - 28   1997.5

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  • Fabrication of a Micro Switching Valve Using Magnetic Fluid

    YOSHIDA Kazuhiro, YAMANAKA Yoshitaka, YOKOTA Shinichi

    8   393 - 396   1996.5

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  • Proposition of a Micromotor Using Electro-conjugate Fluid (ECF)

    YOKOTA Shinichi, YOSHIDA Kazuhiro, OTSUBO Yasufumi, EDAMURA Kazuya

    8   439 - 442   1996.5

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  • 電気粘性流体を応用した液圧制御弁 (圧力制御ERバルブを用いた1軸マニピュレータの試作)

    横田 眞一, 近藤 豊, 枝村 一弥, 吉田 和弘

    油空圧講演論文集   7 ( 2 )   13 - 16   1995.11

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  • A Flow Control Valve in Application of an Electrorheological Fluid

    KONDOH Yutaka, YOKOTA Shinichi, EDAMURA Kazuya, YOSHIDA Kazuhiro

    7   167 - 172   1995.5

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Presentations

  • 静電閉鎖チェック弁を用いた交流圧力源システム

    吉田和弘

    日本機械学会2025年度年次大会  2025.9 

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    Event date: 2025.9

    Language:Japanese   Presentation type:Oral presentation (general)  

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  • 機能流体ERFを応用したパワーマイクロロボット技術 International conference

    吉田和弘

    第27回フルードパワー国際見本市カレッジ研究発表展示コーナー  2024.9 

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  • MEMS技術を用いたECFマイクロモータアレイの提案

    日本機械学会山梨講演会  2005 

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  • 高発熱電子チップのためのECF強制液冷システムの開発

    日本機械学会山梨講演会  2005 

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  • 管路慣性を応用したマイクロポンプ(最適構造の検討)

    吉田和弘

    日本機械学会第4回機素潤滑設計部門講演会講演論文集  2004 

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  • 機能性流体を応用したニューアクチュエータの研究

    文部科学省科学研究費補助金特定領域研究「ブレイクスルーを生み出す次世代アクチュエータ研究」第2回公開シンポジウム  2005 

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  • 機能性流体を応用したアクチュエータ技術とその応用

    吉田和弘

    ㈱日本テクノセンターセミナー「最新のアクチュエータ技術とその応用・例」資料  2004 

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  • バルブ内蔵形MRシリンダとその応用

    吉田和弘

    日本機械学会第4回機素潤滑設計部門講演会講演論文集  2004 

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  • 管路慣性を応用したマイクロポンプの最適設計

    吉田和弘

    日本機械学会2004年度年次大会講演論文集  2004 

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  • 電界共役流体(ECF)を応用した平面形ポンプ(電子チップ液冷のためのECFポンプの提案)

    吉田和弘

    日本機械学会ロボティクス・メカトロニクス講演会'04講演論文集  2004 

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  • 薄膜金属ガラスを応用した集積形ERマイクロアクチュエータの開発

    平成18年秋季フルードパワーシステム講演会  2006 

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  • カンチレバー形フレキシブルERマイクロバルブ

    日本機械学会関東支部山梨講演会2006講演論文集  2006 

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  • 電子チップの液冷システムのための平面形ECFポンプの特性評価

    吉田和弘

    日本機械学会ロボティクス・メカトロニクス講演会'05講演論文集  2005 

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  • 均一系ER流体を用いたフレキシブルERマイクロアクチュエータの開発

    吉田和弘

    日本機械学会ロボティクス・メカトロニクス講演会'05講演論文集  2005 

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  • Development of a Piezoelectric Micropump Using Resonantly-Driven Active Check Valve

    SICE Annual Conf. 2005 in Okayama  2005 

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  • Development of a Piezoelectric Micropump Using Resonantly-Driven Active Check Valve

    SICE Annual Conf. 2005 in Okayama  2005 

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  • 機能性流体を応用したニューアクチュエータの研究

    文部科学省科学研究費補助金特定領域研究「ブレイクスルーを生み出し次世代アクチュエータ研究」第1回公開シンポジウム資料  2005 

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  • フレキシブルERマイクロアクチュエータの基本特性

    日本機械学会2005年度年次大会  2005 

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  • 管路慣性を応用した高出力圧電マイクロポンプ

    IFPEX2005  2005 

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  • 液晶を作動流体としたマイクロERバルブの数学モデル

    第23回日本ロボット学会学術講演会  2005 

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  • ECFを応用した高発熱電子チップのための強制液冷システム

    日本機械学会2005年度年次大会  2005 

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  • 電極形状による極薄平面ECFポンプの高出力化

    第18回「電磁力関連のダイナミクス」シンポジウム  2006 

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  • 管路内の流体慣性を応用した全波整流形高出力圧電マイクロポンプ

    第18回「電磁力関連のダイナミクス」シンポジウム  2006 

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  • 薄膜金属ガラスを用いた集積形ERマイクロアクチュエータ

    日本機械学会第6回機素潤滑設計部門講演会  2006 

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  • 極薄平面ECFポンプの電極構造による高出力化

    日本機械学会ロボティクス・メカトロニクス講演会'06(ROBOMEC2006)  2006 

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  • 高出力極薄平面形ECFポンプの開発および特性評価

    日本機械学会第6回機素潤滑設計部門講演会  2006 

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  • MEMS技術を用いたECFマイクロモータアレイ

    電磁力関連のダイナミクスシンポジウム  2006 

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  • MEMS技術を用いたECFマイクロモータアレイ

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  • MEMS技術を用いたECFマイクロモータの開発

    日本機械学会2006年度年次大会  2006 

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  • 管路内の流体慣性を応用した全波整流形圧電マイクロポンプの開発

    日本機械学会2006年度年次大会  2006 

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  • 管路内の流体慣性を応用したマイクロ流体パワー源による高粘度流体のポンピング

    日本機械学会山梨講演会  2006 

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  • カンチレバー形フレキシブルERマイクロバルブ

    日本機械学会山梨講演会  2006 

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  • ポンプ・バルブ一体形ERマイクロアクチュエータ

    日本機械学会2007年度年次大会  2007 

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  • 機能性流体を応用したマイクロアクチュエータ

    日本機械学会2007年度年次大会  2007 

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    第16回MAGDAコンファレンス in 京都 電磁現象および電磁力に関するコンファレンス 講演論文集  2007 

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    山梨講演会  2007 

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    2007 

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    2007 

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  • 位置フィードバック機構を内蔵したERマイクロアクチュエータ

    2007 

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  • Microactuators Using Functional Fluids

    韓国蔚山大学校海外専門家招請セミナー  2006 

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  • MEMS技術を用いたフレキシブルERマイクロアクチュエータの開発

    第50回自動制御連合講演会講演論文集  2007 

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  • Microactuators Using Functional Fluids

    韓国蔚山大学校海外専門家招請セミナー  2006 

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    2006 

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  • 薄膜金属ガラスを用いた多自由度流体マイクロアクチュエータの提案

    日本機械学会山梨講演会  2005 

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  • オーバライド圧力補償直動形アンロード弁

    増田健二, 田辺実, 吉田和弘, 横田眞一

    平成12年春季フルイドパワーシステム講演会講演論文集  2000 

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  • 半導体プロセスによる試作マイクロERバルブの基本特性

    吉田和弘, 菊地正晃, 朴重濠, 横田眞一

    日本機械学会ロボティクス・メカトロニクス講演会(ROBOMEC'00)講演論文集  2000 

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  • MR流体を作動流体としたマイクロバルブの基本特性

    吉田和弘, 高松環, 横田眞一

    日本機械学会2000年度年次大会講演会講演論文集  2000 

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  • MR流体を作動流体とした液圧制御システム

    吉田和弘, 雪下和大, 横田眞一, 近藤豊, 長峰靖之

    平成12年春季フルイドパワーシステム講演会講演論文集  2000 

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  • MRF液滴を弁体としたマイクロバルブ(提案と基礎実験)

    吉田和弘, 鄭淵午, 横田眞一

    日本機械学会北海道支部第40回講演会講演概要集  2000 

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  • 輝度勾配に基づく実時間運動ステレオビジョン(計測精度とカメラ移動速度の向上)

    吉田和弘, 冨田隆広, 横田眞一

    日本機械学会北海道支部第40回講演会講演概要集  2000 

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  • 輝度勾配に基づく実時間運動ステレオビジョン(マニピュレータ制御への応用)

    吉田 冨田

    日本機械学会2001年度年次大会講演論文集  2001 

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  • 均一系ER流体を作動流体としたマイクロバルブ(管内走行マイクロマシンへの応用)

    吉田 朴, 清水, 横

    日本機械学会ロボティクス・メカトロニクス講演会’01講演論文集  2001 

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  • マイクロファクトリのための高出力流体パワー源

    吉田和弘

    日本機械学会第2回機素潤滑設計部門講演会講演論文集  2002 

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  • ERバルブ集積形マイクロアクチュエータ

    吉田 矢野, 朴

    日本機械学会第2回機素潤滑設計部門講演会講演論文集  2002 

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  • 均一系ER流体を用いたバルブ集積形マイクロアクチュエータの提案

    吉田 矢野, 朴

    日本機械学会ロボティクス・メカトロニクス講演会'02講演論文集  2002 

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  • 小形流体アクチュエータ用高出力マイクロポンプの開発

    瀬戸, 高城, 吉田, 朴 横田

    日本機械学会ロボティクス・メカトロニクス講演会'02講演論文集  2002 

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  • MRF液滴を弁体としたマイクロバルブ(圧力制御範囲の拡大)

    吉田 鄭 横田

    日本機械学会2002年度年次大会講演論文集  2002 

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  • 共振駆動を用いた圧電マイクロポンプ

    吉田 朴 横田

    フルードパワーシステムワークショップ講演論文集  2002 

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  • MRF液滴を弁体としたマイクロバルブ(流量制御特性の改善)

    吉田 鄭 横田

    日本機械学会第1回機素潤滑設計部門講演会講演論文集  2001 

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  • 均一系ER流体を作動流体としたポンプ搭載形管内走行マイクロマシン

    吉田 朴, 清水, 横

    日本機械学会第1回機素潤滑設計部門講演会講演論文集  2001 

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  • 均一系ER流体を作動流体としたバルブ集積形マイクロアクチュエータ

    吉田 矢野, 朴

    日本機械学会山梨講演会講演論文集  2001 

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  • バルブ分割形FERVを用いたマイクログリッパ

    日本機械学会第12回機素潤滑設計部門講演会  2012.4 

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  • 交流圧力源を用いた多自由度ERマイクロアクチュエータシステムの提案

    日本機械学会第12回機素潤滑設計部門講演会  2012.4 

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  • ECFジェット圧力駆動マイクロシリンダの試作および特性解明

    日本機械学会山梨講演会  2011.10 

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  • Micro Fluid Power Actuators Using MEMS Technologies Invited

    K. Yoshida

    16th Int. Conf. on Mechatronics Technology (ICMT2012)  2012 

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  • ECFジェットを用いた両方向ローリングダイフラムマイクロアクチュエータに関する研究

    日本機械学会2011年度年次大会  2011.9 

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  • フレキシブルERバルブを用いたマイクログリッパ

    日本機械学会山梨講演会  2011.10 

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  • 偏流板を用いた交流電気浸透マイクロポンプ

    日本機械学会2011年度年次大会  2011.9 

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  • 交流圧力源を用いた多自由度マイクロアクチュエータシステム

    日本機械学会2012年度年次大会  2012.9 

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  • ECFマイクロシリンダ

    第24回「電磁力関連のダイナミクス」シンポジウム  2012.5 

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  • ECFジェット駆動マイクロ液圧用シリンダ

    日本機械学会ロボティクス・メカトロニクス講演会2012(ROBOMEC2012)  2012.5 

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  • 交流圧力源を用いたMEMSベースERマイクロフィンガ

    日本機械学会山梨講演会  2013.10 

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  • 電極分割形フレキシブルERバルブを用いたマイクログリッパ

    日本機械学会ロボティクス・メカトロニクス講演会2013(ROBOMEC2013)  2013.5 

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  • 形状適応機能を有する多自由度ERアクチュエータに関する研究(基本ユニットラージモデルの試作および基礎実験)

    平成25年春季フルードパワーシステム講演会  2013.5 

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  • 機能性流体の応用事例:次世代フルードパワーシステムを目指して

    K. Yoshida

    日本フルードパワーシステム学会公開技術フォーラム「これがフルードパワーの魅力だ!〜油圧・水圧・空気圧・機能性流体のスペシャリストを迎えて〜」  2013 

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  • 形状適応機能を有する多自由度ERアクチュエータの開発(提案と基礎実験)

    2013年度精密工学会春季大会学術講演会  2013.3 

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  • スリット−直方体電極対を用いた交流電気浸透マイクロポンプ

    第21回MAGDAコンファレンス in 仙台  2012.11 

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  • 形状適応機能を有する多自由度ERアクチュエータに関する研究

    平成24年秋季フルードパワーシステム講演会  2012.11 

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  • スリット−直方体電極対を用いた交流電気浸透マイクロポンプの特性評価

    日本機械学会山梨講演会  2012.10 

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  • 形状適応機能を有する多自由度ERアクチュエータに関する研究(可動電極形ERバルブの開発)

    日本機械学会山梨講演会  2012.10 

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  • 周波数可変交流圧力源を用いた多自由度マイクロアクチュエータシステム

    日本機械学会2013年度年次大会  2013.9 

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  • MEMS技術を用いた電極分割形フレキシブルERバルブ

    日本機械学会山梨講演会  2013.10 

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  • アクチュエータ技術と制御および高機能化への応用

    K. Yoshida

    ?日本テクノセンターセミナー「アクチュエータ技術と制御および高機能化への応用」  2015 

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  • ERF(電気粘性流体)を応用した高機能マイクロアクチュエータ

    K. Yoshida

    日本機械学会講習会「産業に役立つアクチュエータ研究開発の最前線」講習会  2015 

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  • MEMS技術を用いた電極分割形フレキシブルERマイクロバルブの開発

    平成26年春季フルードパワーシステム講演会  2014.5 

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  • 平板−円筒電極を用いた交流電気浸透マイクロポンプの提案

    日本機械学会2014年度年次大会  2014.9 

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  • 交流圧力源を用いたMEMS-ERマイクログリッパに関する研究

    日本機械学会第14回機素潤滑設計部門講演会  2014.4 

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  • 高周波交流圧力源を用いた多自由度マイクロアクチュエータシステムの開発

    日本機械学会第14回機素潤滑設計部門講演会  2014.4 

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  • 機能性流体ERFを用いたマイクロアクチュエータシステム

    K. Yoshida

    IFPEXカレッジコーナー  2014 

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  • 位置フィードバック機構を内蔵したERマイクロアクチュエータ

    K. Yoshida

    東京工業大学新技術説明会  2014 

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  • 高周波交流圧力源を用いた多自由度マイクロアクチュエータシステム

    日本機械学会山梨講演会  2013.10 

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  • 高周波交流圧力源を用いた多自由度マイクロアクチュエータシステムの開発(1自由度システムの特性解析)

    平成25年秋季フルードパワーシステム講演会  2013.11 

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  • 平板−円筒電極対を用いた交流電気浸透マイクロポンプの特性評価

    日本機械学会山梨講演会  2014.10 

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  • DRIEによる高アスペクト比三角柱ースリット形電極(TPSE)の製作に関する研究

    日本機械学会山梨講演会  2016.10 

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  • パリレンを用いた可変焦点形ECFレンズの提案

    平成29年春季フルードパワーシステム講演会  2017.5 

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  • 流体慣性を応用した圧電マイクロポンプの高出力化(シミュレーションによる検討)

    日本機械学会山梨講演会  2016.10 

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  • フォトリソグラフィで製作するDEアクチュエータ駆動蠕動マイクロポンプの提案

    平成28年秋季フルードパワーシステム講演会  2016.10 

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  • マイクロチェックバルブを集積したECFマイクロ液圧源の提案

    平成28年秋季フルードパワーシステム講演会  2016.10 

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  • UV硬化性材料を用いた積層形DEアクチュエータの提案

    ロボティクス・メカトロニクス講演会2016(ROBOMECH2016)  2016.6 

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  • MEMS技術を応用したマイクロ交流圧力源搭載形2自由度ERアクチュエータシステムに関する研究

    日本機械学会2016年度年次大会  2016.9 

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  • MEMS技術を応用した交流圧力システムのための2自由度ソフトアクチュエータ

    日本機械学会第16回機素潤滑設計部門講演会  2016.4 

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  • 積層ダイアフラム形DEアクチュエータを用いたマイクロポンプに関する基礎的研究

    平成28年春季フルードパワー講演会  2016.5 

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  • 平板−円筒電極アレイを用いた交流電気浸透マイクロポンプの開発

    平成27年春季フルードパワーシステム講演会  2015.5 

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  • 流体共振回路を用いた複数アクチュエータシステムのマイクロ化に関する研究

    日本機械学会山梨講演会  2015.10 

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  • A Fabrication Process of Flxible Electro-Rheological Microvalve (FERV) Using UV-Curable PEDOT:PSS Electrodes

    日本機械学会第18回機素潤滑設計部門講演会  2018.4 

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  • 犠牲層を用いないSU-8構造体の剥離方法の提案

    日本機械学会第18回機素潤滑設計部門講演会  2018.4 

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  • SU-8自立形微細構造体の製作と接合

    日本機械学会山梨講演会  2017.10 

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  • 磁性体ステンシルマスクの開発

    日本機械学会山梨講演会  2017.10 

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  • UV硬化性PEDOT:PSSへの糖アルコール添加による誘電エラストマーアクチュエータの特性改善

    日本機械学会山梨講演会  2017.10 

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  • SU-8で製作されたマイクロチェックバルブの幾何学的パラメータに関する検討

    日本機械学会2017年度年次大会  2017.9 

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  • スリット電極と複数の四角柱電極を用いた交流電気浸透マイクロポンプの特性評価

    日本機械学会山梨講演会  2017.10 

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  • 誘電エラストマーアクチュエータの高出力化に関する研究(UV硬化性PEDOT:PSSへの糖アルコール添加の効果)

    日本機械学会2017年度年次大会  2017.9 

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  • スリット電極と複数の四角柱電極を用いた交流電気浸透マイクロポンプの提案

    日本機械学会2017年度年次大会  2017.9 

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  • 機能性流体ERFを用いたマイクロアクチュエータシステム

    K. Yoshida

    IFPEXカレッジコーナー  2017.9 

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  • 機能性流体ECFを用いたマイクロ液圧源とその応用

    IFPEXカレッジコーナー  2017.9 

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  • Proposal of a two-DOFs soft microactuator integrated with flexible ER microvalves

    日本機械学会第31回「電磁力関連のダイナミクス」シンポジウム  2019.5 

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  • ECF液圧源で駆動する昆虫形ソフトロボットに関する研究

    日本機械学会第31回「電磁力関連のダイナミクス」シンポジウム  2019.5 

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  • 裏面露光を用いたUV硬化性PDMSによる生体模倣膜の形成に関する研究

    日本機械学会山梨講演会  2018.10 

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  • ECFマイクロポンプの高出力化を可能にする新たな電極対の提案

    2019年春季フルードパワーシステム講演会  2019.5 

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  • ECFマイクロポンプを搭載した昆虫形ソフトロボットの提案

    日本機械学会山梨講演会  2018.10 

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  • 静電レンズを用いたエレクトロスプレーデポジション(ESD)法によるマイクロパターニング

    日本機械学会2018年度年次大会  2018.9 

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  • 流体慣性を応用した圧電マイクロポンプの高出力化(ポンプ室高剛性化の実験的検討)

    日本機械学会山梨講演会  2018.10 

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  • Au-ITO複合配線を用いたUV裏面露光による新たなUV-LIGAプロセスの提案

    日本機械学会2018年度年次大会  2018.9 

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  • 誘電エラストマーアクチュエータの高出力化に関する研究(UV硬化性PDMSへのチタン酸バリウム添加の効果

    日本機械学会2018年度年次大会  2018.9 

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  • ECFマイクロポンプを用いたジャミンググリッパの提案

    平成30年春季フルードパワーシステム講演会  2018.5 

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  • T形電極アレイを用いた交流電気浸透マイクロポンプの提案

    平成30年春季フルードパワーシステム講演会  2018.5 

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  • 流体慣性を応用した空気圧マイクロポンプの提案と設計

    日本機械学会山梨講演会2020  2020.11 

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  • 高パワー管内走行マイクロロボットとそのマイクロ液圧源

    日本機械学会山梨講演会2020  2020.11 

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  • 交流電気浸透マイクロポンプの高出力化に関する研究

    日本機械学会2020年度年次大会  2020.9 

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  • 低電圧で駆動する静電駆動形高速空気圧MEMSバルブの提案

    日本機械学会山梨講演会2020  2020.11 

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  • エレクトロスピニング法を用いた配向ナノファイバに関する研究

    日本機械学会山梨講演会  2019.10 

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  • ECFマイクロポンプのラボオンチップへのパッケージングに関する研究

    2019年秋季フルードパワーシステム講演会  2019.11 

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  • 交流電気浸透のメカニズムに関する研究

    日本機械学会山梨講演会  2019.10 

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  • 多自由度アクチュエータシステムのための共振形マイクロ交流圧力源に関する研究

    日本機械学会山梨講演会  2019.10 

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  • 高圧で駆動するERマイクロシステムに関する研究

    日本機械学会山梨講演会  2019.10 

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  • 誘電エラストマーアクチュエータの高出力化に関する研究(UV硬化性PDMSへのシリコンオイル添加の効果)

    日本機械学会2019年度年次大会  2019.9 

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  • 電界共役流体(ECF)を液圧源とするマイクロジャミンググリッパに関する研究

    日本機械学会2019年度年次大会  2019.9 

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  • 機能性流体ERFを応用したパワーマイクロロボット技術

    第26回フルードパワー国際見本市カレッジ研究発表展示コーナー  2021.10 

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  • ECFマイクロポンプ駆動により肺胞の動的環境を再現するマイクロデバイスの提案

    日本機械学会2021年度年次大会  2021.9 

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  • 低電圧で駆動する静電駆動形高速空気圧MEMSバルブの開発

    日本機械学会2021年度年次大会  2021.9 

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  • 積層形ERマイクロバルブに関する研究

    2021年春季フルードパワーシステム講演会  2021.6 

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  • マイクロ流体デバイスにおける接着剤のはみだしがないパッケージング手法の提案

    日本機械学会山梨講演会2020  2020.11 

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  • ソフトロボット用の繊維強化マイクロ脚関節の提案

    2020年秋季フルードパワーシステム講演会  2020.12 

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  • ERバルブのマイクロ化に関する研究

    日本機械学会山梨講演会2020  2020.11 

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  • 深堀り反応性イオンエッチング(DRIE)における開口パターンの高アスペクト比形状への影響

    日本機械学会山梨講演会2020  2020.11 

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  • MEMS技術によるECFジェットアクチュエータ

    日本機械学会2008年度年次大会  2008 

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  • 医療用デバイスに応用できるフレキシブルERマイクロアクチュエータ

    第5回次世代医療システム産業化フォーラム2008  2008 

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  • 外乱補償機能を有するERマイクロアクチュエータ

    第26回日本ロボット学会学術講演会  2008 

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  • 出力変位を拡大した位置フィードバック形ERマイクロアクチュエータ

    日本機械学会2008年度年次大会  2008 

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  • ポンプ・バルブ一体形ERマイクロアクチュエータに関する研究

    第17回MAGDAコンファレンス  2008 

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  • ERマイクログリッパに関する研究

    山梨講演会2008  2008 

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  • MEMS技術を用いたフレキシブルERマイクロアクチュエータ(FERMA)

    機能性流体を活用した次世代型フルードパワーシステムに関する公開シンポジウム  2008 

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  • Development of a Flexible ER Microactuator by MEMS Technology

    2007 

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  • MEMS技術によるECFジェットアクチュエータの高出力化

    第51回自動制御連合講演会  2008 

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  • MEMS技術を用いたフレキシブルERマイクロアクチュエータ

    日本機械学会ロボティクス・メカトロニクス講演会'07(ROBOMEC2007)  2007 

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  • 管路内の流体慣性を応用した高粘度流体用マイクロ流体パワー源

    第19回「電磁力関連のダイナミクス」シンポジウム  2007 

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  • An ER Microactuator with Built-in Pump and Valve

    12th Int. Conf. on New Actuators (ACTUATOR 2010)  2010 

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  • 機能性流体利用アクチュエータ

    吉田和弘

    日本機械学会講習会「ブレイクスルーを生み出す次世代アクチュエータ」教材  2010 

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  • 機能性流体利用アクチュエータ

    吉田和弘

    日本機械学会講習会「ブレイクスルーを生み出す次世代アクチュエータ」教材  2009 

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  • 交流電気浸透流を用いたマイクロアクチュエータの提案

    日本機械学会2010年度年次大会  2010 

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  • ERF を用いたマイクログリッパ

    (社)日本機械学会 2009年度年次大会  2009 

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  • ポンプ・バルブ一体形ER マイクロアクチュエータの開発

    (社)日本機械学会 2009年度年次大会  2009 

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  • ERバルブ一体形マイクロベロフラムアクチュエータ

    平成21年 秋季フルードパワーシステム講演会  2009 

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  • ERFを用いたマイクログリッパの開発

    第27回日本ロボット学会学術講演会  2009 

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  • 位置フィードバック機構を内蔵したERマイクロアクチュエータの開発

    第8回機素潤滑設計部門講演会  2008 

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  • 均一系ER流体を応用したニューマイクロアクチュエータ

    日本機械学会2008年度年次大会  2008 

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  • MEMS技術を用いたECFマイクロモータ

    第8回機素潤滑設計部門講演会  2008 

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  • ベロフラムアクチュエータのマイクロ化とERマイクロアクチュエータへの応用

    日本機械学会ロボティクス・メカトロニクス講演会2010(ROBOMEC2010)  2010.6 

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  • 2自由度屈曲可能なERマイクロバルブ

    平成23年春季フルードパワーシステム講演会  2011.5 

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  • ECFジェット駆動マイクロシリンダの開発

    平成23年春季フルードパワーシステム講演会  2011.5 

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  • 機能性流体利用アクチュエータ

    K. Yoshida

    日本機械学会講習会「実用化が近い新原理アクチュエータ」  2011 

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  • 交流電気浸透を用いたマイクロ流動発生器の提案

    第23回「電磁力関連のダイナミクス」シンポジウム  2011.5 

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  • 機能性流体ERF を用いた位置制御マイクロシステム

    K. Yoshida

    IFPEXカレッジコーナー  2011 

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  • 次世代機械システム実現に貢献する機能性流体アクチュエータ

    K. Yoshida

    平成23年度YNU学術ディスコース(第2回)  2011 

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  • 高温環境における機能性流体アクチュエータの可能性

    第26回日本ロボット学会学術講演会  2010.9 

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  • 交流電気浸透流を用いたアクチュエータ駆動用マイクロポンプ

    日本機械学会 山梨講演会  2010.10 

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  • ERバルブ一体形マイクロベロフラムアクチュエータの提案と応用

    日本機械学会第10回機素潤滑設計部門講演会  2010.4 

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  • ERFを作動流体としたポンプ搭載形管内走行マイクロマシン

    平成22年春季フルードパワーシステム講演会  2010.5 

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  • 高温環境におけるECF アクチュエータの可能性−温度変化による電流値の変化

    第29回日本ロボット学会学術講演会  2011.9 

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  • 流体の慣性効果を用いたマイクロポンプの高出力化

    吉田和弘

    日本機械学会ロボティクス・メカトロニクス講演会'03講演論文集  2003 

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  • バルブ内蔵形MRシリンダ

    吉田和弘

    日本機械学会山梨講演会講演論文集  2003 

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  • 管路慣性を応用したマイクロポンプの最適構造

    吉田和弘

    日本機械学会山梨講演会講演論文集  2003 

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  • マイクロ流体パワー源のための高出力圧電マイクロポンプ

    吉田和弘

    第87回電子セラミック・プロセス研究会資料  2003 

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  • MRF駆動マニピュレータ

    吉田和弘

    計測自動制御学会第4回流体計測制御シンポジウム講演論文集  2003 

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  • 機能性流体を用いたマイクロアクチュエータとその応用

    吉田和弘

    ㈱技術情報協会セミナー「MEMSデバイスへの要求性能と実用化・量産化に向けた課題」資料  2003 

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  • 流体応用マイクロシステムの最先端動向-高出力流体駆動アクチュエータを中心として-

    吉田和弘

    横浜市工業技術センターテクノパートナー推進プロジェクト「先端機械技術の応用」2年度第1回技術交流会資料  2003 

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  • MR流体を作動流体としたマイクロバルブ(高応答化の検討)

    吉田 米田, 横田, 杉原

    日本機械学会山梨講演会講演論文集  2002 

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  • 輝度勾配に基づく実時間運動ステレオビジョン(計測速度の向上)

    吉田 松浪

    日本機械学会山梨講演会講演論文集  2002 

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  • 流体の慣性効果を用いたマイクロポンプのシミュレーション

    吉田和弘

    日本機械学会2003年度年次大会講演論文集  2003 

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  • 画像積算を用いた実時間運動ステレオビジョン

    吉田和弘

    日本機械学会ロボティクス・メカトロニクス講演会'03講演論文集  2003 

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  • 電界共役流体(ECF)を応用した電子チップ液冷用平面形ポンプ

    吉田和弘

    日本機械学会2004年度年次大会講演論文集  2004 

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  • MRシリンダ駆動マニピュレータ

    吉田和弘

    日本機械学会2004年度年次大会講演論文集  2004 

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  • MR流体を用いたマイクロ流体制御システム

    吉田和弘

    日本機械学会山梨講演会講演論文集  2004 

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  • 均一系ER流体を用いたフレキシブルERマイクロアクチュエータの提案

    吉田和弘

    日本機械学会山梨講演会講演論文集  2004 

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  • 共振駆動チェック弁を用いたER流体ポンピング用圧電マイクロポンプ

    吉田和弘

    平成16年秋季フルードパワーシステム講演会講演論文集  2004 

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  • 電子チップ液冷用平面形ECFポンプ

    吉田和弘

    日本機械学会山梨講演会講演論文集  2004 

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  • アクティブバルブを用いた共振駆動形圧電マイクロポンプ

    吉田和弘

    日本機械学会第3回機素潤滑設計部門講演会講演論文集  2003 

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  • MRF弁体バルブを用いたマイクロ流体制御システム

    吉田和弘

    平成16年秋季フルードパワーシステム講演会講演論文集  2004 

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  • シート形アクティブシャトル弁を用いた共振駆動形圧電マイクロポンプ

    吉田和弘

    日本機械学会ロボティクス・メカトロニクス講演会'03講演論文集  2003 

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  • MR流体を作動流体としたマイクロバルブの高応答化

    吉田和弘

    日本機械学会第3回機素潤滑設計部門講演会講演論文集  2003 

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  • 共振駆動スプール弁を用いた圧電マイクロポンプ

    吉田和弘

    日本機械学会山梨講演会講演論文集  2004 

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  • 管路内の流体慣性を応用した全波整流形圧電マイクロポンプ

    日本機械学会山梨講演会  2005 

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  • 均一系ER流体を応用したマイクロアクチュエータ

    日本フルードパワーシステム学会機能性流体を用いたスマートフルードパワーシステムに関する研究委員会公開研究会  2005 

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  • 共振駆動を用いた圧電マイクロポンプ(マイクロシートバルブの提案と実験的検討)

    朴 吉田, 中須, 横田, 瀬戸 高城

    平成13年秋季フルードパワーシステム講演会講演論文集  2001 

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  • MR流体を作動流体とした圧力制御弁(MR流体の特性改善と3ポートバルブの試作)

    吉田和弘, 高橋寛如, 横田眞一, 河内仁, 枝村一弥

    平成12年秋季フルイドパワーシステム講演会講演論文集  2000 

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  • 均一系ER流体を用いたポンプ搭載形管内走行マイクロマシン(バルブおよびポンプの実験的検討)

    吉田和弘, 朴重濠, 清水孝之, 横田眞一

    日本機械学会北海道支部第40回講演会講演概要集  2000 

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  • レンジ情報による移動ロボットの位置同定

    第5回知能移動ロボットシンポジウム  1990 

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  • 半導体プロセスを用いたマイクロERバルブ(3ポートマイクロERバルブの試作と特性実験)

    吉田和弘, 菊地正晃, 朴重濠, 横田眞一

    日本機械学会2000年度年次大会講演会講演論文集  2000 

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  • MR流体を作動流体としたベローズ駆動マニピュレータ

    吉田, 佐々木, 朴, 横田, 河内 枝村

    日本機械学会山梨講演会講演論文集  2001 

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  • MRF液滴を弁体としたマイクロバルブ(直交形弁駆動磁気回路の提案)

    吉田 鄭 横田

    日本機械学会山梨講演会講演論文集  2001 

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  • MR流体を作動流体としたマイクロバルブ(試作マイクロMRバルブの基本特性)

    吉田和弘, 高松環, 横田眞一

    日本機械学会東海支部第49期総会講演会講演論文集  2000 

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  • 積層形ERマイクロバルブを用いたソフトマイクロアクチュエータの特性評価

    吉田和弘

    第33回MAGDAコンファレンス in 東京  2024.11 

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  • ジャミング転移現象による可変変位拘束機構の提案

    江口淳

    日本機械学会山梨講演会2024  2024.10 

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  • 交流圧力駆動ソフトマイクロフィンガに搭載する積層形ERマイクロバルブユニットの製作と評価

    石関康汰

    日本機械学会山梨講演会2024  2024.10 

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  • 交流圧力源システムに用いる静電吸着機構に関する研究

    川合光

    日本機械学会山梨講演会2024  2024.10 

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  • 交流圧力源システムに用いる静電閉鎖チェック弁の特性改善

    楠田悠賀

    日本機械学会山梨講演会2024  2024.10 

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  • 機能性流体ERFを用いたマイクロアクチュエータに関する研究 Invited

    吉田和弘

    日本フルードパワーシステム学会機能性流体FPSのフロンティア展開に関する第7回研究委員会  2024.9 

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  • 交流電気浸透を用いた2次元流体操作マイクロデバイスの提案

    吉田和弘

    日本機械学会2024年度年次大会  2024.9 

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  • 電界共役流体の発生圧力を用いた蠕動マイクロポンプの製作に関する研究

    金俊完

    日本機械学会第23回機素潤滑設計部門講演会  2024.4 

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  • 交流圧力駆動ソフトマイクロフィンガに搭載する積層形ERマイクロバルブの提案と設計

    石関康汰

    日本機械学会第23回機素潤滑設計部門講演会  2024.4 

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  • 静電閉鎖チェック弁を用いた交流圧力源システムの提案

    楠田悠賀

    日本機械学会第23回機素潤滑設計部門講演会  2024.4 

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  • 静電吸着機構を用いた交流圧力源システムの提案

    川合光

    日本機械学会第23回機素潤滑設計部門講演会  2024.4 

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  • 剛性異方性を有するソフトマイクロフィンガ

    吉田和弘

    日本機械学会第23回機素潤滑設計部門講演会  2024.4 

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  • MEMS技術を用いて形成するPDMS多孔質膜を有するセルカルチャーインサートの製作

    大友

    令和5年度生体医歯工学共同研究拠点成果報告会  2024.3 

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  • 電界共役流体(ECF)駆動形蠕動マイクロポンプの提案

    山本

    日本機械学会山梨講演会2023  2023.11 

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  • 絶縁形交流電気浸透を用いたマイクロ流体デバイスの提案

    定本

    日本機械学会山梨講演会2023  2023.11 

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  • 柔軟性を能動制御できるソフトマイクロフィンガの提案

    吉原

    日本機械学会山梨講演会2023  2023.11 

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  • 鋭角形状のコレクタと補助電極を用いたエレクトロスピニング法の提案

    金俊完

    日本機械学会2023年度年次大会  2023.9 

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  • マイクロシートバルブを用いた高出力空気圧マイクロポンプに関する研究

    吉田和弘

    日本機械学会2023年度年次大会  2023.9 

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  • 積層形ERマイクロバルブを搭載したソフトマイクロアクチュエータの開発

    吉田和弘

    2023年春季フルードパワーシステム講演会  2023.5 

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  • MR環境下で使用できるECFアクチュエータに関する研究

    金俊完

    2023年春季フルードパワーシステム講演会  2023.5 

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  • 柔軟動作と位置決め動作が可能な剛性異方性を有するソフトマイクロフィンガの提案

    吉原

    2023年春季フルードパワーシステム講演会  2023.5 

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  • 高圧力駆動ERマイクロアクチュエータに関する研究

    吉田和弘

    日本機械学会第21回機素潤滑設計部門講演会  2022.12 

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  • カーボンナノチューブ技術を用いたECFマイクロポンプ用の針状電極作製に関する研究

    Zhu

    2022年秋季フルードパワーシステム講演会  2022.11 

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  • ECFマイクロレートジャイロの高性能化に向けた基礎研究

    矢島

    日本機械学会山梨講演会2022  2022.10 

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  • ECFジェット効果を用いたMR環境下で使用できるアクチュエータに関する基礎研究

    片岡

    日本機械学会山梨講演会2022  2022.10 

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  • 積層形ERマイクロバルブを搭載したソフトマイクロアクチュエータの提案

    長谷川

    日本機械学会山梨講演会2022  2022.10 

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  • マイクロシートバルブを用いた高出力空気圧マイクロポンプの提案

    久保

    日本機械学会山梨講演会2022  2022.10 

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  • 粒子分散系ERFを用いた高機能交流圧力源システムに関する研究

    吉田和弘

    日本機械学会2022年度年次大会  2022.9 

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  • EHDマイクロポンプの発生圧力を用いた液滴トラップデバイスの提案

    金俊完

    2022年度精密工学会春季大会学術講演会  2022.3 

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  • 流体慣性を応用した空気圧マイクロポンプに関する研究

    吉田和弘

    2022年度精密工学会春季大会学術講演会  2022.3 

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  • 流体慣性マイクロポンプを応用した管内走行マイクロロボットの提案と設計

    吉田和弘

    日本機械学会第20回機素潤滑設計部門講演会  2021.12 

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  • エレクトロスピニング法を用いた配向角度を有するナノファイバの形成

    金俊完

    日本機械学会第20回機素潤滑設計部門講演会  2021.12 

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  • エレクトロスピニング法によるナノファイバの整列に関する研究

    杉山

    日本機械学会山梨講演会2021  2021.11 

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  • EHDマイクロポンプの発生圧力を用いた液滴トラップデバイスの提案

    近藤

    日本機械学会山梨講演会2021  2021.11 

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  • ECFマイクロポンプにおけるリング形電極の新たな製作方法に関する研究

    Zhu

    日本機械学会山梨講演会2021  2021.11 

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  • 高圧力制御用ERマイクロバルブの設計および試作

    江﨑

    日本機械学会山梨講演会2021  2021.11 

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  • 粒子分散系ERFを用いた高機能交流圧力源システムの提案

    早川

    日本機械学会山梨講演会2021  2021.11 

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Industrial property rights

  • アクチュエータシステム

    吉田和弘, 横田眞一

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    Application no:特願2012-19584  Date applied:2012.2

    Announcement no:特開2013-160238  Date announced:2013.8

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  • 電気粘性流体アクチュエータ

    吉田和弘

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    Application no:特願2007-198359  Date applied:2007.7

    Announcement no:特開2009-036216  Date announced:2009.2

    Publication no:特許第4953131号  Date published:2012.3

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  • 微細中空構造体ダイアフラムおよびその応用素子

    吉田和弘, 秦誠一

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    Application no:特願2005-304912  Date applied:2005.10

    Announcement no:特開2007-113654  Date announced:2007.5

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  • 電気粘性流体装置

    吉田和弘

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    Application no:特願2004-307108  Date applied:2004.10

    Announcement no:特開2006-118605  Date announced:2006.5

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  • ポンプ

    高城邦彦, 瀬戸毅, 吉田和弘

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    Application no:特願2004-99234  Date applied:2004.3

    Announcement no:特開2005-282498  Date announced:2005.10

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  • ポンプの駆動方法

    高城邦彦, 瀬戸毅, 吉田和弘

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    Application no:特願2003-364739  Date applied:2003.10

    Announcement no:特開2005-127246  Date announced:2005.5

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  • ポンプ

    高城邦彦, 瀬戸毅, 吉田和弘

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    Application no:特願2002-28762  Date applied:2002.2

    Announcement no:特開2002-322986  Date announced:2002.11

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  • 多眼視覚装置の信号処理法及びこの方法を用いた多眼視覚装置

    広瀬茂男, 吉田和弘

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    Application no:特願昭62-172823  Date applied:1987.7

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  • 複眼レンジファインダ装置の信号処理方式

    広瀬茂男, 吉田和弘

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    Application no:特願昭61-169841  Date applied:1986.7

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  • 二眼レンジファインダ装置の信号処理法

    広瀬茂男, 吉田和弘

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    Application no:特願昭61-169840  Date applied:1986.7

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Works

  • A Study on High-Power Micropumps

    2003

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    Work type:Artistic work  

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  • Development of Resonantly-Driven Micropumps

    2002

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    Work type:Artistic work  

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  • Development of Resonantly-Driven High-Power Micropumps

    2001

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    Work type:Artistic work  

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  • Development of Resonantly-Driven High-Power Micropumps

    2000

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    Work type:Artistic work  

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Awards

  • Best Paper Award (26th Int. Conf. on Mechatronics Technology (ICMT2023))

    2023.10  

    T. Kubo, K. Yoshida, J.-w. Kim

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  • 東工大工系教育賞

    2022.3   東京工業大学工系3学院  

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  • 日本AEM学会著作賞

    2021.12   日本AEM学会  

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  • 一般社団法人日本機械学会機素潤滑設計部門一般表彰(優秀講演)

    2021.5   日本機械学会  

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  • 日本機械学会フェロー

    2020.2   一般社団法人日本機械学会  

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  • 一般社団法人日本機械学会機素潤滑設計部門一般表彰(優秀講演)

    2015.4  

    吉田 和弘

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  • JFPS Best Conference Paper Award (9th JFPS Int. Symp. on Fluid Power, Matsue 2014)

    2014.10  

    吉田 和弘

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  • Best Paper Award (17th Int. Conf. on Mechatronics Technology (ICMT2013))

    2013.10  

    吉田 和弘

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  • 一般社団法人日本機械学会機素潤滑設計部門一般表彰(優秀講演)

    2012.4  

    吉田 和弘

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  • 社団法人日本機械学会機素潤滑設計部門一般表彰(優秀講演)

    2010.4  

    吉田 和弘

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  • 社団法人日本機械学会機素潤滑設計部門業績賞

    2010.4  

    吉田 和弘

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  • Best Paper Award (11th Int. Conf. on Mechatronics Technology (ICMT2007))

    2007.11  

    吉田 和弘

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  • 日本AEM学会著作賞

    2006.11  

    吉田 和弘

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  • 財団法人油空圧機器技術振興財団「学術論文顕彰」

    2005.5  

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    Country:Japan

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  • 財団法人油空圧機器技術振興財団「学術論文顕彰」

    1997.4  

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    Country:Japan

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  • 財団法人精密測定技術振興財団「高城賞」

    1994.10  

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    Country:Japan

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Research Projects

  • Cell culture and sensing platform that reproduces the dynamic environment of living organisms on a chip

    Grant number:24K00786  2024.4 - 2027.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (B)

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    Grant amount:\18460000 ( Direct Cost: \14200000 、 Indirect Cost:\4260000 )

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  • Formation of aligned nanofibers by combining ECF jet flow and electrospinning

    Grant number:20K20957  2020.7 - 2022.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Challenging Research (Exploratory)

    KIM Joon-wan

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    Grant amount:\6370000 ( Direct Cost: \4900000 、 Indirect Cost:\1470000 )

    Cells are often cultured into scaffolds capable of supporting three-dimensional tissue formation for medical purposes. Many researchers have developed scaffolds mimicking the extracellular matrix (ECM) of the native tissue by using nanofibers formed by electrospinning. In general, nanofibers by electrospinning have the characteristic of random orientation, so it is not adequate to culture the cells aligned in a specific direction. To overcome this limitation, we propose to form an aligned nanofiber membrane using a sharp-angled collector pair and its parallel movement. Using this method, we successfully achieved more uniform and aligned nanofiber membranes than the previous one formed by the parallel plate collector. For more precise control of orientation, we also propose to place auxiliary electrodes in addition to the sharp-angled collector. We develop an electrospinning system that enables the proposed method and verifies its effectiveness experimentally.

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  • ナノ加工技術を用いた機能性流体ECFマイクロ液圧源の高出力パワー密度化

    2018.4 - 2021.3

    文部科学省  基盤研究(B)(一般) 

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    Grant type:Competitive

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  • 蠕動マイクロポンプと能動マイクロミキサーを内蔵する高機能μ-TASデバイスの開発

    2016.4 - 2019.3

    文部科学省  基盤研究(C)(一般) 

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    Grant type:Competitive

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  • Nano / micro patterning using an electrostatic lens array and its application to neural cell networks

    Grant number:16K14143  2016.4 - 2018.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Challenging Exploratory Research

    KIM Joon-wan

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    Grant amount:\3640000 ( Direct Cost: \2800000 、 Indirect Cost:\840000 )

    Electrospray deposition (ESD) through a stencil mask has attracted attention, because it is a high-speed patterning of bio/organic polymer materials over large areas and with high resolution and based on completely-dried nanoparticles of them. However, it is difficult to generate nanopatterns due to the clogging of holes in the stencil mask. This paper proposes novel ESD methods to form patterns smaller than the stencil mask holes by utilizing a MEMS-fabricated microstencil mask to control the electrostatic field.
    Two different approaches are proposed in this paper: (1) to control the gap between the stencil mask and the substrate by using magnetic force; and (2) to control the electric field line by changing applied voltages. We conceived novel MEMS fabrication processes and successfully fabricated both of microstencil masks. The patterning results with the proposed microstencil mask showed that the feasibility of two proposed methods to generate smaller patterns than the mask holes.

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  • 高パワー作業を行う狭隘空間内作業マイクロロボットの開発

    2014.4 - 2018.3

    文部科学省  基盤研究(B)(一般) 

    吉田和弘

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\12700000

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  • 電界共役流体マイクロポンプを内蔵したマイクロ液滴生成デバイスの開発と応用

    2014.4 - 2017.3

    文部科学省  基盤研究(B)(一般) 

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    Grant type:Competitive

    Grant amount:\12700000

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  • 交流電気浸透を用いた外部刺激応答形ドラッグデリバリーシステムの基礎研究

    2014.4 - 2017.3

    文部科学省  挑戦的萌芽研究 

    吉田和弘

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\3000000

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  • 機能性流体ECFを用いた高出力パワー密度マイクロ液圧源

    2012.4 - 2015.3

    文部科学省  基盤研究(A)(一般) 

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    Grant type:Competitive

    Grant amount:\35300000

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  • 交流電気浸透流を用いたマイクロアクチュエーションシステムの開発

    2011.4 - 2014.3

    文部科学省  基盤研究(B)(一般) 

    吉田和弘

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\14700000

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  • 形状適応機能を有する次世代内視鏡のためのヒモ形アクチュエータの開発

    2010.4 - 2013.3

    文部科学省  挑戦的萌芽研究 

    吉田和弘

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\3100000

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  • 電界共役流体のコモンラインを利用したマイクロアーム/多指ハンドシステムの研究

    2009.4 - 2012.3

    文部科学省  基盤研究(A)(一般) 

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    Grant type:Competitive

    Grant amount:\35800000

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  • 電界共役流体を用いた極薄液体レートジャイロの研究

    2009.4 - 2011.3

    文部科学省  挑戦的萌芽研究 

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    Grant type:Competitive

    Grant amount:\3200000

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  • 電界共役流体を応用した高性能マイクロジャイロスコープの研究

    2007.4 - 2009.3

    文部科学省  萌芽研究 

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    Grant type:Competitive

    Grant amount:\3500000

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  • 位置フィードバック機構を内蔵した多自由度ERマイクロアクチュエータの試作

    2006.4 - 2008.3

    文部科学省  萌芽研究 

    吉田和弘

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\3400000

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  • 電界共役流体ジェット駆動フレキシブルマイクロ多指ハンドに関する研究

    2005.4 - 2008.3

    文部科学省  基盤研究(B)(一般) 

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    Grant type:Competitive

    Grant amount:\15500000

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  • 機能性流体を応用したニューアクチュエータの研究

    2004.4 - 2009.3

    文部科学省  特定領域研究「ブレイクスルーを生み出す次世代アクチュエータ研究」計画研究 

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    Grant type:Competitive

    Grant amount:\61700000

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  • 電界共役流体(ECF)を用いたマイクロ人工筋の研究

    2004.4 - 2006.3

    文部科学省  萌芽研究 

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    Grant type:Competitive

    Grant amount:\3500000

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  • フレキシブル電極を用いた多自由度ERマイクロアクチュエータの開発

    2004.4 - 2005.3

    財団法人三豊科学技術振興協会  研究助成 

    吉田和弘

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\2490000

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  • Next-Generation Actuators Leading Breakthroughs

    Grant number:16078101  2004 - 2009

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research on Priority Areas

    HIGUCHI Toshiro, SUZUMORI Kouichi, KUROSAWA Minoru, HATTORI Tadashi, NORITSUGU Toshiro, YOKOTA Shinichi, YOSHIDA Kazuhiro, YAMAMOTO Akio, KANDA Takefumi

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    Grant amount:\39500000 ( Direct Cost: \39500000 )

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  • 電界共役流体(ECF)を応用した極限環境用高機能マイクロヘリコプタの実現

    2002.4 - 2005.3

    文部科学省  基盤研究(A) 

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    Grant type:Competitive

    Grant amount:\39800000

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  • 電界共役流体を応用した高パワー軽量な高集積化マイクロモータの開発

    2002.4 - 2004.3

    文部科学省  萌芽研究 

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    Grant type:Competitive

    Grant amount:\3400000

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  • 電界共役流体(ECF)を応用した直径φ1mmマイクロモータの開発

    Grant number:12875031  2000 - 2001

    日本学術振興会  科学研究費助成事業  萌芽的研究

    横田 眞一, 朴 重濠, 吉田 和弘, 近藤 豊

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    Grant amount:\2100000 ( Direct Cost: \2100000 )

    本研究課題では新しい機能性流体として電界共役流体(ECF : Electro-Conjugate Fluid)に注目している.ECFは線状電極で直流高電圧を印加されると,活発な流動(ジェット)を生じる.この現象を応用し,電磁モータでは実環が困難な,直径φ1mmのマイクロモータを実現することを目的としている.本年度は主に,昨年度試作した内径φ2mmのマィクロECFモータの詳細な特性評価をしている.また,内径φ1mmのマイクロECFモータの試作に成功している.実施結果の具体的内容は以下のとおりである.試作した内径φ2mmマイクロECFモータでは,最高値として,無負荷回転速度135rad/s(1300rpm),出力トルク7.5μNm、出力パワー0.57mW,効率15%,出力トルク密度5.3×10^2Nm/m^3,出力パワー密度4.0×10^4W/m^3を得た.ついで,内径φ1mmマイクロECFモータの試作をおこなっている.マイクロECFモータでは,ブラシなどの従来の方法でロータへ通電することは不可能である.本研究では,直径φ0.2mm鋼球を軸受けとして用いるとともに,鋼球を接点としてロータへ通電する方法を考案している.また,マイクロECFモータではロータ側面に微細電極を構成する必要がある.本研究では,ロータ外形を機械加工の後,スパッタで金コーティングし,ついで,FHG-YAGレーザー加工機でアブレーション加工を施すことで電極のパターニングを行う.これにより,直径がφ0.8mmのロータ側面に微細電極を構成している.試作したマイクロECFモータの大きさは,外径2mm内径1mm),高さ4.5mmである.質量は50mgである.試作したφ1mmマイクロECFモータが無負荷回転速度140rad/s(1330rpm)で回転することを確認している.

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  • 機能性流体を用いたマイクロ運動システムのためのマイクロフルイドパワー集積デバイス

    1999.4 - 2002.3

    文部科学省  基盤研究(A)(2)(一般) 

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    Grant type:Competitive

    Grant amount:\36400000

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  • MR(磁気粘性)流体を作動流体とした液圧サーボシステム

    1999.4 - 2001.3

    文部科学省  奨励研究(A) 

    吉田和弘

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\2000000

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  • ER(電気粘性)流体を用いた高機能管内作業マイクロマシンの試作

    1998.4 - 2000.3

    文部科学省  基盤研究(B)(2)(展開) 

    吉田和弘

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\13000000

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  • 繊維植毛電極によるER効果を用いた高機能液圧制御弁および高機能液圧サーボシステム

    Grant number:10875036  1998 - 1999

    日本学術振興会  科学研究費助成事業  萌芽的研究

    横田 眞一, 吉田 和弘, 近藤 豊

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    Grant amount:\2100000 ( Direct Cost: \2100000 )

    ごく最近,ER流体を用いなくても,繊維を植毛した電極により一般的な絶縁性流体に電界を印加することで,ER効果が発現することが千葉大の大坪らにより報告された.本研究課題はこの新しいER効果をフルイドパワーシステムへ応用し,新しい液圧制御弁(植毛ERバルブ)を実現することを目的としている.本年度は,主に植毛電極によるER効果の基本特性解明実験,液圧アクチュエータを制御可能な4ポート液圧制御弁の試作,液圧制御弁数学モデルの確立をおこなった.実施結果の具体的内容は以下のとおりである,
    まず,昨年度に本研究で試作した2ポート植毛ERバルブを用いて,作動流体や植毛の材質などの様々な因子の影響を調べた.その結果,ECF流体(Electro-conjugate Fluid)は一般に油圧システムで用いられている鉱油系作動油に比べ,より大きなER効果を示すこと,植毛材質にグラファイトを混合するとER効果は大きくなるが同時に放電しやすくなるため,安定して電界が印加できなくなること,ER効果が流量,電極間隔,電極長さによらないこと,などを明らかにした.また,これらの結果に基づき,2ポート植毛ERバルブ静特性数学モデルを提案した.ついで,実用に近い形として4ポート植毛ERバルブを提案および試作した.設計に際しては,前述の数学モデルをもとに設計した.提案する4ポート植毛ERバルブは4つの植毛電極で構成され,各電極に印加する電界を変えることで,2つの出力ポートに差圧が生じ,負荷圧力を得ることができるものである.試作したバルブは外形寸法85×80×170mmで,供給圧1.8MPaで平均0.18MPaの負荷圧力を得た.さらに,実際に液圧ピストンシリンダと試作した4ポート植毛ERバルブによりサーボ系を構成し,ピストン変位を振幅±5mm,周波数0.05Hz,正弦波に追従させることに成功した.

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  • 均一系ER流体を用いたマイクロ制御弁

    1997.4 - 1999.3

    文部科学省  奨励研究(A) 

    吉田和弘

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\2300000

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  • 磁性流体を用いたマイクロマシン用ポンプシステムの開発

    1996.4 - 1998.3

    財団法人メカトロニクス技術高度化財団  研究助成 

    吉田和弘

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\1500000

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  • マイクロ流体集積回路のための平面形マイクロ制御弁の開発

    1996.4 - 1997.3

    財団法人高度自動化技術振興財団  研究開発への助成 

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    Grant type:Competitive

    Grant amount:\1300000

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  • 機能性流体を用いたマイクロ制御弁

    1995.4 - 1997.3

    文部科学省  一般研究(C) 

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    Grant type:Competitive

    Grant amount:\2500000

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  • 磁性流体を用いた電気液圧マイクロ変換器の開発

    1994.4 - 1996.3

    財団法人メカトロニクス技術高度化財団  研究助成 

    吉田和弘

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\1100000

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  • 機能性流体を用いたマイクロ制御弁の開発

    1994.4 - 1995.3

    財団法人マイクロマシンセンター  研究助成 

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    Grant type:Competitive

    Grant amount:\1900000

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  • 液圧パワーを用いた高出力マイクロアクチュエータの試作と管内走行機械への応用

    1993.4 - 1994.3

    財団法人油空圧機器技術振興財団  研究助成 

    吉田和弘

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\1000000

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  • 新しい液圧アクチュエータを応用した極限環境用マニピュレータの開発

    Grant number:05650158  1993

    日本学術振興会  科学研究費助成事業  一般研究(C)

    横田 眞一, 吉田 和弘

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    Grant amount:\2200000 ( Direct Cost: \2200000 )

    ここで用いている著者らの開発したフレキシブルハイドロウリックアクチュエータ(FHA)は液圧の大きな弱点となりうる漏れがなく,また摺動部がないため潤滑の必要がないという優れた特長をもち、ほかのアクチュエータと比較して出力/自重比の点でもはるかに優れている.
    この利点を生かして、試作した2本のFHAを用いた1自由度回転関節形マニピュレータの概略図を示す.この場合内圧の立ち上がりがシステムの動特性を大きく支配するので内圧制御が重要になる.FHAを応用したマニピュレータシステムの回転角度制御に際し,FHAの体積変化による流量補償を加えた内圧制御を付加することによる制御系の安定化を行ない、変位フィードバックのみの制御に比べ内圧および変位の応答性が十分に改善されることを確かめている(文献1参照).
    またマニピュレータの姿勢変化およびハンドリング負荷の有無による関節周りの慣性モーメントの変化などによるシステムの大きな特性変動に対して影響を受けない制御系を実現するために,外乱オブザーバを用いた外乱推定補償形ロバスト制御系を本マニピュレータシステムに適用し,実験とシミュレーションを通じて、サーボ弁の中立点ずれ、ループゲインの大幅な変化(100%)、また関節周りの慣性負荷の3倍の変化などにこの制御手法が有効に働くことを確かめている(文献1参照).
    さらに、真空のような極限環境で使用可能な液圧マニピュレータ用アクチュエータの駆動には漏れのない高速弁が必要となるため、ここでは両側をベローズで封印したスプール弁を,申請者らが高速弁の駆動に用いている積層ピエゾ素子で駆動する新たな高速3方弁の試作を行った.スプール駆動用のピエゾ素子に起因するヒステリシスなどの非線形特性の影響を低減するため外乱オブザーバを用いたロバスト制御と推定速度フィードバックをマイナーな部分にも応用して、300Hzの高応答性を実現している(文献2参照).

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  • STUDY ON TRAVELING MICROMECHANISM

    Grant number:02402025  1990 - 1992

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for General Scientific Research (A)

    HAYASHI Teru, YOSHIDA Kazuhiro, IWATSUKI Nobuyuki, HAMAGUCHI Hisayuki, TOKUDA Koichi, NAKAMURA Tetsurou

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    Grant amount:\17300000 ( Direct Cost: \17300000 )

    In this study, traveling micromechanisms which should have the most kinds of special features of a micromechanism were trially made and the problems in the process were solved or cleared. (1)Basics of design: Investigating the traveling speeds of natural and artificial traveling things,some natural laws were found out. About the frictional coefficients between flat surfaces pair and radial shaft and bearing pair were investigated and sudden increase at the size below 0.1mm was cleared. The minimum size of the micro mechanisms were analized from the manufacturing accuracy of their parts. (2)Traveling mechanisms : The traveling mechanisms on the ceiling and wall using the surface tension of water were created after the observation of insect. The special feature of the micromechanism on the soft surfaces were cleared. (3)Actuator : For using the water absorptive polymer gel as the actuator, the fundamental equation of the deformation due to electric current was induced and the artificial warm and gel motor were trially made. (4)Supplying energy : Some methods using the electro-magnetic wave, the solar battery, the ultrasonic wave and etc. were investigated. As the method using the circumferantial energy, the balloon model for inside of tube driven by fractuating pressure was made and tested and fundamental study of utilizing the Brown motion energy was done. (5)Measurement of small amount force : Using the vibration impedance change of bimolph piezo-film was investigated and the sensitivity of 10-6[N] was obtained and the method are going to apply to the power measurement of ant now.

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  • Giant Magnetostrictive Acturator for Aerospace Robotics

    Grant number:02805021  1990 - 1991

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for General Scientific Research (C)

    HAYASHI Iwao, YOSHIDA Kazuhiro, IWATSUKI Nobuyuki, HAYASHI Teru

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    Grant amount:\1800000 ( Direct Cost: \1800000 )

    The fundamental output characteristics of a giant magnetostrictive alloy (abbreviates as GMA hereafter) element was experimentally investigated and the rotational performance of a rotating actuator for aerospace robotics was experimentally and theoretically investigated in this report.
    From the experiments on the output characteristics of the GMA element such as the static displacement characteristics, the frequency response and so on, the followings were found : (1) the maximum strain of the GMA element was smaller than or equal to 10^<-3>, and the amount is also smaller than the strain of piezoelectric ceramics, (2) since the material is metal, its Young modulus is twice larger than the piezoelectric ceramics, and large power is expected on the GMA element, (3) since driving coil is required, driving the GMA element is not effective ; hence the GMA element is appropriate for the field in which very small displacement is required to control as well as large power is required.
    Instead of the GMA element, a rotational actuator was made using piezoceramics and its fundamental output characteristics were experimentally and theoretically investigated. The results obtained are as follow : (1) the motor rotated at a speed which was determined theoretically from the rotational principle, the error of rotational speed was less than one percent, then the rotational principle of the rotational actuator is effective, (2) the output torque increased as the driving frequency increased, and it also increased after the driving frequency became higher than the resonance frequency of its driving unit up to its maximum driving frequency, (3) the motor kept its rotational speed even if its load was increased until it reached the maximum load.
    Summarizing these results, the rotational actuator proposed in this report had a useful and effective output characteristics for aerospace robotics.

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  • In-PiPe Mobile Micromachines Using Fluid Power

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    Grant type:Competitive

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  • Advanced Fluid Control Elements Using Functional Fluids

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    Grant type:Competitive

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  • High Output Micro Fluid Power Sources

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    Grant type:Competitive

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