Updated on 2025/08/08

写真a

 
SAITO SHIGEKI
 
Organization
School of Environment and Society Professor
Title
Professor
Homepage
http://www.ssrg.esd.titech.ac.jp/
Other name(s)
齊藤 滋規
Profile
1998年東京大学大学院工学系研究科修了．博士（工学） 取得 ．1999年東京工業大学助手，2004年同助教授（2007年准教授に呼称変更），2017年同教授（現職）．専門は，エンジニアリングデザイン，マイクロロボティクス．
External link

Degree

  • Master of Engineering ( The University of Tokyo )

  • Doctor of Engineering ( The University of Tokyo )

Research Interests

  • Engineering Design, Micro-robotics

  • ロボット工学

  • Design Thinking

  • Micro-robotics

  • Robotics

  • Engineering Design

Research Areas

  • Nanotechnology/Materials / Nano/micro-systems

  • Humanities & Social Sciences / Cognitive science

  • Humanities & Social Sciences / Educational technology

  • Humanities & Social Sciences / Design

  • Informatics / Mechanics and mechatronics

  • Informatics / Robotics and intelligent system

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Education

  • The University of Tokyo   The Graduate School of Engineering   Department of Advanced Interdisciplinary Studies

    - 1998

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    Country： Japan

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  • The University of Tokyo   Graduate School, Division of Engineering

    - 1993

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    Country： Japan

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Research History

  • Tokyo Institute of Technology   School of Environment and Society   Professor

    2017

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  • Tokyo Institute of Technology   School of Environment and Society   Associate Professor

    2016

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  • Tokyo Institute of Technology   Graduate School of Science and Engineering, Department of Mechanical and Aerospace Engineering   Associate Professor

    2007

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  • Tokyo Institute of Technology   Department of Mechanical and Aerospace Engineering   Associate Professor

    2004

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  • Tokyo Institute of Technology

    1999

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  • The University of Tokyo

    1999

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  • 日本学術振興会   特別研究員（PD）

    1998

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  • 日本学術振興会   特別研究員（DC）

    1997

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Professional Memberships

Papers

  • Gaps between reflection frameworks and students’ practice: implications for design education Reviewed

    Akira Ito, Yuki Taoka, Echo Wan, Malak Sadek, Celine Mougenot, Shigeki Saito

    Proceedings of the Design Society   4   2865 - 2874   2024.5

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    Authorship：Last author   Language：English   Publishing type：Research paper (international conference proceedings)   Publisher：Cambridge University Press (CUP)  

    Abstract

    This paper aims to identify gaps between the reflection frameworks and students’ practice. Through a systematic literature review (PRISMA) and a qualitative survey of students, 12 reflection frameworks were reviewed, and the 13 challenges students faced at design projects in two design schools were identified. The results indicate three gaps between theory and students’ practice: skills of designers, granularities of reflection items, and supports of bridging reflection to next actions. This study provides insights for future development of support tools to bridge the gaps in design education.

    DOI： 10.1017/pds.2024.290

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  • Designers’ perceptions of a sensor-enabled diary method for enhancing user research Reviewed

    Yuki Taoka, Tomoyuki Tanaka, Momoko Nakatani, Shigeki Saito

    Proceedings of the Design Society   2024.5

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    Authorship：Last author   Language：English   Publishing type：Research paper (international conference proceedings)  

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  • Co-design in virtual environments with 3D scanned childcare rooms in social virtual reality Reviewed

    Yuki Taoka, Momoko Nakatani, Takumi Sato, Kaho Kagohashi, Fuyumi Iwasawa, Shoichi Hasegawa, Shigeru Owada, Shigeki Saito

    Proceedings of the Design Society   2024.5

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    Authorship：Last author   Language：English   Publishing type：Research paper (international conference proceedings)  

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  • Electrostatic chuck having compliant multi-beam structures with rotatable bipolar pad-shaped electrodes Reviewed

    Yuki Taoka, Tomohiro Ryo, Sanchuan XU, Shigeki SAITO

    Engineering Research Express   Vol. 6 ( No. 1 )   015046(1) - 015046(13)   2024.1

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    Authorship：Last author   Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1088/2631-8695/ad1caf

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  • Enhanced attractive force via torsion spring as rotatable tip structure in beam-structure electrostatic chucks Reviewed

    Sanchuan Xu, Yuki Taoka, Shigeki Saito

    Results in Engineering   Vol. 24   103365(1) - 103365(11)   2024

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  • 双極型静電吸着デバイスの複曲面対応を目指したオーセティックパターンを用いた複曲面生成構造の開発

    吉本 純平, 齊藤 滋規, 田岡 祐樹

    精密工学会学術講演会講演論文集   2023A   17 - 18   2023.8

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    Language：Japanese   Publisher：公益社団法人 精密工学会  

    本研究では静電吸着デバイスの複曲面対応に向け、単純な入力により複曲面を生成するAuxeticパターンを用いた構造を提案する。具体的には負のポアソン比を生み出すAuxeticパターンの二重湾曲現象を利用することで内法が拡大しながら複曲面を生成する構造を作成しシミュレーションで評価した。この構造で静電吸着デバイスを複曲面対応させることにより、平面でピックアップした薄膜を複曲面上に貼付することが可能になると期待される。

    DOI： 10.11522/pscjspe.2023a.0_17

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  • Towards Co-design with Day Care Teachers Based on In-Situ Behavioral Data: A Case Study of a Workshop for Reflection Based on Video Recordings Reviewed

    Sawako Fujita, Yuki Taoka, Shigeru Owada, Momoko Nakatani, Shigeki Saito

    Lecture Notes in Computer Science   vol. 14034   2023.7

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    Authorship：Last author   Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1007/978-3-031-35705-3_19

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  • Influence of heat-induced changeable stiffness at the contact interface on the gripping force of a bipolar electrostatic chuck

    Gavriel Jeremy, Taoka Yuki, Saito Shigeki

    Proceedings of JSPE Semestrial Meeting   2023S   337 - 338   2023.3

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    Language：English   Publisher：The Japan Society for Precision Engineering  

    A bipolar electrostatic chuck is a gripping device suitable for handling thin and flexible objects such as semiconductor wafers, glass and polymer films. Existing studies mainly focused on increasing the gripping force, such as smoothening the contact surface of the device. However, handling methods that include not only grasping, but also releasing of objects have not been developed. This study verifies the effect of the changeable stiffness at the contact interface on the grasping and releasing of an object handled using a bipolar electrostatic chuck. For object handling, efficient grasping and releasing are two fundamental functions needed of any gripping device. To ensure a smooth pick-and-place process, a significant difference between the maximum (grasping) and minimum gripping force (releasing) is desired. Thus, this study proposes a bipolar electrostatic chuck with changeable stiffness at the contact surface. The bipolar electrodes act as heaters, allowing the stiffness of the surface to be controllable by adjusting their temperature. For grasping, by decreasing the stiffness, a closer contact with an object can be achieved and the chuck’s maximum gripping force can be increased. Furthermore, during releasing, the chuck is expected to detach away from the object easily.

    DOI： 10.11522/pscjspe.2023s.0_337

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  • Evaluation of Design and Conditions of Bipolar Electrostatic Chuck with a Compliant Beam-Array Assembly for Reliable Attachment/Detachment of Large-Area Thin Films onto Curved Surfaces

    Yoshida Shuhei, Taoka Yuki, Saito Shigeki

    Proceedings of JSPE Semestrial Meeting   2023S   333 - 334   2023.3

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    Language：Japanese   Publisher：The Japan Society for Precision Engineering  

    DOI： 10.11522/pscjspe.2023s.0_333

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  • 高分子薄膜の曲面自在貼付を可能にする帯状柔軟電極を有した双極型静電吸着デバイス

    江頭 正洋, 田岡 祐樹, 齊藤 滋規

    精密工学会学術講演会講演論文集   2023S   331 - 332   2023.3

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    Language：Japanese   Publisher：公益社団法人 精密工学会  

    本研究では、導電性エラストマー（TPU）を用いた帯状柔軟電極を有した双極型静電吸着デバイスを提案し、高分子薄膜の静電吸着による面接触把持と曲面自在貼付が可能であることを検証する。具体的には、高分子薄膜貼付け先としての曲面と帯状柔軟電極間の弾性接触による圧力分布の解析に基づく機構を設計・製作し、これを用いた高分子薄膜の平面把持及び曲面貼付実験における薄膜の力学状態の観察から提案機構の有効性を示す。

    DOI： 10.11522/pscjspe.2023s.0_331

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  • Micromanipulation based on capillary force using probes with hydrophilic and hydrophobic surfaces

    Suk So Yeon, Taoka Yuki, Saito Shigeki

    Proceedings of JSPE Semestrial Meeting   2023S   335 - 336   2023.3

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    Language：English   Publisher：The Japan Society for Precision Engineering  

    The capillary force micromanipulation technique is a method to manipulate objects by generating a liquid bridge between the surface of a probe and the surface of an object. This work aims to verify whether the capillary force between a flat object and a probe with coaxially aligned hydrophilic and hydrophobic surfaces can be controlled as desired to pick-and-place the object. Liquid is supplied to the surface of the probe with a built-in supply channel. The change of the liquid bridge’s profile is observed from the bottom and side of the object, which is then compared with the obtained capillary force-displacement data. The effectiveness of the proposed manipulation technique will be verified by interpreting the capillary phenomenon.

    DOI： 10.11522/pscjspe.2023s.0_335

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  • EVALUATION CRITERIA FOR NEEDS STATEMENTS IN DESIGN EDUCATION

    Akira Ito, Yuki Taoka, Shigeki Saito

    Proceedings of the International Conference on Engineering and Product Design Education, EPDE 2023   2023

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    Publishing type：Research paper (international conference proceedings)   Publisher：The Design Society  

    DOI： 10.35199/epde.2023.63

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  • VisRef: A Reflection Support System Using a Fixed-Point Camera and a Smartwatch for Childcare Fields

    Shigeru Owada, Sawako Fujita, Naho Tomiki, Masami Ogura, Yuki Taoka, Momoko Nakatani, Shigeki Saito

    2023

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  • Investigation of the Energy Efficiency of Electrohydrodynamic Drying under High Humidity Conditions

    Yuki Taoka, Shota Ai, Radon Dhelika, Shigeki Saito

    Journal of Engineering   2022.8

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1155/2022/8479212

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  • Development of bipolar electrostatic chucks with a compliant beam-array assembly from composite-laminated plates using abrasive water jet Reviewed

    Tomohiro Ryo, Yuki Taoka, Pasomphone Hemthavy, Kunio Takahashi, Shigeki Saito

    MRS Advances   2022.8

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1557/s43580-022-00329-9

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  • Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography Reviewed

    Yuki Taoka, Kohei Kawabata, Pasomphone Hemthavy, Seungman Choi, Kunio Takahashi, Shigeki Saito

    International Journal of Automation Technology   16 ( 4 )   471 - 477   2022.7

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.20965/ijat.2022.p0471

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  • Analysis Designers' Process of Insight Generation through Empathy with Users

    Akira Ito, Yuki Taoka, Shigeki Saito

    2022.5

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  • Enhancing the Quality of User Research Using Embedded IoT Sensors for Collecting Life Information

    Tomoyuki Tanaka, Yuki Taoka, Shigeki Saito

    2022.5

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  • Rotational-Degree-Of-Freedom Tip Structure Used in Collective Beam Structure Electrostatic Chuck for Curved Surfaces

    Xu Sanchuan, Taoka Yuki, Saito Shigeki

    Proceedings of JSPE Semestrial Meeting   2022S   780 - 781   2022.3

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    Language：English   Publisher：The Japan Society for Precision Engineering  

    The purpose of this study is to develop collective beam structure ESCs with elastic hinges as rotational-degree-of-freedom structure at the tip and to verify the influence of the structure while facing planar and curved surfaces. Electrostatic chucks (ESC) are devices used in wafer manipulation but can only deal with plain targets. Collective beam structure ESCs, although having the potential for dealing with curved surfaces, lack the compliance between tip and surface, resulting in poor performance. In this study, the elastic hinge is made from phosphor bronze and other structures are made by fused deposition modelling technology. The specification of the foot structure ESC is firstly determined through calculation. Then experiments are carried out at different positions on the plain and curved surfaces with collective beam structure ESCs with and without the hinge. The results of experiments are used to verify and analyze the influence of the elastic structure on the foot structure ESC while facing the planar and curved surfaces. In the end, the effect of elastic hinge is verified, and the results are expected to contribute to the development of foot structure ESC with higher performance facing different target surfaces.

    DOI： 10.11522/pscjspe.2022s.0_780

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  • Development of a capillary force manipulation technique using probes with hydrophilic and hydrophobic surfaces

    Treetavekul Wanwalee, Taoka Yuki, Saito Shigeki

    Proceedings of JSPE Semestrial Meeting   2022S   786 - 787   2022.3

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    Language：English   Publisher：The Japan Society for Precision Engineering  

    This study describes the development of a new probe that uses a combination of hydrophilic (acrylic) and hydrophobic (PTFE) surfaces to improve object micromanipulation based on capillary force. By using materials with different wettability for the inner and outer surfaces of the probe, the goal is to control the capillary force by only changing the volume of the droplet between the probe and the object. Therefore, the detachment of objects is more convenient as this new method eliminates the need to supply water below the object. Results show that the forces generated during the gripping and detaching process have a significant difference in magnitude. This new probe is highly applicable for stable micromanipulation without causing any damage to the object.

    DOI： 10.11522/pscjspe.2022s.0_786

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  • 微細毛静電チャックの表面柔軟性確保のためのシート状交互五層（導電層、絶縁層）高分子複合材料の開発

    駒田 ひろ, 田岡 祐樹, 宝田 亘, 齊藤 滋規

    精密工学会学術講演会講演論文集   2022S   777 - 778   2022.3

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    Language：Japanese   Publisher：公益社団法人 精密工学会  

    本研究の目的は、微細毛静電チャックの表面柔軟性保持のためのシート状交互五層（導電性・絶縁性）高分子複合材料を開発することである。導電性、絶縁性のシートを五層交互に重ね、複合材を作成した。その複合材を切断し、柔軟な梁構造を持つ微細毛静電チャックを実現した。また、それらを積層し、有効静電吸着面を大面積化した。微細毛静電チャックの性能評価は吸着力、導電・絶縁性能、表面柔軟性を計測することにより実施した。

    DOI： 10.11522/pscjspe.2022s.0_777

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  • 梁先端に回転自由度を有する微細毛双極型静電チャックの開発

    凌 智寛, 田岡 祐樹, 齊藤 滋規

    精密工学会学術講演会講演論文集   2022S   782 - 783   2022.3

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    Language：Japanese   Publisher：公益社団法人 精密工学会  

    本研究では、微細毛先端に回転自由度を有する微細毛双曲型静電チャックの開発を行った。三次元造形法にて作成した異なる回転自由度を持つデバイスの吸着力測定から、自由度の増加により吸着性能が飛躍的に向上することを示した。また自由度の最も高い球対偶を持つモデルを用いて、薄膜対象の把持離脱、曲面への貼り付けと曲面対象の把持実験を行うことで、従来のマニピュレーション手法に代わる新たな手法としての有用性を示した。

    DOI： 10.11522/pscjspe.2022s.0_782

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  • Development of a bipolar electrostatic chuck with a compliant beam-array assembly having four 3D-printed layers for large film handling Reviewed

    Yuki Taoka, Terumichi Hayashi, Pasomphone Hemthavy, Kunio Takahashi, Shigeki Saito

    ENGINEERING RESEARCH EXPRESS   4 ( 1 )   2022.3

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1088/2631-8695/ac4a49

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  • Impacts of disciplinary diversity on perceived interpersonal conflicts and creativity of design outcomes in a projectbased learning course of Design Thinking

    Yuki Taoka, Emi Fuse, Shigeki Saito

    2021.12

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  • USING LINKOGRAPHY TO VISUALISE THE INFLUENCE OF EDUCATIONAL BACKGROUNDS ON COLLABORATION AND CREATIVITY IN IDEA GENERATION

    Yuki Taoka, Haruhiko Mihono, Shigeki Saito

    DS 110: Proceedings of the 23rd International Conference on Engineering and Product Design Education (EPDE 2021)   2021.9

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  • HOW SHOULD DESIGNERS FORMULATE USERS'INSIGHT?-COMPARISON BETWEEN NOVICES AND PROFESSIONALS

    Yuki Taoka, Hisashiro Egashira, Shigeki Saito

    DS 110: Proceedings of the 23rd International Conference on Engineering and Product Design Education (E&PDE 2021)   2021.9

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  • Questionnaire-Based Investigation of Preferences in Idea Evaluation Depending on Educational Backgrounds

    Yuki Taoka, Yuya Suka, Yoshifumi Nishida, Shigeki Saito

    Smart Innovation, Systems and Technologies   223   17 - 27   2021

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    Language：English   Publishing type：Research paper (international conference proceedings)   Publisher：Springer Science and Business Media Deutschland GmbH  

    DOI： 10.1007/978-981-16-0084-5_2

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  • Adhesional rolling behavior of micro-cylinder: Experimental observation of adhesional contacts and measurement of critical rolling resistance Reviewed

    Yuki Taoka, Taihei Watanabe, Yoji Iguchi, Pasomphone Hemthavy, Kunio Takahashi, Shigeki Saito

    Journal of Physics Communications   4 ( 12 )   1 - 10   2020.12

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1088/2399-6528/abce9b

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  • Compliant bipolar electrostatic gripper using 3D-printed-layered elastic probes

    Pasomphone Hemthavy, Kenta Kudo, Kento Kawano, Kunio Takahashi, Shigeki Saito

    Engineering Research Express   Volume 2 ( Number 1 )   2020.1

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1088/2631-8695/ab67ed

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  • Adhesional Contact between Rigid Sphere and Elastic Plane Covered with Thin Liquid Film Considering Contact-Angle Hysteresis

    Yoji Iguchi, Dooyoung Baek, Satoshi Momozono, Pasomphone Hemthavy, Shigeki Saito, Kunio Takahashi

    Tribology Online   15 ( 1 )   2020.1

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  • Proposal and applicability of a method to evaluate surface tension of liquid using large volume sessile drop in gravity Reviewed

    TAKAHASHI Kunio, IGUCHI Yoji, HAMADA Keiichiro, HEMTHAVY Pasomphone, SAITO Shigeki

    QUARTERLY JOURNAL OF THE JAPAN WELDING SOCIETY   38 ( 3 )   193 - 198   2020

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    Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：JAPAN WELDING SOCIETY  

    Based on a theory of sessile drop in gravity, a method to evaluate surface tension is proposed, and its applicability is discussed. All of parameters are theoretically normalized. Although it is impossible to obtain analytic solution of the surface profile of the sessile drop, it is possible in an extreme condition of large volume. A universal parameter which determine the volume of liquid is derived in a normalized form. The large volume condition is theoretically defined using the parameter. Under the large volume approximation, an equation is derived which gives the surface tension from a height and an angle of the drop surface. In order to discuss applicability of the approximation, numerical calculation is carried out. It is found that the surface tension can be obtained with a tolerance less than 16%, if we measure the height of the sessile drop and the contact angle, under the large volume approximation. This method proposed in the present study is beneficial for the estimation of wettability of liquid using sessile drop.

    DOI： 10.2207/qjjws.38.193

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  • Analytical solution of elastic deformations inside and outside circular contact area between tilted rigid punch and elastic half space

    Yoji Iguchi, Pasomphone Hemthavy, Shigeki Saito, Kunio Takahashi

    Acta Mechanica   230 ( 12 )   4311 - 4320   2019.12

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    Language：English   Publishing type：Research paper (scientific journal)   Publisher：Springer-Verlag Wien  

    DOI： 10.1007/s00707-019-02505-9

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  • Force evaluation of electrostatic gripper with arrayed fibers consisting of parallel and coaxial electrodes

    Shigeki Saito, Kazuteru Kawamura, Radon Dhelika, Pasomphone Hemthavy, Kunio Takahashi, Wataru Takarada, Takeshi Kikutani

    Smart Materials and Structures   28 ( 9 )   2019.8

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    Language：English   Publishing type：Research paper (scientific journal)   Publisher：Institute of Physics Publishing  

    DOI： 10.1088/1361-665X/ab3243

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  • A Proposal and Evaluation of Co-design Tools with a Focus on Anonymity Reviewed

    Yuki Taoka, Kaho Kagohashi, Shigeki Saito, Celine Mougenot

    INTERNATIONAL JOURNAL OF AFFECTIVE ENGINEERING   18 ( 2 )   85 - 92   2019.3

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.5057/ijae.IJAE-D-18-00009

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  • Doll based design tool in corporate contexts: A qualitative comparison with storyboard in a new product development project

    Kaho Kagohashi, Yuki Taoka, Takehiko Ohno, Nana Hamaguchi, Xinlei Chen, Kenta Amano, Shigeki Saito

    Proceedings of the International Conference on Engineering Design, ICED   2019-   1473 - 1482   2019

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    Language：English   Publishing type：Research paper (international conference proceedings)   Publisher：Cambridge University Press  

    DOI： 10.1017/dsi.2019.153

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  • Development of a Bipolar Electrostatic Chuck Module having a Beam-array Assembly using a Multiple-Etching Process Reviewed

    Seungman Choi, Kazuki Wakabayashi, KUNIO TAKAHASHI, Shigeki SAITO

    Journal of Micromechanics and Microengineering   2018.10

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  • Humidity dependence of electrostatic pick-and-place operation of a micro dielectric particle considering surface conductivity and capillary condensation Reviewed

    Ryo Fujiwara, Yoji Iguchi, KUNIO TAKAHASHI, Shigeki SAITO

    Journal of Applied Physics   Vol. 124 ( No. 6 )   pp. 064303   2018.8

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  • Estimating work of adhesion using spherical contact between a glass lens and a PDMS block Reviewed

    Dooyoung Baek, Shigeki Saito, Kunio Takahashi

    Journal of Adhesion Science and Technology   32 ( 2 )   158 - 172   2018.1

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    Language：English   Publishing type：Research paper (scientific journal)   Publisher：Taylor and Francis Ltd.  

    DOI： 10.1080/01694243.2017.1343519

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  • Estimating work of adhesion using spherical contact between a glass lens and a PDMS block Reviewed

    Dooyoung Baek, Shigeki Saito, Kunio Takahashi

    Journal of Adhesion Science and Technology   32 ( 2 )   158 - 172   2018.1

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    Language：English   Publishing type：Research paper (scientific journal)   Publisher：Taylor and Francis Ltd.  

    DOI： 10.1080/01694243.2017.1343519

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  • 異分野協創エンジニアリングデザインプロジェクトにおける教育効果と実施課題 Reviewed

    齋藤滋規

    工学教育   65 ( 4 )   4_57 - 4_62   2017.8

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    Language：Japanese   Publisher：工学教育  

    This article reports the case of Engineering Design Project since 2015 at Tokyo Institute of Technology as a new challenge of long-term Project-Based-Learning (PBL) for radical collaboration among people having different expertise and/or backgrounds via “Design Thinking” approach. Regarding the Engineering Design Project, the author describes the detail of educational effectiveness and implementation challenge which the teaching team, the author and the colleagues, recognize from the experiences of interaction with students including people from industries. On the basis of these lessons, the author suggests the desired direction of PBL program design for future higher education of engineering students.

    DOI： 10.4307/jsee.65.4_57

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  • 微細毛構造による表面柔軟性を持つ静電チャック Invited Reviewed

    齋藤滋規

    静電気学会誌   41 ( 3 )   134 - 138   2017.5

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    Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：一般社団法人静電気学会  

    CiNii Books

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  • Evaluation of energy dissipation involving adhesion hysteresis in spherical contact between a glass lens and a PDMS block Reviewed

    Dooyoung Baek, Pasomphone Hemthavy, Shigeki Saito, Kunio Takahashi

    Applied Adhesion Science   5 ( 4 )   1 - 11   2017.2

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    Language：English   Publishing type：Research paper (scientific journal)   Publisher：Springer International Publishing  

    DOI： 10.1186/s40563-017-0082-z

    Scopus

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    Other Link： http://orcid.org/0000-0001-5663-975X

  • Experiment on change in contact area by passage of current through electric contact of MEMS

    WAKABAYASHI Kazuki, HEMTHAVY Pasomphone, SAITO Shigeki, TAKAHASHI Kunioi

    The Proceedings of the Symposium on Micro-Nano Science and Technology   2017

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    Publishing type：Research paper (scientific journal)  

    DOI： 10.1299/jsmemnm.2017.8.pn-71

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  • Rolling behavior of a micro-cylinder in adhesional contact Reviewed

    Shigeki Saito, Toshihiro Ochiai, Fumikazu Yoshizawa, Ming Dao

    SCIENTIFIC REPORTS   6 ( No. 34063 )   pp. 1 - 12   2016.9

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1038/srep34063

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  • 理工系大学の授業革新 Invited Reviewed

    齋藤滋規

    IDE:現代の高等教育   ( 582 )   31 - 35   2016.7

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    Language：Japanese   Publisher：IDE大学協会  

    CiNii Books

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  • The effect of surface conductivity and adhesivity on the electrostatic manipulation condition for dielectric microparticles using a single probe Reviewed

    Ryo Fujiwara, Pasomphone Hemthavy, Kunio Takahashi, Shigeki Saito

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   26 ( 5 )   pp. 055010(1 - 10)   2016.5

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1088/0960-1317/26/5/055010

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  • Compliant bipolar electrostatic gripper with micropillar electrodes array for manipulation at macroscale Reviewed

    Radon Dhelika, Pasomphone Hemthavy, Kunio Takahashi, Shigeki Saito

    Smart Materials and Structures   25 ( 5 )   pp. 055037(1 - 10)   2016.4

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    Language：English   Publishing type：Research paper (scientific journal)   Publisher：Institute of Physics Publishing  

    DOI： 10.1088/0964-1726/25/5/055037

    Scopus

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  • Temperature distribution change by constriction of electric current for resistance welding Reviewed

    K. Wakabayashi, P. Hemthavy, Shigeki SAITO, KUNIO TAKAHASHI

    2016

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  • Time to melting and energy consumption of resistance spot welding Reviewed

    K. Wakabayashi, P. Hemthavy, S.Saito, K. Takahashi

    2016

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  • Flexibility and Poisson effect on detachment of gecko-inspired adhesives Reviewed

    Y. Sekiguchi, S. Saito, K. Takahashi, C. Sato

    INTERNATIONAL JOURNAL OF ADHESION AND ADHESIVES   62   55 - 62   2015.10

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1016/j.ijadhadh.2015.06.011

    Web of Science

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  • Pulse voltage determination for electrostatic micro manipulation considering surface conductivity and adhesion of glass particle Reviewed

    Ryo Fujiwara, Pasomphone Hemthavy, Kunio Takahashi, Shigeki Saito

    AIP ADVANCES   5 ( 5 )   pp. 057126(1 - 12)   2015.5

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1063/1.4921090

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  • Change in temperature distribution by constriction of electric current through contact area Reviewed

    K. Wakabayashi, P. Hemthavy, S. Saito, K. Takahashi

    SCIENCE AND TECHNOLOGY OF WELDING AND JOINING   20 ( 4 )   337 - 344   2015.5

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1179/1362171815Y.0000000014

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  • Compliant electrostatic chuck based on hairy microstructure (vol 22, 015019, 2013) Reviewed

    Shigeki Saito, Takeshi Kikutani, Kunio Takahashi, Wataru Takarada, Fumiaki Soda, Kenji Sawai, Radon Dhelika

    SMART MATERIALS AND STRUCTURES   23 ( 7 )   2014.7

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    Web of Science

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  • Experiments of the adhesion behavior between an elastic beam and a substrate Reviewed

    Y. Sekiguchi, P. Hemthavy, S. Saito, K. Takahashi

    INTERNATIONAL JOURNAL OF ADHESION AND ADHESIVES   49   1 - 6   2014.3

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1016/j.ijadhadh.2013.12.005

    Web of Science

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    Other Link： http://orcid.org/0000-0001-5663-975X

  • Theoretical Analysis of Transient State of Temperature Distribution by Point Contact Current Reviewed

    K. Wakabayashi, P. Hemthavy, S.Saito, K. Takahashi

    2014

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  • Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces Reviewed

    Radon Dhelika, Kenji Sawai, Kunio Takahashi, Wataru Takarada, Takeshi Kikutani, Shigeki Saito

    Smart Materials and Structures   22 ( 9 )   pp. 9   2013.9

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1088/0964-1726/22/9/095010

    Scopus

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    Other Link： http://orcid.org/0000-0001-5663-975X

  • Compliant electrostatic chuck based on hairy microstructure Reviewed

    Shigeki Saito, Fumiaki Soda, Radon Dhelika, Kunio Takahashi, Wataru Takarada, Takeshi Kikutani

    SMART MATERIALS AND STRUCTURES   22 ( 1 )   pp. 015019(1 - 6)   2013.1

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1088/0964-1726/22/1/015019

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  • Temperature Distribution Change by Point Contact Current Reviewed

    K. Wakabayashi, P. Hemthavy, S.Saito, K. Takahashi

    2013

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  • Effect of elastic modulus on adhesion contact between an elastic body and a rigid body with surface roughness and a defect Reviewed

    Yu Sekiguchi, PASOMPHONE HEMTHAVY, Shigeki SAITO, KUNIO TAKAHASHI

    2012.9

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    Separation stress of adhered surfaces between an elastic body and a rigid body is expressed as a function of the elastic modulus when surface roughness and defects exist on the surface of the rigid body. The change of the separation stress against the elastic modulus is important because the elastic modulus may vary with the temperature or other effects after the bodies are adhered together. Therefore, the condition of the increase and decrease of the separation stress is clarified considering the relation among the elastic modulus, the amplitude of the surface roughness and the defect size.

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    Other Link： http://orcid.org/0000-0001-5663-975X

  • Electrostatic deposition of a micro solder particle using a single probe by applying a single rectangular pulse Reviewed

    Daizo Nakabayashi, Kenji Sawai, Kunio Takahashi, Shigeki Saito

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   22 ( 8 )   pp. 085003(1 - 9)   2012.8

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1088/0960-1317/22/8/085003

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  • Kinematic Analysis of Micro-object Operation under SEM Considering the Adhesive Effect. Reviewed

    Shigeki Saito, Hideki T. Miyazaki, Tomomasa Sato, Kunio Takahashi

    Journal of the Robotics Society of Japan   20 ( 3 )   324 - 334   2012.2

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    Language：Japanese   Publishing type：Research paper (scientific journal)   Publisher：The Robotics Society of Japan  

    Recently, techniques of arranging micrometer-sized objects with high repeatability under a scanning electron microscope (SEM) are required to construct micro-devices. Since micro-objects tend to adhere to other objects mainly by electrostatic force, manipulation techniques by adhesive force are often taken in basic researches in which micro-objects are studied. These techniques, however, still do not achieve the desired repeatability under the real condition because many of these are used just for the empirical effectiveness and some even include the trial-and-error ways. Thus, in this paper, we analyzed micro-object operation theoretically by considering adhesion and rolling-resistance factor in the kinematic system consisting of a sphere, a needle-shaped tool, and a substrate. In this analysis, we clarified that it is possible to control the fracture of the contact interfaces of the system by determining the tool-loading angle reasonably. Based on the analysis, we also proposed the reasonable way of pick and place operation of a micro-sphere under an SEM.

    DOI： 10.7210/jrsj.20.324

    CiNii Books

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    Other Link： https://jlc.jst.go.jp/DN/JALC/00156406343?from=CiNii

  • Time dependence of adhesion contact between a rigid sphere and an elastic body Reviewed

    Pasomphone Hemthavy, Mohd Fahmi Bin Samir, Shigeki Saito, Kunio Takahashi

    INTERNATIONAL SYMPOSIUM ON MATERIALS SCIENCE AND INNOVATION FOR SUSTAINABLE SOCIETY: ECO-MATERIALS AND ECO-INNOVATION FOR GLOBAL SUSTAINABILITY (ECO-MATES 2011)   379 ( No. )   pp. 1 - 7   2012

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    Language：English   Publishing type：Research paper (international conference proceedings)  

    DOI： 10.1088/1742-6596/379/1/012042

    Web of Science

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    Other Link： http://orcid.org/0000-0001-5663-975X

  • Separation mechanisms of reversible adhesive joining using an elastic body with variable elastic modulus Reviewed

    Y. Sekiguchi, P. Hemthavy, S. Saito, K. Takahashi

    INTERNATIONAL SYMPOSIUM ON MATERIALS SCIENCE AND INNOVATION FOR SUSTAINABLE SOCIETY: ECO-MATERIALS AND ECO-INNOVATION FOR GLOBAL SUSTAINABILITY (ECO-MATES 2011)   379 ( No. )   012041   2012

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    Language：English   Publishing type：Research paper (international conference proceedings)  

    DOI： 10.1088/1742-6596/379/1/012041

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  • Adhesion between side surface of an elastic beam and flat surface of a rigid body Reviewed

    Y. Sekiguchi, P. Hemthavy, S. Saito, K. Takahashi

    JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY   26 ( 23 )   2615 - 2626   2012

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1080/01694243.2012.691034

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    Other Link： http://orcid.org/0000-0001-5663-975X

  • Electrostatic Chuck Consisting of Electrostatic Inductive Polymer Fibers for Handling of Curved Surface Reviewed

    Kenji SAWAI, wataru takarada, TAKESHI KIKUTANI, KUNIO TAKAHASHI, Shigeki SAITO

    Abstracts   V17.41   2011.11

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  • Deposition of Liquid in Desired Micro-pattern on a Surface Using Vapor-droplet Phase Transition for Mass Alignment of Micro-parts Reviewed

    Takashi Okamoto, Keita Nakajoh, Shigeki SAITO

    Abstracts   S13.5   2010.11

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  • Electrostatic micromanipulation of a conductive particle by a single probe with consideration of an error in the evaluated mass Reviewed

    Kenji Sawai, Shigeki Saito

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   20 ( 2 )   pp. 025022(7pp)   2010.2

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    Language：English   Publishing type：Research paper (scientific journal)  

    DOI： 10.1088/0960-1317/20/2/025022

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MISC

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Presentations

  • Experiment of A Prototype of Quick Grip-release Mechanism Using Multi-beam Structure

    16th Symposium on "Microjoining and Assembly Technology in Electronics" (mate 2010)  2010 

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  • 梁集合体による把持と脱離機構の試作

    第16回エレクトロニクスにおけるマイクロ接合・実装技術シンポジウム  2010 

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Research Projects

  • 親疎水面塗分けパターンに基づく微小液架橋配列を用いた大面積対象物の把持・離脱機構

    Grant number：20K20981  2020.7 - 2023.3

    日本学術振興会  科学研究費助成事業  挑戦的研究(萌芽)

    齋藤 滋規, 田岡 祐樹

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    Grant amount：\6500000 （ Direct Cost: \5000000 、 Indirect Cost：\1500000 ）

    本研究の目的は，「親水・疎水塗り分けを施したプローブ」によって液架橋力を制御することで，従来手法では困難であった「大面積かつ繊細（≒疵付きやすい）平板状物体」の自在ハンドリングを可能とすることである．具体的には，平板間に生じる液架橋力の原理を解明し，吸着面への液体供給ノズルの多数配列と親疎水塗分けにより『大面積対象物の液架橋力マニピュレーション』を可能にする知識の獲得を行う．
    2021年度は，「親水・疎水塗分けを実施したプローブの設計・試作・性能評価」を行った．前者は，疎水部と親水部で異なる材料を用いたプローブを試作し．水分量を変化させることによる液架橋力の変化量を計測することで，性能評価を行った．特に，疏水部を内側にもつプローブと外側にもつプローブの2種類を作成し評価した．これにより，今後の研究プロジェクトを推進するために，2種類の塗り分けを継続的に評価する必要が明らかになり，塗り分け方法の指針・液滴制御の指針を得た．

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  • 薄膜状電子デバイスの複曲面上実装を実現する微細毛柔軟静電吸着ハンドリングシステム

    Grant number：20H02112  2020.4 - 2024.3

    日本学術振興会  科学研究費助成事業  基盤研究(B)

    齋藤 滋規, 武田 行生, 宝田 亘, 田岡 祐樹

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    Grant amount：\17550000 （ Direct Cost: \13500000 、 Indirect Cost：\4050000 ）

    本研究の目的は，薄膜状対象物を自在に吸着・離脱可能にする『微細毛柔軟静電吸着ハンドリングシステム』を創製し，従来，取り扱いが困難だった薄膜状対象物の自在ハンドリングを可能にすることにある．具体的には，『微細毛柔軟静電吸着モジュール積層デバイス』および『各デバイスを連結し曲面に対応させる劣駆動閉リンク機構』を実現し，システムを統合・制御することで，フィルム状／シート状の対象物に対して「確実な吸着」と「容易な離脱」の両立を可能にする技術体系を確立することである．
    2020年度は，「双極型『ヤモリ型静電チャック』モジュール積層化によるデバイスの大面積化」のための「微細毛柔軟静電吸着デバイス（改良型）の設計・製作・評価」，「フィルム状対象物の表面物性と静電吸着力との関係解明」，「劣駆動閉リンク機構による大面積フィルムハンドリングシステムの開発」を行った．デバイスの試作は，改善したモジュール形状の３Dプリンターによる試作によって，フィルム状対象物の表面物性は，四端子法による表面抵抗率の計測と吸着力の関係解明によって，「劣駆動リンク」に関しては，計算解析と３Dプリンターによる試作品の評価により，研究プロジェクト遂行のための指針を得た．

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  • Innovation in manufacturing technology using electrostatic adsorption devices with surface flexibility derived from fine hair structure

    Grant number：16H04297  2016.4 - 2020.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (B)

    Shigeki Saito

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    Authorship：Principal investigator  Grant type：Competitive

    In this study, we have created a "micro-electrostatic electrostatic chuck device" that can attract /grasp and detach an object by electrostatic force, inspired by the micro-hair structure of the gecko fingertip. As a result, we have developed a technology that enables handling/manipulating of objects that was difficult in the past. Specifically, we have synthesized a large-area device that is fabricated by stacking electrostatic chuck modules with fine hairs having a conductive core, and proposed a mass-production method that can be reliable with a view to industrialization. The proposed technology of manipulation system that can easily grasp and release an object such as fragile minute parts, metal foil, paper, plastic film, cloth, and others could become the fundamental key technology of for the future dexterous manipulation.

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  • Criterion of an inspired device for gripping and releasing

    Grant number：15K06458  2015.4 - 2018.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (C)

    TAKAHASHI Kunio

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    Grant amount：\4420000 （ Direct Cost: \3400000 、 Indirect Cost：\1020000 ）

    A grip-and-release mechanism of a beam structure has been investigated, which is used by geckos, insects, etc… to make a quick step on walls and ceilings with surface roughness. The beam is modeled as an elastic beam which has a root angle. The adhesion gripping force is theoretically investigate and compared with experiments. The grip-and-release devices with the multi-beam structure are made in the several ways. One of the ways is the stack of the comb structure. The device with small size of the beam can be successfully made and its performance is investigated as the grip-and-release device.

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  • 静電誘導ファイバー高度集積化によるヤモリ型静電チャック創製と物体操作技術への展開

    2013.4 - 2017.3

    日本学術振興会  科学研究費補助金（基盤研究B） 

    齋藤 滋規

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    Authorship：Principal investigator  Grant type：Competitive

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  • 導電コア高分子ファイバーによる同時多極マイクロ導通センシングデバイス

    2012.4 - 2016.3

    日本学術振興会  科学研究費補助金（挑戦的萌芽研究） 

    齋藤 滋規

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    Authorship：Principal investigator  Grant type：Competitive

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  • Exact Reversibility of Joint for grip-and-release mechanism based on gecko' foot hair structure

    Grant number：24560875  2012.4 - 2015.3

    Japan Society for the Promotion of Science  Grants-in-Aid for Scientific Research  Grant-in-Aid for Scientific Research (C)

    TAKAHASHI Kunio, SAITO Shigeki, HEMTHAVY Pasomphone

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    Grant amount：\5460000 （ Direct Cost: \4200000 、 Indirect Cost：\1260000 ）

    A feasibility of grip-and-release mechanism of a beam structure under the presence of adhesion has been studied. This study is inspired by the functional foot hairs of gecko which enable them to walk quickly on walls and ceilings with surface roughness.
    The gripping (adhesion) force of a single beam, when a constantly inclined angle is given, is theoretically and experimentally investigated. By integrating the single beams, a one-directional multi-beam structure has been fabricated in order to investigate the release (fracture) criterion experimentally. The study has also clarified theoretically that the multi-beam structure using tapered beams can absorb higher surface roughness, compared to that of uniform beams.

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  • ヤモリに学ぶ静電誘導ファイバー植毛による凝着・離脱デバイス

    2010.4 - 2013.3

    日本学術振興会  科学研究費補助金（基盤研究B） 

    齋藤 滋規

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    Authorship：Principal investigator  Grant type：Competitive

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  • 導電性芯を持つ高分子繊維集積化による生体模倣型凝着デバイスの実現

    2008.4 - 2011.3

    日本学術振興会  科学研究費補助金（挑戦的萌芽研究） 

    齋藤 滋規

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    Authorship：Principal investigator  Grant type：Competitive

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