Updated on 2026/04/28

写真a

 
NAKAGAWA SHIGEKI
 
Organization
Office of Research and Innovation Specially Appointed Professor
Title
Specially Appointed Professor
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News & Topics

Degree

  • Master of Engineering ( Kanazawa University )

  • Doctor of Engineering ( Tokyo Institute of Technology )

Research Areas

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Electric and electronic materials  / 磁気記録技術,スピントロニクスデバイス,磁性薄膜デバイス,パワーエレクトロニクス

  • Nanotechnology/Materials / Thin film/surface and interfacial physical properties  / 磁性薄膜,スピントロニクス,磁気メモリ,磁気記録

Education

  • Tokyo Institute of Technology

    1993.6

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  • Kanazawa University

    1983.4 - 1985.3

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    Country: Japan

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  • Kanazawa University   Faculty of Engineering

    1979.4 - 1983.3

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    Country: Japan

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Research History

  • 東京科学大学 工学院   教授

    2024.10

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    Country:Japan

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  • 東京工業大学附属科学技術高校   校長

    2020.4 - 2025.3

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    Country:Japan

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  • 東京工業大学 工学院   教授

    2016.4 - 2024.9

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  • 東京工業大学 大学院理工学研究科   教授

    2011.4 - 2016.3

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    Country:Japan

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  • 東京工業大学 大学院理工学研究科   准教授

    2007.4 - 2011.3

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    Country:Japan

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  • 東京工業大学 工学部 助教授

    1995.4 - 2007.3

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  • 米国ミネソタ大学 客員研究員   文部省在外研究員

    1994.10 - 1995.3

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    Country:United States

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  • 東京工業大学 工学部 助手

    1985.4 - 1995.3

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Professional Memberships

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Committee Memberships

  • IEEE Magnetics Society   Administrative Committee (AdCom) Member  

    2021 - 2023   

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    Committee type:Academic society

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  • 日本磁気学会   企画理事  

    2019 - 2020   

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    Committee type:Academic society

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  • 電気学会   「電気の礎」 顕彰選考小委員会 委員  

    2016 - 2025   

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    Committee type:Academic society

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  • IEEE Magnetics Society   Education Comittee Member  

    2013 - 2014   

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    Committee type:Academic society

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  • 日本磁気学会   編集委員 、総務幹事  

    2011 - 2013   

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  • IEEE Magnetics Society Japan Chapter, Tokyo Chapter   Chair  

    2011 - 2012   

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    Committee type:Academic society

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  • 電子情報通信学会   磁気記録情報ストレージ専門委員会 委員長  

    2008.4 - 2010.3   

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    Committee type:Academic society

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  • 日本磁気学会   広報理事  

    2007 - 2011   

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    Committee type:Academic society

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  • 日本応用磁気学会   広報理事  

    2005 - 2007   

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    Committee type:Academic society

    日本応用磁気学会

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  • 電子情報通信学会   エレクトロニクスソサイエティ大会 委員長, 幹事  

    2005 - 2006   

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    Committee type:Academic society

    電子情報通信学会

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  • 電気学会   ナノスケール磁性体の高機能化・新物性調査専門委員会, 光・熱・電気との相互作用を活用した高機能磁気デバイス技術調査専門委員会等  

    2004   

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    Committee type:Academic society

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  • 表面技術協会   学術専門委員  

    1998   

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    Committee type:Academic society

    表面技術協会

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  • 真空協会   スパッタリングおよびプラズマプロセス技術部会  

    1995   

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    Committee type:Academic society

    真空協会

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  • 財団法人 加藤科学振興会   評議員  

       

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    Committee type:Other

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  • 財団法人 加藤科学振興会   理事  

       

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    Committee type:Other

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  • 電子情報通信学会   EICE Electronics Express(ELEX)編集委員(磁気記録分野)  

       

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  • 日本MRS   理事 MRS-Jニュース編集委員長  

       

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  • 紛体粉末冶金協会   磁性材料分科会ならびにフェライト委員会主査、評議員、理事  

       

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Papers

  • Comprehensive Demonstration Of New Magnetic Designs Utilizing Magnetic Anisotropy Of The Cores For Integrated Magnetics Reviewed

    Y. Takamura, H. Nitta, T. Miyazaki, K. Yamanaka, R. Ishido, A. Namba, K. Fujisaki, S. Nakagawa

    IEEE APEC 2025   1797 - 1802   2025.3

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  • Wide-field imaging of the magnetization process in soft magnetic-thin film using diamond quantum sensors

    Ryota Kitagawa, Teruo Kohashi, Takeyuki Tsuji, Shunsuke Nagata, Aoi Nakatsuka, Honami Nitta, Yota Takamura, Shigeki Nakagawa, Takayuki Iwasaki, Mutsuko Hatano

    Applied Physics Express   17   2023.12

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.35848/1882-0786/ad1002

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  • Fabrication of CoFeB–SiO2 Films With Large Uniaxial Anisotropy by Facing Target Sputtering and its Application to High-Frequency Planar-Type Spiral Inductors

    Yota Takamura, Honami Nitta, Kazuma Kawahara, Tadayuki Kaneko, Ryosuke Ishido, Tatsuya Miyazaki, Naoki Hosoda, Keisuke Fujisaki, Shigeki Nakagawa

    IEEE Transactions on Magnetics   2023.11

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    Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TMAG.2023.3291879

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  • Fabrication and Characterization CoZrO Films Deposited by Facing Targets Reactive Sputtering for Micromagnetic Inductors

    H. Nitta, Y. Takamura, T. Kaneko, S. Nakagawa

    IEEE Magn. Lett.   vol. 14   2023.9

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    DOI: 10.1109/LMAG.2023.3320495

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  • Development of Ultra-Thin CoPt Films With Electrodeposition for 3-D Domain Wall Motion Memory

    T. Huang, Y. Takamura, M. Saito, Md. M. Hasan, S. Kasai, Y. Sonobe, S. Nakagawa

    IEEE Transactions on Magnetics   Vol. 59 ( Issue 11 )   2023.7

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    DOI: 10.1109/TMAG.2023.3298911

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  • Pressure Sensor Using a Hybrid Structure of a Magnetostrictive Layer and Nitrogen-Vacancy Centers in Diamond

    R. Kitagawa, S. Nagata, K. Arai, K. Mizuno, T. Tsuji, I. Fujisaki, S. Urashita, T. Kohashi, Y. Takamura, T. Iwasaki, S. Nakagawa, M. Hatano

    Phys. Rev. Appl.   Vol. 19 ( Issue 4 )   2023.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1103/PhysRevApplied.19.044089

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  • Investigation of perpendicular magnetic anisotropy in Pd/Co2FeSi/MgO structures with evaluations of magnetic property, crystal structure, and elemental mapping

    E. Matsushita, Y. Takamura, S. Nakagawa

    J. Magn. Magn. Mater.   Vol. 562   2022.11

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    DOI: 10.1016/j.jmmm.2022.169796

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  • Spin-orbit torque magnetization switching in a perpendicularly magnetized full Heusler alloy Co2FeSi

    M. Jiang, E. Matsushita, Y. Takamura, Le Duc Anh, S. Nakagawa, S. Ohya, M. Tanaka

    AIP Adv.   vol. 11 ( No. 11 )   2021.11

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    DOI: 10.1063/5.0062666

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  • Perpendicular Magnetic Anisotropy in Full-Heusler Co2FeSi Alloy and MgO Bilayers

    Y. Takamura, Y. Stutler, E. Matsushita, K. Shinohara, T. Suzuki, S. Nakagawa

    J. Magn. Soc. Jpn.   Vol. 43 ( No. 6 )   2019.11

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    DOI: 10.3379/msjmag.1911R004

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  • eラーニングを活用した工学系専門科目の理解度向上 -東京工業大学電気電子系-

    千葉 明, 安岡 康一, 中川 茂樹, 赤塚 洋, 西方 敦博, 萩原 誠, 渡辺 正裕, 竹内 希, 全 俊豪, 時岡 えい

    工学教育   Vol. 66 ( No. 5 )   2018.10

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  • Methods to induce perpendicular magnetic anisotropy in full-Heusler Co2FeSi thin layers in a magnetic tunnel junction structure Reviewed

    K. Shinohara, T. Suzuki, Y. Takamura, S. Nakagawa

    AIP Adv.   Volume 8 ( No. 5 )   055923/1-5   2018.1

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    DOI: 10.1063/1.5007436

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  • Magnetic field-mediated two magnetic states in BiFeO3/CoPt layered structures

    Yue Wang, Takashi Harumoto, Jian Wang, Eiji Suzuki, Katsuyuki Nakada, Yoshio Nakamura, Shigeki Nakagawa, Ji Shi

    Journal of Magnetism and Magnetic Materials   Vol. 453   2018.1

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    DOI: 10.1016/j.jmmm.2018.01.028

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  • Self-Holding Magneto-Optical Switch Integrated with Thin-Film Magnet

    K. Okazeri, K. Muraoka, Y. Shoji, S. Nakagawa, N. Nishiyama, S. Arai, T. Mizumoto

    IEEE Photonics Technol. Lett.   vol. 30 ( no. 4 )   2018.1

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    DOI: 10.1109/LPT.2018.2791924

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  • Epitaxial growth of BiFeO3 films on TiN under layers by sputtering deposition Reviewed

    Yue Wang, Tianjun Li, Jian Wang, Takashi Harumoto, Tingting Jia, Hideo Kimura, Katsuyuki Nakada, Shigeki Nakagawa, Yoshio Nakamura, Ji Shi

    AIP Advances   Vol. 7 ( 055815 )   2017.1

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    DOI: 10.1063/1.4974888

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  • Manipulation of the magnetic properties of Co- and Fe-doped layered titanates by alkyl ammonium intercalation

    F. Kishimoto, Y. Takamura, S. Nakagawa, Y. Wada

    Adv. Mater. Interfaces   Vol. 3 ( 23 )   2016.12

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    DOI: 10.1002/admi.201600509

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  • Inverse-magnetostriction-induced switching current reduction of STT-MTJs and its application for low-voltage MRAM

    Y. Takamura, Y. Shuto, S. Yamamoto, H. Funakubo, M. Kurosawa, S. Nakagawa, S. Sugahara

    Solid-State Electron.   vol. 128 ( no. Supplement C )   2016.10

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    DOI: 10.1016/j.sse.2016.10.007

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  • Operation of [Co/Pd] Nanowire Sequential Memory utilizing Bit-shift of Current-driven Magnetic Domains Recorded and Reproduced by Magnetic Head Reviewed

    M. Okuda, Y. Miyamoto, M. Kawana, E. Miyashita, N. Saito, S. Nakagawa

    IEEE Photonics Technol. Lett.   Vol. 52 ( No. 7 )   2016.7

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    DOI: 10.1109/TMAG.2016.2535211

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  • Compact magnetooptical isolator with cobalt ferrite on silicon photonic circuits

    M. Yanaga, Y. Shoji, Y. Takamura, S. Nakagawa, T. Mizumoto

    Appl. Phys. Express   Vol. 8 ( No. 8 )   2015.7

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    DOI: 10.7567/APEX.8.082201

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  • Detection of Current Driven Magnetic Domains in [Co/Pd] Nanowire by Tunneling Magnetoresistive Sensor Reviewed

    M. Okuda, Y. Miyamoto, E. Miyashita, N. Saito, N. Hayashi, S. Nakagawa

    J. Appl. Phys.   Vol. 117 ( No. 17 )   2015.4

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    DOI: 10.1063/1.4918694

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  • Magnetic anisotropy of [Co2MnSi/Pd](n) superlattice films prepared on MgO(001), (110), and (111) substrates Reviewed

    Naoki Matsushita, Yota Takamura, Yorinobu Fujino, Yoshiaki Sonobe, Shigeki Nakagawa

    APPLIED PHYSICS LETTERS   106 ( 6 )   2015.2

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    DOI: 10.1063/1.4907892

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  • Formation, Current-Driving and Detection of Magnetic Domains in [Co/Pd] nanowire Reviewed

    OKUDA Mitsunobu, MIYAMOTO Yasuyoshi, KAWANA Mayumi, MIYASHITA Eiichi, SAITO Nobuo, HAYASHI Naoto, NAKAGAWA Shigeki

    PROCEEDINGS OF THE ITE ANNUAL CONVENTION   2015 ( 0 )   31A - 1   2015

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    Language:Japanese   Publisher:The Institute of Image Information and Television Engineers  

    DOI: 10.11485/iteac.2015.0_31A-1

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  • Full-Heusler Co2FeSi alloy thin films with perpendicular magnetic anisotropy induced by MgO-interfaces Reviewed

    Yota Takamura, Takahiro Suzuki, Yorinobu Fujino, Shigeki Nakagawa

    JOURNAL OF APPLIED PHYSICS   115 ( 17 )   2014.5

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    DOI: 10.1063/1.4865971

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  • 15-2 Control of Magnetic Domains Movement by Nano Grooves in [Co/Pd] Nanowire Reviewed

    OKUDA Mitsunobu, MIYAMOTO Yasuyoshi, MIYASHITA Eiichi, SAITO Nobuo, HAYASHI Naoto, NAKAGAWA Shigeki

    PROCEEDINGS OF THE ITE ANNUAL CONVENTION   2014 ( 0 )   15 - 2-1_-_15-2-2_   2014

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    Language:Japanese   Publisher:The Institute of Image Information and Television Engineers  

    In order to apply magnetic nanowires to storage devices, domain size and domain shift length have to be controlled precisely. We fabricated [Co/Pd] nanowires on Si substrate with periodic nano grooves by nanoimprint lithography method, and succeeded to control the domain movement.

    DOI: 10.11485/iteac.2014.0_15-2-1_

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  • FeCoB Films with Large Saturation Magnetization and High Magnetic Anisotropy Field to Attain High Ferromagnetic Resonance Frequency Reviewed

    Shigeki Nakagawa, Ken-ichiro Hirata

    JOURNAL OF MAGNETICS   18 ( 2 )   155 - 158   2013.6

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    DOI: 10.4283/JMAG.2013.18.2.155

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  • Si/NiFe seed layers for Ru intermediate layer in perpendicular magnetic recording tape media Reviewed

    Gaku Saemma, Shota Takahashi, Satoshi Matsunuma, Tetsutaro Inoue, Shigeki Nakagawa

    Journal of Applied Physics   111 ( No. 7 )   2012.4

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    DOI: 10.1063/1.3677884

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  • FePt-Ordered Alloy Films With (001) Orientation Fabricated With FeCoB Soft Magnetic Under Layer Reviewed

    Makoto Tanaka, Syunsuke Gomi, Yuji Ogata, Shigeki Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   47 ( 10 )   3151 - 3153   2011.10

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    DOI: 10.1109/TMAG.2011.2157111

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  • FePt films 2 nanometers thick with (001) preferential orientation on a MgO underlayer Reviewed

    Makoto Tanaka, Yuji Ogata, Shigeki Nakagawa

    JOURNAL OF APPLIED PHYSICS   109 ( 7 )   2011.4

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    DOI: 10.1063/1.3549569

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  • Effect of laminated crystalline FeCoB soft magnetic underlayer for perpendicular magnetic recording tape media Reviewed

    Shunsuke Gomi, Yasuhiro Mashiko, Ken Ichiro Hirata, Satoshi Matsunuma, Tetsutaro Inoue, Tsugihiro Doi, Toshiyuki Watanabe, Shigeki Nakagawa

    Journal of Applied Physics   109 ( No. 7 )   2011.4

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    DOI: 10.1063/1.3561137

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  • Directional Alignment of FeCo Crystallites in Si/NiFe/Ru/FeCoB Multi layer with High Anisotropy Field Above 500 Oe Reviewed

    Ken-ichiro Hirata, Shunsuke Gomi, Shigeki Nakagawa

    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY   11 ( 3 )   2739 - 2742   2011.3

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    DOI: 10.1166/jnn.2011.2711

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  • Effect of third element for FePt ordered alloy thin films with perpendicular magnetic anisotropy fabricated from Fe/Pt/X trilayer Reviewed

    Yuji Ogata, Yasuharu Imai, Shigeki Nakagawa

    SPECIAL ISSUE ON THE 9TH PERPENDICULAR MAGNETIC RECORDING CONFERENCE   16   2011

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    DOI: 10.1016/j.phpro.2011.06.104

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  • Observation of Stress Assisted Magnetization Reversal in a Spin Valve Structure Reviewed

    Kazuya Jimbo, Naoya Saito, Shigeki Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   46 ( 6 )   1649 - 1651   2010.6

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    DOI: 10.1109/TMAG.2010.2046018

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  • Direct observation of an anisotropic in-plane residual stress induced by B addition as an origin of high magnetic anisotropy field of Ru/FeCoB film Reviewed

    Ken-ichiro Hirata, Shunsuke Gomi, Yasuhiro Mashiko, Shigeki Nakagawa

    JOURNAL OF APPLIED PHYSICS   107 ( 9 )   2010.5

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.3350899

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  • Effect of multilayer configuration of [Fe/Pt] multilayer to attain (001) oriented FePt ordered alloy thin films Reviewed

    Yuji Ogata, Yasuharu Imai, Shigeki Nakagawa

    JOURNAL OF APPLIED PHYSICS   107 ( 9 )   2010.5

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    DOI: 10.1063/1.3337648

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  • Effect of crystalline orientation and lattice distortion of FeCo spin polarization enhancement layer in perpendicular magnetic tunnel junction with RE-TM alloy films Reviewed

    Naoaki Miyamoto, Hideto Ohmori, Keisuke Mamiya, Shigeki Nakagawa

    JOURNAL OF APPLIED PHYSICS   107 ( 9 )   2010.5

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.3358601

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  • Perpendicular Magnetic Recording Media with Si/NiFe/FeCoB Crystalline Soft Magnetic Underlayer Reviewed

    五味俊輔, 平田健一郎, 松鵜利光, 松沼悟, 井上鉄太郎, 土井嗣裕, 中川茂樹

    J Magn Soc Jpn   34 ( 5 )   559-562 (J-STAGE) - 562   2010

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:The Magnetics Society of Japan  

    Reducing the thickness of the Ru intermediate layer (IML) is one of the most effective ways of realizing high-density hard disk drives and magnetic tapes. Use of a crystalline soft magnetic underlayer (SUL) has the advantage of reducing the IML thickness and results in better (001) orientations in both Ru IML and CoPtCr-SiO<sub>2</sub> recording layer (RLs). Ru or Si/NiFe seed layers improve the degree of FeCo(110) orientation in the SUL and the c-axis orientation of the RL. An Ru/FeCoB layer and an Si/NiFe/FeCoB layer were compared for crystalline orientation and magnetic properties. The integrated intensity of the (002) diffraction peak of CoPtCr had an almost constant value even when the thickness of the Ru IML was changed from 30 nm to 2 nm. The coercivity and squareness ratio in the direction perpendicular to the of recording layer maintained the same value even when reducing the thickness of the Ru IML was reduced from 30 nm to 5 nm.

    DOI: 10.3379/msjmag.1008R002

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  • Comparison of playback performance of facing targets sputtered perpendicular and longitudinal tape media Reviewed

    Satoshi Matsunuma, Tetsutaro Inoue, Tsugihiro Doi, Toshimitsu Matsuu, Atsuto Hashimoto, Ken Ichiro Hirata, Shigeki Nakagawa

    IEEE Transactions on Magnetics   45 ( No. 10 )   3598 - 3600   2009.10

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    DOI: 10.1109/TMAG.2009.2023075

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  • Ru/FeCoB double layered film with high in-plane magnetic anisotropy field of 500 Oe Reviewed

    Ken-ichiro Hirata, Atsuto Hashimoto, Toshimitsu Matsuu, Shigeki Nakagawa

    JOURNAL OF APPLIED PHYSICS   105 ( 7 )   2009.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.3068037

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  • Ru/FeCoB crystalline soft magnetic underlayers with high anisotropy field for CoPtCr- SiO<inf>2</inf> granular perpendicular magnetic recording media Reviewed

    Toshimitsu Matsuu, Ken Ichiro Hirata, Atsuto Hashimoto, Satoshi Matsunuma, Satoshi Matsunuma, Tetsutaro Inoue, Tetsutaro Inoue, Tsugihiro Doi, Tsugihiro Doi, Shigeki Nakagawa

    Journal of Applied Physics   105   2009.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.3072830

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  • Ru underlayers for enhancement of in-plane magnetic anisotropy field of Ru/FeCoB film Reviewed

    Ken-ichiro Hirata, Atsuto Hashimoto, Toshimitsu Matsuu, Shigeki Nakagawa

    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS   161 ( 1-3 )   134 - 137   2009.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.mseb.2009.03.002

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  • Crystal Structure as an Origin of High-Anisotropy Field of FeCoB Films With Ru Underlayer Reviewed

    A. Hashimoto, K. Hirata, T. Matsuu, S. Saito, S. Nakagawa

    IEEE Transactions on Magnetics   44 ( 11 )   3899 - 3901   2008.12

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TMAG.2008.2002252

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  • Stress-Assisted Reversal of Perpendicular Magnetization of Thin Films With Giant Magnetostriction Constant Reviewed

    Naoya Saito, Shigeki Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   44 ( 11 )   2487 - 2490   2008.11

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TMAG.2008.2002606

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  • Control of Curie Temperature of FePt(Cu) Films Prepared From Pt(Cu)/Fe Bilayers Reviewed

    Jun-Ichi Ikemoto, Yasuharu Imai, Shigeki Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   44 ( 11 )   3543 - 3546   2008.11

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1109/TMAG.2008.2001610

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  • Perpendicular magnetic tunnel junction with tunneling magnetoresistance ratio of 64% using MgO (100) barrier layer prepared at room temperature Reviewed

    Hideto Ohmori, Tomoya Hatori, Shigeki Nakagawa

    JOURNAL OF APPLIED PHYSICS   103 ( 7 )   2008.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1063/1.2840016

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  • Improvement of stress-induced magnetization reversal process of DyFeCo thin films Reviewed

    Naoya Saito, Michiya Yamada, Shigeki Nakagawa

    JOURNAL OF APPLIED PHYSICS   103 ( 7 )   2008.4

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    DOI: 10.1063/1.2832340

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  • High Frequency Characteristics of FeCoB/NiFe/Si Thin Films with Resonance Frequency in the GHz Range

    MATSUU Toshimitsu, HASHIMOTO Atsuto, NAKAGAWA Shigeki

    J. Jpn. Soc. Powder Powder Metallurgy   55 ( 2 )   127 - 131   2008.2

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    Recently the development of the magnetic devices has been expected in the high frequency applications. The soft magnetic films with large saturation magnetization and high anisotropy field Hk have been required. In this study, FeCoB/NiFe/Si thin films deposited by Facing Targets Sputtering (FTS) system have saturation magnetization of 2 T and Hk of 20 kA/m, and exhibited high ferromagnetic resonance (FMR) frequency of 6.0-7.0 GHz in permeability characteristics. For improvement of high frequency permeability characteristics, we reduced the thickness of FeCoB soft magnetic layer. The results showed that damping constant was reduced and exhibited smaller loss capability. When changing of the FeCoB thickness, we investigated the change of anisotropy field Hk and FeCoB(110) lattice spacing in the perpendicular direction, which indicated that there was correlation between each other. From this relationship, we examined the origin of anisotropy field Hk.

    DOI: 10.2497/jjspm.55.127

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    Other Link: https://jlc.jst.go.jp/DN/JALC/00310528355?from=CiNii

  • Fabrication of Ultra Thin fct-FePt(001) Ordered Alloy Thin Films from Pt/Fe Bilayers for Perpendicular Magnetic Recording Media

    IKEMOTO Jun-ichi, NAKAGAWA Shigeki

    J. Jpn. Soc. Powder Powder Metallurgy   55 ( 2 )   121 - 126   2008.2

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    Pt(3nm)/Fe(3nm) bilayered films deposited directly on glass disk substrates at room temperature exhibited preferential (100) orientation in Pt as well as Fe layers because of a hetero epitaxial growth from the bottom Fe(100) to the top Pt(100) textures. Highly ordered fct-FePt(001) alloy texture was appeared in the bi-layered film after annealed at 600°C in hydrogen atmosphere. Increase of substrate temperature up to 600°C during the deposition of 3nm-thick Pt layer on the Fe layer brought about a direct fabrication of fct-FePt(001) ordered alloy thin film.

    DOI: 10.2497/jjspm.55.121

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    Other Link: https://jlc.jst.go.jp/DN/JALC/00310528348?from=CiNii

  • Relationship between crystal distortion and a magnetic anisotropy field of FeCoB films for soft magnetic underlayer

    Hirata Ken-ichiro, Hashimoto Atsuto, Matsuu Toshimitsu, Nakagawa Shigeki

    ITE Technical Report   32   41 - 46   2008

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    The origin of high uniaxial magnetic anisotropy in FeCoB thin films were studied from the changes in FeCo crystal distortion and alignment. The films were prepared by facing targets sputtering and examined by X-ray diffraction (XRD) analysis. Preparation of Ru underlayer showed remarkably high anisotropy field H_k of 500 Oe. The Ru/FeCoB films revealed an oblique crystal growth and a preferential orientation. FeCo(110) lattice spacing had 0.5 % expansion along the easy axis and the strain indicated magnetoelastic energy E_<elastic> of 3.8×10^5 erg/cc exists along the easy axis. The estimated H_k from the Eelastic was 470 Oe which well corresponded with the measured H_k of 500 Oe. This indicates that the strain in FeCo lattice is the origin of the remarkably high magnetic anisotropy.

    DOI: 10.11485/itetr.32.23.0_41

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  • Highly (0 0 1) oriented FePt ordered alloy thin films fabricated from Pt(1 0 0)/Fe(1 0 0) structure on glass disks without seed layers Reviewed

    Shigeki Nakagawa, Taro Kamiki

    Journal of Magnetism and Magnetic Materials   287   204 - 208   2005.2

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    DOI: 10.1016/j.jmmm.2004.10.087

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  • Mn-Zn spinel ferrite thin films prepared by high rate reactive facing targets sputtering Reviewed

    Shigeki Nakagawa, Shunsuke Saito, Taro Kamiki, Sok-Hyun Kong

    Journal of Applied Physics   93 ( 10 )   7996 - 7998   2003.5

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    DOI: 10.1063/1.1555842

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  • Evaluation of magnetization process in a double-layered perpendicular magnetic recording medium using Ferromagnetic Hall effects

    Sarbanoo Das, Nakagawa Shigeki

    ITE Technical Report   27   7 - 12   2003

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    Ferromagnetic Hall effects have been used to evaluate the magnetization process and the magnetic interparticle interaction in the recording layer of double-layered perpendicular magnetic recording media having a soft magnetic layer under the recording layer. Recording layer and the soft magnetic underlayer, which possess different magnetic anisotropy, reveal different symmetries in the Hall voltage characteristics with respect to the applied magnetic field. This difference has been applied to detect the magnetization process in these layers. Moreover, initial magnetization curves for the recording layer have been extracted to evaluate the magnetic interaction among particles in the recording layer of a double-layered media under the application of canted magnetic field.

    DOI: 10.11485/itetr.27.2.0_7

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  • Preparation of Sr-ferrite thin films prepared by sputtering Ar and Kr mixture gas

    Keisuke Mizuno, Shigeki Nakagawa

    Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy   50 ( 2 )   154 - 158   2003

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Funtai Funamtsu Yakin Kyokai/Japan Soc. of Powder Metallurgy  

    DOI: 10.2497/jjspm.50.154

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  • High rate deposition of Mn-Zn spinel ferrite thin films using reactive facing-target sputtering

    Taro Kamiki, Syunsuke Saito, Kong Sok Hyun, Shigeki Nakagawa

    Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy   50 ( 2 )   143 - 148   2003

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Funtai Funamtsu Yakin Kyokai/Japan Soc. of Powder Metallurgy  

    DOI: 10.2497/jjspm.50.143

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  • 磁気記録媒体の微細構造・特性制御のための下地層

    中川茂樹, 孔碩

    日本応用磁気学会誌   27 ( 12 )   1097 - 1105   2003

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  • Ni-fe-o intermediate layer and [Ni-Fe/Si](n) laminated soft underlayer for backlayer of Co-Cr-Ta-Pt perpendicular recording media

    SH Kong, T Okamoto, KH Kim, S Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   38 ( 5 )   1982 - 1984   2002.9

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    DOI: 10.1109/TMAG.2002.801794

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  • [Fe-Co/Si](n) multilayers with high saturation magnetization for backlayer of perpendicular magnetic recording media

    SH Kong, T Okamoto, S Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   38 ( 5 )   1997 - 1999   2002.9

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    DOI: 10.1109/TMAG.2002.801800

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  • Magnetic interaction among particles in Co-Cr-Ta media and Co/Pt multilayered media evaluated by anomalous Hall effect

    S Das, S Nakagawa

    JOURNAL OF APPLIED PHYSICS   91 ( 10 )   7427 - 7429   2002.5

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    DOI: 10.1063/1.1451744

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  • Deposition of Co-Cr-Ta/Pt/Ti Perpendicular Magnetic Thin Films and Introduction of a Pt Interlayer

    SATO A., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   25 ( 4-2 )   543 - 546   2001

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    Pt/Ti layers were investigated for the under layers of Co-Cr-Ta perpendicular magnetic recording media. The Co-Cr-Ta/Pt/Ti trilayered films exhibited better c-axis orientation and higher perpendicular coercivity than the Co-Cr-Ta/Pt bilayered films. In order to decrease grain size of the Co-Cr-Ta recording layer, a 5-nm-thick Pt interlayer was introduced to compose [Co-Cr-Ta/Pt]n multilayers. We found that the Pt interlayer was effective for decreasing the grain size of the Co-Cr-Ta recording layer without degrading its perpendicular coercivity. The Pt/Ti under layer and Pt interlayer are useful for the development of Co-Cr-Ta perpendicular magnetic recording media.

    DOI: 10.3379/jmsjmag.25.543

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    Other Link: http://dl.ndl.go.jp/info:ndljp/pid/10465401

  • Decreasing the Grain Size of BaM Ferrite Films by Improving Pt Under Layers

    FUNABASHI N., FENG J., MATSUSHITA N., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   25 ( 4-2 )   547 - 550   2001

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    Magnetoplumbite-type BaM ferrite films deposited on Pt under layers have a large perpendicular anisotropy which is enough for the contact type of perpendicular magnetic recording media. Addition of Ta proved thoroughly effective in attaining smaller grain size in BaM ferrite films. By adding 1 at.% of Ta into Pt under layers, we decreased the grain size of those Pt under layers. BaM ferrite films with smaller grain size have higher perpendicular coercivity (3.5 kOe) and greater squareness (0.69). Lower noise level and higher recording density were obtained through this improvement.

    DOI: 10.3379/jmsjmag.25.547

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    Other Link: http://dl.ndl.go.jp/info:ndljp/pid/10465402

  • Control of nano-structure of the initial growth layers of Co-Cr thin films deposited by facing targets sputtering Reviewed

    S Nakagawa, M Naoe

    VACUUM   51 ( 4 )   595 - 599   1998.12

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  • Relationship between Ta content and soft magnetism of Co-Zr-Ta films for backlayers in perpendicular magnetic recording media Reviewed

    S Nakagawa, S Tanaka, M Naoe

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   155 ( 1-3 )   231 - 233   1996.3

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  • SYNTHESIS OF FERRIMAGNETIC MN4N FILMS EPITAXIALY DEPOSITED ON AL UNDERLAYERS BY PLASMA-FREE SPUTTERING Reviewed

    S NAKAGAWA, M NAOE

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   140   715 - 716   1995.2

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  • Annealing and Ion Bombardment Studies of Ni-Fe/Cu GMR and Spin Valve Multilayers Reviewed

    YOSHITANI Tohru, MIYAMOTO Yasuyoshi, NAKAGAWA Shigeki, NAOE Masahiko

    ITE Technical Report   19 ( 69 )   7 - 14   1995

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    Fe/[Ni_<81>Fe_<19>/Cu]_<30> multilayers with Giant Magnetoresistance (GMR) were deposited using Dual Ion Beam Sputtering (DIBS) apparatus. The change of MR characteristics by controlling the crystallite orientations and interfacial structure by means of ion bombardment to interfaces and post-annealing were investigated. In this study, it was confirmed that the spin-dependent scattering is mainly occurred at the bulk layers for Ni-Fe/Cu multilayers, but the field sensitivity is much influenced by the local structures around interfaces. Both MR ratio and field sensitivity were improved after post-annealing at temperature of 150℃. Spin Valves were prepared, in which FeMn antiferromagnetic layers were deposited under the first Ni-Fe layer to avoid oxidization of FeMn layers. FeMn layers in Spin Valve deposited on Ni-Fe underlayers whose crystallite orientations was improved by ion bombardment possessed a large exchange bias field of about 30 Oe.

    DOI: 10.11485/tvtr.19.69_7

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  • VERY THIN PROTECTIVE FILM OF FE-MO-B BASED HARD ALLOY FOR CURL-FREE MAGNETIC-TAPE Reviewed

    S AKIYAMA, N MATSUSHITA, S NAKAGAWA, M NAOE

    THIN FILMS : STRESS AND MECHANICAL PROPERTIES III   239   641 - 646   1992

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  • 2-STEP DEPOSITION AT LOW AND HIGH Ar PRESSURE FOR CURL-FREE Co-Cr MAGNETIC TAPE

    Setsuo AKIYAMA, Nobuhiro MATSUSHITA, Shigeki NAKAGAWA, Masahiko NAOE

    Journal of the Magnetics Society of Japan   15 ( S_2_PMRC_91 )   S2_933 - 938   1991

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    DOI: 10.3379/jmsjmag.15.s2_933

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  • Preparation of Ybacuo Thin Films with Excellent Crystallinity on Amorphous substrates Prepared by Facing Targets sputtering Reviewed

    Shigeki Nakagawa, Takeshi Takeuchi, Masahiko Naoe

    IEEE Transactions on Magnetics   26 ( 5 )   1430 - 1432   1990

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    DOI: 10.1109/20.104400

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  • THE THICKNESS DEPENDENCE OF M-H CHARACTERISTICS OF CO-CR FILMS PREPARED BY FACING TARGETS SPUTTERING Reviewed

    S NAKAGAWA, Y KITAMOTO, M NAOE

    JOURNAL DE PHYSIQUE   49 ( C-8 )   1987 - 1988   1988.12

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  • CoCr thin film preparation by facing targets sputtering Reviewed

    Yoshiro Niimura, Shigeki Nakagawa, Masahiko Naoe

    Materials Science and Engineering   98 ( C )   53 - 56   1988

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    DOI: 10.1016/0025-5416(88)90125-5

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  • MULTILAYERED CO-CR FILMS WITH NON-MAGNETIC INTERMEDIATE LAYERS BY FTS SYSTEM Reviewed

    Y NIIMURA, Y KITAMOTO, S NAKAGAWA, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   23 ( 5 )   2464 - 2466   1987.9

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  • INFLUENCE OF FILM-GROWTH CONDITIONS ON C-AXIS ORIENTATION IN SPUTTERED CO-CR THIN-FILMS Reviewed

    Y NIIMURA, S NAKAGAWA, Y KITAMOTO, M NAOE

    JOURNAL OF APPLIED PHYSICS   61 ( 8 )   3152 - 3154   1987.4

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  • Control of coercive force of co-cr sputtered films Reviewed

    Yoshiro Niimura, Shigeki Nakagawa, Masahiko Naoe

    IEEE Transactions on Magnetics   23 ( 1 )   68 - 70   1987

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    DOI: 10.1109/TMAG.1987.1064816

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  • The magnetic anisotropy in the initial layer of CO-CR sputtered thin films Reviewed

    Yoshiro Nilmura, Shigeki Nakagawa, Masahiko Naoe, Yoichi Hoshi

    IEEE Transactions on Magnetics   23 ( 5 )   2461 - 2463   1987

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    DOI: 10.1109/TMAG.1987.1065628

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  • Crystallographic Orientation and Magnetic Behavior of Co-Cr Sputtered Thin Films in the Early Stage of Film Growth

    NAKAGAWA Shigeki, KITAMOTO Yoshitaka, SUMIDE Makoto, KUWASAKI Naoya, NIIMURA Yoshiro, NAOE Masahiko

    ITE Technical Report   11 ( 5 )   15 - 22   1987

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    DOI: 10.11485/tvtr.11.5_15

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  • Keffects of incident angle on C-axls orientation in sputtered co-cr films Reviewed

    Yoshiro Niimura, Shigeki Nakagawa, Masahiko Naoe

    IEEE Transactions on Magnetics   23 ( 5 )   2043 - 2045   1987

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    DOI: 10.1109/TMAG.1987.1065609

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Books

  • 電子物性・材料の事典

    朝倉書店  2006 

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  • 日本化学会編 第5版実験化学講座 27巻「機能性材料」

    丸善㈱  2004 

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  • 図解 薄膜技術

    培風館  1999 

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MISC

  • SmFe₂超磁歪薄膜を用いたピエゾエレクトロニック・磁気トンネル接合素子の最近の研究—Recent progress on piezo-electronic magnetoresistive devices using giant magnetostrictive SmFe₂ thin films

    浦下 宗輝, 小野澤 隼, 北川 涼太, 冨田 誠人, 春本 高志, 史 蹟, 中村 吉男, 高村 陽太, 中川 茂樹

    映像情報メディア学会技術報告 = ITE technical report   44 ( 25 )   13 - 16   2020.10

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    Language:Japanese   Publisher:東京 : 映像情報メディア学会  

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    Other Link: https://ndlsearch.ndl.go.jp/books/R000000004-I030790327

  • Recent progress on piezo-electronic magnetoresistive devices using giant magnetostrictive SmFe2 thin films

    浦下宗輝, 小野澤隼, 北川涼太, 冨田誠人, 春本高志, SHI Ji, 中村吉男, 高村陽太, 中川茂樹

    電子情報通信学会技術研究報告(Web)   120 ( 180(MRIS2020 1-4) )   2020

  • ピエゾエレクトロニック磁気抵抗素子の圧力印加構造の設計および試作

    北川涼太, 小野澤隼, スタットラー嘉也, 春本高志, 史蹟, 中村吉男, 高村陽太, 中川茂樹

    粉体粉末冶金協会講演大会(Web)   2019   2019

  • ピエゾエレクトロニック磁気トンネル接合の圧力印加構造の評価

    浦下宗輝, 北川涼太, 小野澤隼, STUTLER Y., 春本高志, SHI J., 中村吉男, 高村陽太, 中川茂樹

    日本磁気学会学術講演概要集   43rd   2019

  • [Co/Pd]磁性細線における磁区の形成・駆動・検出

    奥田光伸, 奥田光伸, 宮本泰敬, 川那真弓, 宮下英一, 斎藤信雄, 林直人, 中川茂樹

    映像情報メディア学会年次大会講演予稿集(CD-ROM)   2015   2015

  • [Co/Pd]磁性細線への磁区形成における軟磁性下地層の効果

    奥田光伸, 奥田光伸, 宮本泰敬, 川那真弓, 宮下英一, 斎藤信雄, 林直人, 中川茂樹

    日本磁気学会学術講演概要集   39th   2015

  • Magnetic anisotropy of [Co_2MnSi/Pd]_n superlattice films prepared on MgO single crystal substrates with different crystal orientation

    MATSUSHITA Naoki, FUJINO Yorinobu, TAKAMURA Yota, SONOBE Yoshiaki, NAKAGAWA Shigeki

    IEICE technical report. Magnetic recording   114 ( 140 )   1 - 5   2014.7

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    Multilayered superlattice films composed of half-metallic full-Heusler Co2MnSi (CMS) alloy and Pd films were fabricated on single crystal MgO substrates with different crystal orientation to evaluate relationship between magnetic anisotropy of the superlattice films and crystal orientation of MgO substrates. [CMS(0.6 nm)/Pd(2 nm)]_6 superlattice films prepared on MgO(100), (110), and (111) substrates showed in-plane, isotropic, and perpendicular magnetic anisotropy, respectively.

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  • Application of Cobalt Ferrite to an Ultra-compact Magneto-Optical Isolator on Silicon Photonics Circuits

    Y. Shoji, M. Yanaga, T. Kashima, T. Suzuki, S. Nakagawa, T. Mizumoto

    J. Jpn. Soc. Powder Powder Metallurgy   Vol. 61 ( No. S61 )   2014.5

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    DOI: 10.2497/jjspm.61.S343

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  • [Co/Pd]磁性細線における電流駆動磁区の磁気抵抗変化による検出

    奥田光伸, 奥田光伸, 宮本泰敬, 宮本泰敬, 宮下英一, 斎藤信雄, 林直人, 中川茂樹

    日本磁気学会学術講演概要集   38th   2014

  • [Co/Pd]磁性細線における微小溝加工による磁区駆動制御

    奥田光伸, 奥田光伸, 宮本泰敬, 宮本泰敬, 宮下英一, 斎藤信雄, 林直人, 中川茂樹

    映像情報メディア学会年次大会講演予稿集(CD-ROM)   2014   2014

  • 高機能磁性薄膜作製技術の開発と磁気デバイスへの応用

    中川茂樹

    日本磁気学会誌 まぐね   Vol. 8 ( No. 2 )   2013.2

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  • Playback performance of perpendicular magnetic recording tape media for over-50-TB cartridge by facing targets sputtering method

    S. Matsunuma, T. Inoue, T. Watanabe, T. Doi, Y. Mashiko, S. Gomi, K. Hirata, S. Nakagawa

    J. Magn. Magn. Mater.   Volume 324 ( No. 3 )   2012.12

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    DOI: 10.1016/j.jmmm.2010.12.030

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  • 反応性イオンビームスパッタリングによるCoFe2O4(100)配向膜の作製

    間宮 啓介, 久保田 雄紀, 中川 茂樹

    紛体および粉末冶金   Vol. 59 ( No. 3 )   2012.5

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  • Fabrication of perpendicular magnetic recording tape media with a data capacity of over-50TB using Si/NiFe/FeCoB soft magnetic underlayers

    S. Gomi, Y. Mashiko, K. Hirata, S. Matsunuma, T. Inoue, T. Doi, T. Watanabe, S. Nakagawa

    Phys. Procedia   Vol. 16C   2011.12

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    DOI: 10.1016/j.phpro.2011.06.109

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  • 斜方入射スパッタ粒子を利用して作製した高異方性磁界を有するFeCoB膜

    中川茂樹

    日本磁気学会誌 まぐね   Vol. 7 ( No. 1 )   2011.12

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  • Reducing Media Noise of Perpendicular Magnetic Recording Tape for Over-50TB Class Date Cartridge

    S. Matsunuma, T. Inoue, T. Watanabe, T. Doi, S. Gomi, Y. Mashiko, K. Hirata, S. Nakagawa

    J. Appl. Phys.   Vol. 109 ( No. 7 )   2011.4

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  • Growth of mixed phased films of γ-Fe2O3 and half metallic Fe3O4 using (100) MgO/Fe under layer for spin electronic devices

    M. Wang, S. Nakagawa

    J. Phys.: Conf. Ser.   Volume 266 ( Number 1 )   2011.2

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  • Evaluation of Magnetization Interaction at the Interface between FeCo and TbFeCo for p-MTJ

    N. Miyamoto, K. Mamiya, S. Nakagawa

    J. Phys.: Conf. Ser.   Volume 266 ( Number 1 )   2011.1

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  • FeCoB Films with High Ferromagnetic Resonance Frequency above 9 GHz induced by Anisotropic Residual Stress

    S. Nakagawa, Y. Mashiko, K. Hirata

    2010.12

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  • Effect of Fe diffusion in MgO/Fe seedlayers to attain (100) oriented Pt underlayer for perovskite films with c-axis orientation

    T. Matsumoto, K. Tamai, Y. Murashima, K. Komaki, S. Nakagawa

    Thin Solid FIlms   Vol. 518   2010.10

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    DOI: 10.1016/j.tsf.2010.03.099

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  • Effect of Crystalline Orientation and Lattice Distortion of FeCo Spin Polarization Enhancement Layer in perpendicular MTJ with RE-TM Alloy Films

    N. Miyamoto, H. Ohmori, S. Nakagawa

    J. Appl. Phys.   Vol. 107 ( No. 9 )   2010.5

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  • Influence of crystallographic orientation of FeCo spin polarization enhancement layer on the magnetization coupling with RE-TM alloy films in perpendicular MTJ

    H. Ohmori, N. Miyamoto, S. Nakagawa

    2009.10

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  • Si/NiFe/FeCoB Crystalline SUL to Reduce Ru Intermediate Layer Thickness for CoPtCr-SiO2 Granular Perpendicular Magnetic Recording Media

    T. Matsuu, K. Hirata, S. Gomi, A. Hashimoto, S. Matsunuma, T. Inoue, T. Doi, S. Nakagawa

    IEEE Trans. Magn.   Vol. 45 ( No. 10 )   2009.10

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    DOI: 10.1109/TMAG.2009.2022498

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  • FePtCu Ordered alloy films with (001) orientation fabricated from Cu/Pt/Fe tri-layers

    Y. Imai, Y. Ogata, S. Nakagawa

    IEEE Trans. Magn.   2009.10

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  • Investigation of relation between crystalline orientation of FeCo Spin Polarization Enhancement Layer and magnetic properties of in p-MTJ with RE-TM alloy films

    Miyamoto Naoaki, Ohmori Hideto, Nakagawa Shigeki

    ITE Technical Report   109 ( 222 )   41 - 45   2009

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    Magnetic-coupling between TbFeCo and FeCo in perpendicular MTJ with RE-TM alloy films was investigated. Two specimens that have different crystalline orientation of FeCo were prepared; one is TbFeCo/FeCo(001)/Ta and the other is TbFeCo/FeCo(110)/Ta, and magnetic properties were observed. As a result, it was confirmed that squareness ratio of the specimens with FeCo(001) was about 9% higher than that of the specimens with FeCo(110). In addition, lattice constants of FeCo(001) films were observed, and it was confirmed that FeCo lattices were needed to be stretched along perpendicular direction in order to obtain appropriate squareness in perpendicular magnetic properties.

    DOI: 10.11485/itetr.33.41.0_41

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  • Magnetic properties of FePtCu ordered alloy films fabricated from Cu/Pt/Fe trilayer

    Ogata Yuji, Imai Yasuharu, Nakagawa Shigeki

    ITE Technical Report   109 ( 132 )   1 - 5   2009

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    FePtCu ordered alloy films were fabricated from Cu/Pt/Fe trilayers in order to control their Curie temperature suitable for the operation temperature of media in heat assisted magnetic recording (HAMR) system. It was confirmed that the addition of Cu into FePt films makes Curie temperature of the FePtCu films lower than that of FePt films. The control of Cu content ratio in FePtCu films was performed by adjusting Cu layer thickness of Cu/Pt/Fe trilayers. As increasing Cu thicknesses, their Curie temperature and coercivity decreased adequately for HAMR media.

    DOI: 10.11485/itetr.33.28.0_1

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  • Improvement of granular perpendicular magnetic recording media with Si/NiFe/FeCoB crystalline SUL

    Gomi Shunsuke, Hirata Ken-ichiro, Matsuu Toshimitsu, Matsunuma Satoshi, Inoue Tetsutaro, Watanabe Toshiyuki, Doi Tsuguhiro, Nakagawa Shigeki

    ITE Technical Report   109 ( 132 )   41 - 45   2009

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    Application of crystalline soft magnetic underlayer (SUL) for reduction of the Ru intermediate layer (IML) between recording layer and SUL in perpendicular magnetic recording media has been performed. The use of FeCoB layer as crystalline SUL improves degree of FeCo(110) orientation, and that gives degree of (001) orientation of Ru IML and CoPtCr in CoPtCr-SiO_2 recording layer. Then, FeCoB crystalline SULs with seed layer of Ru or Si/NiFe are fabricated and compared to control degree of (110) orientation of FeCo in FeCoB layer. Ru/FeCoB SUL has high anisotropy field. Si/NiFe seed layer improves (110) preferential orientation of FeCo. Si/NiFe seed layer more improved (110) orientation of FeCo than that of Ru. It was confirmed that the use of Ru/FeCoB layer or Si/NiFe/FeCoB layer causes improvement of (001) orientation of Ru IML, which causes improvement of (001) orientation of CoPtCr. The intensity of (002) diffraction peak of CoPtCr is almost constant even though the thickness of Ru IML changes from 30nm to 1nm. Coercivity and squareness ratio of recording layer maintained the same value in spite of reducing the thickness of the Ru IML from 30nm to 5nm.

    DOI: 10.11485/itetr.33.28.0_41

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  • Investigation of relation between crystalline orientation of FeCo Spin Polarization Enhancement Layer and magnetic properties of in p-MTJ with RE-TM alloy films

    Naoaki Miyamoto, Hideto Ohmori, Shigeki Nakagawa

    IEICE Technical Report   109 ( 222 )   41 - 45   2009

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    Magnetic-coupling between TbFeCo and FeCo in perpendicular MTJ with RE-TM alloy films was investigated. Two specimens that have different crystalline orientation of FeCo were prepared; one is TbFeCo/FeCo(001)/Ta and the other is TbFeCo/FeCo(110)/Ta, and magnetic properties were observed. As a result, it was confirmed that squareness ratio of the specimens with FeCo(001) was about 9% higher than that of the specimens with FeCo(110). In addition, lattice constants of FeCo(001) films were observed, and it was confirmed that FeCo lattices were needed to be stretched along perpendicular direction in order to obtain appropriate squareness in perpendicular magnetic properties.

    DOI: 10.11485/itetr.33.41.0_41

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  • Directional alignment and anisotropic internal stress in Ru/FeCoB films with high anisotropy field

    Shigeki Nakagaw, Kenichiro Hirata

    The Papers of Technical Meeting on Magnetics, IEE Japan   53   2009

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  • Improvement of granular perpendicular magnetic recording media with Si/NiFeCoB crystalline SUL

    Shunsuke Gomi, Kenichiro Hirata, Toshimitsu Matsuu, Satoshi Matsunuma, Tetsutaro Inoue, Toshiyuki Watanabe, Tsugihiro Doi, Shigeki Nakagawa

    IEICE Techinical Report   109 ( 132 )   41 - 45   2009

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  • Stress assisuted magnetization reversal of a spin valve structual perpendicular GMR multy-layer

    Kazuya Jimbo, Naoya Saito, Shigeki Nakagawa

    IEICE Techinical Report   109 ( 222 )   37 - 40   2009

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    A Stress Assisted Magnetization Reversal (SAMR) method has been demonstrated in order to reduce a power consumption during magnetization reversal process in a perpendicular magenetoresistive random access memory. In this study, a giant magnetoresistive multilayer of Cu(15nm)/Terfenol-D(10nm)/Cu(3nm)/TbFeCo(30nm)/Cu(15nm) were prepared. By using both of an upper and a bottom antioxide layers of the Cu, the multilayer kept its perpendicular magnetization after baked at 100℃ for 2 minutes. Perpendicular component of magnetization reversal in the GMR multilayer were observed during SAMR process by anomalous Hall effect. As a result, the magnetization of a free layer is shifted from perpendicular to in-plane under a stress application of 279MPa.

    DOI: 10.11485/itetr.33.41.0_37

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  • Magnetic properties of FePtCu ordered alloy films fabricated from Cu/Pt/Fe trilayer

    Yuji Ogata, Yasuharu Imai, Shigeki Nakagawa

    IEICE Technical Report   109 ( 132 )   1 - 5   2009

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    FePtCu ordered alloy films were fabricated from Cu/Pt/Fe trilayers in order to control their Curie temperature suitable for the operation temperature of media in heat assisted magnetic recording (HAMR) system. It was confirmed that the addition of Cu into FePt films makes Curie temperature of the FePtCu films lower than that of FePt films. The control of Cu content ratio in FePtCu films was performed by adjusting Cu layer thickness of Cu/Pt/Fe trilayers. As increasing Cu thicknesses, their Curie temperature and coercivity decreased adequately for HAMR media.

    DOI: 10.11485/itetr.33.28.0_1

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  • 高異方性磁界を有するRu/FeCoB/膜の方向性結晶配列と異方的残留応力

    中川茂樹, 平田健一郎

    電気学会研究会資料   53   2009

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  • Stress assisted magnetization reversal of a spin valve structural perpendicular GMR multi-layer

    JIMBO Kazuya, SAITO Naoya, NAKAGAWA Shigeki

    ITE Technical Report   109 ( 222 )   37 - 40   2009

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    A Stress Assisted Magnetization Reversal (SAMR) method has been demonstrated in order to reduce a power consumption during magnetization reversal process in a perpendicular magenetoresistive random access memory. In this study, a giant magnetoresistive multilayer of Cu(15nm)/Terfenol-D(10nm)/Cu(3nm)/TbFeCo(30nm)/Cu(15nm) were prepared. By using both of an upper and a bottom antioxide layers of the Cu, the multilayer kept its perpendicular magnetization after baked at 100℃ for 2 minutes. Perpendicular component of magnetization reversal in the GMR multilayer were observed during SAMR process by anomalous Hall effect. As a result, the magnetization of a free layer is shifted from perpendicular to in-plane under a stress application of 279MPa.

    DOI: 10.11485/itetr.33.41.0_37

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  • Crystallites orientation of granular perpendicular magnetic recording media on FeCoB soft magnetic underlayer with high anisotropy field

    MATSUU Toshimitsu, HIRATA Ken-ichiro, HASHIMOTO Atsuto, MATSUNUMA Satoshi, INOUE Tetsutaro, DOI Tsugihiro, NAKAGAWA Shigeki

    ITE technical report   32 ( 53 )   37 - 42   2008.11

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    FeCoB films with a bcc(110) crystalline orientation were prepared as crystalline soft magnetic underlayers (SULs) for CoPtCr-SiO_2 perpendicular magnetic recording media. Ru layers and Si/NiFe layers as underlayers of FeCoB layers were introduced in order to enhance high in-plane anisotropy field and change a bcc-FeCo (110) orientation. The effect of FeCoB crystalline SULs on Ru intermediate layers was investigated. Ru/CoPtCr-SiO_2 films deposited on the bcc-FeCo (110) oriented FeCoB films exhibited (001) preferential orientations of the CoPtCr as well as the (001) orientation of Ru intermediate layer and possessed perpendicular magnetic anisotropy of the recording layer. It is indicated that the application of a crystalline SUL and the improvement of a bcc-FeCo (110) orientation in the SUL promote the reduction of the intermediate layer thickness.

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  • Crystallites orientation of granular perpendicular magnetic recording media on FeCoB soft magnetic underlayer with high anisotropy field

    MATSUU Toshimitsu, HIRATA Ken-ichiro, HASHIMOTO Atsuto, MATSUNUMA Satoshi, INOUE Tetsutaro, DOI Tsugihiro, NAKAGAWA Shigeki

    IEICE technical report   108 ( 313 )   37 - 42   2008.11

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    FeCoB films with a bcc (110) crystalline orientation were prepared as crystalline soft magnetic underlayers (SULs) for CoPtCr-SiO_2 perpendicular magnetic recording media. Ru layers and Si/NiFe layers as underlayers of FeCoB layers were introduced in order to enhance high in-plane anisotropy field and change a bcc-FeCo (110) orientation. The effect of FeCoB crystalline SULs on Ru intermediate layers was investigated. Ru/CoPtCr-SiO_2 films deposited on the bcc-FeCo (110) oriented FeCoB films exhibited (001) preferential orientations of the CoPtCr as well as the (001) orientation of Ru intermediate layer and possessed perpendicular magnetic anisotropy of the recording layer. It is indicated that the application of a crystalline SUL and the improvement of a bcc-FeCo (110) orientation in the SUL promote the reduction of the intermediate layer thickness.

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  • Playback Performance of Facing Targets Sputtered Tape Media on Moving Tape Substrate with a High Speed

    S. Matsunuma, T. Inoue, T. Doi, T. Matsuu, A. Hashimoto, H. Fujiura, K. Hirata, S. Nakagawa

    IEEE Trans. Magn.   vol. 44 ( No. 11 )   2008.11

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    DOI: 10.1109/TMAG.2008.2003069

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  • 高異方性磁界を有するRu/FeCoB裏打ち軟磁性層上のCoPtCr‐SiO2垂直グラニュラー媒体の作製

    松鵜利光, 平田健一郎, 橋本篤人, 松沼悟, 井上鉄太郎, 土井嗣裕, 中川茂樹

    日本磁気学会学術講演概要集   32nd   17   2008.9

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  • Magnetic anisotropy and crystalline orientation in high H(k)FeCoB thin films

    Atsuto Hashimoto, Toshimitsu Matsuu, Masaru Tada, Shigeki Nakagawa

    JOURNAL OF APPLIED PHYSICS   103 ( 7 )   07E734   2008.4

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    DOI: 10.1063/1.2838225

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  • 裏打ち軟磁性層用FeCoB薄膜の結晶歪みと高異方性磁界の関係

    平田 健一郎, 橋本 篤人, 松鵜 利光, 中川 茂樹

    電子情報通信学会技術研究報告[MR:磁気記録・情報ストレージ]   MR2008-   2008

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  • Control of Curie temperature of c-axis oriented FePt films and fabrication method of FePt films using MgO templete

    Imai Yasuharu, Ikemoto Jun-ichi, Nakagawa Shigeki

    ITE Technical Report   32   MR2008-17 - 44   2008

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    FePt ordered alloy with (001) preferential orientation is a hopeful candidate as a next-generation high density magnetic recording medium, especially, heat assisted magnetic recording medium and bit patterned medium, hi this report, the controllability of FePt(Cu) ordered alloy thin films as the heat assisted magnetic recording media and fabrication method of FePt ordered alloy using MgO (100) preferential orientated films as the future self-assembly patterned media were investigated. It is possible to control Curie temperature from 150 ℃ to 250 ℃ by changing the amount of Cu in FePt(Cu) films, hi the fabrication method of FePt using MgO (100) oriented films, It was confirmed that Fe atoms in the Fe layer beneath the MgO layer diffuses up to MgO surface by heating MgO(100)/Fe(100) films prepared with reactive sputtering. Besides, using this experimental results, we succeeded in fabricating FePt(Cu) ordered alloy films.

    DOI: 10.11485/itetr.32.28.0_39

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  • 対向ターゲット式スパッタ法によるCoPtCr‐SiO2磁気記録テープの磁気特性改善

    松鵜利光, 橋本篤人, 藤裏弘樹, 松沼悟, 井上鉄太郎, 土井嗣裕, 中川茂樹

    日本応用磁気学会学術講演概要集   31st   265   2007.9

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  • MTJ elements with MgO barrier using RE-TM amorphous layers for perpendicular MRAM Reviewed

    T. Hatori, H. Ohmori, M. Tada, S. Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   43 ( 6 )   2331 - 2333   2007.6

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  • テープ基板上へのCoPtCr‐SiO2面内磁気記録媒体とRu‐O/Ru下地層による垂直磁気記録媒体の作製と評価

    松鵜利光, 橋本篤人, 藤裏弘樹, 松沼悟, 井上鉄太郎, 土井嗣裕, 中川茂樹

    次世代磁気記録材料・システムへの挑戦   20   2007

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  • Origin of High Magnetic Anisotropy Field in Fe-Co-B/Ni-Fe/Si Soft Magnetic Underlayer

    OKAMOTO T., KONG S. H., NAKAGAWA S.

    Journal of the Magnetics Society of Japan   29 ( 1 )   37 - 40   2005

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    Layers composed of Fe-Co-B layer and Ni-Fe (/Si) underlayer were prepared to increase the magnetic anisotropy field Hk for a greater signal to noise ratio (SNR). Fe-Co-B films with saturation magnetization Ms of 23 kG deposited on Ni-Fe seedlayer exhibited a low Hc of 0.6 Oe in the hard axis and a very high Hk of about 300 Oe. The magnitude of Hk depends on the condition of Ar gas pressure. The direction of depositing particles had an important role in the magnitude and direction of Hk. we proved that the mechanism to increase Hk : The magnetoelastic effect organized the difference of in-plane lattice spacing.

    DOI: 10.3379/jmsjmag.29.37

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  • Improvement of the Characteristics of Thin Films Using Multilayers with Strontium Ferrite Replaced by La3+ and Co2+

    Matsuno K., Mizuno K., Nakagawa S.

    Journal of the Magnetics Society of Japan   29 ( 6 )   649 - 652   2005

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    Thin films of hexagonal magneto-plumbite-type strontium ferrite with La3+ and Co2+ thin films (LaCo-SrM) substituted for Fe3+ and Sr2+ as magnetic layer with a Pt underlayer were prepared by using a facing targets sputtering system and a flash-annealing process. After the films had been deposited at a low temperature of 250°C, which was not sufficient for crystallization, the specimens were flash-annealed at a high temperature of 900°C for a few minutes. A 22-nm-thick LaCo-SrM film revealed a coercivity of 5.2 kOe, a squareness of 0.85, and a particle size of 20 nm, respectively. To further improve the magnetic properties, LaCo-SrM/Pt multilayered thin films composed of three periods were prepared. The coercivity and squareness of a 78-nm-thick (total thickness of magnetic layers) LaCo-SrM multilayered film were as high as 5.5 kOe and 0.97, respectively. The particle size was also reduced to 18 nm. Stacking the LaCo-SrM in a multilayered structure was found to be effective for improving the magnetic properties necessary for high-density recording media.

    DOI: 10.3379/jmsjmag.29.649

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  • [Ni-Fe/Si] double seedlayer with low surface energy for Fe-Co-B soft magnetic underlayer with high H-k for perpendicular magnetic recording media

    SH Kong, T Okamoto, S Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   40 ( 4 )   2389 - 2391   2004.7

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  • Effect of intermediate layer at recording layer/soft magnetic underlayer interface in perpendicular recording media observed by ferromagnetic Hall effect

    S Das, SH Kong, S Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   40 ( 4 )   2464 - 2466   2004.7

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  • Microstructure and magnetic properties in FeCoB/NiFe double layer

    SH Kong, T Okamoto, S Nakagawa

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   272   2184 - 2185   2004.5

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  • Fabrication of FePt Ordered Alloy Films by Annealing in Hydrogen Atmosphere

    KAMIKI T., NAKAGAWA S.

    Journal of the Magnetics Society of Japan   28 ( 3 )   330 - 334   2004

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    The magnetic characteristics of FePt bilayers annealed in various atmospheres were investigated. The in-plane coercivity of FePt bilayers changed markedly in response to the annealing atmosphere. FePt bilayers annealed in hydrogen atmosphere exhibited coercivities of several kOe above 400°C. However, specimens annealed in nitrogen and argon atmosphere did not exhibit FePt ordered phase. X-ray photoelectron spectroscopy study clarified that the oxygen introduced with Fe formed Fe2O3 and made interdiffusion between the Fe and Pt layers difficult. Suppression of inter-diffusion caused degeneration of ordered FePt phase. Annealing in hydrogen atmosphere was found to be effective for removing the oxygen, and led to the formation of FePt ordered phase during the annealing. Moreover, specimens annealed in a high-pressure hydrogen atmosphere showed higher in-plane coercivity than specimens annealed under low pressure. High-pressure annealing also decreased the ordering temperature from 400°C to 350°C.

    DOI: 10.3379/jmsjmag.28.330

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  • 水素アニールによるFePt規則合金作製

    神木太朗, 中川茂樹

    日本応用磁気学会誌   28 ( 3 )   330 - 334   2004

  • Evaluation of the Magnetization Process in Co/Pd Multilayers Using the Ferromagnetic Hall Effect

    Das S., Yoshikawa H., Nakagawa S.

    Journal of the Magnetics Society of Japan   28 ( 4 )   543 - 548   2004

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    The magnetization process in Co/Pd multilayers under a tilted magnetic field was studied using ferromagnetic Hall effect analysis. The loci of the tip of an effective magnetization vector were determined from the simultaneously detected anomalous and planar Hall voltage signals contributed by the perpendicular and in-plane magnetization components, respectively, inside a multilayered specimen. The evaluated magnetization reversal process exhibited a clear dependence on the multilayer structure due to the variation of the Co or Pd layer thickness. For different types of multilayers, Hall effect study under a tilted magnetic field revealed the difference in the magnetization reversal phenomenon, while no significant difference was detected in the characteristics measured in a perpendicular applied field.

    DOI: 10.3379/jmsjmag.28.543

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  • Effect of Hydrogen on the Preparation of Fe/Pt Multilayer

    Taro Kamiki, Shigeki Nakagawa

    Transactions of the Materials Research Society of Japan   29 ( 4 )   1565 - 1568   2004

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  • Co/Pd多層膜の表面状態と垂直方向磁気特性の関係

    吉川裕紀, 中川茂樹

    日本応用磁気学会誌   28 ( 3 )   263 - 266   2004

  • Soft Magnetic Fe-Co-B/Ni-Fe Double layer with High Magnetic Anisotropy Field

    Takeshi Okamoto Sok-Hyun Kong, Shigeki Nakagawa

    Transactions of the Materials Research Society of Japan   29 ( 4 )   1581 - 1584   2004

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  • Relationship between Surface Morphology and Perpendicular Magnetic Property of Co/Pd Multilayers

    H. Yoshikawa, S. Nakagawa

    Transactions of the Materials Research Society of Japan   29 ( 4 )   1573 - 1575   2004

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  • Evaluation of Magnetization process in Co/Pd multilayers using Ferromagnetic Hall effect

    Das S., Yoshikawa H., Nakagawa S.

    Journal of the Magnetics Society of Japan   28 ( 4 )   543 - 548   2004

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    Language:Japanese   Publisher:The Magnetics Society of Japan  

    The magnetization process in Co/Pd multilayers under a tilted magnetic field was studied using ferromagnetic Hall effect analysis. The loci of the tip of an effective magnetization vector were determined from the simultaneously detected anomalous and planar Hall voltage signals contributed by the perpendicular and in-plane magnetization components, respectively, inside a multilayered specimen. The evaluated magnetization reversal process exhibited a clear dependence on the multilayer structure due to the variation of the Co or Pd layer thickness. For different types of multilayers, Hall effect study under a tilted magnetic field revealed the difference in the magnetization reversal phenomenon, while no significant difference was detected in the characteristics measured in a perpendicular applied field.

    DOI: 10.3379/jmsjmag.28.543

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  • Improvement of perpendicular coercivity of Hexagonal M-type ferrite thin films on Pt underlayer prepared by flash-annealing

    K.Matsuno, K.Mizuno, S.Nakagawa

    Transactions of the Materials Research Society of Japan   29 ( 4 )   1607 - 1610   2004

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  • Effect of surface morphology on magnetic property of Co/Pd multilayers

    YOSHIKAWA H., NAKAGAWA S.

    Journal of the Magnetics Society of Japan   28 ( 3 )   263 - 266   2004

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    The magnetic properties of Co/Pd multilayers seem to be strongly dependent on the surface and interface morphology of the films. Microstructure of the multilayers can be tailored by controlling the process conditions. Effect of two process conditions: (1) changing number of periods and (2) insertion of Pd underlayer, has been studied. In both conditions we have found a common relationship between surface roughness Ra and α(=4π(dM/dH) @H=Hc). Increase of surface roughness caused large decrease of α due to the decoupling of exchange interaction among the grains. In order to confirm the effects of Co and Pd layer roughness, respectively, [Co/Pd]20 multilayers were deposited at different Ar gas pressures PAr for each layer. The M-H characteristics of the films with Pd layers deposited at low PAr didn't reveal high coecivity Hc. AFM observation clarified that the deposition of Pd layers at high PAr enhances the surface roughness of the multilayers. It was found that a high PAr condition during Pd deposition is essential for high Hc.

    DOI: 10.3379/jmsjmag.28.263

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  • Evaluation of the Magnetization Process in Co/Pd Multilayers Using the Ferromagnetic Hall Effect

    Das S., Yoshikawa H., Nakagawa S.

    Journal of the Magnetics Society of Japan   28 ( 4 )   543 - 546   2004

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    Language:Japanese   Publisher:The Magnetics Society of Japan  

    The magnetization process in Co/Pd multilayers under a tilted magnetic field was studied using ferromagnetic Hall effect analysis. The loci of the tip of an effective magnetization vector were determined from the simultaneously detected anomalous and planar Hall voltage signals contributed by the perpendicular and in-plane magnetization components, respectively, inside a multilayered specimen. The evaluated magnetization reversal process exhibited a clear dependence on the multilayer structure due to the variation of the Co or Pd layer thickness. For different types of multilayers, Hall effect study under a tilted magnetic field revealed the difference in the magnetization reversal phenomenon, while no significant difference was detected in the characteristics measured in a perpendicular applied field.

    DOI: 10.3379/jmsjmag.28.543

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  • Effect of Hydrogen on the Preparation of Fe/Pt Multilayer

    Taro Kamiki, Shigeki Nakagawa

    Transactions of the Materials Research Society of Japan   29 ( 4 )   1565 - 1568   2004

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  • Soft Magnetic Fe-Co-B/Ni-Fe Double layer with High Magnetic Anisotropy Field

    Takeshi Okamoto Sok-Hyun Kong, Shigeki Nakagawa

    Transactions of the Materials Research Society of Japan   29 ( 4 )   1581 - 1584   2004

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  • Relationship between Surface Morphology and Perpendicular Magnetic Property of Co/Pd Multilayers

    H. Yoshikawa, S. Nakagawa

    Transactions of the Materials Research Society of Japan   29 ( 4 )   1573 - 1575   2004

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  • Improvement of characteristics of hexagonal M-type ferrite thin films on Pt underlayer prepared by flash-annealing

    Keisuke Matsuno, Keisuke Mizuno, Shigeki Nakagawa

    Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy   51 ( 3 )   178 - 183   2004

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    DOI: 10.2497/jjspm.51.178

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  • Improvement of perpendicular coercivity of Hexagonal M-type ferrite thin films on Pt underlayer prepared by flash-annealing

    K.Matsuno, K.Mizuno, S.Nakagawa

    Transactions of the Materials Research Society of Japan   29 ( 4 )   1607 - 1610   2004

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  • Effect of Surface Morphology on the Magnetic Properties of Co/Pd Multilayers

    YOSHIKAWA H., NAKAGAWA S.

    Journal of the Magnetics Society of Japan   28 ( 3 )   263 - 266   2004

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    Language:Japanese   Publisher:The Magnetics Society of Japan  

    The magnetic properties of Co/Pd multilayers seem to be strongly dependent on the surface and interface morphology of the films. Microstructure of the multilayers can be tailored by controlling the process conditions. Effect of two process conditions: (1) changing number of periods and (2) insertion of Pd underlayer, has been studied. In both conditions we have found a common relationship between surface roughness Ra and α(=4π(dM/dH) @H=Hc). Increase of surface roughness caused large decrease of α due to the decoupling of exchange interaction among the grains. In order to confirm the effects of Co and Pd layer roughness, respectively, [Co/Pd]20 multilayers were deposited at different Ar gas pressures PAr for each layer. The M-H characteristics of the films with Pd layers deposited at low PAr didn't reveal high coecivity Hc. AFM observation clarified that the deposition of Pd layers at high PAr enhances the surface roughness of the multilayers. It was found that a high PAr condition during Pd deposition is essential for high Hc.

    DOI: 10.3379/jmsjmag.28.263

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  • Fabrication of FePt Ordered Alloy Films by Annealing in Hydrogen Atmosphere

    KAMIKI T., NAKAGAWA S.

    Journal of the Magnetics Society of Japan   28 ( 3 )   330 - 334   2004

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    The magnetic characteristics of FePt bilayers annealed in various atmospheres were investigated. The in-plane coercivity of FePt bilayers changed markedly in response to the annealing atmosphere. FePt bilayers annealed in hydrogen atmosphere exhibited coercivities of several kOe above 400°C. However, specimens annealed in nitrogen and argon atmosphere did not exhibit FePt ordered phase. X-ray photoelectron spectroscopy study clarified that the oxygen introduced with Fe formed Fe2O3 and made interdiffusion between the Fe and Pt layers difficult. Suppression of inter-diffusion caused degeneration of ordered FePt phase. Annealing in hydrogen atmosphere was found to be effective for removing the oxygen, and led to the formation of FePt ordered phase during the annealing. Moreover, specimens annealed in a high-pressure hydrogen atmosphere showed higher in-plane coercivity than specimens annealed under low pressure. High-pressure annealing also decreased the ordering temperature from 400°C to 350°C.

    DOI: 10.3379/jmsjmag.28.330

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  • Preparation Method for Soft Magnetic Thin Film with High Saturation Magnetization and Ultra High Magnetic Anisotropy Field : Fe-Co-B Soft Magnetic Thin Film with Magnetic Anisotropy Field as high as 500 Oe

    KONG S. H., OKAMOTO T., ITO S., NAKAGAWA S.

    28 ( 5 )   693 - 693   2004

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  • Evaluation of magnetic interaction in [Co/Pd](n) multilayered thin film for perpendicular magnetic recording media under the tilted magnetic field

    S Das, H Yoshikawa, S Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   39 ( 5 )   2717 - 2719   2003.9

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  • Fe-Co-B/Ni-Fe soft magnetic underlayer with high-saturation magnetization for perpendicular magnetic recording media

    SH Kong, T Okamoto, S Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   39 ( 5 )   2285 - 2287   2003.9

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  • Soft magnetic underlayer with multilayer structure for perpendicular magnetic recording media

    SH Kong, T Okamoto, S Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   39 ( 5 )   2338 - 2340   2003.9

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  • Improvement of c-axis preferred orientation of CoCr-based thin film with amorphous Si underlayer

    YJ Kim, WH Park, SH Kong, S Nakagawa, KH Kim

    SURFACE & COATINGS TECHNOLOGY   169   532 - 535   2003.6

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  • Improvement of c-axis preferred orientation of CoCr-based thin film with amorphous Si underlayer

    YJ Kim, WH Park, SH Kong, S Nakagawa, KH Kim

    SURFACE & COATINGS TECHNOLOGY   169   532 - 535   2003.6

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  • Oxide seed layer with low surface energy to attain fine grains in magnetic layers

    SH Kong, K Mizuno, T Okamoto, S Nakagawa

    JOURNAL OF APPLIED PHYSICS   93 ( 10 )   6781 - 6783   2003.5

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  • Evaluation of magnetic interactions in a double-layered perpendicular magnetic recording media using ferromagnetic Hall effects

    S Das, S Kong, S Nakagawa

    JOURNAL OF APPLIED PHYSICS   93 ( 10 )   6772 - 6774   2003.5

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  • Low temperature deposition of c-axis oriented Sr-ferrite thin films prepared by facing targets sputtering with mixture gas of Ar and Kr

    S Nakagawa, K Mizuno, M Naoe

    JOURNAL OF APPLIED PHYSICS   93 ( 10 )   8170 - 8172   2003.5

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  • Improvement of soft magnetic properties of Fe-Co-B underlayer with large saturation magnetization by Ni-Fe-O seedlayers

    S Kong, T Okamoto, S Nakagawa

    JOURNAL OF APPLIED PHYSICS   93 ( 10 )   6778 - 6780   2003.5

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  • Simultaneous detection of perpendicular and in-plane magnetization component in a [Co/Pd](n) perpendicular magnetic recording media

    S Das, H Yoshikawa, S Nakagawa

    JOURNAL OF APPLIED PHYSICS   93 ( 10 )   8098 - 8100   2003.5

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  • Evaluation of Characteristic Distribution in the Direction of Film Thickness in Co/Pd Multilayers

    YOSHIKAWA H., KONG S. H., NAKAGAWA S.

    Journal of the Magnetics Society of Japan   27 ( 4 )   215 - 219   2003

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    The Ar gas pressure PAr, the thicknesses of Co and Pd layers, and the number of layers were optimized in Co/Pd multilayers for perpendicular magnetic recording media. A high squareness ratio S and high coercivity Hc were obtained in a [Co (0.2 nm)/Pd (0.6 nm)]20 film prepared at PAr of 30 mTorr. The relationship between the surface roughness Ra and Hc was examined. It was concluded that the top region of the multilayers exhibited higher Hc, while the bottom region revealed degraded Hc. Large Ra and smaller grain size are essential for attaining high Hc in Co/Pd multilayers.

    DOI: 10.3379/jmsjmag.27.215

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  • Evaluation of Magnetic Interaction among Magnetic Particles in [Co/Pd]_n Multilayers Using Ferromagnetic Hall Effects

    DAS Sarbanoo, YOSHIKAWA Hironori, NAKAGAWA Shigeki

    Journal of the Magnetics Society of Japan   27 ( 4 )   220 - 223   2003

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    The inclination of the magnetization characteristic around the coercivity, λ(=(dM/dH)H=Hc), of a perpendicular magnetic recording medium is regarded attributable to magnetic interactions among magnetic grains in the medium. Magnetic interactions in [Co/Pd]n multilayer films with strong perpendicular magnetic anisotropy and different λ were studied using ferromagnetic Hall effect measurement, which detects the behavior of the perpendicular magnetization component even when an inclined magnetic field is applied. Specimens with high λ at Hc revealed a sharper and larger positive peak in the ΔV curves an evaluation index for magnetic interaction using the Hall effect than whose with low λ, indicating the dominance of strong exchange interaction among the particles.

    DOI: 10.3379/jmsjmag.27.220

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  • Magnetization processes of storage and back layers in double-layered perpendicular magnetic recording media observed using anomalous and planar Hall effects

    S Nakagawa, Sasaki, I, M Naoe

    JOURNAL OF APPLIED PHYSICS   91 ( 10 )   8354 - 8356   2002.5

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  • Study of magnetization process in Co-Cr-Ta media and Co/Pt multilayered media by Anomalous Hall effect analysis

    Sarbanoo Das, Shigeki Nakagawa

    Transactions of the Magnetic Society of Japan   2 ( 2 )   19 - 22   2002

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  • 高密度磁気記録技術の開発動向と薄膜技術

    中川茂樹

    真空ジャーナル   ( 84 )   25 - 28   2002

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  • 磁気記録用磁性薄膜の新展開

    中川茂樹

    工業材料   49 ( 12 )   42 - 45   2002

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  • Improvement of the Soft Magnetic Properties of the Backlayer in Perpendicular Magnetic Recording Media through the use of [Ni-Fe/Si]n Multilayers.

    Kong S. H., Nakagawa S.

    Journal of the Magnetics Society of Japan   26 ( 4 )   253 - 257   2002

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    Multilayers composed of Ni-Fe and amorphous Si interlayers were perpared in order to improve the soft magnetic properties and surface smoothness of the soft magnetic backlayer and reduce media noise originating in the domain walls. The magnetic structure, such as stripe domains, of the soft magnetic backlayer was restrained. Excellent c-axis orientation as well as high perpendicular coercivity of the Co-Cr-Ta recording layer was attained. It was revealed that [Ni-Fe/Si]n multilayers were suitable for improving the soft magnetic properties of the backlayer.

    DOI: 10.3379/jmsjmag.26.253

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  • Study of magnetization process in Co-Cr-Ta media and Co/Pt multilayered media by Anomalous Hall effect analysis

    Sarbanoo Das, Shigeki Nakagawa

    Transactions of the Magnetic Society of Japan   2 ( 2 )   19 - 22   2002

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  • Perpendicular magnetic recording media using hexagonal ferrite thin films deposited on Pt underlayers and interlayers

    S Nakagawa, N Matsushita, M Naoe

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   235 ( 1-3 )   337 - 341   2001.10

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  • Perpendicular magnetic recording media using hexagonal ferrite thin films deposited on Pt underlayers and interlayers

    Shigeki Nakagawa, Nobuhiro Matsushita, Masahiko Naoe

    Journal of Magnetism and Magnetic Materials   235 ( 1-3 )   337 - 341   2001.10

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  • Fabrication and recording characteristics of sputter-deposited Ba-ferrite thin films deposited on Pt-Ta underlayers for perpendicular magnetic recording media

    S Nakagawa, N Funabashi, J Feng, M Naoe

    IEICE TRANSACTIONS ON ELECTRONICS   E84C ( 9 )   1137 - 1141   2001.9

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  • BaM/Pt multilayered films with fine grains and large perpendicular magnetic anisotropy for high density recording media

    N Matsushita, J Feng, N Funabashi, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   89 ( 11 )   6837 - 6839   2001.6

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  • High Coercivity and Large Squareness of Ba Ferrite Films by Adding SiO_2_ and Substituting Al for Fe

    N. Funabashi, J. Feng, N. Matsushita, S. Nakagawa, M. Naoe

    Proc. of the 8th International Conference on Ferrites (ICF8)   1035 - 1037   2001

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  • Ultra-high density recording characteristics of as-deposited ferrite thin film disks without post-annealing process and protective layers

    Shigeki Nakagawa, Nobuhiro Matsushita, Masahiko Naoe

    Proc. of the 8th International Conference on Ferrites (ICF8)   1027 - 1031   2001

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  • High Coercivity and Large Squareness of Ba Ferrite Films by Adding SiO_2_ and Substituting Al for Fe

    N. Funabashi, J. Feng, N. Matsushita, S. Nakagawa, M. Naoe

    Proc. of the 8th International Conference on Ferrites (ICF8)   1035 - 1037   2001

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  • Extremely Thin Barium Ferrite Layers with Excellent c-axis Orientation and High Coercivity

    N. Matsushita, S. Nakagawa, M. Naoe

    Proc. of the 8th International Conference on Ferrites (ICF8)   1041 - 1043   2001

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  • Low Transition Noise Level of Co-Fe Ferrite with Pt Interlayer

    S. Saito, T, Murakoso, N. Matsushita, S. Nakagawa, M. Naoe

    Proc. of the 8th International Conference on Ferrites (ICF8)   1076 - 1078   2001

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  • BaM/Pt and BaM/Pt-Ta Bilayer Disks for Perpendicular Magnetic Recording

    J. Feng, N. Funabashi, N. Matsushita, S. Nakagawa, M. Naoe

    Proc. of the 8th International Conference on Ferrites (ICF8)   1038 - 1040   2001

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  • Ultra-high density recording characteristics of as-deposited ferrite thin film disks without post-annealing process and protective layers

    Shigeki Nakagawa, Nobuhiro Matsushita, Masahiko Naoe

    Proc. of the 8th International Conference on Ferrites (ICF8)   1027 - 1031   2001

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  • Extremely Thin Barium Ferrite Layers with Excellent c-axis Orientation and High Coercivity

    N. Matsushita, S. Nakagawa, M. Naoe

    Proc. of the 8th International Conference on Ferrites (ICF8)   1041 - 1043   2001

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  • Improvement of Crystallinity and GMR Characteristics of Co/Cu Multilayers Using Si Buffer Layer

    SAITO H., SHIMIZU Y., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   25 ( 4-2 )   803 - 806   2001

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    Co/Cu multilayers using Si buffer layers revealed good crystallinity and lower resistivity than those using other buffer layers. The periodicity and sharpness at the interface between layers were not as good as those in a multilayer using other buffer layers. Therefore the multilayer using Si buffer layer showed lower resistivity but a slightly smaller change in resistivity Δρ. The MR ratio for the multilayer with an Si buffer layer was 11.1 % in as-deposited state. The annealing process improved the periodicity in the Co/Cu multilayer using an Si buffer layer, and the MR ratio for the multilayer using an Si buffer layer (17.1 %) became larger than any of those for multilayers.

    DOI: 10.3379/jmsjmag.25.803

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  • Observation of the Magnetization Process of a Perpendicular Recording Layer with Anomalous Hall Effect

    SASAKI I., SATO A., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   25 ( 4-2 )   599 - 602   2001

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    It is very useful to evaluate the magnetization vector in extremely thin films by combining the results determined by Hall voltage measurement and those observed by the conventional VSM method. Major and minor loops of a 30-nm-thick Co-Cr-Ta single layer implied that a magnetization reversal occurs mainly in the in-plane direction at a relatively low magnetic field. On the other hand, a 30-nm-thick Co-Cr-Ta film deposited on a (111) plane-oriented Pt underlayer revealed a more definite c-axis orientation than the Co-Cr-Ta single layer. Magnetization reversal of Co-Cr-Ta/Pt film occurs mainly in a direction perpendicular to the film, in spite of its large perpendicular anisotropy.

    DOI: 10.3379/jmsjmag.25.599

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  • Low Transition Noise Level of Co-Fe Ferrite with Pt Interlayer

    S. Saito, T, Murakoso, N. Matsushita, S. Nakagawa, M. Naoe

    Proc. of the 8th International Conference on Ferrites (ICF8)   1076 - 1078   2001

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  • BaM/Pt and BaM/Pt-Ta Bilayer Disks for Perpendicular Magnetic Recording

    J. Feng, N. Funabashi, N. Matsushita, S. Nakagawa, M. Naoe

    Proc. of the 8th International Conference on Ferrites (ICF8)   1038 - 1040   2001

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  • Addition of SiO2 to increase coercivity and squareness ratio of Ba ferrite films for perpendicular magnetic recording media

    J Feng, N Funabashi, N Matsushita, S Nakagawa, M Naoe

    IEICE TRANSACTIONS ON ELECTRONICS   E83C ( 9 )   1489 - 1493   2000.9

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  • Co-Cr-Ta perpendicular magnetic recording media using Pt seed layer

    A Sato, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   36 ( 5 )   2387 - 2389   2000.9

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  • Improvement of read/write characteristics of sputtered Ba ferrite disks by adding Ta into Pt underlayers

    J Feng, N Funabashi, T Murakoso, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   36 ( 5 )   2408 - 2410   2000.9

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  • Co-Cr-Ta/Pt bilayered films for perpendicular magnetic recording media

    A Sato, S Nakagawa, M Naoe

    IEICE TRANSACTIONS ON ELECTRONICS   E83C ( 9 )   1462 - 1466   2000.9

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  • Addition of SiO2 to increase coercivity and squareness ratio of Ba ferrite films for perpendicular magnetic recording media

    J Feng, N Funabashi, N Matsushita, S Nakagawa, M Naoe

    IEICE TRANSACTIONS ON ELECTRONICS   E83C ( 9 )   1489 - 1493   2000.9

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  • Increase of coercivity and squareness ratio of Ba ferrite thin films by adding SiO2 and substituting Al for Fe

    J Feng, N Funabashi, N Matsushita, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   36 ( 5 )   2930 - 2932   2000.9

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  • Improvement of crystallinity and magnetic characteristics of ferromagnetic-Co77Cr20Ta3/paramagnetic-Co65Cr35 bilayered films

    A Sato, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   36 ( 5 )   2936 - 2938   2000.9

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  • Observation of magnetization reversal processes in Co–Cr and Co–Cr–Ta ultrathin films under the canted magnetic field using anomalous Hall effect

    Shigeki Nakagawa, Atsushi Sato, Ichiro Sasaki, Masahiko Naoe

    Journal of Applied Physics   87 ( 9 )   5705 - 5707   2000.5

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    DOI: 10.1063/1.372496

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  • Observation of magnetization reversal processes in Co–Cr and Co–Cr–Ta ultrathin films under the canted magnetic field using anomalous Hall effect

    Shigeki Nakagawa, Atsushi Sato, Ichiro Sasaki, Masahiko Naoe

    Journal of Applied Physics   87 ( 9 )   5705 - 5707   2000.5

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    DOI: 10.1063/1.372496

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  • a-Si buffer layer for improvement of crystallographic and magnetoresistance characteristics of Co/Cu multilayers

    Y Shimizu, K Nishimura, H Saito, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   87 ( 9 )   5158 - 5160   2000.5

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  • Strict control of grain size in Co-Cr-Ta recording layer for longitudinal magnetic media by intermittently depositing Cr underlayer

    T Fukuda, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   87 ( 9 )   6349 - 6351   2000.5

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  • Strict control of grain size in Co-Cr-Ta recording layer for longitudinal magnetic media by intermittently depositing Cr underlayer

    T Fukuda, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   87 ( 9 )   6349 - 6351   2000.5

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  • Perpendicular Magnetic Recording Media Using Hexagonal Ferrite Thin Films Deposited on Pt Underlayers and Interlayers

    Shigeki Nakagawa, Masahiko Naoe

    Digests of PMRC 2000   161 - 162   2000

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  • Crystallographic and GMR Characteristics of Co/Cu Multilayers Deposited on Si Underlayer

    Hiroyuki Saito, Shigeki Nakagawa, Masahiko Naoe

    Digests of PMRC 2000   103 - 104   2000

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  • Perpendicular Magnetic Recording Media Using Hexagonal Ferrite Thin Films Deposited on Pt Underlayers and Interlayers

    Shigeki Nakagawa, Masahiko Naoe

    Digests of PMRC 2000   161 - 162   2000

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  • Perpendicular Magnetic Recording Media Using Pt/Ti Underlayers and Pt Interlayers

    Atsushi Sato Sok, Hyun Kong, Shigeki Nakagawa, Masahiko Naoe

    Digests of PMRC2000   49 - 50   2000

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  • Simultaneous Observations of Magnetization Processes in Co-Cr Recording Layer and Ni-Fe Back Layer Using Anomalous and Planar Hall Effects

    Ichiro Sasaki, Shigeki Nakagawa, Masahiko Naoe

    Digests of PMRC 2000   57 - 58   2000

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  • Co-Cr-Ta/Pt Bilayered Films for Perpendicular Magnetic Recording Media

    Atsushi Sato, Shigeki Nakagawa, Masahiko Naoe

    IEICE Transactions on Electronics   E83-C ( 9 )   1462 - 1466   2000

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  • Addition of SiO_2_ to increase Coercivity and Squareness Ratio of BaFerrite Films for Perpendicular Magnetic Recording Media

    Jie Feng Nobuhiko Funabashi Nobuhiro Matsushita Shigeki Nakagawa, Masahiko Naoe

    IEICE Transactions on Electronics   E83-C ( 9 )   1462 - 1466   2000

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  • a-Si Buffer Layer for Improvement of Crystallograpic and MR Characteristics of Co/Cu Multilayeres

    Yutaka Shimizu, Koichi Nishimura, Shigeki Nakagawa, Masahiko Naoe

    J.Appl.Phys.   87 ( 9 )   5158 - 5160   2000

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  • Simultaneous Observations of Magnetization Processes in Co-Cr Recording Layer and Ni-Fe Back Layer Using Anomalous and Planar Hall Effects

    Ichiro Sasaki, Shigeki Nakagawa, Masahiko Naoe

    Digests of PMRC 2000   57 - 58   2000

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  • Crystallographic and GMR Characteristics of Co/Cu Multilayers Deposited on Si Underlayer

    Hiroyuki Saito, Shigeki Nakagawa, Masahiko Naoe

    Digests of PMRC 2000   103 - 104   2000

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  • Magnetic characteristics of (La,Sr)MnO3 films deposited by facing target sputtering system

    Tatsuo Namikawa, Shigeki Nakagawa, Kumiko Kaneta, Nobuhiro Matsushita, Masahiko Naoe

    Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy   47 ( 2 )   175 - 178   2000

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    DOI: 10.2497/jjspm.47.175

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  • Perpendicular Magnetic Recording Media Using Pt/Ti Underlayers and Pt Interlayers

    Atsushi Sato Sok, Hyun Kong, Shigeki Nakagawa, Masahiko Naoe

    Digests of PMRC2000   49 - 50   2000

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  • Optimization of the Substrate Temperature for a Paramagnetic Seed Layer in a Co-Cr Perpendicular Recording Medium

    SATO A., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   24 ( 4-2 )   267 - 270   2000

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    Ferromagnetic Co77Cr20Ta3 layers were deposited on paramagnetic Co65Cr35 and Pt seed layers. The crystallographic and magnetic characteristics of the Co-Cr-Ta layer were improved by independently adjusting the substrate temperature Ts of the Co65Cr35 seed layer in the range 150°C - 200°C. The Pt seed layer results in better c-axis orientation even at a low Ts of around 250°C, and a 50-nm-thick Co-Cr-Ta layer deposited on it exhibited a high perpendicular coercivity Hc⊥ of 2.5 kOe at a Ts of 250°C. Optimization of Ts for the paramagnetic Co-Cr layer and use of the Pt seed layer were effective for depositing ultra-thin Co-Cr-Ta recording layers.

    DOI: 10.3379/jmsjmag.24.267

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  • Microstructure and magnetic properties of ferrite thin films prepared by sputtering and plating

    Yoshitaka Kitamoto, Shigeki Nakagawa, Masanori Abe, Masahiko Naoe

    Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy   47 ( 2 )   165 - 170   2000

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    DOI: 10.2497/jjspm.47.165

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  • Compensation for the Demagnetizing Field in Remanence Measurements of Perpendicular Magnetic Recording Films

    FENG J., MATSUSHITA N., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   24 ( 4-2 )   267 - 270   2000

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    Remanence measurements are very useful for estimating the characteristics of intergranular magnetic interactions in recording layers. However, it is necessary to compensate for the demagnetizing field in remanence measurements of perpendicular magnetic recording films. In this study, a new method of compensating for the demagnetizing field is proposed and an effective reverse field Heff is used to evaluate the dc demagnetization measurements, isothermal remanent magnetization measurements, and ΔM for perpendicular magnetic recording films.

    DOI: 10.3379/jmsjmag.24.251

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  • Deposition of paramagnetic Co4Cr2 seed layer for ferromagnetic Co5Cr1 recording layer in high density perpendicular media

    A Sato, M Hatakeyama, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   35 ( 5 )   2742 - 2744   1999.9

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  • Deposition of paramagnetic Co4Cr2 seed layer for ferromagnetic Co5Cr1 recording layer in high density perpendicular media

    A Sato, M Hatakeyama, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   35 ( 5 )   2742 - 2744   1999.9

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  • Annealing effect on magnetic characteristics on (La,Sr)MnO3 sputtered films

    T Namikawa, K Kaneta, N Matsushita, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   35 ( 5 )   2850 - 2852   1999.9

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  • Annealing effect on magnetic characteristics on (La,Sr)MnO3 sputtered films

    T Namikawa, K Kaneta, N Matsushita, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   35 ( 5 )   2850 - 2852   1999.9

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  • Study of perpendicular magnetic anisotropy in ultra-thin Co-Cr films evaluated by anomalous Hall effect

    S Nakagawa, K Takayama, A Sato, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   35 ( 5 )   2739 - 2741   1999.9

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  • Deposition of C-axis oriented BaM ferrite layers with low surface roughness on textured underlayers

    M Naoe, N Matsushita, K Watanabe, M Ichinose, S Nakagawa

    IEEE TRANSACTIONS ON MAGNETICS   35 ( 5 )   3016 - 3018   1999.9

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  • Development of high density perpendicular magnetic recording system using a probe head of sharpened optical fiber

    S Nakagawa, K Hiraide, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   35 ( 5 )   3130 - 3132   1999.9

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  • Improvement of crystallinity and exchange bias field in reverse type Ni-Fe/FeMn bilayers using Si/Ni-Fe composite type of underlayers

    S Nakagawa, K Nishimura, Y Shimizu, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   35 ( 5 )   2970 - 2972   1999.9

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  • Al substituted Ba ferrite films with high coercivity and excellent squareness for low noise perpendicular recording layer

    J Feng, N Matsushita, K Watanabe, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   85 ( 8 )   6139 - 6141   1999.4

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  • Ultrathin Si buffer layers to improve the exchange bias between Ni-Fe and FeMn layers

    S Nakagawa, K Nishimura, Y Shimizu, M Naoe

    JOURNAL OF APPLIED PHYSICS   85 ( 8 )   4934 - 4936   1999.4

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  • Al substituted Ba ferrite films with high coercivity and excellent squareness for low noise perpendicular recording layer

    J Feng, N Matsushita, K Watanabe, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   85 ( 8 )   6139 - 6141   1999.4

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  • Study of magnetization reversal mechanism of very thin film with perpendicular magnetic anisotropy by means of the anomalous Hall effect

    S Nakagawa, K Takayama, A Sato, M Naoe

    JOURNAL OF APPLIED PHYSICS   85 ( 8 )   4592 - 4594   1999.4

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  • Study of initial growth region of CO83Cr17 in Co83Cr17/Co67Cr33/Cr trilayered films for longitudinal recording media

    S Nakagawa, M Hatakeyama, K Takayama, M Naoe

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   193 ( 1-3 )   63 - 67   1999.3

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  • Study of initial growth region of CO83Cr17 in Co83Cr17/Co67Cr33/Cr trilayered films for longitudinal recording media

    S Nakagawa, M Hatakeyama, K Takayama, M Naoe

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   193 ( 1-3 )   63 - 67   1999.3

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  • Relationship between coercivity and deposition conditions of Ba ferrite films prepared by facing targets sputtering apparatus

    N Matsushita, J Feng, T Siosawa, S Nakagawa, M Naoe

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   193 ( 1-3 )   121 - 123   1999.3

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  • Effects of Al substitution for Fe in Ba ferrite thin films

    J Feng, N Matsushita, T Murakoso, S Nakagawa, M Naoe

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   193 ( 1-3 )   152 - 154   1999.3

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  • Co-Zn ferrite films prepared by facing targets sputtering system for longitudinal recording layer

    N Matsushita, M Ichinose, S Nakagawa, M Naoe

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   193 ( 1-3 )   68 - 70   1999.3

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  • Plasma Diagnosis and Low-Substrate-Temperature Deposition of Ba Ferrite Films in a Damage-Free Sputtering Apparatus with Mixed Gases

    N.Matsushita, K.Noma, S.Nakagawa, Masahiko Naoe

    Vacuum   51 ( 4 )   543 - 548   1999

  • Reactive sputter-deposition of ferrite film on Pt underlayer and their crystal growth

    N. Matsushita, J. Feng, T, Murakoso, N. Funabashi, S. Nakagawa, M. Naoe

    The Fifth International Symposium on Sputtering and Plasma Processes   9 - 10   1999

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  • Preparation of Ba Ferrite Films Using Pt and Au Underlayers.

    Ichinose M., Murakoso T., Matsushita N., Nakagawa S., Naoe M.

    Journal of the Magnetics Society of Japan   23 ( 4-2 )   1205 - 1208   1999

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    Language:Japanese   Publisher:The Magnetics Society of Japan  

    Ba ferrite films with excellent c-axis orientation were deposited on Au(111) and Pt(111) underlayers at substrate temperatures Ts higher than 500°C. C-axis orientation was also achieved by depositing the films at Ts in the range from 300°C to 400°C and then annealing in air. The specimen films exhibited low perpendicular coercivity in the range from 0.5 to 0.8 kOe.<BR>The surface of as-deposited BaM/Au film looked rough, and the in-plane coercivity Hc// was high. For as-deposited BaM/Pt film, the average center-line roughness Ra was as small as about 1.7 nm, and the perpendicular and in-plane coercivity were 2.5 kOe and 0.3 kOe, respectively. These results suggested that it might be possible to use BaM/Pt for a perpendicular magnetic recording layers.

    DOI: 10.3379/jmsjmag.23.1205

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  • Magnetic Characteristics of Al-substituted BaM Ferrite Films.

    Feng J., Watanabe K., Matsushita N., Nakagawa S., Naoe M.

    Journal of the Magnetics Society of Japan   23 ( 4-2 )   1213 - 1216   1999

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    Al-substituted Ba ferrite (Al-BaM) films with a composition of BaAlxFe12-xO19 (Al content x = 0,1,2) were deposited on SiOx/Si wafers with Pt seed layers. A post-annealing process and high substrate temperature Ts are necessary to crystallize the films. With an increase of the Al content x in Al-BaM ferrite films, the saturation magnetization 4πMs decreased, while the perpendicular coercivity Hc⊥ increased, reaching over 3.3 kOe. The perpendicular squareness ratio S was increased to about 0.9 by substitution of Al for Fe. The Al-BaM ferrite films with suitable Hc⊥ and large S prepared in this study may be applicable as perpendicular magnetic recording layers with low noise levels.

    DOI: 10.3379/jmsjmag.23.1213

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  • Pt下地層上の超薄Co-Cr合金垂直磁化膜の特性改善

    中川茂樹, 佐藤厚, 佐々木一郎, 直江正彦

    日本応用磁気学会論文誌   23 ( S2 )   59 - 62   1999

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  • Measurement of the Anomalous Hall Effect and Evaluation of the Magnetization Characteristics of Co-Cr Perpendicular Magnetic Thin Films.

    Sato A., Takayama K., Sakamaki N., Nakagawa S., Naoe M.

    Journal of the Magnetics Society of Japan   23 ( 4-2 )   1181 - 1185   1999

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    The Magnetization characteristics of Co-Cr thin films deposited by facing-targets sputtering were studied by observation of the anomalous Hall effect. The induced Hall voltage became larger with decreasing film thickness and reached a maximum value when the magnetic field was applied perpendicular to the film plane. From the results, it was found that a Co-Cr film, with a sufficiently small c-axis dispersion angle, could be magnetized easily in a direction to its plane regardless of the angle of the applied field. The shapes of the normalized Hall loop for 80 Å and 150 Å thick films were compared with the shapes of the loops observed by both VSM and the Kerr loop tracer method. The results suggest that the magnetic characteristics of the Co-Cr film could be detected even the thickness below 100 Å.

    DOI: 10.3379/jmsjmag.23.1181

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  • Analysis of stray magnetic field at the substrate and effect of applying external magnetic field in facing targets sputtering

    T Ichihara, S Nakagawa, M Naoe

    VACUUM   51 ( 4 )   715 - 718   1998.12

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  • Effects of ion bombardment to interfaces on residual internal stress and crystallite structures on multilayered films

    Y Miyamoto, K Watanabe, S Nakagawa, M Naoe

    VACUUM   51 ( 4 )   711 - 714   1998.12

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  • Improvement of GMR characteristics in [Ni81Fe19/Cu] multilayers by interfacial modulation technique using Kr ions

    Y Miyamoto, K Watanabe, K Nishimura, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   34 ( 4 )   921 - 923   1998.7

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  • Improvement of GMR characteristics in [Ni81Fe19/Cu] multilayers by interfacial modulation technique using Kr ions

    Y Miyamoto, K Watanabe, K Nishimura, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   34 ( 4 )   921 - 923   1998.7

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  • Nano-size magnetic crystallite formation in Co-Cr thin films for perpendicular recording media

    S Kadokura, M Naoe, S Nakagawa, Y Maeda

    IEEE TRANSACTIONS ON MAGNETICS   34 ( 4 )   1642 - 1644   1998.7

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  • Three-dimensional analysis of dual track complementary type of heads for perpendicular magnetic recording

    T Ichihara, S Nakagawa, H Matsumiya, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   34 ( 4 )   1489 - 1491   1998.7

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  • Preparation and characteristics of Co-Zn ferrite rigid disks without protective layers for high density recording

    N Matsushita, M Ichinose, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   34 ( 4 )   1639 - 1641   1998.7

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  • Preparation of soft magnetic films of nanocrystalline Fe-Cu-Nb-Si-B alloy by facing targets sputtering

    M Naoe, H Matsumiya, T Ichihara, S Nakagawa

    JOURNAL OF APPLIED PHYSICS   83 ( 11 )   6673 - 6675   1998.6

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  • Increase of enormous magnetic resistance change by interface mixing using ion beam.

    中川茂樹, 宮本泰敬, 渡辺健太郎, 西村高一, 直江正彦

    表面技術協会講演大会講演要旨集   97th   1998

  • Control of Microcrystal Structure of BaM Ferrite Films with Perpendicular Magnetic Anisotropy Deposited Using Plasma-Free Sputtering System

    NOMA Kenji, MATSUSHITA Nobuhiro, NAKAGAWA Shigeki, NAOE Masahiko

    Journal of the Magnetics Society of Japan   22 ( S1 )   120 - 122   1998

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    &nbsp;&nbsp;Ba ferrite films composed of microcrystallites with well c-axis orientation which seem to be suitable for perpendicular magnetic recording media were deposited using various sputtering apparatus and their microstructural and magnetic characteristics were investigated. The bombardment of energetic particles to the film during deposition and the elevation of substrate temperature strongly affected the growth prcess of Ba ferrite crystallites and the increase of perpendicular coercivity. The films deposited using Facing Targets Sputtering apparatus at the substrate temperature as low as 475&deg;C revealed that they were composed of nanocrystallites with the grain size below 100 nm and exhibited the coercivity of as high as 2.3 kOe.

    DOI: 10.3379/jmsjmag.22.S1_120

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  • Preparation of Ba Ferrite Film with c-axis Orientation Using Pt Underlayer

    Tomoyoshi Siosawa, Nobuhiro Matsushita Shigeki Nakagawa, Masahiko Naoe

    J. of Magnetics Soc. of Japan   22 ( S1 )   123 - 125   1998

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    &nbsp;&nbsp;Ba ferrite/Pt bilayered films were deposited on thermally oxidized Si wafers using plasma-free sputtering apparatus and post-annealed at 800&deg;C in air for 15 min, and then, the dependence of crystallographical and magnetic characteristics at the substrate temperature Ts in the range from room temperature to 550&deg;C were investigated. Although Ba ferrite films deposited directly on the substrates revealed random c-axis orientation, the Ba ferrite layer deposited on Pt underlayer at Ts above 200&deg;C and post-annealed revealed excellent c-axis orientation. They exhibited the saturation magnetization 4&pi;Ms of 4.2 kG and almost same in-plane and perpendicular coercivity Hc|| and Hc&perp; of 0.7 kOe. The film deposited at Ts above 500&deg;C exhibited 4&pi;Ms of 4.6 kG and high Hc&perp; of 1.8 kOe.

    DOI: 10.3379/jmsjmag.22.S1_123

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  • Crystal Structure and Magnetic Characteristics of(La, Sr)MnO┣D23┫D2 Films Deposited by Kr Sputtering

    Tatsuo Namikawa Jie Feng, Kumiko Kaneta Nobuhiro Matsushita, Shigeki Nakagawa, Masahiko Naoe

    J. of Magnetics Soc. of Japan   22 ( S1 )   203 - 205   1998

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  • Control of Magnetocrystalline Anisotropy of Co-Zn Ferrite Sputtered Films

    Nobuhiro Matsushita, Kenji Noma, Shigeki Nakagawa, Masahiko Naoe

    J. of Magnetics Soc. of Japan   22 ( S1 )   117 - 119   1998

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    &nbsp;&nbsp;Co ferrite and Co-Zn ferrite films were deposited on SiO2/Si substrates and quarts disks under various preparation conditions using the facing targets sputtering apparatus and their crystallographic, magnetic and read/write characteristics have been investigated. Co ferrite films deposited at partial oxygen gas pressure Po2 below 0.2 mTorr at various substrate temperature revealed (311) orientation and quasi in-plane magnetic anisotropy. High Ts above 500&deg;C and Po2 of 2.0 mTorr were necessary to obtain well (111) orientation which had isotropic orientation of magnetization and was suitable for high recording density media. On the other hand, Co-Zn ferrite films deposited at Ts up to 250&deg;C and PO2 of 0.01 mTorr had (111) orientation and possessed moderately large 4&pi;Ms of about 3.7 kG and almost the same in-plane and perpendicular coercivity of about 2.0 kOe. The (111) oriented Co-Zn ferrite disk exhibited high linear recording density D50 as high as 136 kfrpi.

    DOI: 10.3379/jmsjmag.22.S1_117

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  • Control of Microcrystal Structure of BaM Ferrite Films with Perpendicular Magnetic Anisotropy Deposited Using Plasma-Free Sputtering System

    Kenji Noma, Nobuhiro Matsushita Shigeki Nakagawa, Masahiko Naoe

    J. of Magnetics Soc. of Japan   22 ( S1 )   120 - 122   1998

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    &nbsp;&nbsp;Ba ferrite films composed of microcrystallites with well c-axis orientation which seem to be suitable for perpendicular magnetic recording media were deposited using various sputtering apparatus and their microstructural and magnetic characteristics were investigated. The bombardment of energetic particles to the film during deposition and the elevation of substrate temperature strongly affected the growth prcess of Ba ferrite crystallites and the increase of perpendicular coercivity. The films deposited using Facing Targets Sputtering apparatus at the substrate temperature as low as 475&deg;C revealed that they were composed of nanocrystallites with the grain size below 100 nm and exhibited the coercivity of as high as 2.3 kOe.

    DOI: 10.3379/jmsjmag.22.S1_120

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  • Effects of Sputtering Gas Species on Properties of Sputter-deposited Magnetic Thin Films

    NAKAGAWA Shigeki, NAOE Masahiko

    Jitsumu Hyomen Gijutsu   49 ( 10 )   1078 - 1082   1998

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    Language:Japanese   Publisher:The Surface Finishing Society of Japan  

    DOI: 10.4139/sfj.49.1078

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    Other Link: https://jlc.jst.go.jp/DN/JALC/00055558662?from=CiNii

  • Be Ferrite Films for Perpendicular Recording Layer with High Coercivity and Large Squareness

    Matsuda N., Feng J., Watanabe K., Murakoso T., Nakagawa S., Naoe M.

    Journal of the Magnetics Society of Japan   22 ( S3 )   27 - 31   1998

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    In the first half of this work, a magnetoplumbite-type of Ba ferrite (BaM) layers were deposited from BaFe11O19-y targets and BaFe13O19-y ones on a ZnO(001) underlayer in a gas mixture of Ar, Xe, and O2 using facing targets sputtering apparatus. It was clarified that a stoichiometric composition is necessary for preparing Ba ferrite films with large saturation magnetization 4πMs and excellent perpendicular anisotropy. Ba ferrite films deposited at optimum conditions exhibited large 4πMs of 4.7 kG and high perpendicular coercivity Hc⊥ of 2.4 kOe and low in-plane one Hc// of 0.2 kOe even when substrate temperature Ts was as low as 475°C. In the latter half of this work, Al substituted Ba ferrite films were deposited from BaFe11Al1O19-y targets and BaFe10Al2O19-y ones on Pt (111) underlayer for increasing Hc⊥ and perpendicular squareness Sc⊥. Although 4πMs decreased with increase of substitution amount x, Hc⊥ increased even for as-deposited films. S⊥ increased after annealing at 850-900°C for 15 min in air the maximum S⊥ of 0.91 was attained for films deposited from BaFe10Al2O19-y target.

    DOI: 10.3379/jmsjmag.22.S3_27

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  • Baフェライト磁気ディスクの低温作製と記録再生特性

    松下伸広, 馮潔, 塩澤友祥, 渡部康, 一瀬誠, 中川茂樹, 直江正彦

    日本応用磁気学会誌   49 ( 10 )   1078 - 1082   1998

  • PREPARATION OF Ba FERRITE FILM WITH WELL c-AXlS ORIENTATION USING Pt UNDERLAYER

    SIOSAWA T., MATSUSHITA N., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   22 ( S1 )   123 - 125   1998

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    &nbsp;&nbsp;Ba ferrite/Pt bilayered films were deposited on thermally oxidized Si wafers using plasma-free sputtering apparatus and post-annealed at 800&deg;C in air for 15 min, and then, the dependence of crystallographical and magnetic characteristics at the substrate temperature Ts in the range from room temperature to 550&deg;C were investigated. Although Ba ferrite films deposited directly on the substrates revealed random c-axis orientation, the Ba ferrite layer deposited on Pt underlayer at Ts above 200&deg;C and post-annealed revealed excellent c-axis orientation. They exhibited the saturation magnetization 4&pi;Ms of 4.2 kG and almost same in-plane and perpendicular coercivity Hc|| and Hc&perp; of 0.7 kOe. The film deposited at Ts above 500&deg;C exhibited 4&pi;Ms of 4.6 kG and high Hc&perp; of 1.8 kOe.

    DOI: 10.3379/jmsjmag.22.S1_123

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  • Crystal Structure and Magnetic Characteristics of (La,Sr)MnO3 Films Deposited by Kr Sputtering

    NAMIKAWA T., FENG J., KANETA K., MATSUSHITA N., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   22 ( S1 )   203 - 205   1998

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    &nbsp;&nbsp;La1-xSrxMnO3 films were deposited on SiO2/Si substrates by using the facing target sputtering apparatus with La0.76Sr0.24Mn0.78O3 targets in mixture gas of Kr and O2 or Ar and O2. For films deposited in Kr+O2, (111) orientation was observed, while (110) orientation was preferential for films deposited in Ar+O2. 4&pi;Ms of as-deposited films was very small at most 0.17 kG, of which the value corresponded to 1/18 of that of targets. It increased up to 2.4 kG after post-annealing at 1000&deg;C in O2, while the films prepared under same conditions in Ar+O2 exhibited relatively small 4&pi;Ms of 1.6 kG.

    DOI: 10.3379/jmsjmag.22.S1_203

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  • CONTROL OF MAGNETOCRYSTALLINE ANISOTROPY OF Co-Zn FERRITE SPUTTERED FILMS

    MATSUSHITA N., NOMA K., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   22 ( S1 )   117 - 119   1998

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    &nbsp;&nbsp;Co ferrite and Co-Zn ferrite films were deposited on SiO2/Si substrates and quarts disks under various preparation conditions using the facing targets sputtering apparatus and their crystallographic, magnetic and read/write characteristics have been investigated. Co ferrite films deposited at partial oxygen gas pressure Po2 below 0.2 mTorr at various substrate temperature revealed (311) orientation and quasi in-plane magnetic anisotropy. High Ts above 500&deg;C and Po2 of 2.0 mTorr were necessary to obtain well (111) orientation which had isotropic orientation of magnetization and was suitable for high recording density media. On the other hand, Co-Zn ferrite films deposited at Ts up to 250&deg;C and PO2 of 0.01 mTorr had (111) orientation and possessed moderately large 4&pi;Ms of about 3.7 kG and almost the same in-plane and perpendicular coercivity of about 2.0 kOe. The (111) oriented Co-Zn ferrite disk exhibited high linear recording density D50 as high as 136 kfrpi.

    DOI: 10.3379/jmsjmag.22.S1_117

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  • Excellent crystallographic and perpendicular magnetic characteristics of Ba ferrite films deposited by gas mixture of Ar, Xe and O-2

    N Matsushita, K Noma, S Nakagawa, M Naoe

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   176 ( 1 )   41 - 45   1997.12

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  • Excellent crystallographic and perpendicular magnetic characteristics of Ba ferrite films deposited by gas mixture of Ar, Xe and O-2

    N Matsushita, K Noma, S Nakagawa, M Naoe

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   176 ( 1 )   41 - 45   1997.12

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  • Effect of Interfacial Modulation in Ni-Fe/Cu & FeMn/Ni-Fe multilayers.

    MIYAMOTO Y., WATANABE K., NISHIMURA K., NAKAGAWA S., NAOE M.

    21   166 - 166   1997.10

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  • Improvement of GMR properties for [Ni_<81>Fe_<19>/Cu]_<30> multilayers deposited by Kr ion beam sputtering

    WATANABE Kentaro, NISHIMURA Koichi, MIYAMOTO Yasuyoshi, NAKAGAWA Shigeki, NAOE Masahiko

    IEICE technical report. Magnetic recording   97 ( 245 )   29 - 25   1997.9

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    [Ni_<81>Fe_<19>/Cu]_<30> multilayers with giant magnetoresistive effect were deposited using the dual ion beam sputtering apparatus. The influence of recoiled Ar to the film structures by ion beam sputtering method seems to be larger than that by the other deposition methods, because of the lower working gas pressure. Therefore, Kr was used as sputtering gas to suppress the energy of recoiled particles. MR ratio of Kr sputtered films was elevated up to 14.5%, because of suppression of incorporation of recoiled particles. In addition, Kr ions were bombarded only to 2 monolayers at the interfaces to control the interfacial structures. Sharp interfaces were constructed and the MR ratio was much elevated to 17.8% by ion bombardment to the interfaces at the acceleration voltage of 100V. However, MR ratio drastically decreased with the growth of (111) orientation of Ni-Fe and Cu Crystallites.

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  • MR characteristics of Ni81Fe19/Cu multilayers deposited by Kr sputtering with Br ion bombardment on interfaces

    Y Miyamoto, K Watanabe, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   33 ( 5 )   3523 - 3525   1997.9

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  • Distribution of coercivity and anisotropy through thickness direction in sputtered Co-Cr films and its relationship to noise characteristics in perpendicular magnetic recording

    S Nakagawa, S Takayama, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   33 ( 5 )   3091 - 3093   1997.9

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  • Study on S- and R-block construction with additional spinel blocks in sputter-deposited Ba ferrite films

    K Noma, N Matsushita, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   33 ( 5 )   3637 - 3639   1997.9

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  • MR characteristics of Ni81Fe19/Cu multilayers deposited by Kr sputtering with Br ion bombardment on interfaces

    Y Miyamoto, K Watanabe, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   33 ( 5 )   3523 - 3525   1997.9

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  • Improvement of soft magnetic properties of ferromagnetic Fe-Co-Ta:N/M films multilayered with paramagnetic Ti, Co67Cr33 and Fe82Co9Ta9:N interlayers

    S Nakagawa, K Suemitsu, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   33 ( 5 )   3805 - 3807   1997.9

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  • Improvement of micromagnetism of Ni-Fe/Co67Cr33 multilayers for backlayers of perpendicular magnetic recording media

    T Ichihara, S Nakagawa, H Matsumiya, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   33 ( 5 )   3004 - 3006   1997.9

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  • Effects of Ion Bombardment on Interfaces of GMR [Ni-Fe/Cu]Multilayers

    MIYAMOTO Y., WATANABE K., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   21 ( 4 )   565 - 568   1997.4

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    Language:Japanese   Publisher:The Magnetics Society of Japan  

    Fe/[Ni81Fe19/Cu]30 multilayers with giant magnetoresistance (GMR) were deposited by the dual ion beam sputtering method, which allows the crystallite orientations and interfacial structures to be controlled by the ion bombardment. In this study, only a few monolayers at interfaces in Ni-Fe/Cu multilayers were exposed to ion bombardment, which causes local interfacial mixing and diffusion. A large MR ratio, low saturation resistivity, and relatively sharp interfacial structure were attained for films deposited by ion bombardment when the acceleration valtage of the bombarding ion source was 160 V. Reducing the residual stress seems to be effective for attaining good magnetoresistive characteristics.

    DOI: 10.3379/jmsjmag.21.565

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    Other Link: http://dl.ndl.go.jp/info:ndljp/pid/10463498

  • Preparation of ferrimagnetic Mn4N compound films at low substrate temperature by reactive facing target sputtering

    S Nakagawa, Y Li, M Naoe

    JOURNAL OF APPLIED PHYSICS   81 ( 8 )   5180 - 5180   1997.4

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  • Mossbauer study of Ba ferrite sputtered films with large saturation magnetization and perpendicular magnetic anisotropy constant

    K Noma, N Matsushita, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   81 ( 8 )   5137 - 5137   1997.4

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  • Effects of composition control on crystallographic and magnetic characteristics of Ba ferrite films sputtered with the mixture of Xe, Kr, Ar, and O-2, for recording media

    K Noma, N Matsushita, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   81 ( 8 )   4377 - 4379   1997.4

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  • Preparation of soft magnetic and thermally stable Fe-Co-Ta:N/Ti multilayered films by sputter deposition

    S Nakagawa, K Suemitsu, M Naoe

    JOURNAL OF APPLIED PHYSICS   81 ( 8 )   3782 - 3784   1997.4

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  • Effects of composition control on crystallographic and magnetic characteristics of Ba ferrite films sputtered with the mixture of Xe, Kr, Ar, and O-2, for recording media

    K Noma, N Matsushita, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   81 ( 8 )   4377 - 4379   1997.4

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  • Sputter deposition of ferrite films and application for high density rigid disk media in contact mode

    M Naoe, N Matsushita, K Noma, S Nakagawa

    JOURNAL DE PHYSIQUE IV   7 ( C1 )   735 - 738   1997.3

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  • Crystallographic and magnetic characteristics of Ba ferrite sputtered films for high density magnetic recording disks

    M Naoe, K Noma, N Matsushita, S Nakagawa

    JOURNAL DE PHYSIQUE IV   7 ( C1 )   749 - 750   1997.3

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  • Increase of saturation magnetization of Ba ferrite films deposited by adding Xe into sputtering gas mixture

    K Noma, N Matsushita, S Nakagawa, M Naoe

    JOURNAL DE PHYSIQUE IV   7 ( C1 )   487 - 488   1997.3

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  • Sputter deposition of ferrite films and application for high density rigid disk media in contact mode

    M Naoe, N Matsushita, K Noma, S Nakagawa

    JOURNAL DE PHYSIQUE IV   7 ( C1 )   735 - 738   1997.3

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  • Ferromagnetic characteristics of a perovskite type of (La, Sr)MnO3 films deposited by Kr sputtering

    N Matsushita, K Noma, S Nakagawa, M Naoe

    JOURNAL DE PHYSIQUE IV   7 ( C1 )   629 - 630   1997.3

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  • Crystallographic and magnetic characteristics of Ba ferrite sputtered films for high density magnetic recording disks

    M Naoe, K Noma, N Matsushita, S Nakagawa

    JOURNAL DE PHYSIQUE IV   7 ( C1 )   749 - 750   1997.3

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  • Increase of saturation magnetization of Ba ferrite films deposited by adding Xe into sputtering gas mixture

    K Noma, N Matsushita, S Nakagawa, M Naoe

    JOURNAL DE PHYSIQUE IV   7 ( C1 )   487 - 488   1997.3

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  • Sputter deposition of ferrite films and application for high density rigid disk media in contact mode

    M Naoe, N Matsushita, K Noma, S Nakagawa

    JOURNAL DE PHYSIQUE IV   7 ( C1 )   735 - 738   1997.3

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  • Ferromagnetic characteristics of a perovskite type of (La, Sr)MnO3 films deposited by Kr sputtering

    N Matsushita, K Noma, S Nakagawa, M Naoe

    JOURNAL DE PHYSIQUE IV   7 ( C1 )   629 - 630   1997.3

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  • Analysis of Stray Magnetic Field at The Substrate and Effect of Applying External Magnetic Field in Facing Targets Sputtering

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   251 - 256   1997

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  • Improving of the Permeability of Ni-Fe/Co_<67>Cr_<33> Multilayers by Applying a Field during Deposition

    ICHIHARA T., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   21 ( 4-2 )   485 - 488   1997

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    To control the soft magnetic properties and the magnetic anisotropy of Ni-Fe/Co67Cr33 multilayers, an external field Hex of about 80 Oe was applied to films grown by using a facing-targets sputtering (FTS) apparatus during the deposition of the multilayers. The relative permeability μr of Ni79Fe21/Co67Cr33 multilayers without a Co67Cr33 underlayer was drastically improved in any direction when Hex was applied to the layers in the FTS apparatus. On the other hand, Ni79Fe21/Co67Cr33 multilayers with a Co67Cr33 underlayer revealed good (111) orientation of Ni-Fe crystallites, which had higher μr only in the Hex direction.

    DOI: 10.3379/jmsjmag.21.485

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  • 垂直磁気記録媒体・ヘッド用軟磁性層の特性改善

    中川茂樹

    日本応用磁気学会誌   21 ( 6 )   983 - 988   1997

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  • Effect of Paramagnetic Co┣D267┫D2Cr┣D233┫D2 Intermediate Layer on Longitudinal Recording Media with Ferromagnetic Co┣D283┫D2Cr┣D217┫D2/Cr Bilayered Film

    SHIGEKI NAKAGAWA

    J. of Magnetics Soc. of Japan   21 ( S2 )   537 - 540   1997

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  • Preparation of Soft Magnetic Films of Nanocrystalline Fe-Cu-Nb-Si-B Alloy for Low Noise Backlayers

    SHIGEKI NAKAGAWA

    J. of Magnetics Soc. of Japan   21 ( S2 )   549 - 552   1997

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  • Crystallographic and magnetic characteristics of c-axis oriented Ba ferrite layer deposited on Pt(111) underlayer

    SIOSAWA T.

    Journal of The Magnetic Society of Japan   21 ( S2 )   73 - 76   1997

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  • Investigation of the Exchange Coupling Field between Ni81Fe19/Fe50Mn50 Bilayers in Spin Valve Devices by Ion Bombardment to Interfaces

    WATANABE Kentaro, MIYAMOTO Yasuyoshi, NISHIMURA Koichi, NAKAGAWA Shigeki, NAOE Masahiko

    Journal of the Magnetics Society of Japan   21 ( S2 )   379 - 382   1997

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    &nbsp;&nbsp;Ni81Fe19/Fe50Mn50 bilayers were deposited by using dual ion beam sputtering apparatus which can control the crystallographic structures at interfacial monoatomic layers of the multilayers by ion bombardment to the growing film surfaces. In this study, Ar ions were bombarded to the interfaces of Ni-Fe/FeMn bilayers. The relationship between the structure at the interfaces and the exchange coupling field Hex. were investigated. Ion bombardment to the interfaces at proper energy promoted (111) orientation of FeMn crystallites to increase Hex. between Ni-Fe and FeMn layers. Ion bombardment to 2&sim;20 monolayers at the interfaces promoted crystallization of FeMn layers while the ion bombardment to the whole FeMn layers suppressed any crystallization.

    DOI: 10.3379/jmsjmag.21.S2_379

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  • Ion Beam Deposition Method Using Facing Targets Sputtering Ion Source As a New Reactive Deposition Method

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   411 - 420   1997

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  • Effects of Ion Bombardment to Interfaces on Residual Internal Stress and Crystalline Structures on Multilayered Films

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   245 - 250   1997

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  • Effects of composition control on crystallographic and magnetic characteristics of Ba ferrite films sputtered with the mixture of Xe, Kr, Ar and O┣D22┫D2 for recording media

    SHIGEKI NAKAGAWA

    Journal of Applied Physics   81 ( 8 )   4377 - 4379   1997

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  • Thickness dependence of coercivity and magnetic anisotropy of Co-Cr thin films and their relationship with read/write performance

    SHIGEKI NAKAGAWA

    Journal of Magnetics Society of Japan   21 ( S1 )   29 - 33   1997

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  • Preparation of Isotropic Magnetic Recording Disks using Ferrite Thin Film and Read/Write Characteristics

    SHIGEKI NAKAGAWA

    Journal of Magnetics Society of Japan   21 ( S1 )   34 - 37   1997

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  • Sputter Deposition of Ferrite Films and Application for High Density Rigid Disk Media in Contact Mode

    SHIGEKI NAKAGAWA

    Proc, of 7th Int. Conf. on Ferrites(ICF7, Bordeaux, 1996)   735 - 738   1997

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  • Crystallographic and Magnetic Characteristics of c-axis Oriented Ba Ferrite Layer Deposited on Pt(111)Underlayer

    SHIGEKI NAKAGAWA

    J. of Magnetics Soc. of Japan   21 ( S2 )   73 - 76   1997

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  • Improvement of soft magnetic properties of ferromagnetic fe-co-ta:n/m films multilayered with paramagnetic ti, Co67Cr33 and Fe82Co9Ta9:N interlayers

    Shigeki Nakagawa, Katsumi Suemitsu, Masahiko Naoe

    IEEE Transactions on Magnetics   33 ( 5 )   3805 - 3807   1997

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    DOI: 10.1109/20.619577

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  • Improvement of micromagnetism of ni-fe/co67cr33 multilayers for backlayers of perpendicular magnetic recording media

    Takayuki Ichihara, Shigeki Nakagawa, Hiroaki Matsumiya, Masahiko Naoe

    IEEE Transactions on Magnetics   33 ( 5 )   3004 - 3006   1997

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    DOI: 10.1109/20.617825

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  • Control of Nano-Structure of the Initial Growth Layers of Co-Cr Thin Films Deposited by Facing Targets Sputtering

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   151 - 156   1997

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  • Effects of Composition Control on Crystallographic and Magnetic Characteristics of Ba Ferrite Films Sputtered with the Mixture of Xe, Kr, Ar and O┣D22┫D2 for Recording Media

    SHIGEKI NAKAGAWA

    J. Appl. Phys.   81 ( 8 )   4377 - 4379   1997

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  • Diagnosis of Mixture Gas Discharge in Damage-Free Sputtering Apparatus and Deposition of Ba Ferrite Films at Low Substrate Temperature

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   117 - 122   1997

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  • Giant Magnetoresistance of Ni┣D281┫D2Fe┣D219┫D2/Cu Multilayers Deposited by Dual Ion Beam Sputtering

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   123 - 128   1997

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  • Analysis of Stray Magnetic Field at The Substrate and Effect of Applying External Magnetic Field in Facing Targets Sputtering

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   251 - 256   1997

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  • Preparation of Very Soft Magnetic Ni-Fe/Co┣D267┫D2Cr┣D233┫D2 Multilayers by Facing Targets Sputtering with External Magnetic Field

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   111 - 116   1997

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  • Ion Beam Deposition Method Using Facing Targets Sputtering Ion Source As a New Reactive Deposition Method

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   411 - 420   1997

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  • Co-Cr薄膜の保磁力と磁気異方性の膜厚方向分布と記録再生特性

    中川茂樹

    日本応用磁気学会誌   21 ( S1 )   29 - 33   1997

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  • 酸化物磁性薄膜による等方性磁気ディスクの作製と記録再生特性

    中川茂樹

    日本応用磁気学会誌   21 ( S1 )   34 - 37   1997

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  • Preparation of Soft Magnetic Films of Nanocrystalline Fe-Cu-Nb-Si-B Alloy for Low Noise Backlayers

    SHIGEKI NAKAGAWA

    J. of Magnetics Soc. of Japan   21 ( S2 )   549 - 552   1997

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  • Investigation of the Exchange Coupling Field between Ni┣D281┫D2Fe┣D219┫D2/Fe┣D250┫D2Mn┣D250┫D2 Bilayers in Spin Valve Devices by Ion Bombardment to Interfaces

    SHIGEKI NAKAGAWA

    J. of Magnetics Soc. of Japan   21 ( S2 )   379 - 382   1997

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    &nbsp;&nbsp;Ni81Fe19/Fe50Mn50 bilayers were deposited by using dual ion beam sputtering apparatus which can control the crystallographic structures at interfacial monoatomic layers of the multilayers by ion bombardment to the growing film surfaces. In this study, Ar ions were bombarded to the interfaces of Ni-Fe/FeMn bilayers. The relationship between the structure at the interfaces and the exchange coupling field Hex. were investigated. Ion bombardment to the interfaces at proper energy promoted (111) orientation of FeMn crystallites to increase Hex. between Ni-Fe and FeMn layers. Ion bombardment to 2&sim;20 monolayers at the interfaces promoted crystallization of FeMn layers while the ion bombardment to the whole FeMn layers suppressed any crystallization.

    DOI: 10.3379/jmsjmag.21.S2_379

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  • Effect of Paramagnetic Co┣D267┫D2Cr┣D233┫D2 Intermediate Layer on Longitudinal Recording Media with Ferromagnetic Co┣D283┫D2Cr┣D217┫D2/Cr Bilayered Film

    SHIGEKI NAKAGAWA

    J. of Magnetics Soc. of Japan   21 ( S2 )   537 - 540   1997

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  • Giant Magnetoresistance of Ni┣D281┫D2Fe┣D219┫D2/Cu Multilayers Deposited by Dual Ion Beam Sputtering

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   123 - 128   1997

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  • Control of Nano-Structure of the Initial Growth Layers of Co-Cr Thin Films Deposited by Facing Targets Sputtering

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   151 - 156   1997

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  • Preparation of Very Soft Magnetic Ni-Fe/Co┣D267┫D2Cr┣D233┫D2 Multilayers by Facing Targets Sputtering with External Magnetic Field

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   111 - 116   1997

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  • Diagnosis of Mixture Gas Discharge in Damage-Free Sputtering Apparatus and Deposition of Ba Ferrite Films at Low Substrate Temperature

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   117 - 122   1997

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  • Effects of Ion Bombardment to Interfaces on Residual Internal Stress and Crystalline Structures on Multilayered Films

    SHIGEKI NAKAGAWA

    Proc. of 4┣D1th┫D1 International Symposium on Sputtering and Plasma Processing(ISSP'97)   245 - 250   1997

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  • Effects of ion bombardment to interfaces of[Ni-Fe/Cu]GMR multilayers

    MIYAMOTO Y., WATANABE K., NAKAGAWA S., NAOE M.

    20   399 - 399   1996.9

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  • The evaluation of coercivity distribution in the direction of thickness in Co-Cr films

    TAKAYAMA S., NAKAGAWA S., KITAMOTO Y., NAOE M.

    20   231 - 231   1996.9

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  • Effects of Ni81Fe19 underlayer and Ar ion bombardment to deposition of (111) oriented Fe50Mn50 layers for spin valve devices

    Y Miyamoto, T Yoshitani, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   32 ( 5 )   4672 - 4674   1996.9

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  • Improvement of the magnetic characteristics of multilayered Ni-Fe thin films by applying external in-plane field during sputtering

    T Ichihara, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   32 ( 5 )   4582 - 4584   1996.9

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  • Dependence of perpendicular coercivity on residual stress of Ba ferrite/ZnO bilayered films deposited on fused quartz substrate

    K Noma, N Matsushita, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   32 ( 5 )   3822 - 3824   1996.9

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  • Read/write characteristics of Co-Zn ferrite rigid disks in contact mode recording

    N Matsushita, K Noma, A Morisako, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   32 ( 5 )   3578 - 3580   1996.9

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  • Investigations of GMR characteristics and crystal structures for Ni81Fe19/Cu multilayers with Ar ion bombardment on interfaces

    Y Miyamoto, T Yoshitani, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   32 ( 5 )   4719 - 4721   1996.9

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  • Effects of Ni81Fe19 underlayer and Ar ion bombardment to deposition of (111) oriented Fe50Mn50 layers for spin valve devices

    Y Miyamoto, T Yoshitani, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   32 ( 5 )   4672 - 4674   1996.9

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  • Investigations of GMR characteristics and crystal structures for Ni81Fe19/Cu multilayers with Ar ion bombardment on interfaces

    Y Miyamoto, T Yoshitani, S Nakagawa, M Naoe

    IEEE TRANSACTIONS ON MAGNETICS   32 ( 5 )   4719 - 4721   1996.9

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  • GMR Characteristics in Ni-Fe/Cu Multilayers with Ion Bombardment to Interfaces

    MIYAMOTO Yasuyoshi, WATANABE Kentaro, NAKAGAWA Shigeki, NAOE Masahiko

    1996 ( 76 )   37 - 46   1996.7

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  • Change of magnetoresistance characteristic and crystal structure by ion bombardment to interfaces in [Ni81Fe19/Cu] multilayers

    Y Miyamoto, T Yoshitani, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   79 ( 8 )   6392 - 6392   1996.4

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  • Theory, fabrication and testing of dual track complimentary type of thin-film recording heads for perpendicular magnetic recording system

    T Ichihara, S Nakagawa, N Matsushita, M Naoe

    JOURNAL OF APPLIED PHYSICS   79 ( 8 )   5910 - 5912   1996.4

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  • Highly crystallized (La,Sr)MnO3 films deposited by facing targets sputtering apparatus

    N Matsushita, K Noma, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   79 ( 8 )   5247 - 5249   1996.4

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  • Preparation of soft magnetic Fe/Ta and Fe:N/Ta:N multilayered films with large magnetization for inductive recording head

    M Naoe, S Nakagawa

    JOURNAL OF APPLIED PHYSICS   79 ( 8 )   5015 - 5017   1996.4

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  • Improvement of soft magnetism of Fe90Co10 sputtered films by addition of N and Ta

    S Nakagawa, S Tanaka, K Suemitsu, M Naoe

    JOURNAL OF APPLIED PHYSICS   79 ( 8 )   5156 - 5158   1996.4

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  • Ba ferrite films with large saturation magnetization and high coercivity prepared by low-temperature sputter deposition

    K Noma, N Matsushita, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   79 ( 8 )   5970 - 5972   1996.4

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  • Theory, fabrication and testing of dual track complimentary type of thin-film recording heads for perpendicular magnetic recording system

    T Ichihara, S Nakagawa, N Matsushita, M Naoe

    JOURNAL OF APPLIED PHYSICS   79 ( 8 )   5910 - 5912   1996.4

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  • Highly crystallized (La,Sr)MnO3 films deposited by facing targets sputtering apparatus

    N Matsushita, K Noma, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   79 ( 8 )   5247 - 5249   1996.4

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  • Preparation of soft magnetic Fe/Ta and Fe:N/Ta:N multilayered films with large magnetization for inductive recording head

    M Naoe, S Nakagawa

    JOURNAL OF APPLIED PHYSICS   79 ( 8 )   5015 - 5017   1996.4

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  • Improvement of soft magnetism of Fe90Co10 sputtered films by addition of N and Ta

    S Nakagawa, S Tanaka, K Suemitsu, M Naoe

    JOURNAL OF APPLIED PHYSICS   79 ( 8 )   5156 - 5158   1996.4

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  • Ba ferrite films with large saturation magnetization and high coercivity prepared by low-temperature sputter deposition

    K Noma, N Matsushita, S Nakagawa, M Naoe

    JOURNAL OF APPLIED PHYSICS   79 ( 8 )   5970 - 5972   1996.4

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  • Diagnosis of Facing Targets Sputtering System for Deposition of Ba Ferrite Films in Ar, Xe and O_2_ Gas Mixture

    N.Matsushita, K.Noma, S.Nakagawa, M.Naoe

    J. of Korean Institute of Surface Engineering   29 ( 6 )   834 - 838   1996

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  • Improvement of the Magnetic Characteristics of Ni-Fe/Al Multilayers by Application of In-plane Fields during Sputtering

    ICHIHARA T., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   20 ( 2 )   333 - 336   1996

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    It has been recognized that the soft magnetic characteristics of Ni-Fe thin films deteriorate as the thickness of the film increases. In this study, therefore, magnetic multilayers composed of Ni-Fe layers and paramagnetic Al interlayers were prepared. The Ni-Fe/Al multilayers possessed good soft magnetic characteristics when the Al interlayers were thicker than 5 nm. Some Ni-Fe single layers and Ni-Fe/Al multilayers were prepared by applying an external field Htr of about 200 Oe along the film plane and transverse to the direction of a plasma confining field Hp of about 30 Oe in the facing targets sputtering system. The films had very high permeability when a strong external field Htr were applied. For the Ni-Fe/Al multilayers, the permeability was especially isotropically high when both of Hp and Htr were applied.

    DOI: 10.3379/jmsjmag.20.333

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  • Crystallographic and magnetic characteristics of Co-Zn ferrite films deposited by plasma-free sputtering method

    Kenji Noma, Nobuhiro Matsushita, Shigeki Nakagawa, Masahiko Naoe

    Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy   43 ( 1 )   46 - 51   1996

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    Language:Chinese   Publisher:Funtai Funamtsu Yakin Kyokai/Japan Soc. of Powder Metallurgy  

    DOI: 10.2497/jjspm.43.46

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  • Preparation of Ba ferrite films with large saturation magnetization by Xe sputtering and magnetic properties

    Nobuhiro Matsushita, Kenji Noma, Shigeki Nakagawa, Masahiko Naoe

    Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy   43 ( 1 )   25 - 30   1996

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    Language:Chinese   Publisher:Funtai Funamtsu Yakin Kyokai/Japan Soc. of Powder Metallurgy  

    DOI: 10.2497/jjspm.43.25

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  • Ba Ferrite Films with Large Saturation Magnetization Prepared by Using Xe as Sputtering Gas

    NOMA K., MATSUSHITA N., NAKAGAWA S., NAOE M.

    Journal of the Magnetics Society of Japan   20 ( 2 )   325 - 328   1996

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    Non-stoichiometric Ba ferrite films were deposited by plasma-free sputtering in the mixture of Xe, Ar, and O2. By using Xe as sputtering gas, the discrepancy of the film composition and the bombardment of growing surface with energetic particles were sufficiently suppressed, and Ba ferrite films with good c-axis crystallite orientation and large saturation magnetization 4πMs seemed to be obtained even at substrate temperatures Ts below 600°C. Sintered Ba ferrite plates with non-stoichiometric compositions of BaO·6.5Fe2O3 were used as sputtering targets, and the Ba content x and dispersion angle of the c-axis orientation of BaM crystallites corresponded well to the Xe partial pressure PXe. The Ba content of films deposited at an optimum PXe of 0.10 Pa was almost the same as that of stoichiometric BaM ferrite, and 4πMS values of 5.1 kG, which is larger than that of bulk BaM ferrite, and 4.7 kG were attained at Ts of 600°C and 475°C, respectively.

    DOI: 10.3379/jmsjmag.20.325

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  • Annealing and Ion Bombardment Studies of Ni-Fe/Cu GMR and Spin Valve Multilayers

    YOSHITANI Tohru, MIYAMOTO Yasuyoshi, NAKAGAWA Shigeki, NAOE Masahiko

    IEICE technical report. Magnetic recording   95 ( 384 )   7 - 14   1995.11

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    Fe/[Ni_<81>Fe_<19>/Cu]_<30> multilayers with Giant Magnetoresistance (GMR) were deposited using Dual Ion Beam Sputtering (DBIS) apparatus. The change of MR characteristics by controlling the crystallite orientations and interfacial structure by means of ion bombardment to interfaces and post-annealing were investigated. In this study, it was confirmed that the spill-dependent scattering is mainly occurred at the bulk layers for Ni-Fe/Cu multilayers, but the field sensitivity is much influenced by the local structures around interfaces. Both MR ratio and field sensitivity were improved after post-annealing at temperature of 150℃. Spin Valves were prepared, in which FeMn antiferromagnetic layers were deposited under the first Ni-Fe layer to avoid oxidization of FeMn layers. FeMn layers in Spin Valve deposited on Ni-Fe underlayers whose crystallite orientations was improved by ion bombardment possessed a large exchange bias field of about 30 Oe.

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  • CO-ZN FERRITE RIGID DISKS PREPARED BY PLASMA-FREE SPUTTERING AT LOW SUBSTRATE-TEMPERATURE

    N MATSUSHITA, K NOMA, S NAKAGAWA, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   31 ( 6 )   2779 - 2781   1995.11

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  • CONTROL OF SOFT MAGNETISM OF CO-ZR AND CO-ZR-TA FILMS FOR BACKLAYERS IN PERPENDICULAR MAGNETIC RECORDING MEDIA

    S NAKAGAWA, M NAOE

    IEICE TRANSACTIONS ON ELECTRONICS   E78C ( 11 )   1557 - 1561   1995.11

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  • EFFECT OF ION-BOMBARDMENT AND BIAS FIELDING FOR [NI81FE19/CU] MULTILAYERS WITH GIANT MAGNETORESISTANCE DEPOSITED BY DUAL-ION BEAM SPUTTERING

    Y MIYAMOTO, T YOSHITANI, S NAKAGAWA, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   31 ( 6 )   4103 - 4105   1995.11

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  • CO-ZN FERRITE RIGID DISKS PREPARED BY PLASMA-FREE SPUTTERING AT LOW SUBSTRATE-TEMPERATURE

    N MATSUSHITA, K NOMA, S NAKAGAWA, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   31 ( 6 )   2779 - 2781   1995.11

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  • Effects of ion bombardment to interfaces of [Ni-Fe/Cu] GMR multilayers

    MIYAMOTO Y., YOSHITANI T., NAKAGAWA S., NAOE M.

    19   97 - 97   1995.9

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  • Improvement of crystallites orientation in FeMn layer in Spin Valve by Ni-Fe underlayer

    YOSHITANI T., MIYAMOTO Y., NAKAGAWA S., NAOE M.

    19   351 - 351   1995.9

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  • Control of Crystallite Orientations and Interfacial Structures for Ni-Fe/Cu Giant Magnetoresistive Multilayers by Using Effect of Ion Bombardment.

    宮本泰敬, よし谷徹, 中川茂樹, 直江正彦

    電子情報通信学会技術研究報告   95 ( 224(MR95 26-31) )   1995

  • Control of crystallographic and magnetic characteristics in Co-Zn ferrite sputtered films

    N.Matsushita, K.Noma, S.Nakagawa, M.Naoe

    Journal of Magnetism and Magnetic Materials   140/144 ( Pt 3 )   2085 - 2086   1995

  • Deposition of Ba Ferrite Films for Perpendicular Recording Media using Gas Mixture Sputtering

    Matsushita N., Noma K., Nakagawa S., Naoe M.

    Journal of the Magnetics Society of Japan   19 ( S2 )   71 - 74   1995

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    Ba ferrite films with well c-axis orientation and magnetic characteristics were deposited on ZnO underlayer at substrate temperature Ts from 475 to 600°C in the gas mixture of Xe 0.10 Pa, Ar 0.08 Pa and O2 0.02 Pa using the facing targets sputtering apparatus. The film deposited at Ts of 600°C was composed of BaM ferrite and spinel crystallites and had saturation magnetization 4πMs of 5.1 kG and perpendicular anisotropy constant Kul of 4.23×105 J·m-3 which were larger than those of bulk BaM ferrite of 4.8 kG and 3.30 × 105 J·m-3, respectively. C-axis orientation was observed even for the film deposited at low Ts of 475°C and its values of 4πMs, perpendicular coercivity Hc⊥ and in-plane one Hc// were 4.7 kG, 2.38 kOe and 0.19 kOe, respectively.

    DOI: 10.3379/jmsjmag.19.S2_71

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  • Preparation of Diamond-Like Carbon Thin Films by Facing Targets Sputtering Method

    SHIGEKI NAKAGAWA

    Proc. of IUMRS-ICA-94   717   1995

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  • Deposition of Baferrite Films for Perpedicular Maguetic Media Using Mixed Sputtering

    SHIGEKI NAKAGAWA

    IEICE Transaction on Electronics   E78 ( 11 )   1562   1995

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  • Relationships between MR Characteristics and the Structures at Interfaces for GMR / Spin Valve Devices

    NAKAGAWA Shigeki, MIYAMOTO Yasuyoshi, YOSHITANI Tohru, NAOE Masahiko

    Journal of the Magnetics Society of Japan   19 ( 2 )   S2_34 - 37   1995

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    &nbsp;&nbsp;[Ni81Fe19/Cu]30 multilayers with giant magnetoresistance were deposited using Dual Ion Beam Sputtering apparatus, which can control the crystallite orientation and interfacial structure by using ion bombardment effects. In this study, it was confirmed that the bulk scattering is remarkable for Ni-Fe/Cu multilayers, but the field sensitivity is much influenced by the structures interfaces. The ion bombardment to Ni-Fe thin underlayers for Fe50Mn50 anti-ferromagnetic layers in Spin Valve multilayers was also useful to attain a large exchange bias field.

    DOI: 10.3379/jmsjmag.19.S2_34

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  • New Processes of Syuthesizlug Co Fevvites Films at Low Substvate Tempevature by Facing Targets Sputtering

    SHIGEKI NAKAGAWA

    Proc. of IUMRS-ICA-94   671   1995

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  • Application of Substvate Bias and Hetero-Epitaxial Growth for Control of Preferential Orientation of Co-Cr Crystallites on Cr Urderlayers

    SHIGEKI NAKAGAWA

    Proc. of IUMRS-ICA-94   653   1995

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  • Deposition of Baferrite Films for Perpedicular Maguetic Media Using Mixed Sputtering

    SHIGEKI NAKAGAWA

    IEICE Transaction on Electronics   E78 ( 11 )   1562   1995

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  • Application of Substvate Bias and Hetero-Epitaxial Growth for Control of Preferential Orientation of Co-Cr Crystallites on Cr Urderlayers

    SHIGEKI NAKAGAWA

    Proc. of IUMRS-ICA-94   653   1995

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  • Control of Soft Maguetism of Co-Zr and Co-Zr-Ta Films for Back Layers in Perpendicular Maguetic Recording Media

    SHIGEKI NAKAGAWA

    IEICE Transaction on Electronics   E78 ( 11 )   1562   1995

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  • New Processes of Syuthesizlug Co Fevvites Films at Low Substvate Tempevature by Facing Targets Sputtering

    SHIGEKI NAKAGAWA

    Proc. of IUMRS-ICA-94   671   1995

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  • Effect of Ion Bombardment and Bias Fielding for [Ni&lt;inf&gt;81&lt;/inf&gt;Fe&lt;inf&gt;19&lt;/inf&gt;/Cu] Multilayers with Giant Magnetoresistance Deposited by Dual Ion Beam Sputtering

    Yasuyoshi Miyamoto, Tohru Yoshitani, Shigeki Nakagawa, Masahiko Naoe

    IEEE Transactions on Magnetics   31 ( 6 )   4103 - 4105   1995

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    DOI: 10.1109/20.489875

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  • Preparation of Diamond-Like Carbon Thin Films by Facing Targets Sputtering Method

    SHIGEKI NAKAGAWA

    Proc. of IUMRS-ICA-94   717   1995

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  • SOFT-MAGNETIC AND CRYSTALLOGRAPHIC PROPERTIES OF NI81FE19/CO67CR33 MULTILAYERS AS BACKLAYERS IN PERPENDICULAR RECORDING MEDIA

    S NAKAGAWA, T ICHIHARA, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   30 ( 6 )   4020 - 4022   1994.11

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  • PHYSICS AND TECHNOLOGY OF SPUTTERING FOR DEPOSITING MAGNETIC-FILMS

    M NAOE, N MATSUSHITA, S NAKAGAWA

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   134 ( 2-3 )   395 - 402   1994.6

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  • METHODS TO CONTROL INTERNAL-STRESS IN CO-CR SPUTTERED FILMS ON POLYMER TAPE FOR CURL-FREE RECORDING TAPE

    S NAKAGAWA, S AKIYAMA, M NAOE

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   134 ( 2-3 )   354 - 361   1994.6

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  • PREPARATION OF NI-FE/CU MULTILAYERS WITH LOW COERCIVITY AND GMR EFFECT BY ION-BEAM SPUTTERING

    M NAOE, Y MIYAMOTO, S NAKAGAWA

    JOURNAL OF APPLIED PHYSICS   75 ( 10 )   6525 - 6527   1994.5

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  • PREPARATION AND MAGNETIC-PROPERTIES OF MN4N FILMS BY REACTIVE FACING TARGETS SPUTTERING

    S NAKAGAWA, M NAOE

    JOURNAL OF APPLIED PHYSICS   75 ( 10 )   6568 - 6570   1994.5

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  • PREPARATION AND MAGNETIC-PROPERTIES OF BAM FILMS WITH EXCELLENT CRYSTALLINITY BY XE SPUTTERING

    N MATSUSHITA, K NOMA, S NAKAGAWA, M NAOE

    JOURNAL OF APPLIED PHYSICS   75 ( 10 )   7131 - 7133   1994.5

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  • PREPARATION OF CO-ZN FERRITE FILMS AT LOW SUBSTRATE-TEMPERATURE BY PLASMA-FREE DC SPUTTERING FOR MAGNETIC RECORDING MEDIA

    N MATSUSHITA, K NOMA, S NAKAGAWA, M NAOE

    JOURNAL OF APPLIED PHYSICS   75 ( 10 )   5975 - 5977   1994.5

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  • PREPARATION AND MAGNETIC-PROPERTIES OF MN4N FILMS BY REACTIVE FACING TARGETS SPUTTERING

    S NAKAGAWA, M NAOE

    JOURNAL OF APPLIED PHYSICS   75 ( 10 )   6568 - 6570   1994.5

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  • PREPARATION OF NI-FE/CU MULTILAYERS WITH LOW COERCIVITY AND GMR EFFECT BY ION-BEAM SPUTTERING

    M NAOE, Y MIYAMOTO, S NAKAGAWA

    JOURNAL OF APPLIED PHYSICS   75 ( 10 )   6525 - 6527   1994.5

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  • Characteristics of Ni-Fe/Cu giant magnetoresistive multilayers deposited on Fe buffer layers with different crystallite orientation controlled by dual ion beam sputtering

    Miyamoto Yasuyoshi, Nakagawa Shigeki, Naoe Masahiko

    IEICE technical report. Magnetic recording   93 ( 515 )   25 - 32   1994.3

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    Fe, £Ni_81>Fe_19>Cu!_30> multilayers with giant Magnetoresist ive characteristics were prepared by Dual Ion Beam Sputtering apparatus,which can deposit various crystallite orientations in Fe buffer layers by adjusting preparation conditions.In this study,it was found that Fe buffers,with(100)crystallaites orientation played an important role to increase the MR field sensitivity ΔMR/ ΔH.£Ni_81>Fe_19>(l5Å)/Cu(10Å)!_30> multilayers deposited on Fe buffer layer with(100)orientation exhibited MR-Ratio and ΔMR/Δ H of about 5% and 0.13%/Oe,respectively.

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  • Structure and magnetic properties of a hexagonal type ferrite thin films prepared by facing targets sputtering

    N.Matsushita, K.Noma, S.Nakagawa, M.Naoe

    Proc. of the first Magneto-Electronics International Symposium   11 - 14   1994

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  • Dual Track Complimentary Type of Thin Film Recording Heads for Perpendicular Magnetic Recording

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   18 ( S1 )   213 - 216   1994

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  • Preparation and Recording Characteristics of Rigid Disks using Co-Zn Ferrite Sputtered Films for High Density Magnetic Recording with Perpendicular Anisotropy

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   18 ( S1 )   447 - 450   1994

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  • The Magnetic Multilayers Deposited by Facing Targets Sputtering for High Density Recording Media

    SHIGEKI NAKAGAWA

    Trans. Mat. Res. Soc. Jpn.   15B   1135   1994

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  • Synthesis of Ferrimagnetic Mn┣D24┫D2N Films Epitaxialy Deposited on Al Underlayers by Plasma-free Sputtering

    SHIGEKI NAKAGAWA

    J. Magn. Magn. Mat.   140 - 145   1994

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  • Soft magnetic and crystallographic properties of Ni81Fe19/Co67Cr33 multilayers as backlayers in perpendicular recording media

    Shigeki Nakagawa, Takayuki Ichihara, Masahiko Naoe

    IEEE Transactions on Magnetics   30 ( 6 )   4020 - 4022   1994

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    DOI: 10.1109/20.333976

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  • 2 STEP SPUTTERING METHOD AND ITS APPLICATION TO PREPARATION OF BILAYER MEDIA

    S NAKAGAWA, S YOSHIDA, T ICHIHARA, M NAOE

    ADVANCED MATERIALS '93, II - A & B   15 ( A & B )   769 - 772   1994

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  • Strict Control of c-axis Orientation and Magnetic Anisotropy in Co-Cr Thin Films for Perpendicular Recording Media

    SHIGEKI NAKAGAWA

    Proc. of the 1st Magneto-Electronics Int. Symp.   15 - 18   1994

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  • Preparation and Recording Characteristics of Rigid Disks using Co-Zn Ferrite Sputtered Films for High Density Magnetic Recording with Perpendicular Anisotropy

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   18 ( S1 )   447 - 450   1994

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  • Synthesis of Ferrimagnetic Mn┣D24┫D2N Films Epitaxialy Deposited on Al Underlayers by Plasma-free Sputtering

    SHIGEKI NAKAGAWA

    J. Magn. Magn. Mat.   140 - 145   1994

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  • 2 STEP SPUTTERING METHOD AND ITS APPLICATION TO PREPARATION OF BILAYER MEDIA

    S NAKAGAWA, S YOSHIDA, T ICHIHARA, M NAOE

    ADVANCED MATERIALS '93, II - A & B   15 ( A & B )   769 - 772   1994

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  • Strict Control of c-axis Orientation and Magnetic Anisotropy in Co-Cr Thin Films for Perpendicular Recording Media

    SHIGEKI NAKAGAWA

    Proc. of the 1st Magneto-Electronics Int. Symp.   15 - 18   1994

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  • 垂直磁気記録媒体用Co-Cr薄膜における結晶c軸配向度の重要性とその制御法

    中川茂樹

    学術雑誌   21 ( S1 )   1 - 6   1994

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  • Enhancement in MR Field Sensitivity of [Ni┣D281┫D2Fe┣D219┫D2/Cu] Multilayers by Control of Crystallite Orientation in Fe Buffer layer

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   18 ( S1 )   409 - 412   1994

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  • 対向ターゲット式スパッタ法による垂直磁気テープ用Co-Cr系合金薄膜の内部応力制御法

    中川茂樹

    学術雑誌   20 ( 9 )   147 - 154   1994

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  • Physics and Technology of Sputtering Depositing Magnetic Films

    SHIGEKI NAKAGAWA

    J. Magn. Magn. Mat.   134   395 - 502   1994

  • Enhancement in MR Field Sensitivity of [Ni┣D281┫D2Fe┣D219┫D2/Cu] Multilayers by Control of Crystallite Orientation in Fe Buffer layer

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   18 ( S1 )   409 - 412   1994

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  • THE MAGNETIC MULTILAYERS DEPOSITED BY FACING TARGETS SPUTTERING FOR HIGH DENSITY RECORDING MEDIA

    M NAOE, S NAKAGAWA, N MATSUSHITA

    ADVANCED MATERIALS '93, II - A & B   15 ( A & B )   1135 - 1140   1994

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  • Dual Track Complimentary Type of Thin Film Recording Heads for Perpendicular Magnetic Recording

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   18 ( S1 )   213 - 216   1994

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  • MAGNETO-OPTICAL CHARACTERISTICS OF BAM FERRITE/CO-OXIDE MULTILAYERED FILMS

    M NAOE, S NAKAGAWA

    IEEE TRANSACTIONS ON MAGNETICS   29 ( 6 )   3393 - 3395   1993.11

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  • STRUCTURAL AND MAGNETIC CHARACTERISTICS OF BAFE12O19/ZNO MULTILAYERS BY ARC-DISCHARGE EVAPORATION

    M NAOE, S NAKAGAWA

    IEEE TRANSACTIONS ON MAGNETICS   29 ( 6 )   3096 - 3098   1993.11

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  • STRUCTURAL AND MAGNETIC CHARACTERISTICS OF BAFE12O19/ZNO MULTILAYERS BY ARC-DISCHARGE EVAPORATION

    M NAOE, S NAKAGAWA

    IEEE TRANSACTIONS ON MAGNETICS   29 ( 6 )   3096 - 3098   1993.11

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  • THE CONTROL OF MAGNETIC CHARACTERISTICS OF BAM FERRITE THIN-FILMS BY BIAS SPUTTERING

    M NAOE, K NOMA, S NAKAGAWA, N MATSUSHITA

    JOURNAL OF APPLIED PHYSICS   73 ( 10 )   6696 - 6696   1993.5

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  • THE CONTROL OF MAGNETIC CHARACTERISTICS OF BAM FERRITE THIN-FILMS BY BIAS SPUTTERING

    M NAOE, K NOMA, S NAKAGAWA, N MATSUSHITA

    JOURNAL OF APPLIED PHYSICS   73 ( 10 )   6696 - 6696   1993.5

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  • EFFECTIVE SUPPRESSION OF INTERNAL-STRESSES IN CO-CR FILMS USING A MIXTURE OF AR AND KR AS THE SPUTTERING GAS

    S NAKAGAWA, M NAOE

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   120 ( 1-3 )   345 - 348   1993.3

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  • FE-NI-ZR FILMS WITH LARGE PERPENDICULAR ANISOTROPY DEPOSITED ON PEN TAPE BY FACING TARGETS SPUTTERING

    S NAKAGAWA, H TANAKA, M NAOE

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   120 ( 1-3 )   349 - 352   1993.3

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  • Magnetic and structural characteristics of Fe/Al multilayers deposited by ion beam sputtering with Kr

    T. Hamaguchi, H. Aida, S. Nakagawa, M. Naoe

    Journal of Applied Physics   73 ( 10 )   6444 - 6446   1993

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    DOI: 10.1063/1.352627

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  • 対向ターゲット式スパッタ法で作製したCo-Cr膜の結晶配向に及ぼすバイアス電圧の効果

    中川茂樹

    学術雑誌 日本応用磁気学会誌   17 ( 2 )   97 - 100   1993

  • CRYSTALLOGRAPHIC AND MAGNETIC CHARACTERISTICS OF CO-ZN FERRITE FILMS DEPOSITED AT LOW SUBSTRATE-TEMPERATURE BY USING FACING TARGETS SPUTTERING METHOD

    N MATSUSHITA, K NOMA, S NAKAGAWA, M NAOE

    FIRST INTERNATIONAL CONFERENCE ON PROCESSING MATERIALS FOR PROPERTIES   1169 - 1172   1993

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  • Preparation of Giant Magneto-Resistive Multilayers for Dual Truck Complementary Thin Film Heads

    NAKAGAWA Shigeki, MIYAMOTO Yasuyoshi, NAOE Masahiko

    Journal of the Magnetics Society of Japan   17 ( 2 )   S2_97 - 102   1993

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    &nbsp;&nbsp;Dual truck complementary head has been proposed in this study. It was confirmed that the recording mechanism was correct in principle through the read-write charactristics using conventional thin film head. Thin film with giant magneto-resistivity GMR ratio is required to construct the hybrid type of read-write head. Ni-Fe/Cu multilayers with Cu layer thickness of 10&Aring; prepared by ion beam sputtering method exhibited high magneto-resistivity (MR) ratio as large as aobut 16%. The multilayer seemed to be suitable for detecting of flux reversal in dual truck complementary heads.

    DOI: 10.3379/jmsjmag.17.S2_97

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  • Soft Magnetic Backlayer of Amorphous Co-Zr-Ta for Perpendicular Magnetic Recording Media

    NAKAGAWA Shigeki, YOSHIDA Shinya, ICHIHARA Takayuki, NAOE Masahiko

    Journal of the Magnetics Society of Japan   17 ( S2 )   249 - 254   1993

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    The materials and its prepartion methods of backlayer for Co-Cr perpendicular magnetic recording media have been investigated. Multilayers composed of Ni-Fe layers and Co67Cr33 paramagnetic layers were proposed in order to satisfy the requirements of both the <111> axis orientation and excellent soft magnetism in Ni-Fe ferromagnetic layers. The multilayer revealed soft magnetic properties sufficiently as well as the good crystallinity and well <111> orientation suitable for the growth of Co-Cr crystallites with good c-axis orientation. Co-Zr-Ta thin films showed good soft magnetism with large saturation magnetization regardless of the film thickness. Ti interlayers between Co-Cr recording layers and Co-Zr-Ta backlayers were helpfull to achieve good c-axis orientation of Co-Cr crystallites which were deposited on it.

    DOI: 10.3379/jmsjmag.17.S2_249

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  • PREPARATION OF SOFT MAGNETIC FE-N FILMS BY ION-BEAM DEPOSITION METHOD WITH STRICT CONTROL OF PLASMA POTENTIAL

    S NAKAGAWA, T HAMAGUCHI, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   28 ( 5 )   2946 - 2948   1992.9

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  • PREPARATION OF CO FERRITE THIN-FILMS WITH LARGE PERPENDICULAR AND INPLANE COERCIVITIES BY FACING TARGETS SPUTTERING

    N MATSUSHITA, S NAKAGAWA, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   28 ( 5 )   3108 - 3110   1992.9

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  • HIGH PERMEABILITY OF IRON-NITRIDE FILMS PREPARED BY ION-BEAM DEPOSITION USING NH3

    S NAKAGAWA, T HAMAGUCHI, M NAOE

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   112 ( 1-3 )   392 - 394   1992.7

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  • HIGH PERMEABILITY OF IRON-NITRIDE FILMS PREPARED BY ION-BEAM DEPOSITION USING NH3

    S NAKAGAWA, T HAMAGUCHI, M NAOE

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   112 ( 1-3 )   392 - 394   1992.7

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  • PREPARATION OF SOFT MAGNETIC-FILMS BY MECHANICAL ALLOYING OF FE/SI/AL MULTILAYERS UNDER AR ION-BOMBARDMENT

    M NAOE, K KUBOTA, S NAKAGAWA

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   112 ( 1-3 )   439 - 442   1992.7

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  • STRUCTURAL AND MAGNETIC CHARACTERISTICS OF CO-CR FILMS SPUTTERED IN A MIXTURE OF AR AND CH4 GAS

    S NAKAGAWA, Y FURUTO, M NAOE

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   104   2047 - 2048   1992.2

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  • TA AND W ADDITIONS TO CO83CR17 THIN-FILMS DEPOSITED ON CO79CR21 UNDERLAYER

    S NAKAGAWA, Y FURUTO, M NAOE

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   104   1801 - 1802   1992.2

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  • STRUCTURAL AND MAGNETIC CHARACTERISTICS OF CO-CR FILMS SPUTTERED IN A MIXTURE OF AR AND CH4 GAS

    S NAKAGAWA, Y FURUTO, M NAOE

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   104   2047 - 2048   1992.2

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  • TA AND W ADDITIONS TO CO83CR17 THIN-FILMS DEPOSITED ON CO79CR21 UNDERLAYER

    S NAKAGAWA, Y FURUTO, M NAOE

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   104   1801 - 1802   1992.2

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  • MAGNETISM AND STRUCTURE OF IRON NITRIDE THIN-FILMS DEPOSITED BY A FACING-TARGETS TYPE OF ION-SOURCE

    S NAKAGAWA, K HASEGAWA, M NAOE

    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS   104   1899 - 1900   1992.2

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  • Magneto-optical Properties of Cobalt Ferrite Thin Films Prepared by Facing Targets Sputtering

    N. Matsushita, K. Noma, S.Nakagawa, M.Naoe

    Proc. of 6th International Conference on Ferrites(ICF6)   1633 - 1636   1992

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  • Magnetic and Crystallographic Characteristics of CoFe_2_O_4_ Thin Films on ZnO Underlayer

    N. Matsushita, K.Noma, S.Nakagawa, M.Naoe

    Proc. of 6th International Conference on Ferrites(ICF6)   428 - 431   1992

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  • SMALL D-SPACING AND INTERNAL-STRESS OF CO-CR FILMS DEPOSITED BY KR ION SPUTTERING

    S AKIYAMA, S NAKAGAWA, M NAOE

    MAGNETIC SURFACES, THIN FILMS, AND MULTILAYERS   231   335 - 340   1992

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  • Preparation Of Co Ferrite Thin Films With Large Perpendicular And In-Plane Coercivities By Facing Targets Sputtering

    Nobuhiro Matsushita, Shigeki Nakagawa, Masahiko Naoe

    IEEE Transactions on Magnetics   28 ( 5 )   3108 - 3110   1992

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    DOI: 10.1109/20.179728

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  • Modification of Magnetic Properties of Fe/Mn Multilayers with Modulation of Layer Thickness

    SHIGEKI NAKAGAWA

    J. Appl. Phys.   73 ( 10 )   6447   1992

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  • Preparation of Co-Zn Ferrite Thin Films for Rigid Disks with High Recording Density

    SHIGEKI NAKAGAWA

    Ferrites Proceedings of the 6th International Conference on Ferrites   1479 - 1482   1992

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  • Preparation of Co-Zn Ferrite Thin Films for Rigid Disks with High Recording Density

    SHIGEKI NAKAGAWA

    Ferrites Proceedings of the 6th International Conference on Ferrites   1479 - 1482   1992

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  • SMALL D-SPACING AND INTERNAL-STRESS OF CO-CR FILMS DEPOSITED BY KR ION SPUTTERING

    S AKIYAMA, S NAKAGAWA, M NAOE

    MAGNETIC SURFACES, THIN FILMS, AND MULTILAYERS   231   335 - 340   1992

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  • Modification of Magnetic Properties of Fe/Mn Multilayers with Modulation of Layer Thickness

    SHIGEKI NAKAGAWA

    J. Appl. Phys.   73 ( 10 )   6447   1992

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  • SUCCESSIVE GROWTH OF BA-FERRITE MAGNETIC LAYERS ON C-AXIS ORIENTED YBACUO SUPERCONDUCTIVE LAYERS

    M NAOE, N MATSUSHITA, S NAKAGAWA

    JOURNAL OF APPLIED PHYSICS   70 ( 10 )   6489 - 6491   1991.11

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  • ELECTRICALLY CONDUCTIVE LAYER OF WEAR-RESISTANT FE-MO-B ALLOY FOR PROTECTING MAGNETIC RECORDING TAPE

    S AKIYAMA, S NAKAGAWA, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   27 ( 6 )   5094 - 5096   1991.11

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  • INCREASE IN COERCIVITY OF FE/TI MULTILAYERED FILMS BY CR ADDITION INTO TI LAYERS

    S NAKAGAWA, M NAOE

    JOURNAL OF APPLIED PHYSICS   70 ( 10 )   6424 - 6426   1991.11

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  • DEPOSITION OF STRESS-FREE CO-CR ALLOY THIN-FILMS ON THIN TAPE SUBSTRATE BY KR ION SPUTTERING

    S AKIYAMA, S NAKAGAWA, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   27 ( 6 )   4751 - 4753   1991.11

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  • INCREASE IN COERCIVITY OF FE/TI MULTILAYERED FILMS BY CR ADDITION INTO TI LAYERS

    S NAKAGAWA, M NAOE

    JOURNAL OF APPLIED PHYSICS   70 ( 10 )   6424 - 6426   1991.11

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  • ELECTRICALLY CONDUCTIVE LAYER OF WEAR-RESISTANT FE-MO-B ALLOY FOR PROTECTING MAGNETIC RECORDING TAPE

    S AKIYAMA, S NAKAGAWA, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   27 ( 6 )   5094 - 5096   1991.11

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  • DEPOSITION OF STRESS-FREE CO-CR ALLOY THIN-FILMS ON THIN TAPE SUBSTRATE BY KR ION SPUTTERING

    S AKIYAMA, S NAKAGAWA, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   27 ( 6 )   4751 - 4753   1991.11

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  • FE-ZR SPUTTERED THIN-FILMS FOR PERPENDICULAR MAGNETIC RECORDING MEDIA

    S NAKAGAWA, H TANAKA, M NITTA, M NAOE

    JOURNAL OF APPLIED PHYSICS   69 ( 8 )   5181 - 5183   1991.4

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  • FE-ZR SPUTTERED THIN-FILMS FOR PERPENDICULAR MAGNETIC RECORDING MEDIA

    S NAKAGAWA, H TANAKA, M NITTA, M NAOE

    JOURNAL OF APPLIED PHYSICS   69 ( 8 )   5181 - 5183   1991.4

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  • THIN-FILMS OF MECHANICALLY HARDENED FE-MO-B-CR-NI ALLOYS DEPOSITED BY THE FACING TARGETS SPUTTERING METHOD

    S AKIYAMA, S NAKAGAWA, M NAOE, K TAKAGI

    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING   134   1309 - 1314   1991.3

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  • PERIODIC LENGTH DEPENDENCE OF MAGNETIC-PROPERTIES IN FE/MNSB MULTILAYERED FILMS

    S NAKAGAWA, H TANAKA, M NAOE

    MAGNETIC MATERIALS : MICROSTRUCTURE AND PROPERTIES   232   177 - 182   1991

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  • Occurrence and Thermal Stability of Perpendicular Magnetic Anisotropy in Fe-Zr Sputtered Films

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   15 ( S2 )   605 - 608   1991

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  • The Effect of Additional Elements in Cr Underlayer of Co-Cr-Ta/Cr Bilayered Films at Various Substrate Temperature

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   15 ( S2 )   649 - 652   1991

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  • Control of Internal Stress in Co-Cr Thin Films on Polymer Tape by Using Kr as Sputtering Gas

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   15 ( S2 )   27 - 31   1991

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  • Improvement of Cryrstallinity of Co-Cr and Ni-Fe Layers Media by Using Co┣D279┫D2Cr┣D221┫D2 Ultra Thin Underlayer and Interlayer

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   15 ( S2 )   657 - 661   1991

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  • Fabrication of Co-Cr : C Sputtered Thin Films by Reactive Sputtering in CH┣D24┫D2

    SHIGEKI NAKAGAWA

    Proc. of Int. Symp. on 3d-Transition Metal Thin Films   123   1991

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  • Preparation of YBaCuO thin films with excellent crystullinity on amorphous substrates prepared by Facing Targets Sputtering

    SHIGEKI NAKAGAWA

    Journal of Applied Physics   69   8   1991

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  • Successive growth of Ba-ferrite magnetic layers on c-axis oriented YBaCuO Supercondutice layers

    SHIGEKI NAKAGAWA

    Journal of Applied Physics.   70   10   1991

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  • Control of Internal Stress in Co-Cr Thin Films on Polymer Tape by Using Kr as Sputtering Gas

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   15 ( S2 )   27 - 31   1991

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  • Improvement of Cryrstallinity of Co-Cr and Ni-Fe Layers Media by Using Co┣D279┫D2Cr┣D221┫D2 Ultra Thin Underlayer and Interlayer

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   15 ( S2 )   657 - 661   1991

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  • Preparation of YBaCuO thin films with excellent crystullinity on amorphous substrates prepared by Facing Targets Sputtering

    SHIGEKI NAKAGAWA

    Journal of Applied Physics   69   8   1991

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  • Fabrication of Co-Cr : C Sputtered Thin Films by Reactive Sputtering in CH┣D24┫D2

    SHIGEKI NAKAGAWA

    Proc. of Int. Symp. on 3d-Transition Metal Thin Films   123   1991

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  • The Effect of Additional Elements in Cr Underlayer of Co-Cr-Ta/Cr Bilayered Films at Various Substrate Temperature

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   15 ( S2 )   649 - 652   1991

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  • PERIODIC LENGTH DEPENDENCE OF MAGNETIC-PROPERTIES IN FE/MNSB MULTILAYERED FILMS

    S NAKAGAWA, H TANAKA, M NAOE

    MAGNETIC MATERIALS : MICROSTRUCTURE AND PROPERTIES   232   177 - 182   1991

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    Web of Science

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  • Occurrence and Thermal Stability of Perpendicular Magnetic Anisotropy in Fe-Zr Sputtered Films

    SHIGEKI NAKAGAWA

    J. of Magn. Soc. Jpn.   15 ( S2 )   605 - 608   1991

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  • IMPROVEMENT OF MAGNETIC-PROPERTIES AND CRYSTALLINITY OF CO-CR/NI-FE DOUBLE-LAYER WITH VERY THIN CO79CR21 UNDERLAYER

    S NAKAGAWA, S AKIYAMA, M SUMIDE, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   26 ( 5 )   1608 - 1610   1990.9

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  • IMPROVEMENT OF MAGNETIC-PROPERTIES AND CRYSTALLINITY OF CO-CR/NI-FE DOUBLE-LAYER WITH VERY THIN CO79CR21 UNDERLAYER

    S NAKAGAWA, S AKIYAMA, M SUMIDE, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   26 ( 5 )   1608 - 1610   1990.9

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  • CONTROL OF INTERNAL-STRESS OF CO-CR FILMS DEPOSITED BY FACING TARGETS SPUTTERING

    S NAKAGAWA, Y KITAMOTO, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   26 ( 1 )   106 - 108   1990.1

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  • CONTROL OF INTERNAL-STRESS OF CO-CR FILMS DEPOSITED BY FACING TARGETS SPUTTERING

    S NAKAGAWA, Y KITAMOTO, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   26 ( 1 )   106 - 108   1990.1

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  • CONTINUOUS FORMATION OF COCR FILMS ON PEN TAPE BY FACING TARGETS SPUTTERING

    S AKIYAMA, M SUMIDE, S NAKAGAWA, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   25 ( 5 )   4189 - 4191   1989.9

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  • CONTINUOUS FORMATION OF COCR FILMS ON PEN TAPE BY FACING TARGETS SPUTTERING

    S AKIYAMA, M SUMIDE, S NAKAGAWA, M NAOE

    IEEE TRANSACTIONS ON MAGNETICS   25 ( 5 )   4189 - 4191   1989.9

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  • STUDIES ON COERCIVITY IN CO-CR THIN-FILMS BY MEANS OF A MULTILAYER TECHNIQUE

    S NAKAGAWA, M SUMIDE, Y KITAMOTO, Y NIIMURA, M NAOE

    JOURNAL OF APPLIED PHYSICS   63 ( 8 )   2911 - 2913   1988.4

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  • STUDIES ON COERCIVITY IN CO-CR THIN-FILMS BY MEANS OF A MULTILAYER TECHNIQUE

    S NAKAGAWA, M SUMIDE, Y KITAMOTO, Y NIIMURA, M NAOE

    JOURNAL OF APPLIED PHYSICS   63 ( 8 )   2911 - 2913   1988.4

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Presentations

  • FeCoB/NiFe/Si薄膜における高周波透磁率特性の基礎検討

    第30回日本応用磁気学会学術講演会  2006 

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  • Stress Induced Enhancement of Magnetization Reversal Process of DyFeCo Films With Perpendicular Magnetization

    2006 IEEE International Magnetics Conference (Intermag2006)  2006 

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  • Dy-Fe-Co薄膜の逆磁歪効果による磁化反転アシスト基礎実験

    第30回日本応用磁気学会学術講演会  2006 

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  • Pt膜形成時の加熱によるFePt規則合金配向膜のAs-depo形成

    第30回日本応用磁気学会学術講演会  2006 

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  • 強磁性ホール効果によるFeCo/TbFeCo 2層膜の磁気特性評価

    第30回日本応用磁気学会学術講演会  2006 

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  • Influence of spin polarization enhancement layer to rare earth-transition metal thin films for perpendicular tunneling magnetoresistance evaluated by ferromagnetic Hall effect

    Annual Conference on Magnetism and Magnetic Materials  2006 

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  • 垂直MRAM用RE-TM合金上のFeCo, MgO結晶配向性

    第30回日本応用磁気学会学術講演会  2006 

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  • BST(Ba0.5Sr0.5TiO3) Thin Films Prepared at Low Sputtering Gas Pressure by RF-Facing Targets Sputtering

    14th Annual International Conference on Composites/Nano Engineering (ICCE-14)  2006 

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  • RF-Facing Targets Sputtering System for Deposition of Oxide Thin Films

    14th Annual International Conference on Composites/Nano Engineering (ICCE-14)  2006 

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  • Effect of Hydrogen to Attain (001) Oriented FePt Ordered Alloy Films from Fe/Pt Bilayers

    IEEE International Magnetics Conference (INTERMAG) 2006  2006 

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  • Trial to Deposit (001) Oriented FePt Thin Films in as-Deposited State using Fe/Pt Bilayered Structure

    Magneto-Optical recording International Symposium 2006  2006 

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  • Fe-Co-B/[Ni-Fe/Si] Soft Magnetic Underlayer with High Anisotropy Field along Cross Track Direction on Disk Substrate

    The 7th Perpendicular Magnetic Recording Conference (PMRC2004)  2005 

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  • Effect of Roughness and Continuity of Co layers to Magnetic Properties of Co/Pd Multilayers

    The 7th Perpendicular Magnetic Recording Conference (PMRC2004)  2005 

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  • Study of magnetization reversal phenomena in CoCrTaPt perpendicular recording thin film media in a tilted magnetic field

    The 7th Perpendicular Magnetic Recording Conference (PMRC2004)  2005 

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  • An approach to estimate the magnetic anisotropy constants in a CoCrPt recording layer with a NiFe soft underlayer

    The 7th Perpendicular Magnetic Recording Conference (PMRC2004)  2005 

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  • Magnetization reversal enhancement using stress-induced effects for RE-TM perpendicularly magnetized thin films

    Asian Symposium on Information Storage Technology (ASIST-8)  2006 

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  • FeCo/TbFeCo 2層膜における磁気的結合の検討

    第99回スピニクス特別研究会  2006 

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  • ポストアニール処理無しでのFePt 規則合金配向膜の形成手法

    第99回スピニクス特別研究会  2006 

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  • 逆磁歪効果応用による磁性薄膜の新機能性開発

    第99回スピニクス特別研究会  2006 

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  • 垂直MRAM用のトンネルバリア用極薄MgO膜の結晶性向上手法

    第99回スピニクス特別研究会  2006 

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  • Magnetization reversal enhancement using stress-induced effects for RE-TM perpendicularly magnetized thin films

    The 8th Asian Symposium on Information Storage Technology (ASIST-8)  2006 

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  • Pt/Fe 積層構造からのc軸配向FePt規則合金薄膜の形成

    ここまできた次世代ハイブリッド記録の基礎技術  2006 

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  • Effect of Roughness and Continuity of Co layers to Magnetic Properties of Co/Pd Multilayers

    The 7th Perpendicular Magnetic Recording Conference (PMRC2004)  2005 

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  • Highly (001) Oriented FePt Ordered Alloy Thin Films Fabricated from Pt(100)/Fe(100) Structure on Glass Disks without Seed Layers

    The 7th Perpendicular Magnetic Recording Conference (PMRC2004)  2005 

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  • An approach to estimate the magnetic anisotropy constants in a CoCrPt recording layer with a NiFe soft underlayer

    The 7th Perpendicular Magnetic Recording Conference (PMRC2004)  2005 

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  • Fe-Co-B/[Ni-Fe/Si] Soft Magnetic Underlayer with High Anisotropy Field along Cross Track Direction on Disk Substrate

    The 7th Perpendicular Magnetic Recording Conference (PMRC2004)  2005 

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  • Development of RF-Facing Targets Sputtering System for Deposition of Oxide Films

    8th International Symposium on Sputtering & Plasma Processes (ISSP2005)  2005 

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  • Study of magnetization reversal phenomena in CoCrTaPt perpendicular recording thin film media in a tilted magnetic field

    The 7th Perpendicular Magnetic Recording Conference (PMRC2004)  2005 

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  • Magnetic interactions in FePt/soft magnetic underlayer double-layered structure observed by anomalous Hall effect

    49th Annual Conference on Magnetism & Magnetic Materials  2005 

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  • Hall effect study of soft magnetic properties of thin films (FeCoB, NiFe) stacked on FePt thin films with perpendicular magnetic anisotropy

    INTERMAG 2005  2005 

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  • FeCoB thin films with high anisotropy field suitable for GHz band operation

    4th International Workshop on High Frequency Micromagnetic Devices and Materials (MMDM4)  2005 

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  • Highly (001) Oriented FePt Ordered Alloy Thin Films Fabricated from Pt(100)/Fe(100) Structure on Glass Disks without Seed Layers

    The 7th Perpendicular Magnetic Recording Conference (PMRC2004)  2005 

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  • Fe(100) formation in Fe/Pt bilayers to attain [001] orientation of FePt ordered alloy thin films in as-deposited state

    INTERMAG 2005  2005 

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  • Coercivity Control of c-Axis Oriented FePt Thin Films Deposited on Glas Disks by Substrate Surface Pinning Sites

    Magneto-Optical recording International Symposium 2004  2004 

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  • Highly C-Axis Oriented Hexagonal M-Type Ferrite Thin Films on Pt Underlayers

    9th International Conference on Ferrites (ICF 9)  2004 

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  • High Rate Reactive Facing Targets Sputtering for Deposition of Mn-Zn Spinel Ferrite Thin Films

    9th International Conference on Ferrites (ICF 9)  2004 

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  • C-Axis Oriented Sr-Ferrite Films Prepared at Low Temperature by Facing Targets Sputtering Using Mixture Gas of Ar and Kr

    9th International Conference on Ferrites (ICF 9)  2004 

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  • Coercivity Control of c-Axis Oriented FePt Thin Films Deposited on Glas Disks by Substrate Surface Pinning Sites

    Magneto-Optical recording International Symposium 2004  2004 

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  • Highly C-Axis Oriented Hexagonal M-Type Ferrite Thin Films on Pt Underlayers

    9th International Conference on Ferrites (ICF 9)  2004 

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  • Development of RF-Facing Targets Sputtering System for Deposition of Oxide Films

    8th International Symposium on Sputtering & Plasma Processes (ISSP2005)  2005 

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  • FeCoB thin films with high anisotropy field suitable for GHz band operation

    4th International Workshop on High Frequency Micromagnetic Devices and Materials (MMDM4)  2005 

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  • Magnetic interactions in FePt/soft magnetic underlayer double-layered structure observed by anomalous Hall effect

    49th Annual Conference on Magnetism & Magnetic Materials  2005 

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  • Fe(100) formation in Fe/Pt bilayers to attain [001] orientation of FePt ordered alloy thin films in as-deposited state

    INTERMAG 2005  2005 

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  • Hall effect study of soft magnetic properties of thin films (FeCoB, NiFe) stacked on FePt thin films with perpendicular magnetic anisotropy

    INTERMAG 2005  2005 

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  • FeCoB薄膜の巨大異方性発現と斜方結晶成長の相関評価

    第31回日本応用磁気学会学術講演会  2007 

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  • As-grown preparation of FePt-ordered alloy thin films from Pt/Fe bi-layered structure

    The 8th Perpendicular Magnetic Recording Conference (PMRC2007)  2007 

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  • Fabrication of ultrathin FePt(Cu) ordered alloy thin films directly on glass disks from Pt(Cu)/Fe bilayers

    52nd Annual Conference on Magnetism and Magnetic Materials  2007 

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  • Effect of thermal proces on magnetic anisotropy in FeCoB soft underlayer

    The 8th Perpendicular magnetic recording conference  2007 

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  • テープ基板上へのCoPtCr-SiO2面内磁気記録媒体とRu-O/Ru下地層による垂直磁気記録媒体の作製と評価

    PMRC2007 サテライトミーティング  2007 

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  • Playback performance and microstructure of sputtered tape media formed by facing targets sputtering

    The 8th Perpendicular magnetic recording conference  2007 

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  • 低温堆積MgO(100)配向膜作製とRE-TM合金を用いた垂直MTJの試作

    PMRC2007 サテライトミーティング  2007 

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  • Dyx(Fe90Co10)1-x薄膜の応力アシスト磁化反転プロセス

    PMRC2007 サテライトミーティング  2007 

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  • Fabrication of MgO barrier for magnetic tunnel junction in as-deposited state using amorphous RE-TM alloy

    The 8th Perpendicular Magnetic Recording Conference (PMRC2007)  2007 

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  • Effect of Thermal Process on Magnetic Anisotropy in FeCoB Soft Underlayer

    The 8th Perpendicular Magnetic Recording Conference (PMRC2007)  2007 

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  • Stress assisted magnetization reversal in perpendicularly magnetized thin films

    The 8th Perpendicular Magnetic Recording Conference (PMRC2007)  2007 

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  • Ru-O/Ru hybrid type of underlayer for CoPtCr-SiO2 perpendicular recording media on flexible tape

    The 8th Perpendicular Magnetic Recording Conference (PMRC2007)  2007 

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  • Magnetization reversal enhancement using stress-induced effects for RE-TM perpendicularly magnetized thin films

    The 8th Asian Symposium on Information Storage Technology (ASIST-8)  2006 

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  • Magnetization reversal enhancement using stress-induced effects for RE-TM perpendicularly magnetized thin films

    Asian Symposium on Information Storage Technology (ASIST-8)  2006 

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  • Stress Induced Enhancement of Magnetization Reversal Process of DyFeCo Films With Perpendicular Magnetization

    2006 IEEE International Magnetics Conference (Intermag2006)  2006 

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  • RF-Facing Targets Sputtering System for Deposition of Oxide Thin Films

    14th Annual International Conference on Composites/Nano Engineering (ICCE-14)  2006 

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  • Influence of spin polarization enhancement layer to rare earth-transition metal thin films for perpendicular tunneling magnetoresistance evaluated by ferromagnetic Hall effect

    Annual Conference on Magnetism and Magnetic Materials  2006 

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  • Trial to Deposit (001) Oriented FePt Thin Films in as-Deposited State using Fe/Pt Bilayered Structure

    Magneto-Optical recording International Symposium 2006  2006 

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  • BST(Ba0.5Sr0.5TiO3) Thin Films Prepared at Low Sputtering Gas Pressure by RF-Facing Targets Sputtering

    14th Annual International Conference on Composites/Nano Engineering (ICCE-14)  2006 

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  • Improvement of stress-induced magnetization reversal process of DyFeCo thin films

    52nd Annual Conference on Magnetism and Magnetic Materials  2007 

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  • Effect of Hydrogen to Attain (001) Oriented FePt Ordered Alloy Films from Fe/Pt Bilayers

    IEEE International Magnetics Conference (INTERMAG) 2006  2006 

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  • Magnetic anisotropy and crystalline orientation in high Hk FeCoB thin films

    Abstracts of 52nd Annual Conference on Magnetism and Magnetic Materials  2007 

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  • Perpendicular magnetic tunnel junction with tunneling magnetoresistance ratio of 64% using MgO(100) barrier layer prepared at room temperature

    52nd Annual Conference on Magnetism and Magnetic Materials  2007 

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  • Observation of stress assisted magnetization reversal in a spin valve structure using giant magnetoresistive multilayer

    The 11th Joint MMM-Intermag Conference  2010 

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  • Effect of multilayer configuration of [Fe/Pt] multilayer to attain (001) oriented FePt ordered alloy thin films

    The 11th Joint MMM-Intermag Conference  2010 

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  • ステンレスクラッド鋼を用いた箱桁の曲げ疲労実験

    土木学会構造工学論文集  1997 

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  • Bending Fatigue Test on a Box Plate Girder of Stainless Clad Steel

    1997 

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  • High Rate Reactive Facing Targets Sputtering for Deposition of Mn-Zn Spinel Ferrite Thin Films

    9th International Conference on Ferrites (ICF 9)  2004 

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  • C-Axis Oriented Sr-Ferrite Films Prepared at Low Temperature by Facing Targets Sputtering Using Mixture Gas of Ar and Kr

    9th International Conference on Ferrites (ICF 9)  2004 

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  • Effect of thermal proces on magnetic anisotropy in FeCoB soft underlayer

    The 8th Perpendicular magnetic recording conference  2007 

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  • Stress assisted magnetization reversal for GMR multi-layer

    The 33rd Annual Conference on Magnetics in Japan 2009  2009 

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  • FePtCu films for heat assisted magnetic recording media prepared from Cu/Pt/Fe trilayers

    The 33rd Annual Conference on Magnetics in Japan 2009  2009 

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  • Enhancement on porperties of Si/NiFe/FeCoB crystalline SUL for perpendicular magnetic recording media

    The 33rd Annual Conference on Magnetics in Japan 2009  2009 

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  • Ru/FeCoB crystalline soft magnetic underlayer with high anisotropy field for CoPtCr-SiO2 granular perpendicular magnetic recording media

    53rd Annual Conference on Magnetism and Magnetic Materials  2009 

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  • Ru/FeCoB double layered film with high in-plane magnetic anisotropy field of 500 Oe

    53rd Annual Conference on Magnetism and Magnetic Materials  2009 

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  • Effect of Fe diffusion in MgO/Fe seedlayers to attain (100)oriented Pt underlayer for Perrovskite films with c-axis orientation

    ICMAT 2009 and IUMRS-ICA 2009  2009 

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  • Application of Si-N Insulation Layer to CPP-GMR Device

    Magnetics and Optics Research International Symposium for New Storage Technology  2009 

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  • Effect of Crystalline Orientation and Lattice Distortion of FeCo Spin Polarization Enhancement Layer in perpendicular MTJ with RE-TM Alloy Films

    11th Joint MMM-Intermag Conference  2010 

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  • Direct observation of an anisotropic in-plane residual stress induced by B addition as an origin of high magntic anisotropy field of Ru/FeCoB film

    11th Joint MMM_Intermag Conference  2010 

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  • Observation of stress assisted magnetization reversal in a spin valve structure using giant magnetoresistive multilayer

    The 11th Joint MMM-Intermag Conference  2010 

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  • Effect of multilayer configuration of [Fe/Pt] multilayer to attain (001) oriented FePt ordered alloy thin films

    The 11th Joint MMM-Intermag Conference  2010 

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  • Effect of Fe diffusion in MgO/Fe seedlayers to attain (100)oriented Pt underlayer for Perrovskite films with c-axis orientation

    ICMAT 2009 and IUMRS-ICA 2009  2009 

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  • Application of Si-N Insulation Layer to CPP-GMR Device

    Magnetics and Optics Research International Symposium for New Storage Technology  2009 

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  • Directional Alignment of FeCo Crystallites in Si/NiFe/Ru/FeCoB Multilayer with High Anisotropy Field above 500 Oe

    ICMAT2009 and IUMRS-ICA 2009  2009 

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  • Fablication Methods of Perpendiculary Oriented FePt Ordered Alloy Thin Films from Pt/Fe Bilayered Films for Hybrid Magnetic Recording Media

    Magnetics and Optics Research International Symposium for New Storage Technology  2009 

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  • Influence of crystallographic orientation of FeCo spin polarization enhancement layer on the magnetization coupling with RE-TM alloy films in perpendicular MTJ

    Intermag 2009  2009 

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  • Comparison of Playback Performance of Facing Targets Sputtered Perpendicular and Longitudinal Tape Media

    IEEE Transactions on Magnetics  2009 

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  • FePtCu Ordered alloy films with (001) orientation fabricated from Cu/Pt/Fe tri-layers

    Intermag 2009  2009 

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  • Effects of Ru underlayer for FeCoB upperlayer with high in-plane magnetic anisotropy field

    Bunkyo campus, Nagasaki University,  2009 

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  • Si/NiFe/FeCoB Crystalline SUL to Reduce Ru Intermediate Layer Thickness for CoPtCr-SiO2 Granular Perpendicular Magnetic Recording Media

    2009 

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  • Playback performance of perpendicular magnetic recording tape by facing targets sputtering

    The 33rd Annual Conference on Magnetics in Japan 2009  2009 

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  • Influence of crystalline orientation of FeCo on magnetic couping in TbFeCo/FeCo bilayer in p-MTJ

    The 33rd Annual Conference on Magnetics in Japan 2009  2009 

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  • Comparison of Playback Performance of Facing Targets Sputtered Perpendicular and Longitudinal Tape Media

    IEEE Transactions on Magnetics  2009 

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  • FePtCu Ordered alloy films with (001) orientation fabricated from Cu/Pt/Fe tri-layers

    Intermag 2009  2009 

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  • 高い面内異方性磁界を有するFeCoB膜に及ぼすRu下地層の影響

    長崎大学 文教キャンパス(長崎市文教町1-14)  2009 

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  • Si/NiFe/FeCoB Crystalline SUL to Reduce Ru Intermediate Layer Thickness for CoPtCr-SiO2 Granular Perpendicular Magnetic Recording Media

    2009 

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  • 垂直MTJ内のTbFeCo/FeCo 磁気的結合へのFeCo 結晶配向の影響

    第33回 日本磁気学会学術講演 2009  2009 

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  • Cu/Pt/Fe 三層構造から作製した熱アシスト記録媒体用 FePtCu 薄膜

    第33回 日本磁気学会学術講演会 2009  2009 

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  • 対向ターゲット式スパッタ法による垂直磁気記録テープ媒体の記録再生特性

    第33回 日本磁気学会学術講演会 2009  2009 

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  • 結晶性 Si/NiFe/FeCoB 裏打ち軟磁性層を用いた垂直磁気記録媒体

    第33回 日本磁気学会学術講演会  2009 

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  • 応力アシスト磁化反転を用いたGMR多層膜の作製

    第33回 日本磁気学会学術講演会  2009 

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  • Ru/FeCoB crystalline soft magnetic underlayer with high anisotropy field for CoPtCr-SiO2 granular perpendicular magnetic recording media

    53rd Annual Conference on Magnetism and Magnetic Materials  2009 

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  • Ru/FeCoB double layered film with high in-plane magnetic anisotropy field of 500 Oe

    53rd Annual Conference on Magnetism and Magnetic Materials  2009 

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  • Ru underlayers for enhancement of in-plane magnetic anisotropy field of Ru/FeCoB film

    Joint Conference of The 2nd International Conference on Science and Technology for Advanced Ceramics (STAC2) And The 1st International Conference on Science and Technology of Solid Surface and Interface  2008 

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  • Perpendicular magnetic tunnel junction with tunneling magnetoresistance ratio of 64% using MgO(100) barrier layer prepared at room temperature

    52nd Magnetism and Magnetic Materials  2008 

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  • Stress assisted reversal of perpendicular magnetization of thin films with giant magnetostriction constant

    International Magnetic Conference 2008 (Intermag2008)  2008 

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  • Change of orientation in BST films on Pt(111) and Pt(100) buffer layers

    Joint Conference of The 2nd International Conference on Science and Technology for Advanced Ceramics (STAC2) And The 1st International Conference on Science and Technology of Solid Surface and Interface  2008 

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  • Control of Curie temperature of FePt(Cu) films prepared from Pt(Cu)/Fe bilayers

    International Magnetic Conference 2008 (Intermag2008)  2008 

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  • Improvement of (100) orientation of MgO films deposited at room temperature for perpendicular MTJ

    International Magnetic Conference 2008 (Intermag2008)  2008 

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  • Effect of deposition condition of Ru-oxide/Ru bilayers on magnetic properties and orientation of CoPtCr-SiO2 perpendicular recording media

    International Magnetic Conference 2008 (Intermag2008)  2008 

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  • Fablication Methods of Perpendiculary Oriented FePt Ordered Alloy Thin Films from Pt/Fe Bilayered Films for Hybrid Magnetic Recording Media

    Magnetics and Optics Research International Symposium for New Storage Technology  2009 

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  • Perpendicular magnetic tunnel junction with RE-TM alloy and MgO(100) tunneling barrier layer prepared at room temperature

    The Fourth International Nanotechnology Conference on Communication and Cooperation (INC4)  2008 

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  • Influence of crystallographic orientation of FeCo spin polarization enhancement layer on the magnetization coupling with RE-TM alloy films in perpendicular MTJ

    Intermag 2009  2009 

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  • Directional Alignment of FeCo Crystallites in Si/NiFe/Ru/FeCoB Multilayer with High Anisotropy Field above 500 Oe

    ICMAT2009 and IUMRS-ICA 2009  2009 

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  • Effect of Crystalline Orientation and Lattice Distortion of FeCo Spin Polarization Enhancement Layer in perpendicular MTJ with RE-TM Alloy Films

    11th Joint MMM-Intermag Conference  2010 

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  • Direct observation of an anisotropic in-plane residual stress induced by B addition as an origin of high magntic anisotropy field of Ru/FeCoB film

    11th Joint MMM_Intermag Conference  2010 

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  • 極薄FePt規則合金薄膜のBit Patterned Media化の検討

    第31回日本応用磁気学会学術講演会  2007 

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  • 対向ターゲット式スパッタ法によるCoPtCr-SiO2磁気記録テープの磁気特性改善

    第31回日本応用磁気学会学術講演会  2007 

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  • 室温作製MgO(100)配向膜を用いた垂直MTJ構造の試作

    第31回日本応用磁気学会学術講演会  2007 

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  • Fe/Pt極薄2層構造膜からの垂直磁気記録媒体用FePt規則合金(001)配向膜の作製

    2007 

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  • Dyx(Fe90Co10)1-x薄膜の応力誘起磁化反転アシスト過程の改善

    第31回日本応用磁気学会学術講演会  2007 

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  • GHz帯に共鳴周波数を有するFeCoB/NiFe/Si薄膜の透磁率特性

    粉末粉体冶金協会平成19年度春季大会講演予稿集  2007 

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  • 垂直MRAM用スピン偏極増強用FeCo層およびMgOバリア層の結晶性向上

    粉末粉体冶金協会平成19年度春季大会講演予稿集  2007 

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  • Magnetization reversal technique of DyTbFeCo films at magnetic field as low as 1/6 of coercivity using a stress-induced magnetic anisotropy

    10th Joint Magnetism and Magnetic Materials - International Magnetics (MMM-Intermag) Conference  2007 

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  • Improvement of soft magnetic properties of Si/NiFe/FeCoB thin films at GHz band frequency range by multilayer configuration

    10th Joint Magnetism and Magnetic Materials - International Magnetics (MMM-Intermag) Conference  2007 

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  • Fabrication of CoCrPt-SiO_2_ films on flexible tape substrate using facing target sputtering system

    International Conference on Magnetism 2006  2007 

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  • Control of Curie temperature of FePt(Cu) films prepared from Pt(Cu)/Fe bilayers

    International Magnetic Conference 2008 (Intermag2008)  2008 

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  • Improvement of (100) orientation of MgO films deposited at room temperature for perpendicular MTJ

    International Magnetic Conference 2008 (Intermag2008)  2008 

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  • Perpendicular magnetic tunnel junction with RE-TM alloy and MgO(100) tunneling barrier layer prepared at room temperature

    The Fourth International Nanotechnology Conference on Communication and Cooperation (INC4)  2008 

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  • Effect of deposition condition of Ru-oxide/Ru bilayers on magnetic properties and orientation of CoPtCr-SiO2 perpendicular recording media

    International Magnetic Conference 2008 (Intermag2008)  2008 

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  • Fe/Pt極薄2層構造膜からの垂直磁気記録媒体用FePt規則合金(001)配向膜の作製

    2008 

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  • 室温作製MgO(100)配向膜を用いた垂直MTJ構造の試作

    日本磁気学会誌  2008 

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  • 垂直MRAM用スピン偏極増強用FeCo層およびMgOバリア層の結晶性向上

    粉体および粉末冶金  2008 

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  • Crystal Structure as an Origin of High-Anisotropy Field of FeCoB Films with Ru Underlayer

    Intermag Europe 2008 International Magnetics Conference  2008 

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  • GHz帯に共鳴周波数を有するFeCoB/NiFe/Si薄膜の透磁率特性

    粉体および粉末冶金  2008 

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  • Improvement of stress-induced magnetization reversal process of DyFeCo thin films

    52nd Magnetism and Magnetic Materials  2008 

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  • Playback Performance of Facing Targets Sputtered Tape Media on Moving Tape Substrate with a High Speed

    Intermag Europe 2008 International Magnetics Conference  2008 

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  • MTJ elements with MgO barrier using RE-TM amorphous layers for perpendicular MRAM

    10th Joint Magnetism and Magnetic Materials - International Magnetics (MMM-Intermag) Conference  2007 

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  • RE-TM amorphous alloy and Fe bi-layered films for buffer layer to attain MgO(100) texture

    10th Joint Magnetism and Magnetic Materials - International Magnetics (MMM-Intermag) Conference  2007 

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  • Playback Performance of Facing Targets Sputtered Tape Media on Moving Tape Substrate with a High Speed

    Intermag Europe 2008 International Magnetics Conference  2008 

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  • Crystal Structure as an Origin of High-Anisotropy Field of FeCoB Films with Ru Underlayer

    Intermag Europe 2008 International Magnetics Conference  2008 

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  • Perpendicular magnetic tunnel junction with tunneling magnetoresistance ratio of 64% using MgO(100) barrier layer prepared at room temperature

    52nd Magnetism and Magnetic Materials  2008 

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  • Improvement of stress-induced magnetization reversal process of DyFeCo thin films

    52nd Magnetism and Magnetic Materials  2008 

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  • 高配向BST薄膜用Pt(100)/MgOバッファ層の開発

    第25回 強誘電体応用会議 (FMA-25)  2008 

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  • rf対向ターゲットスパッタ法による低損失(Ba0.4,Sr0.6)TiO3薄膜の作製

    第25回 強誘電体応用会議 (FMA-25)  2008 

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  • Ru underlayers for enhancement of in-plane magnetic anisotropy field of Ru/FeCoB film

    Joint Conference of The 2nd International Conference on Science and Technology for Advanced Ceramics (STAC2) And The 1st International Conference on Science and Technology of Solid Surface and Interface  2008 

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  • Stress assisted reversal of perpendicular magnetization of thin films with giant magnetostriction constant

    International Magnetic Conference 2008 (Intermag2008)  2008 

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  • Change of orientation in BST films on Pt(111) and Pt(100) buffer layers

    Joint Conference of The 2nd International Conference on Science and Technology for Advanced Ceramics (STAC2) And The 1st International Conference on Science and Technology of Solid Surface and Interface  2008 

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  • Effect of Thermal Process on Magnetic Anisotropy in FeCoB Soft Underlayer

    The 8th Perpendicular Magnetic Recording Conference (PMRC2007)  2007 

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  • Playback performance and microstructure of sputtered tape media formed by facing targets sputtering

    The 8th Perpendicular magnetic recording conference  2007 

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  • Ru-O/Ru hybrid type of underlayer for CoPtCr-SiO2 perpendicular recording media on flexible tape

    The 8th Perpendicular Magnetic Recording Conference (PMRC2007)  2007 

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  • Fabrication of MgO barrier for magnetic tunnel junction in as-deposited state using amorphous RE-TM alloy

    The 8th Perpendicular Magnetic Recording Conference (PMRC2007)  2007 

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  • Improvement of soft magnetic properties of Si/NiFe/FeCoB thin films at GHz band frequency range by multilayer configuration

    10th Joint Magnetism and Magnetic Materials - International Magnetics (MMM-Intermag) Conference  2007 

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  • Stress assisted magnetization reversal in perpendicularly magnetized thin films

    The 8th Perpendicular Magnetic Recording Conference (PMRC2007)  2007 

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  • Fabrication of CoCrPt-SiO_2_ films on flexible tape substrate using facing target sputtering system

    International Conference on Magnetism 2006  2007 

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  • Magnetization reversal technique of DyTbFeCo films at magnetic field as low as 1/6 of coercivity using a stress-induced magnetic anisotropy

    10th Joint Magnetism and Magnetic Materials - International Magnetics (MMM-Intermag) Conference  2007 

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  • Improvement of in-plane anisotropy field in FeCoB/NiFe/Si thin films by Kr sputtering

    International Conference on Magnetism 2006  2007 

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  • Magnetization reversal process of DyFeCo films under an addition of mechanical stress for application of MRAM

    International Conference on Magnetism 2006  2007 

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  • Evaluation of magnetization behavior of Soft/RE-TM layer for perpendicular MRAM by anomalous Hall effect

    International Conference on Magnetism 2006  2007 

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  • Evaluation of magnetization behavior of Soft/RE-TM layer for perpendicular MRAM by anomalous Hall effect

    International Conference on Magnetism 2006  2007 

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  • Improvement of in-plane anisotropy field in FeCoB/NiFe/Si thin films by Kr sputtering

    International Conference on Magnetism 2006  2007 

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  • RE-TM amorphous alloy and Fe bi-layered films for buffer layer to attain MgO(100) texture

    10th Joint Magnetism and Magnetic Materials - International Magnetics (MMM-Intermag) Conference  2007 

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  • Magnetization reversal process of DyFeCo films under an addition of mechanical stress for application of MRAM

    International Conference on Magnetism 2006  2007 

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  • Improvement of stress-induced magnetization reversal process of DyFeCo thin films

    52nd Annual Conference on Magnetism and Magnetic Materials  2007 

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  • MTJ elements with MgO barrier using RE-TM amorphous layers for perpendicular MRAM

    10th Joint Magnetism and Magnetic Materials - International Magnetics (MMM-Intermag) Conference  2007 

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  • Magnetic anisotropy and crystalline orientation in high Hk FeCoB thin films

    Abstracts of 52nd Annual Conference on Magnetism and Magnetic Materials  2007 

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  • Perpendicular magnetic tunnel junction with tunneling magnetoresistance ratio of 64% using MgO(100) barrier layer prepared at room temperature

    52nd Annual Conference on Magnetism and Magnetic Materials  2007 

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  • As-grown preparation of FePt-ordered alloy thin films from Pt/Fe bi-layered structure

    The 8th Perpendicular Magnetic Recording Conference (PMRC2007)  2007 

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  • Fabrication of ultrathin FePt(Cu) ordered alloy thin films directly on glass disks from Pt(Cu)/Fe bilayers

    52nd Annual Conference on Magnetism and Magnetic Materials  2007 

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Awards

  • 優秀研究賞

    2012   日本磁気学会  

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  • 論文賞(平成20年度)

    2009   粉体粉末冶金協会  

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  • 新技術・新製品賞(平成16年度)

    2004   日本応用磁気学会  

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    Country:Japan

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  • 論文賞

    2000   第8回国際フェライト会議  

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  • 第1回コニカ画像科学奨励賞

    1994  

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    Country:Japan

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  • 論文賞

    1993   第3回IUMRS-ICAM-93先進材料国際会議  

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  • 第6回国際フェライト会議論文賞

    1992  

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    Country:Japan

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  • 論文賞

    1989   第5回国際フェライト会議  

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Research Projects

  • Magnetic Thin Film Devices

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    Grant type:Competitive

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  • 磁性薄膜デバイス

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    Grant type:Competitive

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  • 垂直磁気記録技術

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    Grant type:Competitive

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  • Perpendicular Magnetic Recording Technology

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    Grant type:Competitive

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  • 薄膜作製技術

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    Grant type:Competitive

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  • Thin Film Deposition Technology

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    Grant type:Competitive

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Teaching Experience

  • 電子物性論

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  • 電気電子計測

    Institution:東京工業大学

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  • 磁性・誘電体物性

    Institution:東京工業大学

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  • 磁性スピン工学

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  • 先端電子材料

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  • 半導体物性

    Institution:東京工業大学

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  • 化学II

    Institution:東京工業大学

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  • 電気磁気学

    Institution:東京工業大学

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  • 化学I

    Institution:東京工業大学

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  • 電子物性基礎論

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  • 情報ストレージ工学

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  • 量子力学

    Institution:東京工業大学

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