Updated on 2026/04/29

写真a

 
SUZUKI KAZUAKI
 
Organization
Institute of Integrated Research Laboratory for Zero-Carbon Energy Researcher
Title
Researcher
External link

Research Interests

  • non-destructive testing

  • X-ray

  • lithography

Research Areas

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Control and system engineering

Education

  • The University of Tokyo   The Graduate School of Engineering   Department of Precision Engineering

    2017.6 - 2017.10

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    Country: Japan

    Notes: Ph.D.

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  • The University of Tokyo   Graduate School of Science   Department of Physics

    1981.4 - 1984.3

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    Country: Japan

    Notes: Retired after 1st year of doctoral cource

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  • The University of Tokyo   Faculty of Science   Department of Physics

    1977.4 - 1981.3

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    Country: Japan

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Research History

  • Kyushu University   Center of Plasma Nano-interface Engineering   Research Fellow   Research Professor

    2025.9

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    Country:Japan

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  • Institute of Science Tokyo   Institute of Integrated Research   Research Staff

    2025.4

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    Country:Japan

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  • Tokyo Institute of Technology   Academy for Convergence of Materials and Informatics (TAC-MI)   Industry-Academia Collaboration Coordinator

    2019.3 - 2025.3

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    Country:Japan

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  • Nikon Metrology   Chief Strategy Officer

    2011.9 - 2014.7

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    Country:United Kingdom

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  • Nikon Corporation   R&D Headquarters   Deputy General Manager

    1984.4 - 2019.2

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    Country:Japan

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Professional Memberships

  • 精密工学会 超精密加工専門委員会

    2025

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  • 精密工学 現物融合型エンジニアリング専門委員会

    2019

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Committee Memberships

  • Micro & Nano Engineering (MNE)   Program Committee Member  

    2005 - 2009   

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    Committee type:Academic society

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  • MicroProcess and Nanotechnology Conference   Steering Committee Member  

    2005 - 2006   

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    Committee type:Academic society

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  • SPIEJournal of Micro/Nanolithography, MEMS and MOEMs (JM3)   Associate Editor  

    2002 - 2009   

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    Committee type:Academic society

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  • SPIE Microlithography   Program Committee Member  

    2000 - 2010   

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    Committee type:Academic society

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  • MicroProcess and Nanotechnology Conference   Program Committee Member  

    1999 - 2004   

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    Committee type:Academic society

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Papers

  • Microlithography – Science and Technology – (3rd edition)

    Kazuaki Suzuki

    2020.5

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    Publisher:CRC Press  

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  • Application of a compact X-ray source with small focal spot using a 950 keV linear accelerator

    N. Matsunaga, T. Sato, A. Yamada, M. Zaike, T. Tsuruya, T. Hatano, M. Yamamoto, K. Suzuki

    Proceeding of Digital Industrial Radiology and Computed Tomography (DIR2019)   2019.7

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    Authorship:Last author   Language:English   Publishing type:Research paper (international conference proceedings)  

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  • Development of 950 kV X-ray source with small focal spot using a linear accelerator

    N. Matsunaga, T. Sato, A. Yamada, M. Zaike, T. Tsuruya, K. Nakanishi, T. Hatano, M. Yamamoto, K. Suzuki

    9th Conference on Industrial Computed Tomography (iCT2019)   2019.2

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    Authorship:Last author   Language:English   Publishing type:Research paper (international conference proceedings)  

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  • Investigation of the application of phase contrast imaging using a point X-ray source to industrial non-destructive testing Reviewed

    Kazuaki Suzuki

    Philosophical Transactions of the Royal Society A   372   20130036   2014.1

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)  

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  • Microlithography – Science and Technology – (2nd edition)

    Kazuaki Suzuki

    2007.5

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    Publisher:CRC Press  

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Books