Faculty Profiles - SONE MASATO

写真a

SONE MASATO

Organization

Institute of Integrated Research Materials and Structures Laboratory Professor

Contact information

Homepage

http://www.ames.pi.titech.ac.jp/english/

Other name(s)

Masato Sone

Profile

Masato Sone completed his doctor degree of engineering at the age of 28 years old at Tokyo Institute of Technology. He worked as a researcher in Nippon Oil Company from 1996-2000. He was an assistant professor and then a research associate professor at Tokyo University of Agriculture & Technology from 2000 to 2005, and he got the position of associate professor and professor at Tokyo Institute of Technology from 2005 until present time. He has become visiting professor National Chiao Tung University in Taiwan from 2018. He has published more than 327 papers in scientific journals, 436 international symposium presentations, 54 invited lectures in international and domestic symposium and 25 books Jan.５th, 2026). He is Editor in Chief of "Electrochem", MDPI and Associated Editor of "Materials", MDPI. His majorities are microelectronics, metallurgy, surface finishing, chemical engineering, liquid crystal and polymer science. His recent topic has been development of novel electrodeposition process toward application into MEMS technology and the evaluation method of physical properties of the electrodeposited materals.

External link

Degree

Bachelor (Engineering) ( 1996.3 Tokyo Institute of Technology )
Master of Engineering ( 1993.3 Tokyo Institute of Technology )
Doctor of Engineering ( 1991.3 Tokyo Institute of Technology )

Research Interests

Metal, Electroplating, Material Evaluation, Electronics, Semiconductor, MEMS
Electrochemical Sensor
Madical device Material
Nano-Crystal Material
Wearable device
Electroless Plating
Sensing Material
Metal
Electroplating
MEMS
Crystal structure

Research Areas

Nanotechnology/Materials / Material processing and microstructure control

Education

Tokyo Institute of Technology Graduate School of Science and Engineering Division of Polymer Chemistry

- 1996.3

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Tokyo Institute of Technology Graduate School of Science and Engineering Department of Polymer Engineering

1991.4 - 1993.3

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Country： Japan

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Tokyo Institute of Technology Faculty of Engineering Department of Polymer Chemistry

- 1991.3

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Research History

Institute of Science Tokyo Institute of Integrated Research Professor

2024.10

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Country：Japan

Notes：Professor

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Tokyo Institute of Technology Institute of Innovative Research Professor

2017.4

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Country：Japan

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Tokyo Institute of Technology Precision and Intelligence Laboratory Associate Professor

2005.10 - 2017.3

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Tokyo University of Agriculture and Technology Graduate School of Engineering Research Associate Professor

2005.4 - 2005.9

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Country：Japan

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Tokyo University of Agriculture and Technology Graduate School of Engineering Assistant Professor

2000.7 - 2005.3

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Country：Japan

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Nippon Oil Company Central Technical Research Laboratory Researcher

1996.4 - 2000.6

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Country：Japan

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Professional Memberships

International Society of Electrochemistry

2016.5

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The Electrochemical Society

2016.4

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（社）応用物理学会

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The Cociety of Chemical Engineers, Japan

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The Japan Institute of Metals and Materials

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Committee Memberships

応用物理学会講演会企画運営委員

2022.4 - 2024.3

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Committee type：Academic society

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MDPI Materials Associate Editor

2018.4

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Committee type：Other

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MDPI Electrochem Editor in Chief

2018.4

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Committee type：Other

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応用物理学会プログラム編集委員

2016.4

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Committee type：Academic society

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Papers

Metal@Semiconductor Core@Shell and Yolk@Shell Nanostructures for Photocatalytic Hydrogen Production Reviewed

Hsuan‐Hung Kuo, Jung‐Hoe Her, Chun‐Yi Chen, Tso‐Fu Mark Chang, Masato Sone, Yung‐Jung Hsu

Small Structures 7 ( 3 ) 7:e202500632 2026.3

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Language：English Publishing type：Research paper (scientific journal) Publisher：Wiley

Photocatalytic hydrogen production is a promising pathway to sustainable hydrogen, yet practical deployment requires simultaneous advances in light harvesting, interfacial charge separation, and durability for photocatalyst designs. This review examines metal@semiconductor core@shell and yolk@shell nanostructures, where targeted modulation of core composition, shell thickness, void size, and yolk morphology governs charge dynamics and surface reaction kinetics, the primary determinants of photocatalytic performance. We catalog a synthesis toolbox spanning one‐step and two‐step routes, galvanic replacement, Kirkendall conversion, and ion exchange, and map each method to the resulting architectures to guide selection of chemistries aligned with specific material sets and performance goals. Representative case studies show how core/yolk/shell engineering and support immobilization strengthen interfacial charge transfer and enhance operational stability. Furthermore, we distill practical design rules and present a standardized performance summary that benchmarks best‐in‐class systems. Finally, we identify remaining challenges and outline actionable solutions, thereby guiding the rational development of next‐generation core@shell and yolk@shell photocatalysts.

DOI： 10.1002/sstr.202500632

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Other Link： https://onlinelibrary.wiley.com/doi/full-xml/10.1002/sstr.202500632
Cu–EDTA-assisted electrodeposition of Cu/polyaniline composite electrodes for non-enzymatic electrochemical glucose sensing Reviewed

Runze Huang, Tomoyuki Kurioka, Chun-Yi Chen, Hwai En Lin, Yung-Jung Hsu, Tso-Fu Mark Chang, Masato Sone

Surface and Coatings Technology 133410 - 133410 2026.3

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Authorship：Last author Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.surfcoat.2026.133410

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Effect of Calcination Temperature on Photocatalytic and Fenton-like Dye Degradation over Spinel CoCr ₂ O ₄ Nanomaterials Reviewed

Yu-Hao Chen, Xinyu Jin, Shota Kitaoka, Chun-Yi Chen, Tomoyuki Kurioka, Masato Sone, Yung-Jung Hsu, Satoshi Okamoto, Tso-Fu Mark Chang

ACS Applied Nano Materials 2026.2

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Language：English Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

DOI： 10.1021/acsanm.5c05687

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Single-axis gold micro-electro-mechanical-systems capacitive accelerometer with circular proof-mass for suppressing warpage Reviewed

Masako Okumura, Tomoyuki Kurioka, Torauto Yamada, Tatsuhiko Mori, Katsuyuki Machida, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

Japanese Journal of Applied Physics 2026.2

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Authorship：Corresponding author Language：English Publishing type：Research paper (scientific journal) Publisher：IOP Publishing

Abstract

This paper describes the structural stability and device characteristics of a single-axis gold proof-mass MEMS (micro-electro-mechanical-systems) capacitive accelerometer fabricated using Ti/Au multilayer metal technology. We propose a circular proof-mass structure to suppress warping deformation of the proof-mass caused by the mismatch in thermal expansion coefficients between Ti and Au. The measured warpage of the fabricated device is less than 1% related to the proof-mass radius. The MEMS capacitive accelerometer shows a valid capacitance-voltage (C-V) response characteristic due to warpage suppression. The experimental measurements determine its sensitivity and Brownian noise at 2.3 pF g−1 and 0.17 μg Hz−1/2, respectively. These values satisfy the specification for the detection of μg-level acceleration. It is confirmed that the use of the circular proof-mass structure for the MEMS capacitive accelerometers realizes its structural stability with high sensitivity.

DOI： 10.35848/1347-4065/ae4687

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Other Link： https://iopscience.iop.org/article/10.35848/1347-4065/ae4687/pdf
Ag Nanowires/Polydimethylsiloxane Composite Thin Films for Stretchable, Transparent Electrodes: Applications for Flexible Electronic Devices Reviewed

An-Jun Zheng, Tso-Fu Mark Chang, Masato Sone, Wan-Ting Chiu

ACS Applied Nano Materials 2026.2

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Language：English Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

DOI： 10.1021/acsanm.5c05760

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Metal-organic framework-derived carbons coupled CdSe quantum dots for solar H2 production beyond visible region Reviewed

Chien-Yi Wang, Yu-Chen Wei, Yu-Chang Lin, Sudhakar Narra, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Ying-Chih Pu, Eric Wei-Guang Diau, Yan-Gu Lin, Cheng-Yu Wang, Yung-Jung Hsu

Applied Catalysis B: Environment and Energy 126552 - 126552 2026.2

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Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.apcatb.2026.126552

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Highly functional Ag nanowires/PDMS transparent conductive films enabled by thermal-assisted multilayer coating for flexible electronic devices Reviewed

Yutong Jia, An-Jun Zheng, Tso-Fu Mark Chang, Masato Sone, Wan-Ting Chiu

Surface and Coatings Technology 133327 - 133327 2026.2

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Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.surfcoat.2026.133327

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Effect of Supercritical Carbon Dioxide Emulsification on Nickel Electroplating in Sulfamate Baths at Various CO ₂ Volume Fractions

Wending Hou, Chun-Yi Chen, Tomoyuki Kurioka, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Tso-Fu Mark Chang, Masato Sone

Journal of The Electrochemical Society 173 ( 3 ) 032501 - 032501 2026.1

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Authorship：Last author,　Corresponding author Language：English Publishing type：Research paper (scientific journal) Publisher：The Electrochemical Society

This study examines nickel electroplating in supercritical carbon dioxide (scCO ₂ )-emulsified nickel sulfamate baths, focusing on the effects of CO ₂ volume fractions (10–80 vol.%) at a current density of 0.12 A cm ⁻² . The inclusion of scCO ₂ significantly enhanced film quality, even at high CO ₂ concentrations. However, Faradaic efficiency (FE) decreased from 95% to 75% as CO ₂ volume fractions increased, attributed to intensified hydrogen evolution reactions (HER) caused by more negative deposition potentials and the insulating scCO ₂ dispersed phase. Electrochemical analysis revealed pronounced potential fluctuations at higher CO ₂ fractions due to intermittent electrode contact with the dispersed phase, which amplified HER and reduced the effective plating area. The conductivity of the scCO ₂ -emulsified bath followed the Maxwell–Garnett model, indicating isolated scCO ₂ dispersed phases in a conductive medium. Despite reductions in FE and Vickers hardness (from 750 to 580 Hv), the films maintained smooth surfaces and fine grain sizes (∼10 nm). These results demonstrate the potential of scCO ₂ emulsification to produce high-quality nickel coatings and provide a framework for advancing electroplating in complex multiphase electrolytes.

DOI： 10.1149/1945-7111/ae3b15

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Other Link： https://iopscience.iop.org/article/10.1149/1945-7111/ae3b15/pdf
Review of Hot-Hole Photocatalysis in Plasmonic Nanostructures Reviewed

Yu-Ting Wang, Ming-Yu Kuo, Yu-An Chien, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Yung-Jung Hsu

ACS Applied Nano Materials 2026.1

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Language：English Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

DOI： 10.1021/acsanm.5c05716

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Promoting effects of gaseous CO2 and supercritical CO2 on the degradation of plastics: A review Reviewed

Yanbing Liu, Jinwen Shi, Xinyu Jin, Wending Hou, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Liejin Guo

Chemical Engineering Journal 528 172036 - 172036 2026.1

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Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.cej.2025.172036

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Special Issue Commemorating the Establishment of Institute of Science Tokyo

Naoto Ohtake, Hiroyuki Kagechika, Michikazu Hara, Masato Sone, Tso-Fu Mark Chang

ACS Applied Nano Materials 8 ( 51 ) 24283 - 24284 2025.12

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Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

DOI： 10.1021/acsanm.5c05322

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Evaluation of annealing effects on the deformation of Ti/Au multi-layered micro-cantilevers

Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

Micro and Nano Engineering 100333 - 100333 2025.11

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Authorship：Last author Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.mne.2025.100333

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Phase change of core-shell CuO@Cu7S4 cubic photocatalysts with enhanced and stable H2 production activity

Chi-Jung Chang, Tso-Fu Mark Chang, Ting-Hao Yang, Wei-Kai Su, Chun-Yi Chen, Masato Sone, Kuen-Song Lin

Journal of the Taiwan Institute of Chemical Engineers 176 106297 - 106297 2025.11

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Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.jtice.2025.106297

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Piezoelectricity Induced by Na-Doping in NiFe2O4 Nanoparticles for Piezocatalytic Dye Degradation

Xinyu Jin, Yu-Hao Chen, Chun-Yi Chen, Tomoyuki Kurioka, Andrew Harold Gibbons, Masato Sone, Yung-Jung Hsu, Satoshi Okamoto, Tso-Fu Mark Chang

ACS Applied Nano Materials 8 ( 43 ) 20952 - 20960 2025.10

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Language：English Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

DOI： 10.1021/acsanm.5c03774

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Evaluation of the Annealing Induced Warpage of an Electrodeposited-Au Octagonal Proof Mass with a Ti/Au Multi-Layered Structure toward MEMS Capacitive Accelerometers Reviewed

Tatsuhiko Mori, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

Journal of The Electrochemical Society 172 102508 2025.10

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Authorship：Last author,　Corresponding author Language：English Publishing type：Research paper (scientific journal) Publisher：The Electrochemical Society

Abstract

Annealing effects of the fabrication process on the concave warpage deformation of an electrodeposited-Au octagonal proof mass with a Ti/Au multi-layered structure are reported. The octagonal proof mass is fabricated by using multi-layer metal technology, which consists of the gold electrodeposition and sacrificial film formation. The annealing at and below 150 °C hardly deforms the octagonal proof mass, whereas the annealing at 200 °C induces its concave warpage deformation, and the increase in the annealing temperature causes greater deformation. On the other hand, even after the annealing at 300 °C, the warpage of the octagonal proof mass remains 1% of the length from the center to the periphery of the octagonal proof mass. Also, the measured warpage is found to be approximately one-seventh that of the electrodeposited-Au square proof mass with the almost same size. These results reveal that the octagonal shape is advantageous in the suppression of the warpage deformation of the proof mass.

DOI： 10.1149/1945-7111/ae11d5

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Other Link： https://iopscience.iop.org/article/10.1149/1945-7111/ae11d5/pdf
Heterogeneous Z-scheme CuO/ZnO aerogel photocatalyst for photocatalytic degradation of organic dye Reviewed

Dhayanantha Prabu Jaihindh, Yi-Feng Lin, Li-Hsien Tseng, Philip Anggo Krisbiantoro, Kevin C.-W. Wu, Kartikeya Shukla, Masato Sone, Tso-Fu Mark Chang, Chun-Yi Chen

Journal of the Taiwan Institute of Chemical Engineers 175 106281 - 106281 2025.10

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Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.jtice.2025.106281

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Void-Free Smooth Nickel Electrodeposition with Supercritical Carbon Dioxide Emulsified Sulfamate Bath in High Current Density Reviewed

Wending Hou, Chun-Yi Chen, Tomoyuki Kurioka, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Tso-Fu Mark Chang, Masato Sone

Journal of The Electrochemical Society 172 092515 2025.9

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Authorship：Last author,　Corresponding author Language：English Publishing type：Research paper (scientific journal) Publisher：The Electrochemical Society

Abstract

Supercritical carbon dioxide (scCO₂) emulsions are used in the electrodeposition of nickel from a nickel sulfamate bath at current densities ranging from 0.03 to 0.36 A/cm². ScCO₂ emulsions are formed by mixing scCO₂, surfactants, and the aqueous nickel sulfamate bath. Nickel films obtained by electrodeposition with scCO₂ emulsions (ESCE) were compared to those produced by conventional electrodeposition (CONV). The use of scCO₂ emulsions improves the quality of the nickel film, even at high current densities up to 0.36 A/cm², as evidenced by reduced grain size and decreased surface roughness. The Faradaic efficiency (FE) of the deposition reaction by CONV gradually decreased from 95% to 90% as the current density increased from 0.03 to 0.36 A/cm², while the FE by ESCE decreased from 82% to 70%. The lowered FE is suggested to result from promoted hydrogen evolution due to the introduction of scCO₂ emulsions. Grain refinement and an increased Vickers hardness value of up to 780 HV are attributed to the periodic plating characteristic mechanism.

DOI： 10.1149/1945-7111/ae05cf

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Other Link： https://iopscience.iop.org/article/10.1149/1945-7111/ae05cf/pdf
Electrochemical Integration of Au Nanoparticles into Poly(3,4-ethylenedioxythiophene) for Nonenzymatic Glucose Sensing Reviewed

Tomoyuki Kurioka, Joji Higuchi, Yu Zhou, Yung-Jung Hsu, Tso-Fu Mark Chang, Masato Sone

ACS Applied Nano Materials 8 ( 36 ) 17768 - 17775 2025.9

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Language：English Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

DOI： 10.1021/acsanm.5c03878

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Ni-P metallization of nylon 6,6 yarns with varying twist numbers by supercritical CO2 catalyzation toward weavable devices

Kazuhiro Shibata, Tomoyuki Kurioka, Hikaru Kondo, Nao Yoshida, Wan-Ting Chiu, Chun-Yi Chen, Tso-Fu Mark Chang, Hiromichi Kurosu, Masato Sone

Micro and Nano Engineering 28 100304 - 100304 2025.9

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Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.mne.2025.100304

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Bimetallic and Magnetic CoFe-/Nitrogen-Doped Carbon Nanocomposites as Catalysts for the Degradation of Rhodamine B Reviewed

Dhayanantha Prabu Jaihindh, Si-Bei Lu, Tzu-Ting Chang, Yi-Feng Lin, Kartikeya Shukla, Tso-Fu Mark Chang, Masato Sone, Chun-Yi Chen

ACS Applied Nano Materials 8 ( 35 ) 17154 - 17164 2025.8

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Language：English Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

DOI： 10.1021/acsanm.5c02849

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Application of high-sensitivity acceleration sensor detecting micro-mechanomyogram and deep learning for Parkinson’s disease classification Reviewed

Jingyu Quan, Hirotaka Uchitomi, Ryo Shigeyama, Chenguang Gao, Taiki Ogata, Akira Inaba, Satoshi Orimo, Hiroyuki Ito, Katsuyuki Machida, Masato Sone, Yoshihiro Miyake

Scientific Reports 15 ( 1 ) 30791 2025.8

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Language：English Publishing type：Research paper (scientific journal) Publisher：Springer Science and Business Media LLC

DOI： 10.1038/s41598-024-74526-x

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Other Link： https://www.nature.com/articles/s41598-024-74526-x
Electrodeposition of Atomic-Sized Gold on PANI Derivatives as Catalytic Electrode for Low Alcohol Oxidation Reviewed

Keisuke Okamoto, Tomoyuki Kurioka, Kengo Watanabe, Shohei Yoshida, Yung-Jung Hsu, Tso-Fu Mark Chang, Masato Sone

Journal of The Electrochemical Society 172 083506 2025.7

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Authorship：Last author Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1149/1945-7111/adf889

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Electrochemical Hybridization via Simultaneous Electrochemical Doping of Poly(3‐Methoxythiophene) with Au Electrodeposition for Anodic Oxidation of 1‐Propanol Invited Reviewed

Tomoyuki Kurioka, Tso‐Fu Mark Chang, Masato Sone

Advanced Energy and Sustainability Research 6 ( 7 ) 2400420 2025.7

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Authorship：Last author Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1002/aesr.202400420

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Full-Spectrum-Responsive Au@Cu₇S₄-Decorated Monoclinic TiO₂ Nanowires for Solar Hydrogen Production

Yu-Ting Wang, Hsuan-Hung Kuo, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Yung-Jung Hsu

ACS Applied Materials & Interfaces 17 ( 28 ) 40340 - 40352 2025.6

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Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

DOI： 10.1021/acsami.5c03462

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Polyaniline-Supported Atomic-Level Pt and Pt-Au Clusters as Catalytic Electrodes in Propanol Oxidation Reviewed

Kengo Watanabe, Keisuke Okamoto, Hiroki Kawakami, Shohei Yoshida, Tomoyuki Kurioka, Chun-Yi Chen, Chi-Hua Yu, Yung-Jung Hsu, Takamichi Nakamoto, Masato Sone, Tso-Fu Mark Chang

Materials 18 ( 11 ) 2594 2025.6

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Language：English Publishing type：Research paper (scientific journal)

DOI： 10.3390/ma18112594

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Electrochemical Properties of Copper Electroplating with Supercritical Carbon Dioxide Emulsion Invited Reviewed

Kazuhito Higuchi, Tso-Fu Mark Chang, Masato Sone

Journal of the Japan Institute of Metals and Materials 89 ( 6 ) 217 - 223 2025.6

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Authorship：Last author Language：Japanese Publishing type：Research paper (scientific journal)

DOI： 10.2320/jinstmet.JB202304

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Recent Advance of Metallic Materials toward Next Generation Electronics Invited Reviewed

Masato Sone

JOURNAL OF THE JAPAN INSTITUTE OF METALS AND MATERIALS 89 ( 6 ) 250 - 205 2025.6

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Authorship：Lead author,　Corresponding author Language：Japanese Publishing type：Research paper (scientific journal)

DOI： 10.2320/jinstmet.JPR2025901

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Evaluation of Mechanical Properties of Electrodeposited Nickel Film by Using Micro-Testing Method Invited Reviewed

Takashi Nagoshi, Tso-Fu Mark Chang, Masato Sone

JOURNAL OF THE JAPAN INSTITUTE OF METALS AND MATERIALS 89 ( 6 ) 211 - 216 2025.6

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Authorship：Last author Language：Japanese Publishing type：Research paper (scientific journal)

DOI： 10.2320/jinstmet.JB20230

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Supercritical Carbon Dioxide Assisted Metallization toward Design of Electronic Components Invited Reviewed

Po-Wei Cheng, Tomoyuki Kurioka, Chun-Yi Chen, Wan-Ting Chiu, Kenichi Tokuoka, Mitsuo Sano, Masato Sone, Hiromichi Kurosu, Tso-Fu Mark Chang

Journal of the Japan Institute of Metals and Materials 89 ( 6 ) 224 - 230 2025.6

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Language：English Publishing type：Research paper (scientific journal) Publisher：Japan Institute of Metals

DOI： 10.2320/jinstmet.jb202302

DOI： 10.2320/jinstmet.J202504

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Sintered NiFe₂O₄ Nanoparticles for the Photocatalytic Degradation of Malachite Green

Xinyu Jin, Jhen-Yang Wu, Junan Wang, Chun-Yi Chen, Tomoyuki Kurioka, Masato Sone, Yung-Jung Hsu, Satoshi Okamoto, Tso-Fu Mark Chang

ACS Applied Nano Materials 8 ( 17 ) 9066 - 9076 2025.4

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Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

DOI： 10.1021/acsanm.5c01764

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Near-Infrared-Responsive Semiconductor Quantum Dots for Solar Photocatalysis Invited Reviewed

Jen-An Shih, Shan-Jen Yang, Chun-Yi Chen, Masato Sone, Tso-Fu Mark Chang, Ying-Chih Pu, Yung-Jung Hsu

ACS Applied Nano Materials 8 ( 16 ) 8154 - 8166 2025.4

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Language：English Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

DOI： 10.1021/acsanm.5c00629

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Supercritical CO2 assisted metallization of polyethylene terephthalate yarns with various twist number

Hikaru Kondo, Tomoyuki Kurioka, Kazuhiro Shibata, Takumi Suda, Wan-Ting Chiu, Chun-Yi Chen, Yuko Mima, Roka Ueno, Arisa Jinno, Hiromichi Kurosu, Masato Sone, Tso-Fu Mark Chang

The Journal of Supercritical Fluids 218 106501 - 106501 2025.4

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Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.supflu.2024.106501

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Design and evaluation of a dual-detection range single-axis MEMS capacitive accelerometer with gold proof-mass structure for suppressed warpage Reviewed

Devi Srujana Tenneti, Chihaya Mukaide, Kisuke Miyado, Torauto Yamada, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito

Japanese Journal of Applied Physics 64 04SP20 2025.3

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Language：English Publishing type：Research paper (scientific journal) Publisher：IOP Publishing

Abstract

This paper presents a dual-detection range single-axis MEMS accelerometer and an octagonal gold proof-mass structure, which suppresses the proof-mass warpage caused during MEMS process. It comprises two devices; One device offers a detection range of 0.1g–10g (1g = 9.8m/s²), while the other, a large, hollow structure surrounding the central device, operates in µg level-0.1g. Simulation results clarify warpage suppression, even with a large hollow design. Based on the simulation, a MEMS accelerometer is designed and fabricated using multilayer-metal technology. The measurements confirm that the warpage in the fabricated device is suppressed from 27µm to 4µm. A Brownian noise and sensitivity of 0.13µg/√Hz and 1.8pF/g, respectively, are obtained for µg level-0.1g detection range. For the other device, the Brownian noise is 0.47µg/√Hz and the sensitivity is 5.3×10^-2pF/g in the 0.1g-1g range and 6.9×10^-2pF/g in the 1g–10g range. Therefore, the proposed proof-mass structure is effective for achieving the dual-detection range MEMS accelerometer.

DOI： 10.35848/1347-4065/adc3a0

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Other Link： https://iopscience.iop.org/article/10.35848/1347-4065/adc3a0/pdf
A Review on Metallic Nanomaterials for Non–enzymatic Glucose Sensors: from Fundamental Mechanisms to Recently Developed Nanomaterials Reviewed

Wan-Ting Chiu, Tso-Fu Mark Chang, Masato Sone, Hideki Hosoda, Agnès Tixier-Mita, Hiiroshi Toshiyoshi

ACS Applied Nano Materials 8 ( 14 ) 6818 - 6838 2025.3

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Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1021/acsanm.4c06706

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Enhancement of Photocatalytic Activity in BiFeO3 Nanoparticles through Electrical Polarization Reviewed

Jhen-Yang Wu, Xinyu Jin, Junan Wang, Zhitao Hu, Chun-Yi Chen, Tomoyuki Kurioka, Justin Llandro, Andrew H. Gibbons, Masato Sone, Yung-Jung Hsu, Satoshi Okamoto, Tso-Fu Mark Chang

Advanced Energy and Sustainability Research 6 ( 7 ) 2400285 2025.1

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Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1002/aesr.202400285

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Manipulation of interfacial charge dynamics for metal–organic frameworks toward advanced photocatalytic applications Reviewed

Chien-Yi Wang, Huai-En Chang, Cheng-Yu Wang, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Yung-Jung Hsu

Nanoscale Advances 6 ( 4 ) 1039 - 1058 2024.11

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Language：English Publishing type：Research paper (scientific journal) Publisher：Royal Society of Chemistry (RSC)

By summarizing recent developments in the modulation of interfacial charge dynamics for MOF-based photocatalysts, this minireview delivers inspiring insights to help researchers harness the merits of MOFs and create versatile photocatalytic systems.

DOI： 10.1039/d3na00837a

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Influence of Supercritical CO2 Emulsified Electrolyte on the Morphology of Electrodeposited Polypyrrole Films Reviewed

Punvinai Vinaisuratern, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone

Journal of The Electrochemical Society 171 ( 9 ) 092504 2024.9

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Authorship：Last author Language：English Publishing type：Research paper (scientific journal) Publisher：The Electrochemical Society

Abstract

Electrodeposition of polypyrrole (PPy) in supercritical carbon dioxide (scCO2) emulsified electrolytes containing anionic surfactant sodium dodecyl sulfate (SDS) has been reported. By changing SDS concentration and the CO2/water volume ratio, PPy films with different morphologies, such as nodular, granular, and flower-like structures, are fabricated. The PPy films prepared in the scCO2 emulsified electrolytes show better redox properties than PPy films prepared in an aqueous electrolyte. Moreover, their redox properties are found to be affected by their respective morphologies.

DOI： 10.1149/1945-7111/ad77f7

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Other Link： https://iopscience.iop.org/article/10.1149/1945-7111/ad77f7/pdf
Simultaneous Necking and Barreling Deformation Behaviors in Bending of Single-Crystal Gold Micro-Cantilever

Kazuya Fujita, Kosuke Suzuki, Keisuke Asano, Chun-Yi Chen, Tomoyuki Kurioka, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone, Tso-Fu Mark Chang

Materials 17 ( 16 ) 4054 - 4054 2024.8

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Authorship：Corresponding author Language：English Publishing type：Research paper (scientific journal) Publisher：MDPI AG

Necking and barreling deformation behaviors occurred simultaneously during the bending test of a single-crystal gold micro-cantilever (sample A) with the loading direction parallel to the [1-10] orientation and the neutral plane parallel to the [110] orientation. In contrast, for another single-crystal gold micro-cantilever, sample B, with the loading direction aligned parallel to the [0.37 −0.92 0.05] orientation and the neutral plane parallel to the [0.54 0.28 0.78] orientation, predominant slip band deformation was noted. Sample A exhibited activation of four slip systems, whereas sample B demonstrated activity in only a single-slip system. This difference suggests that the presence of multiple slip systems contributes to the concurrent occurrence of necking and barreling deformations. Furthermore, variations in the thickness of the micro-cantilevers resulted in observable strengthening, indicating that the effect of sample size is intricately linked to the geometry of the cross-section, which we have termed the “sample geometry effect”.

DOI： 10.3390/ma17164054

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Yolk@Shell Nanostructures for Water Splitting: Current Development and Future Prospects

Jhen-Yang Wu, Yu-Chen Wei, Tsukasa Torimoto, Yu-An Chien, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Ping-Yen Hsieh, Yung-Jung Hsu

ACS Materials Letters 6 ( 9 ) 4066 - 4089 2024.8

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Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

DOI： 10.1021/acsmaterialslett.4c00790

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Influence of Pulsed Reverse Electrodeposition on Mechanical Properties of Ni–W Alloys Reviewed

Zeyu Gu, Jhen-Yang Wu, Yiming Jiang, Tomoyuki Kurioka, Chun-Yi Chen, Hwai-En Lin, Xun Luo, Daisuke Yamane, Masato Sone, Tso-Fu Mark Chang

Electrochem 5 ( 3 ) 287 - 297 2024.7

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Publishing type：Research paper (scientific journal) Publisher：MDPI AG

Ni–W alloys have received considerable interest as a promising structural material for microelectromechanical systems (MEMS) due to their exceptional properties, including hardness, ductility, corrosion resistance, and thermal stability. However, the electrodeposition of Ni–W alloys in the MEMS fabrication process to achieve intact structures with a thickness of several tens of micrometers is challenging due to the occurrence of cracking caused by side reactions and internal stresses during the electrodeposition process. To address this issue, our focus was on pulsed reverse electrodeposition (PRE) as a potential solution. The utilization of the PRE technique allows for a high concentration of reactive species on the electrode surface, thereby mitigating side reactions such as hydrogen generation. In this study, we examined the effects of the PRE method on the morphological characteristics, average crystal grain size, Vickers hardness, and micro-mechanical properties of Ni–W alloys.

DOI： 10.3390/electrochem5030018

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Metallization of polyetherimide with 3D structures by supercritical carbon dioxide-assisted electroless Ni P plating

Ami Iwasaki, Tomoyuki Kurioka, Po-Wei Cheng, Chun-Yi Chen, Tso-Fu Mark Chang, Kei Takase, Hiroshi Ishihata, Masato Sone

Micro and Nano Engineering 100271 - 100271 2024.7

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Authorship：Last author Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.mne.2024.100271

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Supercritical CO2-Assisted Electroless Plating of Ultrahigh-Molecular-Weight Polyethylene Filaments for Weavable Device Application Reviewed

Hikaru Kondo, Tomoyuki Kurioka, Wan-Ting Chiu, Chun-Yi Chen, Jhen-Yang Wu, Tso-Fu Mark Chang, Machiko Yamaguchi, Hiromichi Kurosu, Masato Sone

Electrochem 5 ( 2 ) 213 - 222 2024.6

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Language：English Publishing type：Research paper (scientific journal) Publisher：MDPI AG

This study reports on the use of supercritical CO2 (scCO2) for the metallization of ultrahigh-molecular-weight polyethylene (UHMW-PE) filaments, which are used as functional components in weavable devices. UHMW-PE is well known for its chemical and impact resistance, making it suitable for use in bulletproof clothing and shields. However, its chemical resistance poses a challenge for metallization. By utilizing scCO2 as the solvent in the catalyzation process, a uniform and defect-free layer of Ni-P is successfully deposited on the UHMW-PE filaments. The deposition rate of Ni-P is enhanced at higher temperatures during the scCO2 catalyzation. Importantly, the durability of the Ni-P-metalized UHMW-PE filaments is improved when the scCO2 catalyzation is carried out at 120 °C, as evidenced by minimal changes in electrical resistivity after a rolling test.

DOI： 10.3390/electrochem5020013

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Cross-Sectional Geometry Effect on Bending Strength of Gold Micro-Cantilever with Trapezoidal Cross-Section Reviewed

Ryohei Hori, Kazuya Fujita, Chun Yi Chen, Tomoyuki Kurioka, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

Micro and Nano Engineering 23 100259 2024.5

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Authorship：Last author Language：English

DOI： 10.1016/j.mne.2024.100259

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Double-Hollow Au@CdS Yolk@Shell Nanostructures as Superior Plasmonic Photocatalysts for Solar Hydrogen Production Reviewed

Yi-An Chen, Yuhi Nakayasu, Yu-Chang Lin, Jui-Cheng Kao, Kai-Chi Hsiao, Quang-Tuyen Le, Kao-Der Chang, Ming-Chung Wu, Jyh-Pin Chou, Chun-Wei Pao, Tso-Fu Mark Chang, Masato Sone, Chun-Yi Chen, Yu-Chieh Lo, Yan-Gu Lin, Akira Yamakata, Yung-Jung Hsu

Advanced Functional Materials 2402392 2024.4

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Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1002/adfm.202402392

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Decoration of atomic PdxAuy (1 ≤ x + y ≤ 4) clusters on polyaniline in electrochemical sensing of 1-propanol Reviewed

Shohei Yoshida, Keisuke Okamoto, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Yi-Feng Lin, Yung-Jung Hsu, Takamichi Nakamoto, Masato Sone, Tso-Fu Mark Chang

Surface and Coatings Technology 483 130762 - 130762 2024.4

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Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.surfcoat.2024.130762

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Effects of the strain rate in compression of electrodeposited gold micro-pillars toward the design of MEMS components Reviewed

Syota Kanno, Taro Omura, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone, Tso-Fu Mark Chang

Micro and Nano Engineering 23 100254 2024.4

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Language：English

DOI： 10.1016/j.mne.2024.100254

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Warpage Study of Electrodeposited-Au Micro-Components with Ti/Au Multi-Layered Structures toward MEMS Applications

Taro Omura, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

Journal of The Electrochemical Society 171 ( 3 ) 032501 - 032501 2024.3

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Authorship：Last author Publishing type：Research paper (scientific journal) Publisher：The Electrochemical Society

Electrodeposited Au-based micro-electromechanical systems (MEMS) capacitive accelerometers with Ti/Au multi-layered structures are promising devices for detecting very low accelerations due to the high mass density of Au. On the other hand, the large difference in the coefficients of thermal expansion (CTE) between Ti and Au causes warpage in the electrodeposited-Au proof masses in MEMS capacitive accelerometers, which reduces the accuracy of the acceleration sensing. In this study, the warpage behavior of electrodeposited Au proof masses with Ti/Au structures is evaluated to clarify factors affecting their structural stability. Ti/Au multi-layered proof masses with four different multi-layered structures and seven different sizes are fabricated. The warpage of the proof mass is quantified by the height information determined by a 3D optical microscope. The 3D optical microscopy analyses show that the observed concave warpage is suppressed by increasing the layer number of Ti/Au layered structures in the proof mass. The warpage is also investigated by Finite Element Analysis (FEA) simulations. The experimental results are in good agreement with the FEA simulations.

DOI： 10.1149/1945-7111/ad2ba9

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Other Link： https://iopscience.iop.org/article/10.1149/1945-7111/ad2ba9/pdf
Dependence of structural design on effective Young's Modulus of Ti/Au multi-layered micro-cantilevers Reviewed

Shunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

Micro and Nano Engineering 29 100249 2024.3

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Authorship：Last author Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.mne.2024.100249

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Clarification of geometric effects on long-term structural stability of Ti/au multi-layered Micro-cantilevers Reviewed

Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

Micro and Nano Engineering 23 100244 - 100244 2024.3

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Authorship：Last author Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.mne.2024.100244

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Tunable Photocatalytic Properties of Au-Decorated BiFeO3 Nanostructures for Dye Photodegradation Reviewed

Jhen-Yang Wu, Chun-Yi Chen, Junan Wang, Xinyu Jin, Wending Hou, Husan-Hung Kuo, Wan-Ting Chiu, Tomoyuki Kurioka, Masato Sone, Satoshi Okamoto, Yung-Jung Hsu, Tso-Fu Mark Chang

ACS Applied Nano Materials 7 ( 8 ) 9777 - 9788 2024.3

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Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1021/acsanm.4c01702

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Density‐Functional Theory Studies on Photocatalysis and Photoelectrocatalysis: Challenges and Opportunities

Chun‐Han Lin, Jyoti Rohilla, Hsuan‐Hung Kuo, Chun‐Yi Chen, Tso‐Fu Mark Chang, Masato Sone, Pravin P. Ingole, Yu‐Chieh Lo, Yung‐Jung Hsu

Solar RRL 8 ( 10 ) 2300948 2024.2

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Publishing type：Research paper (scientific journal) Publisher：Wiley

Density‐functional theory (DFT) is pivotal in the advancement of photocatalysis and photoelectrocatalysis. Its capability to explore electronic structures of materials contributes significantly to clarifying the mechanisms of photocatalytic (PC) and photoelectrocatalytic (PEC) processes. DFT calculations enable a deeper understanding of how these processes work at a molecular level, which is essential for designing versatile photocatalysts and photoelectrodes and optimizing reaction pathways. In this perspective, key PC and PEC applications, such as H₂ production, CO₂ reduction, dye degradation, and N₂ reduction, where DFT is instrumental in optimizing materials designs and reaction pathways, are highlighted. Exploration on the synergy between experimental research and DFT calculations is highlighted, which is crucial for the development of efficient and environmentally friendly energy solutions. The discussion further extends to challenges and future directions, emphasizing the need for incorporating factors, including discrepancy in scale, light illumination, electrolyte presence, and applied bias, into DFT calculations, to achieve a more comprehensive understanding of PC and PEC systems. In this perspective, it is aimed to provide a holistic view of the current state and potential advancements in photocatalyst and photoelectrode modeling, thereby guiding future research toward more effective and sustainable energy and chemical production processes in PC and PEC systems.

DOI： 10.1002/solr.202300948

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New Trend of Amperometric Gas Sensors Using Atomic Gold-Decorated Platinum/Polyaniline Composites Invited Reviewed

Anifatul Faricha, Parthojit Chakraborty, Tso-Fu Mark Chang, Masato Sone, Takamichi Nakamoto

Chemosensors 12 ( 2 ) 27 - 27 2024.2

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Language：English Publishing type：Research paper (scientific journal) Publisher：MDPI AG

The Amperometric Gas Sensor (AGS) uses an electrode as the transducer element which converts its signal into a current from the electrochemical reaction of analytes taking place at the electrode surface. Many attempts to improve AGS performance, such as modifying the working electrode, applying a particular gas-permeable membrane, and selecting the proper electrolyte, etc., have been reported in the scientific literature. On the other hand, in the materials community, atomic gold has gained much attention because its physicochemical properties dramatically differ from those of gold nanoparticles. This paper provides an overview of the use of atomic gold in AGSs, both in a bulky AGS and a miniaturized AGS. In the miniaturized AGS, the system must be redesigned; for example, the aqueous electrolyte commonly used in a bulky AGS cannot be used due to volatility and fluidity issues. A Room Temperature Ionic Liquid (RTIL) can be used to replace the aqueous electrolyte since it has negligible vapor pressure; thus, a thin film of RTIL can be realized in a miniaturized AGS. In this paper, we also explain the possibility of using RTIL for a miniaturized AGS by incorporating a quartz crystal microbalance sensor. Several RTILs coated onto modified electrodes used for isomeric gas measurement are presented. Based on the results, the bulky and miniaturized AGS with atomic gold exhibited a higher sensor response than the AGS without atomic gold.

DOI： 10.3390/chemosensors12020027

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Photocatalytic Fibers for Environmental Purification: Challenges and Opportunities in the Post‐Pandemic Era Reviewed

Jhen-Yang Wu, Yi-An Chen, Yu-An Chien, Tomoyuki Kurioka, Masato Sone, Chun-Yi Chen, Tso-Fu Mark Chang, Yung-Jung Hsu

Advanced Energy and Sustainability Research 5 2300212 2024.2

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Language：English Publishing type：Research paper (scientific journal) Publisher：Wiley

The COVID‐19 pandemic has underscored the paramount importance of maintaining clean and safe environments. Strengthening environmental purification measures is pivotal for better preparedness and resilience against future health crises. Photocatalytic fibers, due to their versatility and adaptability to various application scenarios, play a pivotal role in the field of environmental purification. In this perspective, light is shed on the pivotal advancements in employing photocatalytic fibers to tackle environmental issues encompassing dye degradation, antibiotics decomposition, heavy metal removal, indoor air purification, and microbial disinfection. These applications hold significant promise in promoting cleaner and healthier environments while aligning with sustainability objectives. However, the implementation of photocatalytic fibers in practical scenarios is not without its challenges. Issues, such as near infrared responsiveness, all‐day active capacity, reusability, and scalability, must be addressed to ensure their reliability and long‐term effectiveness. Potential solutions for surmounting these challenges are also delved, aiming to provide a comprehensive overview for researchers and stakeholders. Exploring new avenues and innovative approaches may pave the way for the widespread deployment of photocatalytic fibers in environmental purification, especially in the post‐pandemic era where the need for clean and safe environments is more evident than ever.

DOI： 10.1002/aesr.202300212

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Serpentine Spring Design Technique for High Sensitivity MEMS Capacitive Accelerometer Fabricated by Gold Multi-layer Metal Technology Reviewed

Kisuke Miyado, Devi Srujana Tenneti, Akira Onishi, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito

Japanese Journal of Applied Physics 63 04SP23 2024.2

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Dual-plasmonic Au@Cu7S4 yolk@shell nanocrystals for photocatalytic hydrogen production across visible to near infrared spectral region Reviewed

Chun-Wen Tsao, Sudhakar Narra, Jui-Cheng Kao, Yu-Chang Lin, Chun-Yi Chen, Yu-Cheng Chin, Ze-Jiung Huang, Wei-Hong Huang, Chih-Chia Huang, Chih-Wei Luo, Jyh-Pin Chou, Shigenobu Ogata, Masato Sone, Michael H. Huang, Tso-Fu Mark Chang, Yu-Chieh Lo, Yan-Gu Lin, Eric Wei-Guang Diau, Yung-Jung Hsu

Nature Communications 15 ( 1 ) 413 2024.1

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Language：English Publishing type：Research paper (scientific journal) Publisher：Springer Science and Business Media LLC

Abstract

Near infrared energy remains untapped toward the maneuvering of entire solar spectrum harvesting for fulfilling the nuts and bolts of solar hydrogen production. We report the use of Au@Cu₇S₄ yolk@shell nanocrystals as dual-plasmonic photocatalysts to achieve remarkable hydrogen production under visible and near infrared illumination. Ultrafast spectroscopic data reveal the prevalence of long-lived charge separation states for Au@Cu₇S₄ under both visible and near infrared excitation. Combined with the advantageous features of yolk@shell nanostructures, Au@Cu₇S₄ achieves a peak quantum yield of 9.4% at 500 nm and a record-breaking quantum yield of 7.3% at 2200 nm for hydrogen production in the absence of additional co-catalysts. The design of a sustainable visible- and near infrared-responsive photocatalytic system is expected to inspire further widespread applications in solar fuel generation. In this work, the feasibility of exploiting the localized surface plasmon resonance property of self-doped, nonstoichiometric semiconductor nanocrystals for the realization of wide-spectrum-driven photocatalysis is highlighted.

DOI： 10.1038/s41467-023-44664-3

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Impurity Analysis of Electroplated Gold Components with Multi-Layered Structures by Thermal Desorption Spectrometry toward Application in Gold Micro Electro Mechanical System Capacitive Accelerometers Reviewed

Takumi Akiyama, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

Micro and Nano Engineering 21 100226 - 100226 2023.9

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Authorship：Last author Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.mne.2023.100226

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High strength Ni matrix TiO2 composites by supercritical CO2 assisted Co-electrodeposition with different sizes of TiO2 particle Reviewed

Yu-An Chien, Chun-Yi Chen, Tomoyuki Kurioka, Masato Sone, Tso-Fu Mark Chang

Micro and Nano Engineering 20 100219 - 100219 2023.9

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Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.mne.2023.100219

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Effects of Bromide Ions in Anomalous Codeposition of Ni-Co Alloys with a Sulfamate Based Electrolyte Reviewed

Yiming Jiang, Chun-Yi Chen, Tomoyuki Kurioka, Xun Luo, Daisuke Yamane, Masato Sone, Tso-Fu Mark Chang

Journal of The Electrochemical Society 170 ( 7 ) 072507 - 072507 2023.7

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Language：English Publishing type：Research paper (scientific journal) Publisher：The Electrochemical Society

Alloy electrodeposition of Ni-Co alloys is known to show an anomalous codeposition behavior, which the concentration of cobalt in the deposited alloy is higher than the concentration of cobalt ions in the electrolyte. In this study, the cobalt content in the alloy is increased from 30 at% to 60 at% through introduction of bromide ions into a sulfamate bath, while addition of chloride ions does not give any significant influences to the alloy. The bromide ions are found to promote the reduction of cobalt ions but inhibit the reduction of nickel ions. Effects of the pH are also investigated to provide possible explanation to the phenomenon observed, and the anomalous codeposition behavior becomes more obvious in a more acidic electrolyte.

DOI： 10.1149/1945-7111/ace47e

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Other Link： https://iopscience.iop.org/article/10.1149/1945-7111/ace47e/pdf
Effect of supercritical carbon dioxide soft particles on incorporation of titanium dioxide nanoparticles into nickel matrix Reviewed

Yu-An Chien, Chun-Yi Chen, Tomoyuki Kurioka, Masato Sone, Tso-Fu Mark Chang

Materials Chemistry and Physics 302 127703 - 127703 2023.7

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Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.matchemphys.2023.127703

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Site‐Selective Synthesis and Concurrent Immobilization of Imine‐Based Covalent Organic Frameworks on Electrodes Using an Electrogenerated Acid Reviewed

Tomoki Shirokura, Tomoki Hirohata, Kosuke Sato, Elena Villani, Kazuyasu Sekiya, Yu-An Chien, Tomoyuki Kurioka, Ryoyu Hifumi, Yoshiyuki Hattori, Masato Sone, Ikuyoshi Tomita, Shinsuke Inagi

Angewandte Chemie International Edition e202307343 2023.6

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Language：English Publishing type：Research paper (scientific journal) Publisher：Wiley

DOI： 10.1002/anie.202307343

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Three Distinct Polar Phases, Isotropic, Nematic and Smectic-A Phases Formed from Fluoro-Substituted Dimeric Molecule with Large Dipole Moment Reviewed

Shigemasa Nakasugi, Sungmin Kang, Tso-Fu Mark Chang, Takaaki Manaka, Hiroki Ishizaki, Masato Sone, Junji Watanabe

The Journal of Physical Chemistry 127 ( 29 ) 6585 - 6595 2023.6

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Authorship：Corresponding author Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1021/acs.jpcb.3c02259

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Solid-state 13C NMR spectroscopic study of supercritical CO2 catalyzation treated polyethylene terephthalate textiles for platinum metallization Reviewed

Arisa Jinno, Yuna Ogasawara, Tomoko Hashimoto, Masaki Mitsumoto, Tso-Fu Mark Chang, Masato Sone, Hiromichi Kurosu

The Journal of Supercritical Fluids 197 105896 - 105896 2023.6

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Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.supflu.2023.105896

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Effect on the Strength of Nickel-Boron Alloys Reviewed

Yiming Jiang, Chun-Yi Chen, Tomoyuki Kurioka, Xun Luo, Daisuke Yamane, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, Masato Sone, Tso-Fu Mark Chang

Materials Letters 349 134742 2023.6

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DOI： 10.1016/j.matlet.2023.134742

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Functionalization of polyethylene terephthalate fabrics with au@Cu2O core@shell nanocrystals for environmental purifications Reviewed

Jhen-Yang Wu, Mei-Jing Fang, Tomoyuki Kurioka, Ting-Hsuan Lai, Ming-Yu Kuo, Yi-Hsuan Chiu, Chun-Wen Tsao, Yi-An Chen, Hsuan-Hung Kuo, Yu-An Chien, Po-Wei Cheng, Bo-You Lin, Sue-Min Chang, Chun-Yi Chen, Masato Sone, Tso-Fu Mark Chang, Yung-Jung Hsu

Micro and Nano Engineering 100217 - 100217 2023.6

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Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.mne.2023.100217

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Supercritical carbon dioxide-assisted gold metallization of 3D-printed structure and the tensile strength Reviewed

Po-Wei Cheng, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Wan-Ting Chiu, Hideki Hosoda, Kei Takase, Hiroshi Ishihata, Masato Sone

MRS Communications 13 ( 3 ) 480 - 485 2023.5

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Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1557/s43579-023-00373-y

Web of Science

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Mechanical Properties Enhancement of Biomedical Au–Cu–Al Shape Memory Alloys by Phase Manipulation Reviewed

Kang-Wei Goo, Wan-Ting Chiu, Akira Umise, Masaki Tahara, Masato Sone, Kenji Goto, Takao Hanawa, Hideki Hosoda

MATERIALS TRANSACTIONS 64 ( 5 ) 962 - 966 2023.5

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Publishing type：Research paper (scientific journal) Publisher：Japan Institute of Metals

DOI： 10.2320/matertrans.mt-mbw2022001

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Array of Miniaturized Amperometric Gas Sensors Using Atomic Gold Decorated Pt/PANI Electrodes in Room Temperature Ionic Liquid Films Reviewed

Anifatul Faricha, Shohei Yoshida, Parthojit Chakraborty, Keisuke Okamoto, Tso-Fu Mark Chang, Masato Sone, Takamichi Nakamoto

Sensors 23 ( 8 ) 4132 - 4132 2023.4

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Language：English Publishing type：Research paper (scientific journal) Publisher：MDPI AG

Miniaturized sensors possess many advantages, such as rapid response, easy chip integration, a possible lower concentration of target compound detection, etc. However, a major issue reported is a low signal response. In this study, a catalyst, the atomic gold clusters of Aun where n = 2, was decorated at a platinum/polyaniline (Pt/PANI) working electrode to enhance the sensitivity of butanol isomers gas measurement. Isomer quantification is challenging because this compound has the same chemical formula and molar mass. Furthermore, to create a tiny sensor, a microliter of room-temperature ionic liquid was used as an electrolyte. The combination of the Au2 clusters decorated Pt/PANI and room temperature ionic liquid with several fixed electrochemical potentials was explored to obtain a high solubility of each analyte. According to the results, the presence of Au2 clusters increased the current density due to electrocatalytic activity compared to the electrode without Au2 clusters. In addition, the Au2 clusters on the modified electrode had a more linear concentration dependency trend than the modified electrode without atomic gold clusters. Finally, the separation among butanol isomers was enhanced using different combination of room-temperature ionic liquids and fixed potentials.

DOI： 10.3390/s23084132

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Correlation of Sample Geometry and Grain Size in Micro-Bending of Electrodeposited Polycrystalline Gold Invited Reviewed

Kosuke Suzuki, Yiming Jiang, Ryohei Hori, Ken Hashigata, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

Materials Today Communications 35 106072 - 106072 2023.4

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DOI： 10.1016/j.mtcomm.2023.106072

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Gold/MnO2 particles decorated on electrodeposited polyaniline toward non-enzymatic electrochemical sensor for glucose Reviewed

Keisuke Okamoto, Hiroki Kawakami, Yu-An Chien, Tomoyuki Kurioka, Wan-Ting Chiu, Parthojit Chakraborty, Takamichi Nakamoto, Yung-Jung Hsu, Masato Sone, Tso-Fu Mark Chang

Micro and Nano Engineering 18 100175 - 100175 2023.4

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Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.mne.2023.100175

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Platinum Metallization of Polyethylene Terephthalate by Supercritical Carbon Dioxide Catalyzation and the Tensile Fracture Strength Reviewed

Po-Wei Cheng, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Wan-Ting Chiu, Hideki Hosoda, Kei Takase, Hiroshi Ishihata, Hiromichi Kurosu, Masato Sone

Materials 16 2377 2023.3

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Authorship：Last author Language：English Publishing type：Research paper (scientific journal)

DOI： 10.3390/ma16062377

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Metallization of 3D-Printed UV Photopolymer Structures by the Incorporation of Pd-Decorated Carbon Nanotubes Reviewed

Chun-Yi Chen, Po-Wei Cheng, Taku Ichibayashi, Tso-Fu Mark Chang, Masato Sone, Suzushi Nishimura

ACS Applied Nano Materials 6 ( 6 ) 4584 - 4593 2023.3

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Language：English Publishing type：Research paper (scientific journal) Publisher：American Chemical Society (ACS)

DOI： 10.1021/acsanm.3c00055

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Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology

Akira Onishi, Kisuke Miyado, Devi Srujana Tenneti, Katsuyuki Machida, Parthojit Chakraborty, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito

IEEE 2023 INERTIAL 2023.3

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DOI： 10.1109/INERTIAL56358.2023.10103943

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Towards planar atomic-gold decorated polyaniline gas sensors for enhanced electrochemical sensing Reviewed

Parthojit Chakraborty, Anifatul Faricha, Keisuke Okamoto, Hiroki Kawakami, Tso-Fu Mark Chang, Masato Sone, Takamichi Nakamoto

IEEE SENSORS JOURNAL 23 ( 7 ) 6481 - 6488 2023.3

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Language：English Publishing type：Research paper (scientific journal) Publisher：Institute of Electrical and Electronics Engineers (IEEE)

DOI： 10.1109/JSEN.2023.3242318

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.Metallization of Textile by Electroless Plating Using Supercritical Carbon Dioxide Toward Application into Wearable Devices Invited Reviewed

Wan-Ting Chiu, Hiroki Mitsumoto, Kenich Tokuoka, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Hiromichi Kurosu, Masato Sone

Journal of The Surface Finishing Society of Japan 74 ( 1 ) 14 - 18 2023.2

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Au@Cu2O core@shell nanocrystals as sustainable catalysts for efficient hydrogen production from ammonia borane Reviewed

Mei-Jing Fang, Yu-Chang Lin, Ting-Hsuan Lai, Ping-Yen Hsieh, Ming-Yu Kuo, Yi-Hsuan Chiu, Chun-Wen Tsao, Yi-An Chen, Jhen-Yang Wu, Yew Chung, Sermon Wu, Yang-Gu Lin, Tso-Fu Mark Chang, Chun-Yi Chen, Masato Sone

Applied Catalysis B: Environmental 324 122198 2023.1

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DOI： 10.1016/j.apcatb.2022.122198

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Bi-doping engineering of Ni-Mn-Ga polycrystals and resulting grain particles for smart Ni-Mn-Ga/polymer composites

Wan-Ting Chiu, Pimpet Sratong-on, Tso-Fu Mark Chang, Masaki Tahara, Masato Sone, Volodymyr Chernenko, Hideki Hosoda

Journal of Materials Research and Technology 23 131 - 142 2023.1

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DOI： 10.1016/j.jmrt.2022.12.174

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Microgravimetric and Amperometric Sensor Coated with Room Temperature Ionic Liquid to Enhance Butanol Isomers Gas Separation Reviewed

Anifatul Faricha, Parthojit Chakraborty, Keisuke Okamoto, Tso-Fu Mark Chang, Masato Sone, Takamichi Nakamoto

IEEE SENSORS JOURNAL 22 ( 24 ) 24471 - 24478 2022.12

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DOI： 10.1109/JSEN.2022.3221114

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Electrodeposition of Ni-B Alloy Film: Effect of Current Density and Heat Treatment on Micro-Mechanical Property Reviewed

Yiming Jiang, Chun-Yi Chen, Tomoyuki Kurioka, Xun Luo, Daisuke Yamane, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, Masato Sone, Tso-Fu Mark Chang

Journal of The Electrochemical Society 169 ( 11 ) 112504 - 112504 2022.10

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Abstract

Ni-B alloy films are prepared by electrodeposition with a Watt’s bath-based electrolyte. The B content decreases from 14.3 at.% to 2.8 at.% as the current density increases from 1 A/dm2 to 4 A/dm2. For applications in miniaturized electronics, the micro-scale mechanical property is evaluated by micro-compression test using micro-pillar type specimens. As-deposited Ni-B alloy films exhibit high mechanical strengths and ductility. The Ni-B alloy films are heat treated to evaluate the thermal stability. After the heat treatment, strengthening and formation of an intermetallic compound, Ni3B, are confirmed. The deformation behavior of the micro-pillars changes from ductile to brittle after the 250 °C heat treatment, and the compressive strength of the Ni-B alloy film having the B content of 2.8 at.% reaches 5.67 GPa due to the precipitation strengthening mechanism by the Ni3B.

DOI： 10.1149/1945-7111/ac9dc2

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Spontaneous Polarization Characteristics in Polar Smectic Phases of Fluoro-Substituted Bent-Shaped Dimeric Molecules Reviewed

Shigemasa Nakasugi, Sungmin Kang, Tso-Fu Mark Chang, Takaaki Manaka, Hiroki Ishizaki, Masato Sone, Junji Watanabe

The Journal of Physical Chemistry B 126 ( 40 ) 8119 - 8127 2022.9

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DOI： 10.1021/acs.jpcb.2c05813

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Simplified Analytical Damping Constant Model for Design of MEMS Capacitive Accelerometer With Gold Perforated Proof-Mass Structure Reviewed

Kohei Shibata, Akihiro Uchiyama, Akira Onishi, Katsuyuki Machida, Parthojit Chakraborty, Shin-Ichi Iida, Toshifumi Konishi, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito

IEEE Sensors Journal 22 ( 15 ) 14769 - 14778 2022.8

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DOI： 10.1109/jsen.2022.3184340

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Electric Switching Behaviors and Dielectric Relaxation Properties in Ferroelectric, Antiferroelectric, and Paraelectric Smectic Phases of Bent-Shaped Dimeric Molecules Reviewed

Shigemasa Nakasugi, Sungmin Kang, Tso-Fu Mark Chang, Hiroki Ishizaki, Masato Sone, Junji Watanabe

The Journal of Physical Chemistry Part: Part B 126 ( 26 ) 4967 - 4976 2022.6

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DOI： 10.1021/acs.jpcb.2c01938

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Electronic Interactions and Charge-Transfer Dynamics for a Series of Yolk–Shell Nanocrystals: Implications for Photocatalysis Reviewed

Jhen-Yang Wu, Ting-Hsuan Lai, Mei-Jing Fang, Jui-Yuan Chen, Ming-Yu Kuo, Yi-Hsuan Chiu, Ping-Yen Hsieh, Chun-Wen Tsao, Huai-En Chang, Yu-Peng Chang, Chien-Yi Wang, Chun-Yi Chen, Masato Sone, Wen-Wei Wu, Tso-Fu Mark Chang, Yung-Jung Hsu

ACS Applied Nano Materials 5 ( 6 ) 8404 - 8416 2022.4

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DOI： 10.1021/acsanm.2c01529

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Electrodeposition and Micro-Mechanical Property Characterization of Nickel–Cobalt Alloys toward Design of MEMS Components Reviewed

Yiming Jiang, Chun-Yi Chen, Xun Luo, Daisuke Yamane, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, Masato Sone, Tso-Fu Mark Chang

Electrochem 3 ( 2 ) 198 - 210 2022.4

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DOI： 10.3390/electrochem3020012

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Dielectric Relaxation Behavior of Ferroelectric Smectic-A Phase in Dimeric Molecules Reviewed

Shigemasa Nakasugi, Sungmin Kang, Junji Watanabe, Masato Sone, Hiroki Ishizaki

IEEJ Transactions on Fundamentals and Materials 142 ( 4 ) 152 - 158 2022.4

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DOI： 10.1541/ieejfms.142.152

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Sample Size Effect in Ni-TiO2 Composites Fabricated by Supercritical CO2 Emulsified Co-Electroplating for Miniaturized Device Reviewed

Yu-An Chien, Chun-Yi Chen, Masato Sone, Tso-Fu Mark Chang

Micro and Nano Engineering 15 100135 2022.4

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DOI： 10.1016/j.mne.2022.100135

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Supercritical Carbon Dioxide-Assisted Platinum Metallization of PET Textile for Wearable Device Reviewed

Masaki Mitsumoto, Chun-Yi Chen, Wan-Ting Chiu, Tso-Fu Mark Chang, Yasushi Watanabe, Arisa Jinno, Hiromichi Kurosu, Masato Sone

Micro and Nano Engineering 15 100132 - 100132 2022.4

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DOI： 10.1016/j.mne.2022.100132

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Effect of current density on micro-mechanical property of electrodeposited gold film evaluated by micro-compression Reviewed

Taro Omura, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone

Surface and Coatings Technology 436 128315 - 128315 2022.3

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DOI： 10.1016/j.surfcoat.2022.128315

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Suppressed Drift and Low-Noise Sensor Module with a Single-Axis Gold Proof-Mass MEMS Accelerometer for Micro Muscle Sound Measurement Reviewed

Akira Onishi, Kohei Shibata, Akihiro Uchiyama, Katsuyuki Machida, Taiki Ogata, Noboru Ishihara, Hirotaka Uchitomi, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito

Japanese Journal of Applied Physics 61 SD1028 2022.3

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Language：English Publishing type：Research paper (scientific journal) Publisher：IOP Publishing

Abstract

This paper describes a highly sensitive microelectromechanical systems (MEMS) accelerometer sensor module to measure micro muscle sounds. Regarding the drift mechanism, we focus on charged particles based on residual water related to MEMS fabrication. Based on temperature programmed desorption (TPD) analysis and electrical experiments, it is clarified that the drift is caused by negatively charged OH− and is suppressed by vacuum packaging. The noise floor can be reduced by the improved sensitivity of the MEMS accelerometer. The developed MEMS accelerometer can realize the sensitivity of 1157.0 fF/G and Brownian noise of 149.0 nG/√Hz. The developed sensor module consisting of the developed MEMS accelerometer and the capacitance to digital converter (CDC) can achieve a noise floor of 26.7 μG/√Hz without any obvious drifts, establishing the target value of less than 50 μG/√Hz. Therefore, it is confirmed that the developed sensor module can detect micro muscle sounds without contracting a muscle in the frequency range of 20–40 Hz.

DOI： 10.35848/1347-4065/ac5b25

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Electrode Kinetic Study of Cu Electrodeposition with Supercritical CO2 by High Pressure Rotating Disk Electrode Method Reviewed

Kazuhito Higuchi, Tso-Fu Mark Chang, Masato Sone

Journal of The Electrochemical Society 169 020558 2022.2

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<title>Abstract</title>
The electrochemical reaction mechanism on the electrode surface for the activation of Cu electrodeposition in a sulfate-based Cu plating solution containing poly ethylene glycol (PEG) and supercritical CO₂ (Sc-CO₂) was studied by hydrodynamic voltammetry experiments and electrochemical impedance spectroscopy performed using a rotating disk electrode system specially designed for high pressure environment. The experimental results demonstrated that the mixed Sc-CO₂ had a significant inhibitory effect on Cu electrodeposition. In addition, a kinetics model was attempted to be constructed for the Sc-CO₂ mixed system based on the conventional model for the system with suppressor. As a result, the same mechanism as in the conventional model can be used to explain the Sc-CO₂ mixed system, Sc-CO₂ micelles in the solution were suggested to adsorb on the electrode surface in the same manner as the PEG molecules, which affected the reaction mechanism and was expected to inhibit the reduction reaction of Cu ions. Furthermore, the mixed Sc-CO₂ was presumed to reduce the transition coefficient by suppressing the reduction reaction of Cu²⁺ ions to the Cu⁺ complex by adsorption on the electrode surface.

DOI： 10.1149/1945-7111/ac534a

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Supercritical carbon dioxide assisted co-electrodeposition of nickel-titanium dioxide composite film and the dispersity Reviewed

Yu-An Chien, Chun-Yi Chen, Masato Sone, Tso-Fu Mark Chang

The Journal of Supercritical Fluids 181 105495 - 105495 2022.2

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DOI： 10.1016/j.supflu.2021.105495

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Supercritical carbon dioxide-assisted functionalization of polyethylene terephthalate (PET) toward flexible catalytic electrodes Reviewed

Po-Wei Cheng, Chun-Yi Chen, Taku Ichibayashi, Tso-Fu Mark Chang, Masato Sone, Suzushi Nishimura

The Journal of Supercritical Fluids 180 105455 - 105455 2022.2

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DOI： 10.1016/j.supflu.2021.105455

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Development of polypyrrole/nano-gold composite for non-enzymatic glucose sensors Reviewed

Hiroki Kawakami, Yuki Ito, Yu-An Chien, Chun-Yi Chen, Wan-Ting Chiu, Parthojit Chakraborty, Takamichi Nakamoto, Masato Sone, Tso-Fu Mark Chang

Micro and Nano Engineering 14 100109 - 100109 2022.1

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Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.mne.2022.100109

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The Structure and Micro-Mechanical Properties of Electrodeposited Cobalt Films by Micro-Compression Test Reviewed

Xun Luo, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Qiong Zhang, Jinzhu Zhang

Journal of The Electrochemical Society 168 ( 10 ) 102502 2021.9

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DOI： 10.1149/1945-7111/ac2be9

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Huge dielectric constants of the ferroelectric smectic-A phase in bent-shaped dimeric molecules Reviewed

Shigemasa Nakasugi, Sungmin Kang, Junji Watanabe, Hiroki Ishizaki, Masato Sone

Materials Advances 2 ( 21 ) 7017 - 7023 2021.9

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Authorship：Last author Language：English Publishing type：Research paper (scientific journal) Publisher：Royal Society of Chemistry (RSC)

We present the dielectric relaxation properties of the ferroelectric smectic-A (SmAP_F) phase formed by a mixture of bent-shaped dimeric molecules α,ω-bis(4-alkoxyanilinebenzylidene-4′-carbonyloxy)pentanes with different alkyl chain lengths.

DOI： 10.1039/d1ma00015b

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Developments of the Electroactive Materials for Non-Enzymatic Glucose Sensing and Their Mechanisms Invited Reviewed

Wan-Ting Chiu, Tso-Fu Mark Chang, Masato Sone, Hideki Hosoda, Agnès Tixier-Mita, Hiroshi Toshiyoshi

Electrochem 2 ( 2 ) 347 - 389 2021.6

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A comprehensive review of the electroactive materials for non-enzymatic glucose sensing and sensing devices has been performed in this work. A general introduction for glucose sensing, a facile electrochemical technique for glucose detection, and explanations of fundamental mechanisms for the electro-oxidation of glucose via the electrochemical technique are conducted. The glucose sensing materials are classified into five major systems: (1) mono-metallic materials, (2) bi-metallic materials, (3) metallic-oxide compounds, (4) metallic-hydroxide materials, and (5) metal-metal derivatives. The performances of various systems within this decade have been compared and explained in terms of sensitivity, linear regime, the limit of detection (LOD), and detection potentials. Some promising materials and practicable methodologies for the further developments of glucose sensors have been proposed. Firstly, the atomic deposition of alloys is expected to enhance the selectivity, which is considered to be lacking in non-enzymatic glucose sensing. Secondly, by using the modification of the hydrophilicity of the metallic-oxides, a promoted current response from the electro-oxidation of glucose is expected. Lastly, by taking the advantage of the redistribution phenomenon of the oxide particles, the usage of the noble metals is foreseen to be reduced.

DOI： 10.3390/electrochem2020025

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Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency Invited Reviewed

Hitomi Watanabe, Tso-Fu Mark Chang, Michael Schneider, Ulrich Schmid, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone

Electrochem 2 216 - 223 2021.4

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DOI： 10.3390/electrochem2020015

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Micro-Compression Characterization and Thermal Stability of Electrolessly Plated Nickel Phosphorus Alloy Reviewed

Tokihiro Hotta, Tso-Fu Mark Chang, Chun-Yi Chen, Hidekazu Sawae, Yu Imada, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, Masato Sone

ECS Journal of Solid State Science and Technology 10 ( 3 ) 035007 - 035007 2021.3

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DOI： 10.1149/2162-8777/abedd3

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Development and Characterization of Vertically Stacked Tactile Sensor With Hollow Structure Reviewed

Yu-Hao Jen, Chia-Tso Mo, Yu-Wen Chen, Emile Martincic, Daisuke Yamane, Tso-Fu Mark Chang, Masato Sone, Cheng-Yao Lo

IEEE Sensors Journal 21 ( 5 ) 5809 - 5818 2021.3

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Language：English Publishing type：Research paper (scientific journal) Publisher：Institute of Electrical and Electronics Engineers (IEEE)

DOI： 10.1109/jsen.2020.3037261

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Metallization of 3D-Printed Polymer Structures via Supercritical Carbon Dioxide Assisted Electroless Plating Reviewed

Po-Wei Cheng, Chun-Yi Chen, Taku Ichibayashi, Tso-Fu Mark Chang, Masato Sone, Suzushi Nishimura

MRS Communications 2021.3

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Morphology Control and Metallization of Porous Polymers Synthesized by Michael Addition Reactions of a Multi-Functional Acrylamide with a Diamine Invited Reviewed

Naofumi Naga, Minako Ito, Aya Mezaki, Hao-Chun Tang, Tso-Fu Mark Chang, Masato Sone, Hassan Nageh, Tamaki Nakano

Materials 14 ( 4 ) 800 - 800 2021.2

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Language：English Publishing type：Research paper (scientific journal) Publisher：{MDPI} {AG}

DOI： 10.3390/ma14040800

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Superelastic behavior of single crystalline Ni48Fe20Co5Ga27 micro-pillars near austenite–martensite critical point Reviewed

T.-F. M. Chang, V. Chernenko, H.-C. Tang, C.-Y. Chen, A. Umise, M. Tahara, H. Hosoda, M. Sone

AIP Advances 11 ( 2 ) 025213 - 025213 2021.2

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DOI： 10.1063/5.0036304

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Polyaniline-atomic Au modified platinum electrode with ionic liquid as configuration for enhanced electrochemical sensing

Parthojit Chakraborty, Hiroki Kawakami, Anifatul Faricha, Tso Fu Mark Chang, Masato Sone, Takamichi Nakamoto

Proceedings of IEEE Sensors 2021-October 2021

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Publishing type：Research paper (international conference proceedings)

DOI： 10.1109/SENSORS47087.2021.9639545

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Noble Metallic Pt Coating on Silk Textile by a Supercritical CO2-Promoted Metallization Technique towards Applications of Biocompatible Medical Wearable Devices Invited Reviewed

WT Chiu, TFM Chang, H Kurosu, M Sone

Biomedical Engineering 33 - 55 2021

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Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1201/9781003141945

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Electrodeposition of Ni-Co Alloys and Their Mechanical Properties by Micro-Vickers Hardness Test Invited Reviewed

Yiming Jiang, Chun-Yi Chen, Tso-Fu Mark Chang, Xun Luo, Daisuke Yamane, Masato Sone

Electrochem 2 ( 1 ) 1 - 9 2020.12

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DOI： 10.3390/electrochem2010001

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Heterogeneous Deformation Behavior of Cu-Ni-Si Alloy by Micro-Size Compression Testing Invited Reviewed

Sari Yanagida, Takashi Nagoshi, Akiyoshi Araki, Tso-Fu Mark Chang, Chun-Yi Chen, Equo Kobayashi, Akira Umise, Hideki Hosoda, Tatsuo Sato, Masato Sone

Crystals 10 ( 12 ) 1162 - 1162 2020.12

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DOI： 10.3390/cryst10121162

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Electrochemical Investigation of Cu Electroplating with Supercritical CO2 Emulsion Using a Rotating Disk Electrode under High Pressure Reviewed

Kazuhito Higuchi, Tso-Fu Mark Chang, Masato Sone

Journal of the Electrochemical Society 167 162506 2020.12

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DOI： 10.1149/1945-7111/abd001

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Mechanics of Metallic Materials in Micro-Scale, IV. Tensile and Bending Deformation of Micro-size Metals and the Young Modulus Measurements Invited Reviewed

Masato Sone

Materia Japan 59 ( 12 ) 669 - 675 2020.12

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Catalytic Activity of Atomic Gold-Decorated Polyaniline Support in Glucose Oxidation Reviewed

Yuki Ito, Tso-Fu Mark Chang, Yu-An Chien, Chun-Yi Chen, Parthojit Chakraborty, Takamichi Nakamoto, Masato Sone

Electrochem 1 ( 4 ) 394 - 399 2020.11

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Atomic-level gold clusters are decorated on a polyaniline (PANI) support by a cyclic atomic electrodeposition process, and the catalytic activity in the oxidation of glucose is studied. The evaluation is conducted by cyclic voltammetry using atomic-level gold clusters-decorated PANI (PANI/AuN, where N indicates the atomic size of the Au cluster and N = 1~3 in this study) as the working electrode and a solution containing 0 to 50.0 mM of glucose in phosphate-buffered saline. The catalytic activity is determined from the oxidation current observed at around +0.6 V vs. Ag/AgCl. The catalytic activity is found to be affected by the size of gold clusters decorated on the PANI/AuN, whereby the catalytic activity is low when N is 1 or 3. On the other hand, an obvious enhancement in the catalytic activity is observed for the PANI/Au2 electrode.

DOI： 10.3390/electrochem1040026

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Co-Electrodeposition of Au–TiO2 Nanocomposite and the Micro-Mechanical Properties Reviewed

Yu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone

Electrochem 1 ( 4 ) 388 - 393 2020.11

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Strengthening of electrodeposited Au-based materials is achieved by co-electrodeposition with TiO2 nanoparticles dispersed in a sulfide-based gold electrolyte. TiO2 content in the composite film is adjusted by concentration of the TiO2 in the gold electrolyte. Effects of the TiO2 content on surface morphology, crystalline structure and microstructure of the composite film are investigated. Mechanical properties of the Au–TiO2 composite films are evaluated by micro-Vickers hardness and micro-compression tests. The hardness increases from 135 to 207 HV when the TiO2 content is increased from 0 to 2.72 wt%. Specimens used in the micro-compression test are micro-pillars fabricated from the composite film, and the yield strength reaches 0.84 GPa by incorporating 2.72 wt% TiO2 into the film.

DOI： 10.3390/electrochem1040025

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Design and development of amperometric gas sensor with atomic Au-Polyaniline/Pt composite

Parthojit Chakraborty, Yu An Chien, Wan Ting Chiu, Tso Fu Mark Chang, Masato Sone, Takamichi Nakamoto, Mira Josowicz, Jiri Janata

IEEE Sensors Journal 20 ( 21 ) 12479 - 12487 2020.11

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DOI： 10.1109/JSEN.2020.3002822

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Mechanics of Metallic Materials in Micro-Scale, III. Effects of Texture, Alloying, Twin and Impurity on Mechanical Property of Micro-size Metal Invited Reviewed

Masato Sone

Materia Japan 59 ( 11 ) 618 - 623 2020.11

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Near infrared-driven photoelectrochemical water splitting: Review and future prospects

Ping Yen Hsieh, Jhen Yang Wu, Tso Fu Mark Chang, Chun Yi Chen, Masato Sone, Yung Jung Hsu

Arabian Journal of Chemistry 13 ( 11 ) 8372 - 8387 2020.11

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DOI： 10.1016/j.arabjc.2020.05.025

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微小領域における金属材料の材料力学 Ⅱ．金属材料のサイズ効果と機械的特性の評価

曽根正人

マテリア Vol. 59 ( No. 10 ) 2020.10

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Language：Japanese Publishing type：Research paper (scientific journal)

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Electrocatalytic activity enhancement of Au NPs-TiO<inf>2</inf> electrode via a facile redistribution process towards the non-enzymatic glucose sensors

Wan Ting Chiu, Tso Fu Mark Chang, Masato Sone, Agnès Tixier-Mita, Hiroshi Toshiyoshi

Sensors and Actuators, B: Chemical 319 2020.9

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Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1016/j.snb.2020.128279

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Sample geometry effect on mechanical property of gold micro-cantilevers by micro-bending test

Kosuke Suzuki, Tso Fu Mark Chang, Ken Hashigata, Keisuke Asano, Chun Yi Chen, Takashi Nagoshi, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone

MRS Communications 10 ( 3 ) 434 - 438 2020.9

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Language：English Publishing type：Research paper (scientific journal) Publisher：Cambridge University Press (CUP)

DOI： 10.1557/mrc.2020.38

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微小領域における金属材料の材料力学 I．電解めっきによる金属材料の材料組織解析

曽根正人

マテリア Vol. 59 ( No. 9 ) 2020.9

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Language：Japanese Publishing type：Research paper (scientific journal)

DOI： 10.2320/materia.59.490

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Noble Metallic Pt Metallization on the Silk textile by a Supercritical Carbon Dioxide Assisted Metallization Technique towards the Wearable Device in Biocompatible Medical Applications

Wan-Ting Chiu, Tso-Fu Mark Chang, Hiromichi Kurosu, Masato Sone

Biomedical Engineering 2020.8

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Indirect sensing of lower aliphatic ester using atomic gold decorated polyaniline electrode

Parthojit Chakraborty, Yu-An Chien, Tso-Fu Mark Chang, Masato Sone, Takamichi Nakamoto

Sensors Vol. 20 ( No. 13 ) 1 - 10 2020.6

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Language：English Publishing type：Research paper (scientific journal) Publisher：MDPI AG

DOI： 10.3390/s20133640

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Reduced graphene oxides-wrapped ZnO with notable photocatalytic property

Wei-Chen Hu, Yi-An Chen, Yi-Hsuan Chiu, Tso-Fu Mark Chang, Chun-Yi Chen, Masato Sone, Yung-Jung Hsu

Journal of the Taiwan Institute of Chemical Engineers Vol. 112 337 - 344 2020.6

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Language：English Publishing type：Research paper (scientific journal) Publisher：Elsevier BV

DOI： 10.1016/j.jtice.2020.05.016

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CMOS-MEMS Based Microgravity Sensor and Its Application

Kazuya Masu, Katsuyuki Machida, Daisuke Yamane, Hiroyuki Ito, Noboru Ishihara, Tso-Fu Mark Chang, Masato Sone, Ryo Shigeyama, Taiki Ogata, Yoshihiro Miyake

ECS Transactions Vol. 97 ( No. 5 ) 91 - 108 2020.4

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Language：English Publishing type：Research paper (scientific journal)

DOI： 10.1149/09705.0091ecst

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Incorporating graphene quantum dots to enhance the photoactivity of CdSe-sensitized TiO2 nanorods for solar hydrogen production

Yung-Shan Chang, Ping-Yen Hsieh, Tso-Fu Chang, Chun-Yi Chen, Masato Sone, Yung-Jung Hsu

Journal of Materials Chemistry A 8 ( 28 ) 13971 - 13979 2020.4

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DOI： 10.1039/D0TA02359K

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Alloy Electroplating and Young’s Modulus Characterization of AuCu Alloy Microcantilevers

Kyotaro Nitta, Hao-Chun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone

Journal of The Electrochemical Society Vol. 167 ( 8 ) 2020.4

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DOI： 10.1149/1945-7111/ab8805

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Electrochem: An International Scientific Open Access Journal to Publish All Faces of Electrochemistry, Electrodeposition, Electrochemical Analysis, Electrochemical Sensing and Other Aspects about Electrochemical Reaction

Masato Sone

Electrochem Vol. 1 ( No. 1 ) 2020.2

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DOI： 10.3390/electrochem1010001

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Roles of TiO2 in the highly robust Au nanoparticles-TiO2 modified polyaniline electrode towards non-enzymatic sensing of glucose

Wan-Ting Chiu, Tso-Fu Mark Chang, Masato Sone, Agnès Tixier-Mita, Hiroshi Toshiyoshi

Talanta Vol. 212 2020.1

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DOI： 10.1016/j.talanta.2020.120780

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Metallization of PET Textile Utilizing Supercritical CO2 Catalyzation

Kenichi Tokuoka, Chun-Yi Chen, Tso-Fu Mark Chang, Wan-Ting Chiu, Hiromichi Kurosu, Masato Sone

Microelectronic Engineering Vol. 223 111233 - 111233 2020.1

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DOI： 10.1016/j.mee.2020.111233

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Fabrication of Au-Cu Alloy/Ti Layered Micro-Cantilevers and the Long-Term Structure Stability

Kyotaro Nitta, Hao-chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Shinichi Iida, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu, Masato Sone

IEEE Conference Paper 2019-October 2020.1

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DOI： 10.1109/SENSORS43011.2019.8956496

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Evaluation of the Shape Memory Effect by Micro-Compression Testing of Single Crystalline Ti-27Nb Ni-Free Biomedical Alloy

Takashi Nagoshi, Takahisa Yasuda, Nao Otaki, Masaki Tahara, Hideki HOSODA, Masato Sone

Materials Vol. 13 ( No. 1 ) 2020.1

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DOI： 10.3390/ma13010110

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High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds

Tatsuya Koga, Takashi Ichikawa, Naoto Tanaka, Taiki Ogata, Hiroki Ora, Daisuke Yamane, Noboru Ishihara, Hiroyuki Ito, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, Kazuya Masu

IEEE Conference Paper 2019.10

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DOI： 10.1109/BIOCAS.2019.8919151

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A MEMS Accelerometer for Sub-mG Sensing

Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu

Sensors and Materials Vol. 31 ( no. 9 ) 2883 - 2894 2019.7

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DOI： 10.18494/SAM.2019.2122

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High Strength Electrodeposited Au-Cu Alloys Evaluated by Bending Test toward Movable Micro-Components

Keisuke Asano, Tso-Fu Mark Chang, Hao-Chun Tang, Takashi Nagoshi, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone

ECS Journal of Solid State Science and Technology Vol. 8 ( No. 8 ) P412 - P415 2019.7

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DOI： 10.1149/2.0151908jss

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Nano-Au catalysts modified with TiO2: Enhancement of electrocatalytic activity for 1-propanol oxidation in alkaline media

Wan-Ting Chiu, Yi-Hsuan Chiu, Ping-Yen Hsieh, Tso-Fu Mark Chang, Masato Sone, Yung-Jung Hsu, Agnès Tixier-Mita, Hiroshi Toshiyoshi

Journal of The Electrocemical Society Vol. 166 ( No. 12 ) F760 - F767 2019.7

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DOI： 10.1149/2.0741912jes

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MEMS Accelerometer Fabricated by Gold Multi-Layer Metal Technology

Katsuyuki Machida, Daisuke Yamane, Toshifumi Konishi, Shin-ichi Iida, Noboru Ishihara, Tso-Fu Mark Chang, Masato Sone, Hiroyuki Ito, Kazuya Masu

ECS Transactions Vol. 92 ( 4 ) 169 - 184 2019.7

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DOI： 10.1149/09204.0169ecst

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Mechanistic Insights into Photodegradation of Organic Dyes using Heterostructure Photocatalysts

Yi-Hsuan Chiu, Tso-Fu Mark Chang, Chun-Yi Chen, Masato Sone, Yung-Jung Hsu

Catalysts Vol. 9 ( No. 5 ) 2019.6

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DOI： 10.3390/catal9050430

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Strengthening of Micro-Cantilever by Au/Ti Bi-Layered Structure Evaluated by Micro-Bending Test toward MEMS Devices

Ken Hashigata, Hao-Chun Tang, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone

Microelectronic Engineering Vol. 213 ( No. ) 13 - 17 2019.5

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DOI： 10.1016/j.mee.2019.04.008

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Effects of Current Density on Mechanical Properties of Electroplated Nickel with High Speed Sulfamate Bath

Takahiro Yamamoto, Kengo Igawa, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Osamu Kudo, Ryu Maeda, Masato Sone

Microelectronic Engineering Vol. 213 18 - 23 2019.5

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DOI： 10.1016/j.mee.2019.04.012

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Pillar-Shaped Electrodes for 3-axis Gold-Proof-Mass MEMS Capacitive Accelerometers

Ken Atsumi, Shota Otobe, Tatsuya Koga, Takashi Ichikawa, Daisuke Yamane, Shinichi Iida, Hiroyuki Ito, Noboru Ishihara, Masato Sone, Katsuyuki Machida, Kazuya Masu

IEEE Conference Paper 2019.5

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DOI： 10.1109/DTIP.2019.8752744

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Atomic gold decorated polyaniline sensor for gaseous detection

Parthojit Chakraborty, Yu An Chien, Wan Ting Chiu, Tso Fu Mark Chang, Masato Sone, Takamichi Nakamoto

ISOEN 2019 - 18th International Symposium on Olfaction and Electronic Nose, Proceedings 2019.5

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DOI： 10.1109/ISOEN.2019.8823494

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Long-Term Structure Stability of Ti/Au Layered Micro-Cantilever Evaluated by Vibration Test

Koichiro Tachibana, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone

Microelectronic Engineering Volume 207 ( No. ) 33 - 36 2019.1

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DOI： 10.1016/j.mee.2019.01.002

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Cu-alloying effect on structure stability of electrodeposited gold-based micro-cantilever evaluated by long-term vibration test

Nitta, K., Chang, T.-F.M., Tachibana, K., Tang, H., Chen, C.-Y., Iida, S., Yamane, D., Ito, H., Machida, K., Masu, K., Sone, M.

Microelectronic Engineering 215 2019

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DOI： 10.1016/j.mee.2019.111001

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Nanoscale hierarchical structure of twins in nanograins embedded with twins and the strengthening effect

Tang, H., Chang, T.-F.M., Chai, Y.-W., Chen, C.-Y., Nagoshi, T., Yamane, D., Ito, H., Machida, K., Masu, K., Sone, M.

Metals 9 ( 9 ) 2019

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DOI： 10.3390/met9090987

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Ni-P and TiO2 Codeposition on Silk Textile via Supercritical CO2 Promoted Electroless Plating for Flexible and Wearable Photocatalytic Devices

Wan-Ting Chiu, Chun-Yi Chen, Tso-Fu Mark Chang, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone

Electrochemica Acta Vol. 294 68 - 75 2018.10

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DOI： 10.1016/j.electacta.2018.10.076

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Sample size effect on micro-mechanical properties of gold electroplated with dense carbon dioxide Reviewed

Haochun Tang, Ken Hashigata, Tso Fu Mark Chang, Chun Yi Chen, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone

Surface and Coatings Technology 350 1065 - 1070 2018.9

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DOI： 10.1016/j.surfcoat.2018.02.041

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Platinum coating on silk by a supercritical CO2 promoted metallization technique for applications of wearable devices Reviewed

Wan Ting Chiu, Chun Yi Chen, Tso Fu Mark Chang, Yuma Tahara, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone

Surface and Coatings Technology 350 1028 - 1035 2018.9

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DOI： 10.1016/j.surfcoat.2018.02.070

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Promoted bending strength in micro-cantilevers composed of nanograined gold toward MEMS applications

Keisuke Asano, Haochun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone

Microelectronic Engineering 196 20 - 24 2018.9

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DOI： 10.1016/j.mee.2018.04.021

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Fully Depleted Ti-Nb-Ta-Zr-O Nanotubes: Interfacial Charge Dynamics and Solar Hydrogen Production Reviewed

Yi Hsuan Chiu, Ting Hsuan Lai, Chun Yi Chen, Ping Yen Hsieh, Kazunari Ozasa, Mitsuo Niinomi, Kiyoshi Okada, Tso Fu Mark Chang, Nobuhiro Matsushita, Masato Sone, Yung Jung Hsu

ACS Applied Materials and Interfaces 10 ( 27 ) 22997 - 23008 2018.7

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DOI： 10.1021/acsami.8b00727

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Enhancement in structure stability of gold micro-cantilever by constrained fixed-end in MEMS devices Reviewed

Minami Teranishi, Chun Yi Chen, Tso Fu Mark Chang, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone

Microelectronic Engineering 187-188 105 - 109 2018.2

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DOI： 10.1016/j.mee.2017.11.015

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Au-Cu alloys prepared by pulse electrodeposition toward applications as movable micro-components in electronic devices Reviewed

Haochun Tang, Chun Yi Chen, Tso Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone

Journal of the Electrochemical Society 165 ( 2 ) D58 - D63 2018

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DOI： 10.1149/2.0441802jes

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Fabrication and Photocatalytic Performance of Au/ZnO Layered Structure on Silk Textile for Flexible Device Applications Reviewed

Wan Ting Chiu, Chun Yi Chen, Tso Fu Mark Chang, Yuma Tahara, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone

Electrochimica Acta 253 39 - 46 2017.11

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DOI： 10.1016/j.electacta.2017.09.041

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Fabrication of composite materials for wearable devices by electroless plating with supercritical carbon dioxide

Wan-ting Chiu, Mitsuo Sano, Cheng-Chuan Wang, Tso-Fu Mark Chang, Chun-Yi Chen, Hiromichi Kurosu, Masato Sone

ITRI Materialsnet 2017.10

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Deformation behavior of electroplated gold composed of nano-columnar grains embedded in micro-columnar textures Reviewed

Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone

MATERIALS LETTERS 202 82 - 85 2017.9

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DOI： 10.1016/j.matlet.2017.05.066

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A study on young's modulus of electroplated gold cantilevers for MEMS devices Reviewed

Hideaki Nakajima, Tso Fu Mark Chang, Chun Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone

2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2017 264 - 267 2017.8

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DOI： 10.1109/NEMS.2017.8017021

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Fundamental Property Assessments of Biocompatible Silk-Pt Composite Prepared by Supercritical Carbon Dioxide Promoted Electroless Plating Reviewed

Wan Ting Chiu, Yuma Tahara, Chun Yi Chen, Tso Fu Mark Chang, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone

Industrial and Engineering Chemistry Research 56 ( 31 ) 8864 - 8871 2017.8

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DOI： 10.1021/acs.iecr.7b01749

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Micro-bending testing of electrodeposited gold for applications as movable components in MEMS devices Reviewed

Keisuke Asano, Hao Chun Tang, Chun Yi Chen, Takashi Nagoshi, Tso Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone

Microelectronic Engineering 180 15 - 19 2017.8

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DOI： 10.1016/j.mee.2017.05.044

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The hydrobaric effect on cathodically deposited titanium dioxide photocatalyst Reviewed

Tso Fu Mark Chang, Wei Hao Lin, Chun Yi Chen, Yung Jung Hsu, Masato Sone

MRS Communications 7 ( 2 ) 189 - 192 2017.6

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DOI： 10.1557/mrc.2017.21

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Silk–Pt composite integration by supercritical carbon dioxide assisted electroless plating for medical devices application Reviewed

Wan Ting Chiu, Yuma Tahara, Chun Yi Chen, Tso Fu Mark Chang, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone

Microelectronic Engineering 175 34 - 37 2017.5

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DOI： 10.1016/j.mee.2016.12.024

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Tensile tests of micro-specimens composed of electroplated gold Reviewed

Sari Yanagida, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone

MICROELECTRONIC ENGINEERING 174 6 - 10 2017.4

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DOI： 10.1016/j.mee.2016.12.004

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Strength and toughness of nanocrystalline SiO2 stishovite toughened by fracture-induced amorphization Reviewed

Kimiko Yoshida, Norimasa Nishiyama, Masato Sone, Fumihiro Wakai

ACTA MATERIALIA 124 316 - 324 2017.2

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DOI： 10.1016/j.actamat.2016.11.014

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A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology Reviewed

Toshifumi Konishi, Teruaki Safu, Katsuyuki Machida, Daisuke Yamane, Masato Sone, Kazuya Masu, Hiroshi Toshiyoshi

Proceedings of IEEE Sensors 2017.1

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DOI： 10.1109/ICSENS.2016.7808793

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LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY Reviewed

Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Kochiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) 2187 - 2190 2017

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DOI： 10.1109/TRANSDUCERS.2017.7994510

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High-Strength Electroplated Au-Cu Alloys as Micro-Components in MEMS Devices Reviewed

Haochun Tang, Chun-Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone

JOURNAL OF THE ELECTROCHEMICAL SOCIETY 164 ( 4 ) D244 - D247 2017

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DOI： 10.1149/2.141704jes

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A supercritical CO<inf>2</inf> promoted electroless Ni-P plating on silk and their fundamental characteristics investigations Reviewed

Wan Ting Chiu, Yuma Tahara, Chun Yi Chen, Tso Fu Mark Chang, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone

Journal of the Electrochemical Society 164 ( 7 ) D406 - D411 2017

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DOI： 10.1149/2.0551707jes

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Deformation of Biomedical AuCuAl-Based Shape Memory Alloy Micropillars Reviewed

Akira Umise, Rui Serizawa, Sari Yanagida, Kenji Goto, Masaki Tahara, Tso Fu Mark Chang, Tomonari Inamura, Masato Sone, Hideki Hosoda

MRS ADVANCES 2 ( 26 ) 1411 - 1415 2017

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DOI： 10.1557/adv.2017.244

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Micro-Compression Study of Ni-Fe(Co)-Ga Magnetic Shape Memory Alloy for MEMS Sensors Reviewed

K.Igawa, T.-F.Mark Chang, C.Y.Chen, A.Umise, T.Nagoshi, M.Tahara, T.Inamura, H.Hosoda, V.A.Chernenko, M.Sone

Proseeding of IEEE SENSORS 2017 2017-December 223 - 225 2017

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DOI： 10.1109/ICSENS.2017.8233941

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Sub-1mG MEMS inertial sensors for biomedical applications Reviewed

Daisuke Yamane, Toshifumi Konishi, Hiroshi Toshiyoshi, Masato Sone, Katsuyuki Machida, Yoshihiro Miyake, Kazuya Masu

2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) 2017

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Enhancement of mechanical strength in Au films electroplated with supercritical carbon dioxide Reviewed

Haochun Tang, Chun Yi Chen, Takashi Nagoshi, Tso Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone

Electrochemistry Communications 72 126 - 130 2016.11

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DOI： 10.1016/j.elecom.2016.09.019

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Evaluation and modeling of adhesion layer in shock-protection structure for MEMS accelerometer Reviewed

Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida

MICROELECTRONICS RELIABILITY 66 78 - 84 2016.11

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DOI： 10.1016/j.microrel.2016.09.018

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Development of high sensitivity CMOS-MEMS inertia sensor and its application to early-stage diagnosis of Parkinson's disease Reviewed

Kazuya Masu, Daisuke Yamane, Katsuyuki Machida, Masato Sone, Yoshihiro Miyake

European Solid-State Circuits Conference 2016-October 99 - 104 2016.10

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DOI： 10.1109/ESSCIRC.2016.7598252

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超臨界二酸化炭素を用いた生体適合性貴金属被覆高分子繊維の創成

曽根正人, 佐野光雄, Tso-Fu Mark Chang, ChiuWan-ting, 黒子弘道, 橋本朋子

ケミカルエンジニアリング Vol. 61 ( No. 10 ) 2016.10

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Application of supercritical carbon dioxide in catalyzation and Ni-P electroless plating of nylon 6,6 textile Reviewed

Mitsuo Sano, Yuma Tahara, Chun Yi Chen, Tso Fu Mark Chang, Tomoko Hashimoto, Hiromichi Kurosu, Tatsuo Sato, Masato Sone

Surface and Coatings Technology 302 336 - 343 2016.9

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DOI： 10.1016/j.surfcoat.2016.06.037

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超臨界ナノプレーティング法によるめっき処理面のレベリング向上

内山浩幹, Tso-Fu Mark Chang, 陳君怡, 曽根正人

砥粒加工学会誌 Vol. 60 ( No. 9 ) 2016.9

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Effects of Pressure in Cathodic Deposition of TiO<inf>2</inf> and SnO<inf>2</inf> with Supercritical CO<inf>2</inf> Emulsified Electrolyte Reviewed

Wei Hao Lin, Chun Yi Chen, Tso Fu Mark Chang, Yung Jung Hsu, Masato Sone

Electrochimica Acta 208 244 - 250 2016.8

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DOI： 10.1016/j.electacta.2016.04.088

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Structure stability of high aspect ratio Ti/Au two-layer cantilevers for applications in MEMS accelerometers Reviewed

Minami Teranishi, Tso Fu Mark Chang, Chun Yi Chen, Toshifumi Konishi, Katsuyuki Machida, Hiroshi Toshiyoshi, Daisuke Yamane, Kazuya Masu, Masato Sone

Microelectronic Engineering 159 90 - 93 2016.6

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DOI： 10.1016/j.mee.2016.02.054

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Pulse electroplating of ultra-fine grained Au films with high compressive strength Reviewed

Chun Yi Chen, Masaharu Yoshiba, Takashi Nagoshi, Tso Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone

Electrochemistry Communications 67 51 - 54 2016.6

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DOI： 10.1016/j.elecom.2016.03.017

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Metallization of polyimide films with enlarged area by conducting the catalyzation in supercritical carbon dioxide Reviewed

Tso Fu Mark Chang, Cheng Chuan Wang, Chia Ying Yen, Shin Hwa Chen, Chun Yi Chen, Masato Sone

Microelectronic Engineering 153 1 - 4 2016.3

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DOI： 10.1016/j.mee.2015.12.006

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Metallization of textile by Pt catalyzation in supercritical carbon dioxide and Pt electroless plating for applications in wearable devise Reviewed

Mitsuo Sano, Yuma Tahara, Tso Fu Mark Chang, Chun Yi Chen, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone

Microelectronic Engineering 153 92 - 95 2016.3

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DOI： 10.1016/j.mee.2016.02.027

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Effect of annealing on mechanical properties of nickel electrodeposited using supercritical CO2 emulsion evaluated by micro-compression test Reviewed

Takashi Nagoshi, Tso Fu Mark Chang, Tatsuo Sato, Masato Sone

Microelectronic Engineering 153 101 - 104 2016.3

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DOI： 10.1016/j.mee.2016.02.017

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High aspect ratio micro-hole filling employing emulsified supercritical CO2 electrolytes Reviewed

Cheng Yu Li, Jun Jie Yang, Wen Ta Tsai, Chang Jian Lin, Tso Fu Mark Chang, Masato Sone

Journal of Supercritical Fluids 109 61 - 66 2016.3

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DOI： 10.1016/j.supflu.2015.11.014

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Solid-state ¹³C NMR study of banana liquid crystals - 3: Alkyl-tail-group packing environments of an acute-angle bent-core molecule in the hexagonal columnar and cubic phases Reviewed

Hiromichi Kurosu, Yumi Endo, Saori Kimura, Tomoko Hashimoto, Motoi Harada, Eun Woo Lee, Masato Sone, Junji Watanabe, Sungmin Kang

Journal of Molecular Structure 1105 34 - 40 2016.2

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DOI： 10.1016/j.molstruc.2015.10.030

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微小材料試験を用いた電析ニッケル薄膜の力学的特性評価

名越貴志, Tso-Fu Mark Chang, 曽根正人

日本金属学会誌 Vol. 80 ( No. 1 ) 2016.1

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Deformation Behavior of Pure Cu and Cu-Ni-Si Alloy Evaluated by Micro-Tensile Testing Reviewed

Sari Yanagida, Akiyoshi Araki, Tso-Fu Mark Chang, Chun-Yi Chen, Takashi Nagoshi, Equo Kobayashi, Hideki Hosoda, Tatsuo Sato, Masato Sone

MATERIALS TRANSACTIONS 57 ( 11 ) 1897 - 1901 2016

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DOI： 10.2320/matertrans.M2016188

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A Design of Spring Constant Arranged for MEMS Accelerometer by Multi-layer Metal Technology Reviewed

Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida

2016 IEEE 11TH ANNUAL INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) 419 - 422 2016

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DOI： 10.1109/NEMS.2016.7758281

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Evaluations of mechanical properties of electrodeposited nickel film by using micro-testing method Reviewed

Takashi Nagoshi, Tso Fu Mark Chang, Masato Sone

Materials Transactions 57 ( 12 ) 1979 - 1984 2016

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DOI： 10.2320/matertrans.MG201622

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Brittle Fracture of Electrodeposited Gold Observed by Micro-Compression Reviewed

Masaharu Yoshiba, Chun-Yi Chen, Tso-Fu Mark Chang, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone

MATERIALS TRANSACTIONS 57 ( 8 ) 1257 - 1260 2016

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DOI： 10.2320/matertrans.MG201612

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Electroless Plating Method Using Supercritical Carbon Dioxide Emulsion

UCHIYAMA Hiroki, CHANG Tso-Fu Mark, CHEN Chun-yi, SONE Masato

Journal of the Surface Finishing Society of Japan 67 ( 4 ) 192 - 196 2016

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DOI： 10.4139/sfj.67.192

CiNii Books

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Deformation Behaviour of Al-Mg Alloy Bi-Crystal Micro-Pillar Evaluated by Micro-Compression Test Reviewed

Bo-Lun Zheng, Takashi Nagoshi, Tso-Fu Mark Chang, Hideki Hosoda, Tatsuo Sato, Masato Sone

JOURNAL OF THE JAPAN INSTITUTE OF METALS AND MATERIALS 80 ( 1 ) 66 - 70 2016

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DOI： 10.2320/jinstmet.JB201517

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Tensile behavior of micro-sized specimen made of single crystalline nickel Reviewed

Yoshiaki Kihara, Takashi Nagoshi, Tso Fu Mark Chang, Hideki Hosoda, Sato Tatsuo, Masato Sone

Materials Letters 153 36 - 39 2015.8

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DOI： 10.1016/j.matlet.2015.03.119

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Mechanical properties of Sn electrodeposited in supercritical CO2 emulsions using micro-compression test Reviewed

Mana Tanabe, Tso Fu Mark Chang, Takashi Nagoshi, Sung Ting Chung, Wen Ta Tsai, Hideki Hosoda, Tatsuo Sato, Masato Sone

Microelectronic Engineering 141 219 - 222 2015.6

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DOI： 10.1016/j.mee.2015.03.066

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Tensile behavior of micro-sized specimen fabricated from nanocrystalline nickel film Reviewed

Yoshiaki Kihara, Takashi Nagoshi, Tso Fu Mark Chang, Hideki Hosoda, Tatsuo Sato, Masato Sone

Microelectronic Engineering 141 17 - 20 2015.6

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DOI： 10.1016/j.mee.2015.01.001

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Crystal growth of cobalt film fabricated by electrodeposition with dense carbon dioxide Reviewed

Xun Luo, Chun Yi Chen, Tso Fu Mark Chang, Hideki Hosoda, Masato Sone

Journal of the Electrochemical Society 162 ( 9 ) D423 - D426 2015.6

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DOI： 10.1149/2.0101509jes

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Large increase in fracture resistance of stishovite with crack extension less than one micrometer Reviewed

Kimiko Yoshida, Fumihiro Wakai, Norimasa Nishiyama, Risako Sekine, Yutaka Shinoda, Takashi Akatsu, Takashi Nagoshi, Masato Sone

SCIENTIFIC REPORTS 5 2015.6

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DOI： 10.1038/srep10993

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超臨界二酸化炭素を用いた電気めっき法

曽根正人, TSO-FU MARK CHANG

防錆管理 Vol. 3 2015.2

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Preparation and characterization of palladium-hydride-coated titanium as a reference electrode for the supercritical carbon dioxide emulsion electrochemical system Reviewed

Yung-Yi Wu, Chun-Tsung Hsu, Tso-Fu Mark Chang, Masato Sone, Chi-Chang Hu

ELECTROCHIMICA ACTA 155 209 - 216 2015.2

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DOI： 10.1016/j.electacta.2014.12.141

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Size effect on the Electrodeposited Nickel Investigated by Micro-Compression Test

Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone

4th WMRIF Workshop for Young Scientists 2014.9

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DOI： 10.1007/978-981-287-724-6_4

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超臨界二酸化炭素エマルション中で電気めっきされた銅皮膜のマイクロ圧縮試験による力学的特性評価

名越貴志, 木梨光, 武藤雅英, Tso-Fu Mark Chang, 里達雄, 曽根正人

銅と銅合金 Vol. 53 ( No. 1 ) 2014.8

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Mechanical behavior of a microsized pillar fabricated from ultrafine-grained ferrite evaluated by a microcompression test Reviewed

Takashi Nagoshi, Akinobu Shibata, Yoshikazu Todaka, Tatsuo Sato, Masato Sone

Acta Materialia 73 12 - 18 2014.7

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DOI： 10.1016/j.actamat.2014.03.048

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Mechanical properties of Cu electroplated in supercritical CO2 emulsion evaluated by micro-compression test Reviewed

Hikaru Kinashi, Takashi Nagoshi, Tso Fu Mark Chang, Tatsuo Sato, Masato Sone

Microelectronic Engineering 121 83 - 86 2014.6

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DOI： 10.1016/j.mee.2014.03.029

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Fabrication of TiO2 micro-structures by cathodic deposition Reviewed

Tso Fu Mark Chang, Tatsuo Sato, Masato Sone

Microelectronic Engineering 121 80 - 82 2014.6

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DOI： 10.1016/j.mee.2014.03.033

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Cu wiring into nano-scale holes by electrodeposition in supercritical carbon dioxide emulsified electrolyte with a continuous-flow reaction system Reviewed

Tetsuya Shimizu, Yuma Ishimoto, Tso Fu Mark Chang, Hikaru Kinashi, Takashi Nagoshi, Tatsuo Sato, Masato Sone

Journal of Supercritical Fluids 90 60 - 64 2014.6

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DOI： 10.1016/j.supflu.2014.03.010

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超臨界二酸化炭素エマルションを用いためっき法における欠陥の抑制

曽根正人, TSO-FU MARK CHANG, 清水哲也

表面技術 Vol. 65 ( No. 4 ) 2014.4

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Sample size effect of electrodeposited nickel with sub-10 nm grain size Reviewed

Takashi Nagoshi, Masahide Mutoh, Tso Fu Mark Chang, Tatsuo Sato, Masato Sone

Materials Letters 117 256 - 259 2014.2

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DOI： 10.1016/j.matlet.2013.12.017

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Porous nickel films plated in supercritical carbon dioxide emulsified electrolyte using a series of fluorinated nonionic surfactants Reviewed

Rina Khanum, Tso Fu Mark Chang, Tatsuo Sato, Masato Sone

Surface and Coatings Technology 259 ( PB ) 325 - 329 2014

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DOI： 10.1016/j.surfcoat.2014.02.061

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Microstructure and mechanical properties of D-SSF processed Al-Zn-Mg alloys with high Fe content Reviewed

Takuro Aoki, Equo Kobayashi, Masato Sone, Tatsuo Sato

Materials Science Forum 794-796 1109 - 1114 2014

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DOI： 10.4028/www.scientific.net/MSF.794-796.1109

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Electrodeposition of tin using supercritical carbon dioxide emulsions Reviewed

Mana Tanabe, Tso Fu Mark Chang, Hideki Hosoda, Tatsuo Sato, Masato Sone

ECS Electrochemistry Letters 3 ( 10 ) 2014

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DOI： 10.1149/2.0061410eel

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Effects of fluorinated surfactant in cathodic deposition of TiO2 films with supercritical CO<inf>2</inf> emulsified electrolyte Reviewed

Tso Fu Mark Chang, Wei Hao Lin, Yung Jung Hsu, Tatsuo Sato, Masato Sone

ECS Electrochemistry Letters 3 ( 4 ) 2014

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DOI： 10.1149/2.003404eel

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Supercritical CO<inf>2</inf>-assisted electrochemical deposition of ZnO mesocrystals for practical photoelectrochemical applications Reviewed

Wei Hao Lin, Tso Fu Mark Chang, Yi Hsuan Lu, Tatsuo Sato, Masato Sone, Kung Hwa Wei, Yung Jung Hsu

Journal of Physical Chemistry C 117 ( 48 ) 25596 - 25603 2013.12

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DOI： 10.1021/jp409607m

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Micromechanical characterization of deformation behavior in ferrous lath martensite Reviewed

Akinobu Shibata, Takashi Nagoshi, Masato Sone, Yakichi Higo

Journal of Alloys and Compounds 577 ( SUPPL. 1 ) S555 - S558 2013.11

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DOI： 10.1016/j.jallcom.2012.01.066

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Crystal growth on novel Cu electroplating using suspension of supercritical CO2 in electrolyte with Cu particles Reviewed

Tetsuya Shimizu, Nao Shinoda, Tso Fu Mark Chang, Akinobu Shibata, Masato Sone

Surface and Coatings Technology 231 77 - 80 2013.9

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DOI： 10.1016/j.surfcoat.2012.03.058

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Crystallographic study on self-annealing of electroplated copper at room temperature Reviewed

Eri Shinada, Takashi Nagoshi, Tso Fu Mark Chang, Masato Sone

Materials Science in Semiconductor Processing 16 ( 3 ) 633 - 639 2013.6

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DOI： 10.1016/j.mssp.2012.11.011

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Solid-state ¹³C NMR study of banana liquid crystals - 2: Alkyl tail-group packing environments in the hexagonal columnar phase Reviewed

Hiromichi Kurosu, Yumi Endo, Saori Kimura, Tomoko Hashimoto, Motoi Harada, Eun Woo Lee, Masato Sone, Junji Watanabe, Sungmin Kang

Journal of Molecular Structure 1040 117 - 121 2013.5

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DOI： 10.1016/j.molstruc.2013.03.003

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Chapter 11: Crystal Growth by Electrodeposition with Supercritical Carbon Dioxide Emulsion

Masato Sone, Hiroki Uchiyama, Tso-Fu Mark Chang

Advanced Topics on Crystal Growth 2013.2

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DOI： 10.5772/54070

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Cu electroplating using suspension of supercritical carbon dioxide in copper-sulfate-based electrolyte with Cu particles Reviewed

Nao Shinoda, Tetsuya Shimizu, Tso Fu Mark Chang, Akinobu Shibata, Masato Sone

Thin Solid Films 529 29 - 33 2013.2

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DOI： 10.1016/j.tsf.2012.03.089

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Abnormally large Ni grains epitaxially grown by electrodeposition on Cu substrate Reviewed

Taiki Uemura, Tso Fu Mark Chang, Akinobu Shibata, Masato Sone

Thin Solid Films 529 385 - 388 2013.2

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DOI： 10.1016/j.tsf.2012.03.062

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Effects of pressure on electroplating of copper using supercritical carbon dioxide emulsified electrolyte Reviewed

Tso Fu Mark Chang, Tetsuya Shimizu, Chiemi Ishiyama, Masato Sone

Thin Solid Films 529 25 - 28 2013.2

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DOI： 10.1016/j.tsf.2012.05.058

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Control of Pore Structure in Porous Nickel Films Fabricated by Electroplating with Supercritical CO2 Emulsion Reviewed

Rina Khanum, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone

ECS ELECTROCHEMISTRY LETTERS 2 ( 10 ) D43 - D44 2013

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DOI： 10.1149/2.008310eel

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Micro-compression test using non-tapered micro-pillar of electrodeposited Cu Reviewed

Masahide Mutoh, Takashi Nagoshi, Tso Fu Mark Chang, Tatsuo Sato, Masato Sone

Microelectronic Engineering 111 118 - 121 2013

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DOI： 10.1016/j.mee.2013.02.040

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Cathodic deposition of TiO2 thin films with supercritical CO2 emulsified electrolyte Reviewed

Tso Fu Mark Chang, Wei Hao Lin, Yung Jung Hsu, Chun Yi Chen, Tatsuo Sato, Masato Sone

Electrochemistry Communications 33 68 - 71 2013

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DOI： 10.1016/j.elecom.2013.04.025

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Quantitative study on removal of SU-8 photoresist patterns by supercritical CO<inf>2</inf> emulsion Reviewed

Tso Fu Mark Chang, Chiemi Ishiyama, Tatsuo Sato, Masato Sone

Microelectronic Engineering 110 204 - 206 2013

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DOI： 10.1016/j.mee.2013.03.137

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Effects of chemical components on the bending properties of micro-sized cantilevers in three types of SU-8 Reviewed

Junpei Matsuzaki, Chiemi Ishiyama, Masato Sone, Yakichi Higo

Microelectronic Engineering 110 108 - 111 2013

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DOI： 10.1016/j.mee.2013.02.050

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Micro-compression test of nanocrystalline nickel deposited by supercritical carbon dioxide emulsion Reviewed

Takashi Nagoshia, Tso Fu Mark Chang, Tatsuo Sato, Masato Sone

Applied Mechanics and Materials 284-287 163 - 167 2013

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DOI： 10.4028/www.scientific.net/AMM.284-287.163

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Intact ultrathin Ni films fabricated by electroplating with supercritical CO<inf>2</inf> emulsion Reviewed

Tso Fu Mark Chang, Takashi Nagoshi, Chiemi Ishiyama, Tatsuo Sato, Masato Sone

Applied Mechanics and Materials 284-287 147 - 151 2013

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DOI： 10.4028/www.scientific.net/AMM.284-287.147

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Mechanical properties of nickel fabricated by electroplating with supercritical CO<inf>2</inf> emulsion evaluated by micro-compression test using non-tapered micro-sized pillar Reviewed

Takashi Nagoshi, Tso Fu Mark Chang, Sato Tatsuo, Masato Sone

Microelectronic Engineering 110 270 - 273 2013

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DOI： 10.1016/j.mee.2013.02.001

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超臨界ナノプレーティング法の開発と超微細配線への応用

曽根正人, 清水哲也, Tso-Fu Mark Chang

精密工学会誌 Vol. 78 ( No. 12 ) 2012.12

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Development of supercritical nano plating and the application into superfine wiring Reviewed

Masato Sone, Tetsuya Shimizu, Tso Fu Mark Chang

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering 78 ( 12 ) 1030 - 1033 2012.12

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DOI： 10.2493/jjspe.78.1030

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Evaluation of anisotropic structure in electrodeposited Ni film using micro-sized cantilever Reviewed

Hirohito Imamura, Takashi Nagoshi, Akari Yoshida, Tso Fu Mark Chang, Susumu Onaka, Masato Sone

Microelectronic Engineering 100 25 - 27 2012.12

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DOI： 10.1016/j.mee.2012.07.118

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Filling of nanoscale holes with high aspect ratio by Cu electroplating using suspension of supercritical carbon dioxide in electrolyte with Cu particles Reviewed

Nao Shinoda, Tetsuya Shimizu, Tso Fu Mark Chang, Akinobu Shibata, Masato Sone

Microelectronic Engineering 97 126 - 129 2012.9

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DOI： 10.1016/j.mee.2012.02.031

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Effects of specimen dimensions on adhesive shear strength between a microsized SU-8 column and a silicon substrate Reviewed

Chiemi Ishiyama, Toshikazu Tasaki, Tso Fu Mark Chan, Masato Sone

Japanese Journal of Applied Physics 51 ( 6 PART 2 ) 2012.6

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DOI： 10.1143/JJAP.51.06FL19

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Solid-state ¹³C NMR study of banana liquid crystals - 1: Two different alkyl tail-group packing environments in the B7 phase Reviewed

Hiromichi Kurosu, Saki Nakanishi, Saori Kimura, Sungmin Kang, Xiaodong Li, Masato Sone, Junji Watanabe

Journal of Molecular Structure 1008 49 - 53 2012.1

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DOI： 10.1016/j.molstruc.2011.11.021

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Direct observation of sintering mechanics of a single grain boundary Reviewed

F. Wakai, H. Fukutome, N. Kobayashi, T. Misaki, Y. Shinoda, T. Akatsu, M. Sone, Y. Higo

Acta Materialia 60 ( 2 ) 507 - 516 2012.1

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DOI： 10.1016/j.actamat.2011.10.003

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Direct observation of nodule growth on electroless Ni-P deposition in supercritical CO2 emulsion Reviewed

Hiroki Uchiyama, Tatsuro Endo, Masato Sone

Journal of the Electrochemical Society 159 ( 2 ) 2012

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DOI： 10.1149/2.088202jes

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Crystalline structure of polyethylene containing vinylene units in the main chain Reviewed

Naofumi Naga, Rika Arai, Genzo Kikuchi, Akinori Toyota, Keiichi Noguchi, Masato Sone, Fukiko Shirae, Tomoka Gotoh, Hiromichi Kurosu

Polymer 52 ( 21 ) 4857 - 4866 2011.9

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DOI： 10.1016/j.polymer.2011.08.058

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Void-free micro-pattern of nickel fabricated by electroplating with supercritical carbon dioxide emulsion Reviewed

Tso Fu Mark Chang, Toshikazu Tasaki, Chiemi Ishiyama, Masato Sone

Microelectronic Engineering 88 ( 8 ) 2225 - 2228 2011.8

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DOI： 10.1016/j.mee.2011.02.034

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Pd-Ni-P metallic glass pattern with controllable microstructure fabricated by electroless alloy plating Reviewed

Nobuyuki Yoshida, Toshikazu Tasaki, Tso-Fu Mark Chang, Akinobu Shibata, Chiemi Ishiyama, Masato Sone

MICROELECTRONIC ENGINEERING 88 ( 8 ) 2401 - 2404 2011.8

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DOI： 10.1016/j.mee.2011.02.081

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Effects of supercritical carbon dioxide treatment on bending properties of micro-sized SU-8 Specimens Reviewed

Chiemi Ishiyama, Tso Fu Mark Chang, Masato Sone

Microelectronic Engineering 88 ( 8 ) 2272 - 2274 2011.8

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DOI： 10.1016/j.mee.2011.01.059

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Study on delamination mechanism of SU-8 micropillars on a Si-substrate under bend loading by Weibull analysis Reviewed

Toshikazu Tasaki, Tso Fu Mark Chang, Chiemi Ishiyama, Masato Sone

Microelectronic Engineering 88 ( 8 ) 2132 - 2134 2011.8

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DOI： 10.1016/j.mee.2011.01.029

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Defect-free nickel micropillars fabricated at a high current density by application of a supercritical carbon dioxide emulsion Reviewed

Tso Fu Mark Chang, Toshikazu Tasaki, Chiemi Ishiyama, Masato Sone

Industrial and Engineering Chemistry Research 50 ( 13 ) 8080 - 8085 2011.7

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DOI： 10.1021/ie200469e

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Void-free nickel pattern electroplated with supercritical carbon dioxide emulsions

Tso-Fu Mark Chang, Toshikazu Tasaki, CHIEMI ISHIYAMA, Masato Sone

Microelectronics Engineering Vol. 88 2011.6

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Function and mechanism of supercritical carbon dioxide emulsified electrolyte in nickel electroplating reaction Reviewed

Tso Fu Mark Chang, Masato Sone

Surface and Coatings Technology 205 ( 13-14 ) 3890 - 3899 2011.3

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DOI： 10.1016/j.surfcoat.2011.02.004

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Mechanical behavior on micro-compression test in ultra-low carbon steel produced by high pressure torsion Reviewed

Takashi Nagoshi, Akinobu Shibata, Masato Sone, Yoshikazu Todaka

Materials Research Society Symposium Proceedings 1297 169 - 174 2011

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DOI： 10.1557/opl.2011.660

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Strengthening effect of twin boundaries in bcc crystal evaluated through a micro-bending test Reviewed

Yuki Karasawa, Tso Fu Mark Chang, Akinobu Shibata, Masato Sone

Materials Research Society Symposium Proceedings 1297 161 - 167 2011

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DOI： 10.1557/opl.2011.600

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Evaluation of the block boundary and sub-block boundary strengths of ferrous lath martensite using a micro-bending test Reviewed

Akinobu Shibata, Takashi Nagoshi, Masato Sone, Shigekazu Morito, Yakichi Higo

Materials Science and Engineering A 527 ( 29-30 ) 7538 - 7544 2010.11

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DOI： 10.1016/j.msea.2010.08.026

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Bright nickel film deposited by supercritical carbon dioxide emulsion using additive-free Watts bath Reviewed

Tso Fu Mark Chang, Masato Sone, Akinobu Shibata, Chiemi Ishiyama, Yakichi Higo

Electrochimica Acta 55 ( 22 ) 6469 - 6475 2010.9

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DOI： 10.1016/j.electacta.2010.06.037

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Electrochemical Nanoplating Using Supercritical Carbon Dioxide

SONE Masato

Jitsumu Hyomen Gijutsu 61 ( 8 ) 561 - 565 2010.8

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DOI： 10.4139/sfj.61.561

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Microstructural development of an electrodeposited Ni layer Reviewed

Akinobu Shibata, Homuro Noda, Masato Sone, Yakichi Higo

Thin Solid Films 518 ( 18 ) 5153 - 5158 2010.7

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DOI： 10.1016/j.tsf.2010.03.016

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Effects of aspect ratio of photoresist patterns on adhesive strength between microsized SU-8 columns and silicon substrate under bend loading condition Reviewed

Chiemi Ishiyama, Akinobu Shibata, Masato Sone, Yakichi Higo

Japanese Journal of Applied Physics 49 ( 6 PART 2 ) 2010.6

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DOI： 10.1143/JJAP.49.06GN14

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Characterization of deformation-induced structural change of Pd<inf>78</inf>Cu<inf>6</inf>Si<inf>16</inf> metallic glass using a micro-sized cantilever-beam specimen Reviewed

Akinobu Shibata, Masato Sone, Yakichi Higo

Scripta Materialia 62 ( 5 ) 309 - 312 2010.3

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DOI： 10.1016/j.scriptamat.2009.11.029

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Impregnation of Ni-P metal into polymer substrate via catalyzation in Sc-CO2 and electroless plating in Sc-CO2 emulsion Reviewed

Byung-Hoon Woo, Masato Sone, Akinobu Shibata, Chiemi Ishiyama, Susumu Edo, Masatoshi Tokita, Junji Watanabe, Yakichi Higo

SURFACE & COATINGS TECHNOLOGY 204 ( 11 ) 1785 - 1792 2010.2

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DOI： 10.1016/j.surfcoat.2009.11.010

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Direct observation of the change in microstructure with deformation in ferrous lath martensite by using micro-sized specimen Reviewed

Akinobu Shibata, Yuichiro Ogawa, Masato Sone, Yakichi Higo

Materials Science Forum 638-642 3514 - 3519 2010

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DOI： 10.4028/www.scientific.net/MSF.638-642.3514

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CHARACTERIZATION OF LOCAL DEFORMATION BEHAVIOR OF MARTENSITIC STEEL USING A MICRO-SIZED CANTILEVER-BEAM SPECIMEN Reviewed

A. Shibata, T. Nagoshi, M. Sone, S. Morito, Y. Higo

CHALLENGES IN MATERIALS SCIENCE AND POSSIBILITIES IN 3D AND 4D CHARACTERIZATION TECHNIQUES 429 - 436 2010

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Micromechanical characterization of boundary strength in martensitic steel Reviewed

A. Shibata, T. Nagoshi, M. Sone, Y. Higo, S. Morito

AIST Steel Properties and Applications Conference Proceedings - Combined with MS and T'10, Materials Science and Technology 2010 3 435 - 443 2010

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Hydrogen permeability and membrane durability of novel pd/γ-alumina graded membrane when a sweep gas is used Reviewed

Masahiro Seshimo, Minoru Ozawa, Masato Sone, Makoto Sakurai, Hideo Kameyama

Journal of Chemical Engineering of Japan 43 ( 11 ) 932 - 937 2010

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DOI： 10.1252/jcej.10we048

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Effects of CO<inf>2</inf> on Ni-P electroless plating in an emulsion of supercritical CO<inf>2</inf> Reviewed

Hiroki Uchiyama, Masato Sone, Akinobu Shibata, Yakichi Higo

Journal of the Electrochemical Society 157 ( 10 ) 2010

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DOI： 10.1149/1.3479189

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Liquid crystalline features of optically active poly(methylene-l,3- cyclopentane) Reviewed

Naofumi Naga, Hajime Shimura, Masato Sone

Macromolecules 42 ( 20 ) 7631 - 7633 2009.10

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DOI： 10.1021/ma901405k

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Functionally graded Pd/γ-alumina composite membrane fabricated by electroless plating with emulsion of supercritical CO<inf>2</inf> Reviewed

Masahiro Seshimo, Takayuki Hirai, Md Mizanur Rahman, Minoru Ozawa, Masato Sone, Makoto Sakurai, Yakichi Higo, Hideo Kameyama

Journal of Membrane Science 342 ( 1-2 ) 321 - 326 2009.10

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DOI： 10.1016/j.memsci.2009.07.007

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Metallization on polymer via quantitatively controlled catalyzation in Sc-CO2 and electroless plating with Sc-CO2 emulsion for micro and nano-device Reviewed

Byung Hoon Woo, Masato Sone, Shibata Akinobu, Chiemi Ishiyama, Kaoru Masuda, Masahiro Yamagata, Yakichi Higo

MICROELECTRONIC ENGINEERING 86 ( 4-6 ) 1179 - 1182 2009.4

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DOI： 10.1016/j.mee.2008.11.096

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Effects of SC-CO2 catalyzation in metallization on polymer by electroless plating Reviewed

Byung-Hoon Woo, Masato Sone, Akinobu Shibata, Chiemi Ishiyama, Kaoru Masuda, Masahiro Yamagata, Yakichi Higo

SURFACE & COATINGS TECHNOLOGY 203 ( 14 ) 1971 - 1978 2009.4

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DOI： 10.1016/j.surfcoat.2009.01.031

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Structure and dynamics of poly(ethylene-co-1,5-hexadiene) as studied by solid state ¹³C NMR and quantum chemical calculations Reviewed

Hiromichi Kurosu, Yuuri Yamamoto, Aki Fujikawa, Emika Kawabata, Masato Sone, Naofumi Naga

Journal of Molecular Structure 921 ( 1-3 ) 208 - 214 2009.3

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DOI： 10.1016/j.molstruc.2008.12.046

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Pd-Ni-P metallic glass film fabricated by electroless alloy plating Reviewed

A. Shibata, Y. Imamura, M. Sone, C. Ishiyama, Y. Higo

Thin Solid Films 517 ( 6 ) 1935 - 1938 2009.1

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DOI： 10.1016/j.tsf.2008.09.101

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Molecular design of main-chain liquid crystalline polyolefin Reviewed

Naofumi Naga, Masato Sone, Keiichi Noguchi, Shigemitsu Murase

Proceedings of SPIE - The International Society for Optical Engineering 7414 2009

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DOI： 10.1117/12.825051

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Characterization of microstructural evolution during deformation in lath martensite by using micro-sized specimen Reviewed

A. Shibata, Y. Ogawa, M. Sone, Y. Higo

Proceedings of the 2nd International Symposium on Steel Science (IS3-2009) 183 - 186 2009

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Development of a liquid crystalline polyolefin-approach from molecular design Reviewed

Naofumi Naoa, Masato Sone, Keiichi Noouchi, Shigemitsu Murase, Yukio Imanishi

Kobunshi Ronbunshu 66 ( 10 ) 381 - 395 2009

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DOI： 10.1295/koron.66.381

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Effects of aspect ratio of micro-sized photoresist patterns on bond strength between a Si substrate with AFM fracture observation Reviewed

Chiemi Ishiyama, Akinobu Shibata, Masato Sone, Yakichi Higo

Materials Research Society Symposium Proceedings 1139 71 - 76 2009

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Characterization of texture and microstructure of electrodeposited Ni layers Reviewed

Homuro Noda, Akinobu Shibata, Masato Sone, Chiemi Ishiyama, Yakichi Higo

Materials Research Society Symposium Proceedings 1112 259 - 264 2009

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Fabrication of a novel Pd/γ-alumina graded membrane by electroless plating on nanoporous γ-alumina Reviewed

Masahiro Seshimo, Minoru Ozawa, Masato Sone, Makoto Sakurai, Hideo Kameyama

Journal of Membrane Science 324 ( 1-2 ) 181 - 187 2008.10

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DOI： 10.1016/j.memsci.2008.07.007

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Liquid crystalline features in a polyolefin of poly(methylene-1,3- cyclopentane) Reviewed

Naofumi Naga, Toshikazu Yabe, Akira Sawaguchi, Masato Sone, Keiichi Noguchi, Shigemitsu Murase

Macromolecules 41 ( 20 ) 7448 - 7452 2008.10

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Publishing type：Research paper (scientific journal)

DOI： 10.1021/ma800682h

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Metallization on polymer by catalyzation in supercritical CO2 and electroless plating in dense CO2 emulsion Reviewed

Byung-Hoon Woo, Masato Sone, Akinobu Shibata, Chiemi Ishiyama, Kaoru Masuda, Masahiro Yamagata, Tatsuro Endo, Takeshi Hatsuzawa, Yakichi Higo

SURFACE & COATINGS TECHNOLOGY 202 ( 16 ) 3921 - 3926 2008.5

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DOI： 10.1016/j.surfcoat.2008.01.037

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Characterization of local deformation microstructure in ferrous lath martensite by using micro-sized specimens Reviewed

Yuichiro Ogawa, Akinobu Shibata, Chiemi Ishiyama, Masato Sone, Yakichi Higo

Materials Research Society Symposium Proceedings 1137 243 - 248 2008

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Effects of supercritical carbon dioxide on adhesive strength between micro-sized photoresist patterns and silicon substrates Reviewed

Chiemi Ishiyama, Akinobu Shibata, Masato Sone, Yakichi Higo

Materials Research Society Symposium Proceedings 1052 217 - 222 2008

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Fabrication of PdxNiyP100-x-y metallic glass film by electroless alloy plating and its catalyst activity Reviewed

Yoshihide Imamura, Masato Sone, Akinobu Shibata, Chiemi Ishiyama, Yakichi Higo

Materials Research Society Symposium Proceedings 1048 50 - 55 2008

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Effect of crystallographic structure of substrate on texture in electrodeposited ni layers Reviewed

Takafumi Shimada, Akinobu Shibata, Chiemi Lshiyama, Masato Sone, Yakichi Higo

Materials Research Society Symposium Proceedings 1054 98 - 103 2008

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Interface stability between Ni-P film plated by supercritical electroless plating and the polymer substrate Reviewed

Byung Hoon Woo, Masato Sone, Akinobu Shibata, Chiemi Ishiyama, Masahiro Yamagata, Kaoru Masuda, Yakichi Higo

Materials Research Society Symposium Proceedings 1054 62 - 68 2008

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Microstructure of Pd-Ni-P metallic glass film fabricated by electroless alloy plating Reviewed

Akinobu Shibata, Yoshihide Imamura, Masato Sone, Chiemi Ishiyama, Yakichi Higo

Materials Research Society Symposium Proceedings 1152 79 - 84 2008

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Study on liquid crystallinity in 2,9-dialkylpentacenes Reviewed

Kazuo Okamoto, Takumi Kawamura, Masato Sone, Kenji Ogino

Liquid Crystals 34 ( 9 ) 1001 - 1007 2007.9

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DOI： 10.1080/02678290701478970

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Effects of P content on nanocrystalline morphology formed by FIB irradiation in Ni-P amorphous alloy Reviewed

Koji Sato, Chiemi Ishiyama, Masato Sone, Yakichi Higo

Materials Transactions 48 ( 7 ) 1694 - 1697 2007.7

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DOI： 10.2320/matertrans.MJ200754

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Evaluation of micro-sized BMG tensile specimen fabricated by electrolytic polishing technique Reviewed

Mikito Kondo, Ryo Morihashi, Chiemi Ishiyama, Masato Sone, Yakichi Higo

Materials Transactions 48 ( 7 ) 1785 - 1788 2007.7

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DOI： 10.2320/matertrans.MJ200755

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Novel porous film by electroplating with an emulsion of supercritical CO2 Reviewed

Md Mizanur Rahman, Masato Sone, Hiroki Uchiyama, Makoto Sakurai, Seizo Miyata, Takabumi Nagai, Yakichi Higo, Hideo Kameyama

Surface and Coatings Technology 201 ( 16-17 ) 7513 - 7518 2007.5

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DOI： 10.1016/j.surfcoat.2007.02.020

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Corrigendum to "Electrochemical polymerization of pyrrole in supercritical carbon dioxide-in-water emulsion" [Polymer 47 (2006) 1547-1554] (DOI:10.1016/j.polymer.2006.01.016) Reviewed

Mitsutoshi Jikei, Suguru Saitoh, Hajimu Yasuda, Hideaki Itoh, Masato Sone, Masa aki Kakimoto, Hideo Yoshida

Polymer 48 ( 9 ) 2791 2007.4

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DOI： 10.1016/j.polymer.2007.03.003

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Fabrication method of the micro-sized tensile specimen for inspecting size effects by electrolytic polishing technique Reviewed

Mikito Kondo, Ryo Morihashi, Chiemi Ishiyama, Masato Sone, Yakichi Higo

Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals 71 ( 2 ) 170 - 175 2007.2

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DOI： 10.2320/jinstmet.71.170

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Surface flatness and interface stability of Ni-P film using new electroless plating method with the emulsion of supercritical CO<inf>2</inf> Reviewed

Hiroki Uchiyama, Masato Sone, Chiemi Ishiyama, Yakichi Higo

Materials Research Society Symposium Proceedings 968 187 - 192 2007

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Uniform Ni-P film using an electroless plating method with an emulsion of supercritical carbon dioxide Reviewed

Hiroki Uchiyama, Masato Sone, Chiemi Ishiyama, Tatsuro Endo, Takeshi Hatsuzawa, Yakichi Higo

Journal of the Electrochemical Society 154 ( 7 ) 2007

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DOI： 10.1149/1.2732165

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Development of new evaluation method for adhesive strength between microsized photoresist and Si substrate of MEMS devices Reviewed

Chiemi Ishiyama, Masato Sone, Yakichi Higo

Key Engineering Materials 345-346 II 1185 - 1188 2007

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Size effects of the micro-sized polycrystalline SUS304 tensile specimen fabricated by electrolytic polishing technique Reviewed

Mikito Kondo, Chiemi Ishiyama, Masato Sone, Yakichi Higo

TRANSACTIONS OF THE MATERIALS RESEARCH SOCIETY OF JAPAN, VOL 32, NO 4 32 ( 4 ) 1187 - 1190 2007

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Effects of P content on morphology of nanocrystals induced by FIB irradiation in Ni-P amorphous alloy Reviewed

Koji Sato, Chiemi Ishiyama, Masato Sone, Yakichi Higo

Materials Research Society Symposium Proceedings 960 11 - 16 2007

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Effects of heat curing on adhesive strength between microsized SU-8 and Si substrate Reviewed

C. Ishiyama, M. Sone, Y. Higo

Proceedings of SPIE - The International Society for Optical Engineering 6533 2007

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DOI： 10.1117/12.736535

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超臨界二酸化炭素共存下での電解めっきによるパラジウム薄膜の作製

上宮成之, 宮崎郁己, 川村啓之, 義家亮, 西村誠, 曽根正人, 宮田清蔵

膜（MEMBRANE） Vol. 31 ( No. 6 ) 2006.12

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Wear properties of nickel coating film plated from emulsion with dense carbon dioxide Reviewed

Md Ziaur Rahman, Masato Sone, Masao Eguchi, Koji Ikeda, Seizo Miyata, Takashi Yamamoto

Surface and Coatings Technology 201 ( 3-4 ) 606 - 611 2006.10

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DOI： 10.1016/j.surfcoat.2005.12.010

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Light-induced formation of curved needle texture by circularly polarized light irradiation on a discotic liquid crystal containing a racemic chromium complex Reviewed

Nobuhiro Anzai, Hiroko Kurihara, Masato Sone, Hidemitsu Furukawa, Toshiyuki Watanabe, Kazuyuki Horie, Sandeep Kumar

Liquid Crystals 33 ( 6 ) 671 - 679 2006.6

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DOI： 10.1080/02678290600647998

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Electrochemical polymerization of pyrrole in supercritical carbon dioxide-in-water emulsion Reviewed

Mitsutoshi Jikei, Suguru Saitoh, Hajimu Yasuda, Hideaki Itoh, Masato Sone, Masa Aki Kakimoto, Hideo Yoshida

Polymer 47 ( 5 ) 1547 - 1554 2006.2

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DOI： 10.1016/j.polymer.2006.01.016

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Aromatic polyesters with flexible side chains. 10. studies on biaxiality in nematic liquid crystal of BC-n polyester Reviewed

Kai Fu, Masato Sone, Masatoshi Tokita, J. Watanabe

Polymer Journal 38 ( 5 ) 442 - 446 2006

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DOI： 10.1295/polymj.38.442

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Development of evaluation method for delamination strength between micro-sized materials in MEMS devices Reviewed

Chiemi Ishiyama, Junichi Hata, Satoru Koyama, Masato Soné, Yakichi Higo

Materials Research Society Symposium Proceedings 977 228 - 233 2006

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Nanograin deposition via an electroplating reaction in an emulsion of dense carbon dioxide in a nickel electroplating solution using nonionic fluorinated surfactant Reviewed

Aya Mizushima, Masato Sone, Hao Yan, Takabumi Nagai, Kiyotaka Shigehara, Shoji Ichihara, Seizo Miyata

Surface and Coatings Technology 194 ( 1 ) 149 - 156 2005.4

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DOI： 10.1016/j.surfcoat.2004.04.087

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Nano-grain structure of nickel films prepared by emulsion plating using dense carbon dioxide Reviewed

Hiroaki Wakabayashi, Nobuyoshi Sato, Masato Sone, Yukinobu Takada, Hao Yan, Kentaro Abe, Kazunari Mizumoto, Shoji Ichihara, Seizo Miyata

Surface and Coatings Technology 190 ( 2-3 ) 200 - 205 2005.1

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DOI： 10.1016/j.surfcoat.2004.03.014

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Electroplating in CO2-in-water and water-in-CO2 emulsions using a nickel electroplating solution with anionic fluorinated surfactant Reviewed

Hao Yan, Masato Sone, Aya Mizushima, Takabumi Nagai, Kentaro Abe, Shoji Ichihara, Seizo Miyata

Surface and Coatings Technology 187 ( 1 ) 86 - 92 2004.10

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DOI： 10.1016/j.surfcoat.2004.01.009

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Solid-state ¹³C NMR study of chiral twisted conformation attributable to chirality in smectic phases of achiral banana-shaped molecules Reviewed

Hiromichi Kurosu, Mami Kawasaki, Mitsuyo Hirose, Maki Yamada, Sungmin Kang, Jirakorn Thisayukta, Masato Sone, Hideo Takezoe, Junji Watanabe

Journal of Physical Chemistry A 108 ( 21 ) 4674 - 4678 2004.5

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DOI： 10.1021/jp031277z

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超臨界二酸化炭素と共存するニッケルめっき浴環境における金属材料の電気化学的特性と適正材料選定の研究

佐藤信義, 田村孝市, 中原正大, 曽根正人, 市原祥次, 宮田清蔵

材料と環境 Vol. 53 ( No. 3 ) 2004.5

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The effects of dense carbon dioxide on nickel plating using emulsion of carbon dioxide in electroplating solution Reviewed

Hao Yan, Masato Sone, Nobuyoshi Sato, Shoji Ichihara, Seizo Miyata

Surface and Coatings Technology 182 ( 2-3 ) 329 - 334 2004.4

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DOI： 10.1016/j.surfcoat.2003.07.006

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Solid state 13C NMR analysis for twisted conformation assumed in B2 and B4 phases of achiral banana molecules [cited by 41]

H.Kurosu, M.Kawasaki, M.Hirose, M.Yamada J.Kann, J.Thysayukta, M.Sone, H.Takezoe, junji watanabe

Journal of Physical Chemistry Vol. 108 ( No. 21 ) 2004.4

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New electroplating method of nickel in emulsion of supercritical carbon dioxide and electroplating solution to enhance uniformity and hardness of plated film Reviewed

Hideo Yoshida, Masato Sone, Hiroaki Wakabayashi, Hao Yan, Kentaro Abe, Xu Tang Tao, Aya Mizushima, Shoji Ichihara, Seizo Miyata

Thin Solid Films 446 ( 2 ) 194 - 199 2004.1

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DOI： 10.1016/j.tsf.2003.09.072

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The study of the electrochemical characteristics of the metallic materials in nickel plating solution under the super critical carbon dioxide fluid and the selection for the construction materials in this environment Reviewed

Nobuyoshi Sato, Kouichi Tamura, Masao Nakahara, Masato Sone, Shoji Ichihara, Seizo Miyata

Zairyo to Kankyo/ Corrosion Engineering 53 ( 3 ) 123 - 129 2004

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DOI： 10.3323/jcorr1991.53.123

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Application of emulsion of dense carbon dioxide in electroplating solution with nonionic surfactants for nickel electroplating Reviewed

Hideo Yoshida, Masato Sone, Aya Mizushima, Hao Yan, Hiroaki Wakabayashi, Kentaro Abe, Xu Tang Tao, Shoji Ichihara, Seizo Miyata

Surface and Coatings Technology 173 ( 2-3 ) 285 - 292 2003.8

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DOI： 10.1016/S0257-8972(03)00734-5

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超臨界二酸化炭素を用いた新規な電気化学的表面処理方法

曽根正人, 吉田英夫, 佐藤信義, 市原祥次, 宮田清蔵

ケミカルエンジニアリング 2003.7

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Crystalline structure of polyethylene containing 1,2- or 1,3-disubstituted cyclopentane units in the main chain Reviewed

Naofumi Naga, Michiyo Tsubooka, Masato Sone, Kohji Tashiro, Yukio Imanishi

Macromolecules 35 ( 27 ) 9999 - 10003 2002.12

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DOI： 10.1021/ma021323d

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Electroplating of nanostructured nickel in emulsion of supercritical carbon dioxide in electrolyte solution Reviewed

Hideo Yoshida, Masato Sone, Aya Mizushima, Kentaro Abe, Xu Tang Tao, Shoji Ichihara, Seizo Miyata

Chemistry Letters ( 11 ) 1086 - 1087 2002.11

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DOI： 10.1246/cl.2002.1086

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Cycloaddition of oxirane group with carbon dioxide in the supercritical homogeneous state Reviewed

Takeshi Sako, Toshiyuki Fukai, Ryotaro Sahashi, Masato Sone, Mitsuo Matsuno

Industrial and Engineering Chemistry Research 41 ( 22 ) 5353 - 5358 2002.10

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DOI： 10.1021/ie020164j

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超臨界ナノプレイティングシステムの開発

吉田英夫, 曽根正人, 市原祥次, 宮田清蔵

鍍金の世界 2002.7

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Rigid-rod polyesters with flexible side chains ix. phase behavior including nematic, layered, and hexagonal columnar phases in poly(p-biphenylene terephthalate) with alkoxy side chains Reviewed

Kai Fu, Nobuhiro Sekine, Masato Sone, Masatoshi Tokita, Junji Watanabe

Polymer Journal 34 ( 4 ) 291 - 297 2002

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DOI： 10.1295/polymj.34.291

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Effects of ammonium salt doping on electroluminescence properties of 4,4-bis(9-dicarbazolyl)-biphenyl Reviewed

Y. Sakuratani, M. Asai, M. Sone, S. Miyata

Journal of Physics D: Applied Physics 34 ( 24 ) 3492 - 3495 2001.12

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DOI： 10.1088/0022-3727/34/24/311

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Blue and yellow emission from derivative of tris(8-hydroxyquinoline)aluminium light-emitting diodes Reviewed

Zhijian Chen, Junsheng Yu, Masato Sone, Seizo Miyata, Youmei Lu, Toshiyuki Watanabe

Journal of Physics D: Applied Physics 34 ( 17 ) 2679 - 2682 2001.9

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DOI： 10.1088/0022-3727/34/17/316

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Influence of sensitizer on organic electroluminescence Reviewed

Zhijian Chen, Junsheng Yu, Yuuki Sakuratani, Minrun Li, Masato Sone, Seizo Miyata, Toshiyuki Watanabe, Xiaoqing Wang, Hisaya Sato

Journal of Applied Physics 89 ( 12 ) 7895 - 7898 2001.6

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DOI： 10.1063/1.1371939

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Red-light-emitting organic electroluminescent devices with bisanil dye as emitter Reviewed

Junsheng Yu, Zhijian Chen, Masato Sone, Seizo Miyata, Minrun Li, Toshiyuki Watanabe

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 40 ( 5 A ) 3201 - 3205 2001.5

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Aromatic polyesters with flexible side chains. 8. Studies on long periodical structure observed in layered crystalline phase Reviewed

Kai Fu, Tokihiro Nematsu, Masato Sone, Tomomichi Itoh, Teruaki Hayakawa, Mitsuru Ueda, Masatoshi Tokita, Junji Watanabe

Macromolecules 33 ( 22 ) 8367 - 8370 2000.10

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DOI： 10.1021/ma001056g

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Rigid-rod polyesters with flexible side chains based on 1,4-dialkyl esters of pyromellitic acid and 4,4′-biphenol. 7. Fluorescence studies on crystalline and liquid crystalline layered phases over a wide range of temperatures Reviewed

Masato Sone, Takashi Wada, Brian R. Harkness, Junji Watanabe, Hiromitsu Takahashi, Hsu Wen Huang, Takashi Yamashita, Kazuyuki Horie

Macromolecules 31 ( 25 ) 8865 - 8870 1998.12

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DOI： 10.1021/ma9802780

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High Resolution 13C NMR Studies for Crystalline and Liquid Crystalline Phases of PB-18 Polyesters

M.Tokita, M.Sone, H.Kurosu, I.Ando, junji watanabe

Journal of Molecular Structure Vol. 446 ( No. 3 ) 1998.6

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High resolution ¹³C NMR studies for crystalline and liquid crystalline phases of PB-18 polyester composed of 4,4'-dihydroxybiphenyl and octadecanedioic acid Reviewed

Masatoshi Tokita, Masato Sone, Hiromichi Kurosu, Isao Ando, Junji Watanabe

Journal of Molecular Structure 446 ( 3 ) 215 - 221 1998.5

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DOI： 10.1016/S0022-2860(98)00293-2

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Charge transfer interactions in liquid crystalline polymers probed by fluorescence spectroscopy Reviewed

Kazuyuki Horie, Hsuwen Huang, Masato Sone, Junji Watanabe

Macromolecular Symposia 116 105 - 115 1997.4

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DOI： 10.1002/masy.19971160110

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Origin of helix in achiral banana-shaped molecular systems Reviewed

Tomoko Sekine, Teruki Niori, Masato Sone, Junji Watanabe, Suk Won Choi, Yoichi Takanishi, Hideo Takezoe

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 36 ( 10 ) 6455 - 6463 1997

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Rigid-rod Polyesters with Flexible Side Chains Based on 1,4-Dialkyl Esters of Pyromellitic Acid and 4,4’-Biphenol 6., Appearance of Hexagonal Columnar Phase as A Consequence of Micro- segregation

junji watanabe, N.Sekine, T.Nematsu, M.Sone

Macromolecules Vol. 29 ( No. 13 ) 1996.7

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Fluorescence study on intermolecular interactions between mesogenic biphenyl moieties of a thermotropic liquid-crystalline polyester (PB-10) Reviewed

Hsu Wen Huang, Kazuyuki Horie, Takashi Yamashita, Shinjiro Machida, Masato Sone, Masatoshi Tokita, Junji Watanabe, Yoji Maeda

Macromolecules 29 ( 10 ) 3485 - 3490 1996.5

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DOI： 10.1021/ma9514030

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Charge transfer interactions in liquid crystalline polymers probed by fluorescence spectroscopy Reviewed

Kazuyuki Horie, Hsu W. Huang, Masato Sone, Junji Watanabe

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry 37 ( 1 ) 119 - 120 1996.3

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Fluorescence study of a thermotropic liquid crystal: Bis (p-hexyloxyphenyl) terephthalate Reviewed

Hiromitsu Takahashi, Kazuyuki Horie, Takashi Yamashita, Asato Sone, Junji Watanabe

Liquid Crystals 21 ( 4 ) 505 - 510 1996

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DOI： 10.1080/02678299608032858

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Nematic liquid crystals with polar ordering formed from simple aromatic polyester Reviewed

Toshiyuki Watanabe, Seizo Miyata, Tomoo Furukawa, Hideo Takezoe, Takuya Nishi, Masato Sone, Ayako Migita, Junji Watanabe

Japanese Journal of Applied Physics, Part 2: Letters 35 ( 4 B ) 1996

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Highly-SHG-active nematic liquid crystal formed from aromatic polyester Reviewed

Tomoo Furukawa, Ken Ishikawa, Hideo Takezoe, Atsuo Fukuda, Toshiyuki Watanabe, Seizo Miyata, Takuya Nishi, Masato Sone, Junji Watanabe

Molecular Crystals and Liquid Crystals Science and Technology Section B: Nonlinear Optics 15 ( 1-4 ) 167 - 170 1996

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Rigid-Rod Polyesters with Flexible Side Chains Based on 1,4-Dialkyl Esters of Pyromellitic Acid and 4,4′-Biphenol. 5. High-Resolution ¹³C NMR Studies for Crystalline and Liquid Crystalline Layered Phases Reviewed

Masato Sone, Brian R. Harkness, Hiromichi Kurosu, Isao Ando, Junji Watanabe

Macromolecules 27 ( 10 ) 2769 - 2777 1994.5

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DOI： 10.1021/ma00088a018

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Rigid-Rod Polyesters with Flexible Side Chains. 4. Thermotropic Behavior and Phase Structures in Polyesters Based on 1,4-Dialkyl Esters of Pyromellitic Acid and 4,4′-Biphenol Reviewed

Junji Watanabe, Brian R. Harkness, Masato Sone, Hideo Ichimura

Macromolecules 27 ( 2 ) 507 - 512 1994.3

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DOI： 10.1021/ma00080a026

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Side-chain conformation of poly(l-proline) form II in the crystalline state as studied by high-resolution solid-state ¹³C NMR spectroscopy Reviewed

Masato Sone, Hiroaki Yoshimizu, Hiromichi Kurosu, Isao Ando

Journal of Molecular Structure 317 ( 1-2 ) 111 - 118 1994.1

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DOI： 10.1016/0022-2860(93)07849-R

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Ring puckering of the pyrrolidine ring of poly (l-proline) form I as studied by variable-temperature high-resolution ¹³C NMR spectroscopy Reviewed

Masato Sone, Hiroaki Yoshimizu, Hiromichi Kurosu, Isao Ando

Journal of Molecular Structure 301 ( C ) 227 - 230 1993.12

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DOI： 10.1016/0022-2860(93)80247-S

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Rigid-rod polyesters with flexible side chains based on 1, 4-dialkylesters of pyromellitic acid iii. charge transfer complex formation in layered mesophase of b-c16 analyzed with fluorescence spectroscopy Reviewed

Masato Sone, Brian R. Harkness, Junji Watanabe, Takashi Yamashita, Toshinori Torii, Kazuyuki Horie

Polymer Journal 25 ( 9 ) 997 - 1001 1993.9

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DOI： 10.1295/polymj.25.997

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Rigid-rod polyesters with flexible side chains based on 1,4-dialkylesters of pyromellitic acid II. Mesogenic properties of H-Cn polyesters prepared from 1,4-dialkylesters of pyromellitic acid and hydroquinone Reviewed

Junji Watanabe, Brian R. Harkness, Masato Sone

Polymer Journal 24 ( 10 ) 1119 - 1127 1992.10

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DOI： 10.1295/polymj.24.1119

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Books

Recent Advances of Electroplating Technology

Masato Sone, Tso-Fu Mark Chang（ Role： Contributor）

2021.5

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Advances in Microelectronics: Reviews, Vol.3

Tso-Fu Mark Chang, Hideaki Nakajima, Chun-Yi Chen, Daisuke Yamane, Toshifumi Konishi, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Hiroshi Toshiyoshi, Masato Sone.（ Role： ContributorEffective Young’s Modulus of Elelectrodeposited Gold for Design of MEMS Accelerometers）

IFSA PUBLISHING, S.L. 2021.4

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Ti-Based Biomaterials, Synthesis, Properties and Applications

Takashi Nagoshi, Takahisa Yasuda, Nao Otaki, Masaki Tahara, Hideki Hosoda, Masato Sone（ Role： ContributorEvaluation of the Shape Memory Effect by Micro-Compression Testing of Single Crystalline Ti-27Nb Ni-Free Alloy）

MDPI Books 2020.12

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Dislocation Mechanics of Metal Plasticity and Fracturing

（ Role： Contributor87-96.）

2020.11

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Biomedical Engineering

Wan-Ting Chiu, Tso-Fu Mark Chang, Hiromichi Kurosu, Masato Sone（ Role： Joint authorMaterial Engineering, Sensor Materials）

Jenny Stanford Publishing 2020.8

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Novel Metal Electrodeposition and the Recent Application

Masato Sone, Kazuya Masu（ Role： Supervisor (editorial)）

INTECH 2019.3

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Advances in Microelectronics Reviews, Vol.2

Tso-Fu Mark Chang, Chun-Yi Chen, Yota Ishizuka, Minami Teranishi, Takuma Suzuki, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone.（ Role： Joint authorAuthor）

IFSA Publishing 2019.2

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Advances in Biosensors: Reviews, Vol.2

Wan-Ting Chiu, Byung-Hoon Woo, Mitsuo Sano, Tso-Fu Mark Chang, Chun-Yi Chen, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone（ Role： Joint author）

IFSA Publishing 2018.10

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Advances in Microelectronics Reviews, Vol.1

Tso-Fu Mark Chang, Chun-Yi Chen, Hao-Chun Tang, Masaharu Yoshiba, Takashi Nagoshi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone（ Role： Joint author）

IFSA Publishing 2017.12

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Materials for Energy Infrastructure

Takashi Nagoshi, Tso-Fu Mark Chang, Tatsuo Sato, Masato Sone（ Role： Joint author）

Springer 2017.1

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Chapter 10: Mechanical Property Evaluation of Electrodeposited Nanocrystalline Metals by Micro-testing

Takashi Nagoshi, Tso-Fu Mark Chang, Masato Sone

Electroplating of Nanostructure 2015.12

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DOI： 10.5772/61267

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Electroplating of Nanostructure

Masato Sone, Tetsuya Shimizu, Nao Shinoda, Tso-Fu Mark Chang

INTECH 2015.12

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Advanced Topics on Crystal Growth

Masato Sone, Hiroki Uchiyama, Tso-Fu Mark Chang（ Role： Joint author）

INTECH 2013.12

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半導体・MEMSのための超臨界流体

近藤, 英一, 上野, 和良, 内田, 寛, 曽根, 正人, 生津, 英夫, 服部, 毅, 堀, 照夫, 森口, 誠

コロナ社 2012 （ ISBN:9784339008371 ）

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超臨界流体技術とナノテクノロジー開発

曽根正人

超臨界流体技術とナノテクノロジー開発 2010.1

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超臨界流体入門

曽根正人

超臨界流体入門 2008.12

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超臨界流体技術の開発と応用

曽根正人

超臨界流体技術の開発と応用 2008.9

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超臨界流体技術を用いたナノ組織金属材料の創製

曽根正人

鍍金の世界 2008.6

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最近の化学工学58 超臨界流体技術の実用化最前線

曽根正人

化学工業社 2007.12

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超臨界二酸化炭素を用いたナノプレーティング

曽根正人

2007.5

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Materials Chemistry in Supercritical Fluids

M.Sone, Seizo Miyata

Research Signpost 2006

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Novel Strategies for Fundamental Innovation in Polymer Science

M.Sone, S.Miyata

Research Signpost 2005.11

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超臨界ナノプレーティング法

曽根正人, 佐藤信義, 吉田英夫, 市原祥次, 宮田清蔵

2004.1

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Polymer Plays Great Roles in "Supercritical Nano Plating System"

SONE Masato

The Society of Polymer Science, Japan 2003.9

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DOI： 10.1295/kobunshi.52.709

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超臨界流体のすべて

曽根正人, 佐古猛

（株）テクノシステム 2002.9

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超臨界二酸化炭素を用いた新規めっき法の開発－超臨界ナノプレイティングシステムの開発

吉田英夫, 曽根正人, 市原祥次, 宮田清蔵

2001.5

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超臨界流体中での高効率固体触媒反応

佐古猛, 曽根正人, 神沢千代志

2000.9

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MISC

Nickel Electroplating with Supercritical Carbon Dioxide Emulsified Nickel Sulfamate Bath

Wending Hou, Tomoyuki Kurioka, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

ECS Meeting Abstracts 2025.7

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DOI： 10.1149/MA2025-01231407mtgabs

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Degradation of Persistent Organic Pollutants Utilizing Piezocatalytic NiFe₂O₄ Nanomaterials

Xinyu Jin, Tomoyuki Kurioka, Chun-Yi Chen, Masato Sone, Yung-Jung Hsu, Satoshi Okamoto, Tso-Fu Mark Chang

ECS Meeting Abstracts 2025.7

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DOI： 10.1149/MA2025-01623043mtgabs

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(Invited) Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers

Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Hiroyuki Ito, Katsuyuki Machida, Yoshihiro Miyake

ECS Meeting Abstracts 2023.12

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DOI： 10.1149/MA2023-02301540mtgabs

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Evaluation of Device for High-Sensitivity MEMS Sensor Module

内山晃宏, 柴田滉平, 大西哲, 町田克之, 緒方大樹, 石原昇, 内富寛隆, CHANG Tso-Fu Mark, 曽根正人, 三宅美博, 伊藤浩之

応用物理学会春季学術講演会講演予稿集(CD-ROM) 69th 2022

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Noise floor estimation of Au proof-mass single-axis MEMS sensor module

大西哲, 御宿希祐, TENNETI Devi Srujana, CHAKRABORTY Parthojit, 町田克之, 緒方大樹, 内富寛隆, CHANG Tso-Fu Mark, 曽根正人, 三宅美博, 伊藤浩之

応用物理学会秋季学術講演会講演予稿集(CD-ROM) 83rd 2022

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A Study on High-Sensitivity MEMS Sensor Module for Micro Muscle Sound Measurement

大西哲, 柴田滉平, 内山晃宏, 町田克之, 緒方大樹, 石原昇, 内富寛隆, CHANG Tso-Fu Mark, 曽根正人, 三宅美博, 伊藤浩之

応用物理学会春季学術講演会講演予稿集(CD-ROM) 69th 2022

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Micro-Bending of Single Crystal Gold and the Sample Geometry Effect

Fujita Kazuya, Suzuki Kosuke, Chen Chun-Yi, Chang Tso-Fu Mark, Ito Hiroyuki, Yamane Daisuke, Machida Katsuyuki, Masu Kazuya, Sone Masato

JSAP Annual Meetings Extended Abstracts 2021.2 2581 - 2581 2021.8

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DOI： 10.11470/jsapmeeting.2021.2.0_2581

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Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold Evaluated By Micro-Bending Test Reviewed

Kosuke Suzuki, Yu-An Chien, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone

ECS Meeting Abstracts 2020.11

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DOI： 10.1149/MA2020-02653306mtgabs

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Polyaniline Supported Atomic Gold Electrode Toward Glucose Oxidation Reviewed

Yuki Ito, Yu-An Chien, Parthojit Chakraborty, Tso-Fu Mark Chang, Takamichi Nakamoto, Masato Sone

ECS Meeting Abstracts 2020.11

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DOI： 10.1149/MA2020-02171504mtgabs

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Micro-Compression Characterization of Electrodeposited Nickel Phosphorus Amorphous Alloys for MEMS Application Reviewed

Tokihiro Hotta, Tso-Fu Mark Chang, Masato Sone

ECS Meeting Abstracts 2020.11

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DOI： 10.1149/MA2020-02653308mtgabs

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Effects of Sample Geometry on Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics Reviewed

Kazuya Fujita, Kosuke Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone

ECS Meeting Abstracts 2020.11

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DOI： 10.1149/MA2020-02653307mtgabs

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Relationship between Current Density, Crystal Grain Size, Composition and Mechanical Properties in Electrodeposited Ni-Co Alloys Reviewed

Yiming Jiang, Yu-An Chien, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone

ECS Meeting Abstracts 2020.11

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DOI： 10.1149/MA2020-02161457mtgabs

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Electrodeposition of Au-Cu Alloys and the Micro-Mechanical Properties Reviewed

Tso-Fu Mark Chang, Haochun Tang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone

ECS Meeting Abstracts {MA}2020-01 ( 20 ) 1233 - 1233 2020.5

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Publisher：The Electrochemical Society

DOI： 10.1149/MA2020-01201233mtgabs

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Electrodeposition of Sn/SnO₂ Composite Materials As Anode Material for Lithium Ion Batteries and the Micro-Mechanical Property

Tso-Fu Mark Chang, Mana Tanabe, Chun-Yi Chen, Masato Sone

ECS Meeting Abstracts MA2019-04 56 - 56 2019.6

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Publisher：The Electrochemical Society

<jats:p> Sn/SnO<jats:sub>2</jats:sub> composite materials are promising anode materials in lithium ion battery. Electrodeposition with supercritical CO<jats:sub>2</jats:sub>(sc-CO<jats:sub>2</jats:sub>) emulsified electrolyte (EP-SCE) is an effective method in controlling morphology (Ni [1], Cu[2], and Co[3]) and crystallinity (ZnO [4]and TiO<jats:sub>2</jats:sub> [5]) of electrodeposited materials. Sc-CO<jats:sub>2</jats:sub> is CO<jats:sub>2</jats:sub> at temperature and pressure above its critical point, which is 304.1 K and 7.38 MPa. CO<jats:sub>2</jats:sub> is non-polar, therefore, the solubility of metal salts and electrical conductivity are both very low in sc-CO<jats:sub>2</jats:sub>. In order to conduct electrochemical reactions, surfactants are used to form emulsified electrolyte. </jats:p> <jats:p>Co-deposition of SnO<jats:sub>2</jats:sub> along with electrodeposition of metallic Sn can occur at the same time in a SnCl<jats:sub>2</jats:sub> based electrolyte containing NO<jats:sub>3</jats:sub> <jats:sup>-</jats:sup> ions [6]. The EP-SCE is expected to be effective in controlling concentration and properties of the SnO<jats:sub>2</jats:sub> in metallic Sn film. In this study, Sn/SnO<jats:sub>2</jats:sub> composite films are prepared by electrodeposition with supercritical CO<jats:sub>2</jats:sub> (sc-CO<jats:sub>2</jats:sub>) emulsified electrolyte, and the mechanical properties in micro-scale are evaluated by compression test of micro-pilliars fabricated from the Sn/SnO<jats:sub>2</jats:sub> composite film for practical applications. </jats:p> <jats:p>Details of the high pressure electrochemical apparatus can be found in a previous study [1]. The electrolyte is composed of 0.22 M SnCl<jats:sub>2</jats:sub>, 0.015 M HCl and 0.31 M (NH<jats:sub>4</jats:sub>)<jats:sub>3</jats:sub>C<jats:sub>6</jats:sub>H<jats:sub>5</jats:sub>O<jats:sub>7</jats:sub>. The current density applied is varied from 2.8 to 17.3 mA/cm<jats:sup>2</jats:sup>. For the EP-SCE, the surfactant is C<jats:sub>12</jats:sub>H<jats:sub>25</jats:sub>(OCH<jats:sub>2</jats:sub>CH<jats:sub>2</jats:sub>)<jats:sub>15</jats:sub>OH. 0.2 vol.% of the surfactant is used to form the sc-CO<jats:sub>2</jats:sub> emulsions. 20 vol.% of CO<jats:sub>2</jats:sub> at 343 K and 15 MPa under agitation are used to ensure the formation of a stable emulsion. Electrodeposition without the sc-CO<jats:sub>2</jats:sub> emulsions at ambient condition (CONV) was also conducted to be used as a comparison. </jats:p> <jats:p>Surface morphology of the films prepared by EP-SCE were very smooth and compact, and the CONV films were porous. On the other hand, there is not much different in the average grain size between the EP-SCE and CONV films, which was about 50 μm for both the EP-SCE and CONV films. The oxygen content in the EP-SCE films can be up to 28.3 at.% by adjusting the electrodeposition parameters. </jats:p> <jats:p>Micro-pillars with a 20×20 μm<jats:sup>2</jats:sup> cross-section and a height at 40 μm were fabricated by focus ion beam from the deposited films. The yield stresses were ranged from 10 to 40 MPa when the current density changed. </jats:p> <jats:p>Acknowledgment: </jats:p> <jats:p>This work was supported by JST CREST Grant Number JPMJCR1433. </jats:p> <jats:p>Reference: </jats:p> <jats:p>[1] Electrochim. Acta 55 (2010) 6469-6475 </jats:p> <jats:p>[2] Thin Solid Films 529 (2013) 25-28 </jats:p> <jats:p>[3] J. Electrochem. Soc. 162 (2015) D423-D426 </jats:p> <jats:p>[4] J. Phys. Chem. C 117 (2013) 25596-25603 </jats:p> <jats:p>[5] Electrochem. Commun. 33 (2013) 68-71 </jats:p> <jats:p>[6] J. Alloys Compd. 403 (2005) 335-340 </jats:p>

DOI： 10.1149/ma2019-04/1/56

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Impurity study of copper film fabricated by electroplating with supercritical carbon dioxide emulsified electrolyte

Tso-Fu Mark Chang, Hikaru Kinashi, Takashi Nagoshi, Tatsuo Sato, Masato Sone

Copper and Copper Alloy Vol. 58 ( No. 1 ) 2019.6

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Novel Metal Electrodeposition and the Recent Application

Masato Sone, Kazuya Masu

2019.3

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DOI： 10.5772/intechopen.73382

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Design of Au-Based Micro-Components with High Structure Stability for Applications in MEMS Inertial Sensors

Tso-Fu Mark Chang, Chun-Yi Chen, Yota Ishizuka, Minami Teranishi, Takuma Suzuki, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone

Vol. 2 2019.2

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High-Resolution Inertial Sensor Module for Weak Muscular Sound Measurement

古賀達也, 市川崇志, 田中直登, 緒方大樹, 大良宏樹, 山根大輔, 石原昇, 伊藤浩之, 曽根正人, 町田克之, 三宅美博, 益一哉

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 36th 2019

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Highly Reliable Metallization on Polymer and Their Fundamental Characteristics toward Wearable Devices Applications

Wan-Ting Chiu, Byung-Hoon Woo, Mitsuo Sano, Tso-Fu Mark Chang, Chun-Yi Chen, Tomoko Hashimoto, Hiromichi Kurosu, Masato Sone.

Vol. 2 2018.10

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MEMS加速度センサに向けた金めっき微小カンチレバーのヤング率に関する研究

中島英亮, CHANG Tso‐Fu Mark, CHEN Chun‐Yi, 山根大輔, 小西敏文, 町田克之, 年吉洋, 伊藤浩之, 益一哉, 曽根正人

応用物理学会秋季学術講演会講演予稿集(CD-ROM) 79th ROMBUNNO.18a‐233‐6 2018.9

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Mechanical Property Evaluation of NiFeCoGa Shape Memory Alloys Using Micro-compression Specimens

Igawa Kengo, Yanagida Sari, Chang Tso-Fu Mark, Chen Chun-Yi, Tahara Masaki, Inamura Tomonari, Hosoda Hideki, Chernenko Volodymyr A., Sone Masato

JSAP Annual Meetings Extended Abstracts 2017.1 2956 - 2956 2017.3

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Language：Japanese Publisher：The Japan Society of Applied Physics

DOI： 10.11470/jsapmeeting.2017.1.0_2956

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Mechanical Property of Micro-Cantilever Made of Electrodeposited Gold by Micro-Bending Test

33 1 - 4 2016.10

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A Multi-layer Metal MEMS Accelerometer with Differential Sensing Structure

33 1 - 4 2016.10

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Mechanical Property Evaluation of Electro-deposited Gold By Micro-tensile Specimens Toward MEMS Application

33 1 - 4 2016.10

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Evaluation of anisotropic structure in electrodeposited Au film by micro-compression testing toward application in MEMS accelerometer

33 1 - 4 2016.10

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Evaluation of structure stability of electrodeposited Ti/Au layered micro-cantilevers for MEMS devices

33 1 - 4 2016.10

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A Multi-layer Metal MEMS Inertial Sensor for Sub-1mG Detection

33 1 - 4 2016.10

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超臨界ナノプレーティング法によるめっき処理面のレベリング向上—Enhanced leveling effect on plated metal surface using supercritical nanoplating—特集研磨要らずで鏡面仕上げ

内山浩幹, ツォーフマークチャン, 陳君怡, 曽根正人

Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 60 ( 9 ) 497 - 500 2016.9

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Next Generation MEMS Electroforming Technology Using Supercritical Carbon Dioxide and the Micro-Materials Testing

67 ( 1 ) 6 - 14 2016.1

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An Evaluation on Adhesion Characteristics with Metal Layer Structure of MEMS Accelerometer

32 1 - 4 2015.10

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OS2-2-5 Thick Film Patterning by Lift-off Process of Electroformed Metal

Hagiyama Takuya, Chang Tso-Fu Mark, Sone Masato, Hata Seiichi

2012 ( 4 ) 151 - 152 2012.10

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Language：Japanese Publisher：The Japan Society of Mechanical Engineers

Lift-off process and etching process have been applied for patterning in MEMS. Especially for thick film pattern, lift-off process is superior in terms of profile accuracy and material selectivity. Although high-polymer material is widely used as lift-off resist, they are curing and become deformed in a hot environment in thick film deposition. In this paper, we propose a new process where electroformed metal is used as lift-off resist. We attempted to fabricate thick film pattern of metallic glass, which is difficult to etching, by this process. As results, we achieved to fabricate thick film pattern and showed potential for applicability of thick film patterning to the proposed process.

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Research & Development of Next Generation Environmental Benign Integrated Circuit Wiring Technology

SONE Masato

76 ( 4 ) 203 - 204 2012.4

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固体NMRによる液晶性ポリオレフィンの構造と分子運動

足立菜摘, 永直文, 曽根正人, 黒子弘道

高分子学会予稿集(CD-ROM) 61 ( 2 ) 2012

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固体NMRによる液晶性ポリオレフィンの構造と分子運動

足立菜摘, 永直文, 曽根正人, 黒子弘道

繊維学会夏季セミナー講演要旨集 43rd 2012

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主鎖にフェニレン構造を有するポリエチレンの構造,特性解析

永直文, 岡戸慎吾, 田邊沙都, 足立菜摘, 曽根正人, 野口恵一, 黒子弘道

高分子学会予稿集(CD-ROM) 61 ( 2 ) 2012

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主鎖型液晶性ポリオレフィンの構造制御と特性解析

永直文, 矢部俊和, 志村創, 曽根正人, 野口恵一, 村瀬繁満

繊維学会予稿集 63 ( 1/2 ) 2008

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主鎖にトランス-ビニレンユニットを有する新規ポリエチレン繊維の固体NMR及び量子化学計算による構造解析

後藤友香, 房川知世, 河合留美子, 曽根正人, 永直文, 黒子弘道

繊維連合研究発表会講演要旨集 17th 2008

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超臨界二酸化炭素処理を利用した微小レジストパターン-基板間の密着強度の向上

石山千恵美, 曽根正人, 肥後矢吉

化学工学会研究発表講演要旨集 2008 486 - 486 2008

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DOI： 10.11491/scej.2008.0.486.0

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438 Effects of Resist film thickness on Bond Strength between Micro-sized Resist components and a substrate

ISHIYAMA Chiemi, Shibata Akinobu, SONE Masato, HIGO Yakichi

The proceedings of the JSME annual meeting 2008 175 - 176 2008

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Language：Japanese Publisher：The Japan Society of Mechanical Engineers

Bond strength between micro-sized photoresist specimens and Si substrate was evaluated to clarify the effects of film thickness, i. e. aspect ratio. Multiple micro-sized cylindrical specimens with a diameter of 125 μm were fabricated using an epoxy type photoresist, SU-8 on a silicon chip by photolithography. Bond strength tests were performed under bend load with SU-8 cylindrical specimens of various aspect ratios (0.6-0.9). The maximum bend moment increases with increasing aspect ratio. On the other hands, the maximum load is almost constant and independent with aspect ratio. These results indicate that the shear stress at failure is constant in this study. The results concluded that the delamination would occur by shear stress within the aspect ratio of 0.6-0.9.

DOI： 10.1299/jsmemecjo.2008.8.0_175

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Pd／アルマイト水素透過複合膜の耐久性向上に関する研究

小澤稔, 瀬下雅博, 曽根正人, 桜井誠, 亀山秀雄

化学工学会研究発表講演要旨集 2008 279 - 279 2008

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DOI： 10.11491/scej.2008f.0.279.0

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Nucleation and crystal growth of Pd catalyst deposition in supercritical CO2 for metallization on polymer

Woo Byung Hoon

2008 353 - 353 2008

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Publisher：The Society of Chemical Engineers, Japan

DOI： 10.11491/scej.2008f.0.353.0

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2833 Effects of Processing Conditions on Adhesive Strength between Microsized Components and a Substrate for MEMS Devises

ISHIYAMA Chiemi, SONE Masato, HIGO Yakichi

The proceedings of the JSME annual meeting 2007 721 - 722 2007

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Language：Japanese Publisher：The Japan Society of Mechanical Engineers

Adhesive bending strength between microsized photoresist and Si substrate is evaluated to clarify effects of supercritical (Sc)CO_2 Cleaning. Multiple micro-sized cylindrical specimens with a diameter of 125μm were fabricated from a epoxy type photoresist, SU-8 on a silicon chip by photolithography. Adhesive testing was performed under bend loading using a part of microsized cylinders on a Si substrate without Sc CO_2 cleaning at first. After the testing, the chip was cleaned by Sc CO_2, and then, the remaining specimens on the chip were tested. Adhesive bend stress of the specimens with Sc CO_2 cleaning is 18% higher than that without the cleaning. The delamination surfaces of the Sc CO_2 cleaning specimens were significantly different between the SU-8 specimens with and without the Sc CO_2 cleaning. All the results suggest that the Sc CO_2 cleaning strongly affects the adhesive properties between the micro-size photoresist and Si substrate.

DOI： 10.1299/jsmemecjo.2007.1.0_721

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2840 The fatigue properties of the micro-sized specimen with stress concentrations

KOYAMA Satoru, ISHIYAMA Chiemi, SONE Masato, HIGO Yakichi

The proceedings of the JSME annual meeting 2007 735 - 736 2007

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Language：Japanese Publisher：The Japan Society of Mechanical Engineers

Micro Electro Mechanical Systems (MEMS) have been applied to various field of devices, for example, micro-photonics devices and micro-medical devices. These MEMS devices include electronic circuits and micro-sized components, which consist of thin films formed on a substrate using the same fabrication techniques for semiconductor devices. The evaluation of mechanical properties for micro-sized material and micro-sized structures is therefore essential to design reliable and durable MEMS devices. During the MEMS fabrication process, we must consider the possibility of introducing sub-micron defects these defects affect on the strength of the final structure. We studied fatigue life by stress concentration for sample of 1/1000th size of traditional sized of specimen. The S-N curves of micro-sized materials are similar for bulk sized one. The scatter of fatigue life of micro-sized material does not exist.

DOI： 10.1299/jsmemecjo.2007.1.0_735

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主鎖型液晶性ポリオレフィンの分子量制御と特性解析

永直文, 矢部俊和, 曽根正人, 野口恵一, 村瀬繁満

日本液晶学会討論会講演予稿集(CD-ROM) 2007 2007

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高耐久性を有するアルマイト・パラジウム複合薄膜の作成

瀬下雅博, 平井嵩之, Rahman Mizanur, 曽根正人, 桜井誠, 亀山秀雄

化学工学会研究発表講演要旨集 2006 337 - 337 2006

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DOI： 10.11491/scej.2006f.0.337.0

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固体NMRによるpoly(ethylene-co-1,5-hexadiene)の構造と運動性

山本優理, 藤川亜紀, 曽根正人, 永直文, 黒子弘道

固体NMR・材料研究会報告集 ( 40 ) 2006

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超臨界ナノプレーティング法を用いた、アルマイト/Pd傾斜構造を有する燃料電池用水素分離膜

平井嵩之, Rahman Mizanur, 瀬下雅博, 曽根正人, 桜井誠, 亀山秀雄

化学工学会研究発表講演要旨集 2006 616 - 616 2006

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DOI： 10.11491/scej.2006f.0.616.0

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Structure and characteristics of main-chain liquid crystalline polyolefin Reviewed

Akira Sawaguchi, Masato Sone, Naofumi Naga, Shigemitsu Murase

Polymer Preprints, Japan 54 ( 1 ) 1499 2005

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液晶性ポリオレフィンの分子設計と特性解析

沢口亮, 曽根正人, 永直文, 村瀬繁満

繊維学会予稿集 59 ( 3 ) 2004

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Molecular design of nematic liquid crystalline polyolefins

NAGA Naofumi, SONE Masato, MURASE Shigemitsu

Proceedings of Japanese Liquid Crystal Society Annual meeting 2004 83 - 83 2004

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Publisher：Japanese Liquid Crystal Society

The liquid crystalline phase of polyolefins was first discovered in poly(methylene-1,3-cyclopentane) (PMCP), obtained by cyclization polymerization of 1,5-hexadiene (HD) using a zirconocene catalyst. PMCPS clearly show fluidity and briefrigence above the glass transition temperature, and the texture derives from nematic liquid crystalline phase. The high cyclization selectivity of HD units and high trans-content of 1,3-cyclopentane unit are needed to induce the liquid crystalline phase.

DOI： 10.11538/ekitou.2004.0.83.0

CiNii Books

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Rigid-rod Polyesters with Flexible Side Chains Based on 1,4-Dialkylesters of Pyromellitic Acid. 1

Sone Masato, Watanebe Junji, Harkness Brian R., Kurosu Hiromichi, Ando Isao

Preprints of Symposium on Liquid Crystals 18 250 - 251 1992.9

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Rigid-rod Polyesters with Flexible Side Chains Based on 1,4-Dialkylesters of Pyromellitic Acid. 2

Sone Masato, Watanebe Junji, Harkness Brian R., Kurosu Hiromiti, Ando Isao

Preprints of Symposium on Liquid Crystals 18 252 - 253 1992.9

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Presentations

Anodic Electrodeposition of Conducting Polymers in Supercritical Carbon Dioxide-Emulsified Electrolytes Invited

Tomoyuki Kurioka, Punvinai Vinaisuratern, Tso-Fu Mark Chang, Masato Sone

Materials Research Meeting 2025 2025.12

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Event date： 2025.12

Language：English Presentation type：Oral presentation (general)

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Tuning of the morphologies of the electrodeposited polypyrrole prepared with supercritical CO2-emulsified electrolyte containing surfactant

Punvinai Vinaisuratern, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone

Materials Research Meeting 2025 2025.12

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Event date： 2025.12

Language：English Presentation type：Oral presentation (general)

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Control of the Mechanical Properties of Multi-layered Ti/Au Micro-sized Components by Electroplating Towards an Ultra-High-Sensitive Inertial Accelerometer Invited

Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-Yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake

2025 MRS-Taiwan Annual Meeting 2025.11

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Piezocatalytic Degradation of Malachite Green by CoFe2O4

Shota Kitaoka, Xinyu Jin, Tomoyuki Kurioka, Chun-Yi Chen, Yung-Jung Hsu, Masato Sone, Satoshi Okamoto, Tso-Fu Mark Chang

2025 MRS-Taiwan Annual Meeting 2025.11

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Event date： 2025.11

Language：English

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Fabrication of Au/Polythiophene Derivatives via Simultaneous Electrodeposition of Au and Electrochemical Doping toward Electrochemical Sensing Applications Invited

Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone

2025 ICGET-Tw: The 2025 International Conference on Green Electrochemical Technologies and the 2025 Annual Meeting of Electrochemical Society of Taiwan 2025.11

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Event date： 2025.11

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Electrodeposition of Ruthenium on Copper and Titanium Substrates: A Comparative Study of Current Efficiency

Zhitao Hu, Tomoyuki Kurioka, Yung-Jung Hsu, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

2025 MRS-Taiwan Annual Meeting 2025.11

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Gold plating material design for high-sensitivity MEMS accelerometer Invited

Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Takashi Nagoshi, Katsuyuki Machida, HIroyuki Ito, Yoshihiro Miyake

16th Meeting of The stugy group of the Integrated MEMS 2025.6

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Event date： 2025.6

Language：Japanese Presentation type：Oral presentation (keynote)

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Material Control & Evaluation Methods of Multi-layered Ti/Au Micro-sized Components by Electroplating Toward Ultra High-Sensitive MEMS Accelerometer Invited

Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake

Material World 2025, 3rd Global Conference on Materials Science & Engineering 2025.4

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Event date： 2025.4

Language：English Presentation type：Oral presentation (keynote)

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Material Property Control of Multi-layered Ti/Au Microcomponents by Electroplating Toward Ultra high-Sensitive MEMS Inertial Sensors Invited

Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake

2024 ICGET-Tw: The 2024 International Conference on Green Electrochemical Technologies and the 2024 Annual Meeting of Electrochemical Society of Taiwan 2024.11

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Event date： 2024.11

Language：English Presentation type：Oral presentation (keynote)

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Multiferroic Ferrite-Based Materails for Photodegradation of Organic Dyes

Tso-Fu Mark Chang, Jhen-Yang Wu, Shunan Ou, Xinyu Jin, Tomoyuki Kurioka, Chun-Yi Chen, Yung-Jung Hsu, Masato Sone, Satoshi Okamoto

2024 ICGET-Tw 2024.11

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Event date： 2024.11

Language：English Presentation type：Oral presentation (invited, special)

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Electroless plating of Ni-P/Nylon Fiber by Supercritical CO2 Catalyzation toward Weavable Devices

Kazuhiro Shibata, Hikaru Kondo, Tomoyuki Kurioka, Wan-Ting Chiu, Chun-Yi Chen, Tso-Fu Mark Chang, Nao Yoshida, Hiromichi Kurosu, Masato Sone

2024 ICGET-Tw: The 2024 International Conference on Green Electrochemical Technologies and the 2024 Annual Meeting of Electrochemical Society of Taiwan 2024.11

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Event date： 2024.11

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NiFe2O4 Photocatalysts for Malachite Green Degradation: Effects of Sintering Temperature and Sonication on Catalytic Performance

Xinyu Jin, Jhen-Yang Wu, Tomoyuki Kurioka, Chun-Yi Chen, Masato Sone, Yung-Jung Hsu, Satoshi Okamoto, Tso-Fu Mark Chang

The 2024 International Conference on Green Electrochemical Technologies and the 2024 Annual Meeting of Electrochemical Society of Taiwan (2024 ICGET-TW) 2024.11

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Event date： 2024.11

Language：English Presentation type：Oral presentation (general)

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Micro-Mechanical Property of Electrodeposited Gold: Designing Movable Components in MEMS Devices

Shota Kanno, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Yung-Jung Hsu, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

The 2024 International Conference on Green Electrochemical Technologies and the 2024 Annual Meeting of Electrochemical Society of Taiwan (2024 ICGET-TW) 2024.11

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Event date： 2024.11

Language：English Presentation type：Oral presentation (general)

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Enhancing the Efficacy of Organic Dye Degradation using Gold-Decorated ZnFe₂O₄ Nanocrystals under Visible Light Irradiation

Junan Wang, Jhen-Yang Wu, Chun-Yi Chen, Tomoyuki Kurioka, Masato Sone, Yung-Jung Hsu, Satoshi Okamoto, Tso-Fu Mark Chang

The 2024 International Conference on Green Electrochemical Technologies and the 2024 Annual Meeting of Electrochemical Society of Taiwan (2024 ICGET-TW) 2024.11

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Event date： 2024.11

Language：English Presentation type：Oral presentation (general)

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Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Dold and Gold-Copper Alloys by Micro-\bending Test Toward MEMS Applications Invited

Masato Sone, Ryohei Hori, Kazuya Fujita, Kosuke Suzuki, Ken Hashigata, Keisuke Asano, Tomoyuki Kurioka, Tso-Fu Mark Chang, Chun-Yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake

CPIT2024, New Method of Damage and Failure Analysis of Structural Part 2024.10

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Event date： 2024.10

Language：English Presentation type：Oral presentation (keynote)

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Evaluation of Warpage Behavior of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-Layered Structures caused by Thermal Treatment

Tatsuhiko Mori, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

CPIT2024, New Method of Damage and Failure Analysis of Structural Part 2024.10

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Event date： 2024.10

Language：English Presentation type：Oral presentation (invited, special)

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Silver Decoration of TI-6Al-4V Orthopedic Implant Materials by Electroless Plating

Tomoya Higashi, Tomoyuki Kurioka, Satoshi Egawa, Toshitaka Yoshii, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone

CPIT2024, New Method of Damage and Failure Analysis of Structural Part 2024.10

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Event date： 2024.10

Language：English Presentation type：Oral presentation (general)

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Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers Invited

Tomoyuki Kurioka, Takumi Akiyama, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

CPIT2024, New Method of Damage and Failure Analysis of Structural Part 2024.10

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Investigation of Effects of Applied Voltage on Effective Young’s modulus of Ti/Au Multi-Layered Micro-Cantilevers Invited

Shunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Tenneti Devi Srujana, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

New Method of Damage and Failure Analysis of Structural Part 2024.10

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Language：English

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Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold and Gold-Copper Alloys by Micro-bending Test Toward MEMS Applications

Masato Sone, Ryohei Hori, Kazuya Fujita, Kosuke Suzuki, Ken Hashigata, Keisuke Asano, Tomoyuki Kurioka, Tso-Fu Mark Chang, Chun-Yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake

CPIT2024, New Method of Damage and Failure Analysis of Structural Part 2024.10

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Event date： 2024.10

Language：English Presentation type：Oral presentation (general)

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Atomic-sized Platinum Clusters Decorated Polyaniline Electrodes Toward Electrochemical Alcohol Sensing

Kengo Watanabe, Shohei Yoshida, Tomoyuki Kurioka, Chun-Yi Chen Parthojit Chakraborty, Tso-Fu Mark Chang, Takamichi Nakamoto, Masato Sone

38th Topical Meeting of the International Society of Electrochemistry 2024.9

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Event date： 2024.9

Language：English Presentation type：Poster presentation

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Strain Rate Sensitivity in Gold Micro-Pillars: Designing MEMS Components with Grain Boundary and Sample Size Effects

Shota Kanno, Taro Omura, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier) 2024.9

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Event date： 2024.9

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Evaluation of the Effect of Heat Treatment on the Structural Stability of Au Micro-Cantilevers with Ti/Au Multi-layered Structures

Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier) 2024.9

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Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers

Tatsuhiko Mori, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier) 2024.9

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Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing

Devi Srujana Tenneti, Kisuke Miyado, Chihaya Mukaide, Torauto Yamada, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito

50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier) 2024.9

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Effect of Perforated Proof-Mass Hole Size on Device Characteristics of Gold Single-Axis MEMS Accelerometer for Micro-g Level Sensing

Kisuke Miyado, Torauto Yamada, Devi Srujana Tenneti, Chihaya Mukaide, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito

50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier) 2024.9

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Development of Atomic Gold Clusters-Decorated Poly(o-methoxy aniline) and Poly(o-toluidine) Toward Applications in Electrochemical Gas Sensors

Keisuke Okamoto, Tomoyuki Kurioka, Kengo Watanabe, Chi-Hua Yu, Tso-Fu Mark Chang, Takamichi Nakamoto, Masato Sone

50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier) 2024.9

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Development of Ni-P/Nylon Fiber by Supercritical CO2 Catalyzation toward Weavable Devices

Kazuhiro Shibata, Tomoyuki Kurioka, Wan-Ting Chiu, Chun-Yi Chen, Tso-Fu Mark Chang, Nao Yoshida, Hiromichi Kurosu, Masato Sone

50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier) 2024.9

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Photocatalytic Activity Enhancement of ZnFe₂O₄ Nanocrystals by the Decoration with Gold Nanoparticle

Junan Wang, Jhen-Yang Wu, Chun-Yi Chen, Tomoyuki Kurioka, Masato Sone, Yung-Jung Hsu, Satoshi Okamoto, Tso-Fu Mark Chang

38th Topical Meeting of the International Society of Electrochemistry 2024.9

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Event date： 2024.9

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Photodegradation of Malachite Green by Gold Decorated Multiferroic NiFe2O4

Xinyu Jin, Jhen-Yang Wu, Tomoyuki Kurioka, Chun-Yi Chen, Masato Sone, Yung-Jung Hsu, Satoshi Okamoto, Tso-Fu Mark Chang

38th Topical Meeting of the International Society of Electrochemistry 2024.9

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Hybridization of Poly(3,4-ethylenedioxythiophene) with Au Particles via Oxidative Electrochemical Doping

Joji Higuchi, Tomoyuki Kurioka, Chun-Yi Chen, yoshishige Tsuchiya, Masato Sone, Tso-Fu Mark Chang

38th Topical Meeting of the International Society of Electrochemistry 2024.9

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Event date： 2024.9

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Dependence of Applied Voltage on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers

Shunkai Watanabe, Shunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Tenneti Devi Srujana, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier) 2024.9

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Morphology Control of Electropolymerized Polypyrrole by Supercritical Carbon Dioxide Emulsified Electrolyte

Vinaisuratern Punvinai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Yoshishige Tsuchiya, Masato Sone

38th Topical Meeting of the International Society of Electrochemistry 2024.9

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Event date： 2024.9

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Electrical Polarization-Induced Enhancement of Photocatalytic Activity in BiFeO3 Nanoparticles

Jhen-Yang Wu, Chun-Yi Chen, Xinyu Jin, Junan Wang, Wending Hou, Tomoyuki Kurioka, Masato Sone, Satoshi Okamoto, Yung-Jung Hsu, Tso-Fu Mark Chang

38th Topical Meeting of the International Society of Electrochemistry 2024.9

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Electrochemical Hybridization of Poly(3-methoxythiophene) with Au Particles Toward Applications in Electrochemical Alcohol Oxidation

Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Yoshishige Tsuchiya, Masato Sone

38th Topical Meeting of the International Society of Electrochemistry 2024.9

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Synthesis of Ti−Nb−Ta−Zr−O Nanotubes Array by Anodization and Its Application for Photoelectrochemical Water Splitting

Chun-Yi Chen, Yi-Hsuan Chiu, Tso-Fu Mark Chang, Masato Sone, Yung-Jung Hsu

2024 TMS Annual Meeting & Exhibition 2024.3

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Surface decorated BiFeO3 with Au nanoparticles for effective photodegradation

Jhen-Yang Wu, Tomoyuki Kurioka, Chun-Yi Chen, Masato Sone, Satoshi Okamoto, Tso-Fu Mark Chang, Yung-Jung Hsu

2024 TMS Annual Meeting & Exhibition 2024.3

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Event date： 2024.3

Language：English Presentation type：Oral presentation (general)

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Preparation and Characterization of Au@Cu2O Core-shell Nanoparticles and Their Application in Photocatalytic

Jhen-Yang Wu, Junan Wang, Chun-Yi Chen, Tomoyuki Kurioka, Yung-Jung Hsu, Masato Sone, Tso-Fu Mark Chang

Advance Materials Research Grand Meeting MRM2023/IUMRS-ICA 2023 2023.12

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Event date： 2023.12

Language：English Presentation type：Poster presentation

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A new evaluation method of martensitic transformation behavior using compositionally graded shape memory alloys

Hideki Hosoda, Taywin Buasri, Akira Umise, Masaki Tahara, Masato Sone

PRICM11 (The 11th Pacifi c Rim International Conference on Advanced Materials and Processing) 2023.11

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Supercritical CO2-Assisted Ni-P Electroless Plating of PEI 3D Components

Ami Iwasaki, Po-Wei Cheng, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Kei Takase, Hiroshi Ishihata, Masato Sone

Taiwan Association for Coating and Thin Film Technology (TACT2023) 2023.11

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Event date： 2023.11

Language：English Presentation type：Oral presentation (general)

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Catalytic Activity of Heterogeneous Atomic Metal Clusters Decorated Polyaniline for Electrochemical Oxidation of 1-Propanol

Shohei Yoshida, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Yung-Jung Hsu, Takamichi Nakamoto, Masato Sone, Tso-Fu Mark Chang

Taiwan Association for Coating and Thin Film Technology (TACT2023) 2023.11

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Event date： 2023.11

Language：English Presentation type：Poster presentation

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Evaluation of Cross-Sectional Geometry Effect of Au Polycrystalline Micro-cantilever on Bending Strength

Ryohei Hori, Kazuya Fujita, Chun-Yi Chen, Tomoyuki Kurioka, Tso-Fu Mark Chang, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

Taiwan Association for Coating and Thin Film Technology (TACT2023) 2023.11

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Event date： 2023.11

Language：English Presentation type：Oral presentation (general)

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Fabrication of Au/Poly(3-methoxythiophene) Hybrid Material toward Application in Electrocatalysts for Alcohol Oxidation

Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone

Taiwan Association for Coating and Thin Film Technology (TACT2023) 2023.11

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Event date： 2023.11

Language：English Presentation type：Oral presentation (general)

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Evaluation of Mechanical Properties of Ni-W Alloy by Pulsed Reverse Electrodeposition

Zeyu Gu, Yiming Jiang, Tomoyuki Kurioka, Chun-Yi Chen, Hwai En Lin, Xun Luo, Masato Sone, Tso-Fu Mark Chang

The 8th International Symposium on Biomedical Engineering International Workshop on Nanodevice Technologies 2023 2023.11

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Hydrothermal synthesis of Au decorated BiFeO3 for high-efficient photocatalytic degradation

Jhen-Yang Wu, Tomoyuki Kurioka, Chun-Yi Chen, Masato Sone, Satoshi Okamoto, Tso-Fu Mark Chang, Yung-Jung Hsu

Taiwan Association for Coating and Thin Film Technology (TACT2023) 2023.11

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Event date： 2023.11

Language：English Presentation type：Oral presentation (general)

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Preparation of polypyrrole film with various morphology using supercritical carbon dioxide assisted emulsified electrode

Punvinai Vinaisuratern, Tomoyuki Kurioka, Chun-Yi Chen, Yoshishige Tsuchiya, Masato Sone, Tso-Fu Mark Chang

Taiwan Association for Coating and Thin Film Technology (TACT2023) 2023.11

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Event date： 2023.11

Language：English Presentation type：Oral presentation (general)

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Supercritical CO2-Assisted Ni-P Electroless Plating of UHMW-PE Fibers

Hikaru Kondo, Tomoyuki Kurioka, Wan-Ting Chiu, Hwai En Lin, Chun-Yi Chen, Tso-Fu Mark Chang, Yamaguchi Machiko, Arisa Jinno, Hiromichi Kurosu, Masato Sone

Taiwan Association for Coating and Thin Film Technology (TACT2023) 2023.11

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Event date： 2023.11

Language：English Presentation type：Oral presentation (general)

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Mechanical Property Design of Multilayered Ti/Au Microcomponents by Electrodeposition Toward High-Sensitive MEMS Accelerometers Invited

Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-yi Chen, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake

44th ECS Meeting 2023.10

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Event date： 2023.10

Language：English Presentation type：Oral presentation (keynote)

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Design of Electrodeposited Materials for MEMS Sensors

Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-Yi Chen, Xun Luo, Daisuke Yamane, Hwai En Lin, Masato Sone

The 2023 International Conference on Green Electrochemical Technologies & The 2023 Annual Meeting of Electrochemical Society of Taiwan 2023.10

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Event date： 2023.10

Language：English Presentation type：Poster presentation

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Ti-Nb-Ta-Zr-O Nanotubes Array by Anodization and Its Application for Photoelectrochemical Water Splitting

Chun-Yi Chen, Yi-Hsuan Chiu, Tso-Fu Mark Chang, Masato Sone, Yung-Jung Hsu

The 2023 International Conference on Green Electrochemical Technologies & The 2023 Annual Meeting of Electrochemical Society of Taiwan 2023.10

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Event date： 2023.10

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Catalytic Activity of Atomic Metals Clusters Decorated Polyaniline Electrodes in Electrochemical Oxidation of 1-Propanol

Shohei Yoshida, Keisuke Okamoto, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Takamichi Nakamoto, Masato Sone, Tso-Fu Mark Chang

244th ECS Meeting 2023.10

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Event date： 2023.10

Language：English Presentation type：Poster presentation

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Hydrothermal fabrication of Au-BiFeO3 for superior photocatalytic degradation efficiency

Jhen-Yang Wu, Tomoyuki Kurioka, Chun-Yi Chen, Masato Sone, Tso-Fu Mark Chang, Yung-Jung Hsu

The 14th APCTP Workshop on Multiferroics 2023.10

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Event date： 2023.10

Language：English Presentation type：Poster presentation

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Atomic PdxAuy Clusters Decorated Polyaniline for Electrochemical Sensing of 1-Propanol

Shohei Yoshida, Keisuke Okamoto, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Takamichi Nakamoto, Masato Sone, Tso-Fu Mark Chang

49th international conference on Micro and Nano Engineering (MNE2023) 2023.9

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Event date： 2023.9

Language：English Presentation type：Poster presentation

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Electrodeposition of Nickel-Cobalt Alloys with additives and their Mechanical Properties

Yiming Jiang, Tomoyuki Kurioka, Chun-Yi Chen, Xun Luo, Daisuke Yamane, Masato Sone, Tso-Fu Mark Chang

74th Annual Meeting of the International Society of Electrochemistry 2023.9

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Event date： 2023.9

Language：English

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Development of Atomic Gold Decorated Polyaniline Derivative Electrodes toward Electrochemical Alcohol Sensing

Tomoyuki Kurioka, Keisuke Okamoto, Shohei Yoshida, Kengo Watanabe, Chun Yi Chen, Parthojit CHAKRABORTY, TAKAMICHI NAKAMOTO, Masato Sone, Tso-Fu Mark Chang

49th international conference on Micro and Nano Engineering (MNE2023) 2023.9

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Event date： 2023.9

Language：English Presentation type：Poster presentation

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Design Technique of Serpentine Spring with Half Edge Span Beam Length for High Sensitivity Gold Proof-mass MEMS Capacitive Accelerometer

Kisuke Miyado, Devi.Srujana Tenneti, Akira Onishi, Katsuyuki Machida, Tomoyuki Kurioka, Parthojit CHAKRABORTY, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito

Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials 2023.9

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Event date： 2023.9

Language：English

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Fabrication of Ti−Nb−Ta−Zr−O Nanotubes by Anodization for Hydrogen Production in Photoelectrochemical Water Splitting

Chun-Yi Chen, Yi-Hsuan Chiu, Tso-Fu Mark Chang, Masato Sone, Yung-Jung Hsu

74th Annual Meeting of the International Society of Electrochemistry 2023.9

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Event date： 2023.9

Language：English

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Ni-P Electroless Plating of Polyethylene Terephthalate Fibers with Various Twist Number Utilizing Supercritical CO2-Assisted Catalyzation

Hikaru Kondo, Tomoyuki Kurioka, Wan-Ting Chiu, Chun-Yi Chen, Tso-Fu Mark Chang, Roka Ueno, Arisa Jinno, Hiromichi Kurosu, Masato Sone

244th ECS Meeting 2023.9

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Event date： 2023.9

Language：English Presentation type：Poster presentation

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Strain Rate Dependency of Mechanical Property in Micro-Compression of Electrodeposited Gold toward Design of MEMS Components

Shota Kanno, Taro Omura, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone, Tso-Fu Mark Chang

49th international conference on Micro and Nano Engineering (MNE2023) 2023.9

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Event date： 2023.9

Language：English Presentation type：Poster presentation

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Dependence of Structural Design on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers

Shunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

49th international conference on Micro and Nano Engineering (MNE2023) 2023.9

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Event date： 2023.9

Language：English Presentation type：Poster presentation

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Comprehensive Evaluation of Geometric Effects on Long-Term Structure Stability of Ti/Au Multi-Layered Micro-Cantilevers toward Gold-MEMS Capacitive Accelerometer

Ryosuke Miyai, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone

49th international conference on Micro and Nano Engineering (MNE2023) 2023.9

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Event date： 2023.9

Language：English

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Metallization of UHMW-PE Fibers by Supercritical CO2 Catalyzation toward Weavable Devices

Hikaru Kondo, Tomoyuki Kurioka, Wan-Ting Chiu, Chun-Yi Chen, Tso-Fu Mark Chang, Yamaguchi Machiko, Arisa Jinno, Hiromichi Kurosu, Masato Sone

49th international conference on Micro and Nano Engineering (MNE2023) 2023.9

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Event date： 2023.9

Language：English Presentation type：Poster presentation

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Au Metallized Polyethylene Terephthalate (PET) by Supercritical CO2-assisted Metallization toward Flexible Electrochemical Biosensors

Chun-Yi Chen, Po-Wei Cheng, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone

Euroanalysis XXI 2023.8

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Event date： 2023.8

Language：English

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Gold Decorated Polyaniline toward Glucose Oxidation

Tso-fu Mark Chang, Keisuke Okamoto, Tomoyuki Kurioka, Chun-Yi Chen, Wan-Ting Chiu, Parthojit Chakraborty, Takamichi Nakamoto, Masato Sone

Euroanalysis XXI 2023.8

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Event date： 2023.8

Language：English

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Mechanical properties and corrosion behavior of AuCuAl-based biomedical shape memory alloys

Akira Umise, Wan-Ting Chiu, Masaki Tahara, Masato Sone, Kenji Goto, Takao Hanawa, Hideki Hosoda

Biomaterials International 2023 2023.7

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Event date： 2023.7

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Development of AuTiCo-base Biomedical Superelastic Alloys

Hideki Hosoda, Wan-Ting Chiu, Akira Umise, Masaki Tahara, Masato Sone, Kenji Goto, Takao Hanawa

Biomaterials International 2023 2023.7

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Event date： 2023.7

Language：English

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Mechanical properties enhancement of α-fcc + M dual-phase Au-Cu-Al alloys

Kang Wei Goo, Wan-Ting Chiu, Akira Umise, Masaki Tahara, Masato Sone, Kenji Goto, Takao Hanawa, Hideki Hosoda

Biomaterials International 2023 2023.7

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Event date： 2023.7

Language：English

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Functionalization of Polyethylene Terephthalate Fabrics with Au@Cu2O Core@Shell Nanocrystals for Environmental Purifications

Jhen-Yang Wu, Tomoyuki Kurioka, Chun-Yi Chen, Masato Sone, Tso-Fu Mark Chang, Yung-Jung Hsu

35th Topical Meeting of the International Society of Electrochemistry 2023.5

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Event date： 2023.5

Language：English Presentation type：Oral presentation (general)

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A Non-Distructive Resoneance Frequency Method to determine Effective young's Modulus of 3-Dimentional Multilayered Ti/Au Micro-cantilevers Toward Highly Sensitive MEMS Accerelometer" Invited

Masato Sone, Hitomi Watanabe, Kyotaro Nitta, Hideaki Nakajima, Tomoyuki Kurioka, Chun-Yi Chen, Parthojit Chakraborty, Daisuke Yamane, Hiroyuki Ito, Katsuyuki. Machida, Yoshihiro Miyake, Tso-Fu Mark Chang

NEW METHODS OF DAMAGE AND FAILURE ANALYSES OF STRUCTURAL PARTS 2022.9

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Event date： 2022.9

Language：English Presentation type：Oral presentation (invited, special)

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Mechanical Property Evaluation of Micro-sized Electrodeposited Noble Metals Toward Medical MEMS Device Application Invited

Masato Sone, Tso-Fu Mark Chang, Takashi Nagoshi, Katsuyuki Machida, Daisuke Yamane, Hiroyuki Ito, Kazuya Masu

The 168th Meeting of The Japan Institute of Metals and Materials 2021.3

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Event date： 2021.3

Language：Japanese Presentation type：Oral presentation (keynote)

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Crystal Structure Control in Electrodeposited Noble Metals and The Application into Medical MEMS Devices Invited

Masato Sone, Hao-Chun Tang, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Hiroyuki Ito, Kazuya Masu

The 166th Meeting of The Japan Institute of Metals and Materials 2020.3

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Event date： 2020.3

Language：Japanese Presentation type：Oral presentation (keynote)

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Recent progress in micro-mechanical property evaluation of electrodeposited metals for MEMS applications Invited

Masato Sone

ACEPS10-2019 2019.11

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Event date： 2019.11

Language：English Presentation type：Oral presentation (invited, special)

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Mechanical properties of electrodeposited gold-copper alloy by micro-compression test Invited

Masato Sone

The 2nd International Conference on Material Strength and Applied Mechanics 2019.5

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Event date： 2019.5

Language：English Presentation type：Oral presentation (invited, special)

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EFFECTIVE YOUNG’S MODULUS EVALUATION OF TI/AU MICRO STRUCTURES FOR MEMS ACCELEROMETER Invited

Masato Sone

8th research workshop "NEW METHODS OF DAMAGE AND FAILURE ANALYSIS OF STRUCTURAL PARTS" 2018.9

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Event date： 2018.9

Language：English Presentation type：Oral presentation (invited, special)

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Characteristics of Electroplated Gold Material with Multilayer Metal Technology for CMOS-MEMS Accelerometer Invited

Masato Sone

The 2nd Taiwan-Japan Joint Symposium in Taiwan, by The study group of the Integrated MEMS of JSAP & Nano Engineering and Microsystem Technology Conference 2018.6

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Event date： 2018.6

Language：English Presentation type：Oral presentation (invited, special)

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Temperature Dependence on Package Sealing Ambient of MEMS Inertial Sensor Fabricated by Multi-layer Metal Technology

Konishi Toshifumi, Yamane Daisuke, Safu Teruaki, Chen Chun-Yi, Chang Tso-Fu Mark, Ito Hiroyuki, Dosho Shiro, Ishihara Noboru, Sone Masato, Machida Katsuyuki, Masu Kazuya, Iida Shinichi

JSAP Annual Meetings Extended Abstracts 2018.3 The Japan Society of Applied Physics

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Event date： 2018.3

Language：Japanese

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Material Design of High Strength Electroplated Gold Alloy toward High-Sensitive MEMS Accelerometers Invited

Masato Sone

IUMRS International Conference in Asia (IUMRS-ICA 2017) 2017.11

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Event date： 2017.11

Language：English Presentation type：Oral presentation (invited, special)

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A Study of Long-Term Vibration Characteristics of MEMS Accelerometers Fabricated by Au Electroplating

Yamane Daisuke, Konishi Toshifumi, Safu Teruaki, Tachibana Koichiro, Teranishi Minami, Chen Chun-Yi, Chang Tso-Fu Mark, Sone Masato, Machida Katsuyuki, Masu Kazuya

JSAP Annual Meetings Extended Abstracts 2017.8 The Japan Society of Applied Physics

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Event date： 2017.8

Language：Japanese

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超臨界二酸化炭素エマルションを用いた半導体銅配線プロセスの研究 Invited

曽根正人

電気化学会第84回大会 2017.3

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Event date： 2017.3

Language：Japanese Presentation type：Oral presentation (invited, special)

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Young’s Modulus Evaluation of Electroplated Ti/Au Structures by Multi-layer Metal Technology (1)

Yamane Daisuke, Konishi Toshifumi, Safu Teruaki, Nakajima Hideaki, Teranishi Minami, Chen Chun-Yi, Chang Tso-Fu Mark, Sone Masato, Toshiyoshi Hiroshi, Masu Kazuya, Machida Katsuyuki

JSAP Annual Meetings Extended Abstracts 2017.3 The Japan Society of Applied Physics

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Event date： 2017.3

Language：Japanese

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Mechanical Property Evaluation of NiFeCoGa Shape Memory Alloys Using Micro-compression Specimens

Igawa Kengo, Yanagida Sari, Chang Tso-Fu Mark, Chen Chun-Yi, Tahara Masaki, Inamura Tomonari, Hosoda Hideki, Chernenko Volodymyr A., Sone Masato

JSAP Annual Meetings Extended Abstracts 2017.3 The Japan Society of Applied Physics

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Event date： 2017.3

Language：Japanese

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微小電子機械システムのための超臨界流体を用いた金属皮膜形成技術 Invited

曽根正人

日本化学会第6回CSJ化学フェスタ 2016.11

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Event date： 2016.11

Language：Japanese Presentation type：Oral presentation (invited, special)

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高感度MEMS加速度センサーのための金めっき材料の合成とその機械的特性評価 Invited

曽根正人

日本学術振興会・第172委員会 2016.10

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Event date： 2016.10

Language：Japanese Presentation type：Oral presentation (keynote)

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Nanoscale Wiring by Cu Electrodeposition in Supercritical CO2 Emulsified Electrolyte with Continuous-Flow Reaction System Invited

Masato Sone

2nd International Conference and Expo on Separation Techniques（Separation Techniques 2016） 2016.9

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Event date： 2016.9

Language：English Presentation type：Oral presentation (invited, special)

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Crystal Growth on Nanoscale Wiring by Cu Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte toward 3D Integrated Circuits Invited

Masato Sone

EMN2016, Collaborative Conference on Crystal Growth (3CG 2016) 2016.9

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Event date： 2016.9

Language：English Presentation type：Oral presentation (invited, special)

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Nanoscale Wiring by Cu Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte toward 3D Integrated Circuits Invited

Masato Sone

2016 Collaborative Conference on 3D and Materials Research (CC3DMR) 2016.6

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Event date： 2016.6

Language：English Presentation type：Oral presentation (invited, special)

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Integration of Biocompatible MEMS by Gold Electrodeposition Using Supercritical Carbon Dioxide Invited

Masato Sone

International Conference on Integrative Biology Summit, （Integrative Biology-2015） 2015.8

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Event date： 2015.8

Language：English Presentation type：Oral presentation (invited, special)

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Novel Approach to Integrate Biocompatible MEMS by Electrodeposition Using Supercritical Carbon Dioxide Invited

Masato Sone

Integrative Biology-2014, International Conference on Integrative Biology Summit 2014.8

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Event date： 2014.8

Language：English Presentation type：Oral presentation (invited, special)

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Nanoscale Wiring by Cu Electrodeposition in Supercritical Carbon Dioxide Emulsified Electrolyte Invited

Masato Sone

224th, ECS meeting 2013.11

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Event date： 2013.10 - 2013.11

Language：English Presentation type：Oral presentation (invited, special)

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Application of supercritical carbon dioxide into 3D integration of metal oxide/metal on polymer for biosensor and bioelectronics Invited

Masato Sone

Integrative Biology-2013, International Conference on Integrative Biology Summit, 2013.8

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Event date： 2013.8

Language：English Presentation type：Oral presentation (invited, special)

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Penetration of Ni-P Metal into Polymer by Electroless Deposition Utilizing Supercritical Carbon Dioxide Invited

Masato Sone

Biosensors & Bioelectronics-2013, 2nd International Conference and Exhibition on Biosensors & Bioelectronics 2013.6

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Event date： 2013.6

Language：English Presentation type：Oral presentation (invited, special)

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超臨界二酸化炭素エマルションを用いたCu電気めっき法による微細埋込配線技術 Invited

曽根正人

日本機械学会関東支部総会講演会 2013.3

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Event date： 2013.3

Language：Japanese Presentation type：Oral presentation (invited, special)

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Application of Electrodeposition using Supercritical Carbon Dioxide Emulsion into Integrated Circuit Technology Invited

Masato Sone

TSCFA2012, 2012.10

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Event date： 2012.10

Language：English Presentation type：Oral presentation (invited, special)

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Metallization method on polymeric materials by electroplating method using supercritical CO2 toward application into bioelectronics Invited

Masato Sone

Biosensors & Bioelectronics-2012, International Conference and Exhibition on Biosensors & Bioelectronics, 2012.5

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Event date： 2012.5

Language：English Presentation type：Oral presentation (invited, special)

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Metallization for integrated circuits via electroplating in SC-CO <inf>2</inf> emulsion

Masato Sone

Advanced Metallization Conference (AMC) 2010

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Event date： 2010

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2833 Effects of Processing Conditions on Adhesive Strength between Microsized Components and a Substrate for MEMS Devises

ISHIYAMA Chiemi, SONE Masato, HIGO Yakichi

The proceedings of the JSME annual meeting 2007 The Japan Society of Mechanical Engineers

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Event date： 2007

Language：Japanese

Adhesive bending strength between microsized photoresist and Si substrate is evaluated to clarify effects of supercritical (Sc)CO_2 Cleaning. Multiple micro-sized cylindrical specimens with a diameter of 125μm were fabricated from a epoxy type photoresist, SU-8 on a silicon chip by photolithography. Adhesive testing was performed under bend loading using a part of microsized cylinders on a Si substrate without Sc CO_2 cleaning at first. After the testing, the chip was cleaned by Sc CO_2, and then, the remaining specimens on the chip were tested. Adhesive bend stress of the specimens with Sc CO_2 cleaning is 18% higher than that without the cleaning. The delamination surfaces of the Sc CO_2 cleaning specimens were significantly different between the SU-8 specimens with and without the Sc CO_2 cleaning. All the results suggest that the Sc CO_2 cleaning strongly affects the adhesive properties between the micro-size photoresist and Si substrate.

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2840 The fatigue properties of the micro-sized specimen with stress concentrations

KOYAMA Satoru, ISHIYAMA Chiemi, SONE Masato, HIGO Yakichi

The proceedings of the JSME annual meeting 2007 The Japan Society of Mechanical Engineers

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Event date： 2007

Language：Japanese

Micro Electro Mechanical Systems (MEMS) have been applied to various field of devices, for example, micro-photonics devices and micro-medical devices. These MEMS devices include electronic circuits and micro-sized components, which consist of thin films formed on a substrate using the same fabrication techniques for semiconductor devices. The evaluation of mechanical properties for micro-sized material and micro-sized structures is therefore essential to design reliable and durable MEMS devices. During the MEMS fabrication process, we must consider the possibility of introducing sub-micron defects these defects affect on the strength of the final structure. We studied fatigue life by stress concentration for sample of 1/1000th size of traditional sized of specimen. The S-N curves of micro-sized materials are similar for bulk sized one. The scatter of fatigue life of micro-sized material does not exist.

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高耐久性を有するアルマイト・パラジウム複合薄膜の作成

瀬下雅博, 平井嵩之, Rahman Mizanur, 曽根正人, 桜井誠, 亀山秀雄

化学工学会研究発表講演要旨集 2006 公益社団法人化学工学会

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Event date： 2006

Language：Japanese

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Molecular design of nematic liquid crystalline polyolefins

NAGA Naofumi, SONE Masato, MURASE Shigemitsu

Proceedings of Japanese Liquid Crystal Society Annual meeting 2004 Japanese Liquid Crystal Society

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Event date： 2004

The liquid crystalline phase of polyolefins was first discovered in poly(methylene-1,3-cyclopentane) (PMCP), obtained by cyclization polymerization of 1,5-hexadiene (HD) using a zirconocene catalyst. PMCPS clearly show fluidity and briefrigence above the glass transition temperature, and the texture derives from nematic liquid crystalline phase. The high cyclization selectivity of HD units and high trans-content of 1,3-cyclopentane unit are needed to induce the liquid crystalline phase.

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Industrial property rights

貴金属またはその合金の微細結晶組織を有する金属材料

曽根正人, ツォーフマークチャン, 陳君怡, 町田克之, 山根大輔, 伊藤浩之, 益一哉

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Applicant：国立大学法人東京工業大学

Application no：特願2018-239826 Date applied：2018.12

Announcement no：特開2020-100874 Date announced：2020.7

Rights holder：国立大学法人東京工業大学

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微細素子およびその製造方法

小西敏文, 佐布晃昭, 町田克之, 曽根正人, チャンツォーフマーク, チェンチュンイー, 山根大輔, 益一哉

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Applicant：エヌ・ティ・ティ・アドバンステクノロジ株式会社, 国立大学法人東京工業大学

Application no：特願2017-055730 Date applied：2017.3

Announcement no：特開2018-158394 Date announced：2018.10

Patent/Registration no：特許6818299 Date registered：2021.1 Date issued：2021.1

Rights holder：エヌ・ティ・ティ・アドバンステクノロジ株式会社, 国立大学法人東京工業大学

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電気めっき方法及び電気めっき装置

樋口和人, 浅野佑策, 本間恭子, 平栗一磨, 浮田康成, 内田雅之, 中山俊弥, 町野まゆみ, 曽根正人, ツォーフマークチャン

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Applicant：株式会社東芝, 国立大学法人東京工業大学

Application no：特願2015-054850 Date applied：2015.3

Announcement no：特開2016-176088 Date announced：2016.10

Patent/Registration no：特許6400512 Date registered：2018.9 Date issued：2018.10

Rights holder：株式会社東芝, 国立大学法人東京工業大学

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Awards

Catalysts 2021 Best Paper Award

2021.3 MDPI Mechanistic insights into photodegradation of organic dyes using heterostructure photocatalysts

Yi-Hsuan Chiu, Tso-Fu Mark Chang, Chun-Yi Chen, Masato Sone, Yung-Jung Hsu

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IEEE SENSORS Best Industrial Paper Award

2016.11 IEEE SENSORS A Damping Constant Model for Proof-Mass Structure Design of MEMS Inertial Sensor by Multi-Layer Metal Technology

Toshifumi Konishi, Daisuke Yamane, Teruaki Safu, Masato Sone, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida

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Research Projects

Basic Section 34030:Green sustainable chemistry and environmental chemistry-related

Grant number：26K01540 2026.4 - 2030.3

Grant-in-Aid for Scientific Research (B) Grant-in-Aid for Scientific Research (B)

Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone

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Authorship：Coinvestigator(s)

Grant amount：\18330000 （ Direct Cost: \14100000 、 Indirect Cost：\4230000 ）

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Creation of Next-Generation Intelligent Fibers and Their Application to Weavable Systems

Grant number：25K00742 2025.4 - 2029.3

Japan Society for the Promotion of Science Kakenhi Grants (Academic Research Grants-in-Aid) Grant-in-Aid for Scientific Research (B)

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A study of single-atom electrodeposition reaction with supercritical nanoplating

Grant number：25K01542 2025.4 - 2029.3

Japan Society for the Promotion of Science Kakenhi Grants (Academic Research Grants-in-Aid) Grant-in-Aid for Scientific Research (B)

Masato Sone, Hiromichi Kurosu, Hideki Hosoda, Tso-Fu Mark Chang

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Authorship：Principal investigator

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3D Deformation Direct Analysis Method by Small Data AI and Principles for Development of Giant Magnetostrictive Composites

Grant number：25H00795 2025 - 2029.3

Japan Society for the Promotion of Science Kakenhi Grants (Academic Research Grants-in-Aid) Grant-in-Aid for Scientific Research (A)

HIdeki Hosoda, Kenji Suzuki, Masato Sone, Chiu Wan-Ting

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Development of an Innovative Balloon Expandable Transvascular Radiofrequency Ablation Device

Grant number：24K02390 2024.4 - 2027.3

Japan Society for the Promotion of Science Kakenhi Grants (Academic Research Grants-in-Aid) Grant-in-Aid for Scientific Research (B)

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Authorship：Coinvestigator(s)

Grant amount：\18590000 （ Direct Cost: \14300000 、 Indirect Cost：\4290000 ）

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Multimodality information carrier system by micro vibration detection system

2021.10 - 2027.3

Japan Science and Technology Agency (JST) Core Research for Evolutional Science and Technology (CREST) Information Carriers and Their Integrated Materials/Devices/Systems

Yoshihiro Miyake, Hiroyuki Ito, Masato Sone

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次世代インテリジェントテキスタイルの創製とウェアラブルシステムへの応用

Grant number：21H00807 2021.4 - 2025.3

日本学術振興会科学研究費助成事業基盤研究(B) 基盤研究(B)

黒子弘道, 曽根正人, Tso-Fu Mark Chang, 橋本朋子, 才脇直樹, 佐藤克成

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Authorship：Coinvestigator(s)

Grant amount：\15990000 （ Direct Cost: \12300000 、 Indirect Cost：\3690000 ）

次世代インテリジェントテキスタイルを実現するために、超臨界二酸化炭素を用いた触媒化技術によるフレキシブルセンサー用触媒電極としてのPETフィルムの機能化が実現した。また、白金は生体適合性のある金属だが、ポリマー材料の白金メタライゼーションは難しいことが知られている。超臨界二酸化炭素を用いた触媒化技術により、PETと白金の統合が実現された。この白金被覆したPETフィルムについて、SEM観察により表面の状態を明らかにし、さらに高次構造解析を固体ＮＭＲ法により詳細に行うことにより、触媒化とめっき処理による構造変化に関する知見を得た。また、センシング、光触媒による抗菌・抗ウイルス性、および身体情報提示の各機能を有するインテリジェントウェアラブル材料の基布となる各繊維を用いて、全反射測定法によるフーリエ変換赤外吸収スペクトル測定などにより、比較のための材料表面情報を得た。また各機能性ウェアラブル材料の安全性評価のための予備検討を進めた。
導電性に優れたスマートテキスタイルを情報処理技術と組み合わせることで、日々の暮らしを見守ったり日常生活を豊かにするインタフェースとして構築する研究に取り組んだ。特に、乳がん患者支援や水難事故防止といった、問題解決が困難な事象にもスマートテキスタイルを用いたシステムが役立つ事を示した。また、その成果を生かし、技術の国際標準化や啓蒙活動にも貢献することができた。
導電性繊維のウェアラブルヒータとしての応用にむけ、温度勾配のある面的な刺激の有効性を評価し、一様な刺激よりも効率良く温感を提示しうることが示唆された。また、筋電気刺激用ウェアラブル電極としての応用に向け、姿勢維持の補助デバイスとしての効果を確認した。さらにに、月経痛の再現デバイスとして、実際の月経痛よりも腹部の浅い位置ではあるが同等の強度を提示しうることを確認した。

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Study of Crystal Growth Mechanism in Nano Meter Scale on Supercritical Nano Plating

Grant number：23K21050 2021.4 - 2025.3

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

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Grant amount：\17290000 （ Direct Cost: \13300000 、 Indirect Cost：\3990000 ）

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次世代インテリジェントテキスタイルの創製とウェアラブルシステムへの応用

Grant number：23K20666 2021.4 - 2025.3

日本学術振興会科学研究費助成事業基盤研究(B)

黒子弘道, 曽根正人, 才脇直樹, 佐藤克成, チャンツォーフーマーク, 橋本朋子

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Grant amount：\15990000 （ Direct Cost: \12300000 、 Indirect Cost：\3690000 ）

次世代インテリジェントテキスタイルを実現するために、撚り数の異なるPETおよびナイロン繊維（ヤーン）を準備し、超臨界CO2触媒化手法を用いて、ニッケルリンめっきを試みた。この結果、撚り数の増加と共に、金属被覆が向上することを見出した。光学顕微鏡による金属被覆性および電気伝導性を計測し、双方が明確に向上することが明らかになった。繊維（ヤーン）一本で金属化することは困難であるが、本研究により実現できた。
これらのめっき繊維の表面の状態をSEM観察により明らかにし、さらに高次構造解析を固体ＮＭＲ法により詳細に行うことにより、触媒化とめっき処理による構造変化に関する知見を得た。
さらに応用研究としてスマートテキスタイルを用いて、１：基礎体温計測可能な下着や腹囲計測ベルトのような健康管理への応用、２：海中転落事故救助ライフベストやスマート防災服のような安全管理への応用、３：その他、エンターテインメント等への応用、の３つのカテゴリにおいて、従来実現できなかった機能を備えたシステムの提案・開発・評価に取り組んだ。また、導電性繊維をEMS（電気筋肉刺激）装置に応用する一例として、背中へのEMSで適切な座位姿勢の維持を支援するウェアラブルシステムを検討した。本年は特に、導電性繊維の配置位置の設計に向け、EMSの部位による効果の差、および長期的な効果について評価した。結果として、肩部よりも腰部に対するEMSが有効であること、および長期的な姿勢維持効果が示された。

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Study of Metal Growth Mechanism into Nano-space on Supercritical Nano-Plating

Grant number：21H01668 2021.4 - 2025.3

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B) Grant-in-Aid for Scientific Research (B)

Masato Sone, Tso-Fu Mark Chang, Hideki Hosoda, Hiromichi Kurosu

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Grant amount：\17290000 （ Direct Cost: \13300000 、 Indirect Cost：\3990000 ）

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Electrodeposition and Characterization of Atomic-Level Metal Clusters

Grant number：21K04827 2021.4 - 2024.3

日本学術振興会科学研究費助成事業基盤研究(C) 基盤研究(C)

チャンツォーフーマーク, 曽根正人

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Grant amount：\4160000 （ Direct Cost: \3200000 、 Indirect Cost：\960000 ）

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Balloon expandable radiofrequency ablation catheter to treat primary aldosteronism

Grant number：20H03613 2020.4 - 2023.3

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

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Grant amount：\17810000 （ Direct Cost: \13700000 、 Indirect Cost：\4110000 ）

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Development of Innovative Fabrication Method of Energy-Saving Electronic Device Component via 3D Metallic MEMS Fabrication process

2019.9 - 2022.3

Osamu Kudo, Ryu Maeda, Masanori Mizoguchi, Takashi Nagoshi, Tso-Fu Mark Chang, Masato Sone

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Authorship：Collaborating Investigator(s) (not designated on Grant-in-Aid)

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Creation of Next Generation Biocompatible Intelligent Fibers and Their Application to Interactive Wearable Systems

Grant number：17H01956 2017.4 - 2021.3

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B) Grant-in-Aid for Scientific Research (B)

KUROSU Hiromichi

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Grant amount：\17680000 （ Direct Cost: \13600000 、 Indirect Cost：\4080000 ）

We have successfully realized void free plating of Pt on silk fiber by using supercritical carbon dioxide and moreover electrochemical deposition of high functional inorganic oxide such as titanium oxide on the metal-plated fiber. Solid-state NMR measurements of these fibers provided information on the higher-order structural changes due to plating, which can be fed back for further functional improvements.
As an application of these intelligent fibers, we have been working on the development of sensing wear that can visualize heart rate, respiration, and exercise using smart textiles. We also showed the feasibility of health monitoring during sleep, which can store human information measured by sensing wear as big data in the cloud and detect abnormalities using statistical analysis. In addition, we showed the conditions for thermal stimulation that enhances comfort. We also showed the applicability to support for the visually impaired and communication support via stuffed animals.

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Development of Super-fine MEMS Conector for Robot by Laser Exposure Technology

2016.4 - 2019.3

Ministry of Economy, Trade and Industry Strategic Core Technology Advancement Program

Ryu Maeda, Osamu Kudo, Masato Sone,, Tso-Fu Mark Chang, Takashi Nagoshi

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Development of Nano-G Detection Method using Electroplated Au-Alloy with Controlled Crystal Structure

Grant number：15K17453 2015.4 - 2018.3

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B) Grant-in-Aid for Young Scientists (B)

Yamane Daisuke, MASU Kazuya, MACHIDA Katsuyuki, SONE Masato

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Grant amount：\4290000 （ Direct Cost: \3300000 、 Indirect Cost：\990000 ）

Noise of the developed Au-alloy MEMS accelerometer was experimentally evaluated to be below 30 nG/√Hz, and therefore we achieved the target resolution of below 0.1 uG. Long-term vibration test results showed the device functioned even after 10^6 vibration cycles that would usually cause fatigue in metal materials. Temperature test results exhibited the device survived after temperature change from -50 ℃ to 100 ℃. Furthermore, we developed a sensing module with the fabricated MEMS device and demonstrated acceleration sensing on human body. In terms of mechanical strength of Au-alloy, we successfully developed an Au-alloy material with the yield strength of above the target value (1 GPa). In conclusion, the developed Au-alloy device has a promising potential to detect nano-G.

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Evaluation of size effect and critical size for perfect shape recovery in shape memory alloy by micro-sized testing

Grant number：15K14159 2015.4 - 2017.3

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research Grant-in-Aid for Challenging Exploratory Research

Inamura Tomonari, HOSODA Hideki, TAHARA Masaki, SONE Masato

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Grant amount：\3900000 （ Direct Cost: \3000000 、 Indirect Cost：\900000 ）

Evaluation of size-effect of shape memory properties is necessary because the size of the material is becoming smaller in medical devices such as stents which is made of shape memory alloys. Effects of specimen size on shape memory properties is investigated in Au-based and Ti-based shape memory alloys using micro-testing machine in this study. The stress-induced martensite transformation behavior is independent of the specimen size (in the order of 10 micron meter), whereas superelastic deformation behavior seemed to be affected by the relative size between martensite plates and specimen size. Micro-sized specimen exhibited ductile plastic deformation behavior and perfect superelasticity even though the macro-sized specimen is brittle.

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Nano inertia detection device and system and the applications

2014.9 - 2021.9

Japan Science and Technology Agency Strategic Basic Research Program CREST (#14531864), JST

Masato Sone, Tso-Fu Mark Chang

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Quest for fundamental dynamics of domain homo interface in shape change materials and principles for high performance materials

Grant number：26220907 2014.5 - 2019.3

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (S) Grant-in-Aid for Scientific Research (S)

HOSODA Hideki, KANETAKA hiroyasu, CHANG tsu-fu mark, SHINOHARA yuri, CHERNEMKO volodymyr

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Grant amount：\182000000 （ Direct Cost: \140000000 、 Indirect Cost：\42000000 ）

In shape-change materials such as shape memory alloys and piezoelectric materials used for medical and energy applications, external fields such as force and magnetic field and material functions are deeply related each other。 The origin of the shape change is the domain rearrangement and phase transformation due to the motion of domain homo interface. In order to improve the material functions, the structure and dynamics of the domain homo interface have been clarified for the smooth motion with low friction. Principles for the control of interface structure and lattice softening from the first principle calculations have been established to reduce the friction of motion for the enhancement of higher functionality. Moreover, several multifunctional and high performance new shape change materials have been developed.

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Creation of next generation sensing fiber and application for wearable sensor

Grant number：26282013 2014.4 - 2017.3

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B) Grant-in-Aid for Scientific Research (B)

KUROSU Hiromichi

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Grant amount：\16900000 （ Direct Cost: \13000000 、 Indirect Cost：\3900000 ）

An electroless plating method involved Pd or Pt catalyzation in supercritical carbon dioxide (sc-CO2) was used for the metallization of nylon 6,6 fiber. 13C NMR measurements and quantum chemical calculations revealed that Pds are located in the vicinity of the carbonyl carbon by catalyzing in sc-CO2. Furthermore, our catalyzation methods using sc-CO2 could improve interaction between Pd and carbonyl carbon in nylon 6,6. We have considered the applications of conductive fibers and it was confirmed the possibility of using clothes and device as one unit by using conductive fiber for wiring. Furthermore, we performed prototype evaluation of two types of wearable computers which support human health.

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Research & Development of next generation environmental benign integrated circuit wiring technology toward zero-emission

2010.2 - 2013.3

Japan Society for the Promotion of Science NEXT program NEXT

Masato Sone

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Authorship：Principal investigator

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Crystallographic study of superfine step coverage in Supercritical Cu nanoplating

Grant number：20360325 2008 - 2010

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B) Grant-in-Aid for Scientific Research (B)

SONE Masato, HIGO Yakichi, ISHIYAMA Chiemi, SHIBATA Akinobu

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Grant amount：\19370000 （ Direct Cost: \14900000 、 Indirect Cost：\4470000 ）

We developed a new electroplating technology, "Supercritical Nanoplating (SNP)" that combines the merits of traditional electroplating and supercritical CO_2 techniques and can provide high uniform metal films. Moreover, we applied nanoparticle technology into SNP in order to conduct integrated circuit wiring, and denoted it as modified-SNP (M-SNP). The aim of this project is to clarify these elemental phenomena and extend crystallographic study of superfine step coverage of integrated circuit wiring. In this project, we succeeded in wiring Cu into ・60nm hole with high aspect ratio, and found that the wired Cu formed single crystal without void.

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Development of next generation environmental benign integrated circuit wiring apparatus toward zero-emission

2007.4 - 2009.3

New Energy and Industrial Technology Development Organization Practical Application of Next-generation Strategic Technologies Practical Application of Next-generation Strategic Technologies

Masato Sone

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Research & development of novel surface functionalization method onto plastic materials

2006.4 - 2008.3

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Study on Superfine Wire Manufacturing by Supercritical Nano-plating Method

Grant number：18360350 2006 - 2007

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B) Grant-in-Aid for Scientific Research (B)

SONE Masato, HIGO Yakichi, ISHIYAMA Chiemi, SHIBATA Akinobu

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Grant amount：\17400000 （ Direct Cost: \15600000 、 Indirect Cost：\1800000 ）

An innovative electroplating technology "Supercritical Nanoplating (SNP)", which is a hybrid of supercritical fluid and electroplating technology, has been proposed. In this technology, electroplating reactions are carried out in emulsion of supercritical carbon dioxide (CO_2) and electroplating solution with surfactants. The objective of this study is to develop a novel, superfine wire manufacturing technology by SNP with supercritical CO_2 washing. Firstly, we elucidated the plating reaction by measuring the current values in the emulsion using minute terminals connected to a programmable power supply, while simultaneously observing the dispersion state of the emulsion through a high-pressure view cell. The flow of current values in the emulsion system fluctuated, and the current value decreased together with the amplitude of the fluctuant current when the pressure was increased. The fluctuant current flow in the emulsion was concluded to play an important role in the fabrication of the nano grain nickel structure in the plated film. Secondly, the electroless plating reactions are carried out in an emulsion of sc-CO_2 and an electroless plating solution with surfactant. The Ni-P film obtained by this proposed technique was a uniform and conformal film without the pinholes that form from the hydrogen bubbles produced by the electrolysis of water, and without the nodules that form from the nuclear growth on the electroless plating reaction. Lastly, SNP was applied to the superfine wiring. The superfine Cu wiring by SNP successfully gave uniform, excellent Cu wire without void on the Si substrate with φ120 nm hole. Thus, SNP technology has great possibility to contribute to next generation integrated circuit technology.

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Development of Evaluation methods for mechanical properties in micro-sized components for MEMS devices

Grant number：17560611 2005 - 2006

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C)

ISHIYAMA Chiemi, HIGO Yakichi, SONE Masato

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Grant amount：\3400000 （ Direct Cost: \3400000 ）

Firstly, bending tests were developed using micro-sized bending specimens made of SU-8 photo resist to clarify the bending properties of a micro-sized polymer. A digital microscope was used for the in situ observation of elastic and plastic deformation of cantilever type bend specimens, which had been cut from sheets using a laser cutting system. Loads were applied to these cantilevers using a mechanical testing machine, which was developed by us for micro-sized materials for Micro-electro mechanical systems (MEMS). Load-displacement curve under bending load conditions in micro-sized SU-8 specimens clearly shows ductile manner, although SU-8 is usually brittle material. Shear band like deformation was appeared near root of the specimens after maximum load, and then this plastic deformation area was expanded during loading. The ductile behavior in a micro-sized SU-8 may be caused by regional shear band deformation near the root.
Secondly, micro-sized bending tests were performed using epoxy type photo-resist, SU-8, to clarify effects of a processing condition, UV exposure, Post baking and heat curing conditions on bending properties. Form the results in the first year, photo-masks for micro-sized bending specimens were planed. Load-displacement curves of most microsized SU-8 specimens show in an extremely ductile manner and all the specimens were failed by root of the beam. Young's modulus, Yield point and bending strength of SU-8 specimens remarkably increase with increasing exposure dose and heat curing. All the results clarify that bending properties of microsized photoresist are strongly affected by UV exposure and heat curing.

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Studies on Nano-Electroplating using Liquid Membrane of Electrolyte Solution in Supercritical CO_2

Grant number：17360367 2005 - 2006

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B) Grant-in-Aid for Scientific Research (B)

MIYATA Seizo, TAMAMOTO Takashi, IKEDA Koji, SONE Masato

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Grant amount：\15500000 （ Direct Cost: \15500000 ）

The authors have proposed an innovative electroplating technology "Zero-Emission Supercritical Nanoplating", which is a hybrid of supercritical fluid and electroplating technology. In this technology, electroplating reactions are carried out in emulsion of supercritical carbon dioxide (CO_2) and electroplating solution with surfactants. The plated film by this method did not have any pinholes, which come from hydrogen babbles produced by the electrolysis of water. Compared to electroplating from the solution only, higher quality nickel films have been prepared by this method, which have higher uniformity, smaller grain size (about 10 nm), and significantly higher Vickers hardness.
We have elucidated the ZSNP reaction by measuring the current values in the emulsion with functions of pressure, surfactant concentration, and the solution/ CO_2 ratio, using minute terminals connected to a programmable power supply, while simultaneously observing the dispersion state of the emulsion through a high-pressure view cell, which was designed and produced in this project. The flow of current values in the emulsion system fluctuated, and the current value decreased together with the amplitude of the fluctuant current when the pressure was increased. The fluctuant current flow in the emulsion was concluded to play an important role in the fabrication of the nano grain nickel structure in the plated film.
Moreover, we investigated an electroplating reaction in a series of emulsions between an electroplating solution and dense carbon dioxide (CO_2) using a novel fluorinated surfactant F(CF(CF_3)CF_2O)_3CF(CF_3)COO(CH_2CH_2O)_7CH_3. In ZSNP, the polymeric surfactant plays some important roles to stabilize the emulsion, to make the electric current fluctuant by the dispersion state and to control the quality of the plated film.
The electroless plating reactions are also carried out in an emulsion of supercritical carbon dioxide (sc-CO_2) and an electroless plating solution with surfactant. The Ni-P film obtained by this proposed technique was a uniform and conformal film without the pinholes that form from the hydrogen bubbles produced by the electrolysis of water, and without the nodules that form from the nuclear growth on the electroless plating reaction.

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Synthesis and Higher-order Structure of Main-chain Liquid Crystalline Polyolefin

Grant number：17350110 2005 - 2006

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

KUROSU Hiromichi, NAGA Naofumi, SONE Masato

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Grant amount：\14900000 （ Direct Cost: \14900000 ）

Poly (ethylene-co1,5-hexadiene) with the 1,5-hexadiene (HD) content of 1.8, 9.7 and 20.3% were prepared by copolymerization of ethylene and HD involving intermolecular cyclization. Higher-order structures and dynamics of these samples were studied by solid state NMR. The ^<13>C solid state NMR spectra and ^<13>C spin-lattice relaxation time (T_1) of the samples were measured. The methylene peaks of the observed ^<13>C CP/MAS NMR spectra for the all samples are decomposed into three peaks. Three decomposed peaks of the methylene carbon are designated peaks α, β, γ from downfield. For melt-quenched samples with HD content of 9.7 and 20.3%, the highest field peak γ (31.4ppm) shifts lower field as compared with the amorphous polyethylene peak. This shows that the conformation of peak γ is trans rich conformation as compared with that of noncrystalline region of polyethylene in the NMR time scale. Furthermore, the chemical shifts of peak γ of melt-quenched samples with high HD contents show downfield shift. This shows that incorporation of cyclopentane structure into polyethylene chain force to take trans rich conformation of noncrystalline region even in the melt-quenching process.

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Resaerch & development of High Ion conductive

2004.4 - 2005.3

New Energy and Industrial Technology Development Organization Strategic Practical Application Development for Polymer Electrolyte Fuel Cell Developmeny of Hidrogen Separation Metal This Film/Porous Alumina Composite Membrene for High Reliable/Efficiency Hydrogen Separation Reactor

Hideo Kameyama, Masato Sone

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Authorship：Coinvestigator(s)

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Study of electric conduction mechanisum on Supercritical Nano Plating to control nano-surface

Grant number：16710079 2004 - 2005

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B) Grant-in-Aid for Young Scientists (B)

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Grant amount：\3700000 （ Direct Cost: \3700000 ）

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Mechanical property evaluation of minitualized metallic glass and the sample-size effects

Grant number：15074205 2003 - 2007

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research on Priority Areas Grant-in-Aid for Scientific Research on Priority Areas

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Grant amount：\31200000 （ Direct Cost: \31200000 ）

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Development of Portable Experimental Apparatus on Education of Polymer Physics

Grant number：15360418 2003 - 2004

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B) Grant-in-Aid for Scientific Research (B)

SAITO Hiromu, MIYATA Seizo, WATANABE Toshiyuki, USUI Hiroaki, SONE Masato

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Grant amount：\15000000 （ Direct Cost: \15000000 ）

An innovative electroplating technology "Sustainable Supercritical Nanoplating (SSNP)", which is a hybrid of supercritical fluid and electroplating technology, has been developed. In this technology, electroplating reactions are carried out in emulsion of supercritical carbon dioxide (CO_2) and electroplating solution with surfactants. The plated film by this method did not have any pinholes, which come from hydrogen babbles produced by the electrolysis of water. Compared to electroplating from the solution only, higher quality nickel films have been prepared by this method, which have higher uniformity, smaller grain size (11.1nm), and significantly higher Vickers hardness. Moreover, the current efficiency and electric resistance value were measured as a function of CO_2 volume fraction in the emulsion with few kinds of surfactants. These results show that dense CO_2 beyond critical point of CO_2 is effective to form emulsion for the electroplating reaction. On the basis of the electrical conductivity measurements, the emulsion was classified into CO_2 in water(C/W) type in the wide range of the CO_2 volume fraction from 0 to 80 %. The discontinuous electrochemical reaction of the emulsion including supercritical carbon dioxide might play an important role to attain such excellent properties of the plated film.

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Directional organic electroluminescent device based on molecular synchronization phenomena

Grant number：11167220 1998 - 2002

Japan Society for the Promotion of Science Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research on Priority Areas

WATANABE Toshiyuki, MIYATA Seizo

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Grant amount：\49500000 （ Direct Cost: \49500000 ）

Novel bio-devices, electronics devices, all-optical devices and mechanical actuators based on molecular synchronization are proposed and their unique properties have been analyzed. The directional macroscopic responses are obtained from weak microscopic stimulus according to cascade, domino and resonance effects. The important research results are summarized as follows
1)Biocompatible polymer alloy membrane for implantable artificial oancreas are developed. This polymer pump was used as an artificial pancreas that spontaneously release insulin in response to the blood glucose level.
2)Bi-ionic actuator was developed using polypyrrole (PPy) films. PPy films prepared by electrochemical deposition of pyrrole and with various electrolyte like p-phenolsulfonic acid (PPS) and dodecylbenzene sulfonic acid (DBS) are found to show that electrochemical deformation of PPy/PPS film elongates upon oxidation, contrary to that of PPy/DBS film expands by oxidation. In addition, photoresponsive polymer gels having jungle-gym-like structure was synthesized and their photochemical and mechanical properties were investigated. Exposure of the amic acid gel containing azo-benzene moieties in DMF to UV light, which cause trans-cis photo isomerization. induce deflecting of amic acid gel toward to the irradiation direction of the actinic light. When the bent film was irradiated by visible light, which cause cis-trans back isomerization of the azo-benzene moiety, unbending of the amic acid gel immediately took place.
3)The polymer liquid crystal with azobenzene moiety in the side chain was prepared. It was confirmed from polarized UV absorption that the azobenzene moiety was homeotropically aligined in the film. A linear polarized beam was split into two beams and interfered in the film with crossing angle 180℃. Diffraction efficiency of this film was found to be near 90%.
4)Phnylethynyl anthracene unit was connected with diarylethene unit through adamantyl unit to control photo-induced modulations of fluorescence emission intensity and wavelength. Single molecule fluorescence imaging was demonstrated with a laser-scanning confocal microscope with a single photon counting detector and an excitaion Ar-ion laser. On-Off digital switching of single molecule fluorescence signals was observed with UV laser irradiation and its average time constant depend linearly with inverse of irradiation light power.
5)Highly reversible reflectanoe changes corresponding to photochromism or photoinduced electron transfer upon repeated fs laser excitation was demonstrated to fabricate ultra-fast all optical spatial light modulation based on guided mode.

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Teaching Experience

Advanced Human Centered Science and Biomedical Engineering I

2019.4 Institution：Tokyo Institute of Technology

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Chemical Reaction Dynamics

2017.6 Institution：Tokyo Institute of Technology

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Characterization of Metals and Alloys

2016.12 Institution：Tokyo Institute of Technology

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Characterization of Nanomaterials

2016.12 Institution：Tokyo Institute of Technology

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Thermodynamics of Phase Equilibria

2007.4 Institution：Tokyo Institute of Technology

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Media Coverage

Supercritical CO₂-Driven Morphological Control of Electrodeposited Polypyrrole for Enhanced Electrochemical Performance Promotional material

Advances in Engineering Advances in Engineering https://advanceseng.com/supercritical-co%E2%82%82-driven-morphological-control-electrodeposited-polypyrrole-enhanced-electrochemical-performance/ 2025.6

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Deformation Behavior of Electrodeposited Nano-Crystalline Ni Micro-pillar before/After MIcro-compression Testing Newspaper, magazine

Materia Japan Cover 2020.10

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SIM Image of 10 x 10 x 10 um Micro-pillar Fabricated from Ni Electroplated in High Speed Sulfamate Bath by FIB Newspaper, magazine

Materia Japan Cover 2020.9

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Sample Geometry Effect on Mechanical Property of Gold Micro-Cantilevers by Micro-Bending Test Newspaper, magazine

MRS Journal Highlights https://doi.org/10.1557/mrs.2020.209 2020.8

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Fully Depleted Ti−Nb−Ta−Zr−O Nanotubes: Interfacial Charge Dynamics and Solar Hydrogen Production Newspaper, magazine

ACS ACS Applied Materials & Interfaces Cover 2018.7

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高感度センサーで難病診断、非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価 Newspaper, magazine

読売新聞読売新聞非侵襲性高感度医用デバイスのための貴金属材料の作製とその材料評価, 第63回国立大学共同利用・共同研究拠点知の拠点セミナー 2017.7

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Micro-compression test using non-tapered micro-pillar of electrodeposited Cu Promotional material

Advances in ENGINEERING https://advanceseng.com/micro-compression-test-using-non-tapered-micro-pillar-of-electrodeposited-cu/ 2013.8

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Mechanical properties of nickel fabricated by electroplating with supercritical CO2 emulsion evaluated by micro-compression test using non-tapered micro-sized pillar Promotional material

Advances in Engineerings https://advanceseng.com/mechanical-properties-of-nickel-fabricated-by-electroplating-with-supercritical-co2-emulsion-evaluated-by-micro-compression-test-using-non-tapered-micro-sized-pillar/ 2013.7

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Author：Other

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